Bonding machine capable of preventing materials from being stuck

Abstract

The invention relates to the technical field of bonding machines, and particularly discloses an anti-blocking bonding machine, which comprises a main case, a bonding machine body for bonding is arranged in the main case, a plurality of groups of second conveying shafts are rotatably connected in the main case, one side of the main case is communicated with a conveying frame, and a plurality of groups of second conveying shafts are arranged in the conveying frame. Multiple sets of first conveying shafts flush with the second conveying shafts are rotationally connected into the conveying frame, assembling grooves are symmetrically formed in the two sides of the conveying frame in a penetrating mode, two sets of assembling frames are arranged in the assembling grooves in the two sides in a sliding fit mode, and the first conveying shafts are rotationally connected between the assembling frames on the same side in the assembling grooves in the two sides; the first conveying shafts connected to the two sets of assembling frames are arranged in a staggered mode, the assembling frames are driven by hydraulic push rods to vertically move relative to the assembling grooves in a reciprocating mode, and the two sets of assembling frames ascend and descend alternately. According to the conveying device, conveying structures can be kept for conveying all the time, and meanwhile, due to alternation of the conveying structures, the problem of jamming can be avoided while stable conveying is kept.

Description

Technical Field

[0001] This invention relates to the field of bonding machine technology, specifically an anti-jamming bonding machine. Background Technology

[0002] The bonding machine is the core equipment in semiconductor back-end packaging. Its bonding mechanism is responsible for the precise picking up of the chip, high-speed and high-precision motion positioning, precise alignment, and final force-controlled pressing onto the substrate. In the bonding process, the chip and the substrate must be fixed precisely and stably to ensure high-precision alignment and reliable pressure application.

[0003] Chinese Patent Publication No. CN112158567B discloses a flexible bonding and fixing fixture, comprising: a frame, on which a conveyor line and a bonding station are provided, the conveyor line conveying a product to the bonding station; a clamping module, installed at the bottom of the bonding station, used to fix the product after it is conveyed to the bonding station; and a detection module, used to detect the clamping state of the clamping module and the positioning of the product during conveying; the clamping module includes a product separation structure and a pressing structure, the product separation structure driving the product and the tray carrying the product to move so that the product is placed on the pressing structure, the pressing structure pressing the product.

[0004] In this solution, during the sheet conveying process, if the friction at the contact points between the conveying structure and the conveyed product decreases during movement, conveying jams are likely to occur. Summary of the Invention

[0005] The purpose of this invention is to provide an anti-jamming bonding machine to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: An anti-jamming bonding machine includes a main chassis, within which a bonding machine body for bonding is housed. Multiple sets of second conveyor shafts are rotatably connected to the main chassis. A conveyor frame is connected to one side of the main chassis. Multiple sets of first conveyor shafts, flush with the second conveyor shafts, are rotatably connected to the conveyor frame. Assembly slots are symmetrically arranged on both sides of the conveyor frame. Two sets of assembly frames are slidably fitted in each of the two assembly slots. First conveyor shafts are rotatably connected between the assembly frames on the same side of the two assembly slots. The first conveyor shafts connected to the two sets of assembly frames are staggered. The assembly frames are driven by hydraulic push rods to reciprocate vertically relative to the assembly slots. The two sets of assembly frames alternately rise and fall. Positioning mechanisms for positioning the carrier are located on both sides above the second conveyor shafts in the main chassis.

[0007] As a further aspect of the present invention: the assembly groove includes a sliding groove extending horizontally on the conveyor frame, and a plurality of parallel guide grooves extending vertically above the sliding groove. The assembly frame includes a sliding plate slidably connected in the sliding groove, and two sliding plates in the sliding groove are slidably fitted together. A guide mounting plate extending above the sliding plate and opposite to the guide groove is provided and slidably fitted to the guide groove. The guide mounting plates on the two sliding plates are staggered and sequentially fitted in the guide groove. The first conveyor shaft is rotatably connected to the upper end of the guide mounting plate in the guide groove.

