Passive vibration isolation device with three-degree-of-freedom magnetic spring

Abstract

The invention provides a passive vibration isolation device with a three-degree-of-freedom magnetic spring, particularly relates to a passive vibration isolation device capable of bearing the self weight of precision production and detection equipment and reducing ground vibration energy transmitted into the borne equipment, and belongs to the field of passive vibration control. The device comprises a rack, a load tray, a vibration isolation system, a three-degree-of-freedom magnetic spring assembly, a coupling mechanism, a horizontal vibration isolation assembly, a vertical vibration isolation assembly, a stator unit, a mover unit, a guide mechanism, a stator unit base, a stator magnet, a stator magnet pressing plate, a mover unit base, a mover magnet, a z-direction guide rail sliding block module, a z-direction motion platform and a y-direction guide rail sliding block module. A y-direction motion platform; and an x-direction guide rail slide block module. The device is provided with a plurality of pairs of rotor units and stator units in different directions, and the vibration isolation capacity of the device in the vertical direction and the horizontal direction is adjusted through the anisotropic rigidity between the rotor units and the stator units. The vibration isolation capacity is improved without influencing the bearing capacity, meanwhile, the multi-direction vibration isolation capacity is adjusted, and the design is simplified.

Description

TECHNICAL FIELD

[0001] The application provides a passive vibration isolation device with a three-degree-of-freedom magnetic spring, and particularly relates to a self-weight bearing precision production and detection equipment and reduction of ground vibration energy into the bearing equipment, and belongs to the field of passive vibration control. BACKGROUND

[0002] At present, the precision production and detection equipment widely uses the vibration isolator to bear the self-weight and reduce the influence of the ground vibration on the normal work. The bearing capacity and the vibration isolation capacity of the vibration isolator are mutually restricted, and it is difficult to simultaneously improve both. The vibration isolation performance between the vertical direction and the horizontal direction is also difficult to be considered, and the precision production and detection equipment cannot meet the increasing vibration isolation performance requirements. SUMMARY

[0003] In view of the above problems, the application provides a passive vibration isolation device with a three-degree-of-freedom magnetic spring. The application is realized by the following technical scheme:

[0004] A passive vibration isolation device with a three-degree-of-freedom magnetic spring includes a frame 1, a load tray 2, a vibration isolation system 3, a three-degree-of-freedom magnetic spring assembly 4, and a coupling mechanism 5. The vibration isolation system 3 includes a horizontal vibration isolation assembly 3-1 and a vertical vibration isolation assembly 3-2. The three-degree-of-freedom magnetic spring assembly 4 includes a stator unit 4-1, a mover unit 4-2, and a guide mechanism 4-3. The stator unit 4-1 includes a stator unit base 4-1-1, a stator magnet 4-1-2, and a stator magnet. Pressure plate 4-1-3; the moving unit 4-2 includes a moving unit base 4-2-1 and a moving magnet 4-2-2; the guiding mechanism 4-3 includes a z-axis guide rail slider module 4-3-1, a z-axis motion platform 4-3-2, a y-axis guide rail slider module 4-3-3, a y-axis motion platform 4-3-4, and an x-axis guide rail slider module 4-3-5; the relationship between the components is as follows: the frame 1 is connected to the horizontal vibration isolation component 3-1, and the horizontal vibration isolation component 3- Frame 1 is connected to vertical vibration isolation component 3-2, vertical vibration isolation component 3-2 is connected to coupling mechanism 5, coupling mechanism 5 is connected to load tray 2; frame 1 is connected to z-axis guide rail slider module 4-3-1, z-axis guide rail slider module 4-3-1 is connected to z-axis motion platform 4-3-2, z-axis motion platform 4-3-2 is connected to y-axis guide rail slider module 4-3-3, y-axis guide rail slider module 4-3-3 is connected to y-axis motion platform 4-3-4, y-axis motion platform 4-3-4 is connected to... The x-axis guide rail slider module 4-3-5 is connected to the load tray 2; the stator unit base 4-1-1 is connected to the frame 1; the stator magnet 4-1-2 is connected to the stator unit base 4-1-1; the stator pressure plate 4-1-3 is connected to the stator unit base 4-1-1, and simultaneously presses the stator magnet 4-1-2; the mover unit base 4-2-1 is connected to the load tray 2; and the mover magnet 4-2-2 is connected to the mover unit base 4-2-1.

