Automatic hafnium tetrachloride packaging equipment

Abstract

The application discloses a hafnium chloride automatic packaging equipment, which comprises a glove box in which inert gas can be filled, the glove box comprises a transfer cavity and a main cavity, the transfer cavity is an independent cavity body and is arranged at a feeding end of the main cavity; the transfer cavity comprises a vacuum cavity and a plurality of cleaning cavities in sequence along the length direction of the main cavity, and the tail cleaning cavity is communicated with the main cavity. By arranging the independent transfer cavity, the transfer cavity comprises the vacuum cavity and the plurality of cleaning cavities in sequence along the length direction of the main cavity, and is provided with a first air isolation door, a second air isolation door and a vacuumizing assembly, so that a multi-stage material purification buffer zone is jointly constructed. After the material bottle is sent into the transfer cavity through the first conveying element, the material bottle firstly enters the vacuum cavity, the vacuumizing program is started after the second air isolation door is closed, most of the gas and moisture are effectively removed, then the material bottle sequentially passes through the plurality of cleaning cavities, and the circulating purification process of "vacuumizing-inert gas filling" is repeated in each stage cavity, so that the residual oxygen and moisture in the surface and the environment are gradually removed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of hafnium tetrachloride, in particular to a hafnium tetrachloride automatic packaging equipment. BACKGROUND

[0002] Hafnium tetrachloride (HfCl4) is a high-purity material extremely sensitive to water and oxygen, and its packaging must be carried out in an inert gas glove box continuously isolated from air. In order to achieve efficient continuous production, the industry is trying to use a conveyor belt to automatically send material bottles into the transfer cabin of the glove box. However, this automatic feeding method poses the following problems for the opening and closing system of the transfer cabin door;

[0003] The traditional transfer cabin door control system is usually composed of a pressure sensor, a logic controller and a pneumatic / electric actuator. Its working process is "detecting pressure-logical judgment-sending instructions-driving execution", which causes inherent delay in system response. In the scenario of high-frequency and fast opening and closing to match the continuous feeding of the conveyor belt, this slow response seriously restricts the production efficiency of the whole line, forming a "speed bottleneck" in the automatic process;

[0004] When using a conveyor belt to feed through the cabin, the traditional translational or lifting door body cannot form an effective seal with the moving conveyor belt and the bottles carried by it. There is a gap between the door body and the conveyor belt, which will become a leakage point when the transfer cabin is being evacuated and filled with inert gas, not only affecting the purification efficiency, but also causing continuous exchange of internal and external environmental gases, greatly reducing the isolation function of the transfer cabin. SUMMARY

[0005] In view of the above, the present application aims to solve the above problems by providing a hafnium tetrachloride automatic packaging equipment.

[0006] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is as follows: a hafnium tetrachloride automatic packaging equipment, comprising a glove box in which inert gas can be filled, the glove box comprising a transfer cavity and a main chamber, the transfer cavity being an independent chamber body and being arranged at the feeding end of the main chamber;

[0007] The transfer cavity includes a vacuum cavity and a plurality of cleaning cavities along the length direction of the main chamber, the last cleaning cavity is in communication with the main chamber, the vacuum cavity is in communication with the outside, and the first air isolation door is arranged between the vacuum cavity and the cleaning cavities, between the plurality of cleaning cavities and between the last cleaning cavity and the main chamber, the second air isolation door is arranged at the communication position between the vacuum cavity and the outside;

[0008] At least one vacuum pumping assembly is arranged on the glove box, and one end of the vacuum pumping assembly is in communication with the vacuum cavity;

[0009] A first conveying member is arranged beside the glove box, and one end of the first conveying member extends into the last cleaning cavity.

[0010] The main chamber is provided with a second conveying member, and a plurality of cleaning chambers arranged in sequence along the conveying direction of the second conveying member.

[0011] The feeding assembly comprises a storage container and a feeding member arranged at the outlet end of the storage container, and the outlet end of the feeding member corresponds to the conveying surface of the second conveying member.

[0012] The glove machine.

[0013] Further, the second air isolation door is arranged below the conveying surface of the first conveying member, and the first air isolation door is arranged above the conveying surface of the first conveying member; the inert gas concentration in the plurality of cleaning chambers increases sequentially from the one closest to the vacuum chamber.

