Diversified presentation method for equipment pictures in semiconductor equipment state monitoring system

By using SVG image templates and adjusting parameters, a variety of images for semiconductor equipment condition monitoring systems are dynamically generated, solving the problems of high generation cost and low efficiency in existing technologies, and realizing flexible and efficient image generation and equipment condition monitoring.

CN121353441APending Publication Date: 2026-01-16上海朋熙半导体股份有限公司
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Patent Information

Application Number
CN202511904376.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-12-17
Publication Date
2026-01-16

AI Technical Summary

Technical Problem

Existing technologies in semiconductor equipment condition monitoring systems employ costly and inefficient methods for generating equipment images, failing to flexibly and dynamically generate diverse images on demand.

Method used

Using an SVG image template and parameter adjustment method, the system receives image generation requests, parses the adjustment parameters, performs creation, update, or deletion operations, and converts the images into PNG or JPG format.

Benefits of technology

It significantly reduces labor costs, improves the efficiency and flexibility of image generation, and supports real-time dynamic updates of device status.

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Abstract

The invention relates to a diversified presentation method for equipment pictures in a semiconductor equipment state monitoring system, and belongs to the technical field of picture processing. In the prior art, picture generation depends on static prefabrication, so that the implementation cost is high and the efficiency is low. The method comprises the following steps: receiving a picture generation request, wherein the picture generation request comprises a template identifier and an adjustment parameter; loading an SVG picture template based on the identifier, wherein the template has an adjustable configuration item; analyzing a parameter identification operation instruction, such as creation, update or deletion; modifying template content according to the instruction; the modified SVG is converted into a PNG format or a JPG format; and finally returning the picture to the request end. According to the method, on-demand dynamic generation of the picture is realized, the manual workload is saved, and the flexibility and the efficiency are improved.
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Description

Technical Field

[0001] This invention belongs to the field of image processing technology, and in particular relates to a method for diversifying the presentation of equipment images in a semiconductor equipment condition monitoring system. Background Technology

[0002] In applications such as equipment condition monitoring systems in the semiconductor industry, images are used to visually represent the status or quantity of semiconductor manufacturing equipment and its components (such as cavities and wafer cassette loading ports). Furthermore, the status or quantity of these components frequently changes. Therefore, it is necessary to adjust the images based on the data, such as changing the background color of images of the equipment, cavities, or wafer cassette loading ports, or adding or removing elements from the images (such as cavities and wafer cassette loading ports).

[0003] There are roughly two common methods: Method 1 uses an exhaustive approach, such as exhaustively listing all combinations of the state and quantity of production equipment and its components, creating many images in advance, and then loading different images as needed during program execution. This method relies on manually preparing multiple images in advance, which increases workload and development costs, and is not flexible enough.

[0004] Method two employs a combination approach. For example, it involves preparing numerous images of equipment components (such as power distribution boxes, robotic arms, cavities, wafer loading ports, etc.) and piecing them together on a webpage to create a complete equipment appearance. These component images are then replaced or added as needed. However, this method requires preparing many component images in advance, and the workload of piecing together the complete equipment appearance is substantial, making it difficult to implement.

[0005] Therefore, existing technologies suffer from high implementation costs and low efficiency, and there is an urgent need for a solution that can dynamically generate images on demand. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to address the shortcomings of the prior art by providing a method, system, device and medium for diversified presentation of equipment images in a semiconductor equipment condition monitoring system. By adopting a method based on SVG image templates and parameter adjustment, dynamic and diversified presentation of images is achieved, which significantly saves labor costs and improves the efficiency and flexibility of image generation.

[0007] The first aspect of this invention discloses a method for diversifying the presentation of device images in a semiconductor device condition monitoring system, comprising the following steps: Step S101: Receive an image generation request from the requesting end. The image generation request includes an image template identifier and adjustment parameters. The image template identifier is used to obtain an SVG image template corresponding to the semiconductor device. The SVG image template includes at least one adjustable component. Each adjustable component is associated with a configuration item. The configuration item includes at least one of the following: id attribute, size information, coordinate information, color information, transparency information, rotation angle information, sorting information, or placeholder. The adjustment parameters include at least one operation instruction. The operation instruction includes at least one of the following: create, update, or delete. Step S102: Based on the image template identifier, load the corresponding SVG image template from the storage medium; Step S103: Analyze the adjustment parameters and identify the intent of the operation command; Step S104: Perform a content modification operation on the SVG image template according to the operation instruction; Step S105: Convert the modified SVG image into a target image format, wherein the target image format includes PNG or JPG format; Step S106: Return the converted image to the requesting client.

