Sealing structure, gas isolation and purification device and gas purification method of pneumatic active vibration damper

Abstract

This invention discloses a sealing structure, gas isolation and purification device, and gas purification method for a pneumatic active vibration damper, belonging to the field of vibration damper isolation and gas purification technology. The sealing structure of the pneumatic active vibration damper includes a top cover, a flexible corrugated cover, a base, an interface plate, an oxygen sensor, a through-plate connector, a compression fitting connector, and a pressure sensor. Compared with existing methods for improving gas leakage in pneumatic active vibration dampers, the sealing structure and active purging logic based on feedback from pressure and oxygen sensors provided by this invention are independent of the vibration damping system. This results in low cost and excellent versatility, eliminating the need for redesign and certification for specific products. It not only achieves active and monitorable continuous gas isolation and purification functions independent of the damper's own sealing level but also ensures the long-term stable operation of the vibration damping system.

Description

Technical Field

[0001] This invention relates to the field of vibration damper isolation and gas purification technology, and particularly to the sealing structure of a pneumatic active vibration damper, a gas isolation and purification device, and a gas purification method. Background Technology

[0002] In the intensive vibration reduction applications of flat panel display (FPD) manufacturing and monitoring equipment, pneumatic active vibration dampers are the primary type. Compared to electric motor actuation, pneumatic actuation offers greater power output and stronger load-bearing capacity, making it ideal for large-size OLED inkjet printers, vapor deposition machines, and large glass substrate handling and monitoring platforms. However, pneumatic actuation requires continuous air intake and exhaust, resulting in very high air consumption. For example, a single servo valve-type vibration damping system imported from Japan can have a flow rate of up to 35 L / min (ANR), and the entire system consumes nearly 500 L / min of air. This high flow rate also leads to continuous gas leakage to the outside. Taking OLED inkjet printing applications as an example, due to the characteristics of ink materials, the printing platform needs to be placed inside a high-purity inert gas glove box with a water and oxygen content of ≤1ppm and an inert gas content of ≥99.999%, such as nitrogen. However, the gas (usually compressed air) leaking from the vibration damper of the vibration damping system will inevitably pollute the entire inert gas environment, placing a great burden on the glove box purification system and restricting the improvement of the substrate pixel printing yield.

[0003] While inert gas can be used as a gas source for pneumatic vibration dampers and can prevent a small amount of leaked inert gas from affecting the gas environment inside the glove box, using inert gas as a gas source for pneumatic vibration dampers requires building a high-flow-rate, high-cleanliness inert gas circulation system. It also requires maintaining stable pressure, flow rate, and low time delay throughout the closed loop to ensure the dynamic response of the pneumatic vibration damper. The cost and difficulty of implementing this system are far higher and greater than directly utilizing the plant's existing compressed air drying system (CDA system).

[0004] For various pneumatic active vibration dampers on the market, as a key factor in ensuring the stable operation of precision equipment, their working principle dictates that they must frequently introduce and exhaust compressed air through a servo valve, which directly conflicts with the purity requirements of the glove box. Conventional solutions often involve modifying the internal structure of the pneumatic active vibration damper, such as optimizing the sealing method to address structural gaps and pipe joint leaks. However, these modifications are costly, and gas can still leak through the air spring rubber diaphragm. Furthermore, the sealing layer of existing rubber diaphragms is typically made of materials such as nitrile rubber, butyl rubber, and neoprene rubber, filled with vulcanized rubber compounds. These materials have microscopic pores (such as...) Figure 1As shown in the figure, tiny gaps in the structure are also a major cause of gas leakage. Therefore, for pneumatic active vibration dampers with large air intake and exhaust volumes, it is difficult to improve the gas leakage problem by optimizing the sealing of the damper structure. Summary of the Invention

[0005] The purpose of this invention is to provide a sealing structure, a gas isolation and purification device, and a gas purification method for a pneumatic active vibration damper, aiming to solve the problems of high modification costs and insignificant improvement effects of existing methods for improving gas leakage in pneumatic active vibration dampers.

[0006] To achieve the above objectives, the first aspect of the present invention provides a sealing structure for a pneumatic active vibration damper, comprising a top cover, a flexible corrugated cover locked below the top cover, a base connected to the lower part of the flexible corrugated cover, an interface plate disposed on the side of the base, an oxygen sensor disposed within the base, a plurality of through-plate connectors disposed on the interface plate, a plurality of compression fittings disposed on the interface plate, and a pressure sensor disposed on the interface plate; an isolation cavity is formed between the top cover, the flexible corrugated cover, and the base; the isolation cavity is used to install the pneumatic active vibration damper; and the through-plate connectors are connected to the damper's air pipe.