[0014] Further, the second air isolation door comprises a pneumatic drive cylinder and a door body connected with the output shaft of the pneumatic drive cylinder, and the inner cavity of the pneumatic drive cylinder is communicated with an air pipe, one end of the air pipe is communicated with the inner cavity of the vacuum chamber, and the communication part is adjacent to the communication part between the vacuum chamber and the vacuum assembly.

[0015] Further, the pneumatic drive cylinder comprises a cylinder body, a rod body and a piston arranged in the inner cavity of the cylinder body, the piston is arranged at the end of the rod body, the other end of the rod body penetrates out of the cylinder body and is connected with the door body, and the communication part between the air pipe and the cylinder body is located at the upper part of the piston.

[0016] Further, the communication part between the vacuum chamber and the outside is provided with a door frame corresponding to the door body, the two inner sides of the door frame are provided with elastic locking pins, and the two sides of the door body are provided with insertion holes for the moving ends of the elastic locking pins to be inserted.

[0017] Further, the width of the door frame is greater than that of the door body, and a sealing ring is arranged between the joint surface of the door frame and the door body.

[0018] Further, the elastic locking pin comprises a cylinder body, an elastic member arranged in the cylinder body, and an insertion rod driven by the elastic member, the insertion rod is inserted and matched with the insertion hole, and the bottom wall of the cylinder body is provided with a pipeline penetrating out of the glove box and communicated with the outside.

[0019] Further, the first conveying member comprises a rack and a plurality of rotating rollers arranged radially along the length direction of the rack, a flexible sleeve is sleeved on each rotating roller, the two adjacent flexible sleeves are tightly attached to each other, one end of the door body away from the pneumatic drive cylinder extends to the attachment position between the two adjacent flexible sleeves, and the door body can penetrate through the gap between the two adjacent flexible sleeves under the drive of the pneumatic drive cylinder.

[0020] Further, the rack comprises a receiving plate connected with the two ends of the rotating roller, and the end part of the plurality of rotating rollers extends into the inside of the receiving plate and is provided with gears meshing with each other.

[0021] Furthermore, the multiple rotating rollers include a first rod, a second rod located outside the door, and a third rod located inside the door. A groove is provided on the storage plate, and the end of the second rod extends into the groove.

[0022] Compared with existing technologies, this invention has significant advantages and beneficial effects. Specifically, as can be seen from the above technical solution, by setting up an independent transfer chamber, which sequentially includes a vacuum chamber and multiple cleaning chambers along the length of the main chamber, and is equipped with a first air-sealing door, a second air-sealing door, and a vacuuming assembly, a multi-stage material purification buffer zone is constructed. After the material bottle is fed into the transfer chamber by the first conveyor, it first enters the vacuum chamber. After the second air-sealing door is closed, the vacuuming process is started, effectively removing most of the gas and moisture. Subsequently, it sequentially passes through multiple cleaning chambers, repeating the "vacuuming - filling with inert gas" cyclic purification process in each chamber, gradually removing residual oxygen and moisture from the surface and the environment.

[0023] After purification, the first air-tight door between the end-cleaning chamber and the main chamber is opened, allowing the material bottle to enter the main chamber. This completely isolates the bottle from outside air, providing a continuously clean environment for the core packaging process. The material bottle entering the main chamber is carried by the second conveyor and sequentially undergoes multiple processes, including internal transfer, automatic filling by the conveying assembly, and automatic capping by the capping machine. Under the protection of inert gas throughout the process, no manual intervention is required, significantly improving production efficiency.

[0024] To more clearly illustrate the structural features and effects of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0025] Figure 1 This is a perspective view of an embodiment of the present invention.

[0026] Figure 2 This is a plan view of an embodiment of the present invention.

[0027] Figure 3 This is a cross-sectional view of the vacuum cavity according to an embodiment of the present invention.

[0028] Figure 4 This is an embodiment of the present invention. Figure 2 Enlarged view of point B.

[0029] Figure 5 This is a cross-sectional view of a pneumatic drive cylinder according to an embodiment of the present invention.

[0030] Figure 6 This is a cross-sectional view of the elastic locking pin according to an embodiment of the present invention.

[0031] Figure 7 This is an embodiment of the present invention. Figure 3 Enlarged view of point C.

