High-speed heavy-duty platform drive reaction force suppression device and its control method

Abstract

This invention relates to the field of precision linear motion platform technology, and particularly to a high-speed heavy-duty platform drive reaction force suppression device and its control method. The device includes a base and a slide. A reaction force compensation actuator is provided on one side of the base, capable of actively suppressing the drive reaction force. A guiding mechanism ensures that the compensation force is effectively transmitted along a preset Y-axis direction, avoiding the generation of lateral force components and improving the output efficiency and reliability of the voice coil motor. A decoupling mechanism effectively releases the constraint between the base and the voice coil motor in the non-compensation direction, ensuring that the voice coil motor only outputs force in the Y-axis direction, avoiding additional stress caused by installation errors or multidimensional vibrations. The reaction force compensation actuator has a compact structure, is easy to install, reduces the overall size of the device, has low cost, and high stability. Furthermore, by combining feedforward control based on the variable step size Fx-LMS algorithm and feedback control based on the PID algorithm, it achieves rapid response and precise suppression of the drive reaction force.

Description

Technical Field

[0001] This invention relates to the field of precision linear motion platform technology, and in particular to a high-speed heavy-duty platform drive reaction force suppression device and its control method. Background Technology

[0002] Precision linear motion platforms can achieve high-precision, high-speed, and high-stability linear reciprocating / positioning motion. Currently, linear motors are commonly used to directly drive the motion axis slide. During the start and stop of the slide, a driving reaction force is directly applied to the linear motor stator and the equipment frame on which the stator is mounted. Due to the very low damping coefficient of the structural frame such as the marble base, the driving reaction force will excite continuous harmonic damped oscillations, resulting in negative effects such as loss of slide positioning accuracy and increased tracking trajectory error. For example, the table vibration of the dual-drive gantry platform used in OLED inkjet printers is mainly caused by the high-speed reciprocating motion of the heavy-duty dual-drive axis. As high-end motion platforms develop towards higher speed and heavier load, the impact of the driving reaction force will become more significant.

[0003] Force cancellation technology is an effective solution. Its core idea is to generate a force equal in magnitude and opposite in direction to the driving reaction force, causing them to cancel each other out on the marble base. US20100089884A1 discloses a laser processing system with a movable laser scanning platform and force cancellation function. By adding an additional set of compensating motion axes parallel to the main motion axis, the controller drives the compensating slide to move in the opposite direction, significantly reducing the excitation force transmitted to the base. However, this also leads to a significant increase in equipment size, complexity, and cost. CN104678711A discloses a motion stage reaction force cancellation device, which floats the motor stator on the base frame via linear guide rails. The motor stator and the reaction force support frame are connected by elastic elements, active damping elements, and decoupling mechanisms, thereby flexibly extracting the driving reaction force. Active damping force is generated by real-time acquisition of the lateral velocity of the motor stator and application of velocity closed-loop feedback, effectively attenuating the impact response of the motor stator. However, since the motor stator is elastically floating, the stability is reduced, which in turn reduces the accuracy of the silicon wafer stage movement. In addition, there are problems such as complex structure and large vertical dimensions. Moreover, current active vibration reduction systems basically adopt the feedforward control method, that is, the required feedforward force is derived from the force balance of the platform model, ignoring the dynamic model of the interference channel from the motion command signal to the linear motor driving reaction force (including the motion controller model, the structural modes of the entire slide assembly, guide rail friction, etc., which are nonlinear and difficult to model), resulting in obvious residual vibration after the output force is cancelled. Summary of the Invention

[0004] In order to overcome the shortcomings of the prior art, the purpose of this invention is to provide a high-speed heavy-load platform drive reaction force suppression device and its control method that are small in size, low in cost, highly stable, and have improved control accuracy.

[0005] The technical solution adopted in this invention is as follows:

[0006] A high-speed heavy-duty platform drive reaction force suppression device includes a base and a slide that reciprocates along the top surface of the base along the Y-axis. A displacement sensor and a reaction force compensation actuator are provided on one side of the base. The reaction force compensation actuator includes a voice coil motor, a guide mechanism, and a decoupling mechanism. The output end of the voice coil motor is connected to the guide mechanism. The decoupling mechanism includes an X-axis translational decoupling component, a Z-axis translational decoupling component, and a rotational decoupling component. One side of the Z-axis translational decoupling component is connected to the side of the guide mechanism away from the voice coil motor, and its other side is connected to one side of the X-axis translational decoupling component. One side of the rotational decoupling component is connected to the other side of the X-axis translational decoupling component, and its other side is connected to the side of the base. A speed sensor is connected to the side of the base.