[0007] Optionally, the sealing structure of the pneumatic active vibration damper further includes an upper pressure ring and a lower pressure ring; the upper part of the flexible corrugated cover is locked between the upper pressure ring and the top cover, and the lower part of the flexible corrugated cover is locked between the lower pressure ring and the top of the base.

[0008] Optionally, the flexible corrugated cover includes an inner layer, a middle layer, and an outer layer from the inside out; the inner layer is a nylon fabric layer, the middle layer is a brominated butyl rubber layer, and the outer layer is a neoprene rubber layer.

[0009] Optionally, the base has an installation window on its side, and the edge of the installation window has an annular groove, and a sealing ring that mates with the interface plate is provided in the annular groove.

[0010] Optionally, the interface board is also provided with multiple aviation through-plate sockets; the aviation through-plate sockets are respectively connected to the vibration damper signal line and the oxygen sensor signal line; the oxygen sensor signal line is electrically connected to the oxygen sensor.

[0011] A second aspect of the present invention provides a gas isolation and purification device, including a pneumatic active vibration damper; it also includes a glove box, an inlet branch pipe, an exhaust branch pipe, an inlet valve, an exhaust valve, a controller, a load device disposed within the glove box, and a sealing structure for the pneumatic active vibration damper; the sealing structure for the pneumatic active vibration damper is disposed at the bottom of the load device, and the pneumatic active vibration damper is located within the sealing structure for the pneumatic active vibration damper; the oxygen sensor, pressure sensor, inlet valve, and exhaust valve are all electrically connected to the controller; the inlet branch pipe and the exhaust branch pipe are respectively connected to a compression fitting; the inlet valve is disposed on the inlet branch pipe, and the exhaust valve is disposed on the exhaust branch pipe.

[0012] Optionally, the exhaust branch pipe is also equipped with a flow meter.

[0013] Optionally, the gas isolation and purification device further includes a main air inlet pipe, a main exhaust pipe, a throttle valve, and a pressure regulating valve; the air inlet branch pipe is connected to the main air inlet pipe, and the exhaust branch pipe is connected to the main exhaust pipe; the throttle valve and the pressure regulating valve are both located on the main air inlet pipe.

[0014] A third aspect of the present invention provides a purification method for a gas isolation and purification device, comprising the following steps:

[0015] S1. When the pneumatic active damper is in the closed state, open the intake valve and exhaust valve, and introduce inert gas into the isolation chamber through the intake branch pipe. Continue to purge until the oxygen sensor reading is less than or equal to the maximum allowable oxygen content inside the glove box, then close the intake valve. Continue until the pressure sensor detects that the gas pressure in the isolation chamber is less than or equal to the pressure setting value inside the glove box, then close the exhaust valve.

[0016] S2. After the pneumatic active damper is turned on, the gas pressure in the isolation chamber monitored in real time by the pressure sensor is compared with the preset exhaust pressure threshold to determine whether to open the exhaust valve.

[0017] S3. If it is determined that the gas pressure in the isolation chamber is greater than the preset exhaust pressure threshold, open the exhaust valve until the pressure sensor detects that the gas pressure in the isolation chamber is less than or equal to the pressure setting value inside the glove box, and then close the exhaust valve.

[0018] S4. Compare the oxygen content value detected by the oxygen sensor with the preset oxygen content threshold in the cavity to determine whether to introduce inert gas into the isolation cavity again.

[0019] S5. If it is determined that the oxygen content value detected by the oxygen sensor is greater than the preset oxygen content threshold in the cavity, open the inlet valve and the exhaust valve, and introduce inert gas into the isolation cavity again. Continue to purge until the reading of the oxygen sensor is less than or equal to the oxygen content setting value inside the glove box. Then close the inlet valve until the pressure sensor detects that the gas pressure in the isolation cavity is less than or equal to the pressure setting value inside the glove box. Then close the exhaust valve.

[0020] Furthermore, in step S1, inert gas is supplied to the intake branch pipe through the main intake pipe, and the pressure sensor reading is ensured to be normal by adjusting the opening of the throttle valve and the pressure regulating valve.

[0021] The beneficial effects of this invention are:

[0022] The first aspect of the present invention provides a sealing structure for a pneumatic active vibration damper. By installing the pneumatic active vibration damper in an isolation cavity formed by a top cover, a flexible corrugated cover, and a base, the outer side of the damper can be wrapped with a flexible corrugated cover. The flexible corrugated cover has extremely low tensile, compressive, and shear stiffness. Therefore, while the flexible corrugated cover separates the gas inside and outside the sealing structure and prevents the gas in the isolation cavity from leaking into the external inert gas environment, it does not affect the vibration damping performance of the pneumatic active vibration damper.