[0032] Explanation of reference numerals in the attached diagram:

[0033] Glove box 10, transfer chamber 11, vacuum chamber 11a, cleaning chamber 11b, door frame 111, elastic locking pin 112, cylinder 1121, elastic element 1122, insertion rod 1123, pipe 1124, main chamber 12;

[0034] First air-blocking valve 30, second air-blocking valve 31, pneumatic drive cylinder 311, cylinder body 3111, rod body 3112, piston 3113, door body 312, insertion hole 3121, air pipe 313, sealing ring A;

[0035] Vacuum assembly 40;

[0036] First conveyor 50, frame 51, storage plate 511, chute 5111, rotating roller 52, first rod 521, second rod 522, third rod 523, flexible sleeve 53, gear 54;

[0037] Second conveyor 60;

[0038] Material conveying assembly 70, material storage container 71, feeding component 72;

[0039] Top cover machine 80. Detailed Implementation

[0040] Please refer to Figures 1-7 As shown, it illustrates the specific structure of a preferred first embodiment of the present invention, which is an automatic hafnium tetrachloride packaging device, including a glove box 10 that can be filled with inert gas. The glove box 10 includes a transfer chamber 11 and a main chamber 12. The transfer chamber 11 is an independent chamber body and is located at the feed end of the main chamber 12.

[0041] The transfer chamber 11 includes a vacuum chamber 11a and multiple cleaning chambers 11b along the length of the main chamber 12. The end cleaning chamber 11b is connected to the main chamber 12, and the vacuum chamber 11a is connected to the outside. A first air-tight door 30 that can be opened and closed is provided between the vacuum chamber 11a and the cleaning chamber 11b, between the multiple cleaning chambers 11b, and between the end cleaning chamber 11b and the main chamber 12. A second air-tight door 31 is provided at the connection between the vacuum chamber 11a and the outside.

[0042] The glove box 10 is provided with at least one vacuum assembly 40, and one end of the vacuum assembly 40 is connected to the vacuum chamber 11a;

[0043] A first conveyor 50 is provided on one side of the glove box 10, and one end of the first conveyor 50 extends to the end cleaning chamber 11b;

[0044] The main chamber 12 is provided with a second conveying member 60, and other components are arranged sequentially along the conveying direction of the second conveying member 60.

[0045] The material conveying assembly 70 includes a storage container 71 and a feeder 72 connected to the discharge end of the storage container 71, the discharge end of the feeder 72 corresponding to the conveying surface of the second conveyor 60.

[0046] The capping machine 80. By setting up an independent transfer chamber 11, which sequentially includes a vacuum chamber 11a and multiple cleaning chambers 11b along the length of the main chamber, and equipped with a first air-sealing door 30, a second air-sealing door 31, and a vacuum pumping assembly 40, a multi-stage material purification buffer zone is constructed. After the material bottle is fed into the transfer chamber via the first conveyor 50, it first enters the vacuum chamber 11a. After the second air-sealing door 31 is closed, the vacuum pumping process is initiated, effectively removing most of the gas and moisture. Subsequently, it sequentially passes through multiple cleaning chambers 11b, repeating the "vacuum pumping—inert gas filling" cyclic purification process in each chamber, gradually removing residual oxygen and moisture from the surface and environment. After purification, the first air-tight door between the end cleaning chamber and the main chamber is opened, allowing the material bottle to enter the main chamber 12. This completely isolates the entry of outside air, providing a continuously clean environment for the core packaging process. The material bottle entering the main chamber 12 is carried by the second conveyor 60 and sequentially undergoes multiple processes, including internal transmission, automatic filling by the conveying assembly 70, and automatic capping by the capping machine 80. Under the protection of inert gas throughout the process, no manual intervention is required, significantly improving production efficiency.

[0047] like Figure 3 As shown, exemplarily, the second air-tight door 31 is located below the conveying surface of the first conveyor 50, and the first air-tight door 30 is located above the conveying surface of the first conveyor 50; the inert gas concentration in the multiple cleaning chambers 11b increases sequentially from the nearest vacuum chamber 11a. The first conveyor 50 passes through the transfer chamber 11. The material bottle is automatically fed into the vacuum chamber 11a with the second air-tight door 31 open, realizing automatic feeding of materials from the outside to the vacuum chamber 11a, replacing the traditional manual placement method. The material bottle is gradually transferred within the multi-stage purification zone formed by the vacuum chamber 11a and the multiple cleaning chambers 11b. Since the second air-tight door 31 is located below the conveying surface of the first conveyor 50, it only needs to close the narrow gap through which the conveyor passes, rather than the medium to large openings required for conventional personnel passage. Therefore, its door structure can be miniaturized and lightweight.

