Butterfly valve pressure control method, device, equipment and storage medium

Abstract

The present application relates to the technical field of pressure control, and discloses a butterfly valve pressure control method, device, equipment and storage medium, which comprises the following steps: performing signal tracking processing on a target pressure set value to obtain a reference tracking signal; performing interference suppression processing on an actual pressure signal to obtain an interference suppression signal; performing signal fusion on the reference tracking signal and the interference suppression signal to obtain a fusion tracking signal; performing differential extraction on the fusion tracking signal to obtain a differential signal; estimating the system state of a butterfly valve system, and performing comparison calculation based on the fusion tracking signal, the differential signal and the system state to generate a butterfly valve control signal; the present application generates a butterfly valve control signal by fusing the signal tracking and the interference suppression dual-channel signals, and combining the system state and the differential extraction result, realizes full compensation and dynamic correction of the time delay influence, and significantly improves the response speed and control precision of the butterfly valve pressure control.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of pressure control, and in particular to a butterfly valve pressure control method, device, equipment and storage medium. BACKGROUND

[0002] As the core executive component of vacuum system gas flow regulation, the control performance of the butterfly valve directly determines the stability and precision of the vacuum pressure, and has a key application in the high-precision field such as semiconductor manufacturing and vacuum coating. However, the traditional self-disturbance control cannot effectively offset the negative effects of time lag because the tracking differentiator lacks a targeted time lag compensation and disturbance suppression cooperative mechanism, ultimately causing the problems of pressure control response lag and insufficient precision. SUMMARY

[0003] In order to overcome the shortcomings of the prior art, the purpose of the present application is to provide a butterfly valve pressure control method, device, equipment and storage medium. The present application generates a butterfly valve control signal by fusing the signal tracking and disturbance suppression dual-channel signals and combining the system state and the differential extraction result, realizes full compensation and dynamic correction of the time lag effect, and significantly improves the response speed and control precision of the butterfly valve pressure control.

[0004] The first aspect of the present application provides a butterfly valve pressure control method, which comprises the steps of: obtaining a target pressure set value from an upper computer and performing signal tracking processing on the target pressure set value to obtain a reference tracking signal; collecting an actual pressure signal from a butterfly valve system in real time and performing disturbance suppression processing on the actual pressure signal to obtain a disturbance suppression signal; fusing the reference tracking signal and the disturbance suppression signal to obtain a fused tracking signal; performing differential extraction on the fused tracking signal to obtain a differential signal; estimating the system state of the butterfly valve system, and performing comparison calculation based on the fused tracking signal, the differential signal and the system state to generate a butterfly valve control signal.

[0005] Optionally, in the first implementation manner of the first aspect of the present application, the step of obtaining the target pressure set value from the upper computer and performing signal tracking processing on the target pressure set value to obtain the reference tracking signal comprises: obtaining the target pressure set value from the upper computer and performing lead phase compensation on the target pressure set value to obtain a compensated signal; performing first-order low-pass filtering processing on the compensated signal to obtain the reference tracking signal.

[0006] Optionally, in a second implementation form of the first aspect of the present application, the real-time collection of the actual pressure signal from the butterfly valve system and the interference suppression processing of the actual pressure signal to obtain the interference suppression signal comprises: real-time collection of the actual pressure signal from the butterfly valve system and calculation of a pressure change gradient of the actual pressure signal; interference detection of the pressure change gradient, and when interference is detected, time lag error correction of the actual pressure signal based on the pressure change gradient to obtain a corrected pressure signal; generation of the interference suppression signal based on the corrected pressure signal and a preset suppression coefficient.

[0007] Optionally, in a third implementation form of the first aspect of the present application, the signal fusion of the reference tracking signal and the interference suppression signal to obtain the fused tracking signal comprises: weighted fusion of the reference tracking signal and the interference suppression signal based on a preset weighting coefficient to obtain the fused tracking signal.

[0008] Optionally, in a fourth implementation form of the first aspect of the present application, the differential extraction of the fused tracking signal to obtain the differential signal comprises: obtaining a sampling period and solving a velocity factor based on a system pressure change rate in the sampling period; introducing the velocity factor into a preset nonlinear function and establishing a mapping relationship between the fused tracking signal and the differential signal based on the nonlinear function and the sampling period; iterative operation of the mapping relationship to solve the differential signal.

[0009] Optionally, in a fifth implementation form of the first aspect of the present application, the solving of the velocity factor based on the system pressure change rate in the sampling period comprises: calculation of a pressure change rate of the butterfly valve system based on the actual pressure signal of the butterfly valve with the sampling period as a time interval; adaptive adjustment of a preset reference velocity factor based on the pressure change rate to obtain the velocity factor.