[0008] As a further aspect of the present invention: the positioning mechanism includes a first frame plate and a second frame plate, the first frame plate and the second frame plate are respectively provided with a first guide member and a second guide member, one end of the second frame plate is rotatably connected to the first frame plate through a connector, the other end of the second frame plate is rotatably connected to the main unit box through a rotating wheel axle, the main unit box is provided with an electric telescopic push rod, an installation frame is installed on the side of the first frame plate, and the end of the electric telescopic push rod is slidably adapted to the installation frame.

[0009] As a further aspect of the present invention: the first guide member includes a first pulley symmetrically rotatably connected in the first frame plate, a first conveyor belt is sleeved between the outer peripheries of the first pulley, and a strip-shaped pad is slidably fitted between the inner sides of the first conveyor belt, the strip-shaped pad being fixedly connected to the inner side wall of the first frame plate.

[0010] As a further aspect of the present invention: the second guide member includes a second pulley symmetrically rotatably connected in the second frame plate, a second conveyor belt is sleeved between the outer peripheries of the second pulley, and a strip-shaped pad is slidably fitted between the inner sides of the second conveyor belt, the strip-shaped pad being fixedly connected to the inner side wall of the second frame plate.

[0011] As a further aspect of the present invention: the connecting member includes a transmission wheel shaft coaxially connected to the shafts of a first pulley and a second pulley that are relatively close to each other, a connecting plate is rotatably connected to the periphery of the two transmission wheel shafts through bearings, and the periphery of the two transmission wheel shafts is connected by a belt drive.

[0012] As a further embodiment of the present invention: the mounting frame is symmetrically provided with guide rail grooves on both sides, and the output end of the electric telescopic push rod is symmetrically provided with guide protrusions that slide relative to the guide rail grooves. When the first frame plate and the second frame plate are aligned, the guide protrusions are located in the guide rail groove on the side closer to the second frame plate, and the lower end of the guide rail groove on the side away from the second frame plate is embedded with an elastic limiting member that is opposite to the first conveyor belt.

[0013] As a further aspect of the present invention: the guide rail groove includes a connected arc-shaped portion and a horizontal portion, with the arc-shaped portion located on the side near the second frame plate, and the elastic limiting member disposed on the lower side of the horizontal portion.

[0014] As a further aspect of the present invention: the elastic limiting member includes a "U"-shaped locking block, the "U"-shaped locking block having flanges extending symmetrically on both sides, an elastic telescopic rod connecting the flanges and the horizontal part of the guide rail groove, and the "U"-shaped locking block having locking teeth on the side facing the first conveyor belt.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: The sheet material is placed on the carrier and conveyed by the first conveyor shaft on one side of the conveyor frame to the second conveyor shaft in the main unit. Then, it is bonded by the bonding machine body in the main unit. During the conveying process, in order to avoid the problem of jamming during the conveying, a set of conveying structures is formed by the two assembly frames and the first conveyor shaft connecting the assembly frames. There are two such conveying structures between the two assembly slots, and the first conveyor shafts on the two sets of conveying structures are staggered and alternately raised and lowered. In this way, the carrier on which the sheet material is placed can maintain a continuous conveying structure. At the same time, because of the alternation of the conveying structure, even if the problem of slippage and jamming occurs, it can be solved by the change of the contact point between the carrier and the conveying structure during the alternation process. Because the center of gravity is constantly changing, this method can maintain stable conveying while avoiding jamming problems, thereby improving processing efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention.

[0017] Figure 2 for Figure 1 A magnified structural diagram of region A in the middle.

[0018] Figure 3 This is a schematic diagram of the assembly frame and the first conveyor shaft in this invention.

[0019] Figure 4 This is a schematic diagram of the positioning mechanism in this invention.

[0020] Figure 5 for Figure 4 A magnified structural diagram of region B in the middle.

[0021] Figure 6 for Figure 4 A magnified structural diagram of region C in the middle.

[0022] Figure 7 This is a schematic diagram of the structure of the electric telescopic push rod in this invention.

