Probe card parallelism calculation method and device and probe station equipment

Abstract

The invention relates to a probe card parallelism calculation method and device and probe station equipment. The method comprises the following steps: fitting according to position information of a needle point of a registered probe on a needle card to obtain a needle card fitting plane; determining a point where a horizontal plane vertical line passing through a first target point of each registered probe intersects with the probe card fitting plane, and obtaining an intersection point corresponding to each registered probe; the first target point is a first projection point of the needle point or the needle point on a common vertical plane of the needle card fitting plane and the horizontal plane; according to the coordinate values of the intersection points corresponding to the registered probes in the vertical axis direction of a target space coordinate system, determining the parallelism corresponding to at least part of the registered probes, and obtaining a parallelism set; wherein the target space coordinate system is a three-dimensional space coordinate system established based on a wafer bearing table; and selecting a maximum value from the parallelism set to obtain the parallelism of the needle card. The method can improve the utilization rate of the needle card.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a method, apparatus and probe station equipment for calculating the parallelism of probe cards. Background Technology

[0002] The probe card (i.e., the pin card) is installed on the pin card panel of the probe station equipment. It serves as the interface connecting the testing equipment and the semiconductor wafer. The probes in the pin card contact the wafer surface to transmit the test signals output by the testing equipment to the wafer under test. As a core component of the probe station equipment, the pin card determines whether the equipment can be put into production. Therefore, in actual production, it is necessary to evaluate whether the pin cards on the pin card panel meet production requirements.

[0003] Traditional methods measure the needle tip height difference (the difference between the highest and lowest needles) by selecting a portion of the probes on the needle card. This height difference is then used as the criterion to evaluate whether the needle card on the panel meets production requirements. However, this method is prone to misjudging needle cards as failing to meet production needs, resulting in low needle card utilization. In actual production, needle cards are expensive; therefore, low utilization can lead to significant economic losses.

[0004] Therefore, how to more effectively evaluate whether the needle card meets production requirements in order to improve the utilization rate of the needle card is an urgent problem to be solved in the industry. Summary of the Invention

[0005] Therefore, it is necessary to provide a method, apparatus, probe station device, computer-readable storage medium, and computer program product for calculating the parallelism of pin cards that can improve the utilization rate of pin cards, addressing the aforementioned technical problems.

[0006] Firstly, this application provides a method for calculating the parallelism of a needle card, the method comprising:

[0007] The fitting plane of the needle card is obtained by fitting the position information of the needle tip of the registered probe on the needle card;

[0008] Determine the point where the vertical line from the horizontal plane passing through the first target point of each registered probe intersects the needle-card fitting plane, thus obtaining the intersection point corresponding to each registered probe; the first target point is the needle tip or the first projection point of the needle tip on the common vertical plane of the needle-card fitting plane and the horizontal plane;

[0009] Based on the coordinate values ​​of the intersection points of each registered probe in the vertical direction of the target space coordinate system, the parallelism of at least some of the registered probes is determined, resulting in a set of parallelisms; wherein, the target space coordinate system is a three-dimensional space coordinate system established based on the wafer carrier stage;

[0010] The parallelism of the needle card is obtained by selecting the maximum value from the set of parallelism values.

[0011] In one embodiment, based on the coordinate values ​​of the intersection points corresponding to each registered probe along the vertical axis of the target space coordinate system, the parallelism of at least a portion of the registered probes is determined, resulting in a set of parallelisms, including:

[0012] For each non-reference probe among the registered probes, calculate the difference in the first vertical coordinate of the second intersection point corresponding to the non-reference probe and the first intersection point corresponding to the reference probe in the vertical axis direction to obtain the parallelism corresponding to the non-reference probe; where the reference probe is the registered probe that serves as a reference among the registered probes.

[0013] Based on the parallelism of each non-reference needle, a set of parallelism is obtained.

[0014] In one embodiment, the difference in the first vertical coordinate along the vertical axis between the second intersection point corresponding to the non-reference needle and the first intersection point corresponding to the reference needle is calculated to obtain the parallelism corresponding to the non-reference needle, including:

[0015] Based on the first position information of the tip of the reference needle in the target space coordinate system, determine the second position information corresponding to the first intersection point;

[0016] Obtain the third position information of the needle tip of the non-reference needle in the target space coordinate system;

[0017] Determine the coordinate difference between the second and third position information;

[0018] The first vertical coordinate difference is calculated based on the coordinate difference and the plane normal vector of the needle fitting plane. The parallelism corresponding to the non-reference needle is obtained based on the absolute value of the first vertical coordinate difference.

[0019] In one embodiment, the first vertical coordinate difference is calculated based on the coordinate difference and the plane normal vector of the pin-fitting plane, including:

[0020] Calculate the angle between the horizontal plane and the pin-fit plane based on the plane normal vector;

[0021] Calculate the distance from the tip of the non-reference needle to the fitting plane of the needle card based on the coordinate difference and the plane normal vector;

[0022] Based on the distance and the included angle, determine the difference in the second vertical coordinate between the second intersection point and the tip of the non-reference needle in the vertical axis direction;

[0023] The first vertical coordinate difference is determined based on the second vertical coordinate difference and the third vertical coordinate difference between the needle tip of the non-reference needle and the first intersection point in the vertical axis direction.

[0024] In one embodiment, before selecting the maximum value from the set of parallelism to obtain the parallelism of the needle card, the method further includes:

[0025] Determine the parallelism corresponding to the theoretical farthest needle on the needle card; whereby the theoretical farthest needle is the probe farthest from the reference needle among the probes at the registration station of the needle card.

[0026] Add the parallelism corresponding to the theoretical farthest needle to the parallelism set.

[0027] In one embodiment, the parallelism of the needle card is obtained by selecting the maximum value from the set of parallelism values, including:

[0028] The maximum value is selected from the set of parallelism values, and the selected maximum value is taken as the parallelism of the actual farthest needle; where the actual farthest needle is the actual registered probe that is farthest from the reference needle.

[0029] Determine the parallelism corresponding to the theoretically furthest needle on the needle card;

[0030] The parallelism of the needle card is obtained by selecting the maximum value between the parallelism corresponding to the actual farthest needle and the parallelism corresponding to the theoretical farthest needle.

[0031] In one embodiment, the pin clip is mounted on the probe station device;

[0032] Before determining the parallelism corresponding to the theoretically furthest needle on the needle card, the method also includes:

[0033] Based on the station information of the probe station equipment, determine the probe distribution information corresponding to the probe card;

[0034] Based on the probe distribution information, determine the probe that is furthest from the reference needle among the probes at the registration station of the needle card, and take the furthest probe as the theoretical furthest needle.