[0010] Optionally, in a sixth implementation form of the first aspect of the present application, the estimation of the system state of the butterfly valve system and the comparison calculation based on the fused tracking signal, the differential signal and the system state to generate the butterfly valve control signal comprises: estimation of the running state and the disturbance of the butterfly valve system to obtain the system state and the system total disturbance; calculation of the deviation between the fused tracking signal, the differential signal and the system state and generation of a basic control quantity based on the deviation; deduction of the system total disturbance from the basic control quantity to generate the butterfly valve control signal.

[0011] The second aspect of the present application provides a butterfly valve pressure control device, comprising: a reference tracking module, configured to obtain a target pressure set value from a host computer and perform signal tracking processing on the target pressure set value to obtain a reference tracking signal; an interference suppression module, configured to collect an actual pressure signal from a butterfly valve system in real time and perform interference suppression processing on the actual pressure signal to obtain an interference suppression signal; a signal fusion module, configured to perform signal fusion on the reference tracking signal and the interference suppression signal to obtain a fusion tracking signal; a differential extraction module, configured to perform differential extraction on the fusion tracking signal to obtain a differential signal; and a signal generation module, configured to estimate a system state of the butterfly valve system and perform comparison calculation based on the fusion tracking signal, the differential signal and the system state to generate a butterfly valve control signal.

[0012] The third aspect of the present application provides a butterfly valve pressure control device, comprising: a memory and at least one processor, wherein the memory stores instructions; and the at least one processor invokes the instructions in the memory to enable the computer device to perform each step of the butterfly valve pressure control method described above.

[0013] The fourth aspect of the present application provides a computer readable storage medium, wherein the computer readable storage medium stores instructions, and the instructions are executed by a processor to implement each step of the butterfly valve pressure control method described above.

[0014] In the technical solution of the present application, first, the target pressure set value obtained from the host computer is subjected to signal tracking processing to predict the influence of system time delay on the target signal and provide an accurate reference for control; second, the actual pressure signal collected in real time is subjected to interference suppression processing to filter the measurement error caused by time delay and external interference and ensure the authenticity of the pressure signal; third, the reference tracking signal and the interference suppression signal are subjected to signal fusion to integrate the advantages of the two types of signals and generate a fusion tracking signal with timeliness and stability; fourth, the fusion tracking signal is subjected to differential extraction to obtain a differential signal to provide dynamic characteristic support for subsequent control operation; and finally, the butterfly valve control signal is generated by comparison calculation of the fusion tracking signal, the differential signal and the estimated system state, thereby realizing full compensation and dynamic correction of the influence of time delay, significantly improving the response speed and control accuracy of the butterfly valve pressure control, and ensuring that the vacuum system can still maintain a stable and reliable operating state under the condition of multiple time delays. BRIEF DESCRIPTION OF DRAWINGS

[0015] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:

[0016] Figure 1 The first flowchart of the butterfly valve pressure control method provided by the embodiments of the present application is shown in FIG. 1.

[0017] Figure 2 The second flow chart of the butterfly valve pressure control method provided for the embodiment of the present application is provided;

[0018] Figure 3 The third flow chart of the butterfly valve pressure control method provided for the embodiment of the present application is provided;

[0019] Figure 4 The fourth flow chart of the butterfly valve pressure control method provided for the embodiment of the present application is provided;

[0020] Figure 5 The fifth flow chart of the butterfly valve pressure control method provided for the embodiment of the present application is provided;

[0021] Figure 6 The sixth flow chart of the butterfly valve pressure control method provided for the embodiment of the present application is provided;

[0022] Figure 7 The seventh flow chart of the butterfly valve pressure control method provided for the embodiment of the present application is provided;

[0023] Figure 8 The structure schematic diagram of the butterfly valve pressure control device provided for the embodiment of the present application is provided;

[0024] Figure 9 The structure schematic diagram of the butterfly valve pressure control device provided for the embodiment of the present application is provided. DETAILED DESCRIPTION

[0025] The present application provides a butterfly valve pressure control method, device, equipment and storage medium, it fuses signal tracking and interference suppression double channel signal, and generates butterfly valve control signal in combination with system state and differential extraction result, realizes the full compensation and dynamic correction to time lag influence, significantly improves the response speed and control precision of butterfly valve pressure control, ensures that the vacuum system can still maintain stable and reliable running state under the condition of multiple time lags.

