High-frequency cavity water cooling loop collecting device

Abstract

The invention discloses a high-frequency cavity water-cooling loop collecting device which is a water-cooling loop collecting device based on a layered structure, and the water-cooling loop collecting device based on the layered structure has the advantages that through the layered structure, the water-cooling loop collecting device can be used for collecting high-frequency cavity water-cooling loops; a plurality of water-cooling loops in a high-frequency cavity are gathered to a magnet cover plate, and a plurality of water-cooling loops on the magnet cover plate are gathered into one water-cooling loop on the magnet cover plate. A plurality of water inlet pipelines of the plurality of water cooling loops are gathered to a water inlet runner on the magnet cover plate and a water inlet nozzle leading to the water inlet runner; and a plurality of water outlet pipelines of the plurality of water cooling loops are converged to a water outlet flow channel on the magnet cover plate and a water outlet nozzle leading to the water outlet flow channel. According to the invention, multiple water-cooling loops of the high-frequency cavity are gathered into one water-cooling loop, so that the processing task load is greatly reduced, and the installation workload is reduced; and meanwhile, the water loops are dispersed, so that the sparking phenomenon is avoided.

Description

Technical Field

[0001] This invention relates to a device for a cyclotron, specifically to a high-frequency cavity water-cooled circuit assembly device. Background Technology

[0002] Cyclotrons are indispensable research platforms for conducting research and applications in nuclear equipment, nuclear science, and life sciences, geared towards major national strategies. Especially in areas such as research on novel alpha emitter radionuclides, mobile in-situ neutron imaging, innovative solid-state nuclide production, industrial irradiation of second-generation high-temperature superconducting materials, and cancer treatment, ultra-compact, multi-purpose superconducting cyclotrons are becoming a key development direction for cyclotrons. When an ultra-compact, multi-purpose superconducting cyclotron operates, the current density in the localized high-frequency cavity is high. Simultaneously, because it operates in a vacuum environment, heat dissipation is difficult. Therefore, to prevent excessively high localized temperatures in the high-frequency cavity from causing deformation and affecting its stability, a water-cooling circuit is often incorporated to cool the cavity.

[0003] Because the cavity cooling requires multiple circuits, each circuit has one inlet pipe and one outlet pipe, multiple circuits result in multiple inlet pipes and multiple outlet pipes; for example Figure 1 As shown, the existing technology involves connecting multiple inlet and outlet water pipes to water connectors, which are then fixed to the high-frequency cavity cover. This method is not only complex to manufacture when there are many water circuits, but also occupies a large space. Furthermore, installing multiple water circuits is cumbersome, requiring the installation of multiple circuits. Moreover, the distance between multiple water circuits during normal operation of the high-frequency cavity can cause arcing. Therefore, a unified design scheme for the high-frequency cavity water-cooling circuits is urgently needed to effectively solve the above-mentioned problems in the existing technology. Summary of the Invention

[0004] To address the problems existing in the current technology, a high-frequency cavity water-cooling circuit assembly device for an ultra-compact multi-purpose superconducting cyclotron accelerator is proposed. The aim is to solve the technical problems of complicated installation, large processing workload, and arcing in the high-frequency water-cooling circuit of the ultra-compact multi-purpose superconducting cyclotron accelerator.

[0005] To address the problems existing in the prior art, the present invention proposes the following technical solution:

[0006] A high-frequency cavity water-cooled circuit collection device is characterized in that: the device is a water-cooled circuit collection device based on a layered structure. The water-cooled circuit collection device based on the layered structure collects multiple water-cooled circuits in the high-frequency cavity to the high-frequency cavity cover plate and collects multiple water-cooled circuits on the high-frequency cavity cover plate into one water-cooled circuit on the high-frequency cavity cover plate. Specifically, multiple water inlet pipes of multiple water-cooled circuits are collected into a water inlet channel (4-1) on the high-frequency cavity cover plate and into a water inlet nozzle (4-3) leading to the water inlet channel (4-1); multiple water outlet pipes of multiple water-cooled circuits are collected into a water outlet channel (4-2) on the high-frequency cavity cover plate and into a water outlet nozzle (4-4) leading to the water outlet channel (4-2).