[0035] In one embodiment, the parallelism corresponding to the theoretical farthest needle is determined based on the difference in the fourth vertical coordinate between the third intersection point and the first intersection point of the theoretical farthest needle in the vertical axis direction.

[0036] The third intersection point is the point where the vertical line from the horizontal plane passing through the second target point of the theoretical farthest needle intersects the fitting plane of the needle card; the second target point is the second projection point of the tip of the theoretical farthest needle or the tip of the theoretical farthest needle on the common vertical plane.

[0037] Secondly, this application also provides a needle card parallelism calculation device, the device comprising:

[0038] The plane fitting module is used to fit the position of the needle tip of the registered probe on the needle card to obtain the fitting plane of the needle card;

[0039] The probe parallelism calculation module is used to determine the point where the vertical line from the first target point of each registered probe intersects the probe-card fitting plane, thus obtaining the intersection point corresponding to each registered probe. The first target point is the tip point or the first projection point of the tip point on the common perpendicular plane of the probe-card fitting plane and the horizontal plane. Based on the coordinate values ​​of the intersection points corresponding to each registered probe in the vertical axis direction of the target space coordinate system, the parallelism corresponding to at least some registered probes is determined, thus obtaining the parallelism set. The target space coordinate system is a three-dimensional space coordinate system established based on the wafer carrier stage.

[0040] The needle card parallelism determination module is used to select the maximum value from the parallelism set to obtain the parallelism of the needle card.

[0041] Thirdly, this application also provides a probe station device, which includes a computing device, a probe card, and a wafer carrier stage; the computing device is equipped with a probe card parallelism calculation device.

[0042] The needle-card parallelism calculation device is used to fit a fitting plane of the needle card based on the position of the needle tip of the registered probe on the needle card; determine the point where the vertical line of the horizontal plane passing through the first target point of each registered probe intersects the fitting plane of the needle card, and obtain the intersection point corresponding to each registered probe; the first target point is the needle tip or the first projection point of the needle tip on the common vertical plane of the fitting plane of the needle card and the horizontal plane; determine the parallelism of at least some registered probes based on the coordinate values ​​of the intersection points corresponding to each registered probe in the vertical axis direction of the target spatial coordinate system, and obtain a set of parallelisms; wherein, the target spatial coordinate system is a three-dimensional spatial coordinate system established based on the wafer carrier stage; select the maximum value from the set of parallelisms to obtain the parallelism of the needle card.

[0043] Fourthly, this application also provides a computer-readable storage medium. The computer-readable storage medium stores a computer program thereon, which, when executed by a processor, implements the steps of the method mentioned in the first aspect above.

[0044] Fifthly, this application also provides a computer program product. The computer program product includes a computer program that, when executed by a processor, implements the steps of the method mentioned in the first aspect above.

[0045] The aforementioned method, apparatus, probe station equipment, computer-readable storage medium, and computer program product for calculating pin card parallelism obtain a pin card fitting plane by fitting the positions of the probe tips on the registered probes on the pin card, and calculate the parallelism of the pin card relative to the horizontal plane based on the pin card fitting plane. Specifically, the point where the perpendicular line from the horizontal plane passing through the first target point of each registered probe intersects the pin card fitting plane is determined, obtaining the intersection point corresponding to each registered probe; the first target point is the probe tip or the first projection point of the probe tip on the common perpendicular plane of the pin card fitting plane and the horizontal plane; based on the coordinate values ​​of the intersection points corresponding to each registered probe in the vertical axis direction of the target spatial coordinate system, the parallelism corresponding to at least some registered probes is determined, obtaining a set of parallelisms; wherein, the target spatial coordinate system is a three-dimensional spatial coordinate system established based on the wafer carrier stage; the maximum value is selected from the set of parallelisms to obtain the parallelism of the pin card. The parallelism of the pin card calculated in the above manner can more accurately reflect whether the pin card panel is in a leveled state, thereby more accurately evaluating whether the pin card on the pin card plane meets production requirements, reducing the probability of misjudgment, improving the utilization rate of the pin card, and reducing economic losses to a certain extent. Attached Figure Description

[0046] Figures 1 to 3 This is a schematic diagram illustrating the effect of the needle-card parallelism calculation method in one embodiment;

[0047] Figure 4 This is a flowchart illustrating the needle-card parallelism calculation method in one embodiment;

[0048] Figure 5 This is a schematic diagram of the fitting plane of the pin card in one embodiment;

[0049] Figure 6 This is a schematic diagram of a plane for calculating the parallelism of the probe in one embodiment;

[0050] Figure 7 This is a schematic diagram of the registered probe distribution in one embodiment;

[0051] Figure 8 This is a schematic diagram of the registered probe distribution in another embodiment;

[0052] Figure 9 This is a flowchart illustrating the needle-card parallelism calculation method in another embodiment;

[0053] Figure 10 This is a comparison diagram of the parallelism between the actual farthest needle and the theoretical farthest needle in one embodiment;

[0054] Figure 11 This is a comparison diagram of the parallelism between the actual farthest needle and the theoretical farthest needle in another embodiment;

[0055] Figure 12This is a structural block diagram of the needle card parallelism calculation device in one embodiment;

[0056] Figure 13 This is a diagram of the internal structure of a computing device in one embodiment. Detailed Implementation

[0057] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0058] In actual testing scenarios, due to factors such as the precision of the pin clip manufacturing process and installation errors (errors caused by the pin clip being mounted on the pin clip panel), the pin clips on the probe station equipment may tilt or the probes within the pin clips may be uneven. Therefore, it is necessary to level the pin clip panel so that the pin clips on the panel meet production requirements. The traditional method uses the pin tip height difference as the evaluation criterion. That is, the pin clip panel or pin clip is adjusted based on the pin tip height difference, and the pin tip height difference is compared with a preset pin tip height difference threshold. If the pin tip height difference is consistently greater than the threshold, the pin clip is deemed unqualified (i.e., it does not meet production requirements). This evaluation criterion is prone to misjudging pin clips on the pin clip panel as unqualified, resulting in low pin clip utilization.

[0059] To facilitate understanding, the following two scenarios will be used to explain in more detail the problems with traditional methods.

[0060] Scenario 1: The pin clamp has good machining accuracy, but the installation error is not well controlled.