[0026] The terms "first", "second", "third", "fourth" and the like in the description and claims of the present application, and in the above DETAILED DESCRIPTION of the Invention (if any) are used for distinguishing between similar objects talking about the embodiments and not necessarily for describing a particular sequential or chronological order. It is to be understood that the use of these so-called "conventional" terms is merely for the convenience and simplicity of the description and is in no way to be construed as implying that one embodiment is prior to another embodiment, unless the context clearly indicates such a constraint. Moreover, the terms "comprise", "comprises", "comprising", "include", "includes", "including" and the like are used synonymously to denote a process, a method, a system, a product or a device that comprises a list of steps or units not necessarily in a strict order, or enclosed, or in any order of affinity, unless the context clearly indicates in such a manner. Furthermore, the term "comprise" or "comprises" or "comprising" or "include" or "includes" or "including", or any variation thereof, is intended to cover a non-exclusive inclusion, for example, a process, a method, a system, a product or a device that comprises a list of steps or units not necessarily in a strict order, or enclosed, or in any order of affinity, but can include other steps or units not clearly listed or inherent to such a process, method, product or device.

[0027] For ease of understanding, the specific process of the embodiments of the present invention is described below. Please refer to [link / reference]. Figure 1 One embodiment of the butterfly valve pressure control method in this invention includes:

[0028] The butterfly valve pressure control method includes the following steps:

[0029] 101. Obtain the target pressure setpoint from the host computer and perform signal tracking processing on the target pressure setpoint to obtain a reference tracking signal;

[0030] In this embodiment, the target pressure setpoint of the butterfly valve system is obtained from the host computer, and its input parameter tracking channel is subjected to phase compensation and low-pass filtering to obtain a reference tracking signal.

[0031] 102. Collect actual pressure signals from the butterfly valve system in real time, and perform interference suppression processing on the actual pressure signals to obtain interference suppression signals;

[0032] In this embodiment, the actual pressure data of the butterfly valve system is collected in real time by a pressure sensor according to the sampling period, and the data is input into the interference suppression channel for gradient calculation and error correction processing to obtain the interference suppression signal.

[0033] 103. The reference tracking signal and the interference suppression signal are fused to obtain the fused tracking signal;

[0034] In this embodiment, based on preset weighting coefficients, a dynamic weighted fusion strategy is used to fuse the reference tracking signal and the interference suppression signal to obtain a fused tracking signal.

[0035] 104. Extract the differential signal from the fused tracking signal to obtain the differential signal;

[0036] In this embodiment, a dynamic velocity factor and a filtering factor are introduced into the tracking differentiator algorithm. Combined with a preset fhan nonlinear function, the dynamic rate of change of the fused tracking signal is extracted through iterative calculation, and finally a differential signal reflecting the pressure change trend is obtained.

[0037] 105. Estimate the system state of the butterfly valve system, and compare and calculate based on the fused tracking signal, differential signal and system state to generate the butterfly valve control signal;

[0038] In this embodiment, the system state and total disturbance are first estimated in real time using an extended state observer. Then, the deviation between the fused tracking signal, the differential signal and the system state is calculated. The basic control quantity is generated through nonlinear state error feedback. After subtracting the total disturbance from the basic control quantity, the butterfly valve control signal is obtained.

[0039] In this embodiment of the invention, the target pressure setpoint is first obtained from the host computer and processed for signal tracking. The impact of system time delay on the target signal is predicted, providing a precise reference for control. Secondly, the real-time acquired actual pressure signal is subjected to interference suppression processing to filter measurement errors and external interference caused by time delay, ensuring the authenticity of the pressure signal. Then, the reference tracking signal and the interference suppression signal are fused to integrate the advantages of the two types of signals, generating a fused tracking signal that combines timeliness and stability. Subsequently, the fused tracking signal is differentially extracted to obtain a differential signal, providing dynamic characteristic support for subsequent control calculations. Finally, the butterfly valve control signal is generated by comparing the fused tracking signal, the differential signal, and the system state, based on the estimated system state. This achieves full compensation and dynamic correction for the impact of time delay, significantly improving the response speed and control accuracy of the butterfly valve pressure control, and ensuring that the vacuum system can maintain a stable and reliable operating state even under conditions with multiple time delays.

[0040] Please see Figure 2 Two embodiments of the butterfly valve pressure control method in this invention include:

[0041] 201. Obtain the target pressure setpoint from the host computer and perform advance phase compensation on the target pressure setpoint to obtain the compensation signal;

[0042] In this embodiment, the target pressure setting value sent by the host computer is... The input reference signal is tracked through the data processing channel. Due to time delays in signal transmission and pressure response in the vacuum system, a phase difference may occur between the target signal and the actual execution. Therefore, an advance phase compensation formula is used to advance the target pressure setpoint. The duration of the output is aligned with the time axis of the target signal and the system response to compensate for the phase lag caused by the time delay, ultimately yielding the compensated signal. Its mathematical formula is as follows:

[0043] ;

[0044] in, The total system time delay, This refers to the current moment.