[0008] The above method, prior to step S101, also includes a step of preparing an SVG image template: Step S201: For entity objects in the business scenario, create SVG image templates. The SVG image templates are composed of multiple atomic shape groups to represent the appearance of the entity objects. Step S202: Add configuration items to the adjustable parts in the SVG image template. The configuration items are implemented through SVG attributes, including id attributes or other custom attributes. The values ​​of the configuration items are used to locate and modify the parts in subsequent content modification operations, wherein the content modification operations include at least one of creation, update or deletion.

[0009] The above method, specifically the method for constructing the adjustment parameters in step S101, includes: Step S301: Analyze business data and obtain the status information of entity objects; Step S302: Based on the status information, map the configuration items of the SVG image template to generate adjustment parameters in the form of key-value pairs, where the key represents the configuration item identifier and the value represents the content to be modified.

[0010] In the above method, step S104 involves performing a content modification operation on the SVG image template, including: When the operation instruction is to create, a new component or basic element is created at a specified position in the SVG image template. The attributes of the new component or basic element are specified by the operation instruction. The attributes include size, color, coordinates, or text content. The basic elements include text, circles, rectangles, or lines. When the operation instruction is to update, the attributes of existing components in the SVG image template are modified. The attributes include at least one of the following: visibility status, transparency value, background color, color, scaling, and rotation angle. When the operation instruction is delete, the specified component is removed from the SVG image template.

[0011] In the above method, when the operation instruction is "create", step S104 includes: When creating a new component, the necessary information is obtained from the configuration items of the SVG image template, including the position, size, rotation angle, color, and transparency of the template component and the new component. After creation, the new content is written in the original configuration item position. When creating a basic element, the relevant basic element is added at a specified position in the SVG image template through configuration options. The basic element serves as a watermark, component identifier, or status identifier.

[0012] In the above method, when the operation instruction is an update, step S104 includes: Update the overall content of the image, including the background color, background transparency, overall image visibility, and overall image transparency settings; Update the content of the device components in the image. Based on the configuration items, find the component in the image and other configuration items associated with this component, and make changes to the corresponding configuration items.

[0013] In the above method, when the operation instruction in step S104 is deletion, the relevant content of the SVG image template is deleted by specifying the component identifier list through parameters.

[0014] In the above method, the conversion operation in step S105 is performed by the server to output the SVG image as a PNG or JPG image.

[0015] The second aspect of this invention discloses a diversified image presentation system for a semiconductor device condition monitoring system, comprising: A receiving module is configured to receive an image generation request from a requesting end. The image generation request includes an image template identifier and adjustment parameters. The image template identifier is used to specify the acquisition of an SVG image template corresponding to a semiconductor device. The SVG image template includes at least one adjustable component, and each adjustable component is associated with a configuration item. The configuration item includes at least one of the following: id attribute, size information, coordinate information, color information, transparency information, rotation angle information, sorting information, or placeholder. The adjustment parameters include at least one operation instruction, which includes at least one of the following: create, update, or delete. A loading module is used to load the corresponding SVG image template from the storage medium based on the image template identifier; The parsing module is used to parse the adjustment parameters and identify the intent of the operation command; The modification module is used to perform content modification operations on the SVG image template according to the operation instructions; A conversion module is used to convert the modified SVG image into a target image format, including PNG or JPG format. The return module is used to return the converted image to the requesting client.

[0016] A third aspect of the present invention discloses an electronic device, comprising: a memory and a processor, wherein the processor and the memory are connected; The memory is used to store programs; The processor invokes a program stored in the memory to execute the method provided by the first aspect embodiment and / or any possible embodiment in combination with the first aspect embodiment.

[0017] The fourth aspect of the present invention discloses a computer-readable storage medium having a computer program stored thereon, the computer program being executed by a computer to perform the methods provided by the embodiments of the first aspect and / or any possible embodiments in combination with the embodiments of the first aspect.

