Pump and beverage supply device

Abstract

The present invention is provided with: an electromagnet; a movable plate attracted by the electromagnet by a magnetic field generated by energization of the electromagnet; a plate spring to which the movable plate is attached and which biases the movable plate in the direction opposite to the attraction operation in accordance with the attraction operation of the movable plate to the electromagnet; a flow path through which a fluid flows; a pump chamber provided on the flow path; and a piston that is provided to the movable plate and that operates so as to reduce or increase the volume of the pump chamber in accordance with the operation of the movable plate, the magnetic core of the electromagnet having a winding portion around which a coil is wound at the center portion in the direction of the magnetic field, and having a pair of broadened portions formed so as to protrude toward the movable plate side with respect to the winding portion at both end portions, the widening section is formed so as to protrude by the same amount in the width direction orthogonal to the direction of the magnetic field, and a portion of the flow path including the pump chamber is disposed adjacent to the widening section at a position on the opposite side from the winding section, and the flow direction is disposed along the width direction. The piston is disposed adjacent to the movable plate at a position on the opposite side of the winding portion with the widening portion therebetween.

Description

Technical Field

[0001] This invention relates to pumps and beverage dispensing devices. Background Technology

[0002] Patent Document 1 discloses a resonant actuator that, when energized, attracts a movable plate to an electromagnet through the magnetic force generated by the electromagnet, and when de-energized, causes the movable plate to move away from the electromagnet through the force applied by the leaf spring that mounts the movable plate, thereby causing the movable plate to reciprocate and vibrate.

[0003] <Prior art documents> <Patent Documents> Patent Document 1: Japanese Patent No. 7222661 Summary of the Invention <Problem to be solved by this invention> However, when attempting to use such a resonant actuator as the pump's drive source, torsion can occur because the movable plate does not necessarily reciprocate in one direction. Therefore, the movement of the movable plate is sometimes unstable, and there is room for improvement in terms of pump performance and efficiency.

[0004] The purpose of this invention is to provide a pump and beverage dispensing device that can achieve high efficiency.

[0005] <Methods for solving problems> One aspect of an embodiment of the present invention relates to a pump comprising: an electromagnet; a movable plate attracted by the electromagnet via a magnetic field generated by the energization of the electromagnet; a leaf spring mounted on the movable plate, which applies a force to the movable plate in the opposite direction to the attraction action of the movable plate towards the electromagnet; a flow path for fluid flow; a pump chamber disposed in the flow path; a piston disposed on the movable plate, which operates to reduce the volume of the pump chamber according to the attraction action of the movable plate, and to increase the volume of the pump chamber according to the retraction action of the movable plate away from the electromagnet caused by the force applied by the leaf spring when the electromagnet is switched off after the attraction action; and a suction valve disposed upstream of the flow path in the pump chamber, which opens when the piston operates in the direction of increasing the volume of the pump chamber to allow fluid to flow into the pump chamber. The fluid is drawn in from the upstream side of the flow path; and a discharge valve is provided in the pump chamber on the downstream side of the flow path, which opens when the piston moves in the direction of volume reduction of the pump chamber to discharge the fluid from the pump chamber to the downstream side of the flow path. The magnetic core of the electromagnet has a wound portion of a coil at its central part along the direction of the magnetic field, and at both ends along the direction of the magnetic field, it has a widened portion that protrudes toward the movable plate relative to the wound portion. When the direction orthogonal to the direction of the magnetic field is defined as the width direction, the widened portion protrudes by the same amount along the width direction. The portion of the flow path containing the pump chamber is arranged adjacent to each other at a position opposite to the wound portion, separated by the widened portion, and the flow direction is arranged along the width direction. The piston is arranged adjacent to each other in the movable plate at a position opposite to the wound portion, separated by the widened portion.

[0006] <The Effects of the Invention> According to the present invention, a pump and a beverage dispensing device with high efficiency can be provided. Attached Figure Description

[0007] Figure 1 This is a perspective view showing an example of the appearance of the pump involved in the embodiment.

[0008] Figure 2 It is shown Figure 1 A schematic diagram of the general structure inside the pump casing is shown.

[0009] Figure 3 This is a three-dimensional diagram showing the schematic structure of a resonant actuator.

[0010] Figure 4 yes Figure 3 An exploded perspective view of the resonant actuator shown.

[0011] Figure 5This is a schematic diagram of the cross-sectional shape of the pump involved in the embodiment along the axis of symmetry CA.

[0012] Figure 6 This is a schematic diagram of the cross-sectional shape of the pump involved in the embodiment along the axial direction of the fourth flow path.

[0013] Figure 7 This is a schematic diagram showing the operation of the pump when the coil is energized.

[0014] Figure 8 It is shown Figure 7 A schematic diagram of the area surrounding the first pump chamber in its current state.

[0015] Figure 9 This is a schematic diagram showing the operation of the pump when the coil is switched off.

[0016] Figure 10 It is shown Figure 9 A schematic diagram of the area surrounding the first pump chamber in its current state.

[0017] Figure 11 This is a schematic diagram of the magnetic field generated by an electromagnet using a flat magnetic core, as a comparative example.

[0018] Figure 12 This is a top view of the pump casing's internal structure as seen from the Z-direction.

[0019] Figure 13 This is a diagram illustrating an application example of the pump involved in the embodiment.

[0020] Figure 14 This is a diagram showing the structure of the flow path of the pump involved in the first variation.

[0021] Figure 15 It is shown Figure 14 A side view of an example of the structure of the cooling flow path and heat absorption section shown.

[0022] Figure 16 This is a diagram showing the structure of the flow path of the pump involved in the second variation.

[0023] Figure 17 This is a diagram showing the structure of the flow path of the pump involved in the third variation.

[0024] Figure 18 This is a schematic diagram of the cross-sectional shape of the pump involved in the fourth variation along the axis of symmetry CA.

[0025] Figure 19 This is a diagram showing the structure of the flow path of the pump involved in the fifth variation.

[0026] Figure 20 This is a diagram showing the structure of the flow path of the pump involved in the sixth variation.

[0027] Figure 21 This is a diagram illustrating an example of the structure in the pump described in the 6th variation, which utilizes a coil cooling structure.

[0028] Figure 22 This is a schematic diagram of the cross-sectional shape of the pump involved in the seventh variation along the axis of symmetry CA. Detailed Implementation

[0029] Hereinafter, the embodiments will be described with reference to the accompanying drawings. In order to make the description easy to understand, the same reference numerals will be used as much as possible for the same components in each drawing, and repeated descriptions will be omitted.

[0030] In the following description, the X, Y, and Z directions are mutually perpendicular. The X and Y directions are horizontal, and the Z direction is vertical. The X direction is the direction of the long side of the housing 2 or the resonant actuator 6. The Y direction is the direction of the short side of the housing 2 or the resonant actuator 6. Furthermore, for ease of explanation, the positive Z direction side may sometimes be referred to as the upper side, and the negative Z direction side as the lower side.

[0031] [Pump Structure] Reference Figures 1-6 The structure of pump 1 according to the embodiment will be described.

[0032] Figure 1 This is a perspective view showing an example of the appearance of the pump 1 according to the embodiment. Figure 1 As shown, pump 1 has a housing 2, a suction port 3 and a discharge port 4.

[0033] The housing 2 houses the flow path 5, resonant actuator 6, and other elements involved in the pump function, which will be described later. Figure 1 In the example, the shell 2 has a pair of rectangular main faces 21, 22, which are formed into a cuboid shape with the dimensions between each main face 21, 22 being relatively thin relative to the sides of the main faces.

[0034] A pair of principal faces 21 and 22 are formed with the same shape and are arranged opposite each other in the Z direction. The pair of principal faces 21 and 22 are arranged as rectangles with their long sides opposite each other in the Y direction and their short sides opposite each other in the X direction. That is, the pair of principal faces 21 and 22 are formed with the center of the short side in the Y direction and with a symmetry axis CA extending in the X direction (see reference). Figure 2 Based on the reference point, it is linearly symmetrical in the Y direction and is formed with the center in the X direction passing through the longer side, and with the axis of symmetry CB extending along the Y direction (see reference). Figure 2 It is linearly symmetrical in the X direction, with as the reference. Figure 1The diagram shows the centerline CO of pump 1, which passes through the intersection of these two axes of symmetry CA and CB (i.e., the center of a pair of principal surfaces 21 and 22) and extends along the Z direction.

[0035] Between a pair of main surfaces 21 and 22, four side surfaces 23 to 26 are provided, connecting the sides of each main surface. One pair of side surfaces 23 and 24 of one side are formed into identical rectangular shapes and are arranged opposite each other in the X direction, with their long sides connected to the short sides of the pair of main surfaces 21 and 22. The other pair of side surfaces 25 and 26 of the other side are formed into identical rectangular shapes and are arranged opposite each other in the Y direction, with their long sides connected to the long sides of the pair of main surfaces 21 and 22.

[0036] Inlet 3 draws fluid into the interior of housing 2. Outlet 4 discharges the pressurized fluid from inside housing 2 via a pump. Figure 1 In this example, an inlet 3 is provided on the negative Y-direction side of the side 23 of the housing 2, and an outlet 4 is provided on the positive Y-direction side of the side 24. Both the inlet 3 and outlet 4 are connected in the X-direction and are configured such that the direction of fluid intake from the inlet 3 into the interior of the housing 2 and the direction of fluid discharge from the interior of the housing 2 into the outlet 4 are in the same direction. Furthermore, the inlet 3 and outlet 4 are configured to be point-symmetrical when viewed from the Z-direction, with reference to the centerline CO of the pump 1.

[0037] Figure 2 It is shown Figure 1 A schematic diagram of the general structure inside the housing 2 of the pump 1 shown. Figure 2 This is a top view of pump 1 viewed from the Z-direction. Figure 2 The internal structure of the shell 2 is schematically illustrated, and its external shape (i.e., the four sides 23-26) is shown with double-dotted lines. Furthermore, in... Figure 2 In the diagram, a single-dotted line is used to indicate the axis of symmetry CA, which passes through the center of the Y direction on the main surfaces 21 and 22 of the housing 2 and extends along the X direction, and the axis of symmetry CB, which passes through the center of the X direction and extends along the Y direction. Figure 2 The diagram illustrates the intersection of the axes of symmetry CA and CB as the center line CO.

[0038] like Figure 2 As shown, the pump 1 is located inside the housing 2 and has a flow path 5 that connects the suction port 3 and the discharge port 4. The flow path 5 has a first flow path 51, a second flow path 52, a third flow path 53, a fourth flow path 54, a fifth flow path 55, a sixth flow path 56, a seventh flow path 57 and an eighth flow path 58.