[0045] 202. Perform first-order low-pass filtering on the compensation signal to obtain the reference tracking signal;

[0046] In this embodiment, to avoid high-frequency fluctuations in the compensated signal (such as digital jitter in the host computer signal), a first-order low-pass filter is applied to the compensated signal to obtain the reference tracking signal. :

[0047] ;

[0048] In the formula, These are the filter coefficients;

[0049] By using a first-order low-pass filter, the compensation signal can be smoothed, balancing the signal's response speed and stability. This preserves the target signal's trend while filtering out high-frequency noise, ensuring that the reference signal for subsequent control is stable and reliable.

[0050] Please see Figure 3 The three embodiments of the butterfly valve pressure control method in this invention include:

[0051] 301. Collect the actual pressure signal from the butterfly valve system in real time and calculate the pressure change gradient of the actual pressure signal;

[0052] In this embodiment, the actual pressure signal of the butterfly valve system is acquired in real time by a pressure sensor. It is then input into the interference suppression channel to suppress interference and correct errors in the actual pressure signal;

[0053] To quantify the actual pressure signal The dynamic fluctuation degree is determined by interpolating the pressure signal between the current moment and the previous four sampling periods, and using four times the sampling period as the time interval to obtain the pressure change gradient k. The calculation method is as follows:

[0054] ;

[0055] in, The sampling period is defined as k. The calculation of the pressure change gradient k can reflect the pressure change trend and reduce the impact of instantaneous noise by averaging data from multiple periods, providing a quantitative basis for subsequent interference detection and error correction.

[0056] 302. Perform interference detection on the pressure change gradient. When interference is detected, correct the time delay error of the actual pressure signal based on the pressure change gradient to obtain the corrected pressure signal.

[0057] In this embodiment, corresponding to the pressure change gradient, a preset pressure fluctuation threshold (e.g., pressure change gradient k exceeding ±0.5 kPa / ms) is used to determine whether interference exists; if interference exists, the actual pressure signal is analyzed by combining the pressure change gradient and the system time delay characteristics. Time delay error correction is performed to obtain the corrected pressure signal. The details are as follows:

[0058] ;

[0059] In the formula, , and These are correction coefficients based on system time delay calibration;

[0060] The reason for performing time delay error correction is that interference amplifies the measurement error caused by time delay, while nonlinear correction through gradient correlation can offset the pressure signal distortion caused by time delay and ensure the reliability of actual pressure data.

[0061] 303. Generate an interference suppression signal based on the corrected pressure signal and a preset suppression coefficient;

[0062] In this embodiment, to further reduce the impact of residual interference on the signal and correct the pressure signal... Compared with actual pressure signal Based on the difference, through the inhibition coefficient The interference fluctuations are attenuated to obtain the interference suppression signal. The details are as follows:

[0063] ;

[0064] Among them, the inhibition coefficient Used to adjust the intensity of interference compensation;

[0065] By dynamically adjusting the suppression coefficient, the effective changes in the actual pressure signal can be preserved while targeted reduction of interference components.

[0066] Please see Figure 4 The four embodiments of the butterfly valve pressure control method in this invention include:

[0067] 401. Based on preset weighting coefficients, the reference tracking signal and the interference suppression signal are weighted and fused to obtain a fused tracking signal;

[0068] In this embodiment, the reference tracking signal output from the integrated reference signal tracking channel is used. Interference suppression signal output by the interference suppression channel The two signals are then weighted and fused to generate a final fused tracking signal. ;

[0069] ;

[0070] in, and The weighting coefficients are preset and calibrated based on system operating conditions. Values ​​0.6 The value is 0.4; for the reference tracking signal Assigning higher weights ensures precise control while preserving interference suppression signals. The anti-interference characteristics are excellent; through weighted fusion, the problem of a single reference signal being susceptible to actual interference is avoided, and the defect of time delay error in a single actual signal is also solved, so that the output fused tracking signal has both target accuracy and actual anti-interference capability, providing a high-quality input signal for subsequent differential extraction.