[0007] Furthermore, the layered water-cooled circuit collection device, from the high-frequency cavity to the inlet water nozzle (4-3) and the outlet water nozzle (4-4), is provided with four layers in sequence: the first layer is the cover flange (1), the second layer is the vacuum sealing plate (2), the third layer is the water sealing plate (3), and the fourth layer is the water distribution plate (4); among them, the cover flange (1) is the base of the whole, and the cover flange (1) not only plays a fixing role, but also realizes the vacuum seal between the cover flange (1) and the magnet; the vacuum sealing plate (2) is used to vacuum seal the multiple inlet pipes and multiple outlet pipes that pass through the vacuum sealing plate (2), and realize the vacuum seal between the vacuum sealing plate (2) and the cover flange (1); the water sealing plate (3) is used to cooperate with the water distribution plate (4), press the sealing ring between the water sealing plate (3) and the water distribution plate (4), prevent the cooling liquid from flowing from the water distribution plate (4) to the water sealing plate (3), and realize the water sealing plate (3). The water sealing plate (3) and the vacuum sealing plate (2) work together to press the sealing ring between the water sealing plate (3) and the vacuum sealing plate (2), preventing the cooling liquid from flowing from the water sealing plate (3) to the vacuum sealing plate (2), thus achieving a vacuum seal between the water sealing plate (3) and the vacuum sealing plate (2); the water sealing plate (4) is used to combine the multiple water cooling circuits on the water sealing plate (3) into one circuit on the water sealing plate (4). The water-cooled circuit is as follows: multiple water inlet pipes on the sealing plate (3) are gathered into a water inlet channel (4-1) on the water distribution plate (4) and into a water inlet nozzle (4-3) leading to the water inlet channel (4-1); multiple water outlet pipes on the sealing plate (3) are gathered into a water outlet channel (4-2) on the water distribution plate (4) and into a water outlet nozzle (4-4) leading to the water outlet channel (4-2).

[0008] Furthermore, the cover flange (1) facing the magnet has an annular plane near the large radius and a concave curved surface within the annular plane; a cover flange sealing ring (1-5) is provided within the annular plane near the large radius, which is used to achieve a seal between the cover flange (1) and the magnet; multiple water flow holes are provided within the concave curved surface, which are used for multiple inlet pipes and multiple outlet pipes to pass through; the cover flange (1) facing the vacuum sealing plate (2) has multiple funnel-shaped grooves (1-6) and sealing rings within the multiple funnel-shaped grooves, with the center of the multiple funnel-shaped grooves (1-6) being a water flow hole; wherein, near the cover flange (1) Multiple funnel-shaped grooves (1-6) in the center correspond to a large flange groove (2-1-1) of the vacuum sealing plate (2); multiple funnel-shaped grooves (1-6) away from the center of the cover flange (1) correspond to each small flange groove (2-1-1) of the vacuum sealing plate (2); the multiple funnel-shaped grooves (1-6) near the center of the cover flange (1) and the sealing ring and the multiple funnel-shaped grooves (1-6) away from the center of the cover flange (1) and the sealing ring in the multiple funnel-shaped grooves (1-6) cooperate with the large flange (2-1) and the small flange (2-2) on the vacuum sealing plate (2) to achieve vacuum sealing between the cover flange (1) and the vacuum sealing plate (2).

[0009] Furthermore, the vacuum sealing plate (2) has multiple cylindrical small flange grooves (2-2-1) and one cylindrical large flange groove (2-1-1) on the side facing the cover flange (1). These multiple small flange grooves (2-2-1) and one large flange groove (2-1-1) are used to install multiple small flanges (2-2) and one large flange (2-1). These multiple small flanges (2-2) and one large flange (2-1) are used to respectively connect with the cover flange (1) on the side away from the center of the cover flange (1). Multiple funnel-shaped grooves (1-6) and sealing rings, as well as multiple funnel-shaped grooves (1-6) and sealing rings near the center of the cover flange (1), cooperate to achieve a vacuum seal between the vacuum sealing plate (2) and the cover flange (1); the vacuum sealing plate (2) facing the water sealing plate (3) is provided with multiple water inlet pipe holes and multiple water outlet pipe holes, and sealing rings are provided in the multiple water inlet pipe holes and multiple water outlet pipe holes. These sealing rings cooperate with the water sealing plate (3) to achieve a vacuum seal between the vacuum sealing plate (2) and the water sealing plate (3).

[0010] Furthermore, the side of the sealing plate (3) facing the water distribution plate (4) is a flat surface, which is used to press the sealing ring on the water distribution plate (4) to prevent the cooling liquid from flowing from the water distribution plate (4) to the sealing plate (3); multiple inlet pipe through holes and multiple outlet pipe through holes are also opened on the flat surface, and the tops of the multiple inlet pipes and the multiple outlet pipes are flush with the flat surface; the side of the sealing plate (3) facing the vacuum sealing plate (2) is a flat surface, which is used to cooperate with the vacuum sealing plate (2) to press the sealing ring on the vacuum sealing plate (2) to achieve a vacuum seal between the sealing plate (3) and the vacuum sealing plate (2).