[0007] Preferably, the guiding mechanism includes a translation plate, a vertical plate, a Y-axis crossed roller guide, and a fixed plate. The translation plate is slidably connected to the upper side of the fixed plate via the Y-axis crossed roller guide. The vertical plate is fixed to the upper side of the translation plate. The two sides of the vertical plate are respectively connected to the output end of the voice coil motor and one side of the Z-axis translational decoupling assembly.

[0008] Preferably, the Z-axis translational decoupling assembly includes a first slide, a second slide, and a Z-axis crossed roller guide, and the X-axis translational decoupling assembly includes a third slide and an X-axis crossed roller guide. One side of the first slide is connected to the side of the guide mechanism away from the voice coil motor, and its other side is connected to one of the guide rails of the Z-axis crossed roller guide. One side of the second slide is connected to the other guide rail of the Z-axis crossed roller guide, and its other side is connected to one of the guide rails of the X-axis crossed roller guide. One side of the third slide is connected to the other guide rail of the X-axis crossed roller guide, and its other side is connected to the rotational decoupling assembly, which is a ball joint.

[0009] Preferably, the voice coil motor is provided with a water-cooling jacket on its outer side. The water-cooling jacket is a split structure, which includes a lower half-cylinder and an upper half-cylinder that is detachably connected to the upper side of the lower half-cylinder by bolts.

[0010] Preferably, the interior of both the upper and lower semi-cylinders is provided with several U-shaped flow channels connected in sequence.

[0011] Preferably, the system also includes a support frame, the top of which is connected to the base via vibration dampers, and four vibration dampers are evenly arranged.

[0012] Preferably, the system also includes a mounting frame, with the base fixed to the upper side of the mounting frame. The upper side of the mounting frame is connected to an inverted bracket with an opening facing downwards. There are four inverted brackets, which are respectively located at the four corners of the mounting frame. The four shock absorbers are respectively installed in the four inverted brackets.

[0013] Preferably, the shock absorber is an air spring.

[0014] Preferably, a high-speed leveling valve is installed inside the C-shaped seat, and the high-speed leveling valve is connected to the air spring through a pipeline.

[0015] The present invention also provides a control method for a high-speed heavy-load platform drive reaction force suppression device, comprising the following steps:

[0016] S1. Obtain acceleration command. Acceleration command is used to input to the driver so that the driver drives the slide to perform linear motion.

[0017] S2. The acceleration command is used as a reference signal and input to the adaptive FIR filter based on the variable step size Fx-LMS algorithm so that the adaptive FIR filter generates a feedforward control signal.

[0018] S3. The residual displacement of the base is measured in real time by a displacement sensor, and the residual velocity of the base is measured in real time by a velocity sensor.

[0019] S4. The feedback control signal is calculated in real time based on the PID algorithm and the residual displacement and residual velocity of the base.

[0020] S5. The feedforward control signal and the feedback control signal are superimposed to generate a total control signal. The total control signal is used to control the reaction force compensation actuator to generate a compensation force to suppress the vibration caused by the driving reaction force.

[0021] S6. Identify the final residual displacement and update the tap coefficients of the adaptive FIR filter using the final residual displacement to minimize the mean square error of the sump residual acceleration.

[0022] The beneficial effects of this invention are as follows:

[0023] This high-speed heavy-duty platform drive reaction force suppression device and its control method, the reaction force compensation actuator can actively suppress the drive reaction force. Through the guide mechanism, it ensures that the compensation force is effectively transmitted along the preset Y-axis direction, avoiding the generation of lateral component force, improving the output efficiency and reliability of the voice coil motor. Through the decoupling mechanism, it effectively releases the constraint between the base and the voice coil motor in the non-compensation direction, ensuring that the voice coil motor only outputs force in the Y-axis direction, avoiding additional stress caused by installation errors or multidimensional vibration. The reaction force compensation actuator, composed of the voice coil motor, guide mechanism and decoupling mechanism, has a compact structure, is easy to install, reduces the overall size of the device, has low cost and high stability. Moreover, by combining feedforward control based on variable step size Fx-LMS algorithm and feedback control based on PID algorithm, it achieves fast response and precise suppression of drive reaction force. Attached Figure Description

[0024] Figure 1 This is a first three-dimensional schematic diagram of a high-speed, heavy-load platform drive reaction force suppression device.