[0023] Furthermore, by installing an oxygen sensor inside the base and an interface plate on the side of the base to install through-plate connectors, compression fittings, and pressure sensors, the gas pressure and oxygen content changes in the isolation chamber can be monitored in real time using the oxygen and pressure sensors. Inert gas can be injected into the isolation chamber based on the changes in gas pressure and oxygen content, thereby actively maintaining the purity of the gas in the isolation chamber and ensuring that the inert gas environment outside the sealed structure is never contaminated.

[0024] The second aspect of this invention provides a gas isolation and purification device, including the sealing structure of the pneumatic active vibration damper. In the gas isolation and purification device, inert gas is introduced into the isolation chamber of the sealing structure through an inlet branch pipe, thereby actively maintaining the atmosphere inside the isolation chamber. Based on the monitoring results of the oxygen sensor and pressure sensor, the gas leakage of the pneumatic active vibration damper inside the isolation chamber can be determined, and the controller automatically controls the opening and closing of the exhaust valve and the inlet valve based on the gas leakage situation. This achieves active purging of the inside of the isolation chamber, ensuring that the leaked air inside the isolation chamber can be discharged to the environment outside the glove box through the exhaust branch pipe. The isolation chamber can maintain an inert gas atmosphere, and even if there is a small amount of gas leakage inside the isolation chamber, it will not pollute the gas environment inside the glove box outside the sealing structure.

[0025] The third aspect of this invention provides a purification method for a gas isolation and purification device. By constructing an active purging logic based on feedback from pressure and oxygen sensors, compared to the method of isolating and sealing pneumatic active vibration dampers with flexible cavities such as flexible corrugated covers, there is no risk of polluting gas continuously accumulating in the isolation cavity. Even if a small amount of gas leaks from the isolation cavity into an environment with high atmospheric requirements (such as a glove box), the oxygen content in the external environment of the isolation cavity can be controlled, ensuring the long-term stable operation of the vibration damping system.

[0026] Compared with existing methods for improving gas leakage in pneumatic active vibration dampers, the pneumatic active vibration damper sealing structure and active purging logic based on pressure and oxygen sensor feedback provided by this invention are independent of the vibration damping system. This achieves low cost and good versatility, without the need for redesign and certification for specific products. It not only realizes active and monitorable continuous gas isolation and purification functions that do not depend on the damper's own sealing level, but also ensures the long-term stable operation of the vibration damping system. Attached Figure Description

[0027] Figure 1 These are scanning electron microscope images of existing rubber materials.

[0028] Figure 2 This is a perspective view of the sealing structure of the pneumatic active vibration damper provided by the present invention.

[0029] Figure 3 This is an exploded view of the sealing structure of the pneumatic active vibration damper provided by the present invention.

[0030] Figure 4 This is a partial schematic diagram of the lower part of the flexible corrugated cover when it is locked.

[0031] Figure 5 This is a schematic diagram of the interface board.

[0032] Figure 6 This is a schematic diagram of the flexible corrugated cover after it has been unfolded.

[0033] Figure 7 This is a layout diagram of the gas isolation and purification device provided by the present invention.

[0034] Figure label:

[0035] 1-Top cover; 2-Flexible corrugated cover; 201-Inner layer; 202-Middle layer; 203-Outer layer; 3-Base; 301-Mounting window; 302-Annular groove; 303-Sealing ring; 4-Interface plate; 5-Oxygen sensor; 6-Through-plate connector; 7-Compression fitting; 8-Pressure sensor; 9-Pneumatic active vibration damper; 10-Upper pressure ring; 11-Lower pressure ring; 12-Aerospace through-plate socket; 13-Glove box; 14-Intake branch pipe; 15-Exhaust branch pipe; 16-Intake valve; 17-Exhaust valve; 18-Flow meter; 19-Main intake pipe; 20-Main exhaust pipe; 21-Throttle valve; 22-Pressure regulating valve; 23-Load equipment. Detailed Implementation

[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0037] Please see Figures 2 to 6 The first aspect of the present invention provides a sealing structure for a pneumatic active damper, which can be used for sealing a pneumatic active damper 9 having an air spring.

[0038] Specifically, the sealing structure includes a top cover 1, a flexible corrugated cover 2, a base 3, an interface plate 4, an oxygen sensor 5, a through-plate connector 6, a compression fitting connector 7, and a pressure sensor 8. The top cover 1 is used to connect the sealing structure to a load device 23, which can be an inkjet printer, but is not limited to this. The flexible corrugated cover 2 is locked below the top cover 1, and its lower part is connected to the base 3. An isolation cavity is formed between the top cover 1, the flexible corrugated cover 2, and the base 3. A pneumatic active vibration damper 9 is installed within the isolation cavity, and its upper and lower ends can be connected to the top cover 1 and the base 3 respectively via screws. The oxygen sensor 5 is located inside the base 3 and is used to monitor the oxygen content within the isolation cavity.