[0039] The first flow path 51 is configured such that its upstream end connects to the downstream end of the suction port 3, and extends in the positive X direction. The second and third flow paths 52 and 53 are both configured such that their upstream ends connect to the downstream ends of the first flow path 51 and branch out, extending in the negative X direction and the positive X direction, respectively. The fourth flow path 54 is configured such that its upstream end connects to the downstream end of the second flow path 52, and extends in the positive Y direction. The fifth flow path 55 is configured such that its upstream end connects to the downstream end of the third flow path 53, and extends in the positive Y direction. The sixth flow path 56 is configured such that its upstream end connects to the downstream end of the fourth flow path 54 and extends in the positive X direction. The seventh flow path 57 is configured such that its upstream end connects to the downstream end of the fifth flow path 55 and extends in the negative X direction, merging at the downstream ends of the sixth and seventh flow paths 56 and 57. The 8th flow path 58 is configured such that its upstream end connects to the confluence of the 6th flow path 56 and the 7th flow path 57, extends in the positive X direction, and its downstream end connects to the upstream end of the discharge outlet 4. Additionally, in Figure 2 The arrows in the diagram illustrate the flow direction of the fluid flowing inside the inlet 3, flow path 5, and outlet 4.

[0040] For reference Figure 1 As explained, the configuration of the suction port 3 and the discharge port 4 is such that they are point-symmetric when viewed from the Z direction, with reference to the centerline CO of the pump 1. Therefore, the overall shape of the flow path 5 is also preferably configured similarly to be point-symmetric when viewed from the Z direction, with reference to the centerline CO of the pump 1. This allows for easier fluid flow from the suction port 3 to the discharge port 4 via the flow path 5.

[0041] Furthermore, inside the housing 2, a resonant actuator 6 is provided as the drive source for the pump 1. The resonant actuator 6 is a device that has an electromagnet 61 and causes it to vibrate by switching the electromagnet 61 between energization and de-energization. Moreover, the resonant actuator 6 makes the movable part resonate by setting the frequency of the control signal used to switch between energization and de-energization (i.e., the switching operation frequency) to be the same as or close to the resonant frequency of the movable part (including the group of components such as movable plates 62, 63, leaf springs 64, 65, etc., described later), which is a vibrating element. Thus, in addition to the attraction of the electromagnet 61 to the movable part when the electromagnet 61 is energized, the resonant actuator 6 can also make the movable part vibrate efficiently by utilizing the resonance of the movable part.

[0042] exist Figure 2In this example, the resonant actuator 6 is configured such that the X direction is the long side and the Y direction is the short side, positioned at the center when viewed along the Z direction. Furthermore, like the housing 2, the resonant actuator 6 is formed to be linearly symmetrical in the Y direction with respect to the axis of symmetry CA, and linearly symmetrical in the X direction with respect to the axis of symmetry CB. The electromagnet 61 is positioned at the center of the resonant actuator 6.

[0043] Furthermore, the fourth flow path 54 of flow path 5 is configured to be adjacent to the electromagnet 61 on the negative X-direction side and to pass through the resonant actuator 6 in the Y-direction. Similarly, the fifth flow path 55 of flow path 5 is configured to be adjacent to the electromagnet 61 on the positive X-direction side and to pass through the resonant actuator 6 in the Y-direction.

[0044] Furthermore, in the portions of the fourth flow path 54 and the fifth flow path 55 that overlap with the resonant actuator 6 when viewed along the Z-direction, a first pump chamber 7 and a second pump chamber 8 are respectively provided. The first pump chamber 7 and the second pump chamber 8 are elements that, in conjunction with the vibrational movement of the resonant actuator 6, pressurize and discharge the fluid from the upstream side to the downstream side of the flow path 5. The fluid within the flow path 5 can flow from the suction port 3 to the discharge port 4 through the action of the first pump chamber 7 and the second pump chamber 8. Figure 2 In the example, both the first pump chamber 7 and the second pump chamber 8 are arranged on the axis of symmetry CA of the housing 2 and the resonant actuator 6. Furthermore, as described above, in Figure 2 In this example, the shape of the flow path 5 is configured to be point-symmetric when viewed along the Z direction, with reference to the central axis O passing through the center of a pair of main surfaces 21, 22 of the housing 2. Thus, the first pump chamber 7 and the second pump chamber 8 are respectively positioned approximately at the middle of the flow path 5, thereby ensuring that the energy required for the intake of fluid into the first pump chamber 7 and the discharge of fluid from the first pump chamber 7 and the second pump chamber 8 is approximately the same.

[0045] Reference Figure 3 , Figure 4 The structure of the resonant actuator 6 of the pump 1 according to the embodiment will be described. Figure 3 This is a perspective view showing the schematic structure of the resonant actuator 6. Figure 4 yes Figure 3 An exploded perspective view of the resonant actuator 6 shown. Figure 3 , Figure 4 The direction of strabismus and Figure 1 same.

[0046] like Figure 3 , Figure 4 As shown, the resonant actuator 6 has an electromagnet 61, a pair of movable plates 62 and 63, and a pair of leaf springs 64 and 65.

[0047] Electromagnet 61 is positioned at the center of the resonant actuator 6 in the Z direction. For example... Figure 4 As shown, the electromagnet 61 has a magnetic core 611 and a coil 612. The magnetic core 611 has a winding portion 611A and a pair of widening portions 611B. The winding portion 611A is the central part of the magnetic core 611 in the X direction, extending along the X direction. Furthermore, the winding portion 611A has a rectangular cross-sectional shape along the YZ plane, and its outer peripheral surface is formed by four surfaces with the positive Y direction side, the negative Y direction side, the positive Z direction side, and the negative Z direction side as normal directions. The coil 612 is wound on the outer peripheral surface of the winding portion 611A. The pair of widening portions 611B are formed at both ends of the winding portion 611A along the X direction, protruding towards both sides in the Z direction relative to the winding portion. The widening portions 611B also have a rectangular cross-sectional shape along the YZ plane, and have four surfaces with the positive Y direction side, the negative Y direction side, the positive Z direction side, and the negative Z direction side as normal directions. That is, the widened portion 611B has an upper end face and a lower end face that protrude by the same amount relative to the winding portion 611A along the Y direction.

[0048] The electromagnet 61 is energized by allowing current to flow through the wires that form the coil 612, thereby generating a magnetic field passing through the center of the coil 612. The magnetic field generated by the coil 612 is further amplified by the magnetic core 611.

[0049] A pair of movable plates 62 and 63 are plate-shaped members formed of magnetic materials, having a first movable plate 62 and a second movable plate 63. The first movable plate 62 is positioned on the positive Z-direction side relative to the electromagnet 61, and the second movable plate 63 is positioned on the negative Z-direction side relative to the electromagnet 61. The first movable plate 62 and the second movable plate 63 are formed with the same shape and are arranged opposite each other in the Z-direction.

[0050] Since the first movable plate 62 and the second movable plate 63 are magnetic, they are attracted by the magnetic field generated by the energization of the electromagnet 61. Furthermore, when the electromagnet 61 changes from an energized state to a de-energized state, the first movable plate 62 and the second movable plate 63 move in the opposite direction to the attraction action by the force applied from their respective mounted leaf springs 64 and 65. That is, the first movable plate 62 and the second movable plate 63 can vibrate in the Z direction by switching between energizing and de-energizing the electromagnet 61.

[0051] like Figure 4 As shown, the first movable plate 62 has a central portion 621 and a pair of end portions 622, 623. The central portion 621 is the central part of the first movable plate 62 in the X direction, and when viewed along the Z direction, it is formed into a rectangular shape with its long sides facing each other in the Y direction and its short sides facing each other in the X direction. The shape of the central portion 621 is formed to cover the entire shape of the electromagnet 61 when viewed from the Z-direction side. The pair of end portions 622, 623 are configured to connect to the two end portions of the central portion 621 along the X direction, i.e., the short sides of the aforementioned rectangular shape. Figure 4 In this example, one end 622 is positioned on the negative X-direction side of the central portion 621, and the other end 623 is positioned on the positive X-direction side of the central portion 621. The Y-direction dimensions of the pair of ends 622 and 623 are the same as those of the central portion 621. The X-direction dimensions of the pair of ends 622 and 623 are approximately the same. Furthermore, the Z-direction thickness dimensions of the pair of ends 622 and 623 are, for example, as shown below. Figure 3 , Figure 4 As illustrated, it is preferable to form a material that is thinner than the central portion 621.

[0052] At a pair of ends 622 and 623 of the first movable plate 62, pistons 71 and 81 are provided on their respective Z-negative direction side surfaces, extending toward the Z-negative direction side. The pistons 71 and 81 will be described later.

[0053] The second movable plate 63 has a central portion 631 and a pair of end portions 632, 633. The central portion 631 is the central part of the second movable plate 63 in the X direction, and when viewed along the Z direction, it is formed into a rectangular shape with its long sides facing each other in the Y direction and its short sides facing each other in the X direction. When viewed from the negative Z direction, the shape of the central portion 631 is formed to cover the overall shape of the electromagnet 61. The pair of end portions 632, 633 are configured to connect to the two end portions of the central portion 631 along the X direction, i.e., the short sides of the aforementioned rectangular shape. Figure 4 In this example, one end 632 is positioned on the negative X-direction side of the central portion 621, and the other end 633 is positioned on the positive X-direction side of the central portion 631. The Y-direction dimensions of the pair of ends 632 and 633 are the same as those of the central portion 631. The X-direction dimensions of the pair of ends 632 and 633 are approximately the same. Furthermore, the Z-direction thickness of the pair of ends 632 and 633 is, for example, as shown below. Figure 3 , Figure 4 As illustrated, it is preferable to form a portion that is thinner than the central portion 631.

[0054] On the two ends 632, 633 of the second movable plate 63, pistons 72 and 82 are provided on their respective Z-direction side surfaces, extending toward the Z-direction side. The pistons 72 and 82 will be described later.

[0055] A pair of leaf springs 64 and 65 are elastic members that apply force in the Z direction, having a first leaf spring 64 and a second leaf spring 65. The first leaf spring 64 is positioned on the positive Z-direction side relative to the first movable plate 62, and the first movable plate 62 is mounted thereon. The second leaf spring 65 is positioned on the negative Z-direction side relative to the second movable plate 63, and the second movable plate 63 is mounted thereon. The first leaf spring 64 and the second leaf spring 65 are formed with the same shape and are arranged opposite each other in the Z-direction. That is, as... Figure 3As shown, the first leaf spring 64 and the second leaf spring 65 form the outermost part of the resonant actuator 6 in the Z direction. The first leaf spring 64, in response to the attraction of the first movable plate 62 to the electromagnet 61, applies a force to the first movable plate 62 in the opposite direction (positive Z direction side). Similarly, the second leaf spring 65, in response to the attraction of the second movable plate 63 to the electromagnet 61, applies a force to the second movable plate 63 in the opposite direction (negative Z direction side).