[0025] Figure 2 for Figure 1 Enlarged diagram of point A in the middle.

[0026] Figure 3 This is a second three-dimensional schematic diagram of a high-speed, heavy-load platform drive reaction force suppression device.

[0027] Figure 4 for Figure 3 Enlarged diagram of point B in the middle.

[0028] Figure 5 This is a structural exploded view of the reaction force suppression device for a high-speed, heavy-duty platform.

[0029] Figure 6 This is a schematic diagram of the reaction force compensation actuator.

[0030] Figure 7 This is a structural exploded view of the reaction force compensation actuator.

[0031] Figure 8 This is a schematic diagram of the U-shaped flow channel inside the water-cooled jacket.

[0032] Figure 9 This is a schematic diagram of the X-axis translational decoupling assembly and the Z-axis translational decoupling assembly.

[0033] Figure 10 This is a structural breakdown diagram of the guiding mechanism.

[0034] Figure 11 This is a schematic diagram of the support frame.

[0035] Figure 12 This is a structural diagram of the mounting frame.

[0036] Figure 13 This is a three-dimensional schematic diagram of the reaction force suppression device for a high-speed, heavy-load platform.

[0037] Figure 14 for Figure 13 Enlarged diagram of point C in the middle.

[0038] Figure 15 This is a cross-sectional view of the X-axis translational decoupling assembly and the Z-axis translational decoupling assembly.

[0039] Figure 16 A flowchart of the control method for a high-speed, heavy-load platform drive reaction force suppression device.

[0040] In the diagram: 1. Base; 2. Slide; 3. Displacement sensor; 4. Voice coil motor; 5. Guide mechanism; 501. Translation plate; 502. Vertical plate; 503. Y-axis crossed roller guide; 504. Fixed plate; 6. Decoupling mechanism; 601. X-axis translational decoupling assembly; 6011. Third slide; 6012. X-axis crossed roller guide; 602. Z-axis translational decoupling assembly; 6021. First slide; 6022. Second slide; 6023. Z-axis crossed roller guide; 603. Rotational decoupling assembly; 7. Speed ​​sensor; 8. 801. Water cooling jacket; 802. Lower semi-cylinder; 803. Upper semi-cylinder; 804. U-shaped flow channel; 9. Support frame; 10. Vibration damper; 11. Mounting frame; 12. C-shaped seat; 13. High-speed leveling valve; 14. Reaction force compensation actuator; 15. Z-axis locking plate; 16. X-axis locking plate; 17. Buffer block; 18. Z-axis limiting block; 19. X-axis limiting block; 20. First groove; 21. Second groove; 22. Y-axis locking plate; 23. Lifting mechanism; 24. Support block; 25. Adjusting bolt; 26. Mounting plate; 27. Waist-shaped hole. Detailed Implementation

[0041] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0042] For ease of description, a spatial rectangular coordinate system is defined in this invention. Taking the conventional placement state of the base 1 as the reference, the direction perpendicular to the surface of the base 1 is the Z-axis direction, the direction of the driving reaction force of the slide 2 is the Y-axis direction, and the direction perpendicular to the Z-axis and Y-axis is the X-axis direction.

[0043] Please see Figures 1-15This invention provides a technical solution: a high-speed heavy-duty platform drive reaction force suppression device, including a base 1 and a slide 2 that reciprocates along the top surface of the base 1 along the Y-axis. The base 1 and the slide 2 form a motion platform. A displacement sensor 3 and a reaction force compensation actuator 14 are provided on one side of the base 1. The reaction force compensation actuator 14 includes a voice coil motor 4, a guide mechanism 5, and a decoupling mechanism 6. The output end of the voice coil motor 4 is connected to the guide mechanism 5. The decoupling mechanism 6 includes an X-axis translational decoupling component 601, a Z-axis translational decoupling component 602, and a rotational decoupling component 603. One side of the Z-axis translational decoupling component 602 is connected to the side of the guide mechanism 5 away from the voice coil motor 4, and its other side is connected to one side of the X-axis translational decoupling component 601. One side of the rotational decoupling component 603 is connected to the other side of the X-axis translational decoupling component 601, and its other side is connected to the side of the base 1. A speed sensor 7 is connected to the side of the base 1.

