Photovoltaic tubular reaction chamber and photovoltaic tubular reaction equipment

Abstract

The invention relates to the technical field of battery manufacturing equipment, in particular to a photovoltaic tubular reaction chamber and photovoltaic tubular reaction equipment.The photovoltaic tubular reaction chamber comprises a reaction chamber body and two sealing assemblies, the two sealing assemblies are located on the two sides of the reaction chamber body, and the photovoltaic tubular reaction chamber is characterized by further comprising a flushing assembly; the flushing assembly comprises two sealing plate valves, a fixing pipe, a gas supply pipeline, a gas injection seat, a driving component and a gas extraction component, during use, the slide glass boat enters the transition cavity after passing through the first reaction cavity, the driving component drives the gas injection seat to rotate, the gas supply pipeline conveys inert gas to purge the slide glass boat, and the gas extraction component synchronously extracts residual pollutants; the cleaned slide glass boat enters a second reaction cavity to complete another process; two coating processes are integrated on the same equipment, the problems that traditional equipment is high in cost and large in occupied area, and existing integrated equipment is cross-contaminated are solved, and the production efficiency and quality stability of battery pieces are improved.

Description

Technical Field

[0001] This invention relates to the field of battery manufacturing equipment technology, and in particular to a photovoltaic tube reaction chamber and photovoltaic tube reaction equipment. Background Technology

[0002] In the process of battery cell fabrication, tubular reaction chambers are required. Traditional tubular reaction chambers usually first prepare an aluminum oxide coating on the front side of the battery, and then prepare a silicon nitride coating on the front side of the battery. This requires the use of two devices, which leads to problems such as high cost and large footprint.

[0003] Prior art CN118398709A discloses a photovoltaic tubular reaction chamber and photovoltaic tubular reaction equipment, including a first reaction chamber unit, a second reaction chamber unit, a stop-flow unit, and a substrate carrier boat. The first and second reaction chamber units are arranged coaxially in series. The stop-flow unit is disposed between the first and second reaction chamber units to allow the latter two to communicate with each other or be sealed and isolated. The substrate carrier boat has a receiving cavity for accommodating substrate material. The substrate carrier boat can move between the first and second reaction chamber units so that the substrate material can be processed in each reaction chamber unit. This invention can integrate different processes into one device or implement different processes in different reaction chambers, achieving the goals of cost reduction, efficiency improvement, and product quality enhancement.

[0004] The aforementioned device divides the reaction chamber into a first reaction chamber unit and a second reaction chamber unit through a stop-flow unit, enabling the integration of different processes into one device. However, the aforementioned device lacks a means of cleaning the slide carrier. During the transfer process, the slide carrier carries trace amounts of reaction gas and particulate matter into the next reaction chamber, causing contamination. Summary of the Invention

[0005] The purpose of this invention is to provide a photovoltaic tube reaction chamber and a photovoltaic tube reaction device, which solves the problem that in existing photovoltaic tube reaction chambers and photovoltaic tube reaction devices, the carrier boat carries trace amounts of reaction gas and particulate matter into the next reaction chamber during the transfer process, causing pollution.

[0006] To achieve the above objectives, the present invention provides a photovoltaic tubular reaction chamber and a photovoltaic tubular reaction device, including a reaction chamber body and a sealing assembly. Two sealing assemblies are provided and located on both sides of the reaction chamber body. A flushing assembly is also included. The flushing assembly includes two sealing plate valves, a fixed pipe, a gas supply pipe, a jet seat, a driving component, and a suction component. The two sealing plate valves are connected to and mounted on the reaction chamber body, forming a transition cavity between them. The fixed pipe is fixedly connected to the reaction chamber body and located at the top of the reaction chamber body. The gas supply pipe is mounted on and communicates with the fixed pipe. The jet seat is rotatably connected to the fixed pipe, sleeved on the fixed pipe, and located within the transition cavity. The driving component is located inside the jet seat, and the suction component is mounted on the reaction chamber body.