[0056] like Figure 4 As shown, the first leaf spring 64 has a central portion 641, a pair of fixed ends 642, and a pair of flexible portions 643. The central portion 641 is the part of the first leaf spring 64 at its center in the X direction, and is a flat plate-shaped part formed with a constant width dimension in the Y direction and outer edges on both sides extending along the X direction. The first leaf spring 64 is fitted with a first movable plate 62 at the central portion 641, thereby being configured to move integrally with the first movable plate 62.

[0057] A pair of fixed ends 642 are flat plate-shaped portions disposed at both ends of the first leaf spring 64 along the X direction, with the outer edges of the X-direction extending along the Y direction. The first leaf spring 64 is a support 9 (see reference 9), which serves as an example of a fixing element disposed inside the housing 2. Figure 5 A pair of fixed ends 642 are fixedly provided, thereby fixing the two ends in the X direction.

[0058] A pair of flexural portions 643 are disposed between the central portion 641 along the X direction of the first leaf spring 64 and a pair of fixed ends 642. The pair of flexural portions 643 flex elastically deform and flex in a manner that changes the relative positional relationship in the Z direction between the central portion 641 on which the first movable plate 62 is mounted and the pair of fixed ends 642 fixed to the support body 9. The first leaf spring 64 can apply force to the first movable plate 62 mounted on the central portion 641 through the elastic deformation of such a pair of flexural portions 643.

[0059] In addition, such as Figure 4 As shown, the pair of flexible portions 643 are formed with a relatively small width dimension orthogonal to the direction connecting the central portion 641 and the pair of fixed ends 642, and are formed to bend in an S-shape when viewed along the Z direction, so as to facilitate elastic deformation. Furthermore, in order to make the deflection in the Y direction more uniform, the S-shaped bends are arranged on both sides of the Y direction, sandwiching the axis of symmetry CA, and are formed to be linearly symmetrical with respect to the axis of symmetry CA. Alternatively, the bends can also be in shapes other than S-shapes.

[0060] like Figure 4As shown, the second leaf spring 65 has a central portion 651, a pair of fixed ends 652, and a pair of flexible portions 653. The central portion 651 is the part of the second leaf spring 65 at its center in the X direction, and is a flat plate-shaped portion formed with a constant width dimension in the Y direction and outer edges on both sides extending along the X direction. The second leaf spring 65 has a second movable plate 63 mounted on the central portion 651, thereby being configured to move integrally with the second movable plate 63.

[0061] A pair of fixed ends 652 are flat plate-shaped portions disposed at both ends of the second leaf spring 65 along the X direction, with the outer edges of the X-direction extending along the Y direction. The second leaf spring 65 serves as a support 9 (see reference 9) as an example of a fixing element disposed inside the housing 2. Figure 5 A pair of fixed ends 652 are fixedly provided, thereby fixing the two ends in the X direction.

[0062] A pair of flexural portions 653 are disposed between the central portion 651 along the X direction of the second leaf spring 65 and a pair of fixed ends 652. The pair of flexural portions 653 flex elastically deform and flex in a manner that changes the relative positional relationship in the Z direction between the central portion 651 on which the second movable plate 63 is mounted and the pair of fixed ends 652 fixed to the support body 9. The second leaf spring 65 can apply force to the second movable plate 63 mounted on the central portion 651 through the elastic deformation of such a pair of flexural portions 653.

[0063] In addition, such as Figure 4 As shown, the pair of flexible portions 653 are formed with a relatively small width dimension that is orthogonal to the direction connecting the central portion 651 and the pair of fixed ends 652, and are formed to bend in an S-shape when viewed along the Z direction, so as to facilitate elastic deformation. Furthermore, in order to make the deflection in the Y direction more uniform, the S-shaped bends are arranged on both sides of the Y direction, sandwiching the axis of symmetry CA, and are formed to be linearly symmetrical with respect to the axis of symmetry CA. Alternatively, the bends can also be in shapes other than S-shape.

[0064] In addition, such as Figure 4 As shown, the components of the resonant actuator 6 are configured such that the center of their respective shapes, when viewed along the Z direction, coincides with the centerline CO of the pump 1. This ensures that the center of gravity of the resonant actuator 6 is located near the centerline CO of the pump 1, enabling the resonant actuator 6 to operate in a balanced and efficient manner.

[0065] Furthermore, in this embodiment, a structure is illustrated in which the first movable plate 62 and the second movable plate 63 are mounted at the central portions 641 and 651 of the first leaf spring 64 and the second leaf spring 65, respectively. However, it is also possible for the first movable plate 62 and the second movable plate 63 to be mounted at any position other than the central portion in the X direction of the first leaf spring 64 and the second leaf spring 65, respectively. Moreover, regarding the first leaf spring 64 and the second leaf spring 65, a structure is illustrated in which they are fixedly mounted to the support body 9 via a pair of fixed ends 642 and 652, respectively. However, it is also possible for them to be fixedly mounted to the support body 9 at any position other than both ends in the X direction.

[0066] Furthermore, in this embodiment, as described above, the first movable plate 62 and the second movable plate 63 are formed with the same shape, and the first leaf spring 64 and the second leaf spring 65 are formed with the same shape. The mounting positions of the first movable plate 62 toward the first leaf spring 64 and the second movable plate 63 toward the second leaf spring 65 are also the same. Therefore, the resonant frequency of the first movable part (the first movable plate 62 and the first leaf spring 64) and the resonant frequency of the second movable part (the second movable plate 63 and the second leaf spring 65) are also the same. Therefore, as long as the switching operation frequency for switching the energized and de-energized states of the single electromagnet 61 disposed between the first and second movable parts is set to a frequency that is the same as or close to the resonant frequency shared by the first and second movable parts, it is possible to make both the first and second movable parts converge into a resonant state. As a result, the resonant actuator 6 of this embodiment can vibrate the movable part more efficiently.

[0067] Reference Figure 5 , Figure 6 The structure of the first pump chamber 7 and the second pump chamber 8 of the pump 1 according to the embodiment will be described. Figure 5 This is a schematic diagram of the cross-sectional shape of the pump 1 according to the embodiment along the axis of symmetry CA. Figure 5 In the diagram, the components of pump 1, including housing 2, omit the elements located outside the resonant actuator 6.

[0068] like Figure 5 As shown, the fourth flow path 54 and the fifth flow path 55 are holes provided in the support body 9, which is an example of a fixture installed inside the housing 2. The support body 9 includes, for example, a block-shaped component fixed to the inner wall surface of the housing 2. The other flow paths besides the fourth flow path 54 and the fifth flow path 55 are also provided in the holes of the support body 9. Furthermore, in Figure 5In the example, the support body 9 for the flow path 5, and the pair of fixed ends 642 of the first leaf spring 64 and the pair of fixed ends 652 of the second leaf spring 65 of the resonant actuator 6 are fixed together as a single component. However, it can also be a structure in which different components are connected together. Similarly, the first to eighth flow paths 51 to 58 constituting the flow path 5 can be respectively provided on different supports, and these supports can be connected to form the flow path 5.

[0069] Figure 5 The cross-section is a cross-section of pump 1 along the axis of symmetry CA, therefore referencing Figure 2 It can be seen that these are cross-sections of the portion of the fourth flow path 54 where the first pump chamber 7 is located, and the portion of the fifth flow path 55 where the second pump chamber 8 is located. For example... Figure 5 As shown, the first pump chamber 7 and the second pump chamber 8 are respectively provided with cylinders 73 and 83 that are connected along the Z direction.

[0070] The cylinder 73 of the first pump chamber 7 is formed with openings on both the positive Z-direction side and the negative Z-direction side of the support body 9. Furthermore, in this embodiment, the first piston 71 provided on the first movable plate 62 and the second piston 72 provided on the second movable plate 63 are arranged at a position overlapping the first pump chamber 7 in the axial direction, that is, at a position overlapping the axial direction of the cylinder 73. Therefore, as... Figure 5 As shown, the first piston 71 is slidably inserted into the cylinder 73 through the opening on the positive Z side, and the second piston 72 is slidably inserted into the cylinder 73 through the opening on the negative Z side.

[0071] The cylinder 83 of the second pump chamber 8 is formed with openings on both the positive Z-direction side and the negative Z-direction side of the support body 9. Furthermore, in this embodiment, the first piston 81 provided on the first movable plate 62 and the second piston 82 provided on the second movable plate 63 are arranged at a position overlapping the second pump chamber 8 in the axial direction, that is, at a position overlapping the axial direction of the cylinder 83. Therefore, as... Figure 5 As shown, the first piston 81 is slidably inserted into the cylinder 83 through the opening on the positive Z side, and the second piston 82 is slidably inserted into the cylinder 83 through the opening on the negative Z side.

[0072] These first pistons 71 and 81 and second pistons 72 and 82 are respectively disposed on the first movable plate 62 and the second movable plate 63. Therefore, in conjunction with the Z-direction vibration movement of the first movable plate 62 and the second movable plate 63 controlled by the energization of the electromagnet 61, the first pistons 71 and 81 and the second pistons 72 and 82 slide within their respective cylinders 73 and 83, repeatedly approaching and moving away from each other. As a result, the volume of the first pump chamber 7 and the second pump chamber 8 can be increased or decreased.

[0073] Figure 6This is a schematic diagram of the cross-sectional shape of the pump 1 according to the embodiment, along the axial direction of the fourth flow path 54. (See diagram below.) Figure 6 As shown, an intake valve 74 and a discharge valve 75 are respectively provided on the upstream and downstream sides of the first pump chamber 7 within the fourth flow path 54. When the first piston 71 and the second piston 72 approach each other within the cylinder 73 and the volume of the first pump chamber 7 decreases, the intake valve 74 is configured to close to prevent the inflow of fluid from the upstream side of the fourth flow path 54 into the first pump chamber 7, and the discharge valve 75 is configured to open to discharge fluid from the first pump chamber 7 to the downstream side of the fourth flow path 54. On the other hand, when the first piston 71 and the second piston 72 move away from each other within the cylinder 73 and the volume of the first pump chamber 7 increases, the intake valve 74 is configured to open to allow fluid to flow from the upstream side of the fourth flow path 54 into the first pump chamber 7, and the discharge valve 75 is configured to close to prevent the discharge of fluid from the first pump chamber 7 to the downstream side of the fourth flow path 54.