[0044] While the drive slide 2 reciprocates along the Y-axis on the top surface of the base 1, it generates a driving reaction force on the base 1. The reaction force compensation actuator 14 can actively suppress the driving reaction force. The guide mechanism 5 ensures that the compensation force is effectively transmitted along the preset Y-axis direction, avoiding the generation of lateral force components and improving the output efficiency and reliability of the voice coil motor 4. The decoupling mechanism 6 effectively releases the constraint between the base 1 and the voice coil motor 4 in the non-compensation direction, ensuring that the voice coil motor 4 only outputs force in the Y-axis direction, avoiding additional stress caused by installation errors or multidimensional vibrations. The reaction force compensation actuator 14, composed of the voice coil motor 4, the guide mechanism 5, and the decoupling mechanism 6, has a compact structure, is easy to install, reduces the overall size of the device, and has low cost and high stability. Moreover, the displacement sensor 3 and the velocity sensor 7 monitor the vibration state of the base 1 in real time. Combined with feedforward control based on the variable step size Fx-LMS algorithm and feedback control based on the PID algorithm, the voice coil motor 4 is driven to output compensation force, realizing rapid response and precise suppression of the driving reaction force, and improving the motion accuracy and stability of the platform.

[0045] To facilitate the output movement of the voice coil motor 4, in this embodiment, preferably, the guiding mechanism 5 includes a translation plate 501, a vertical plate 502, a Y-axis crossed roller guide 503, and a fixed plate 504. The translation plate 501 is slidably connected to the upper side of the fixed plate 504 via the Y-axis crossed roller guide 503. The vertical plate 502 is fixed to the upper side of the translation plate 501. The two sides of the vertical plate 502 are respectively connected to the output end of the voice coil motor 4 and one side of the Z-axis translational decoupling component 602. The purpose is to drive the vertical plate 502 and the translation plate 501 to move while the voice coil motor 4 outputs. The Y-axis crossed roller guide 503 can accurately guide the movement of the vertical plate 502, ensuring that the output force of the voice coil motor 4 is transmitted along the Y-axis direction, while ensuring smooth movement.

[0046] To improve the reliability of the device, in this embodiment, preferably, the translation plate 501 is movably abutted against the buffer block 17 on both the side near the base 1 and the side away from the base 1. The purpose of the buffer block 17 is to limit the movement of the translation plate 501, prevent the voice coil motor 4 from causing hard collision damage to other structures when it experiences overtravel drive abnormality, thereby improving the reliability of the device and extending its service life.

[0047] To facilitate multi-degree-of-freedom decoupling, in this embodiment, preferably, the Z-axis translational decoupling component 602 includes a first slide 6021, a second slide 6022, and a Z-axis crossed roller guide 6023; the X-axis translational decoupling component 601 includes a third slide 6011 and an X-axis crossed roller guide 6012. One side of the first slide 6021 is connected to the side of the guide mechanism 5 away from the voice coil motor 4, and its other side is connected to one of the guide rails of the Z-axis crossed roller guide 6023. One side of the second slide 6022 is connected to the other guide rail of the Z-axis crossed roller guide 6023, and its other side is connected to the other guide rail of the X-axis crossed roller guide 6012. One guide rail is connected to the third slide 6011. One side of the slide 6011 is connected to the other guide rail of the X-axis crossed roller guide 6012, and the other side is connected to the rotational decoupling component 603. The rotational decoupling component 603 is a ball joint. The purpose is to achieve translational decoupling in the Z-axis through the Z-axis translational decoupling component 602, translational decoupling in the X-axis through the X-axis translational decoupling component 601, and rotational decoupling through the rotational decoupling component 603, thereby achieving translational and rotational decoupling in the X and Z axes, avoiding the generation of additional torque during the transmission of compensating force. The reason for using crossed roller guides and precision ball joints is that after pre-tightening, they can achieve backlash-free movement and have sufficiently high rigidity and strength.

[0048] To facilitate improved initial positioning accuracy, this embodiment preferably includes a Z-axis locking plate 15 and an X-axis locking plate 16. The first slide 6021 and the second slide 6022 are detachably connected to the Z-axis locking plate 15 by screws, and the second slide 6022 and the third slide 6011 are detachably connected to the X-axis locking plate 16 by screws. The purpose is to use the Z-axis locking plate 15 for the initial alignment of the first slide 6021 and the second slide 6022, and the X-axis locking plate 16 for the initial alignment of the second slide 6022 and the third slide 6011, thereby improving the initial positioning accuracy of the reaction force compensation actuator 14 during installation. The Z-axis locking plate 15 and the X-axis locking plate 16 are removed during use.