[0007] The jet mount includes a base and a nozzle. The base is rotatably connected to the fixed pipe and is mounted on the fixed pipe. The nozzle is fixedly connected to the base and communicates with the base, and the nozzle is inclined.

[0008] The jet seat also includes a bearing, which is connected to the seat body and the reaction chamber body, and is disposed on the seat body.

[0009] The sealing plate valve includes a valve body and a gate. The valve body is connected to the reaction chamber body and is disposed on one side of the reaction chamber body. The gate is slidably connected to the valve body and is disposed on the valve body.

[0010] The sealing plate valve further includes a heat shield plate, which is fixedly connected to the gate and located on one side of the gate.

[0011] The air extraction component includes a base plate and an air extraction pipe. The base plate is fixedly connected to the reaction chamber body and is located inside the reaction chamber body. The air extraction pipe is connected to the base plate and communicates with the base plate.

[0012] On the other hand, the present invention also includes a photovoltaic tube reaction device, comprising the aforementioned photovoltaic tube reaction chamber.

[0013] This invention discloses a photovoltaic tubular reaction chamber and a photovoltaic tubular reaction device. After the first reaction chamber process is completed, the wafer carrier boat enters the transition chamber and is purged by the rinsing component. Simultaneously, the air extraction component extracts the gas inside the transition chamber from the bottom, removing residual reaction particles and unreacted process gases. After cleaning, the wafer carrier boat enters the second reaction chamber along a track. The second reaction chamber processes the solar cells according to another preset process. During this process, because the wafer carrier boat has been thoroughly cleaned, interference from residual substances in the first reaction chamber on the second reaction chamber process is avoided. This effectively prevents cross-contamination between the first and second reaction chambers, ensuring that the solar cells maintain stable quality parameters in different coating processes. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0015] Figure 1 This is a schematic diagram of the overall structure of the photovoltaic tube reaction chamber according to the first embodiment of the present invention.

[0016] Figure 2 This is a schematic diagram of the rinsing assembly according to the first embodiment of the present invention.

[0017] Figure 3 This is the first embodiment of the present invention. Figure 2 Enlarged view of point A.

[0018] Figure 4 This is a schematic diagram of the air extraction component according to the second embodiment of the present invention.

[0019] In the diagram: 101-Reaction chamber body, 102-Sealing assembly, 103-Flushing assembly, 104-Sealing plate valve, 105-Fixing pipe, 106-Air supply line, 107-Jet seat, 108-Drive component, 109-Evacuation component, 110-Mounting seat, 111-Turbine, 112-Seat body, 113-Nozzle, 114-Bearing, 115-Valve body, 116-Gate, 117-Heat shield plate, 118-Transition chamber, 119-First reaction chamber, 120-Second reaction chamber, 201-Base plate, 202-Evacuation line, 203-Pipe body, 204-Connecting pipe, 205-Filter screen, 206-Support boss. Detailed Implementation

[0020] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0021] First embodiment:

[0022] Please see Figures 1 to 3 ,in Figure 1 This is a schematic diagram of the overall structure of the photovoltaic tubular reaction chamber. Figure 2 This is a schematic diagram of the rinsing assembly. Figure 3 yes Figure 2 Enlarged view of point A.

[0023] This invention provides a photovoltaic tubular reaction chamber and a photovoltaic tubular reaction device, including a reaction chamber body 101, a sealing assembly 102, and a flushing assembly 103. The flushing assembly 103 includes two sealing plate valves 104, a fixed pipe 105, a gas supply pipe 106, a jet seat 107, a driving component 108, and an exhaust component 109. The jet seat 107 includes a seat body 112, a nozzle 113, and a bearing 114. The sealing plate valves 104 include a valve body 115 and a gate 116, and also include a heat shield plate 117. After the wafer carrier boat enters the transition chamber 118, the transition chamber 118 can be sealed by the two sealing plate valves 104. At this time, the external air source supplies inert gas to the air supply pipeline 106, causing the jet seat 107 to spray out inert gas, thereby purifying the wafer carrier boat and the battery cells. It can be understood that the above-mentioned solution can be used to avoid the wafer carrier boat carrying trace amounts of reactive gas and particulate matter into the next reaction chamber during the transfer process, causing pollution. It can also be used to drive the jet seat 107 to rotate, thereby improving the cleaning effect.