[0018] Compared with existing technologies, this invention has the following advantages: By receiving image generation requests, which include image template identifiers and adjustment parameters, this invention enables fine-grained modification of adjustable components in SVG templates according to operation instructions (such as creation, update, or deletion), and output in formats such as PNG or JPG. This approach transforms static image processing into a parameter-driven dynamic process, allowing the same template to generate multiple state images on demand. This avoids the tedious work of manually pre-creating multiple images as in existing technologies, significantly saving labor costs and improving the efficiency and flexibility of image generation.

[0019] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0020] Figure 1 This is an overall flowchart of the method in Embodiment 1 of the present invention.

[0021] Figure 2 This is a swimlane diagram of the method in Embodiment 1 of the present invention.

[0022] Figure 3 This is an example of an SVG image template and the corresponding generated image effect.

[0023] Figure 4 This is a system module diagram of Embodiment 2 of the present invention. Detailed Implementation

[0024] Example 1 like Figure 1 As shown, a method for diverse presentation of device images in a semiconductor device condition monitoring system, the method being executed by an image processing program running on a server, includes the following steps: Step S101: Receive an image generation request from the requesting end. The image generation request includes an image template identifier and adjustment parameters. The image template identifier is used to obtain an SVG image template corresponding to the semiconductor device. The SVG image template includes at least one adjustable component. Each adjustable component is associated with a configuration item. The configuration item includes at least one of the following: id attribute, size information, coordinate information, color information, transparency information, rotation angle information, sorting information, or placeholder. The adjustment parameters include at least one operation instruction. The operation instruction includes at least one of the following: create, update, or delete. In practice, image generation requests are sent from the requesting end (such as an equipment status monitoring application) to the server-side image processing program via an API interface. The request includes an image template identifier and adjustment parameters. The image template identifier is a unique string specifying a predefined SVG image template; for example, CVD_EQP corresponds to a template for CVD equipment (CVD stands for Chemical Vapor Deposition, a semiconductor manufacturing process). The adjustment parameters are structured data (such as JSON format) including at least one operation instruction, such as create, update, or delete, each instruction associated with an adjustable component in the template. For example, an operation instruction might specify deleting certain components or updating component colors. After receiving the request, the server verifies the parameter format and stores it for later use. Components can be common elements in semiconductor equipment, such as loading ports, cavities, robotic arms, polishing heads, polishing pads, valves, mask stages, etc.

[0025] This step standardizes request reception, enabling the method to adapt to different business scenarios and improving flexibility and scalability. Parameterized requests reduce hard-coded dependencies, allowing image generation to occur on demand.

[0026] For example, in a CVD equipment status monitoring scenario, the requesting client sends an image generation request. The image template is identified as CVD_EQP, and the adjustment parameters are to delete the LP2, LP3, and LP4 loading port components, keeping only LP1. For instance, the adjustment parameters might be represented as key-value pairs, such as imageTemplate=CVD_EQP&remove=[LP2, LP3, LP4]. This allows the server to identify the specific template and operation that needs modification.

[0027] Step S102: Based on the image template identifier, load the corresponding SVG image template from the storage medium; During implementation, the server retrieves the corresponding SVG image template from storage media (such as a database or file system) based on the received image template identifier. An SVG template is a vector graphics file composed of multiple grouped atomic shapes (such as rectangles and circles) representing the appearance of a semiconductor device. Each adjustable part is identified in the template through configuration items (such as the `id` attribute), which include information such as size, coordinates, and color. The loading process involves reading the SVG file content, parsing its XML structure, and loading the template data into memory for modification. Figure 3 As shown, the SVG template may display a standard CVD equipment diagram, containing multiple loading port components.

[0028] This step ensures quick access to and consistency of templates, leveraging the vector nature of SVG to make images scalable without distortion, suitable for different display devices. Template standardization reduces redundant storage and improves resource utilization.

[0029] For example, for the image template identifier CVD_EQP, the server loads the CVD_EQP.svg file from the database. This template is as follows: Figure 3 As shown in the left figure, there are four loading port components: LP1, LP2, LP3, and LP4. Each component has configuration items such as ID, position, and color. After loading, the template data is parsed into operable objects.