[0061] It should be understood that in scenario 1, the needle card itself does not have a quality problem and is a qualified needle card. However, due to excessive installation error, the needle tip height deviation on the needle card is large. Adjusting the needle card panel or the needle card makes it difficult to make the needle tip height difference less than the needle tip height difference threshold. As a result, it is easy to misjudge a qualified needle card as unqualified. The probability of misjudgment is high, resulting in low needle card utilization.

[0062] Scenario 2: The pin holder installation error is well controlled, but the machining accuracy is slightly poor or some probes are severely worn after long-term operation.

[0063] In scenario 2, the installation error is negligible. Slightly lower machining accuracy or severe wear on individual probes generally does not affect the normal use of the entire pin card, or its impact is minimal. In actual production, the pin card is generally considered usable. However, this situation can lead to excessive deviations in the needle tip height on the pin card. Therefore, when evaluating based on the needle tip height difference, it's easy to misjudge that the pin card does not meet production requirements, resulting in low pin card utilization.

[0064] To address the aforementioned problems with traditional methods, this application proposes a probe station device. The probe station device may include a probe card, a wafer carrier stage, and a computing device. The probe card can be placed on the probe carrier of the probe station device, and the wafer to be tested can be placed on the wafer carrier stage. The probe card is equipped with multiple probes. One end of each probe on the probe card is connected to the wafer to be tested, and the other end is connected to the testing equipment. The testing equipment outputs a test signal, which is transmitted to the wafer to be tested via the probe card.

[0065] The computing device includes a pin card parallelism calculation unit, which executes the pin card parallelism calculation method described in this application embodiment to calculate the parallelism of the pin cards. Specifically, a pin card fitting plane is obtained by fitting the position of the needle tip of the registered probe on the pin card. Based on the pin card fitting plane, the parallelism of the pin card relative to the horizontal plane (also referred to as the pin card parallelism) is calculated. This parallelism, compared to the needle tip height difference, can more accurately reflect whether the pin card panel is in a leveled state. Therefore, using the pin card parallelism as an evaluation criterion, it is possible to more accurately evaluate whether the pin cards on the pin card plane meet production requirements, reduce the probability of misjudgment, improve the pin card utilization rate, and reduce economic losses to a certain extent.

[0066] To facilitate a more intuitive understanding of the effects of the method in this application embodiment compared to traditional methods, the following is combined with... Figures 1 to 3 Provide a illustrative illustration.

[0067] Suppose there is a needle card with four probes of different lengths registered on it. Figure 1 As shown, after leveling the needle card plane using the needle tip height difference as the evaluation criterion, the needle tip height difference 1 is obtained.

[0068] like Figure 2 As shown, a fitting plane for the needle clip can be obtained by fitting the position information of the tips of the four probes. The parallelism of the needle clip is calculated based on the fitting plane. The fitting plane is then aligned with the horizontal plane based on this parallelism, i.e., the parallelism of the needle clip is used as the evaluation criterion for leveling. The tip height difference in this case is denoted as tip height difference 2.

[0069] Figure 3 This is a schematic diagram comparing the effects of needle tip height difference 1 and needle tip height difference 2. For example... Figure 3 As shown, the needle tip height difference 2 after leveling based on the parallelism of the needle card is smaller than the needle tip height difference 1 after leveling based on the needle tip height difference. In other words, using the parallelism of the needle card as the evaluation criterion results in a smaller needle tip height deviation. This reduces the probability of qualified needle cards with larger installation errors, slightly lower processing precision, or individual probe wear, but which are actually usable, being misjudged as unqualified, thereby improving the utilization rate of the needle cards.

[0070] It should be noted that, Figure 2 and Figure 3 The reason for calculating the needle tip height difference 2 and comparing it with the needle tip height difference 1 is primarily to use the same indicator, the needle tip height difference, to more accurately and intuitively demonstrate the advantages and disadvantages of the proposed solution compared to traditional methods. In reality, after calculating the parallelism of the needle card using the method in this embodiment, the needle tip height difference is not calculated again, nor is it used for evaluation and adjustment. Instead, the needle card or its plane is adjusted based on its parallelism, aiming to gradually make the fitting plane of the needle card parallel to the horizontal plane, thereby judging whether the needle card meets production requirements.

[0071] Some related solutions only mention leveling based on the parallelism of the needle cards, but do not address how to quantify and calculate the parallelism. This may lead to inaccurate needle card evaluation. If the calculated parallelism is inaccurate, then adjusting the needle cards based on that parallelism and judging their suitability will also be inaccurate. Therefore, accurately and reasonably quantifying and calculating the parallelism of the needle cards is crucial. The needle card parallelism calculation method in this application is precisely a method that can accurately calculate the parallelism of the needle cards. Using the accurately calculated parallelism as evaluation data, it more accurately judges whether the needle cards are qualified, thereby further reducing the probability of misjudgment and improving the utilization rate of the needle cards. The needle card parallelism calculation method in this application will be described in more detail below.

[0072] In one embodiment, such as Figure 4 As shown, a method for calculating the parallelism of a probe card is provided. Taking the application of this method to a computing device in a probe station as an example, the method includes the following steps:

[0073] S41, the fitting plane of the needle card is obtained by fitting the position information of the needle tip of the registered probe on the needle card.

[0074] The registration probe is a probe registered on the probe card. For example, the position information of the probe tip is the position information in the target spatial coordinate system. The target spatial coordinate system is a three-dimensional spatial coordinate system established based on the wafer carrier stage. The target spatial coordinate system includes a horizontal axis (X-axis), a vertical axis (Y-axis), and a vertical axis (Z-axis).

[0075] Figure 5 Used to present the pin-card fitting plane from a top-down view. For example... Figure 5 As shown, the panel plane is the plane on which the pin card panel is located. The pin card is set on the pin card panel. The pin card has multiple registration probes. The probe station device has an image acquisition device (such as a camera) that can focus on the tip of each registration probe to obtain the position information of the tip of each registration probe. Then, the data point set composed of the position information of the tip of each registration probe can be fitted to a plane to obtain the pin card fitting plane (also called the probe fitting plane).

[0076] S42, determine the point where the vertical line of the horizontal plane passing through the first target point of each registered probe intersects the needle-card fitting plane, and obtain the intersection point corresponding to each registered probe; the first target point is the needle tip or the first projection point of the needle tip on the common vertical plane of the needle-card fitting plane and the horizontal plane.

[0077] A horizontal line is a straight line that is perpendicular to the horizontal plane.

[0078] In some examples, the first target point is the tip of the probe. That is, for each registered probe, the intersection point corresponding to that registered probe can be obtained by drawing a horizontal perpendicular line from the tip of the registered probe to the probe fitting plane.