[0039] The interface plate 4 is located on the side of the base 3. Multiple through-plate connectors 6 are compression fittings mounted on the interface plate 4. The through-plate connectors 6 are used to connect the air pipes for inlet and outlet of the pneumatic active damper 9. Multiple compression fittings 7 are also mounted on the interface plate 4 and can be used to connect the pipelines for inlet and outlet of the isolation chamber. The pressure sensor 8 is located on the interface plate 4 and is used to monitor the gas pressure within the isolation chamber.

[0040] This invention installs the pneumatic active vibration damper 9 in an isolation cavity formed by the top cover 1, the flexible corrugated cover 2, and the base 3, so that the outside of the damper can be wrapped with the flexible corrugated cover 2. The flexible corrugated cover 2 has extremely low tensile, compressive, and shear stiffness. Therefore, the flexible corrugated cover 2 can separate the gas inside and outside the sealing structure and prevent the gas in the isolation cavity from leaking into the external inert gas environment, without affecting the vibration damping performance of the pneumatic active vibration damper 9.

[0041] Furthermore, by installing an oxygen sensor 5 inside the base 3 and an interface plate 4 on the side of the base 3 to install a through-plate connector 6, a compression fitting 7, and a pressure sensor 8, the oxygen sensor 5 and the pressure sensor 8 can be used to monitor the changes in gas pressure and oxygen content in the isolation chamber in real time. Inert gas can be injected into the isolation chamber based on the changes in gas pressure and oxygen content, thereby actively maintaining the purity of the gas in the isolation chamber and ensuring that the inert gas environment outside the sealed structure is not contaminated.

[0042] like Figure 3 and Figure 4 As shown, in an optional embodiment, the sealing structure of the pneumatic active vibration damper further includes an upper pressure ring 10 and a lower pressure ring 11. The upper pressure ring 10 can lock the upper part of the flexible corrugated cover 2 to the top cover 1 with screws. The top of the base 3 is provided with an annular concave surface, and the flange of the lower part of the flexible corrugated cover 2 can be placed on the concave surface. The lower pressure ring 11 presses down on the flange of the flexible corrugated cover 2, and with the help of screws, the lower part of the flexible corrugated cover 2 can be locked between the lower pressure ring 11 and the top of the base 3.

[0043] To ensure no gas leakage occurs at the connection between the flexible corrugated cover 2 and the top cover 1 and the base 3, the total preload force F of the screws is [not specified]. N >Sp max A e , where p max A represents the maximum vertical force generated within the isolation chamber due to gas leakage from the pneumatic active damper 9. e S represents the effective area of ​​the isolation cavity acting on the top cover 1, and S is the safety factor.

[0044] The unfolding structure of the flexible corrugated cover 2 is as follows Figure 6 As shown. The cover used to form the isolation cavity adopts a corrugated structure. The deformation of the isolation cavity is mainly achieved by the expansion or contraction of the corrugations in the cover wall. It is difficult to transmit tensile and compressive stress to the connection between the flexible corrugated cover 2 and the top cover 1 and the base 3. Therefore, it can achieve extremely low tensile, compressive and shear stiffness, and minimize the impact on vibration reduction performance.

[0045] like Figure 6As shown, in an optional embodiment, the flexible corrugated cover 2 comprises, from the inside out, an inner layer 201, a middle layer 202, and an outer layer 203. The inner layer 201 is a nylon fabric layer, which, as a load-bearing layer, can withstand the gas pressure inside the isolation cavity, providing mechanical strength to the corrugated cover and thus limiting excessive expansion of the isolation cavity. The middle layer 202 is a brominated butyl rubber layer, whose airtightness and lifespan are superior to materials such as nitrile rubber commonly used in air springs. The outer layer 203 is a neoprene rubber layer, which has strong wear resistance and corrosion resistance, and can prevent volatile ink generated during inkjet printing from corroding the flexible corrugated cover 2.

[0046] like Figure 3 As shown, in an optional embodiment, the base 3 has a mounting window 301 on its side, and an annular groove 302 is provided on the edge of the mounting window 301. A sealing ring 303 that mates with the interface plate 4 is provided in the annular groove 302. By providing an annular groove 302 on the edge of the mounting window 301 and embedding the sealing ring 303, the interface plate 4 can be tightly fitted to the mounting surface of the base 3, enhancing the sealing performance at the connection between the interface plate 4 and the base 3. This effectively prevents gas leakage in the isolation chamber and the intrusion of external gas. At the same time, the annular groove 302 can accurately position the sealing ring 303, preventing the sealing ring 303 from shifting or deforming, and ensuring sealing stability. For example, the sealing ring 303 can be an O-ring.