[0074] exist Figure 6 In this example, as a structure for achieving such a function, the following structure is illustrated: both the suction valve 74 and the discharge valve 75 have a ball configured to seal the flow path upstream of the fourth flow path 54, and a spring that applies force to the ball upstream from the downstream side. However, the structures of the suction valve 74 and the discharge valve 75 can also be applied. Figure 6 Constructions other than those in the examples.

[0075] In this embodiment, the area between the lower end face of the first piston 71 and the upper end face of the second piston 72 within the cylinder 73 constitutes the volume of the first pump chamber 7. Furthermore, this volume increases or decreases according to the up-and-down movement of the first piston 71 and the second piston 72 within the cylinder 73.

[0076] In addition, Figure 6 The cross-section of the fourth flow path 54 in the diagram illustrates the structure of the first pump chamber 7, but the structure of the second pump chamber 8 in the fifth flow path 55 is the same. That is, the area between the lower end face of the first piston 81 and the upper end face of the second piston 82 within the cylinder 83 constitutes the volume of the second pump chamber 8. Furthermore, this volume increases or decreases according to the up-and-down movement of the first piston 81 and the second piston 82 within the cylinder 83.

[0077] [Pump operation] Reference Figures 7-10 The operation of pump 1 according to the embodiment will be explained.

[0078] Figure 7 This is a schematic diagram showing the operation of pump 1 when the coil is energized. Figure 8 It is shown Figure 7 A schematic diagram of the area surrounding the first pump chamber 7 in its current state. Figure 7 , Figure 8 Summary and Figure 5 , Figure 6 same.

[0079] like Figure 7 As shown, when the coil 612 of the electromagnet 61 is energized, a magnetic field M1 is generated passing through the center of the coil 612. The magnetic field M1 generated by the coil 612 is further enhanced by the winding portion 611A of the magnetic core 611, which is provided through the center of the coil 612. Figure 7 In the example, a magnetic field M1 is generated inside the winding section 611A, facing the positive X direction.

[0080] The magnetic field M1 generated in this way branches out in the positive Z and negative Z directions along the protruding direction of the widened portion 611B disposed on the positive X direction side of the winding portion 611A of the magnetic core 611. Then, it flows towards the negative X direction from the interior of the first movable plate 62 and the second movable plate 63, which are respectively disposed opposite to the upper and lower end faces of the widened portion 611B. Then, the flow from the upper and lower end faces of the widened portion 611B disposed on the negative X direction side of the winding portion 611A merges at the central portion of the widened portion 611B in the Z direction and flows back into the winding portion 611A. That is, Figure 7 When viewed from the negative Y direction, the illustrated magnetic field M1 flows clockwise on the side of the first movable plate 62 and counterclockwise on the side of the second movable plate 63.

[0081] By generating such a magnetic field M1, thus... Figure 7 As shown by arrow A, the first movable plate 62 is attracted by electromagnet 61 and moves towards the negative Z direction. Similarly, as shown by arrow B, the second movable plate 63 is attracted by electromagnet 61 and moves towards the positive Z direction.

[0082] By moving the first movable plate 62 and the second movable plate 63 toward the side attracted by the electromagnet 61, the first piston 71 slides in the negative Z direction within the cylinder 73, as shown by arrow C, in the first pump chamber 7. Furthermore, the second piston 72 slides in the positive Z direction within the cylinder 73, as shown by arrow D. As a result, the lower end face of the first piston 71 approaches the upper end face of the second piston 72, and the volume of the first pump chamber 7 decreases.

[0083] Similarly, in the second pump chamber 8, as shown by arrow E, the first piston 81 slides in the negative Z direction within the cylinder 83. Furthermore, as shown by arrow F, the second piston 82 slides in the positive Z direction within the cylinder 83. As a result, the lower end face of the first piston 81 and the upper end face of the second piston 82 approach each other, and the volume of the second pump chamber 8 decreases.

[0084] Ideally, the first movable plate 62 and the second movable plate 63 move together in parallel in the Z direction via the magnetic field M1. Therefore, the sliding amount of the two first pistons 71 and 81 on the first movable plate 62 is the same as the sliding amount of the two second pistons 72 and 82 on the second movable plate 63. Consequently, the reduction in volume of the first pump chamber 7 and the second pump chamber 8 is also the same.

[0085] Furthermore, by moving the first movable plate 62 toward the side attracted by the electromagnet 61, the central portion 641 of the first leaf spring 64, on which the first movable plate 62 is mounted, also moves integrally with the first movable plate 62 in the direction of arrow A. At this time, since the fixed end 642 of the first leaf spring 64 is fixedly provided to the support body 9, the central portion 641 is displaced relative to the fixed end 642 in the negative Z direction. Figure 7 middle, Figure 5 The Z-direction position of the first leaf spring 64 in the stable state illustrated by the dashed line S1. As a result of this displacement, the flexural portion 643, located between the central portion 641 and the fixed end 642, elastically deforms in the negative Z-direction, thereby... Figure 7 As shown by the dashed arrow f1, a force f1 is generated in the flexural portion 643 for elastic recovery in the positive Z direction.

[0086] Similarly, by moving the second movable plate 63 toward the side attracted by the electromagnet 61, the central portion 651 of the second leaf spring 65, on which the second movable plate 63 is mounted, also moves integrally with the second movable plate 63 in the direction of arrow B. At this time, since the fixed end 652 of the second leaf spring 65 is fixedly provided to the support body 9, the central portion 651 is displaced in the positive Z direction relative to the fixed end 652. Figure 7 middle, Figure 5 The Z-direction position of the second leaf spring 65 in the stable state illustrated by the dashed line S2. As a result of this displacement, the flexural portion 653, located between the central portion 651 and the fixed end 652, elastically deforms in the positive Z-direction, thereby... Figure 7 As shown by the dashed arrow f2, a force f2 is generated in the flexural portion 653 for elastic recovery in the negative Z direction.

[0087] When generated Figure 7 When the first pistons 71 and 81 and the second pistons 72 and 82 approach each other, the volumes of the first pump chamber 7 and the second pump chamber 8 decrease. Therefore, as shown... Figure 8As shown, in the first pump chamber 7, the balls of the suction valve 74 and the discharge valve 75 are pressed towards the upstream and downstream sides of the fourth flow path 54, respectively, due to the fluid within the first pump chamber 7. At this time, the suction valve 74 closes because its ball blocks the upstream side of the fourth flow path 54. On the other hand, the discharge valve 75 opens because its ball can move downstream as indicated by arrow G. As a result, the fluid in the first pump chamber 7 is pressurized and discharged towards the downstream side of the fourth flow path 54.

[0088] Furthermore, as mentioned above, the reduction in volume between the first pump chamber 7 and the second pump chamber 8 is the same, therefore, the second pump chamber 8 also has the same... Figure 7 Similarly, the fluid in the second pump chamber 8 is pressurized and discharged downstream of the fifth flow path 55, just as the first pump chamber 7 is shown.

[0089] Figure 9 It is shown in Figure 7 A schematic diagram showing the operation of pump 1 when the coil is energized and then switched to when the coil is not energized. Figure 10 It is shown Figure 9 A schematic diagram of the area surrounding the first pump chamber 7 in its current state. Figure 9 , Figure 10 Summary and Figure 5 , Figure 6 same.

[0090] like Figure 9 As shown, when the coil 612 of the electromagnet 61 is... Figure 7 When the energized state is switched to the de-energized state, the magnetic field M1 generated around the electromagnet 61 disappears.

[0091] Since the magnetic field M1 disappears, the attractive forces exerted on the first movable plate 62 and the second movable plate 63 by the electromagnet 61 also disappear. Therefore, through Figure 7 The dashed arrow indicates the force f1 applied to the flexural portion 643 of the first leaf spring 64, causing the first leaf spring 64 to actuate and elastically recover. In response to this actuation, the first movable plate 62 also moves towards the positive Z direction. However, since the attractive force balancing the applied force f1 disappears, neither the first movable plate 62 nor the first leaf spring 64 remains stationary at the stable position S1, but moves further towards the positive Z direction. Ultimately, as... Figure 9 As indicated by arrow H, the movement of the stable position S1 towards the positive Z direction is equal to the movement caused by the attraction of the electromagnet 61. Similarly, as indicated by arrow I, the second movable plate 63 and the second leaf spring 65 also move towards the negative Z direction from the stable position S2 by applying a force f2 towards the negative Z direction generated by the flexure portion 653.

[0092] By moving the first movable plate 62 and the second movable plate 63 away from the electromagnet 61, the first piston 71 slides in the positive Z direction within the cylinder 73, as indicated by arrow J, in the first pump chamber 7. Furthermore, the second piston 72 slides in the negative Z direction within the cylinder 73, as indicated by arrow K. As a result, the lower end face of the first piston 71 and the upper end face of the second piston 72 move further apart, increasing the volume of the first pump chamber 7.

[0093] Similarly, in the second pump chamber 8, as indicated by arrow L, the first piston 81 slides in the positive Z direction within the cylinder 83. Furthermore, as indicated by arrow M, the second piston 82 slides in the negative Z direction within the cylinder 83. As a result, the lower end face of the first piston 81 and the upper end face of the second piston 82 move further apart, increasing the volume of the second pump chamber 8.

[0094] Ideally, the first movable plate 62 and the second movable plate 63 move together in parallel in the Z direction due to the forces f1 and f2 applied by the flexural portions 643 and 653. Therefore, the sliding amount of the two first pistons 71 and 81 provided on the first movable plate 62 is the same as the sliding amount of the two second pistons 72 and 82 provided on the second movable plate 63. Consequently, the increase in volume of the first pump chamber 7 and the second pump chamber 8 is also the same.

[0095] When generated Figure 9 When the first pistons 71 and 81 and the second pistons 72 and 82 move away from each other, the volumes of the first pump chamber 7 and the second pump chamber 8 increase. Therefore, as shown... Figure 10 As shown, in the first pump chamber 7, the balls of the suction valve 74 and the discharge valve 75 are drawn towards the cylinder 73 side due to the fluid within the first pump chamber 7. At this time, the discharge valve 75 closes because the ball of the discharge valve 75 moves as indicated by arrow N, blocking the upstream side of the fourth flow path 54. On the other hand, the suction valve 74 opens because the ball of the suction valve 74 can move downstream as indicated by arrow O. As a result, fluid from the upstream side of the fourth flow path 54 is drawn into the first pump chamber 7.

[0096] Furthermore, as mentioned above, since the increase in volume between the first pump chamber 7 and the second pump chamber 8 is also the same, the second pump chamber 8 also has the same... Figure 10 Similarly, the fluid on the upstream side of the fifth flow path 55 is drawn into the second pump chamber 8, just as the first pump chamber 7 is shown.