[0079] In other examples, the first target point is the first projection point of the probe tip onto the common perpendicular plane of the probe fitting plane and the horizontal plane. Specifically, the common perpendicular plane of the probe fitting plane and the horizontal plane can be constructed. For each registered probe, the probe tip can be projected onto this common perpendicular plane, and the projection point can be denoted as the first projection point. Then, a perpendicular line from the first projection point to the horizontal plane is drawn, intersecting the probe fitting plane. This intersection point is the intersection point corresponding to the registered probe. It should be understood that the coordinate values ​​(also referred to as the Z-axis coordinates) of the probe tip and its corresponding first projection point in the vertical axis direction of the target space coordinate system are equal.

[0080] S43. Based on the coordinate values ​​of the intersection points corresponding to each registered probe in the vertical direction of the target space coordinate system, determine the parallelism of at least some of the registered probes to obtain a set of parallelisms.

[0081] In some examples, the Z-axis coordinate of the intersection point corresponding to each registered probe can be directly used as the parallelism of that registered probe. Alternatively, the Z-axis coordinate of the intersection point corresponding to each registered probe can be transformed (e.g., a linear transformation) to obtain the parallelism of that registered probe. Then, a parallelism set is formed based on the parallelism of each registered probe. In this example, the parallelism set includes, but is not limited to, the parallelism of each registered probe.

[0082] In other examples, a reference probe can be selected from multiple registered probes, denoted as the reference probe, and the other registered probes are non-reference probes. For each non-reference probe, the difference in the first vertical coordinate (i.e., the Z-axis coordinate difference) between the second intersection point of the non-reference probe and the first intersection point of the reference probe is calculated to obtain the parallelism corresponding to the non-reference probe. For example, the absolute value of the first vertical coordinate difference can be calculated as the parallelism corresponding to the non-reference probe. Furthermore, a set of parallelisms is obtained based on the parallelisms corresponding to each non-reference probe. In this example, the elements in the parallelism set may include, but are not limited to, the parallelisms corresponding to each non-reference probe. It should be understood that combining the intersection points of each registered probe on the probe fitting plane, based on the same reference probe, allows for a more accurate calculation of the parallelism of each other registered probe.

[0083] For example, the reference pin can be the first pin, or a registered probe selected according to preset rules or randomly selected. There is no limitation on this, as long as all registered probes have a unified reference object. It should be understood that the first pin in the pin card is crucial; usually, the first pin is not allowed to fail to align. Therefore, the position information of the first pin is more accurate. Thus, using the first pin as the reference pin can reduce errors and more accurately calculate the parallelism corresponding to each non-reference pin.

[0084] like Figure 6 As shown, the four black dots represent the first projection points of the tips of the four registered probes onto a common vertical plane. Then, a perpendicular line is drawn from each of these first projection points to the horizontal plane; the point where this line intersects the fitting plane of the probe card is the intersection point for each registered probe. Assuming the reference probe is the first probe pin1, pr1 is the first projection point of the first probe pin1, and pr... n Is it a reference pin? n The first projection point, the first intersection of the horizontal perpendicular line through pr1 and the needle fitting plane, is denoted as I1. n The second intersection point of the horizontal vertical line and the pin-card fitting plane is denoted as I. n According to the second intersection point I n The absolute value of the Z-axis coordinate difference with the first intersection point I1 can be used to obtain the non-reference pin. n The corresponding parallelism.

[0085] S44: Select the maximum value from the parallelism set to obtain the parallelism of the needle card.

[0086] It should be understood that the needle card is a rigid structure, and the parallelism of the entire needle card is no less than the parallelism of each registered probe on the needle card. Therefore, the maximum value in the parallelism set is closer to or better reflects the magnitude of the parallelism of the needle card. Thus, the maximum value can be selected from the parallelism set to obtain the parallelism of the needle card.

[0087] In some examples, the maximum value in the parallelism set can be directly used as the parallelism of the pin card. In other examples, the parallelism of the pin card can be further analyzed based on the maximum value in the parallelism set; the specific processing will be detailed below.

[0088] In the above method, a fitting plane for the pincard is obtained by fitting the positions of the probe tips on the pincard. The parallelism of the pincard relative to the horizontal plane is then calculated based on this fitting plane. Specifically, the parallelism of at least a portion of the registered probes is determined based on the Z-axis coordinates of their intersection points on the fitting plane, resulting in a set of parallelism values. The maximum value is then selected from this set to obtain the parallelism of the pincard. The parallelism calculated in this way more accurately reflects whether the pincard panel is level, thus enabling a more accurate evaluation of whether the pincard on the pincard plane meets production requirements. This reduces the probability of misjudgment, improves pincard utilization, and to some extent reduces economic losses.

[0089] Furthermore, there are many types of needle cards. If the needle tip height difference is used as the evaluation criterion, a corresponding needle tip height difference threshold needs to be set for each type of needle card, making it difficult to establish a unified evaluation standard. Using the parallelism of the needle cards calculated by the scheme in this application as the evaluation criterion, a unified parallelism control value (i.e., parallelism threshold) can be established for different types of needle cards, which is more applicable and convenient. Moreover, using a unified evaluation standard to judge the qualification of various types of needle cards will result in more accurate evaluation results and can reduce the probability of misjudgment to a certain extent.

[0090] In some embodiments, calculating the first vertical coordinate difference between the second intersection point corresponding to the non-reference needle and the first intersection point corresponding to the reference needle in the vertical axis direction to obtain the parallelism corresponding to the non-reference needle includes: determining the second position information corresponding to the first intersection point based on the first position information of the needle tip of the reference needle in the target space coordinate system; obtaining the third position information of the needle tip of the non-reference needle in the target space coordinate system; determining the coordinate difference between the second position information and the third position information; calculating the first vertical coordinate difference based on the coordinate difference and the plane normal vector of the needle fitting plane; and obtaining the parallelism corresponding to the non-reference needle based on the absolute value of the first vertical coordinate difference.

[0091] Assume the number of registered probes is k (k≥2 and is a positive integer), the first probe pin1 is the reference probe, the first position information of pin1 is (x1,y1,z1), and the second position information of the first intersection point corresponding to pin1 is (x1,y1,z1). a ,y a ,z a Any non-reference pin n The third position information is (x n ,y n ,z n), where 2≤n≤k and are positive integers. The coordinate difference between the third position information and the second position information is denoted as Δpin. n =(x n -x a ,y n -y a ,z n -z a In addition, the plane normal vector of the fitting plane of the needle card can be calculated and denoted as (A, B, C). In various embodiments of this application, the horizontal plane normal vector can be regarded as (0,0,1).