[0011] Furthermore, the side of the water distribution plate (4) facing the water sealing plate (3) is provided with a water flow channel and a sealing ring. The water flow channel consists of an inlet channel (4-1) and an outlet channel (4-2). The inlet channel (4-1) is used to collect multiple inlet pipes on the water sealing plate (3) and abut against the multiple inlet pipes. The outlet channel (4-2) is used to collect multiple outlet pipes on the water sealing plate (3) and abut against the multiple outlet pipes. The sealing ring is arranged around the water flow channel. Two water nozzles are welded on the side of the water distribution plate (4) away from the water sealing plate (3), one inlet water nozzle (4-3) and one outlet water nozzle (4-4). The inlet water nozzle (4-3) leads to the inlet water channel (4-1) on the water distribution plate (4), and the outlet water nozzle (4-4) leads to the outlet water channel (4-2) on the water distribution plate (4).

[0012] Furthermore, the multiple water-cooling circuits include four water-cooling circuits; the multiple water inlet pipes include four water inlet pipes; the multiple water outlet pipes include four water outlet pipes; the multiple small flange grooves are four small flange grooves, each small flange groove has a water flow hole, and the large flange groove (2-1-1) has multiple water flow holes, which are four water flow holes.

[0013] Furthermore, the water pipes passing through each small flange groove are all straight; the four water pipes passing through the large flange groove (2-1-1) are both straight and straight-expanded; the straight-expanded type is to expand a part of the straight line outward into a curve, thereby increasing the distance between the straight pipes and avoiding high-pressure arcing caused by the pipes being too close together;

[0014] Furthermore, the ends of the four inlet pipes and four outlet pipes are all chamfered to prevent sparking and electrical discharge from the sharp points.

[0015] Advantages and effects of the present invention

[0016] 1. This invention significantly reduces the amount of processing and installation work by consolidating multiple water-cooling circuits in a high-frequency cavity into a single water-cooling circuit; at the same time, it disperses the various water circuits, avoiding arcing. Specifically, through layered consolidation, flow channel optimization, and enhanced sealing, it systematically solves the core problems of cumbersome installation, large space occupation, and high risk of arcing in existing technologies, combining high efficiency, safety, and engineering practicality.

[0017] 2. Simplified installation and processing: The multi-layered structure (cover flange, vacuum sealing plate, water sealing plate, and water distribution plate) integrates multiple water-cooling circuits of the high-frequency cavity into a single inlet and outlet channel on the high-frequency cavity cover, significantly reducing the number of water connectors. Compared to existing technologies that require independent installation of multiple circuits, this invention only requires connecting one inlet nozzle and one outlet nozzle, greatly reducing installation complexity and processing workload.

[0018] 3. Solving space occupation issues: Layered design optimizes space utilization through a compact flow channel layout (such as straight expansion pipes), avoiding volume redundancy caused by the dispersed arrangement of multiple pipes. It is especially suitable for ultra-compact cyclotrons, meeting their miniaturization requirements.

[0019] 4. Effectively prevent high-pressure arcing: Optimized pipe spacing: The water flow pipe in the groove (2-1-1) of the large flange adopts a straight expansion design. The pipe spacing is increased by local curve expansion to avoid arcing caused by too close distance.

[0020] 5. Chamfered design: The chamfered ends of the water inlet / outlet pipes eliminate the risk of tip discharge, further improving safety under high pressure.

[0021] 6. Enhanced sealing and cooling efficiency: Multi-layer vacuum sealing: The vacuum sealing plate and cover plate flange are fitted with small / large flange grooves (2-1-1) and sealing rings to ensure vacuum sealing between layers; the water sealing plate and water distribution plate prevent coolant leakage through sealing rings, providing double protection for the stability of the vacuum environment in the high-frequency cavity. Attached Figure Description

[0022] Figure 1 This is a side view of the high-frequency cavity water-cooling circuit collection device of the present invention;

[0023] Figure 2 This is a top view of the cover flange of the high-frequency cavity water-cooled circuit collection device of the present invention.

[0024] Figure 3a This is a first-view cross-sectional view of the high-frequency cavity water-cooled circuit assembly device of the present invention.

[0025] Figure 3b This is a second perspective view of the cross-sectional view of the high-frequency cavity water-cooled circuit collection device of the present invention;

[0026] Figure 4 Top view of the water channel and water nozzle on the water distribution plate of the high-frequency cavity water-cooled circuit collection device of the present invention;

[0027] Figure 5 A top plan view of the sealing plate of the high-frequency cavity water-cooled circuit collection device of the present invention;

[0028] Figure 6 Top view of the vacuum sealing plate of the high-frequency cavity water-cooled circuit collection device of the present invention;

[0029] Figure 7 A bottom view of the cover flange of the high-frequency cavity water-cooled circuit collection device of the present invention.