[0030] Step S103: Analyze the adjustment parameters and identify the intent of the operation command; During implementation, the server parses and adjusts parameters, extracting operation instructions (such as create, update, or delete) and their associated details. The parsing process includes analyzing the parameter structure and identifying the keys (such as configuration item identifiers) and values ​​(such as modified content) in key-value pairs. For example, if the parameter specifies a delete operation, the parser will identify the list of parts to be removed; if it specifies an update operation, it will identify the attributes to be modified (such as color or transparency). After parsing, the server generates an internal instruction object, maps it to the template's configuration items, and ensures the instructions are executable. Figure 2 As shown, the parsing steps may involve parameter validation and intent mapping.

[0031] This step enables intelligent parameter parsing, allowing the method to accurately understand the request intent and reduce errors. Automated parsing improves processing efficiency and supports complex parameter combinations.

[0032] For example, in the CVD equipment example, if the parameter is set to remove=[LP2, LP3, LP4], the parser recognizes the operation command as deletion, intending to remove components LP2, LP3, and LP4. Meanwhile, if the parameters contain update commands such as: The parser will recognize that the background color of the LP1 component needs to be changed to red by setting BackgroundColor={"id":"LP1",backgroundColor:"red"}.

[0033] Step S104: Perform a content modification operation on the SVG image template according to the operation instruction; During implementation, based on the parsed operation instructions, the server performs content modification operations on the loaded SVG template. Modification operations include creating, updating, or deleting adjustable components within the template. Specifically, when the operation instruction is "create," the server adds a new component or basic element (such as text or a circle) at a specified location in the template; the attributes of the new element (such as size and color) are specified by parameters. When the operation instruction is "update," the server modifies the attributes of an existing component (such as visibility, transparency, and color). When the operation instruction is "delete," the server removes the specified component. Modifications are achieved by manipulating the SVG's XML structure; for example, by using the DOM API to find the element corresponding to a configuration item and modify its attributes. Figure 3 As shown, the modified template may change from a standard drawing to a customized drawing.

[0034] This step enables dynamic adjustment of image content, allowing the same template to generate diverse images and saving on manual pre-production costs. Fine-grained control over modification operations supports complex business needs, such as real-time updates when equipment status changes.

[0035] For example, in a CVD equipment scenario, after performing a delete operation to remove LP2, LP3, and LP4 components, the template only retains the LP1 loading port. Additionally, if the parameters include a creation operation, such as adding a text watermark, the server will create a text element at the specified location with the content "Loading Port," and its color and size will be set by the parameters. The modified template is as follows. Figure 3 The diagram on the right shows a simplified version of the equipment.

[0036] Step S105: Convert the modified SVG image into a target image format, wherein the target image format includes PNG or JPG format; During implementation, the modified SVG image remains in vector format. The server converts it to the target image format (such as PNG or JPG) to enhance compatibility. The conversion process uses a server-side image processing library (such as ImageMagick or a custom converter) to read the SVG content, render it as a bitmap, and output it in the specified format. During conversion, parameters such as resolution and quality can be set to ensure image clarity. For example, after converting SVG to PNG format, the image becomes rasterized, suitable for web display or printing.

[0037] This step ensures broad applicability of the images; PNG or JPG formats support most devices and services, increasing the method's usability. The conversion process is automated, reducing manual processing steps.

[0038] The server converts the modified SVG image of the CVD equipment to PNG format, outputting it as a bitmap image. For example, the image resolution is set to 300 dpi to ensure clear display in the monitoring interface.

[0039] Step S106: Return the converted image to the requesting client.

[0040] In practice, the server returns the converted image to the requesting client via an HTTP response or similar mechanism. The return process includes setting response headers (such as Content-Type to image / png) and transmitting the image data stream. The requesting client can then use the image directly or process it further. For example, a device status monitoring application might embed the image in the user interface to display the device's current status.

[0041] This step completes the entire image generation process, providing an end-to-end solution that enables the requesting end to obtain customized images in real time, improving response speed and user experience.

[0042] For example, in the CVD device example, after the server returns a PNG format image, the requesting end (such as a web application) displays it on the device status panel. The user can see a device diagram with only the LP1 loading port visible, such as... Figure 3 As shown in the figure on the right.

[0043] In one embodiment, prior to step S101, an SVG image template preparation step is also included: Step S201: For entity objects in the business scenario, create SVG image templates. The SVG image templates are composed of multiple atomic shape groups to represent the appearance of the entity objects. Step S202: Add configuration items to the adjustable parts in the SVG image template. The configuration items are implemented through SVG attributes, including id attributes or other custom attributes. The values ​​of the configuration items are used to locate and modify the parts in subsequent content modification operations, wherein the content modification operations include at least one of creation, update or deletion.