[0071] Please see Figure 5 The five embodiments of the butterfly valve pressure control method in this invention include:

[0072] 501. Obtain the sampling period and solve for the velocity factor based on the rate of change of system pressure within the sampling period;

[0073] In this embodiment, the sampling period It serves as a unified time reference for signal acquisition and iterative computation in butterfly valve systems. The specific time can be calibrated based on the pressure response characteristics of the vacuum system, and its value directly determines the time resolution of the differential extraction; sampling period. Too small a value will lead to computational redundancy, while too large a value will result in the loss of dynamic details of the signal. Therefore, it is necessary to ensure the sampling period. Matching the system response speed is a prerequisite for achieving high-precision differentiation;

[0074] With sampling period For each time interval, the system pressure change rate within that period is calculated. Then, based on the change rate, the baseline velocity factor is adaptively adjusted to obtain a velocity factor suitable for the current operating conditions. Velocity factor It is used to control the speed of the transition process of the fused tracking signal because it is generated based on the system pressure change rate and can adapt to the dynamic changes in system pressure.

[0075] 502. Introduce the velocity factor into a preset nonlinear function, and establish a mapping relationship between the fused tracking signal and the differential signal based on the nonlinear function and the sampling period;

[0076] 503. Perform iterative operations on the mapping relationship to obtain the differential signal;

[0077] In this embodiment, the velocity factor obtained in step 501 is first... Sampling period Introducing the nonlinear fhan function, its expression is as follows:

[0078] ;

[0079] in, , , , and The intermediate variable used in the calculation is only used for algebraic operations and has no actual physical meaning. It is a temporary value in the calculation process of the nonlinear fhan function; y is the measured value of the cavity air pressure. and It is a nonlinear factor;

[0080] Subsequently, based on the nonlinear fhan function, combined with a preset filter factor... Constructing fused tracking signals and differential signal The mapping relationship between them:

[0081] ;

[0082] ;

[0083] Where, formula It reflects the fusion of tracking signals and differential signal Dynamic tracking relationship between them The update volume is from The product of the sampling period determines the accuracy of the results. Follow Synchronous changes;

[0084] Mode This reflects the nonlinear correction logic:

[0085] Input items It is the tracking deviation, used for feedback and fusion of tracking signals. With the target pressure setpoint The degree of deviation;

[0086] velocity factor Determine the correction strength; The larger the value, the greater the correction amount output by the fhan function. The more sensitive the response, the stronger the ability to track changes in pressure; in any case, The smaller the value, the smoother the correction, which can effectively suppress noise;

[0087] The Fhan function fuses the bias, differential signal, and parameters, outputting a nonlinear correction value to drive... Approximating the true differential;

[0088] When solving iteratively, first assume and The iterative initial value is used to ensure that the initial state is aligned with the target pressure setpoint; then, with the sampling period as the step size, the first formula is used to calculate... Then the newly obtained With the present Substitute into the second formula and calculate. This completes one closed-loop iteration.

[0089] Repeated iterations to achieve and Dynamic coupling optimization; finally, when the difference between the differential signals obtained from two consecutive iterations meets the preset convergence criterion, a decision is made. It has converged to a stable value, and this value is output as the differential signal.

[0090] Please see Figure 6 The six embodiments of the butterfly valve pressure control method in this invention include:

[0091] 601. Using the sampling period as the time interval, calculate the pressure change rate of the butterfly valve system based on the actual pressure signal of the butterfly valve;

[0092] In this embodiment, the target pressure setpoint output by the host computer is obtained. and the interference suppression signal output by the interference suppression channel. Then the pressure deviation was calculated. and with sampling period The system pressure change rate was calculated over a time interval. ( Values ).

[0093] 602. Adaptively adjust the preset reference velocity factor based on the pressure change rate to obtain the velocity factor;

[0094] In this embodiment, the velocity factor The adaptive adjustment formula is:

[0095] ;

[0096] in, and The dimensionless adjustment coefficient (in this embodiment, it is taken as...) =0.5); The reference speed factor is calibrated based on system operating conditions; It is a hyperbolic tangent function, which is used to achieve a smooth transition of the velocity factor;

[0097] In specific calculations, when When the pressure change rate is >1.2 kPa / ms, the rate of pressure change is relatively large. Approaching 1, at this point , making =1.5 The speed factor is increased to 1.5 times the baseline value to improve the differential tracking speed to adapt to rapid pressure changes;

[0098] when When the pressure change rate is <0.3 kPa / ms, the pressure change rate is relatively small. Approaching 0, at this point , making The velocity factor is automatically reduced to 0.5 times the reference value, and the tracking speed is reduced to prioritize noise suppression;

[0099] In this embodiment, by coupling the hyperbolic tangent function with the pressure change rate, the smooth and continuous adaptive adjustment of the velocity factor is achieved, avoiding the fluctuation of the differential signal caused by parameter mutation, and enabling the velocity factor to match different pressure change conditions.