[0023] Figure 8This is a schematic diagram of the elastic limiting member in this invention.

[0024] In the diagram: 1-Main unit housing, 2-Conveyor frame, 3-Second conveyor shaft, 4-Positioning mechanism, 41-First frame plate, 4101-First pulley, 4102-First conveyor belt, 42-Mounting frame, 4201-Guide rail groove, 43-Electric telescopic push rod, 4301-Guide protrusion, 44-Second frame plate, 4401-Second pulley, 4402-Second conveyor belt, 4403-Rotating wheel axle, 45-Connector, 4501-Transmission wheel axle, 4502-Connecting plate, 46-Elastic limiting component, 4601-“U”-shaped locking block, 4602-Flange, 4603-Clamping tooth, 4604-Elastic telescopic rod, 5-Assembly groove, 51-Sliding groove, 52-Guide groove, 6-Assembly frame, 61-Sliding plate, 62-Guide mounting plate, 7-First conveyor shaft. Detailed Implementation

[0025] Please see Figures 1-3 In this embodiment of the invention, an anti-jamming bonding machine includes a main chassis 1. The main chassis 1 houses a bonding machine body for bonding, specifically a device commonly used in existing wafer bonding technology. The detailed structure and working principle are not described in detail here. Multiple sets of second conveyor shafts 3 are rotatably connected to the main chassis 1. A conveyor frame 2 is connected to one side of the main chassis 1. Multiple sets of first conveyor shafts 7, flush with the second conveyor shafts 3, are rotatably connected to the conveyor frame 2. Preferably, the ends of the second conveyor shafts 3 are synchronously connected via belts and driven by a motor to rotate synchronously in the same direction; the ends of the first conveyor shafts 7 are synchronously connected via belts and driven by a motor to rotate synchronously in the same direction. The conveyor frame 2 has symmetrically arranged assembly slots 5 on both sides. Two sets of assembly frames 6 are slidably fitted in each of the two assembly slots 5. The first conveyor shafts 7 are rotatably connected between the assembly frames 6 on the same side of the two assembly slots 5, and the first conveyor shafts 7 connected to the two sets of assembly frames 6 are staggered. Preferably, the assembly frame 6 is driven by a hydraulic push rod to reciprocate vertically relative to the assembly slot 5, and the two sets of assembly frames 6 are raised and lowered alternately. The main unit box 1 is provided with positioning mechanisms 4 on both sides above the second conveying shaft 3 for positioning the carrier.

[0026] In use, the sheet material is placed on the carrier and conveyed by the first conveyor shaft 7 on one side of the conveyor frame 2 to the second conveyor shaft 3 in the main unit box 1. Then, it is bonded by the bonding machine body in the main unit box 1. During the conveying process, in order to avoid jamming, a set of conveying structures is formed by the first conveyor shaft 7 connecting the two assembly frames 6. There are two such conveying structures between the two assembly slots 5, and the first conveyor shafts 7 on the two sets of conveying structures are staggered and alternately raised and lowered. In this way, the carrier on which the sheet material is placed can keep the conveying structure conveying continuously. At the same time, because of the alternation of the conveying structure, even if slippage or jamming occurs, it can be solved by the change of the contact point between the carrier and the conveying structure during the alternation. Because the center of gravity is constantly changing, this method can maintain stable conveying and avoid jamming, thereby improving processing efficiency.