[0005] The frame 1 is fixed to the ground and is at a certain height above the ground. Under the action of the guide mechanism 4-3, the load tray 2 has three degrees of freedom of movement relative to the frame 1 in the x, y and z directions.

[0006] The load tray 2 is connected to various protected objects, namely precision production and testing equipment, and transmits their gravity to the coupling mechanism 5. The coupling mechanism 5 transmits the gravity to the vertical vibration isolation mechanism 3-2. The vertical vibration isolation mechanism 3-2 transmits the gravity to the horizontal vibration isolation mechanism 3-1. The horizontal vibration isolation mechanism 3-1 transmits the gravity to the frame 1. The frame 1 transmits the gravity to the ground.

[0007] The horizontal vibration isolation assembly 3-1 has a horizontal movement freedom degree, so that a small range of horizontal movement of the vertical vibration isolation assembly 3-2 relative to the rack 1 is not limited, and the horizontal vibration isolation capability is played; the vertical vibration isolation assembly 3-2 has a z-direction movement freedom degree, so that a small range of z-direction movement of the coupling mechanism 5 relative to the horizontal vibration isolation mechanism 3-1 is not limited, and the z-direction vibration isolation capability is played; the coupling mechanism 5 has multiple rotation freedom degrees, so that any rotation of the load tray 2 relative to the vertical vibration isolation assembly 3-2 in a small range is not limited; under the action of the coupling mechanism 5, the movement of the vibration isolation system 3 does not conflict with the three-degree-of-freedom magnetic spring 4, and the three-degree-of-freedom magnetic spring 4 does not hinder the vibration isolation capability of the vibration isolation system 3.

[0008] The z-direction guide rail slider module 4-3-1 has a z-direction linear movement freedom degree, so that the z-direction movement platform 4-3-2 relative to the rack 1 is not limited in a small range of z-direction movement; the y-direction guide rail slider module 4-3-3 has a y-direction linear movement freedom degree, so that the y-direction movement platform 4-3-4 relative to the z-direction movement platform 4-3-2 is not limited in a small range of y-direction movement; the x-direction guide rail slider module 4-3-5 has an x-direction linear movement freedom degree, so that the load tray 2 relative to the y-direction movement platform 4-3-4 is not limited in a small range of x-direction movement.

[0009] The mover unit 4-2 is used in pairs with the stator unit 4-1, and there is a magnetic force action between them; the guide mechanism 4-3 limits the magnetic force action between the mover unit 4-2 and the stator unit 4-1 in three directions of x, y and z, and has anisotropy, in which one direction shows positive stiffness properties, and the remaining two directions show negative stiffness properties, and the stiffness sizes have obvious differences; a plurality of pairs of the mover unit 4-2 and the stator unit 4-1 are arranged in different directions of the rack 1 and the load tray 2, respectively, to adjust the vibration isolation capability of the horizontal vibration isolation assembly 3-1 and the vertical vibration isolation assembly 3-2, without affecting the carrying capacity.

[0010] Under the joint action of the vibration isolation system 3, the three-degree-of-freedom magnetic spring 4 and the coupling mechanism 5, the position of the load tray 2 is stabilized within a certain range, and the influence of ground vibration from the rack 1 on the load tray 2 and the protected object is suppressed.

[0011] The beneficial effects of the present application are as follows:

[0012] (1) The vibration isolation capability of the vibration isolator is improved while avoiding affecting the carrying capacity;

[0013] (2) The vibration isolation capability of the vibration isolator in the vertical and horizontal directions is adjusted respectively;

[0014] (3) A single three-degree-of-freedom magnetic spring assembly adjusts the vibration isolation capability in three directions, and other adjustment mechanisms are omitted, so that the design of the vibration isolator is simplified. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 The connection relationship of the main components of the device.