[0047] like Figure 3 and Figure 5 As shown, in an optional embodiment, the interface board 4 is further provided with multiple aviation through-plate sockets 12; the aviation through-plate sockets 12 are respectively connected to the vibration damper signal line and the oxygen sensor signal line; the oxygen sensor signal line is electrically connected to the oxygen sensor 5. The independent aviation through-plate sockets 12 can ensure the independent transmission of the vibration damper control signal and the oxygen sensor 5 detection signal, avoiding signal crosstalk from affecting the vibration damping performance regulation of the vibration damper and the accuracy of the oxygen sensor 5 in monitoring the oxygen content in the isolation chamber.

[0048] like Figure 7 As shown, the second aspect of the present invention provides a gas isolation and purification device, including a pneumatic active vibration damper 9; it also includes a glove box 13, an air inlet branch pipe 14, an air outlet branch pipe 15, an air inlet valve 16, an air outlet valve 17, a controller, a load device, and a sealing structure for the pneumatic active vibration damper.

[0049] Specifically, the glove box 13 is typically equipped with a high-purity nitrogen environment. The load device is located inside the glove box 13. For example, the pneumatic active vibration damper can have six sealing structures, each mounted on the bottom of the load device, such as an inkjet printer, via the top cover 1. The pneumatic active vibration damper 9 is located within the sealing structure of the pneumatic active vibration damper to ensure vibration damping during operation of the load device.

[0050] Specifically, the intake branch pipe 14 and the exhaust branch pipe 15 are respectively connected to the compression fitting 7; the intake valve 16 is located on the intake branch pipe 14, and the exhaust valve 17 is located on the exhaust branch pipe 15. Both the intake valve 16 and the exhaust valve 17 can be solenoid valves. The controller can be a PLC controller. The oxygen sensor 5, the pressure sensor 8, the intake valve 16, and the exhaust valve 17 are all electrically connected to the controller.

[0051] In the gas isolation and purification device provided by the present invention, inert gases such as nitrogen can be introduced into the isolation chamber of the sealed structure through the air inlet branch pipe 14. The controller can determine the gas leakage of the pneumatic active damper 9 in the isolation chamber based on the monitoring results of the oxygen sensor 5 and the pressure sensor 8, and automatically control the opening and closing of the exhaust valve 17 and the air inlet valve 16 based on the gas leakage, thereby realizing the active purging of the isolation chamber. This ensures that the leaked air in the isolation chamber can be discharged to the environment outside the glove box 13 through the exhaust branch pipe 15. The isolation chamber can maintain an inert gas atmosphere, so even if there is a small amount of gas leakage in the isolation chamber, it will not pollute the gas environment inside the glove box 13 outside the sealed structure.

[0052] It should be noted that the number of intake manifolds 14 and exhaust manifolds 15 is consistent with the number of pneumatic active vibration dampers 9 and their sealing structures installed below the load equipment. Each intake manifold 14 is equipped with an intake valve 16; each exhaust manifold 15 is equipped with an exhaust valve 17.

[0053] like Figure 7 As shown, in an optional embodiment, the exhaust branch pipe 15 is further provided with a flow meter 18. The flow meter 18 is electrically connected to the controller and can be used to assist in determining the gas leakage rate of the pneumatic active damper 9.

[0054] like Figure 7 As shown, in an optional embodiment, the gas isolation and purification device further includes a main inlet pipe 19, a main exhaust pipe 20, a throttle valve 21, and a pressure regulating valve 22. The main inlet pipe 19 is connected to multiple inlet branch pipes 14, allowing inert gas to be uniformly supplied to multiple sealed isolation chambers through the main inlet pipe 19; while the main exhaust pipe 20 is connected to multiple exhaust branch pipes 15, enabling unified treatment of leaked gas. The main exhaust pipe 20 can be connected to the plant's vacuum system.

[0055] Both the throttle valve 21 and the pressure regulating valve 22 are located on the main air inlet pipe 19. The throttle valve 21 regulates the amount of inert gas entering the isolation chamber. By controlling the gas flow rate, it prevents a sudden increase in gas pressure within the isolation chamber due to excessively rapid intake, and also prevents insufficient purging efficiency due to excessively slow intake, thus maintaining the purity of the gas within the isolation chamber. The pressure regulating valve 22 adjusts the inert gas pressure entering the isolation chamber to a set pressure range that meets the working requirements of the isolation chamber. For example, it ensures that the gas pressure within the isolation chamber is lower than the set pressure inside the glove box 13, maintaining a stable gas pressure within the isolation chamber at a safe level that meets the gas isolation and purification functions. This prevents excessively high gas pressure from damaging the flexible corrugated cover 2, and also avoids insufficient purging force and ineffective removal of leaked gas due to excessively low gas pressure.