[0024] In this specific embodiment, two sealing components 102 are provided and located on both sides of the reaction chamber body 101. The reaction chamber body 101 is also provided with a track and a slide boat (not shown in the figure), and the track is arranged along the length direction of the reaction chamber body 101.

[0025] Two sealing plate valves 104 are connected to and mounted on the reaction chamber body 101, forming a transition cavity 118 between them. A fixed pipe 105 is fixedly connected to the reaction chamber body 101 and located at its top. A gas supply pipe 106 is mounted on and communicates with the fixed pipe 105. A jet seat 107 is rotatably connected to the fixed pipe 105, sleeved on it, and located within the transition cavity 118. The driving mechanism... The component 108 is disposed inside the jet seat 107, and the suction component 109 is disposed on the reaction chamber body 101; the two sealing plate valves 104 divide the reaction chamber body 101 into three chambers, from left to right: the first reaction chamber 119, the transition chamber 118, and the second reaction chamber 120. The slide boat can move along the track between the first reaction chamber 119 and the second reaction chamber 120. The transition chamber 118 can accommodate the slide boat. The driving component 108 is used to drive the jet seat 107 to rotate. The gas supply pipeline 106 is connected to an inert gas source.

[0026] In use, the solar cells to be processed are placed in the receiving cavity of the wafer carrier boat. The wafer carrier boat enters the first reaction chamber 119 along the track. Then, the two sealing assemblies 102 and the two sealing plate valves are closed. The first reaction chamber 119 processes the solar cells according to a preset process. After the process is completed, the sealing plate valve 104 between the first reaction chamber 119 and the transition chamber 118 is opened, and the wafer carrier boat moves along the track into the transition chamber 118. When the wafer carrier boat is fully inside the transition chamber 118, the two sealing plate valves 104 are closed. 04. The system is closed again, forming a closed space in the transition chamber 118. At this time, inert gas (such as nitrogen) is supplied through the gas supply pipe 106 of the gas source box. The gas enters the jet seat 107 through the fixed pipe 105 and is ejected from the jet seat 107 to purge the surface of the slide boat and the inner wall of the receiving cavity. During the purging process, the driving member 108 drives the jet seat 107 to rotate, thereby allowing the gas to purge at different angles. At the same time, the suction member 109 extracts the transition chamber 118 from the bottom. The internal gas removes residual reaction particles and unreacted process gases that have been blown away. After cleaning, the gas source stops supplying gas to the gas supply pipeline 106, and the extraction component 109 stops working. At this time, the sealing plate valve 104 between the transition chamber 118 and the second reaction chamber 120 is opened, and the wafer carrier boat enters the second reaction chamber 120 along the track. After the wafer carrier boat is fully inside the second reaction chamber 120, the sealing plate valve 104 closes again, making the second reaction chamber 120 an independent sealed space. The second reaction chamber 120 processes the battery cells according to another preset process. During this process, because the wafer carrier boat has been thoroughly cleaned, the residual substances in the first reaction chamber 119 are prevented from interfering with the process of the second reaction chamber 120. After the process of the second reaction chamber 120 is completed, the sealing component 102 on the right side of the reaction chamber body 101 is opened, and the wafer carrier boat is moved out of the equipment along the track, effectively preventing cross-contamination between the first reaction chamber 119 and the second reaction chamber 120, and ensuring that the battery cells maintain stable quality parameters in different coating processes.