[0097] In the pump 1 of this embodiment, by controlling the energization of the coil 612 of the electromagnet 61, the pump is repeatedly... Figure 7 , Figure 8 The states of the coil when it is energized (state 1) and... Figure 9 , Figure 10 The state shown when the coil is not energized (state 2) enables pump 1 to be driven.

[0098] In this control, the pressure of the fluid discharged from the pump 1 can be adjusted based on the amount and speed of movement of the first pistons 71 and 81 and the second pistons 72 and 82. To adjust the pressure, the amount and speed of movement of the first movable plate 62 and the second movable plate 63, which are used to set the first pistons 71 and 81 and the second pistons 72 and 82, need to be adjusted. To adjust the movement of the movable plates 62 and 63, the strength (magnetic flux density, etc.) of the magnetic field M1 generated by the electromagnet 61 needs to be adjusted. To adjust the magnetic field M1, the magnitude of the current flowing through the coil 612 of the electromagnet 61 needs to be controlled. That is, in the pump 1 of this embodiment, by controlling the current value flowing through the coil 612 of the resonant actuator 6, it is possible to control the discharge of fluid at the desired pressure.

[0099] Alternatively, in the pump 1 of this embodiment, for example, by adjusting various structures such as the number of turns of the wire of the coil 612 of the electromagnet 61, the dimensions of the winding portion 611A of the magnetic core 611 in the X and Y directions, the protrusion amount or dimensions of the widened portion 611B of the magnetic core 611 in the Z direction, the area and shape of the first movable plate 62 and the second movable plate 63 when viewed in the Z direction, and the spring constants of the first leaf spring 64 and the second leaf spring 65, it is also possible to control the ejection of fluid at the desired pressure.

[0100] The pump 1 of this embodiment includes: an electromagnet 61; a first movable plate 62 and a second movable plate 63, which are attracted by the electromagnet 61 through a magnetic field M1 generated by the energization of the electromagnet 61; a first leaf spring 64 and a second leaf spring 65, which respectively mount the first movable plate 62 and the second movable plate 63, and apply force to the first movable plate 62 and the second movable plate 63 in the opposite direction to the attraction action of the first movable plate 62 and the second movable plate 63 towards the electromagnet 61 in response to the attraction action of the electromagnet 61; a flow path 5 for fluid flow; a first pump chamber 7 and a second pump chamber 8, which are disposed on the flow path 5; and a first piston 71, 81 and a second piston 72, 82, which are examples of volume changing members. The volume changing members operate in response to the attraction action of the first movable plate 62 and the second movable plate 63 to reduce the volume of the first pump chamber 7 and the second pump chamber 8, and the electromagnet 61 cuts off after the attraction action. When not energized, the first movable plate 62 and the second movable plate 63 move away from the electromagnet 61 in response to the force applied by the first leaf spring 64 and the second leaf spring 65, thereby increasing the volume of the first pump chamber 7 and the second pump chamber 8; the suction valve 74, located upstream of the flow path 5 in the first pump chamber 7 and the second pump chamber 8, opens when the first piston 71, 81 and the second piston 72, 82 move in the direction of increasing the volume of the first pump chamber 7 and the second pump chamber 8, thereby drawing fluid into the first pump chamber 7 and the second pump chamber 8 from the upstream side of the flow path 5; and the discharge valve 75, located downstream of the flow path 5 in the first pump chamber 7 and the second pump chamber 8, opens when the first piston 71, 81 and the second piston 72, 82 move in the direction of decreasing the volume of the first pump chamber 7 and the second pump chamber 8, thereby discharging fluid from the first pump chamber 7 and the second pump chamber 8 to the downstream side of the flow path 5.

[0101] Here, the electromagnet 61 in the above-mentioned constituent elements can also be represented as a "fixed part". In addition, the first movable plate 62 and the second movable plate 63, the first leaf spring 64 and the second leaf spring 65 can also be represented as "movable parts that are attracted to the fixed part by the magnetic field generated by the energization of the electromagnet 61, and move away from the fixed part by the force generated during the attraction when the electromagnet 61 is not energized".

[0102] Based on these structures, the vibration generated by the fixed part (electromagnet 61) within the movable part (first movable plate 62 and second movable plate 63, first leaf spring 64 and second leaf spring 65) allows the first piston 71 and second piston 72, located in the first pump chamber 7, to slide synchronously within a common cylinder 73. That is, the resonant actuator 6 can be used as the drive source for the pump 1. Therefore, compared to conventional solenoid-driven metering pumps, the amount of piston movement required to increase or decrease the volume of the first pump chamber 7 and the second pump chamber 8 can be reduced, thus reducing vibration during pump 1 operation. Furthermore, by setting the switching frequency of the electromagnet 61 between its energized and de-energized states to a frequency that is the same as or near the resonant frequency of the movable part, which is a vibration element, the movable part can be brought into a resonant state. Thus, when the electromagnet 61 is energized, the resonant actuator 6 utilizes the resonance of the movable part in addition to the attraction of the electromagnet 61 to the movable part, thereby enabling efficient vibration of the movable part. As a result, the pump 1 of this embodiment can be made more efficient.

[0103] Furthermore, in the pump 1 of this embodiment, the first movable plate 62 and the second movable plate 63 are arranged opposite each other across the electromagnet 61. The first movable plate 62 and the second movable plate 63 are respectively mounted on the first leaf spring 64 and the second leaf spring 65. That is, the first leaf spring 64 and the second leaf spring 65 are also arranged opposite each other across the electromagnet 61. The first pistons 71 and 81 are provided on the first movable plate 62 and are linked to the movement of the first movable plate 62. The second pistons 72 and 82 are provided on the second movable plate 63 and are linked to the movement of the second movable plate 63.

[0104] According to this structure, a single electromagnet 61 can cause a pair of opposing movable parts (the first movable plate 62 and the first leaf spring 64, the second movable plate 63 and the second leaf spring 65) to vibrate synchronously. Since the pair of movable parts are positioned opposite each other across the electromagnet 61, they are attracted in opposite directions by the electromagnet 61. Therefore, the vibration directions of the pair of movable parts are out of phase. This allows the vibrations generated in the pump 1 due to the movement of each movable part to cancel each other out and be eliminated.

[0105] Furthermore, in the pump 1 of this embodiment, the first movable part (the first movable plate 62 and the first leaf spring 64) and the second movable part (the second movable plate 63 and the second leaf spring 65) are arranged opposite each other across the fixed part (electromagnet 61). The first pistons 71 and 81 are linked to the operation of the first movable part, and the second pistons 72 and 82 are linked to the operation of the second movable part. The first piston 71 and the second piston 72 are provided in the same first pump chamber 7. Similarly, the first piston 81 and the second piston 82 are provided in the same second pump chamber 8.

[0106] According to this structure, the pump chambers housing a pair of pistons can be made common, so for the group of first piston 71 and second piston 72, only one flow path (fourth flow path 54) and one valve (suction valve 74, discharge valve 75) are needed. Similarly, for the group of first piston 81 and second piston 82, only one flow path (fifth flow path 55) and one valve (suction valve 74, discharge valve 75) are needed. This reduces the number of components and simplifies the structure of pump 1. Furthermore, since the pump chambers are common, the reaction forces applied to the pair of pistons housed in the pump chamber are the same, and the deviation in the movement of the opposing pair of movable parts is reduced. This reduces the number of components and increases the number of pump chambers, thereby improving pump efficiency.

[0107] Here, in Figure 7 Based on and refer to Figure 11 The effects of the magnetic core 611 of the electromagnet 61 involved in this embodiment will be explained. Figure 11 This is a schematic diagram showing the magnetic field M2 generated by an electromagnet 61A using a flat magnetic core 611C as a comparative example.

[0108] exist Figure 11 In the comparative example, electromagnet 61A has a flat magnetic core 611C. The magnetic core 611C of the comparative example does not have... Figure 7 The widened portion 611B shown differs from the magnetic core 611 of the embodiment in this respect. The magnetic core 611C is formed with uniform dimensions in the Z direction throughout the X direction. In other words, the magnetic core 611C is the shape in which the winding portion 611A of the magnetic core 611 of the embodiment extends to both sides in the X direction where the widened portion 611B is disposed.

[0109] exist Figure 11 In the case of the shape of the magnetic core 611C shown, when the coil 612 is energized and a magnetic field M2 is generated inside the magnetic core 611C in the positive X direction, the magnetic field M2 temporarily enters and exits in the positive X direction from the end of the magnetic core 611C on the positive X side within the space of the resonant actuator 6. Then it branches and bends towards the positive Z and negative Z sides, reversing the direction, and enters the interior from the ends of the first movable plate 62 and the second movable plate 63 on the positive X side, towards the negative X side. Then, it again enters and exits in the negative X direction from the ends of the first movable plate 62 and the second movable plate 63 on the negative X side within the space of the resonant actuator 6, then bends towards the negative Z and positive Z sides, reversing the direction towards the positive X side and converging, before flowing into the end of the magnetic core 611C on the negative X side.

[0110] Right now, Figure 11 The magnetic field M2 of the exemplified comparative example and Figure 7The common feature of the magnetic field M1 in the illustrated embodiments is that, when viewed from the negative Y-direction side, the flow is clockwise on the side of the first movable plate 62 and counterclockwise on the side of the second movable plate 63. However, compared with the magnetic field M1 of the embodiments, the magnetic field M2 of the comparative example has a larger proportion of flow within the space of the resonant actuator 6, i.e., more air gaps, and therefore tends to increase magnetic reluctance.

[0111] In contrast, in the electromagnet 61 of this embodiment, by providing a widened portion 611B in the magnetic core 611, thereby achieving the desired effect... Figure 7 As shown, the air gap within the magnetic field M1 can be limited to the gap between the upper end face of the widened portion 611B and the first movable plate 62, and the gap between the lower end face of the widened portion 611B and the second movable plate 63. This reduces the air gap within the magnetic field M1, thereby reducing magnetic resistance, and thus enabling more efficient generation of magnetic force compared to the comparative example.

[0112] Furthermore, in this embodiment, the magnetic core 611 of the electromagnet 61 is as follows: Figure 3 , Figure 4 As shown in the diagram, the system is formed by stacking multiple electromagnetic steel plates along the Y direction. Adjacent electromagnetic steel plates are bonded together with an adhesive material, which partially forms an air gap, creating magnetic resistance that hinders the flow of magnetic flux. The magnetic flux generated by the coil 612 flows through the magnetic core 611 toward the movable plates 62 and 63. Therefore, when the stacking direction is set to the Y direction as in this embodiment, the air gap is positioned parallel to the flow of magnetic flux. As a result, the obstruction to the flow of magnetic flux is reduced, and the energy transfer efficiency is improved.