[0016] Figure 2 The structure of the device after being partially cut.

[0017] Figure 3 The pairing and arrangement of the stator unit 4-1 and the mover unit 4-2.

[0018] Figure 4 The specific pairing of the stator unit 4-1 and the mover unit 4-2.

[0019] The identification in the figure is: 1-frame, 2-load tray, 3-1-horizontal vibration isolation assembly, 3-2-vertical vibration isolation assembly, 4-1-stator unit, 4-2-mover unit, 4-3-1-z-direction guide rail slider module, 4-3-2-z-direction motion platform, 4-3-3-y-direction guide rail slider module, 4-3-4-y-direction motion platform, 4-3-5-x-direction guide rail slider module, 5-coupling mechanism, 4-1-1-stator unit base, 4-1-2-stator magnet, 4-1-3-stator magnet pressing plate, 4-2-1-mover magnet base, 4-2-2-mover magnet. DETAILED DESCRIPTION

[0020] The technical solutions of the present application are described clearly and completely below in combination with the drawings and embodiments. The described embodiments are only one embodiment of the present application, in which: the number of horizontal vibration isolation assemblies 3-1 is 3, the number of vertical vibration isolation assemblies 3-2 is 1, the number of stator units 4-1 is 4, the number of mover units 4-2 is 4, the number of stator magnets 4-1-2 used by each stator unit 4-1 is 2, the number of mover magnets 4-2-2 used by each mover unit 4-2 is 1, the number of z-direction guide rail slider modules 4-3-1 is 4, the number of y-direction guide rail slider modules 4-3-3 is 2, and the number of x-direction guide rail slider modules 4-3-5 is 2; the horizontal vibration isolation assembly 3-1, the vertical vibration isolation assembly 3-2, and the coupling assembly 5 are sequentially connected from the rack 1 to the load tray 2; and the guide mechanism 4-3 has the z-direction guide rail slider module 4-3-1, the y-direction guide rail slider module 4-3-3, and the x-direction guide rail slider module 4-3-5 sequentially from the rack 1 to the load tray 2. Based on the embodiments in the present application or the embodiments in which only the number of vertical vibration isolation assemblies, the number of horizontal vibration isolation assemblies, the number of stator units, the number of mover units, the number of stator magnets of each stator unit, the number of mover magnets of each mover unit, the number of z-direction guide rail slider modules, the number of y-direction guide rail slider modules, and the number of x-direction guide rail slider modules are changed, the embodiments in which only the connection order of the horizontal vibration isolation assembly, the vertical vibration isolation assembly, and the coupling mechanism is changed, and the embodiments in which only the arrangement order of the z-direction guide rail slider module, the y-direction guide rail slider module, and the x-direction guide rail slider module in the guide mechanism is changed, all other embodiments obtained by a person of ordinary skill in the art without making creative labor fall within the protection scope of the present application.

[0021] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms “upper”, “lower”, “left”, “right”, “horizontal plane”, “vertical direction”, “x-direction”, “y-direction”, and “z-direction” are based on the orientations or positional relationships shown in the drawings and are only for the convenience of describing the embodiments of the present application.