[0027] Secondly, the driving component 108 includes a mounting base 110 and a turbine 111. The mounting base 110 is fixedly connected to the jet seat 107 and is located inside the jet seat 107. The turbine 111 is fixedly connected to the mounting base 110 and is mounted on the mounting base 110. When the air supply pipeline 106 delivers inert gas, the gas is ejected from the lower end of the fixed pipe 105. The airflow impacts the blades of the turbine 111, generating circumferential thrust to drive the turbine 111 to rotate, thereby driving the mounting base 110 and the jet seat 107 to rotate synchronously, thus achieving the purpose of driving the jet seat 107 to rotate.

[0028] Meanwhile, the base 112 is rotatably connected to the fixed tube 105 and is mounted on the fixed tube 105; the nozzle 113 is fixedly connected to the base 112 and communicates with the base 112, and the nozzle 113 is inclined; multiple nozzles 113 are provided and are evenly distributed in a ring on the base 112. The multiple inclined nozzles 113 not only increase the purging range, but also generate a reverse force on the nozzles 113 during the gas ejection process. This force is decomposed into radial and tangential components: the radial component is canceled out by the connection structure between the base 112 and the fixed tube 105, while the tangential component is superimposed along the circumference to form a rotational torque, which helps to drive the base 112 to rotate.

[0029] In addition, the bearing 114 is connected to the seat 112 and the reaction chamber body 101, and is disposed on the seat 112; the bearing 114 is a ceramic bearing 114, which enables the seat 112 to rotate stably on the outside of the fixed tube 105.

[0030] Then, the valve body 115 is connected to the reaction chamber body 101 and is disposed on one side of the reaction chamber body 101; the gate 116 is slidably connected to the valve body 115 and is disposed on the valve body 115; the valve body 115 can drive the gate 116 to move, and the edge of the gate 116 is embedded with a high-temperature resistant sealing gasket. When the gate 116 is closed, the sealing gasket is squeezed and deformed, filling the tiny gap between the gate 116 and the reaction chamber body 101, ensuring the airtightness of the transition cavity 118 after it is closed.

[0031] Finally, the heat shield plate 117 is fixedly connected to the gate plate 116 and is located on one side of the gate plate 116; the heat shield plate 117 is specifically arranged facing the side of the reaction chamber, and it has a double-layer composite structure. The outer layer is a stainless steel plate, which has high temperature corrosion resistance and can resist the erosion of process gas in the reaction chamber; the inner layer is a ceramic fiber heat insulation layer, which can effectively block the high temperature transmission of the reaction chamber and avoid thermal crosstalk between reaction chambers.

[0032] When using the photovoltaic tubular reaction chamber of the present invention, the solar cells are placed on a carrier boat and fed into the first reaction chamber 119 along the track to complete the first process. Subsequently, the carrier boat enters the transition chamber 118, where the sealing plate valves 104 on both sides of the transition chamber 118 are closed to form a closed space. The gas supply pipeline 106 delivers inert gas, which is then delivered to the jet seat 107 via the fixed pipe 105. The gas first drives the turbine 111 to rotate, which in turn drives the mounting base 110 and the jet seat 107 to rotate. Subsequently, the inclined nozzle 113 on the jet seat 107 sprays gas to purge the residual gas and particulate matter on the carrier boat and the surface of the solar cells. At the same time, the suction component 109 simultaneously removes contaminants, thus preventing the carrier boat from carrying trace amounts of reaction gas and particulate matter into the next reaction chamber during the transfer process, which would cause contamination.

[0033] Second embodiment:

[0034] Based on the first embodiment, please refer to Figure 4 , Figure 4 This is a schematic diagram of the structure of the air extraction component in the second embodiment. The air extraction component 109 in this embodiment includes a base plate 201 and an air extraction pipe 202. The air extraction pipe 202 includes a pipe body 203, a connecting pipe 204 and a filter screen 205. The connecting pipe 204 has a supporting boss 206.