[0113] On the other hand, in a structure where the stacking direction is set to a different 90 degrees from that of this embodiment, i.e., the X direction is set as the stacking direction, the efficiency is reduced because the air gap is positioned to impede the flow of magnetic flux.

[0114] Next, refer to Figure 12 The effects of the shapes of the movable plates 62 and 63 and the leaf springs 64 and 65 in this embodiment will be explained. Figure 12 This is a top view of the internal structure of the housing 2 of pump 1, viewed from the Z-direction side. Figure 12 The diagram shows from Figure 1 The pump 1 shown is shown with the main surface of the housing 2 removed from the Z-direction side. The internal state of the housing 2 is observed from the side of the first leaf spring 64.

[0115] When the direction orthogonal to the direction (X direction) of the magnetic field M1 generated by electromagnet 61 (Y direction) is set as the width direction, such as Figure 12As shown, the width dimension W1 of at least the flexural portion 643 in the first leaf spring 64 is larger than the width dimension W2 of the first movable plate 62. Furthermore, in Figure 12 The relationship between the second movable plate 63 and the second leaf spring 65, which are hidden on the inside of the figure, is the same. The width dimension W1 of at least the flexural portion 653 of the second leaf spring 65 is larger than the width dimension W2 of the second movable plate 63.

[0116] For reference Figure 7 As explained, when the resonant actuator 6 is operating and the electromagnet 61 is energized, ideally, the first movable plate 62 and the second movable plate 63 move together in parallel in the direction approaching the electromagnet 61 (Z direction) due to the magnetic field M1 generated by the electromagnet 61. However, if the magnetic field M1 with uneven magnetic flux density is generated throughout the width of the movable plates 62 and 63, torsion may occur during operation, such as the first movable plate 62 or the second movable plate 63 tilting in the X or Y direction. Therefore, by forming the width dimension W1 of the leaf springs 64 and 65 to be larger than that of the movable plates 62 and 63, as in this embodiment, the torsion of the movable plates 62 and 63 during such operation can be easily absorbed by the leaf springs 64 and 65, thus enabling the first movable plate 62 and the second movable plate 63 to move parallel more stably. As a result, the pump 1 of this embodiment, in a structure that uses the resonant actuator 6 as a drive source, can reduce noise and vibration.

[0117] Furthermore, the first pump chamber 7 and the second pump chamber 8 are positioned opposite each other at both ends of the first movable plate 62 along the direction of the magnetic field M1 (X direction), where a pair of first pistons 71 and 81 are located. Similarly, the second movable plate 63 is positioned opposite each other at both ends along the direction of the magnetic field M1 (X direction), where a pair of second pistons 72 and 82 are located. In this structure with two pump chambers, since two pistons are provided on one movable plate, when the width dimension W1 of the leaf springs 64 and 65 is related to the width dimension W2 of the movable plates 62 and 63, the sliding stability of the two pistons provided on one movable plate relative to each pump chamber 7 and 8 can be achieved, thus particularly maximizing the torsional suppression effect of the movable plates 62 and 63.

[0118] Next, the effects related to the configuration of pump chamber 7 and pump chamber 8 will be explained. For example... Figure 2 , Figure 7As shown, the flow path 5 of pump 1 includes a fourth flow path 54 of the first pump chamber 7, which is separated from the widened portion 611B of the magnetic core 611 of electromagnet 61 by the X-negative direction side, and is arranged adjacent to the wound portion 611A of the magnetic core 611 (X-negative direction side), and the flow direction is arranged along the width direction (Y direction). Similarly, the flow path 5 of pump 1 includes a fifth flow path 55 of the second pump chamber 8, which is separated from the widened portion 611B of the magnetic core 611 of electromagnet 61 by the X-positive direction side, and is arranged adjacent to the wound portion 611A of the magnetic core 611 (X-positive direction side), and the flow direction is arranged along the width direction (Y direction).

[0119] Therefore, the first piston 71, which passes through the first pump chamber 7, is positioned adjacent to the widened portion 611B on the negative X-direction side of the electromagnet 61 and opposite to the winding portion 611A on the first movable plate 62. Similarly, the second piston 72, which passes through the first pump chamber 7, is positioned adjacent to the widened portion 611B on the negative X-direction side of the electromagnet 61 and opposite to the winding portion 611A on the negative X-direction side of the electromagnet 61 on the negative X-direction side of the second movable plate 63. Likewise, the first piston 81, which passes through the second pump chamber 8, is positioned adjacent to the widened portion 611B on the positive X-direction side of the electromagnet 61 and opposite to the winding portion 611A on the positive X-direction side of the first movable plate 62. Similarly, the second piston 82, which is inserted into the second pump chamber 8, is disposed adjacent to the second movable plate 63 at the opposite side (X-direction side) of the widened portion 611B and the winding portion 611A on the X-direction side of the electromagnet 61.

[0120] By providing widening portions 611B at both ends of the magnetic core 611 in the X direction of the electromagnet 61, thus achieving... Figure 7 As shown, a magnetic field M1 is generated by concentrating magnetic flux through the upper and lower surfaces of the widened portion 611B. That is, when the electromagnet 61 is energized, the portion of the first movable plate 62 facing the upper surface of the widened portion 611B receives the strongest attractive force, and the portion of the second movable plate 63 facing the lower surface of the widened portion 611B receives the strongest attractive force. Therefore, by arranging the first pistons 71 and 81 and the second pistons 72 and 82 adjacent to the widened portion 611B, each piston can be positioned near the portion of the first movable plate 62 and the second movable plate 63 where the electromagnet 61 receives the strongest attractive force. This allows for the efficient application of sliding force to the first pistons 71 and 81 and the second pistons 72 and 82 from the first movable plate 62 and the second movable plate 63, thereby improving the working efficiency of the first pump chamber 7 and the second pump chamber 8.

[0121] Furthermore, by arranging the first piston 71, 81 and the second piston 72, 82 near the portions of the first movable plate 62 and the second movable plate 63 that receive the strongest attraction from the high-power electromagnet 61, it is possible to suppress the situation where the movement direction of the first piston 71, 81 and the second piston 72, 82 is twisted during the attraction action due to the attraction generated when the electromagnet 61 is energized. As a result, the movement direction of the first piston 71, 81 and the second piston 72, 82 can be aligned with the axial direction (Z direction) of the cylinders 73, 83 of each pump chamber 7, 8, thus further improving the operating efficiency of the first pump chamber 7 and the second pump chamber 8. Consequently, the pump 1 of this embodiment, in a structure using the resonant actuator 6 as the drive source, achieves improved performance and higher efficiency.

[0122] Furthermore, the first pump chamber 7 is arranged adjacent to the winding portion 611A of the magnetic core 611 on the opposite side (negative X-direction side) of the magnetic core 611, separated by one of the pair of widened portions 611B of the electromagnet 61. The second pump chamber 8 is arranged adjacent to the winding portion 611A on the opposite side (positive X-direction side), separated by the other of the pair of widened portions 611B. In this structure with two pump chambers, since two pistons are provided on a single movable plate, by arranging each pump chamber 7, 8 adjacent to the widened portion 611B, the external force applied to the two pistons provided on the single movable plate can be made uniform, and the sliding synchronization of the pistons in each pump chamber 7, 8 can be easily achieved. As a result, the working efficiency of the pump chambers can be significantly improved.

[0123] In addition, such as Figure 2 As shown, the first pump chamber 7 and the second pump chamber 8 are preferably both arranged on the axis of symmetry CA of the housing 2. Figure 7 As shown, the coil 612 of the electromagnet 61 is configured with its central axis as the axis of symmetry CA. Therefore, there is a tendency for the magnetic flux to be most concentrated on the axis of symmetry CA on the central side of the coil 612. Consequently, the first movable plate 62 and the second movable plate 63 are easily subjected to the strongest attractive force from the electromagnet 61 on the axis of symmetry CA. Therefore, if the first pump chamber 7 and the second pump chamber 8 are configured on the axis of symmetry CA, the first pistons 71 and 81 and the second pistons 72 and 82 are also configured on the axis of symmetry CA in the same way. Thus, the sliding external force can be efficiently applied to the first pistons 71 and 81 and the second pistons 72 and 82 from the first movable plate 62 and the second movable plate 63, which can further improve the working efficiency of the first pump chamber 7 and the second pump chamber 8.

[0124] [Application example of pump 1] Figure 13 This is a diagram illustrating an application example of the pump 1 according to the embodiment. For example... Figure 13 As shown, the pump 1 described in this embodiment can be applied to beverage supply devices such as an espresso machine 100.

[0125] The espresso machine 100 includes a canister 101, a heater 102, a damper 103, and an extraction unit 104.

[0126] Tank 101 stores water for espressing coffee. Tank 101 is connected to pump 1, pump 1 to heater 102, and heater 102 to extraction unit 104 via flow path 107 for conveying water supplied from tank 101.

[0127] Pump 1 pressurizes the water supplied from tank 101 and delivers it to heater 102. In the case of espresso machine 100, pump 1 preferably pressurizes the water to 9 atmospheres.

[0128] Heater 102 heats the pressurized water delivered from tank 101 and sends it to extraction unit 104.

[0129] In the extraction unit 104, ground coffee bean powder 105 is filled in the lower part of the interior and pressed downward by the damper 103. Pressurized hot water heated by the heater 102 is supplied to the pressed coffee bean powder 105, and coffee is extracted from the extraction hole 106 at the lower end of the extraction unit 104.

[0130] In espresso machines, a high-pressure pump is needed to extract coffee under high pressure. Therefore, most existing espresso machines use solenoid-driven metering pumps. However, solenoid-driven metering pumps have problems such as high vibration and low efficiency.

[0131] In contrast, the pump 1 in this embodiment uses a resonant actuator 6 as the driving source, thus solving the problems of the existing solenoid-driven metering pumps and providing a more convenient espresso machine 100.

[0132] In addition to the espresso machine 100, pump 1 can also be applied to any beverage dispensing device that requires pressurization. Such a beverage dispensing device only needs to include at least the following elements: a container for storing beverage; pump 1 according to the embodiment that draws the beverage from the container and discharges it at a given pressure; and a nozzle (in the pump 1) that sprays the beverage discharged from pump 1. Figure 13 In this example, it is equivalent to extraction unit 104.

[0133] Furthermore, pump 1 can be applied to any device other than beverage dispensing devices that require pressurization. Examples of such devices include industrial manufacturing equipment (semiconductor manufacturing equipment, etc.), medical equipment, household equipment (toilets, washbasins, bathing equipment, etc.), and agricultural equipment.