[0100] Please see Figure 7 The seven embodiments of the butterfly valve pressure control method in this invention include:

[0101] 701. Estimate the operating status and disturbances of the butterfly valve system to obtain the system status and total system disturbance;

[0102] In this embodiment, the Extended State Observer (ESO) is used to simultaneously estimate the system operating state and total disturbance. The Extended State Observer can unify the internal uncertainties of the butterfly valve system (such as unmodeled dynamics such as changes in valve stem friction and attenuation of sealing characteristics) and external disturbances (such as fluctuations in medium flow and changes in gas source pressure) as the "total system disturbance," and include this total disturbance as a new extended state, which is included in the observation range along with the original operating state of the system (such as actual pressure and pressure change rate). During the observation process, the actual pressure feedback signal of the butterfly valve and the previously generated fusion tracking signal are used as inputs. The observation deviation is corrected in real time through a nonlinear state feedback adjustment mechanism, and finally the system state and the total system disturbance are output synchronously. The system state approximates the actual operating state of the butterfly valve (current actual pressure and pressure dynamic change trend), while the total system disturbance comprehensively covers the combined impact of various internal and external disturbances on the system.

[0103] 702. Calculate the deviation between the fused tracking signal, the differential signal, and the system state, and generate a basic control quantity based on the deviation;

[0104] In this embodiment, the static deviation between the fused tracking signal and the system state estimate is first calculated. This deviation reflects the degree of steady-state deviation between the current actual system state and the target tracking signal. On the other hand, the dynamic deviation between the differential signal and the system state change rate estimate is calculated. This deviation reflects the difference between the system dynamic response speed and the target response speed. Subsequently, a nonlinear state error feedback (NLSEF) strategy is used to fuse the above two deviations to obtain the basic control quantity.

[0105] Compared to traditional linear feedback, nonlinear state error feedback introduces nonlinear functions (such as power combination of errors, piecewise nonlinear adjustment) to dynamically adjust the feedback strength according to the magnitude of the deviation (increasing the feedback gain to speed up the response when the deviation is large, and weakening the feedback gain to suppress overshoot when the deviation is small), ultimately generating a basic control quantity that balances fast response and stable control.

[0106] 703. Subtract the total system disturbance from the basic control quantity to generate the butterfly valve control signal;

[0107] In this embodiment, based on the estimated total system disturbance value obtained in step 701, the total system disturbance is deducted from the basic control quantity generated in step 702 as feedforward compensation, thus obtaining the final butterfly valve control signal.

[0108] This step essentially involves proactively correcting control signals to counteract the negative impacts of various internal and external disturbances on the system. Unlike traditional control methods that rely on passive correction due to error accumulation, this approach can actively suppress disturbances before they significantly affect the system, thereby improving the system's robustness against disturbances.

[0109] The above describes the butterfly valve pressure control method in the embodiments of the present invention. The following describes the butterfly valve pressure control device in the embodiments of the present invention. Please refer to [link / reference]. Figure 8 One embodiment of the butterfly valve pressure control device in this invention includes:

[0110] The reference tracking module 801 is used to obtain the target pressure setpoint from the host computer and perform signal tracking processing on the target pressure setpoint to obtain a reference tracking signal.

[0111] The interference suppression module 802 is used to acquire the actual pressure signal from the butterfly valve system in real time and perform interference suppression processing on the actual pressure signal to obtain the interference suppression signal.

[0112] The signal fusion module 803 is used to fuse the reference tracking signal and the interference suppression signal to obtain a fused tracking signal;

[0113] The differential extraction module 804 is used to perform differential extraction on the fused tracking signal to obtain a differential signal;

[0114] The signal generation module 805 is used to estimate the system state of the butterfly valve system and to generate a butterfly valve control signal by comparing and calculating the fused tracking signal, the differential signal and the system state.

[0115] In this embodiment, firstly, the target pressure setpoint obtained by the reference tracking module 801 from the host computer is processed for signal tracking to predict the impact of system time delay on the target signal, providing an accurate reference for control. Secondly, the interference suppression module 802 performs interference suppression processing on the real-time collected actual pressure signal, filtering out measurement errors and external interference caused by time delay to ensure the authenticity of the pressure signal. Then, the signal fusion module 803 fuses the reference tracking signal and the interference suppression signal, integrating the advantages of the two types of signals to generate a fused tracking signal that combines timeliness and stability. Subsequently, the differential extraction module 804 performs differential extraction on the fused tracking signal to obtain a differential signal, providing dynamic characteristic support for subsequent control calculations. Finally, the signal generation module 805 combines the estimated system state and calculates the butterfly valve control signal by comparing the fused tracking signal, the differential signal, and the system state, realizing full-process compensation and dynamic correction of the time delay effect, significantly improving the response speed and control accuracy of the butterfly valve pressure control, and ensuring that the vacuum system can maintain a stable and reliable operating state under conditions with multiple time delays.