[0027] The assembly groove 5 includes a horizontally extending sliding groove 51 on the conveyor frame 2. Above the sliding groove 51, multiple sets of parallel guide grooves 52 extend vertically. The assembly frame 6 includes a sliding plate 61 slidably connected to the sliding groove 51. Two sliding plates 61 in the sliding groove 51 are slidably fitted together. Above the sliding plate 61 and opposite to the guide groove 52, a guide mounting plate 62 extends and slidably fits against the guide groove 52. The guide mounting plates 62 on the two sliding plates 61 are staggered and sequentially fitted in the guide groove 52. The first conveyor shaft 7 is rotatably connected to the upper end of the guide mounting plate 62 in the guide groove 52. In this configuration, the first conveyor shaft 7 is naturally and alternately positioned between the two guide mounting plates 62. The two sliding plates 61 on both sides and the guide mounting plates 62, together with the first conveyor shaft 7, form a conveying structure. This design ensures that the two conveying structures do not interfere with each other during alternating lifting and lowering. The sliding groove 51, connected to a hydraulic push rod at its bottom, provides stable support for lifting and lowering. The first conveyor shaft 7 on both conveying structures can be driven to rotate by a motor, and the transmission belts and motors of the two conveying structures can be positioned on opposite sides, thus preventing interference during alternating lifting and lowering. During alternating conveying, the rotating conveyor on the first conveyor shaft 7 can change its contact point while maintaining stable conveying. Even if slippage occurs between the conveyor and the first conveyor shaft 7, causing jamming, this can be overcome by changing the contact point, thereby reducing the occurrence of jamming problems.

[0028] Furthermore, during bonding, the carrier needs to be positioned. Generally, clamping rods are installed on both sides of the conveyor line for centering and then securing. If the carrier is not properly aligned during transport, it may jam at the edges during centering. Therefore, if... Figures 4-8As shown, the positioning mechanism 4 includes a first frame plate 41 and a second frame plate 44. The first frame plate 41 and the second frame plate 44 are respectively provided with a first guide and a second guide. One end of the second frame plate 44 is rotatably connected to the first frame plate 41 through a connector 45. The other end of the second frame plate 44 is rotatably connected to the main unit box 1 through a rotating wheel axle 4403. An electric telescopic push rod 43 is provided inside the main unit box 1. An installation frame 42 is installed on the side of the first frame plate 41. The end of the electric telescopic push rod 43 is slidably adapted to the installation frame 42.

[0029] The first and second guide members in the first and second mounting plates 41 and 44 can be driven by a motor to achieve a synchronous conveying speed identical to that of the second conveying shaft 3, or a motor can be omitted. In use, the electric telescopic push rod 43 can be activated to move the first mounting plate 41 relative to the other side of the main unit 1. The first mounting plate 41 is restricted by the second mounting plate 44 during movement, causing the end of the electric telescopic push rod 43 to slide within the mounting frame 42. Simultaneously, the end of the first mounting plate 41 pulls the second mounting plate 44 to rotate via the connecting piece 45. This allows the carrier to be guided by the inclined second guide members. The two second guide members form a funnel shape, facilitating the carrier's placement between the first guide members, thus ensuring carrier centering and preventing jamming.

[0030] The first guide component includes a first pulley 4101 symmetrically rotatably connected to the first frame plate 41. A first conveyor belt 4102 is sleeved between the outer peripheries of the first pulley 4101. A strip-shaped pad is slidably fitted between the inner sides of the first conveyor belt 4102, and the strip-shaped pad is fixedly connected to the inner wall of the first frame plate 41. The second guide component includes a second pulley 4401 symmetrically rotatably connected to the second frame plate 44. A second conveyor belt 4402 is sleeved between the outer peripheries of the second pulley 4401. A strip-shaped pad is slidably fitted between the inner sides of the second conveyor belt 4402, and the strip-shaped pad is fixedly connected to the inner wall of the second frame plate 44. In use, the carrier is transported by the first conveyor shaft 7 and the second conveyor shaft 3. When it comes into contact with the surface of the inclined second conveyor belt 4402, it can be guided between the first conveyor belt 4102 by the cooperation of the second pulley 4401 and the second conveyor belt 4402, and is clamped between the first conveyor belt 4102, thereby facilitating subsequent bonding processing. This setup provides stable guidance, ensuring effective centering while preventing the vehicle from being pushed and tilted during clamping, thus avoiding being blocked at the side of the withdrawing clamping section.