[0049] To facilitate and improve the initial positioning accuracy, in this embodiment, preferably, a Y-axis locking plate 22 is also included. The translation plate 501 and the fixing plate 504 are detachably connected to the Y-axis locking plate 22 by screws. The purpose is to use the Y-axis locking plate 22 for the initial alignment of the translation plate 501 and the fixing plate 504, thereby improving the initial positioning accuracy of the reaction force compensation actuator 14 during installation. The Y-axis locking plate 22 is removed during use.

[0050] To prevent the X-axis translational decoupling component 601 and the Z-axis translational decoupling component 602 from exceeding their limits, in this embodiment, preferably, the second slide 6022 is connected to the Z-axis limiting block 18, and the third slide 6011 is connected to the X-axis limiting block 19. The side of the first slide 6021 is provided with a first groove 20, and the side of the second slide 6022 is provided with a second groove 21. The Z-axis limiting block 18 moves up and down within the first groove 20, and the X-axis limiting block 19 moves translationally within the second groove 21. The purpose is to limit the up and down stroke of the Z-axis limiting block 18 by the first groove 20 and limit the translational stroke of the X-axis limiting block 19 by the second groove 21, thereby preventing the X-axis translational decoupling component 601 and the Z-axis translational decoupling component 602 from exceeding their limits.

[0051] To facilitate heat dissipation of the voice coil motor 4, in this embodiment, preferably, a water-cooling jacket 8 is provided on the outer side of the voice coil motor 4. The water-cooling jacket 8 is a split structure, and it includes a lower semi-cylinder 801 and an upper semi-cylinder 802 that is detachably connected to the upper side of the lower semi-cylinder 801 by bolts. The purpose is to dissipate heat from the voice coil motor 4 through the water-cooling jacket 8, thereby improving heat dissipation efficiency. The split structure of the water-cooling jacket 8 facilitates installation and maintenance.

[0052] In order to improve heat dissipation efficiency, in this embodiment, preferably, the interior of the upper cylinder 802 and the interior of the lower cylinder 801 are provided with a number of U-shaped flow channels 803 connected in sequence. The purpose is to extend the flow path of the coolant through the U-shaped flow channels 803 and improve the uniformity and efficiency of heat dissipation.

[0053] To facilitate isolation of ground vibration interference, this embodiment preferably includes a support frame 9. The top of the support frame 9 is connected to the base 1 via a vibration damper 10. Four vibration dampers 10 are evenly arranged to isolate ground vibration interference and reduce the impact of external vibration on the accuracy of the motion platform.

[0054] To facilitate the reduction of vibration coupling between the system's rocking and translational modes, this embodiment preferably includes a mounting frame 11. A base 1 is fixed to the upper side of the mounting frame 11. Four downward-facing C-shaped seats 12 are connected to the upper side of the mounting frame 11, each located at one of the four corners of the mounting frame 11. Four vibration dampers 10 are installed within the four C-shaped seats 12. The purpose is to fix the base 1 to the upper side of the mounting frame 11 and install the vibration dampers 10 within the C-shaped seats 12 on the upper side of the mounting frame 11, thus forming a cradle-shaped structure. This lowers the center of gravity of the entire motion platform and makes the center of mass of the motion platform and the plane of action of the horizontal restoring force of the vibration damper 10 tend to coincide, thereby significantly reducing the vibration coupling between the system's rocking and translational modes and improving stability.

[0055] In order to facilitate efficient vibration isolation and maintain the static accuracy of the motion platform, in this embodiment, the vibration damper 10 is preferably an air spring. The purpose is to utilize the characteristics of low stiffness and high vibration isolation efficiency of the air spring to effectively isolate high-frequency vibration interference from the support frame 9 and the ground. At the same time, its load-bearing capacity can be precisely adjusted by air pressure to facilitate matching different loads and provide a stable reference plane for precision motion.