[0030] In the diagram: 1: Cover flange; 1-1-1: Inlet of the first water-cooled circuit; 1-1-2: Outlet of the first water-cooled circuit; 1-2-1: Inlet of the second water-cooled circuit; 1-2-2: Outlet of the second water-cooled circuit; 1-3-1: Inlet of the third water-cooled circuit; 1-3-2: Outlet of the third water-cooled circuit; 1-4-1: Inlet of the fourth water-cooled circuit; 1-4-2: Outlet of the fourth water-cooled circuit; 1-5: Cover flange seal. 1-6: Funnel-shaped groove; 2: Vacuum sealing plate; 2-1: Large flange; 2-1-1: Large flange groove; 2-2: Small flange; 2-2-1: Small flange groove; 2-3: Lower sealing ring of vacuum sealing plate; 2-4: Upper sealing ring of vacuum sealing plate; 3: Water sealing plate; 4: Water distribution plate; 4-1: Water inlet channel; 4-2: Water outlet channel; 4-3: Water inlet nozzle; 4-4: Water outlet nozzle; 4-5: Water distribution plate sealing ring; Detailed Implementation

[0031] Design principle of the invention

[0032] 1. Innovation of this invention: Through layered modular design, composite sealing mechanism, optimized anti-sparking pipes, and multi-functional base integration, this invention systematically overcomes the technical bottlenecks of traditional multi-loop water-cooling devices, providing an efficient, safe, and easy-to-maintain cooling solution for ultra-compact superconducting cyclotron accelerators. Details are as follows:

[0033] 1) Layered Water-Cooling Circuit Integration Structure: A four-layer modular structure consisting of a cover flange 1, a vacuum sealing plate 2, a water sealing plate 3, and a water distribution plate 4 is proposed. By integrating the layers, the multiple water-cooling pipes (such as four inlet / outlet pipes) of the high-frequency cavity are compressed into a single inlet channel 4-1 and a single outlet channel 4-2 on the high-frequency cavity cover plate. This design achieves a high degree of integration of the water-cooling circuit in a superconducting cyclotron accelerator for the first time, solving the problems of cumbersome installation and space occupation caused by traditional multi-joint solutions.

[0034] 2) Composite Sealing and Vacuum Isolation Technology: The design of the flange grooves and sealing rings is coordinated: Multiple funnel-shaped grooves 1-6, multiple small flange grooves 2-2-1, and one large flange groove 2-1-1 are respectively set on the cover flange 1 and the vacuum sealing plate 2. Matching sealing rings provide dual protection of independent vacuum sealing for multiple pipelines and centralized sealing, preventing coolant leakage from affecting the high-frequency cavity vacuum environment. The water sealing plate 3 provides bidirectional compression sealing: The water sealing plate 3, vacuum sealing plate 2, and water distribution plate 4 are connected by a planar compression sealing ring, which both prevents coolant backflow and maintains vacuum sealing, significantly improving system reliability.

[0035] 3) Optimized anti-sparking piping layout: Straight-line expansion piping design: Within the Oita flange groove 2-1-1, some straight pipes are replaced with outward-expanding curves, increasing the spacing between adjacent pipes and fundamentally preventing sparking under high-pressure operating conditions. Pipe end chamfering: All inlet / outlet pipe ends are chamfered to eliminate the risk of tip discharge and further enhance high-pressure safety.

[0036] 4) Multifunctional integrated base (cover flange): The cover flange 1 innovatively integrates three major functions: structural fixation, vacuum sealing and water flow hole integration. Its concave curved surface with multiple water flow holes supports efficient pipeline passage; the annular plane and sealing ring cooperate to achieve vacuum sealing at the magnet end, reducing the use of additional sealing components.

[0037] 5) Single-point interface simplifies external connection: Only one inlet nozzle 4-3 and one outlet nozzle 4-4 need to be welded on the water distribution plate 4. The external cooling system only needs to connect to these two interfaces to complete the circulation control of all loops, which greatly reduces the system complexity and maintenance cost.

[0038] 2. Design principles of the present invention

[0039] 1) Layered Modular Integration Principle: Based on the concepts of functional decoupling and spatial reuse, the traditional decentralized multi-loop water cooling system is decomposed into four core modules: Cover Flange 1: Serving as the basic load-bearing and vacuum sealing layer, it integrates multiple water flow holes through a concave curved surface, achieving a unified design for mechanical support and pipe passage. Vacuum Sealing Plate 2: Adopting a flange groove structure (small flange + large flange), it uses a differentiated sealing strategy to ensure independent sealing of a single pipe while achieving centralized isolation of multiple pipes, solving the problem of cross-permeation between vacuum and liquid. Water Sealing Plate 3: Serving as a transition layer, its planar design forms a bidirectional barrier through a two-way compression sealing ring (upper pressure water distribution plate 4, lower pressure vacuum sealing plate 2), ensuring that the coolant flows unidirectionally only along the preset flow channel. Water Distribution Plate 4: Through topology optimization design of the inlet / outlet flow channels (4-1 / 4-2), it utilizes the principle of fluid dynamics branch convergence to converge multiple pipes without turbulence to a single interface (water nozzle 4-3 / 4-4), achieving balanced flow distribution.