[0134] <Example 1> Figure 14This is a diagram showing the structure of the flow path 5A of the pump 1A involved in the first modified example. Figure 14 The summary corresponds to Figure 2 However, the second flow path 52 and thereafter in flow path 5A are shown with dashed lines, and the diagram of the internal structure of housing 2 on the side closer to the positive Y direction than electromagnet 61 is omitted. Furthermore, for Figure 2 The diagram shows only the shape of the electromagnet 61 as a rectangle, along with the magnetic core 611 and the coil 612.

[0135] The pump 1A according to the first modification adds a coil cooling structure to the pump 1 of the embodiment. In the pump 1A according to the first modification, a cooling flow path 59 and a pair of heat absorption parts 11, 12 are provided as the coil cooling structure.

[0136] Cooling flow path 59 is branched from flow path 5A. Figure 14 In this example, the cooling flow path 59 is branched off from the downstream end of the first flow path 51 in flow path 5A, similarly to the second flow path 52 and the third flow path 53. The cooling flow path 59 is configured to extend towards the positive Y direction, reaching a position adjacent to the negative Y direction side of the coil 612 of the electromagnet 61. The front end of the cooling flow path 59 on the positive Y direction side is sealed. Furthermore, the front end of the cooling flow path 59 on the Y direction side is preferably positioned approximately at the center of the coil 612 in the X direction.

[0137] Figure 15 It is shown Figure 14 Side view of an example of the structure of the cooling flow path 59 and the heat absorption parts 11 and 12 shown. Figure 15 It is a cross-sectional view along the axial direction of the cooling flow path 59. In addition to the cooling flow path 59, the heat absorption parts 11 and 12 and the winding part 611A of the magnetic core 611 are also shown in cross-section.

[0138] like Figure 15 As shown, at the front end of the cooling flow path 59 on the positive Y direction side, there is a first hole 59A opening to the positive Z direction side and a second hole 59B opening to the negative Z direction side.

[0139] A pair of heat-absorbing portions 11 and 12 are formed, for example, from a plate made of a conductor such as metal, and are configured to contact the outer peripheral surfaces of the cooling flow path 59 and the coil 612. One heat-absorbing portion 11 is configured to contact the cooling flow path 59 and the coil 612 from the positive Z-direction side. Furthermore, the heat-absorbing portion 11 is configured to block the first hole 59A of the cooling flow path 59. The other heat-absorbing portion 12 is configured to contact the cooling flow path 59 and the coil 612 from the negative Z-direction side. Furthermore, the heat-absorbing portion 12 is configured to block the second hole 59B of the cooling flow path 59.

[0140] The fluid flowing in the positive Y direction in the cooling flow path 59 flows into the first hole 59A and the second hole 59B at the front end and comes into contact with the portions of the heat absorption parts 11 and 12 that are exposed in the first hole 59A and the second hole 59B.

[0141] The heat-absorbing parts 11 and 12 are cooled by contacting the fluid through the first hole 59A and the second hole 59B. In addition, the heat-absorbing parts 11 and 12 absorb heat generated by the energization of the coil 612 from the contact portion with the coil 612, thereby absorbing heat from the coil 612.

[0142] In this way, in the pump 1A according to the first modification, heat can be absorbed from the coil 612 of the electromagnet 61 using the cooling flow path 59 and the heat absorption parts 11 and 12, thus suppressing the temperature rise of the coil 612. As a result, the reduction in pump performance caused by the temperature rise of the coil 612 can be suppressed, and the performance reduction caused by the heat generation of the drive source of the pump 1A can be suppressed.

[0143] Furthermore, the cooling flow path 59 is preferably provided as a branch of the flow path 5A that is upstream of the first pump chamber 7 and the second pump chamber 8. This is because upstream of the first pump chamber 7 and the second pump chamber 8, the fluid is in its state before being pressurized by the pump chamber, so there is no effect from the temperature change caused by pressurization, and a stable cooling effect can be obtained.

[0144] In addition, Figure 14 In the example shown, a structure is illustrated where the cooling flow path 59 branches off from the flow path 5A, but the flow path 5A can also be used as the cooling flow path 59. In this case, the first hole 59A and the second hole 59B are provided at any position on the flow path 5A, and heat-absorbing parts 11 and 12 are provided at the positions where the first hole 59A and the second hole 59B are provided on the flow path 5A. In short, the cooling flow path 59 can be included in the description of "a part of the flow path 5A".

[0145] <Second Variation> Figure 16 This is a diagram showing the structure of the flow path 5B of the pump 1B involved in the second variation. Figure 16 The summary corresponds to Figure 2 .

[0146] like Figure 16 As shown, the configuration of the inlet 3 and outlet 4 can also be changed. Figure 16 In this example, an intake port 3 is provided on the negative X-direction side of the side 25 of the housing 2, and an outlet port 4 is provided on the positive X-direction side of the side 26. Both the intake port 3 and the outlet port 4 are connected in the Y-direction. The upstream end of the first flow path 51 of the flow path 5B is connected to the intake port 3 approximately orthogonally. Similarly, the downstream end of the eighth flow path 58 of the flow path 5B is connected to the outlet port 4 approximately orthogonally.

[0147] In addition, Figure 16 Besides the example, the inlet 3 and outlet 4 can also be arranged at any position on the housing 2, such as in a structure where the inlet 3 and outlet 4 are arranged on a pair of main surfaces 21, 22.

[0148] <Example 3> Figure 17 This is a diagram showing the structure of the flow path 5C of the pump 1C involved in the third variation. Figure 17 The summary corresponds to Figure 2 .

[0149] like Figure 17 As shown, in flow path 5C, the first pump chamber 7 and the second pump chamber 8 can be positioned at least in the fourth flow path 54 and the fifth flow path 55, or they can be located outside the axis of symmetry CA. For example, they can also be positioned as follows: Figure 17 As shown in the first pump chamber 7, it is positioned upstream of the flow path 5C, on the negative Y-direction side relative to the axis of symmetry CA. Alternatively, it can be positioned as follows: Figure 17 As shown in the second pump chamber 8, it is positioned downstream of the flow path 5C, which is closer to the positive Y-direction side than the axis of symmetry CA.

[0150] Furthermore, when the positions of the first pump chamber 7 and the second pump chamber 8 in the Y direction are the same, the attraction force received by the first movable plate 62 and the second movable plate 63 from the electromagnet 61 can be made equal, thus making the pump performance of the first pump chamber 7 and the second pump chamber 8 uniform.

[0151] <4th Variation> Figure 18 This is a schematic diagram of the cross-sectional shape of pump 1D along the axis of symmetry CA involved in the fourth variation. Figure 18 The summary corresponds to Figure 5 .

[0152] like Figure 18 As shown, a structure with only a single piston in one pump chamber is also possible. Figure 18 In the example, the first movable plate 62 is provided with only the first piston 71 inserted into the first pump chamber 7. The second movable plate 63 is provided with only the second piston 82 inserted into the second pump chamber 8.

[0153] In addition, Figure 18 In the example, the cylinder 73A of the first pump chamber 7 is open only on the side of the first movable plate 62, so that the first piston 71 can be inserted through it, and is sealed without opening on the side of the second movable plate 63. The cylinder 83A of the second pump chamber 8 is open only on the side of the second movable plate 63, so that the second piston 82 can be inserted through it, and is sealed without opening on the side of the first movable plate 62.

[0154] Even in a structure where only a single piston is installed in a single pump chamber, for example, Figure 18 As shown by the middle arrow, as long as the lower end of the sliding range of the first piston 71 is extended beyond the axis of symmetry CA to near the lower end of the fourth flow path 54, and the upper end of the sliding range of the second piston 82 is extended beyond the axis of symmetry CA to near the upper end of the fifth flow path 55, the same pump performance as pump 1 in the embodiment can be achieved.

[0155] <5th Variation> Figure 19 This is a diagram showing the structure of the flow path 5E of the pump 1E involved in the fifth modification example. Figure 19 The summary corresponds to Figure 2 .

[0156] like Figure 19 As shown, a structure in which only a single pump chamber 7A is provided in the flow path 5E is also possible. In this case, the pump chamber 7A is preferably disposed on the axis of symmetry CA and the axis of symmetry CB, that is, disposed at the position of the center line CO of the housing 2. As a result, the driving force applied to the first piston from the first movable plate 62 and the driving force applied to the second piston from the second movable plate can be more uniform, and the pump performance can be more stable.

[0157] With the pump chamber 7A configured in this way, the flow path 5E can be a structure that, in addition to the first flow path 51 connected to the suction port 3 and the eighth flow path 58 connected to the discharge port 4, only has an intermediate flow path 55A connecting the downstream end of the first flow path 51 to the upstream end of the eighth flow path 58. The intermediate flow path 55A is configured to extend along the Y direction with the axis of symmetry CB as the axis of direction. The intermediate flow path 55A can also be configured to, for example, pass through the winding portion 611A and the coil 612 of the magnetic core 611 of the electromagnet 61 along the Y direction.

[0158] In addition, Figure 2 The flow path 5 shown can also be configured to include only one of the first pump chamber 7 or the second pump chamber 8.

[0159] <6th Variation> Figure 20 This is a diagram showing the structure of the flow path 5F of the pump 1F involved in the sixth variation. Figure 20 The summary corresponds to Figure 2 .

[0160] like Figure 20 As shown, it can also be configured such that the inlet 3 and outlet 4 are located on the same side of the housing 2. Figure 20In this example, with this structure, both the intake port 3 and the exhaust port 4 are located on the side 25 of the housing 2. The intake port 3 is located on the negative X-direction side of the side 25, and the exhaust port 4 is located on the positive X-direction side of the side 25. Both the intake port 3 and the exhaust port 4 are connected in the Y-direction.

[0161] exist Figure 20 In this example, flow path 5F has a first flow path 91, a second flow path 92, a third flow path 93, and a fourth flow path 94. The first flow path 91 and the second flow path 92 are connected to the suction port 3 at their upstream ends. The first flow path 91 is configured to extend in the positive Y direction. The second flow path 92 is configured to extend in the positive X direction.

[0162] The third flow path 93 is connected to the downstream end of the first flow path 91 at its upstream end. The third flow path 93 is configured to extend in the positive X direction. The fourth flow path 94 is connected to the downstream end of the third flow path at its upstream end. The fourth flow path 94 is configured to extend in the negative Y direction.

[0163] The second flow path 92 and the fourth flow path 94 are connected to the discharge port 4 at their downstream ends.

[0164] In addition, Figure 20 In the example, the first to fourth flow paths 91 to 94 of flow path 5F are configured to surround the outer periphery of the electromagnet 61 of the resonant actuator 6 when viewed along the Z direction. The first flow path 91 and the fourth flow path 94 are configured to extend along the short side of the rectangular shape of the electromagnet 61. The second flow path 92 and the third flow path 93 are configured to extend along the long side of the rectangular shape of the electromagnet 61.