[0056] To facilitate the long-term stability of the motion platform during dynamic operation, in this embodiment, preferably, a high-speed leveling valve 13 is installed inside the C-shaped seat 12. The high-speed leveling valve 13 is connected to the air spring through a pipeline to form an automatic leveling system. When the movement of the slide 2 causes the center of mass of the motion platform to shift and break the original balance, the high-speed leveling valve 13 can guide compressed air between the connected air springs in real time and quickly to dynamically balance the air pressure at each support point, thereby compensating for the change in the center of mass, maintaining the level and height of the motion platform, and avoiding additional measurement or motion errors caused by the tilt of the motion platform.

[0057] To facilitate the adjustment of the overall height of the support frame 9, the mounting frame 11 and the base 1, this embodiment preferably includes a lifting mechanism 23. The lifting mechanism 23 is located at the bottom of the support frame 9 and several of them are evenly arranged. The lifting mechanism 23 can be a wedge-shaped lifting platform, the purpose of which is to finely adjust the overall height of the support frame 9, the mounting frame 11 and the base 1 through the wedge-shaped lifting platform.

[0058] To facilitate height adjustment of the base 1, in this embodiment, preferably, several support blocks 24 are evenly arranged at the bottom of the base 1. An adjusting bolt 25 is threadedly connected to the mounting frame 11. The upper end of the adjusting bolt 25 passes through the mounting frame 11 and abuts against the lower side of the support block 24. A pin (not shown in the figure) is connected to the bottom of the support block 24. A pin hole (not shown in the figure) is provided on the mounting frame 11. The pin is slidably connected to the pin hole. A mounting plate 26 is connected to the mounting frame 11. The mounting plate 26 is provided with an oblong hole 27. The side of the base 1 is fixedly connected to the oblong hole 27 by screws. The purpose is that by rotating the adjusting bolt 25, the adjusting bolt 25 can be raised and lowered relative to the mounting frame 11. At the same time, the pin slides along the pin hole, improving the accuracy of the lifting stroke. Thus, the adjusting bolt 25 can lift the base 1 to different heights through the support blocks 24, realizing fine adjustment of the height of the base 1. After fine adjustment, the side of the base 1 is fixedly connected to the oblong hole 27 of the mounting plate 26 by screws, thus achieving fixation.

[0059] To facilitate matching the mechanical characteristics of the dual-drive motion platform and improve the uniformity and reliability of the suppression effect, in this embodiment, preferably, two reaction force compensation actuators 14 are provided. The two reaction force compensation actuators 14 are respectively arranged on both sides of the displacement sensor 3. The purpose is to enable the two reaction force compensation actuators 14 to work together to counteract the driving reaction force generated by the dual-drive shaft of the dual-drive motion platform. This arrangement can ensure that the compensation force is applied more evenly to the motion platform of the dual-drive shaft, avoiding local bending moment or torsional deformation that may be caused by single-point force output, thereby improving the uniformity of vibration suppression and the stability of control effect of the entire system.

[0060] Please see Figure 16 The present invention also provides a control method for a high-speed heavy-load platform drive reaction force suppression device, comprising the following steps:

[0061] S1. Obtain acceleration command. Acceleration command is used to input to the driver so that the driver drives the slide 2 to move linearly.

[0062] S2. The acceleration command is used as a reference signal and input to the adaptive FIR filter based on the variable step size Fx-LMS algorithm so that the adaptive FIR filter generates a feedforward control signal.

[0063] In this embodiment, the feedforward control signal is calculated. Feedforward control signal The calculation formula is expressed as:

[0064]

[0065] in, It is an adaptive FIR filter (controller) at time 10:00. The weight coefficient vector, It is the reference signal vector. It is the order of the adaptive FIR filter.

[0066] S3. The residual displacement of the base 1 is measured in real time by displacement sensor 3, and the residual velocity of the base 1 is measured in real time by velocity sensor 7.

[0067] S4. The feedback control signal is calculated in real time based on the PID algorithm and the residual displacement and residual velocity of the base 1.

[0068] In this embodiment, the feedback control signal is calculated. Feedback control signal The calculation formula is expressed as:

[0069]

[0070] in, This is the position ring proportionality coefficient. For speed ring proportional coefficient, These are the differential coefficients of the velocity ring. The sampling period is The residual displacement measured by the displacement sensor. The residual velocity measured by the speed sensor;

[0071] A position-velocity dual-loop PID control structure is adopted. The inner loop velocity control improves the system response speed, the outer loop position control ensures steady-state accuracy, the velocity loop proportional coefficient enhances the system damping characteristics, the velocity loop differential coefficient suppresses velocity fluctuations, and the position loop proportional coefficient affects the system's response speed to displacement deviations. The feedback control strategy can effectively suppress residual vibrations in the low and medium frequency ranges and supplement and correct model errors and external disturbances that the feedforward control cannot fully compensate for, thereby achieving precise suppression of driving reaction force.