[0040] 2. Electric-current coordinating design principle for preventing high-voltage breakdown: Electric field homogenization design: By using a linear expansion pipe layout, the pipe spacing is adjusted within a limited space to ensure that the electric field strength between adjacent pipes is always lower than the dielectric breakdown threshold; Current-electric coupling optimization: Pipe chamfers eliminate the risk of tip discharge and reduce the interference of coolant conductivity on the high-voltage environment, meeting the dual requirements of safety distance and cooling efficiency.

[0041] Based on the above-mentioned inventive principles, this invention designs a high-frequency cavity water-cooled circuit collection device, such as... Figure 1 , Figure 2 , Figure 3a , Figure 3b , Figure 4 , Figure 5 , Figure 6 , Figure 7 As shown, its features are: the device is a water-cooled circuit collection device based on a layered structure. This water-cooled circuit collection device based on a layered structure collects multiple water-cooled circuits in the high-frequency cavity to the high-frequency cavity cover plate, and collects multiple water-cooled circuits on the high-frequency cavity cover plate into one water-cooled circuit on the high-frequency cavity cover plate. Specifically, multiple water inlet pipes of multiple water-cooled circuits are collected into a water inlet channel 4-1 on the high-frequency cavity cover plate and into a water inlet nozzle 4-3 leading to the water inlet channel 4-1; multiple water outlet pipes of multiple water-cooled circuits are collected into a water outlet channel 4-2 on the high-frequency cavity cover plate and into a water outlet nozzle 4-4 leading to the water outlet channel 4-2.

[0042] like Figure 1 , Figure 3a , Figure 3bAs shown, the layered water-cooled circuit collection device, from the high-frequency cavity to the inlet nozzle 4-3 and the outlet nozzle 4-4, has four layers in sequence: the first layer is the cover flange 1, the second layer is the vacuum sealing plate 2, the third layer is the water sealing plate 3, and the fourth layer is the water distribution plate 4. The cover flange 1 is the integral base, serving both a fixing function and achieving a vacuum seal between the cover flange 1 and the magnet. The vacuum sealing plate 2 is used to vacuum seal multiple inlet and outlet pipes passing through it, achieving a vacuum seal between the vacuum sealing plate 2 and the cover flange 1. The water sealing plate 3 cooperates with the water distribution plate 4, pressing the sealing ring between the water sealing plate 3 and the water distribution plate 4 to prevent cooling liquid from flowing from the water distribution plate 4 to the water sealing plate 3, thus achieving a water sealing plate... Vacuum seal between sealing plate 3 and water distribution plate 4; the sealing plate 3 also works together with the vacuum sealing plate 2 to press the sealing ring between the sealing plate 3 and the vacuum sealing plate 2, preventing the cooling liquid from flowing from the sealing plate 3 to the vacuum sealing plate 2, thus achieving a vacuum seal between the sealing plate 3 and the vacuum sealing plate 2; the water distribution plate 4 is used to combine the multiple water cooling circuits on the sealing plate 3 into one water cooling circuit on the water distribution plate 4, specifically: combining multiple water inlet pipes on the sealing plate 3 into one water inlet channel 4-1 on the water distribution plate 4 and into one water inlet nozzle 4-3 leading to the water inlet channel 4-1; combining multiple water outlet pipes on the sealing plate 3 into one water outlet channel 4-2 on the water distribution plate 4 and into one water outlet nozzle 4-4 leading to the water outlet channel 4-2.

[0043] like Figure 3a , Figure 3b , Figure 6 , Figure 7 As shown, the cover flange 1, facing the magnet, has an annular plane near its large radius and a concave curved surface within the annular plane; a cover flange sealing ring 1-5 is provided within the annular plane near its large radius, which is used to achieve a seal between the cover flange 1 and the magnet; multiple water flow holes are provided within the concave curved surface, which are used for multiple inlet pipes and multiple outlet pipes to pass through; as shown... Figure 7As shown, the cover flange 1 facing the vacuum sealing plate 2 has multiple funnel-shaped grooves 1-6 and sealing rings within the multiple funnel-shaped grooves. The center of the multiple funnel-shaped grooves 1-6 is a water flow hole. Among them, the multiple funnel-shaped grooves 1-6 near the center of the cover flange 1 correspond to a large sub-flange groove 2-1-1 of the vacuum sealing plate 2; the multiple funnel-shaped grooves 1-6 away from the center of the cover flange 1 correspond to each small sub-flange groove 2-2-1 of the vacuum sealing plate 2. The multiple funnel-shaped grooves 1-6 near the center of the cover flange 1 and the sealing rings, as well as the multiple funnel-shaped grooves 1-6 away from the center of the cover flange 1 and the sealing rings within the multiple funnel-shaped grooves 1-6, cooperate with the large sub-flange 2-1-1 and the small sub-flange 2-2-1 on the vacuum sealing plate 2 to achieve a vacuum seal between the cover flange 1 and the vacuum sealing plate 2.