[0056] A third aspect of the present invention provides a purification method for a gas isolation and purification device, comprising the following steps:

[0057] S1. When the pneumatic active damper 9 is in the closed state, open the intake valve 16 and the exhaust valve 17, and introduce inert gas into the isolation chamber through the main intake pipe 19 and the intake branch pipe 14. Continue to purge until the reading of the oxygen sensor 5 is less than or equal to the maximum allowable oxygen content inside the glove box 13. Then close the intake valve 16 until the pressure sensor 8 detects that the gas pressure in the isolation chamber is less than or equal to the pressure setting value inside the glove box 13. Then close the exhaust valve 17. At this time, the inside of the isolation chamber is an inert gas atmosphere.

[0058] Specifically, this step involves continuously purging the isolation chamber with inert gas to remove any contaminating gases, such as air, that may be present until the oxygen sensor 5 detects an oxygen content less than or equal to the maximum allowable value inside the glove box 13. This ensures that the initial gas environment inside the isolation chamber is consistent with the high-purity inert gas environment inside the glove box 13, preventing high-oxygen-content gas from leaking into the glove box 13 during subsequent operation of the pneumatic active vibration damper 9. The exhaust valve 17 is then closed after the pressure sensor 8 detects that the gas pressure inside the isolation chamber is less than or equal to the pressure set value inside the glove box 13. This ensures that the pressure inside and outside the isolation chamber is similar, guaranteeing the sealing performance and structural safety of the flexible corrugated cover 2.

[0059] S2. After the pneumatic active damper 9 is turned on, the controller compares the gas pressure in the isolation chamber monitored in real time by the pressure sensor 8 with the preset exhaust pressure threshold to determine whether to open the exhaust valve 17.

[0060] Specifically, after the pneumatic active vibration damper 9 is activated, gas leakage will occur, and the gas pressure and oxygen content in the isolation chamber will continuously increase. When the gas pressure in the isolation chamber rises above the permissible safe gas pressure, a safety hazard may arise. Therefore, this step compares the gas pressure in the isolation chamber monitored in real time by the pressure sensor 8 with a preset exhaust pressure threshold to control the timing of the exhaust valve 17's opening, thereby ensuring the safe and stable operation of the isolation chamber and the entire gas isolation and purification system.

[0061] S3. If it is determined that the gas pressure in the isolation chamber is greater than the preset exhaust pressure threshold, the exhaust valve 17 is opened until the pressure sensor 8 detects that the gas pressure in the isolation chamber is less than or equal to the pressure setting value inside the glove box 13, and then the exhaust valve 17 is closed.

[0062] Specifically, the exhaust valve 17 is opened only when the gas pressure in the isolation chamber is greater than the preset exhaust pressure threshold. This avoids unnecessary exhaust operations, reduces the waste of inert gas, and maintains the pressure in the isolation chamber within a safe range. This ensures that the flexible corrugated cover 2 has the function of separating the internal and external gases of the sealing structure, and does not affect the vibration reduction performance of the pneumatic active vibration damper 9.

[0063] S4. The controller compares the oxygen content value monitored by the oxygen sensor 5 with the preset oxygen content threshold in the cavity to determine whether to introduce inert gas into the isolation cavity again.

[0064] Specifically, this step uses oxygen sensor 5 to monitor the oxygen content in the isolation chamber in real time, directly reflecting the accumulation of leaked gas from the pneumatic active damper 9. When the oxygen content exceeds a preset threshold, the oxygen content in the isolation chamber will be greater than the maximum allowable oxygen content inside the glove box 13. Since the isolation chamber cannot completely prevent gas leakage into the glove box 13, the risk of contamination of the inert gas environment inside the glove box 13 increases when the oxygen content in the isolation chamber exceeds the maximum allowable oxygen content inside the glove box 13. Therefore, this step uses logic to promptly determine whether to reintroduce inert gas into the isolation chamber, reducing the risk of contamination inside the glove box 13.

[0065] S5. If it is determined that the oxygen content value detected by oxygen sensor 5 is greater than the preset oxygen content threshold in the cavity, inert gas is introduced into the isolation cavity again.