[0022] A passive vibration isolation device with three degrees of freedom magnetic spring, comprising a rack 1, a load tray 2, a vibration isolation system 3, a three degrees of freedom magnetic spring 4, a coupling mechanism 5, a horizontal vibration isolation assembly 3-1, a vertical vibration isolation assembly 3-2, a stator unit 4-1, a rotor unit 4-2, a guide mechanism 4-3, a stator unit base 4-1-1, a stator magnet 4-1-2, a stator magnet pressing plate 4-1-3, a rotor unit base 4-2-1, a rotor magnet 4-2-2, a z-direction guide rail slider module 4-3-1, a z-direction motion platform 4-3-2, a y-direction guide rail slider module 4-3-3, a y-direction motion platform 4-3-4, and an x-direction guide rail slider module 4-3-5, and the relationship between them is: the rack 1 is connected with the horizontal vibration isolation assembly 3-1, the horizontal vibration isolation assembly 3-1 is connected with the vertical vibration isolation assembly 3-2, the vertical vibration isolation assembly 3-2 is connected with the coupling mechanism 5, and the coupling mechanism 5 is connected with the load tray 2; the rack 1 is connected with the z-direction guide rail slider module 4-3-1, the z-direction guide rail slider module 4-3-1 is connected with the z-direction motion platform 4-3-2, the z-direction motion platform 4-3-2 is connected with the y-direction guide rail slider module 4-3-3, the y-direction guide rail slider module 4-3-3 is connected with the y-direction motion platform 4-3-4, the y-direction motion platform 4-3-4 is connected with the x-direction guide rail slider module 4-3-5, and the x-direction guide rail slider module 4-3-5 is connected with the load tray 2; the stator unit base 4-1-1 is connected with the rack 1, the stator magnet 4-1-2 is connected with the stator unit base 4-1-1, and the stator pressing plate 4-1-3 is connected with the stator unit base 4-1-1 while pressing the stator magnet 4-1-2; the rotor unit base 4-2-1 is connected with the load tray 2, and the rotor magnet 4-2-2 is connected with the rotor unit base 4-2-1.

[0023] The rack 1 is fixed to the ground and has a certain height from the ground, and under the action of the guide mechanism 4-3, the load tray 2 has three degrees of freedom of x, y and z relative to the rack 1.

[0024] The load tray 2 is connected to various protected objects, i.e. precision production and detection equipment, and transmits the gravity to the coupling mechanism 5, the coupling mechanism 5 transmits the gravity to the vertical vibration isolation mechanism 3-2, the vertical vibration isolation mechanism 3-2 transmits the gravity to the horizontal vibration isolation mechanism 3-1, the horizontal vibration isolation mechanism 3-1 transmits the gravity to the rack 1, and the rack 1 transmits the gravity to the ground.

[0025] The horizontal vibration isolation assembly 3-1 has a horizontal degree of freedom, so that the small range of horizontal motion of the vertical vibration isolation assembly 3-2 relative to the rack 1 is not limited, and the horizontal vibration isolation capability is played; the vertical vibration isolation assembly 3-2 has a z-direction degree of freedom, so that the small range of z-direction motion of the coupling mechanism 5 relative to the horizontal vibration isolation mechanism 3-1 is not limited, and the z-direction vibration isolation capability is played; the coupling mechanism 5 has a rotation degree of freedom, so that the arbitrary rotation of the load tray 2 relative to the vertical vibration isolation assembly 3-2 in a small range is not limited; under the action of the coupling mechanism 5, the motion of the vibration isolation system 3 and the three-degree-of-freedom magnetic spring 4 do not conflict, and the three-degree-of-freedom magnetic spring 4 does not hinder the vibration isolation capability of the vibration isolation system 3.

[0026] The z-direction guide rail slider module 4-3-1 has a linear motion degree of freedom in the z-direction, so that the small range of z-direction motion of the z-direction motion platform 4-3-2 relative to the rack 1 is not limited; the y-direction guide rail slider module 4-3-3 has a linear motion degree of freedom in the y-direction, so that the small range of y-direction motion of the y-direction motion platform 4-3-4 relative to the z-direction motion platform 4-3-2 is not limited; the x-direction guide rail slider module 4-3-5 has a linear motion degree of freedom in the x-direction, so that the small range of x-direction motion of the load tray 2 relative to the y-direction motion platform 4-3-4 is not limited.

[0027] The mover unit 4-2 and the stator unit 4-1 are used in pairs, and there is a magnetic force action between them; the guide mechanism 4-3 limits the magnetic force action between the mover unit 4-2 and the stator unit 4-1 in the x-direction, the y-direction and the z-direction, and has anisotropy, in one of which it shows positive stiffness properties, and in the other two it shows negative stiffness properties, and the stiffness size has obvious difference; a plurality of pairs of mover units 4-2 and stator units 4-1 are arranged in different directions of the rack 1 and the load tray 2, respectively adjusting the vibration isolation capability of the horizontal vibration isolation assembly 3-1 and the vertical vibration isolation assembly 3-2, without affecting the carrying capacity.