[0044] like Figure 6 As shown, the vacuum sealing plate 2 has multiple cylindrical small flange grooves 2-2-1 and one cylindrical large flange groove 2-1-1 on the side facing the cover flange 1. These multiple small flange grooves 2-2-1 and one large flange groove 2-1-1 are used to install multiple small flanges 2-2 and one large flange 2-1. These multiple small flanges 2-2 and one large flange 2-1 are used to cooperate with multiple funnel-shaped grooves 1-6 and sealing rings on the cover flange 1 that are far from the center of the cover flange 1, and multiple funnel-shaped grooves 1-6 and sealing rings that are close to the center of the cover flange 1, respectively, to achieve a vacuum seal between the vacuum sealing plate 2 and the cover flange 1. The vacuum sealing plate 2 has multiple water inlet pipe holes and multiple water outlet pipe holes on the side facing the water sealing plate 3, and sealing rings are installed in the multiple water inlet pipe holes and multiple water outlet pipe holes. These sealing rings cooperate with the water sealing plate 3 to achieve a vacuum seal between the vacuum sealing plate 2 and the water sealing plate 3.

[0045] like Figure 5 As shown, the side of the sealing plate 3 facing the water distribution plate 4 is a flat surface. This flat surface is used to press the sealing ring on the water distribution plate 4 to prevent the cooling liquid from flowing from the water distribution plate 4 to the sealing plate 3. This flat surface also has multiple through holes for water inlet pipes and multiple through holes for water outlet pipes. The tops of the multiple water inlet pipes and the tops of the multiple water outlet pipes are flush with this flat surface. The side of the sealing plate 3 facing the vacuum sealing plate 2 is a flat surface. This flat surface is used to cooperate with the vacuum sealing plate 2 to press the sealing ring on the vacuum sealing plate 2 to achieve a vacuum seal between the sealing plate 3 and the vacuum sealing plate 2.

[0046] like Figure 4As shown, the side of the water distribution plate 4 facing the water sealing plate 3 is provided with a water flow channel and a sealing ring. The water flow channel consists of an inlet channel 4-1 and an outlet channel 4-2. The inlet channel 4-1 is used to collect multiple inlet pipes on the water sealing plate 3 and abuts against them. The outlet channel 4-2 is used to collect multiple outlet pipes on the water sealing plate 3 and abuts against them. The sealing ring is arranged around the water flow channel. Two water nozzles are welded on the side of the water distribution plate 4 away from the water sealing plate 3: an inlet water nozzle 4-3 and an outlet water nozzle 4-4. The inlet water nozzle 4-3 leads to the inlet water channel 4-1 on the water distribution plate 4, and the outlet water nozzle 4-4 leads to the outlet water channel 4-2 on the water distribution plate 4.

[0047] like Figure 5 As shown, the multiple water-cooling circuits include four water-cooling circuits; the multiple water inlet pipes include four water inlet pipes; the multiple water outlet pipes include four water outlet pipes; the multiple small flange grooves 2-2-1 are four small flange grooves 2-2-1, each small flange groove 2-2-1 has a water flow hole, and the large flange groove 2-1-1 has multiple water flow holes, which are four water flow holes.

[0048] The water pipes passing through each small flange groove 2-2-1 are all straight; the four water pipes passing through the large flange groove 2-1-1 are both straight and straight-expanded; the straight-expanded type is to expand a part of the straight line outward into a curve, thereby increasing the distance between the straight pipes and avoiding high-pressure arcing caused by the pipes being too close together;

[0049] The ends of the four inlet pipes and four outlet pipes are all chamfered to prevent sparking and electrical discharge from the sharp points.

[0050] Example 1

[0051] like Figure 2 As shown, the high-frequency cavity water-cooling circuit consists of the first water-cooling circuit inlet pipe 1-1-1, the first water-cooling circuit outlet pipe 1-1-2, the second water-cooling circuit inlet pipe 1-2-1, the second water-cooling circuit outlet pipe 1-2-2, the third water-cooling circuit inlet pipe 1-3-1, the third water-cooling circuit outlet pipe 1-3-2, and the fourth water-cooling circuit inlet pipe 1-4-1 and the fourth water-cooling circuit outlet pipe 1-4-2.

[0052] like Figure 4As shown, the four water-cooling circuits connect from bottom to top through the first sealing ring between the cover flange 1 and the vacuum sealing plate 2, the second sealing ring between the vacuum sealing plate 2 and the water sealing plate 3, and the third sealing ring between the water sealing plate 3 and the water distribution plate 4, and then connect to the top water distribution plate 4. The water inlet pipes 1-1-1, 1-2-1, 1-3-1, and 1-4-1 of the four water-cooling circuits converge into the water inlet channel 4-1 of the top water distribution plate, and the water outlet pipes 1-1-2, 1-2-2, 1-3-2, and 1-4-2 of the four water-cooling circuits converge into the water outlet channel 4-2 of the top water distribution plate.