[0165] Furthermore in Figure 20 In the illustrated flow path 5F, the first pump chamber 95 is positioned at the center of the extension direction (X direction) of the third flow path 93, and the second pump chamber 96 is positioned at the center of the extension direction (X direction) of the second flow path 92. That is, both the first pump chamber 95 and the second pump chamber 96 are preferably positioned on the axis of symmetry CB extending along the Y direction. Figure 20 In the example, due to the configuration of the first pump chamber 95 and the second pump chamber 96, the first movable plate 62 and the second movable plate 63 of the resonant actuator 6 are formed such that the end face on the positive Y direction side in the width direction (Y direction) extends to a position closer to the positive Y direction side than the first pump chamber 95 and the third flow path 93, and the end face on the negative Y direction side extends to a position closer to the negative Y direction side than the second pump chamber 96 and the second flow path 92.

[0166] Figure 21 This is a diagram illustrating an example of a structure in which the same coil cooling structure as in the first modification is applied in the pump 1F involved in the sixth modification. Figure 21 The summary corresponds to Figure 14 .

[0167] In the pump 1F involved in the sixth modification, a cooling flow path 97 and a heat absorption section 13 are provided as coil cooling structures.

[0168] Cooling flow path 97 is branched from flow path 5F. Figure 21 In this example, the cooling flow path 97 is branched off towards the positive X-direction from the center of the first flow path 91 in the extending direction (Y direction) (on the axis of symmetry CA). The cooling flow path 97 is configured to extend from the first flow path 91 towards the positive X-direction and reach a position adjacent to the negative X-direction side of the widened portion 611B of the magnetic core 611 of the electromagnet 61. The front end of the cooling flow path 97 on the positive X-direction side is sealed.

[0169] A hole 97A opening towards the positive Z direction is provided at the front end of the cooling flow path 97 on the positive X-direction side. The heat-absorbing part 13 is formed of a plate, for example, a conductor such as metal, and is configured to make surface contact with the outer peripheral surface of the cooling flow path 97 and the outer peripheral surface of the widened part 611B on the negative X-direction side. The heat-absorbing part 13 is configured to make surface contact with the cooling flow path 97 and the widened part 611B from the positive Z-direction side. Furthermore, the heat-absorbing part 13 is configured to block the hole 97A of the cooling flow path 97.

[0170] The fluid flowing in the positive X direction in the cooling flow path 97 flows into the hole 97A at the front end and comes into contact with the portion of the heat-absorbing section 13 exposed in the hole 97A. The heat-absorbing section 13 is cooled by contacting the fluid through the hole 97A. In addition, the heat-absorbing section 13 absorbs heat generated by the energization of the coil 612 and transferred to the magnetic core 611 from the contact portion with the widened section 611B, thus indirectly absorbing heat from the coil 612.

[0171] In addition, the coil cooling structure in the sixth variation is also similar to Figure 15 Similarly, the structure of the first modified example can also be a structure in which a pair of heat-absorbing portions 13 are provided on both sides of the cooling flow path 97 in the Z direction. In this case, one of the pair of heat-absorbing portions 13 is configured to make surface contact with the cooling flow path 97 and the widening portion 611B from the positive Z direction side, and the other is configured to make surface contact with the cooling flow path 97 and the widening portion 611B from the negative Z direction side.

[0172] In the pump 1F described in the sixth modification, a coil cooling structure is applied, which allows for heat absorption from the widened portion 611B of the magnetic core 611 of the electromagnet 61 using the cooling flow path 97 and the heat absorption portion 13. This allows the temperature rise of the coil 612 to be suppressed via the widened portion 611B. Consequently, the decrease in pump performance caused by the temperature rise of the coil 612 can be suppressed, and thus the performance degradation caused by the heating of the pump 1F's drive source can be suppressed.

[0173] Furthermore, the cooling flow path 97 is preferably provided as a branch of the flow path 5F that is upstream of the first pump chamber 95 and the second pump chamber 96. This is because upstream of the first pump chamber 95 and the second pump chamber 96, the fluid is in its state before being pressurized by the pump chamber, so there is no effect of temperature change caused by pressurization, and a stable cooling effect can be obtained.

[0174] In addition, Figure 21 In the example shown, a structure is illustrated where the cooling flow path 97 branches off from the flow path 5F, but the flow path 5F can also be used as the cooling flow path 97. In this case, a hole 97A is provided at any position in the flow path 5F, and a heat absorption part 13 is provided at the position where the hole 97A is provided in the flow path 5F. In summary, the cooling flow path 97 can be included in the description of "a part of the flow path 5F".

[0175] <7th Variation> Figure 22 This is a schematic diagram of the cross-sectional shape of the pump 1G involved in the seventh variation along the axis of symmetry CA. Figure 22 The summary corresponds to Figure 5 .

[0176] like Figure 22 As shown, it can also be a structure that only has one of a pair of movable parts. Figure 22 In the example, only the first movable plate 62 and the first leaf spring 64 are provided.

[0177] exist Figure 22 In the example, the cylinder 73B of the first pump chamber 7 is opened only on the side of the first movable plate 62 (positive Z direction side), so that the first piston 71 can be inserted through it, and is sealed without opening on the negative Z direction side. The cylinder 83A of the second pump chamber 8 is also opened only on the side of the first movable plate 62 (positive Z direction side), so that the first piston 81 can be inserted through it, and is sealed without opening on the negative Z direction side.

[0178] In a structure like this, where only a single piston is installed in a single pump chamber, for example, also as Figure 22 As shown by the middle arrow, as long as the lower end of the sliding range of the first piston 71 is extended beyond the axis of symmetry CA to near the lower end of the fourth flow path 54, and the lower end of the sliding range of the first piston 81 is extended beyond the axis of symmetry CA to near the lower end of the fifth flow path 55, the same pump performance as the pump 1 in the embodiment can be achieved.

[0179] The present embodiment has been described above with reference to specific examples. However, the present invention is not limited to these specific examples. Any modifications made by those skilled in the art to these specific examples that possess the features of the present invention are included within the scope of the present invention. The elements, their configurations, conditions, shapes, etc., of the foregoing specific examples are not limited to the examples shown and can be appropriately modified. The elements of the foregoing specific examples can be appropriately combined as long as they do not create technical contradictions.

[0180] In the above embodiment, as an example of a volume-changing member that "decreases the volume of pump chambers 7 and 8 by the attraction action of movable plates 62 and 63 towards electromagnet 61, and increases the volume of pump chambers 7 and 8 by the retraction action of movable plates 62 and 63 moving away from electromagnet 61 by the force f1 and f2 applied by leaf springs 64 and 65 when electromagnet 61 is switched off", a structure using first pistons 71 and 81 and second pistons 72 and 82 is shown. However, elements other than pistons can also be used. Examples of elements other than pistons for the volume-changing member include diaphragms, bellows, etc.

[0181] This international application claims priority based on U.S. Provisional Application No. 63 / 522,141, filed on June 21, 2023, the entire contents of which are incorporated herein by reference.

[0182] Label Explanation 1, 1A, 1B, 1C, 1D, 1E, 1F: Pumps 5, 5A, 5B, 5C, 5E, 5F: flow path 6: Resonant actuator 61: Electromagnet (fixed part) 611: Magnetic Core 611A: Winding section 611B: A pair of widening sections 612: Coil 62: First movable plate (movable part) 63: Second movable plate (movable part) 64: First leaf spring (movable part) 641: Central Department 642: A pair of fixed ends 643: Flexural portion 65: Second leaf spring (movable part) 651: Central Department 652: A pair of fixed ends 653: Flexural portion 7: Pump Room 1 71: Piston 1 (Volume Changing Component) 72: Second piston (volume-changing component) 74: Suction valve 75: Discharge valve 8: Pump Room 2 81: Piston 1 (Volume Changing Component) 82: Second piston (volume-changing component) 9: Support body 59, 97: Cooling flow path 11, 12, 13: Heat absorption section 100: Espresso machine (beverage dispensing device) 101: Can 104: Extraction Unit (Ejection Section) W1: Width dimension of the leaf spring W2: Width dimension of the movable plate.

Claims

1. A pump comprising: Electromagnet; A movable plate that is attracted by the electromagnet by the magnetic field generated by the energization of the electromagnet; A leaf spring, which mounts the movable plate, and applies force to the movable plate in the opposite direction to the attraction action of the electromagnet based on the attraction action of the movable plate towards the electromagnet; Flow path, which allows fluid to flow; Pump chamber, which is located in the flow path; A piston, which is disposed on the movable plate, operates to reduce the volume of the pump chamber according to the attraction action of the movable plate. After the attraction action, when the electromagnet is switched to non-energized, it operates to increase the volume of the pump chamber according to the moving action of the movable plate away from the electromagnet caused by the force of the leaf spring. A suction valve is provided on the upstream side of the flow path in the pump chamber, which opens when the piston moves in the direction of increasing volume of the pump chamber to draw fluid into the pump chamber from the upstream side of the flow path; as well as A discharge valve, located downstream of the flow path within the pump chamber, opens when the piston moves in the direction of decreasing volume of the pump chamber, thereby discharging the fluid from the pump chamber to the downstream side of the flow path. The electromagnet's core has a wound portion of a coil at its central portion along the direction of the magnetic field, and a pair of widened portions at both ends along the direction of the magnetic field that protrude toward the movable plate relative to the wound portion. When the direction orthogonal to the direction of the magnetic field is defined as the width direction, the widened portion protrudes by the same amount along the width direction. The portion of the flow path containing the pump chamber is arranged adjacent to each other on the opposite side of the winding portion, separated by the widening portion, and the flow direction is arranged along the width direction. The piston is disposed adjacent to the movable plate at a position opposite to the widened portion and the winding portion.

2. The pump according to claim 1, wherein, The piston includes a pair of pistons, which are disposed at both ends of the movable plate along the direction of the magnetic field. The pump chamber has a first pump chamber whose volume is increased or decreased by one of the pair of pistons, and a second pump chamber whose volume is increased or decreased by the other of the pair of pistons. The first pump chamber and the second pump chamber are positioned opposite each other at both ends of the movable plate along the direction of the magnetic field, where the pair of pistons are located. The first pump chamber is disposed adjacent to the winding portion on the opposite side of one of the pair of widening portions, and the second pump chamber is disposed adjacent to the winding portion on the opposite side of the other of the pair of widening portions.

3. A beverage dispensing device, comprising: A can for storing beverages; The pump of claim 1 or 2, which draws the beverage from the tank and discharges it at a given pressure; and The ejector section ejects the beverage discharged from the pump.

Images