[0066] Specifically, when the oxygen content detected by oxygen sensor 5 is greater than the preset oxygen content threshold in the cavity, the inlet valve 16 and the exhaust valve 17 are opened, and inert gas is introduced into the isolation cavity again to completely expel the high-oxygen contamination gas accumulated in the isolation cavity. The purging continues until the reading of oxygen sensor 5 is less than or equal to the oxygen content setting value inside glove box 13. Then, the inlet valve 16 is closed, and the exhaust valve 17 is closed when the pressure sensor 8 detects that the gas pressure in the isolation cavity is less than or equal to the pressure setting value inside glove box 13. This allows the isolation cavity to rebuild an inert gas atmosphere that meets the requirements, ensuring that the inert gas environment inside and outside the sealed structure is not contaminated.

[0067] Furthermore, in step S1, inert gas is supplied to the intake branch pipe 14 through the main intake pipe 19, and the reading of the pressure sensor 8 is ensured to be normal by adjusting the opening of the throttle valve 21 and the pressure regulating valve 22.

[0068] Specifically, by adjusting the opening of the pressure regulating valve 22, the inert gas pressure at the main air inlet can be adjusted to the set range suitable for the isolation chamber. This prevents excessive pressure from causing the flexible bellows 2 to expand excessively and be damaged, thus not affecting the low stiffness characteristics and sealing performance of the flexible bellows 2, while meeting the gas purging requirements within the isolation chamber. The throttle valve 21 controls the gas flow rate, preventing excessively rapid air intake from causing a sudden pressure surge exceeding the safe value within the isolation chamber, while also preventing insufficient pressure build-up and low purging efficiency due to excessively slow air intake. The coordinated adjustment of the throttle valve 21 and the pressure regulating valve 22 ensures that the pressure sensor 8 reading remains stable within the normal range. This ensures that the required gas pressure environment is maintained within the isolation chamber, providing a guarantee for accurate monitoring of gas leakage in the shock absorber, while also ensuring the strength and efficiency of the inert gas purging. This effectively removes residual or leaked contaminated gas from the isolation chamber, thereby maintaining the inert gas atmosphere inside and outside the isolation chamber.

[0069] As can be seen, by constructing an active purging logic based on feedback from pressure sensor 8 and oxygen sensor 5, this invention avoids the hidden danger of polluting gas continuously accumulating in the isolation cavity compared to the method of isolating and sealing the pneumatic active vibration damper 9 with only flexible cavity isolation such as flexible corrugated cover 2. The isolation cavity will not leak into environments with high atmosphere requirements (such as glove box 13), thus ensuring the long-term stable operation of the vibration damping system.

[0070] The present invention also provides two gas leakage rate testing methods for the pneumatic active vibration damper 9. The gas leakage rate can be obtained through the provided gas leakage rate testing methods, and based on the obtained gas leakage rate, the periodic activation time of the gas purging function in step S1 can be set.

[0071] The test method is as follows: With the pneumatic active damper 9 closed, all intake valves 16 are closed and all exhaust valves 17 are opened. At this time, the isolation chambers of each sealed structure can be connected to the plant's vacuum system through the aforementioned main exhaust pipe 20. After the readings of each pressure sensor 8 stabilize, the pneumatic active damper 9 is opened. At this time, the gas leaking from the pneumatic active damper 9 is discharged through the main exhaust pipe 20, and the flow rate of each exhaust branch detected by each flow meter 18 is the gas leakage rate of each pneumatic active damper 9.

[0072] The second test method is as follows:

[0073] After performing the aforementioned step S1, the pneumatic active vibration damper 9 is activated, and the moment when the pneumatic active vibration damper 9 is activated is recorded as the initial moment. Meanwhile, the oxygen content within the isolation chamber is used... This indicates the oxygen content at the initial moment. The oxygen content of leaked air from a pneumatic shock absorber is used (Atmospheric oxygen content is 21%), the leakage rate is expressed as... The volume of gas inside the isolation chamber is indicated by... Indicate, then The oxygen content at any given time is equal to the ratio of the oxygen volume to the gas volume in the isolation chamber.

[0074]

[0075] When the time interval When the cavity is sufficiently short, the change in cavity volume can be ignored, and the above differential equation can be expressed in the following first-order form:

[0076]

[0077] Its analytical solution is:

[0078]

[0079] The content at the current moment can be determined. The leakage rate of the pneumatic active damper 9 is calculated based on the following formula.