[0053] like Figure 3a , Figure 3b As shown, the water distribution plate 4 is welded with an inlet water nozzle 4-3 and an outlet water nozzle 4-4, thus combining multiple water-cooling circuits into a single water-cooling circuit. In practical applications, the high-frequency cavity water-cooling circuit combining device of the present invention has high reliability, reduces machining workload, is convenient for on-site installation, and greatly reduces installation workload.

[0054] It should be emphasized that the above specific embodiments are merely explanations of the present invention and are not intended to limit the present invention. After reading this specification, those skilled in the art can make modifications to the above embodiments without contributing any inventive step, but as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A high frequency cavity water cooling loop collecting device, characterized in that: The device is a water cooling circuit collection device based on a layered structure. The water cooling circuit collection device based on the layered structure collects multiple water cooling circuits in a high-frequency cavity to a high-frequency cavity cover plate and collects the multiple water cooling circuits on the high-frequency cavity cover plate into one water cooling circuit on the high-frequency cavity cover plate through the layered structure. Specifically, multiple water inlet pipes of the multiple water cooling circuits are collected on one water inlet flow channel (4-1) on the high-frequency cavity cover plate and on one water inlet nozzle (4-3) leading to the water inlet flow channel (4-1); and multiple water outlet pipes of the multiple water cooling circuits are collected on one water outlet flow channel (4-2) on the high-frequency cavity cover plate and on one water outlet nozzle (4-4) leading to the water outlet flow channel (4-2).

2. The high frequency cavity water cooling circuit collecting device according to claim 1, characterized in that: The water cooling circuit collection device based on the layered structure is provided with four layers in sequence from the high-frequency cavity to the water inlet nozzle (4-3) and the water outlet nozzle (4-4). The first layer is a cover plate flange (1), the second layer is a vacuum sealing plate (2), the third layer is a water sealing plate (3), and the fourth layer is a water distribution plate (4). The cover plate flange (1) is an integral base and plays a fixing role and realizes vacuum sealing between the cover plate flange (1) and a magnet. The vacuum sealing plate (2) is used to vacuum seal multiple water inlet pipes and multiple water outlet pipes penetrating the vacuum sealing plate (2) and realize vacuum sealing between the vacuum sealing plate (2) and the cover plate flange (1). The water sealing plate (3) is used to cooperate with the water distribution plate (4) to compress a sealing ring between the water sealing plate (3) and the water distribution plate (4), prevent cooling liquid from flowing from the water distribution plate (4) to the water sealing plate (3), and realize vacuum sealing between the water sealing plate (3) and the water distribution plate (4). The water sealing plate (3) is also used to cooperate with the vacuum sealing plate (2) to compress a sealing ring between the water sealing plate (3) and the vacuum sealing plate (2), prevent cooling liquid from flowing from the water sealing plate (3) to the vacuum sealing plate (2), and realize vacuum sealing between the water sealing plate (3) and the vacuum sealing plate (2). The water distribution plate (4) is used to collect multiple water cooling circuits on the water sealing plate (3) into one water cooling circuit on the water distribution plate (4). Specifically, multiple water inlet pipes on the water sealing plate (3) are collected on one water inlet flow channel (4-1) on the water distribution plate (4) and on one water inlet nozzle (4-3) leading to the water inlet flow channel (4-1); and multiple water outlet pipes on the water sealing plate (3) are collected on one water outlet flow channel (4-2) on the water distribution plate (4) and on one water outlet nozzle (4-4) leading to the water outlet flow channel (4-2).

3. The high frequency cavity water cooling circuit collecting device according to claim 1, characterized in that: The cover flange (1) is provided with a ring-shaped plane near the major radius and a concave surface in the ring-shaped plane on the side facing the magnet; the ring-shaped plane near the major radius is provided with a cover flange sealing ring (1-5) for sealing between the cover flange (1) and the magnet; the concave surface is provided with a plurality of water flow through holes for a plurality of water inlet pipes and a plurality of water outlet pipes to pass through; the side of the cover flange (1) facing the vacuum sealing plate (2) is provided with a plurality of funnel-shaped grooves (1-6) and sealing rings in the plurality of funnel-shaped grooves, and the center of the plurality of funnel-shaped grooves (1-6) is a water flow through hole; wherein the plurality of funnel-shaped grooves (1-6) near the center of the cover flange (1) correspond to a large flange groove (2-1-1) of the vacuum sealing plate (2); the plurality of funnel-shaped grooves (1-6) away from the center of the cover flange (1) correspond to each small flange groove (2-1-1) of the vacuum sealing plate (2); the plurality of funnel-shaped grooves (1-6) near the center of the cover flange (1) and the sealing rings and the plurality of funnel-shaped grooves (1-6) away from the center of the cover flange (1) and the sealing rings in the plurality of funnel-shaped grooves (1-6) cooperate with the large flange (2-1) and the small flange (2-2) on the vacuum sealing plate (2) to achieve vacuum sealing between the cover flange (1) and the vacuum sealing plate (2).