[0028] Under the joint action of the vibration isolation system 3, the three-degree-of-freedom magnetic spring 4 and the coupling mechanism 5, the position of the load tray 2 is stabilized within a certain range, and the influence of ground vibration from the rack 1 on the load tray 2 and the protected object is suppressed.

[0029] Preferably, the horizontal vibration isolation assembly 3-1, the vertical vibration isolation assembly 3-2 and the coupling mechanism 5 are connected in sequence from the rack 1 to the load tray 2, as shown in Figure 1 .

[0030] Preferably, the horizontal vibration isolation assembly 3-2 adopts a pull rod connected by two-end fish-eye joint bearings, and the vertical vibration isolation assembly 3-1 adopts a double-chamber air spring, as shown in Figure 2 .

[0031] Preferably, 3 horizontal vibration isolation assemblies 3-1 are used, and are evenly distributed in the circumferential direction.

[0032] Preferably, the coupling mechanism 5 uses a two-degree-of-freedom rigid joint that is orthogonal to the rotation axis, as shown in Figure 2

[0033] Preferably, the guiding mechanism 4-3 sequentially realizes z-direction movement, y-direction movement, and x-direction movement through the guide rail slider modules from the rack 1 to the load tray 2, as shown in Figure 2

[0034] Preferably, the z-direction guide rail slider module 4-3-1 uses a combination of a light lever and a ball linear bearing; the y-direction guide rail slider module 4-3-3 and the x-direction guide rail slider module 4-3-5 use a crossed roller linear guide rail slider module.

[0035] Preferably, 4 pairs of stator units 4-1 and mover units 4-2 are used, and are evenly distributed in the circumferential direction, as shown in Figure 3

[0036] Preferably, the stator magnet 4-1-2 and the mover magnet 4-2-2 use the same grade of neodymium iron boron as the material; the cross-sectional size of the stator magnet 4-1-2 is larger than that of the mover magnet 4-2-2; the length of the stator magnet 4-1-2 is larger than that of the mover magnet 4-2-2, as shown in Figure 4

[0037] Preferably, each stator unit 4-1 uses 2 stator magnets 4-1-2 of the same size, which are magnetized in the -x s direction; each mover unit 4-2 uses 1 mover magnet 4-2-2, which is magnetized in the +x s direction and is placed in the manner shown in Figure 4 s direction, the x s direction, and the y s direction, and the stiffness order is z s stiffness > x s stiffness > y s stiffness.

[0038] For those of ordinary skill in the art, changes, modifications, replacements, and variations made to the embodiments without departing from the principles and spirits of the present application are still within the protection scope of the present application.​​​​​