[0048] It should be noted that an increasing inert gas concentration gradient is maintained within the multiple cleaning chambers 11b. Combined with the sequential opening and closing of the first air-blocking door 30, an effective concentration buffer and atmosphere isolation can be formed as the material passes through step by step, further inhibiting the infiltration of outside air and ensuring that the surface of the material entering the main chamber and the chamber environment are fully purified.

[0049] like Figure 3As shown, exemplarily, the second air-tight door 31 includes a pneumatic drive cylinder 311 and a door body 312 connected to the output shaft of the pneumatic drive cylinder 311. An air pipe 313 is connected to the inner cavity of the pneumatic drive cylinder 311. One end of the air pipe 313 is connected to the inner cavity of the vacuum chamber 11a, and this connection point is adjacent to the connection between the vacuum chamber 11a and the vacuum pumping assembly 40. When the vacuum pumping assembly 40 performs a vacuuming operation on the vacuum chamber 11a, the negative pressure environment formed inside the chamber acts directly on the piston of the pneumatic drive cylinder 311 through the connected air pipe 313. This pressure difference is automatically converted into mechanical driving force, driving the door body 312 to complete the locking or opening action. Simultaneously, because the working power comes directly from the process itself (vacuuming), as long as the vacuuming operation is performed normally, there is sufficient driving pressure to drive the door body. Furthermore, it does not rely on easily interfered electronic sensors and complex control programs, simplifying the system architecture and reducing the risk of door malfunction due to circuit failures or program errors.

[0050] like Figure 5 As shown, exemplarily, the pneumatic drive cylinder 311 includes a cylinder body 3111, a rod 3112 and a piston 3113 disposed within the inner cavity of the cylinder body 3111. The piston 3113 is located at the end of the rod 3112, and the other end of the rod 3112 extends out of the cylinder body 3111 and connects to the door body 312. The connection between the air pipe 313 and the cylinder body 3111 is located at the upper part of the piston 3113. When the vacuum assembly 40 is activated, the vacuum chamber 11a and the upper cavity of the cylinder body of the pneumatic drive cylinder 311 are simultaneously evacuated through the air pipe 313. Since the air pipe 313 is connected to the upper part of the piston 3113, the vacuuming process will create a negative pressure in the chamber. At this time, the lower part of the piston 3113 is still connected to the atmospheric environment, and its air pressure is maintained at normal atmospheric pressure. As a result, a significant pressure difference is formed on the upper and lower sides of the piston 3113. The atmospheric pressure on the lower part of the piston is much greater than the vacuum pressure on the upper part. This pressure difference is converted into an upward net thrust. This thrust is transmitted through the rod 3112 and finally drives the door 312 to achieve reliable locking or opening.

[0051] It should be noted that the sealing force of the door 312 is not a constant force provided by a spring or motor, but is directly provided by the pressure difference generated during the vacuuming process. Therefore, the more thorough the vacuuming, the higher the vacuum level inside the cavity, the greater the pressure difference between the piston and the piston, and the greater the sealing and locking force obtained by the door. This ensures that the door 312 can move upward smoothly under the push of the rod 3112 and seal the vacuum cavity 11a.

[0052] like Figure 3As shown, for example, the vacuum chamber 11a is provided with a door frame 111 corresponding to the door body 312 at the connection between the vacuum chamber 11a and the outside. The door frame 111 has elastic locking pins 112 on both inner sides, and the door body 312 has insertion holes 3121 on both sides for the moving end of the elastic locking pins 112 to be inserted. The insertion and engagement of the elastic locking pins 112 and the insertion holes 3121 constitutes a mechanical interlocking mechanism. When the door body 312 is closed in place under air pressure, the locking pins can be precisely inserted into the corresponding insertion holes 3121 to form a rigid connection, so as to effectively resist the impact of pressure fluctuations (whether positive or negative pressure) inside and outside the transmission chamber on the door body, and prevent the door body from being accidentally opened or displaced due to pressure difference.