[0116] Figure 9 This is a schematic diagram of the structure of a butterfly valve pressure control device 900 provided in an embodiment of the present invention. The butterfly valve pressure control device 900 can vary significantly due to different configurations or performance characteristics. It may include one or more central processing units (CPUs) 910 (e.g., one or more processors) and a memory 920, and one or more storage media 930 (e.g., one or more mass storage devices) storing application programs 933 or data 932. The memory 920 and storage media 930 can be temporary or persistent storage. The program stored in the storage media 930 may include one or more modules (not shown in the diagram), each module including a series of instruction operations on the butterfly valve pressure control device 900. Furthermore, the processor 910 may be configured to communicate with the storage media 930 and execute the series of instruction operations in the storage media 930 on the butterfly valve pressure control device 900 to implement the steps of the butterfly valve pressure control method provided in the above-described method embodiments.

[0117] The butterfly valve pressure control device 900 may also include one or more power supplies 940, one or more wired or wireless network interfaces 950, one or more input / output interfaces 960, and / or one or more operating systems 931, such as Windows Server, Mac OS X, Unix, Linux, FreeBSD, etc. Those skilled in the art will understand that... Figure 9The illustrated butterfly valve pressure control device structure does not constitute a limitation on the butterfly valve pressure control device, and may include more or fewer components than illustrated, or combine certain components, or have different component arrangements.

[0118] The present invention also provides a computer-readable storage medium, which can be a non-volatile computer-readable storage medium or a volatile computer-readable storage medium, wherein the computer-readable storage medium stores instructions that, when executed on a computer, cause the computer to perform the steps of the butterfly valve pressure control method.

[0119] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working process of the system, device, or unit described above can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0120] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0121] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A butterfly valve pressure control method, characterized by, The butterfly valve pressure control method comprises the steps of: obtaining a target pressure set value from a host computer and performing signal tracking processing on the target pressure set value to obtain a reference tracking signal; real-time collection of an actual pressure signal from the butterfly valve system and interference suppression processing on the actual pressure signal to obtain an interference suppression signal; signal fusion of the reference tracking signal and the interference suppression signal to obtain a fused tracking signal; derivative extraction of the fused tracking signal to obtain a derivative signal; the derivative extraction of the fused tracking signal to obtain the derivative signal comprises: obtaining a sampling period and solving a velocity factor based on a system pressure change rate within the sampling period; introducing the velocity factor into a preset nonlinear function and establishing a mapping relationship between the fused tracking signal and the derivative signal based on the nonlinear function and the sampling period; iterative operation on the mapping relationship to solve the derivative signal; estimating the system state of the butterfly valve system and performing comparison calculation based on the fused tracking signal, the derivative signal and the system state to generate a butterfly valve control signal; the solving of the velocity factor based on the system pressure change rate within the sampling period comprises: taking the sampling period as a time interval, calculating the pressure change rate of the butterfly valve system based on the actual pressure signal of the butterfly valve; and adaptively adjusting a preset reference velocity factor based on the pressure change rate to obtain the velocity factor; The butterfly valve system pressure change rate is calculated based on the actual pressure signal of the butterfly valve with a sampling period as the time interval, which comprises obtaining the target pressure set value output by the upper computer , and the interference suppression signal output by the interference suppression channel ; then calculating the pressure deviation , and calculating the system pressure change rate with the sampling period as the time interval , and the value is ; The adaptive adjustment of the preset reference speed factor based on the pressure change rate to obtain the speed factor comprises: a speed factor The adaptive adjustment formula of the speed factor is: ； wherein, and is a dimensionless adjustment factor; is a reference speed factor; is a hyperbolic tangent function; the iterative operation on the mapping relationship to solve the derivative signal comprises: The velocity factor , the sampling period A non-linear fhan function is introduced, which is expressed as follows: ； wherein, , , , and are temporary values during the calculation process of the nonlinear fhan function; y is the measured value of the cavity gas pressure; and are nonlinear factors; Based on a nonlinear fhan function, a preset filter factor is combined , a mapping relationship between the fusion tracking signal and the differential signal is constructed, and the differential signal is obtained by iteratively solving the mapping relationship; the expression of the mapping relationship is as follows: ； 。 2. The butterfly valve pressure control method of claim 1, wherein, the obtaining of the target pressure set value from the host computer and the signal tracking processing on the target pressure set value to obtain the reference tracking signal comprises: obtaining a target pressure set value from a host computer and performing lead phase compensation on the target pressure set value to obtain a compensation signal; first-order low-pass filtering processing on the compensation signal to obtain the reference tracking signal.