[0092] Based on non-reference pins n The corresponding coordinate difference △pin n And the plane normal vector (A, B, C) of the fitting plane of the needle card, calculate the first vertical coordinate difference, and obtain the parallelism corresponding to the non-reference needle based on the absolute value of the first vertical coordinate difference. Further, based on the parallelism corresponding to each non-reference needle, determine the parallelism of the needle card. Specifically, the parallelism of the needle card can be calculated through the following steps (1) to (5):

[0093] (1) Calculate the angle between the horizontal plane and the needle fitting plane based on the plane normal vector.

[0094] For example, one can first calculate the cosine of the included angle θ, cosθ, and then determine the included angle θ based on cosθ. For instance, cosθ can be calculated using the following formula:

[0095]

[0096] Where A, B, and C refer to the components of the plane normal vector along the X, Y, and Z coordinate axes, respectively. It refers to the magnitude of the plane normal vector (A, B, C), that is, the length of the plane normal vector.

[0097] (2) Calculate the distance from the needle tip of the non-reference needle to the fitting plane of the needle card based on the coordinate difference and the plane normal vector.

[0098] For example, the non-reference pin can be calculated using the following formula. n The distance S from the needle tip to the fitting plane of the needle card n :

[0099]

[0100] Where A*(x n -x a )+B*(y n -y a )+C*(z n -z a) indicates a non-reference pin. n The offset of the needle tip relative to the fitting plane of the needle card is measured in the direction of the plane's normal vector; S n Essentially, this is equivalent to starting from a non-reference pin. n The projection distance of the vector from the tip of the needle to the first intersection point I1 of the reference needle onto the plane normal vector. It should be understood that the non-reference needle pin... n Its first projection point pr on the same perpendicular plane n The Z-axis coordinates are the same, and the first projection point pr n The distance to the fitting plane of the needle card is also equal to S. n .

[0101] (3) Determine the difference in the second vertical coordinate between the second intersection point and the tip of the non-reference needle in the vertical axis direction based on the distance and the included angle.

[0102] For example, non-reference pin n The difference between the second vertical coordinate of the corresponding second intersection point and the second vertical coordinate along the vertical axis can be expressed as:

[0103] Combination Figure 6 To illustrate, from Figure 6 It can be seen from the spatial geometric relationship that the non-reference pin n The first projection point pr n Intersection with the corresponding second intersection point I n The coordinate difference in the Z-axis direction is Due to non-reference pin n Its first projection point pr on the same perpendicular plane n Since their Z-axis coordinates are the same, non-reference pins... n Intersection with the second point I n The second vertical coordinate difference along the vertical axis is also...

[0104] (4) Determine the first vertical coordinate difference based on the second vertical coordinate difference and the third vertical coordinate difference between the needle tip of the non-reference needle and the first intersection point in the vertical axis direction, and obtain the parallelism corresponding to the non-reference needle based on the absolute value of the first vertical coordinate difference.

[0105] The difference in the third vertical coordinate can be represented as z. n -z a .

[0106] Combination Figure 6 It can be seen that z n -z a Is it a reference pin? n The first projection point pr nThe coordinate difference between the first intersection point I1 and the first intersection point I1 in the Z-axis direction, and the non-reference pin. n Its first projection point pr on the same perpendicular plane n Since their Z-axis coordinates are the same, non-reference pins... n The difference in the third vertical coordinate between the needle tip and the first intersection point I1 along the vertical axis (Z-axis) is also z. n -z a .

[0107] In some examples, the first vertical coordinate difference can be obtained from the sum of the second and third vertical coordinate differences. Furthermore, the non-reference pin can be represented by the following equation (3). n The corresponding parallelism P n :

[0108]

[0109] in, This is the difference in the first vertical coordinate, and its absolute value is the non-reference pin. n The corresponding parallelism P n .

[0110] Substituting equations (1) and (2) into equation (3), we obtain the following formula for calculating parallelism:

[0111]

[0112] It should be understood that equation (3) describes the non-reference pin. n How to calculate the parallelism P when the needle tip is located below the fitting plane of the needle card? n In other examples, if it is not a reference pin... n If the needle tip is located above (on the other side) the needle fitting plane, then the non-reference needle pin can be determined based on the absolute value of the difference between the third vertical coordinate difference and the second vertical coordinate difference. n The corresponding parallelism P n .

[0113] (5) Determine the parallelism set based on the parallelism corresponding to the non-reference needle, select the maximum value from the parallelism set, and obtain the parallelism of the needle card.

[0114] For example, the parallelism P of the pin card can be calculated using the following formula:

[0115] P = Max(P2, P3, ..., P k Equation (5)

[0116] Where Max() is the function to find the maximum value, (P2, P3, ..., P k ) is the set of parallelism.

[0117] It should be understood that in this embodiment, the parallelism corresponding to each non-reference needle is determined by calculating the absolute value of the first vertical coordinate difference using pin1 as the reference needle. Therefore, the parallelism corresponding to each non-reference needle is greater than the parallelism corresponding to the reference needle pin1. Thus, it is not necessary to calculate the parallelism corresponding to pin1; that is, the parallelism set may not include the parallelism corresponding to the reference needle. In this way, the needle card parallelism can be calculated accurately and quickly.

[0118] Furthermore, the inventors of this application, through further in-depth research, discovered that combining the parallelism corresponding to the actual registered probes with the parallelism corresponding to the theoretically farthest probe on the probe card allows for a more accurate determination of the probe card's parallelism. The theoretically farthest probe is the probe furthest from the reference probe among the probes at the registered station of the pointer card. It should be understood that probes at unregistered stations are not included in the calculation; instead, the probe furthest from the reference probe is selected from the registered probes at those stations as the theoretically farthest probe.

[0119] It should be understood that, due to the characteristics of probe station equipment, the station and pads are registered before use, followed by probe registration. Once the station and pads are registered, the number of registrable probes and their theoretical positions are determined; the number of registrable probes is the same as the number of pads at the registration station. To improve efficiency, some probes on the probe card are selected for alignment, meaning the actual number of registered probes may be less than the number of registrable probes. After registration, the probe's position information (i.e., coordinates) is obtained.