[0053] It should be noted that the mechanical locking pin, together with the aforementioned "negative pressure pneumatic locking," constitutes a dual-safety system. The pneumatic locking provides a sealing force synchronized with the purification process, while the mechanical locking pin serves as a basic, pressure-independent physical fixation. The two work together to ensure that, under any operating conditions (such as insufficient vacuum or minor leaks in the pneumatic system), the door 312 can still be reliably locked in the correct position, greatly enhancing the overall safety of the system.

[0054] like Figure 3 As shown, for example, the width of the door frame 111 is greater than that of the door body 312, and a sealing ring A is provided between the mating surfaces of the door frame 111 and the door body 312. When the inside of the transmission chamber is evacuated to a vacuum while the outside is at atmospheric pressure, this huge pressure difference acts on the wide surface inside the door body, generating a strong, outward force that presses the door body tightly against the door frame 111. This results in greater pressure on the sealing ring A, and the sealing effect automatically strengthens as the pressure difference between the inside and outside increases, achieving a self-locking effect that essentially means "the more vacuum is drawn, the tighter the seal becomes."

[0055] like Figure 6As shown, exemplarily, the elastic locking pin 112 includes a cylindrical body 1121, an elastic element 1122 disposed within the cylindrical body 1121, and a plug rod 1123 driven by the elastic element 1122. The plug rod 1123 is inserted into the insertion hole 3121. The bottom wall of the cylindrical body 1121 is provided with a pipe 1124, which extends out of the glove box 10 and communicates with the outside. In its natural state, the elastic force of the elastic element 1122 keeps the plug rod 1123 in a retracted state, stored inside the cylindrical body 1121, at which time the door can be opened and closed freely. When the vacuum chamber 11a performs vacuuming, a negative pressure is formed inside the chamber. Since the end face of the plug rod 1123 exposed inside the chamber bears the pressure difference pointing into the chamber, while the inside of the cylindrical body is kept at normal pressure with the outside atmosphere through the pipe 1124, this pressure difference generates an outward force. When this force overcomes the restoring elastic force of the elastic element 1122, it drives the insertion rod 1123 to extend outward and automatically insert into the insertion hole 3121 of the door body to achieve locking. When the material bottle needs to be transferred to the cleaning chamber 11b, the vacuum chamber 11a needs to be "vacuumed" (i.e., filled with inert gas to restore normal pressure). At this time, the pressure difference acting on the end face of the insertion rod disappears, the elastic element 1122 drives the insertion rod to retract, and the lock is automatically released.

[0056] It should be noted that, to ensure system stability, the multiple cleaning chambers 11b are designed with increasing inert gas concentrations. When the vacuum chamber 11a is filled with inert gas, its pressure only needs to be balanced with the pressure of the adjacent first cleaning chamber 11b to open the first air-sealing door 30, without immediately rising to atmospheric pressure. Therefore, a sufficient pressure difference is maintained between the vacuum chamber 11a and the outside environment. This pressure difference continues to act on the elastic locking pin 112, overcoming the spring force and keeping the locking pin continuously locked during material transfer, preventing premature reset and thus ensuring effective isolation between the sections of the transfer chamber and the continuity of the process.

[0057] like Figure 4As shown, exemplarily, the first conveyor 50 includes a frame 51 and multiple rotating rollers 52 arranged radially along the length of the frame 51. Each rotating roller 52 is fitted with a flexible sleeve 53, and two adjacent flexible sleeves 53 are tightly fitted together. The end of the door 312 away from the pneumatic drive cylinder 311 extends to the area between the two adjacent flexible sleeves 53 and can pass through the gap between the two adjacent flexible sleeves 53 under the drive of the pneumatic drive cylinder 311. When the door 312 needs to be closed, its end is not pressed against the rigid roller, but faces upward at the area where the two adjacent flexible sleeves 53 are tightly fitted. Because the flexible material (such as rubber or polyurethane) will deform under pressure, it tightly wraps the edge of the door, thereby forming an effective dynamic sealing interface between the moving conveyor belt and the stationary door. In addition, since the door 312 is inserted into the "seam" of the two flexible sleeves 53, rather than forcibly pushing the rotating roller 52 open, the driving force required for the door 312 to move upward is smaller, and the interference with the smooth operation of the conveyor belt and the bottles on it is minimized.

[0058] The frame 51 includes a receiving plate 511 connected to both ends of the rotating rollers 52. The ends of the multiple rotating rollers 52 extend into the receiving plate 511 and are equipped with meshing gears 54. By meshing the gears 54 at the ends of all the rotating rollers 52 within the enclosed receiving plate 511, a linked gear system is formed. When power drives one roller, torque is synchronously transmitted to all other rollers through this gear system, ensuring smooth transport of the bottles on them.