[0080]

[0081] The above description is merely a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A purification method for a gas isolation and purification device, characterized in that, The gas isolation and purification device includes a pneumatic active vibration damper; it also includes a glove box, an inlet branch pipe, an exhaust branch pipe, an inlet valve, an exhaust valve, a controller, a load device located in the glove box, and a sealing structure for the pneumatic active vibration damper. The sealing structure of the pneumatic active vibration damper includes a top cover, a flexible corrugated cover locked below the top cover, a base connected to the lower part of the flexible corrugated cover, an interface plate disposed on the side of the base, an oxygen sensor disposed in the base, multiple through-plate connectors disposed on the interface plate, multiple compression fittings disposed on the interface plate, and a pressure sensor disposed on the interface plate; an isolation cavity is formed between the top cover, the flexible corrugated cover, and the base; the isolation cavity is used to install the pneumatic active vibration damper; the through-plate connectors are connected to the damper's air pipes. The sealing structure of the pneumatic active vibration damper is located at the bottom of the load equipment, and the pneumatic active vibration damper is located inside the sealing structure of the pneumatic active vibration damper; the oxygen sensor, pressure sensor, intake valve, and exhaust valve are all electrically connected to the controller; the intake branch pipe and exhaust branch pipe are respectively connected to the compression fitting; the intake valve is located on the intake branch pipe, and the exhaust valve is located on the exhaust branch pipe; The purification method of the gas isolation and purification device includes the following steps: S1. When the pneumatic active damper is in the closed state, open the intake valve and exhaust valve, and introduce inert gas into the isolation chamber through the intake branch pipe. Continue to purge until the oxygen sensor reading is less than or equal to the maximum allowable oxygen content inside the glove box, then close the intake valve. Continue until the pressure sensor detects that the gas pressure in the isolation chamber is less than or equal to the pressure setting value inside the glove box, then close the exhaust valve. S2. After the pneumatic active damper is turned on, the gas pressure in the isolation chamber monitored in real time by the pressure sensor is compared with the preset exhaust pressure threshold to determine whether to open the exhaust valve. S3. If it is determined that the gas pressure in the isolation chamber is greater than the preset exhaust pressure threshold, open the exhaust valve until the pressure sensor detects that the gas pressure in the isolation chamber is less than or equal to the pressure setting value inside the glove box, and then close the exhaust valve. S4. Compare the oxygen content value detected by the oxygen sensor with the preset oxygen content threshold in the cavity to determine whether to introduce inert gas into the isolation cavity again. S5. If it is determined that the oxygen content value detected by the oxygen sensor is greater than the preset oxygen content threshold in the cavity, open the inlet valve and the exhaust valve, and introduce inert gas into the isolation cavity again. Continue to purge until the reading of the oxygen sensor is less than or equal to the oxygen content setting value inside the glove box. Then close the inlet valve until the pressure sensor detects that the gas pressure in the isolation cavity is less than or equal to the pressure setting value inside the glove box. Then close the exhaust valve.

2. The purification method of the gas isolation and purification device according to claim 1, characterized in that, The sealing structure of the pneumatic active vibration damper also includes an upper pressure ring and a lower pressure ring; the upper part of the flexible corrugated cover is locked between the upper pressure ring and the top cover, and the lower part of the flexible corrugated cover is locked between the lower pressure ring and the top of the base.

3. The purification method of the gas isolation and purification device according to claim 1, characterized in that, The flexible corrugated cover comprises, from the inside out, an inner layer, a middle layer, and an outer layer; the inner layer is a nylon fabric layer, the middle layer is a brominated butyl rubber layer, and the outer layer is a chloroprene rubber layer.

4. The purification method of the gas isolation and purification device according to claim 1, characterized in that, The base has an installation window on its side, and the edge of the installation window has an annular groove. A sealing ring that mates with the interface plate is provided in the annular groove.

5. The purification method of the gas isolation and purification device according to claim 1, characterized in that, The interface board is also equipped with multiple aviation through-plate sockets; the aviation through-plate sockets are respectively connected to the vibration damper signal line and the oxygen sensor signal line; the oxygen sensor signal line is electrically connected to the oxygen sensor.

6. The purification method of the gas isolation and purification device according to claim 1, characterized in that, The exhaust branch pipe is also equipped with a flow meter.

7. The purification method of the gas isolation and purification device according to claim 1, characterized in that, The gas isolation and purification device further includes a main air inlet pipe, a main exhaust pipe, a throttle valve, and a pressure regulating valve; the air inlet branch pipe is connected to the main air inlet pipe, and the exhaust branch pipe is connected to the main exhaust pipe; the throttle valve and the pressure regulating valve are both located on the main air inlet pipe.

8. The purification method of the gas isolation and purification device according to claim 7, characterized in that, In step S1, inert gas is supplied to the intake branch pipe through the main intake pipe, and the pressure sensor reading is ensured to be normal by adjusting the opening of the throttle valve and the pressure regulating valve.

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