[0120] As discussed above, a plane fitting plane can be obtained based on the actual position information of the registered probes to obtain the probe card fitting plane. The parallelism of at least some of the registered probes can then be calculated based on this fitting plane to determine the parallelism of the entire probe card. However, in the actual registration process, there are inevitably special cases where the distribution of registered probes is too concentrated. In such cases, combining the parallelism of the actual registered probes with the parallelism of the theoretically furthest probe on the probe card can avoid the limitations caused by the overly concentrated distribution of registered probes, thus more accurately reflecting the parallelism of the entire probe card and improving the accuracy of the parallelism calculation.

[0121] In some embodiments, the theoretical farthest needle can be determined based on the station information of the probe station equipment. Specifically, the probe distribution information corresponding to the needle card can be determined based on the station information of the probe station equipment. For example, the station information may include the length and width of the station, the coordinates of the upper left corner of the station in the target space coordinate system, the pads on the station, and the coordinates of the pads. Since one pad corresponds to one registerable probe, the probe distribution information can be determined based on the station information. The probe distribution information is used to characterize the positional distribution of probes on the registered station (i.e., the registered station). Therefore, the probe farthest from the reference needle among the probes on the registered station of the needle card is determined based on the probe distribution information, and the farthest probe is taken as the theoretical farthest needle.

[0122] Now combined Figure 7 and Figure 8 Two registration probe distributions are illustrated to illustrate the theoretical farthest probe.

[0123] for example Figure 7 As shown, there are 6 registration stations, and each station registers 5 pads. Therefore, the number of registerable probes is 30, but only 4 probes are actually registered (i.e., ...). Figure 7 (The four black-filled squares in the image) The distribution of the registered probes can be found in [the image / reference]. Figure 7 The theoretically furthest probe can be determined based on the probe distribution information at the registration station. It should be understood that the theoretically furthest probe does not need to be registered; rather, it is the probe furthest from the first probe among the registerable probes at the registration station.

[0124] For example Figure 8 As shown, there are also 6 registration stations, with 5 pads registered at each station, but only 4 actual registration probes. However, the distribution of the registration probes is different from... Figure 7 They are different. Similarly, the theoretical furthest needle, furthest from the first needle, can be determined based on the probe distribution information at the registered workstation.

[0125] It should be understood that the calculation principle for the parallelism corresponding to the theoretically furthest needle is the same as that for the registered probe. Specifically, the parallelism corresponding to the theoretically furthest needle is determined based on the difference in the fourth vertical coordinate along the vertical axis between the third intersection point of the theoretically furthest needle and the first intersection point of the reference needle; where the third intersection point is the point where the vertical line passing through the second target point of the theoretically furthest needle intersects the needle fitting plane; the second target point is the tip of the theoretically furthest needle or the second projection point of the tip of the theoretically furthest needle on the common vertical plane.

[0126] In some embodiments, before selecting the maximum value from the parallelism set to obtain the parallelism of the needle card, the parallelism corresponding to the theoretically farthest needle on the needle card can be determined; the parallelism corresponding to the theoretically farthest needle is added to the parallelism set. In this way, the parallelism set includes the parallelism corresponding to probes with a wider distribution, which better reflects the parallelism of the entire needle card. Therefore, the maximum value can be selected from the parallelism set as the parallelism of the needle card.

[0127] In some embodiments, the parallelism set may include only the parallelism corresponding to the registered probes, excluding the parallelism corresponding to the theoretically farthest probe. In this case, the maximum value can be selected from the parallelism set, which is the parallelism of the actual farthest probe. It should be understood that the actual farthest probe is the actually registered probe that is farthest from the reference probe. Further, the parallelism of the probe card can be obtained by selecting the maximum value from the parallelism corresponding to the actual farthest probe and the parallelism corresponding to the theoretically farthest probe.

[0128] like Figure 9 As shown, in some embodiments, another method for calculating the parallelism of the probe card is provided. This method is applied to the computing device in the probe station equipment and specifically includes the following steps:

[0129] S91, obtain the position information of the probe tip on the registered probe card.

[0130] S92, based on the position information of the needle tip of the registered probe on the needle card, the fitting plane of the needle card is obtained by fitting, and the plane normal vector of the fitting plane of the needle card is determined.

[0131] S93, based on the position information of the tip of each registered probe and the plane normal vector, calculate the parallelism of each registered probe to obtain the parallelism set.

[0132] It should be understood that the specific processing of step S93 can be found in the description of steps S42 to S43 and their related embodiments above, and will not be repeated here.

[0133] S94: Select the maximum value from the parallelism set to obtain the parallelism corresponding to the actual farthest needle.

[0134] S95, calculates the parallelism corresponding to the farthest needle in theory.

[0135] Similarly, the specific processing of step S95 is described above and will not be repeated here.

[0136] S96, determine whether the parallelism of the actual farthest needle is greater than the parallelism of the theoretical farthest needle.

[0137] If not, proceed to step S97; if yes, proceed to step S98.

[0138] S97 uses the parallelism of the theoretically furthest needle as the parallelism of the needle card.

[0139] by Figure 7 Taking the registered probe distribution and the determined theoretical farthest probe as an example, as shown... Figure 10 As shown, Figure 7 After projecting the coordinates of the tips of the four registered probes actually registered in the system and the coordinates of the theoretical farthest probe onto the common perpendicular plane (i.e., the common perpendicular plane of the probe fitting plane and the horizontal plane) to calculate the parallelism of each probe, it can be seen that the parallelism 2 corresponding to the theoretical farthest probe is greater than the parallelism 1 corresponding to the actual farthest probe. Therefore, the parallelism 2 corresponding to the theoretical farthest probe can better reflect the parallelism of the entire probe card. That is, the parallelism 2 corresponding to the theoretical farthest probe can be used as the parallelism of the probe card.

[0140] S98 uses the parallelism of the actual farthest needle as the parallelism of the needle card.

[0141] by Figure 8 Taking the registered probe distribution and the determined theoretical farthest probe as an example, as shown... Figure 11 As shown, Figure 8 After projecting the coordinates of the tips of the four registered probes and the coordinates of the theoretical farthest probe onto the common perpendicular plane to calculate the parallelism of each probe, it can be seen that the parallelism 3 corresponding to the actual farthest probe is greater than the parallelism 4 corresponding to the theoretical farthest probe. Therefore, the parallelism 3 corresponding to the actual farthest probe can better reflect the parallelism of the entire probe card. That is, the parallelism 3 corresponding to the actual farthest probe can be used as the parallelism of the probe card.

[0142] S99, Parallelism of the output pin card.