[0035] In this specific embodiment, the base plate 201 is fixedly connected to the reaction chamber body 101 and located inside the reaction chamber body 101; the exhaust pipe 202 is connected to the base plate 201 and communicates with the base plate 201; the base plate 201 is provided with a plurality of uniformly arranged through holes, and the exhaust pipe 202 is connected to an external vacuum pump. The vacuum pump extracts the air in the exhaust pipe 202, thereby extracting the air inside the base plate 201, so that the through holes on the base plate 201 can draw in gas, thereby drawing in the residual particulate matter and unreacted process gas blown down in the transition chamber 118.

[0036] The tube body 203 is fixedly connected to and communicates with the base plate 201; the connecting tube 204 is threadedly connected to the tube body 203 and sleeved on the tube body 203; the filter screen 205 is connected to the connecting tube 204 and is located inside the connecting tube 204; the filter screen 205 filters residual particles. When the filter screen 205 needs to be replaced, the connecting tube 204 is rotated to remove it from the tube body 203, at which point the filter screen 205 can be replaced.

[0037] Secondly, the support boss 206 is disposed inside the connecting pipe 204, and the filter screen 205 is supported by the support boss 206, so that the filter screen 205 can be stably installed inside the connecting pipe 204.

[0038] On the other hand, the present invention also includes a photovoltaic tube reaction device, comprising the aforementioned photovoltaic tube reaction chamber.

[0039] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art can understand that all or part of the processes for implementing the above embodiments and equivalent changes made in accordance with the claims of this application still fall within the scope of this application.

Claims

1. A photovoltaic tube-type reaction chamber, comprising a reaction chamber body and sealing components, wherein two sealing components are provided and located on both sides of the reaction chamber body, characterized in that, It also includes a rinsing component; The flushing assembly includes two sealing plate valves, a fixed pipe, an air supply line, a jet seat, a drive component, and an extraction component. The two sealing plate valves are connected to the reaction chamber body and are disposed on the reaction chamber body, forming a transition cavity between the two sealing plate valves. The fixed pipe is fixedly connected to the reaction chamber body and is located at the top of the reaction chamber body. The air supply line is disposed on the fixed pipe and communicates with the fixed pipe. The jet seat is rotatably connected to the fixed pipe, sleeved on the fixed pipe, and located within the transition cavity. The drive component is disposed inside the jet seat, and the extraction component is disposed on the reaction chamber body.

2. The photovoltaic tubular reaction chamber as described in claim 1, characterized in that, The jet mount includes a base and a nozzle. The base is rotatably connected to the fixed pipe and is mounted on the fixed pipe. The nozzle is fixedly connected to the base and communicates with the base, and the nozzle is inclined.

3. The photovoltaic tubular reaction chamber as described in claim 2, characterized in that, The jet mount also includes a bearing, which is connected to the mount body and the reaction chamber body, and is mounted on the mount body.

4. The photovoltaic tubular reaction chamber as described in claim 1, characterized in that, The sealing plate valve includes a valve body and a gate. The valve body is connected to the reaction chamber body and is disposed on one side of the reaction chamber body. The gate is slidably connected to the valve body and is disposed on the valve body.

5. The photovoltaic tubular reaction chamber as described in claim 4, characterized in that, The sealing plate valve also includes a heat shield plate, which is fixedly connected to the gate and located on one side of the gate.

6. The photovoltaic tubular reaction chamber as described in claim 1, characterized in that, The air extraction component includes a base plate and an air extraction pipe. The base plate is fixedly connected to the reaction chamber body and is located inside the reaction chamber body. The air extraction pipe is connected to the base plate and communicates with the base plate.

7. A photovoltaic tubular reaction device, characterized in that, Including the photovoltaic tubular reaction chamber as described in any one of claims 1-6.

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