[0044] When implementing, such as Figure 1 As shown, the preparation step is the pretreatment stage of the overall process.

[0045] First, analyze the equipment's external features, such as cavities, loading ports, robotic arms, polishing heads, polishing pads, valves, and mask stands. Then, use vector graphics tools (such as Adobe Illustrator or Inkscape) to create an SVG template. The template consists of multiple groups of atomic shapes; for example, rectangles represent cavities, and circles represent loading ports. These shapes are represented by SVG grouping elements (such as...). <g>(Labels) organize and represent the overall appearance of the equipment. During production, ensure the template structure is clear and each component is independently identifiable. For example... Figure 3 As shown in the left figure, the CVD_EQP template contains four loading port parts (LP1 to LP4), each part being a group containing a basic shape.

[0046] Atomic shapes are the basic building blocks of SVG image templates. They refer to the primitive geometric elements in SVG vector graphics, such as rectangles, circles, ellipses, lines, polygons, or text. These shapes are the smallest units that constitute complex graphics. When creating SVG templates, by combining and grouping these atomic shapes, the appearance of solid objects can be precisely represented. For example, in a semiconductor device template, atomic shapes might include rectangles to represent device cavities, circles to represent connection ports, lines to represent wires, and text to represent labels. Each atomic shape is defined in SVG using XML elements, such as... <rect>Used for rectangles, <circle>For circles, they have settable properties such as position, size, color, and transparency.

[0047] In step S201, when creating the SVG image template, the appearance structure of the entity object (such as CVD semiconductor equipment) in the business scenario is first decomposed, and then the components are drawn one by one using atomic shapes. For example, as Figure 3 As shown in the left image, the template for a CVD device may consist of multiple groups of atomic shapes: rectangular atomic shapes represent the cavity body, circular atomic shapes represent the loading port, and line atomic shapes represent pipe connections. These atomic shapes are grouped using SVG elements (such as...). <g>The tags are organized together to form higher-level components, such as a loading port component can be composed of a circle and text atom shapes. After grouping, each component can be managed as a whole, facilitating the addition of configuration items later.

[0048] The use of atom shapes makes the template highly modular and adjustable. By constructing the template with atom shapes, the vector nature of the picture is ensured, which can be scaled losslessly to adapt to different display sizes while supporting dynamic modification. For example, in the CVD equipment scenario, the flexibility of atom shapes allows easy addition, deletion, or modification of specific components without the need to redraw the entire picture, thereby improving preparation efficiency and reusability. This atom shape-based approach lays a solid foundation for subsequent dynamic content modification, enabling the template to flexibly adapt to diverse business needs.

[0049] By editing the properties of the SVG file, custom properties such as id attributes or other attributes (e.g., data-config) are added to each adjustable component. The values of the configuration items include size information (e.g., width and height), coordinate information (e.g., x and y), color information (e.g., fill), transparency information (e.g., opacity), rotation angle information (e.g., transform), etc. For example, the loading port component LP1 is added with id="LP1" and its coordinate and color properties are set. These configuration items are implemented through the XML structure of SVG, enabling quick positioning and modification of components through property values in subsequent operations. After adding the configuration items, the template is stored in the server-side database or file system for subsequent calls.

[0050] The preparation step makes the template extensible and reusable, reducing repetitive design work. By standardizing the configuration items, subsequent modification operations can accurately locate components, improving the accuracy and efficiency of dynamic generation. In the CVD equipment scenario, when preparing the CVD_EQP template, id attributes are added to each loading port component, such as LP1, LP2, etc., and their default coordinates and colors are set. In this way, when the business needs to adjust the number of loading ports, configuration items can be directly referenced without the need to redraw the template.

[0051] In one embodiment, the construction method of the adjustment parameter in step S101 includes: Step S301: Analyze the business data to obtain the state information of the entity object; Step S302: Based on the state information, map to the configuration items of the SVG picture template to generate adjustment parameters in the form of key-value pairs, where the key represents the configuration item identifier and the value represents the modification content.

[0052] During implementation, the server retrieves data in real time from the business system (such as an equipment monitoring database), including the operating status, configuration changes, or environmental parameters of the CVD equipment. The data is provided in JSON or XML format and includes fields such as equipment ID, status code, or component quantity. For example, for a CVD equipment, business data might indicate that only loading port LP1 is currently installed, while LP2, LP3, and LP4 are not yet installed due to cost and capacity considerations.