[0072] S5. The feedforward control signal and the feedback control signal are superimposed to generate a total control signal. The total control signal is used to control the reaction force compensation actuator 14 to generate a compensation force to suppress the vibration caused by the driving reaction force.

[0073] In this embodiment, the total control signal is calculated. Total control signal The calculation formula is expressed as:

[0074]

[0075] in, For feedforward control signal, This is a feedback control signal.

[0076] S6. Identify the final residual displacement and update the tap coefficients of the adaptive FIR filter using the final residual displacement to minimize the mean square error of the residual acceleration of slab 1.

[0077] In this embodiment, the final residual displacement is calculated. The final residual displacement The calculation formula is expressed as:

[0078]

[0079] in, The output of the interference channel (displacement response under driving force). For control channel output (displacement response under control force);

[0080] Calculate the filter reference signal vector Filtered reference signal vector The calculation formula is expressed as:

[0081]

[0082] in, It is the fixed coefficient vector of the secondary path estimation model. It is the reference signal vector used for filtering. It is the order of the secondary path estimation model. .

[0083] Calculate the updated weight coefficient vector Updated weight coefficient vector The calculation formula is expressed as:

[0084]

[0085] in, It is the step size coefficient. It is a regularization parameter (used to prevent step size saturation caused by an excessively small reference signal). It is the final residual displacement. It is the filter reference signal vector;

[0086] Due to uncertainties and nonlinear factors in the interference channel, such as guide rail friction, slide table jitter, and unknown controller models, feedforward control based on dynamic models is difficult to accurately establish and describe, resulting in limited control effects. An effective way to solve these problems is to adopt adaptive control. The Fx-LMS algorithm updates the filter weights by minimizing the mean square error. In particular, considering the transient and non-stationary nature of the reference signal, a variable step size algorithm is adopted to achieve fast convergence (a large step size is used in the initial stage of the optimal weight search to improve the convergence speed, and a small step size is used when approaching the optimal value). Specifically, by continuously iterating and updating the weight coefficient vector (tap coefficients), the mean square error of the residual acceleration of base 1 is gradually minimized, achieving high-precision and adaptive suppression of the driving reaction force.

[0087] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A high-speed heavy-duty platform drive reaction force suppression device, comprising a base (1) and a slide (2) reciprocating along the top surface of the base (1) along the Y-axis, characterized in that: A displacement sensor (3) and a reaction force compensation actuator (14) are provided on one side of the base (1). The reaction force compensation actuator (14) includes a voice coil motor (4), a guide mechanism (5), and a decoupling mechanism (6). The output end of the voice coil motor (4) is connected to the guide mechanism (5). The decoupling mechanism (6) includes an X-axis translational decoupling component (601), a Z-axis translational decoupling component (602), and a rotational decoupling component (603). One side of the Z-axis translational decoupling component (602) is connected to the side of the guide mechanism (5) away from the voice coil motor (4), and its other side is connected to one side of the X-axis translational decoupling component (601). One side of the rotational decoupling component (603) is connected to the other side of the X-axis translational decoupling component (601), and its other side is connected to the side of the base (1). A speed sensor (7) is connected to the side of the base (1). The control method for the high-speed heavy-load platform drive reaction force suppression device includes the following steps: S1. Obtain acceleration command. Acceleration command is used to input to the driver so that the driver drives the slide (2) to move in a straight line. S2. The acceleration command is used as a reference signal and input to an adaptive FIR filter based on the variable step size Fx-LMS algorithm, so that the adaptive FIR filter generates a feedforward control signal. The calculation formula is expressed as: in, It is the adaptive FIR filter at time 1000. The weight coefficient vector, the adaptive FIR filter is the controller. It is the reference signal vector. It is the order of the adaptive FIR filter; S3. The residual displacement of the base (1) is measured in real time by the displacement sensor (3), and the residual velocity of the base (1) is measured in real time by the velocity sensor (7). S4. Based on the PID algorithm and according to the residual displacement and residual velocity of the base (1), the feedback control signal is calculated in real time. The calculation formula is expressed as: in, This is the position ring proportionality coefficient. For speed ring proportional coefficient, These are the differential coefficients of the velocity ring. The sampling period is The residual displacement measured by the displacement sensor. The residual velocity measured by the speed sensor; S5. The feedforward control signal and the feedback control signal are superimposed to generate a total control signal. The total control signal controls the reaction force compensation actuator (14) to generate a compensation force to suppress the vibration caused by the driving reaction force. The calculation formula is expressed as: in, For feedforward control signal, For feedback control signals; S6. Identify the final residual displacement, and update the tap coefficients of the adaptive FIR filter using the final residual displacement to minimize the mean square error of the residual acceleration of the sill (1). The calculation formula is expressed as: in, The output of the interference channel is the displacement response under the action of driving force. The control channel output is the displacement response under the action of control force. Filtered reference signal vector The calculation formula is expressed as: in, It is the fixed coefficient vector of the secondary path estimation model. It is the reference signal vector used for filtering. It is the order of the secondary path estimation model. ; Updated weight coefficient vector The calculation formula is expressed as: in, It is the step size coefficient. It is a regularization parameter, used to prevent step size saturation caused by an excessively small reference signal. It is the final residual displacement. It is the filter reference signal vector.