[0031] The connecting component 45 includes a transmission shaft 4501 coaxially connected to the shafts of a first pulley 4101 and a second pulley 4401 that are relatively close to each other. A connecting plate 4502 is rotatably connected to the periphery of the two transmission shafts 4501 via bearings, and the periphery of the two transmission shafts 4501 is connected via belt drive. A motor can be connected to the periphery of the rotating shaft 4403 via belt drive, so that both the second conveyor belt 4402 and the first conveyor belt 4102 can synchronously transport the carrier. When the first support plate 41 is pushed relatively close to the carrier by the electric telescopic push rod 43, the connecting plate 4502 facilitates the relative rotation of the first support plate 41 and the second support plate 44. The second support plate 44 can rotate relative to the main housing 1 via the rotating shaft 4403. This provides both guidance and positioning for the carrier, making it convenient to use and not affecting the transport of the carrier.

[0032] To improve the stability of the relative movement of the first support plate 41, the mounting frame 42 is symmetrically provided with guide rail grooves 4201 on both sides. The output end of the electric telescopic push rod 43 is symmetrically provided with guide protrusions 4301 that slide relative to the guide rail grooves 4201. When the first support plate 41 and the second support plate 44 are aligned, the guide protrusions 4301 are located in the guide rail grooves 4201 on the side closer to the second support plate 44. The lower end of the guide rail grooves 4201 on the side away from the second support plate 44 is embedded with an elastic limiting member 46 that is opposite to the first conveyor belt 4102. When the carrier is not positioned, the elastic limiting member 46 does not fix the first conveyor belt 4102. When the carrier contacts the first conveyor belt 4102, the first conveyor belt 4102, in conjunction with the second conveyor shaft 3, can transport the carrier and position it at the same time. When the output end of the electric telescopic push rod 43 pushes the first frame plate 41 away from the main unit box 1, the guide protrusion 4301 slides in the guide rail groove 4201 and contacts and squeezes the elastic limiting member 46, thereby locking the first conveyor belt 4102. Thus, the carrier can be clamped and fixed in position, and the positioning is completed. This setting can facilitate positioning and make it convenient for the carrier to be moved to a suitable position for bonding processing.

[0033] Preferably, the guide rail groove 4201 includes a connected arc-shaped portion and a horizontal portion. The arc-shaped portion is an arc with a central angle of 90° and is located on the side closer to the second support plate 44. The elastic limiting member 46 is disposed on the lower side of the horizontal portion. In use, the output end of the electric telescopic push rod 43 is extended, and the guide protrusion 4301 gradually moves from the arc-shaped portion to the horizontal portion. This arrangement can prevent the first support plate 41 from getting stuck when it is aligned with the second support plate 44. After the guide protrusion 4301 moves to the horizontal portion, it can squeeze the elastic limiting member 46 and press and lock the first conveyor belt 4102.

[0034] The elastic limiting member 46 includes a U-shaped locking block 4601. Flanges 4602 extend symmetrically from both sides of the U-shaped locking block 4601. An elastic telescopic rod 4604 connects the flanges 4602 and the horizontal portion of the guide rail groove 4201. The U-shaped locking block 4601 has locking teeth 4603 on the side facing the first conveyor belt 4102. When the output end of the electric telescopic push rod 43 moves above the horizontal U-shaped locking block 4601, the electric telescopic push rod 43 continues to extend, squeezing and stretching the elastic telescopic rod 4604. The locking teeth 4603 then press against the first conveyor belt 4102, thereby achieving positioning of the carrier. After processing is complete, the electric telescopic push rod 43 retracts, and the U-shaped locking block 4601, under the elastic retraction of the elastic telescopic rod 4604, moves away from the first conveyor belt 4102 along with the locking teeth 4603.

Claims

1. A bonding machine for preventing material jamming, comprising a main chassis, wherein a bonding machine body for bonding is disposed within the main chassis, a plurality of second conveyor shafts are rotatably connected to the main chassis, a conveyor frame is disposed on one side of the main chassis, and a plurality of first conveyor shafts flush with the second conveyor shafts are rotatably connected to the conveyor frame, characterized in that... The conveyor frame has symmetrical through-holes on both sides, and two sets of assembly frames are slidably fitted in each of the two assembly slots. The first conveyor shaft is rotatably connected between the assembly frames on the same side of the two assembly slots. The first conveyor shafts connected to the two sets of assembly frames are staggered. The assembly frames are driven by hydraulic push rods to move back and forth vertically relative to the assembly slots, and the two sets of assembly frames alternately rise and fall.