[0143] In the above embodiments, the actual farthest needle is compared with the theoretical farthest needle, and the maximum value is selected. This maximum value better reflects the parallelism of the entire needle card, thus improving the accuracy of the needle card parallelism calculation.

[0144] It should be understood that although the steps in the flowcharts of the embodiments described above are shown sequentially according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the embodiments described above may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the steps or stages of other steps.

[0145] Based on the same inventive concept, this application also provides a needle-card parallelism calculation device for implementing the needle-card parallelism calculation method described above. The solution provided by this device is similar to the solution described in the above method; therefore, the specific limitations in one or more embodiments of the needle-card parallelism calculation device provided below can be found in the limitations of the needle-card parallelism calculation method described above, and will not be repeated here.

[0146] In one embodiment, such as Figure 12 As shown, a needle card parallelism calculation device is provided, comprising:

[0147] The plane fitting module 1202 is used to fit the needle card fitting plane based on the position of the needle tip of the registered probe on the needle card;

[0148] The probe parallelism calculation module 1204 is used to determine the point where the vertical line of the horizontal plane passing through the first target point of each registered probe intersects the probe fitting plane, thereby obtaining the intersection point corresponding to each registered probe; the first target point is the tip point or the first projection point of the tip point on the common perpendicular plane of the probe fitting plane and the horizontal plane; based on the coordinate values ​​of the intersection points corresponding to each registered probe in the vertical axis direction of the target space coordinate system, the parallelism corresponding to at least a portion of the registered probes is determined, thereby obtaining a set of parallelisms; wherein, the target space coordinate system is a three-dimensional space coordinate system established based on the wafer carrier stage;

[0149] The needle card parallelism determination module 1206 is used to select the maximum value from the parallelism set to obtain the parallelism of the needle card.

[0150] In some embodiments, the probe parallelism calculation module 1204 is further configured to calculate, for each non-reference needle among the registered probes, the difference in the first vertical coordinate between the second intersection point corresponding to the non-reference needle and the first intersection point corresponding to the reference needle in the vertical axis direction, to obtain the parallelism corresponding to the non-reference needle; wherein, the reference needle is a registered probe that serves as a reference among the registered probes; and the parallelism set is obtained based on the parallelism corresponding to each non-reference needle.

[0151] In some embodiments, the probe parallelism calculation module 1204 is further configured to: determine the second position information corresponding to the first intersection point based on the first position information of the tip of the reference needle in the target spatial coordinate system; obtain the third position information of the tip of the non-reference needle in the target spatial coordinate system; determine the coordinate difference between the second position information and the third position information; calculate the first vertical coordinate difference based on the coordinate difference and the plane normal vector of the needle fitting plane; and obtain the parallelism corresponding to the non-reference needle based on the absolute value of the first vertical coordinate difference.

[0152] In some embodiments, the probe parallelism calculation module 1204 is further configured to: calculate the angle between the horizontal plane and the needle-card fitting plane based on the plane normal vector; calculate the distance from the tip of the non-reference needle to the needle-card fitting plane based on the coordinate difference and the plane normal vector; determine the second vertical coordinate difference between the second intersection point and the tip of the non-reference needle in the vertical axis direction based on the distance and the angle; and determine the first vertical coordinate difference based on the second vertical coordinate difference and the third vertical coordinate difference between the tip of the non-reference needle and the first intersection point in the vertical axis direction.

[0153] In some embodiments, the probe parallelism calculation module 1204 is further configured to determine the parallelism corresponding to the theoretical farthest needle on the needle card; wherein the theoretical farthest needle is the probe farthest from the reference needle among the probes at the registration station of the needle card; and to add the parallelism corresponding to the theoretical farthest needle to the parallelism set.

[0154] In some embodiments, the needle card parallelism determination module 1206 is further configured to select the maximum value from the set of parallelisms and use the selected maximum value as the parallelism of the actual farthest needle; wherein, the actual farthest needle is the actual registered probe that is farthest from the reference needle; determine the parallelism corresponding to the theoretical farthest needle on the needle card; and select the maximum value from the parallelism corresponding to the actual farthest needle and the parallelism corresponding to the theoretical farthest needle to obtain the parallelism of the needle card.

[0155] In some embodiments, the needle clip is mounted on a probe station device; the device further includes:

[0156] The theoretical farthest needle determination module (not shown in the figure) is used to determine the probe distribution information corresponding to the needle card based on the station information of the probe station equipment; determine the probe farthest from the reference needle among the probes at the registration station of the needle card based on the probe distribution information, and take the farthest probe as the theoretical farthest needle.

[0157] In some embodiments, the parallelism corresponding to the theoretical farthest needle is determined based on the difference between the fourth vertical coordinate of the third intersection point and the first intersection point in the vertical axis direction.

[0158] Wherein, the third intersection point is the point where the horizontal plane perpendicular to the second target point of the theoretical farthest needle intersects the fitting plane of the needle card; the second target point is the needle tip of the theoretical farthest needle or the second projection point of the needle tip of the theoretical farthest needle on the common vertical plane.

[0159] Each module in the aforementioned probe card parallelism calculation device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in hardware within the processor of the computing device in the probe station equipment, or stored in software in the memory of the computing device, so that the processor can call and execute the corresponding operations of each module.

[0160] In one embodiment, a computing device, also known as a computer device, is provided. Its internal structure diagram can be as follows: Figure 13 As shown, the computing device may include a processor, memory, input / output (I / O) interfaces, and a communication interface. The processor, memory, and I / O interfaces are connected via a system bus, and the communication interface is also connected to the system bus via the I / O interfaces. The processor provides computing and control capabilities. The memory includes non-volatile storage media and internal memory. The non-volatile storage media stores the operating system and computer programs. The internal memory provides the environment for the operation of the operating system and computer programs stored in the non-volatile storage media. The I / O interfaces are used for exchanging information between the processor and external devices. The communication interface is used for communicating with external terminals via a network connection. When the computer program is executed by the processor, it implements a method for calculating the parallelism of a pin card.

[0161] Those skilled in the art will understand that Figure 13 The structure shown is merely a block diagram of a portion of the structure related to the present application and does not constitute a limitation on the computer device to which the present application is applied. Specific computer devices may include more or fewer components than those shown in the figure, or combine certain components, or have different component arrangements.

[0162] In one embodiment, a computing device is provided, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps in the embodiments of the present application.

[0163] In one embodiment, a computer-readable storage medium is provided having a computer program stored thereon, which, when executed by a processor, implements the steps of the embodiments of this application.

[0164] In one embodiment, a computer program product is provided, including a computer program that, when executed by a processor, implements the steps of the embodiments of this application.