4. The high frequency cavity water cooling circuit collecting device according to claim 1, characterized in that: The side of the cover flange (1) facing the vacuum sealing plate (2) is provided with a plurality of funnel-shaped grooves (1-6) and sealing rings in the plurality of funnel-shaped grooves, and the center of the plurality of funnel-shaped grooves (1-6) is a water flow through hole; wherein the plurality of funnel-shaped grooves (1-6) near the center of the cover flange (1) correspond to a large flange groove (2-1-1) of the vacuum sealing plate (2); the plurality of funnel-shaped grooves (1-6) away from the center of the cover flange (1) correspond to each small flange groove (2-1-1) of the vacuum sealing plate (2); the plurality of funnel-shaped grooves (1-6) near the center of the cover flange (1) and the sealing rings and the plurality of funnel-shaped grooves (1-6) away from the center of the cover flange (1) and the sealing rings in the plurality of funnel-shaped grooves (1-6) cooperate with the large flange (2-1) and the small flange (2-2) on the vacuum sealing plate (2) to achieve vacuum sealing between the cover flange (1) and the vacuum sealing plate (2).

5. The high frequency cavity water cooling circuit collecting device according to claim 1, characterized in that: The side of the cover flange (1) facing the vacuum sealing plate (2) is provided with a plurality of funnel-shaped grooves (1-6) and sealing rings in the plurality of funnel-shaped grooves, and the center of the plurality of funnel-shaped grooves (1-6) is a water flow through hole; wherein the plurality of funnel-shaped grooves (1-6) near the center of the cover flange (1) correspond to a large flange groove (2-1-1) of the vacuum sealing plate (2); the plurality of funnel-shaped grooves (1-6) away from the center of the cover flange (1) correspond to each small flange groove (2-1-1) of the vacuum sealing plate (2); the plurality of funnel-shaped grooves (1-6) near the center of the cover flange (1) and the sealing rings and the plurality of funnel-shaped grooves (1-6) away from the center of the cover flange (1) and the sealing rings in the plurality of funnel-shaped grooves (1-6) cooperate with the large flange (2-1) and the small flange (2-2) on the vacuum sealing plate (2) to achieve vacuum sealing between the cover flange (1) and the vacuum sealing plate (2).

6. The high frequency cavity water cooling circuit collecting device according to claim 1, characterized in that: The water diversion plate (4) is provided with a water flow channel and a sealing ring on the side facing the water sealing plate (3), the water flow channel is an inlet water flow channel (4-1) and an outlet water flow channel (4-2); the inlet water flow channel (4-1) is used for collecting a plurality of inlet water pipes on the water sealing plate (3) and abutting against the plurality of inlet water pipes; the outlet water flow channel (4-2) is used for collecting a plurality of outlet water pipes on the water sealing plate (3) and abutting against the plurality of outlet water pipes, the sealing ring is arranged around the water flow channel; two water nozzles, an inlet water nozzle (4-3) and an outlet water nozzle (4-4), are welded on the side of the water diversion plate (4) away from the water sealing plate (3); the inlet water nozzle (4-3) leads to the inlet water flow channel (4-1) on the water diversion plate (4), and the outlet water nozzle (4-4) leads to the outlet water flow channel (4-2) on the water diversion plate (4).

7. The high frequency cavity water cooling circuit collecting device according to claim 3, characterized in that: The plurality of water cooling circuits includes four water cooling circuits; the plurality of inlet water pipes includes four inlet water pipes; the plurality of outlet water pipes includes four outlet water pipes; the plurality of small flange recesses (2-1-1) are four small flange recesses (2-1-1), each small flange recess (2-1-1) is provided with one water flow hole, and the one large flange recess (2-1-1) is provided with a plurality of water flow holes, which are four water flow holes.

8. The high frequency cavity water cooling circuit collecting device according to claim 7, characterized in that: The water flow pipes passing through each small flange recess (2-1-1) are linear; the four water flow pipes passing through the large flange recess (2-1-1) are linear and linearly expanded; the linearly expanded shape is to expand a part of the linear shape to a curved shape, so as to increase the distance between the linear pipes and avoid high-pressure sparking due to too close distance between the pipes.

9. The high frequency cavity water cooling circuit collecting device according to claim 8, characterized in that: The end of the four inlet water pipes and the four outlet water pipes is provided with a chamfer to prevent sparking and discharge of the sharp end.

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