Claims

1. A passive vibration isolation device with a three-degree-of-freedom magnetic spring, characterized in that: The system includes a frame 1, a load tray 2, a vibration isolation system 3, a three-degree-of-freedom magnetic spring 4, a coupling mechanism 5, a horizontal vibration isolation component 3-1, a vertical vibration isolation component 3-2, a stator unit 4-1, a moving unit 4-2, a guide mechanism 4-3, a stator unit base 4-1-1, a stator magnet 4-1-2, a stator magnet pressure plate 4-1-3, a moving unit base 4-2-1, a moving magnet 4-2-2, a Z-axis guide rail slider module 4-3-1, a Z-axis motion platform 4-3-2, a Y-axis guide rail slider module 4-3-3, a Y-axis motion platform 4-3-4, and an X-axis guide rail slider module 4-3-5. The relationships between these components are as follows: the frame 1 is connected to the horizontal vibration isolation component 3-1; the horizontal vibration isolation component 3-1 is connected to the vertical vibration isolation component 3-2; the vertical vibration isolation component 3-2 is connected to the coupling mechanism 5; and the coupling mechanism 5 is connected to the load tray 2. The frame 1 is connected to the z-axis guide rail slider module 4-3-1, which is connected to the z-axis motion platform 4-3-2. The z-axis motion platform 4-3-2 is connected to the y-axis guide rail slider module 4-3-3, which is connected to the y-axis motion platform 4-3-4. The y-axis motion platform 4-3-4 is connected to the x-axis guide rail slider module 4-3-5, which is connected to the load tray 2. The stator unit base 4-1-1 is connected to the frame 1, the stator magnet 4-1-2 is connected to the stator unit base 4-1-1, and the stator pressure plate 4-1-3 is connected to the stator unit base 4-1-1, simultaneously pressing the stator magnet 4-1-2. The mover unit base 4-2-1 is connected to the load tray 2, and the mover magnet 4-2-2 is connected to the mover unit base 4-2-1. The frame 1 is fixed to the ground and is at a certain height above the ground. Under the action of the guide mechanism 4-3, the load tray 2 has three degrees of freedom of movement relative to the frame 1 in the x, y and z directions. The load tray 2 is connected to various protected objects, namely precision production and testing equipment, and transmits their gravity to the coupling mechanism 5. The coupling mechanism 5 transmits the gravity to the vertical vibration isolation mechanism 3-2. The vertical vibration isolation mechanism 3-2 transmits the gravity to the horizontal vibration isolation mechanism 3-1. The horizontal vibration isolation mechanism 3-1 transmits the gravity to the frame 1. The frame 1 transmits the gravity to the ground. The horizontal vibration isolation component 3-1 has a horizontal degree of freedom of motion, allowing the vertical vibration isolation component 3-2 to move freely within a small range of horizontal directions relative to the frame 1, thus maximizing its horizontal vibration isolation capability. The vertical vibration isolation component 3-2 has a z-degree of freedom of motion, allowing the coupling mechanism 5 to move freely within a small range of z-direction relative to the horizontal vibration isolation component 3-1, thus maximizing its z-direction vibration isolation capability. The coupling mechanism 5 has multiple rotational degrees of freedom, allowing the load tray 2 to rotate freely within a small range relative to the vertical vibration isolation component 3-2. Under the action of the coupling mechanism 5, the vibration isolation system 3 and the three-degree-of-freedom magnetic spring 4 do not conflict in their movements, and the three-degree-of-freedom magnetic spring 4 does not impede the vibration isolation capability of the vibration isolation system 3. The z-axis guide rail slider module 4-3-1 has a linear motion degree of freedom in the z-direction, allowing the z-axis motion platform 4-3-2 to move freely within a small range of z-direction relative to the frame 1; the y-axis guide rail slider module 4-3-3 has a linear motion degree of freedom in the y-direction, allowing the y-axis motion platform 4-3-4 to move freely within a small range of y-direction relative to the z-axis motion platform 4-3-2; and the x-axis guide rail slider module 4-3-5 has a linear motion degree of freedom in the x-direction, allowing the load tray 2 to move freely within a small range of x-direction relative to the y-axis motion platform 4-3-4. The moving unit 4-2 and the stator unit 4-1 are used in pairs and have magnetic interaction with each other. The guiding mechanism 4-3 restricts the magnetic interaction between the moving unit 4-2 and the stator unit 4-1 to three directions: x, y, and z, and has anisotropy. It exhibits positive stiffness in one direction and negative stiffness in the other two directions, with significant differences in stiffness magnitude. Multiple pairs of moving units 4-2 and stator units 4-1 are arranged in different directions of the frame 1 and the load tray 2 to adjust the vibration isolation capabilities of the horizontal vibration isolation component 3-1 and the vertical vibration isolation component 3-2 respectively, without affecting their load-bearing capacity. Under the combined action of the vibration isolation system 3, the three-degree-of-freedom magnetic spring 4, and the coupling mechanism 5, the position of the load tray 2 is stabilized within a certain range, suppressing the impact of ground vibration from the frame 1 on the load tray 2 and the protected object.

Images