3. The butterfly valve pressure control method of claim 1, wherein, the real-time collection of the actual pressure signal from the butterfly valve system and the interference suppression processing on the actual pressure signal to obtain the interference suppression signal comprises: real-time collection of an actual pressure signal from the butterfly valve system and calculation of a pressure change gradient of the actual pressure signal; interference detection on the pressure change gradient, and when interference is detected, time lag error correction is performed on the actual pressure signal based on the pressure change gradient to obtain a corrected pressure signal; generating an interference suppression signal based on the corrected pressure signal and a preset suppression coefficient.

4. The butterfly valve pressure control method of claim 1, wherein, the signal fusion of the reference tracking signal and the interference suppression signal to obtain the fused tracking signal comprises: based on a preset weighting coefficient, the reference tracking signal and the interference suppression signal are weighted and fused to obtain the fused tracking signal.

5. The butterfly valve pressure control method of claim 1, wherein, the estimation of the system state of the butterfly valve system and the comparison calculation based on the fused tracking signal, the derivative signal and the system state to generate the butterfly valve control signal comprises: estimating the running state and disturbance of the butterfly valve system to obtain the system state and the total system disturbance; calculating the deviation between the fused tracking signal, the derivative signal and the system state, and generating a basic control quantity based on the deviation; subtracting the total system disturbance from the basic control quantity to generate the butterfly valve control signal.

6. A butterfly valve pressure control apparatus characterized by, comprises: The reference tracking module is configured to acquire a target pressure set value from the host computer and perform signal tracking processing on the target pressure set value to obtain a reference tracking signal; The interference suppression module is configured to collect an actual pressure signal from the butterfly valve system in real time and perform interference suppression processing on the actual pressure signal to obtain an interference suppression signal; The signal fusion module is configured to perform signal fusion on the reference tracking signal and the interference suppression signal to obtain a fused tracking signal; The differential extraction module is configured to perform differential extraction on the fused tracking signal to obtain a differential signal; The differential extraction on the fused tracking signal to obtain the differential signal includes: acquiring a sampling period, and solving a velocity factor based on a system pressure change rate in the sampling period; introducing the velocity factor into a preset nonlinear function, and establishing a mapping relationship between the fused tracking signal and the differential signal based on the nonlinear function and the sampling period; and performing iterative operation on the mapping relationship to solve the differential signal; The signal generation module is configured to estimate a system state of the butterfly valve system, and perform comparison calculation based on the fused tracking signal, the differential signal, and the system state to generate a butterfly valve control signal; The solving of the velocity factor based on the system pressure change rate in the sampling period includes: taking the sampling period as a time interval, calculating a pressure change rate of the butterfly valve system based on an actual pressure signal of the butterfly valve; and performing adaptive adjustment on a preset reference velocity factor based on the pressure change rate to obtain the velocity factor; The butterfly valve system pressure change rate is calculated based on the actual pressure signal of the butterfly valve with a sampling period as the time interval, which comprises obtaining the target pressure set value output by the upper computer , and the interference suppression signal output by the interference suppression channel ; then calculating the pressure deviation , and calculating the system pressure change rate with the sampling period as the time interval , . The adaptive adjustment of the preset reference speed factor based on the pressure change rate to obtain the speed factor comprises: a speed factor The adaptive adjustment formula of the speed factor is: ； wherein, and is a dimensionless adjustment factor; is a reference speed factor; is a hyperbolic tangent function; The iterative operation on the mapping relationship to solve the differential signal includes: The velocity factor , the sampling period A non-linear fhan function is introduced, which is expressed as follows: ； wherein, , , , and are temporary values during the calculation of the non-linear fhan function; y is the measured value of the cavity gas pressure; and are non-linear factors; Based on a nonlinear fhan function, a preset filter factor is combined to construct a mapping relationship between a fusion tracking signal and a differential signal , and the differential signal is obtained by iteratively solving the mapping relationship; the expression of the mapping relationship is as follows: ； 。 7. A butterfly valve pressure control apparatus characterized by, The butterfly valve pressure control device includes a memory and at least one processor, and the memory stores instructions; At least one processor calls the instructions in the memory, so that the butterfly valve pressure control device performs each step of the butterfly valve pressure control method in any one of claims 1-5.

8. A computer-readable storage medium having stored thereon instructions, the computer-readable storage medium comprising: The instructions are executed by the processor to implement each step of the butterfly valve pressure control method in any one of claims 1-5.

Images