2. The high-speed heavy-load platform drive reaction force suppression device according to claim 1, characterized in that: The guiding mechanism (5) includes a translation plate (501), a vertical plate (502), a Y-axis cross roller guide (503), and a fixed plate (504). The translation plate (501) is slidably connected to the upper side of the fixed plate (504) through the Y-axis cross roller guide (503). The vertical plate (502) is fixed to the upper side of the translation plate (501). The two sides of the vertical plate (502) are respectively connected to the output end of the voice coil motor (4) and one side of the Z-axis translational decoupling assembly (602).

3. The high-speed heavy-load platform drive reaction force suppression device according to claim 1, characterized in that: The Z-axis translational decoupling assembly (602) includes a first slide (6021), a second slide (6022), and a Z-axis crossed roller guide (6023). The X-axis translational decoupling assembly (601) includes a third slide (6011) and an X-axis crossed roller guide (6012). One side of the first slide (6021) is connected to the side of the guide mechanism (5) away from the voice coil motor (4), and the other side is connected to the Z-axis crossed roller guide (6023). The second slide (6022) is connected to one of the guide rails of the Z-axis crossed roller guide (6023) on one side and to one of the guide rails of the X-axis crossed roller guide (6012) on the other side. The third slide (6011) is connected to the other guide rail of the X-axis crossed roller guide (6012) on one side and to the rotation decoupling assembly (603) on the other side. The rotation decoupling assembly (603) is a ball joint.

4. The high-speed heavy-load platform drive reaction force suppression device according to claim 1, characterized in that: The voice coil motor (4) is provided with a water cooling jacket (8) on the outside. The water cooling jacket (8) is a split structure, and it includes a lower half-cylinder (801) and an upper half-cylinder (802) that is detachably connected to the upper side of the lower half-cylinder (801) by bolts.

5. The high-speed heavy-load platform drive reaction force suppression device according to claim 4, characterized in that: The interior of the upper semi-cylinder (802) and the interior of the lower semi-cylinder (801) are each provided with a number of U-shaped flow channels (803) connected in sequence.

6. The high-speed heavy-load platform drive reaction force suppression device according to claim 1, characterized in that: It also includes a support frame (9), the top of which is connected to the base (1) via a damper (10), and four dampers (10) are evenly arranged.

7. The high-speed heavy-load platform drive reaction force suppression device according to claim 6, characterized in that: It also includes an installation frame (11), the base (1) is fixed to the upper side of the installation frame (11), the upper side of the installation frame (11) is connected to a C-shaped seat (12) with the opening facing downwards, there are four C-shaped seats (12) and they are respectively located at the four corners of the installation frame (11), and the four vibration dampers (10) are respectively installed in the four C-shaped seats (12).

8. The high-speed heavy-load platform drive reaction force suppression device according to claim 7, characterized in that: The shock absorber (10) is an air spring.

9. The high-speed heavy-load platform drive reaction force suppression device according to claim 8, characterized in that: A high-speed leveling valve (13) is installed inside the C-shaped seat (12), and the high-speed leveling valve (13) is connected to the air spring through a pipeline.

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