[0165] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, data stored, data displayed, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of the relevant data shall comply with the relevant laws, regulations and standards of the relevant countries and regions.

[0166] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. Any references to memory, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM). The databases involved in the embodiments provided in this application may include at least one type of relational database and non-relational database. Non-relational databases may include, but are not limited to, blockchain-based distributed databases. The processors involved in the embodiments provided in this application may be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, quantum computing-based data processing logic devices, etc., and are not limited to these.

[0167] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0168] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. A needle card parallelism calculation method, characterized by, The method comprises: fitting a needle card fitting plane according to position information of a needle tip point of a registered probe on a needle card; determining a point of intersection of a vertical line of a horizontal plane passing through a first target point of each registered probe with the needle card fitting plane to obtain a corresponding intersection point of each registered probe; the first target point is the needle tip point or a first projection point of the needle tip point on a common vertical plane of the needle card fitting plane and the horizontal plane; determining parallelism corresponding to at least part of the registered probes according to coordinate values of the intersection points corresponding to the registered probes in a vertical axis direction of a target space coordinate system to obtain a parallelism set; wherein the target space coordinate system is a three-dimensional space coordinate system established based on a wafer carrying table; selecting a maximum value from the parallelism set to obtain parallelism of the needle card.

2. The method of claim 1, wherein, The method further comprises: for each non-reference probe in the registered probes, calculating a first vertical coordinate difference value in the vertical axis direction between a second intersection point corresponding to the non-reference probe and a first intersection point corresponding to a reference probe to obtain parallelism corresponding to the non-reference probe; wherein the reference probe is a registered probe that functions as a reference in the registered probes; obtaining the parallelism set according to the parallelism corresponding to each non-reference probe.

3. The method of claim 2, wherein, The method further comprises: determining second position information corresponding to the first intersection point according to first position information of a needle tip point of the reference probe in the target space coordinate system; obtaining third position information of a needle tip point of the non-reference probe in the target space coordinate system; determining a coordinate difference value of the second position information and the third position information; calculating the first vertical coordinate difference value according to the coordinate difference value and a plane normal vector of the needle card fitting plane, and obtaining the parallelism corresponding to the non-reference probe according to an absolute value of the first vertical coordinate difference value.

4. The method of claim 3, wherein, The method further comprises: calculating an included angle between the horizontal plane and the needle card fitting plane according to the plane normal vector; calculating a distance from the needle tip point of the non-reference probe to the needle card fitting plane according to the coordinate difference value and the plane normal vector; determining a second vertical coordinate difference value in the vertical axis direction between the needle tip point of the non-reference probe and the second intersection point according to the distance and the included angle; determining the first vertical coordinate difference value according to the second vertical coordinate difference value and a third vertical coordinate difference value in the vertical axis direction between the needle tip point of the non-reference probe and the first intersection point.

5. The method of claim 2, wherein, The method further comprises: before the step of selecting a maximum value from the parallelism set to obtain parallelism of the needle card, the method further comprises: determining a parallelism corresponding to a theoretically farthest probe on the probe card; wherein the theoretically farthest probe is a probe farthest from the reference probe among the probes on a registration station of the probe card; adding the parallelism corresponding to the theoretically farthest probe to the parallelism set.

6. The method of claim 2, wherein, The selecting a maximum value from the parallelism set to obtain the parallelism of the probe card comprises: selecting a maximum value from the parallelism set, and taking the selected maximum value as the parallelism of an actually farthest probe; wherein the actually farthest probe is an actually registered registration probe farthest from the reference probe; determining a parallelism corresponding to a theoretically farthest probe on the probe card; selecting a maximum value from the parallelism corresponding to the actually farthest probe and the parallelism corresponding to the theoretically farthest probe to obtain the parallelism of the probe card.

7. The method according to claim 5 or 6, characterized in that, The probe card is installed on a probe station device; Before the determining the parallelism corresponding to the theoretically farthest probe on the probe card, the method further comprises: determining probe distribution information corresponding to the probe card according to station information of the probe station device; determining a probe farthest from the reference probe among the probes on a registration station of the probe card according to the probe distribution information, and taking the farthest probe as the theoretically farthest probe.

8. The method according to claim 5 or 6, characterized in that, The parallelism corresponding to the theoretically farthest probe is determined according to a fourth vertical coordinate difference between a third intersection point corresponding to the theoretically farthest probe and the first intersection point in the vertical axis direction; wherein the third intersection point is a point of intersection of a horizontal plane perpendicular through a second target point of the theoretically farthest probe and the probe card fitting plane; and the second target point is a needle tip point of the theoretically farthest probe or a second projection point of the needle tip point of the theoretically farthest probe on a common perpendicular plane.

9. A needle card parallelism calculating device characterized by comprising: The device comprises: a plane fitting module configured to fit a probe card fitting plane according to positions of needle tip points of registration probes on a probe card; a probe parallelism calculation module configured to determine a point of intersection of a horizontal plane perpendicular through a first target point of each registration probe and the probe card fitting plane, to obtain an intersection point corresponding to each registration probe; the first target point is the needle tip point or a first projection point of the needle tip point on a common perpendicular plane of the probe card fitting plane and a horizontal plane; and to determine parallelisms corresponding to at least part of the registration probes according to coordinate values of the intersection points corresponding to the registration probes in a vertical axis direction of a target space coordinate system, to obtain a parallelism set; wherein the target space coordinate system is a three-dimensional space coordinate system established based on a wafer carrier table; a probe card parallelism determination module configured to select a maximum value from the parallelism set to obtain the parallelism of the probe card.

10. A probe station comprising: The probe station device comprises a computing device, a probe card, and a wafer carrier table; and the computing device runs a probe card parallelism calculation device. The needle card parallelism calculation device is configured to: fit a needle card fitting plane according to positions of needle tip points of registered probes on the needle card; determine a point of intersection of a vertical line of a horizontal plane passing through a first target point of each registered probe and the needle card fitting plane, to obtain a corresponding intersection point of each registered probe; the first target point is the needle tip point or a first projection point of the needle tip point on a common vertical plane of the needle card fitting plane and the horizontal plane; and determine parallelism corresponding to at least part of the registered probes according to coordinate values of the intersection points of the registered probes in a vertical axis direction of a target space coordinate system, to obtain a parallelism set; the target space coordinate system is a three-dimensional space coordinate system established based on the wafer carrying table; and select a maximum value from the parallelism set, to obtain the parallelism of the needle card.

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