2. The anti-jamming bonding machine according to claim 1, characterized in that, The assembly slot includes a horizontally extending sliding slot on the conveyor frame. Above the sliding slot, multiple sets of parallel guide slots extend vertically. The assembly frame includes a sliding plate slidably connected to the sliding slot. Two sliding plates in the sliding slot are slidably fitted together. Above the sliding plate and opposite to the guide slot, a guide mounting plate extends and slidably fits the guide slot. The guide mounting plates on the two sliding plates are staggered and sequentially fitted in the guide slot. The first conveyor shaft is rotatably connected to the upper end of the guide mounting plate in the guide slot.

3. The anti-jamming bonding machine according to claim 2, characterized in that, The main chassis is equipped with positioning mechanisms on both sides above the second conveyor shaft for positioning the vehicle.

4. The anti-jamming bonding machine according to claim 3, characterized in that, The positioning mechanism includes a first frame plate and a second frame plate. The first frame plate and the second frame plate are respectively provided with a first guide component and a second guide component. One end of the second frame plate is rotatably connected to the first frame plate through a connector. The other end of the second frame plate is rotatably connected to the main unit box through a rotating wheel axle. An electric telescopic push rod is provided inside the main unit box. An installation frame is installed on the side of the first frame plate. The end of the electric telescopic push rod is slidably adapted to the installation frame.

5. The anti-jamming bonding machine according to claim 4, characterized in that, The first guide includes a first pulley symmetrically rotatably connected in the first frame plate, a first conveyor belt is sleeved between the outer peripheries of the first pulley, and a strip-shaped pad is slidably fitted between the inner sides of the first conveyor belt, the strip-shaped pad being fixedly connected to the inner side wall of the first frame plate.

6. The anti-jamming bonding machine according to claim 5, characterized in that, The second guide includes a second pulley symmetrically rotatably connected in the second frame plate, a second conveyor belt is sleeved between the outer peripheries of the second pulley, and a strip-shaped pad is slidably fitted between the inner sides of the second conveyor belt, the strip-shaped pad being fixedly connected to the inner side wall of the second frame plate.

7. The anti-jamming bonding machine according to claim 6, characterized in that, The connecting component includes a transmission wheel shaft coaxially connected to the shafts of a first pulley and a second pulley that are relatively close to each other. A connecting plate is rotatably connected to the periphery of the two transmission wheel shafts through bearings, and the periphery of the two transmission wheel shafts is connected by a belt drive.

8. The anti-jamming bonding machine according to claim 5, characterized in that, The mounting frame is symmetrically provided with guide rail grooves on both sides. The output end of the electric telescopic push rod is symmetrically provided with guide protrusions that slide relative to the guide rail grooves. When the first frame plate and the second frame plate are aligned, the guide protrusions are located in the guide rail groove on the side closer to the second frame plate. The lower end of the guide rail groove is embedded with an elastic limiting member that is opposite to the first conveyor belt on the side away from the second frame plate.

9. The anti-jamming bonding machine according to claim 8, characterized in that, The guide rail groove includes a connected arc-shaped portion and a horizontal portion, with the arc-shaped portion located on the side closer to the second frame plate, and the elastic limiting member disposed on the lower side of the horizontal portion.

10. A bonding machine for preventing material jamming according to claim 8 or 9, characterized in that, The elastic limiting component includes a "U"-shaped locking block, with flanges extending symmetrically on both sides of the "U"-shaped locking block. An elastic telescopic rod is connected between the flanges and the horizontal part of the guide rail groove. The "U"-shaped locking block has locking teeth on the side facing the first conveyor belt.

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