[0059] It should be noted that, if there is a practical need, a sealing ring can be added at the connection between the rotating roller 52 and the storage plate 511 for sealing.

[0060] like Figure 3 As shown, exemplarily, the multiple rotating rollers 52 include a first rod 521, a second rod 522 located outside the door body 312, and a third rod 523 located inside the door body 312. A groove 5111 is provided on the receiving plate 511, and the end of the second rod 522 extends into the groove 5111. When the door body 312 moves upward under the drive of the pneumatic cylinder 311 and inserts between two adjacent flexible sleeves 53, it exerts an upward compressive force on the flexible sleeves. This compressive force causes the flexible sleeves to bulge and deform locally on both sides of the door body, thus occupying more space radially. By designing the ends of the first rod 521 and the second rod 522 to be movable within the groove 5111, these two rollers can passively make slight retractions to both sides under the compressive force of the door body, preventing the material bottles on the flexible sleeves from tipping over due to the bulging of the flexible sleeves 53.

[0061] It should be noted that the movement of the ends of the first rod 521 and the second rod 522 within the slide groove 5111 will not cause the adjacent two gears 54 to separate.

[0062] In summary, the key design focus of this invention is;

[0063] 1.1 External material bottles are fed into the equipment via the first conveyor 50. At this time, the second air-tight door 31, which connects the vacuum chamber 11a to the outside, is in the open state. The rotating roller 52 of the first conveyor 50 is linked by the gear 54, which drives the flexible sleeve 53 to smoothly convey the material bottle, allowing it to pass through the second air-tight door 31 and enter the vacuum chamber 11a;

[0064] 2.1 After the material bottle is fully inside the vacuum chamber 11a, the vacuum assembly 40 is activated. The negative pressure generated by the vacuum is transmitted through the air pipe 313 to the upper chamber of the pneumatic drive cylinder 311 of the second air-sealing door 31, driving the piston 3113 to lift the rod 3112 and the door 312. The door 312 is inserted into the contact area of ​​the two adjacent flexible sleeves 53 of the first conveying component 50 to achieve dynamic sealing, completing the pneumatic locking of the vacuum chamber 11a to the outside world. At the same time, the negative pressure formed in the vacuum chamber 11a acts on the elastic locking pin 112, driving the insertion rod 1123 to automatically insert into the insertion hole 3121 of the door 312, forming a mechanical interlock, further enhancing the sealing reliability.

[0065] 3.1 After vacuum chamber 11a completes evacuation, an "inert gas filling" operation is performed to balance its pressure with the adjacent first clean chamber 11b. At this time, the first air-sealing door 30 between vacuum chamber 11a and the first clean chamber 11b opens, and the material bottle is sent into the first clean chamber 11b by the first conveyor 50. Within the multiple clean chambers 11b, the material bottle sequentially undergoes a cycle of "vacuuming—inert gas filling" purification. Each clean chamber 11b maintains an increasing inert gas concentration gradient to ensure that the material surface and the environment are purified step by step.

[0066] 4.1 After purification is completed, the first air-tight door 30 between the end cleaning chamber 11b and the main chamber 12 is opened, and the material bottle enters the main chamber 12. It is carried by the second conveyor 60. The material bottle passes through the automatic filling of the conveying component 70 (the storage container 71 is accurately fed by the feeding component 72) and the automatic sealing of the capping machine 80 in sequence. The entire process is completed under the protection of inert gas without manual intervention.

[0067] The above description is merely a preferred embodiment of the present invention and does not constitute any limitation on the technical scope of the present invention. Therefore, any minor modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention shall still fall within the scope of the technical solution of the present invention.

Claims

1. An automatic packaging device for hafnium tetrachloride, comprising a glove box (10) capable of being filled with inert gas, characterized in that: The glove box (10) includes a transfer chamber (11) and a main chamber (12). The transfer chamber (11) is an independent chamber body and is located at the feed end of the main chamber (12). The transfer chamber (11) includes a vacuum chamber (11a) and multiple cleaning chambers (11b) in sequence along the length of the main chamber (12). The end cleaning chamber (11b) is connected to the main chamber (12), and the vacuum chamber (11a) is connected to the outside. A first air-tight door (30) that can be opened and closed is provided between the vacuum chamber (11a) and the cleaning chamber (11b), between the multiple cleaning chambers (11b), and between the end cleaning chamber (11b) and the main chamber (12). A second air-tight door (31) is provided at the connection between the vacuum chamber (11a) and the outside. The glove box (10) is provided with at least one vacuum assembly (40), and one end of the vacuum assembly (40) is connected to the vacuum chamber (11a); A first conveyor (50) is provided on one side of the glove box (10), and one end of the first conveyor (50) extends to the end cleaning chamber (11b); The main chamber (12) is provided with a second conveying component (60), and components are arranged sequentially along the conveying direction of the second conveying component (60); The material conveying assembly (70) includes a storage container (71) and a feeder (72) at the discharge end of the storage container (71), wherein the discharge end of the feeder (72) corresponds to the conveying surface of the second conveyor (60); Top cover machine (80); The second air-isolating door (31) is located below the conveying surface of the first conveying member (50), and the first air-isolating door (30) is located above the conveying surface of the first conveying member (50); the concentration of inert gas in the plurality of cleaning chambers (11b) increases sequentially from the one closest to the vacuum chamber (11a); The second air-tight door (31) includes a pneumatic drive cylinder (311) and a door body (312) connected to the output shaft of the pneumatic drive cylinder (311). The inner cavity of the pneumatic drive cylinder (311) is connected to an air pipe (313). One end of the air pipe (313) is connected to the inner cavity of the vacuum chamber (11a), and the connection point of one end of the air pipe (313) with the vacuum chamber (11a) is adjacent to the connection point between the vacuum chamber (11a) and the vacuum pumping assembly (40). The vacuum chamber (11a) is connected to the outside world by a door frame (111) corresponding to the door body (312). The door frame (111) has elastic locking pins (112) on both inner sides. The door body (312) has insertion holes (3121) on both sides for the moving end of the elastic locking pin (112) to be inserted.

2. The automatic packaging equipment for hafnium tetrachloride according to claim 1, characterized in that: The pneumatic drive cylinder (311) includes a cylinder body (3111), a rod (3112) and a piston (3113) disposed in the inner cavity of the cylinder body (3111). The piston (3113) is disposed at the end of the rod (3112). The other end of the rod (3112) passes through the cylinder body (3111) and is connected to the door body (312). The air pipe (313) is connected to the cylinder body (3111) at the upper part of the piston (3113).

3. The automatic packaging equipment for hafnium tetrachloride according to claim 1, characterized in that: The door frame (111) is wider than the door body (312), and a sealing ring (A) is provided between the joint surfaces of the door frame (111) and the door body (312).

4. The automatic packaging equipment for hafnium tetrachloride according to claim 1, characterized in that: The elastic locking pin (112) includes a cylindrical body (1121), an elastic element (1122) disposed inside the cylindrical body (1121), and a plug rod (1123) driven by the elastic element (1122). The plug rod (1123) is inserted into the socket (3121). The bottom wall of the cylindrical body (1121) is provided with a pipe (1124), which extends out of the glove box (10) and communicates with the outside.

5. The automatic packaging equipment for hafnium tetrachloride according to claim 1, characterized in that: The first conveying component (50) includes a frame (51) and multiple rotating rollers (52) arranged radially along the length of the frame (51). Each rotating roller (52) is fitted with a flexible sleeve (53), and two adjacent flexible sleeves (53) are tightly fitted together. The end of the door body (312) away from the pneumatic drive cylinder (311) extends to the area between the two adjacent flexible sleeves (53) and can pass through the gap between the two adjacent flexible sleeves (53) under the drive of the pneumatic drive cylinder (311).

6. The automatic packaging equipment for hafnium tetrachloride according to claim 5, characterized in that: The frame (51) includes a storage plate (511) connected to both ends of the rotating rollers (52). The ends of the multiple rotating rollers (52) extend into the storage plate (511) and are provided with meshing gears (54).

7. The automatic packaging equipment for hafnium tetrachloride according to claim 6, characterized in that: The multiple rotating rollers (52) include a first rod (521), a second rod (522) located outside the door (312), and a third rod (523) located inside the door (312). The storage plate (511) is provided with a sliding groove (5111), and the end of the second rod (522) extends into the sliding groove (5111).

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