[0053] The server uses mapping rules to map business data fields to configuration item identifiers in the template. For example, if the business data indicates that LP2, LP3, and LP4 are not yet assembled, the mapping rule generates a delete operation instruction with the configuration item identifier as the key (e.g., "remove") and the component list ["LP2", "LP3", "LP4"]. Adjustment parameters are assembled in a structured format (e.g., JSON), such as {"imageTemplate": "CVD_EQP", "operations": [{"action": "remove", "ids":["LP2", "LP3", "LP4"]}]}. The mapping process can be implemented through configuration tables or a rule engine, ensuring flexibility and maintainability.

[0054] This construction method enables data-driven parameter generation, reducing manual intervention and increasing automation. Through intelligent mapping, parameter adjustments accurately reflect business needs, allowing image generation to respond to changes in real time. For example, in a CVD equipment scenario, if business data returns the equipment status as "LP1 only installed," the server automatically generates adjustment parameters, including instructions to delete LP2, LP3, and LP4. In this way, the requesting end only needs to send business data, without needing to concern itself with parameter details, simplifying the integration process.

[0055] In one embodiment, step S104 performs a content modification operation on the SVG image template, including: When the operation instruction is to create, a new component or basic element is created at a specified position in the SVG image template. The attributes of the new component or basic element are specified by the operation instruction. The attributes include size, color, coordinates, or text content. The basic elements include text, circles, rectangles, or lines. When the operation instruction is to update, the attributes of existing components in the SVG image template are modified. The attributes include at least one of the following: visibility status, transparency value, background color, color, scaling, and rotation angle. When the operation instruction is delete, the specified component is removed from the SVG image template.

[0056] When implementing, such as Figure 2 As shown, the modification operation is the core processing step.

[0057] When the action instruction is "create," the server creates a new widget or basic element at a specified location in the SVG template. The new widget's attributes are specified by the action instruction, such as size, color, coordinates, or text content. Basic elements include native SVG elements such as text, circles, rectangles, or lines. The creation process involves parsing the action instruction, locating the target position in the template (e.g., using configuration coordinates), and then adding the new element using SVG DOM manipulation. For example, to add a text element as a status indicator, the server sets its text content, font size, and color attributes.

[0058] When the operation command is an update, the server modifies the attributes of existing components, such as visibility (via the `display` attribute), opacity (via the `opacity` attribute), background color (via the `fill` attribute), color, scaling (via the `transform` attribute), or rotation angle. The update process is achieved by finding the corresponding SVG element for the configuration item and modifying its attribute values. For example, when changing the color of a component, the server directly updates the `fill` attribute value.

[0059] When the action command is "delete," the server removes the specified component from the SVG template. Using the component identifier list provided by the action command, the server locates the elements of these components in the SVG and then removes them using a DOM deletion method (such as `removeChild`). After deletion, the template structure is automatically adjusted to ensure the remaining components are displayed correctly.

[0060] These refined operations provide comprehensive image modification capabilities, supporting complex business scenarios such as dynamic adjustments when equipment status changes. The create operation allows for expanding image content, the update operation supports fine-grained customization, and the delete operation simplifies image simplification requirements. For example, in a CVD equipment scenario, if adjusting parameters includes adding a watermark text in the create operation, changing the color of LP1 to red in the update operation, and removing LP2, LP3, and LP4 in the delete operation, the server will execute these operations sequentially. After modification, the template will look like this: Figure 3 As shown in the right figure, only LP1 is displayed with a custom watermark, which meets the presentation requirements of different factory environments.

[0061] In one embodiment, step S104, when the operation instruction is "create", includes: When creating a new component, the necessary information is obtained from the configuration items of the SVG image template, including the position, size, rotation angle, color, and transparency of the template component and the new component. After creation, the new content is written in the original configuration item position. When creating a basic element, the relevant basic element is added at a specified position in the SVG image template through configuration options. The basic element serves as a watermark, component identifier, or status identifier.

[0062] During implementation, when creating a new component, the server retrieves necessary information from the SVG image template's configuration items, such as the template component's position, size, rotation angle, color, and transparency. This information serves as a reference for creating similar new components. The creation process involves copying or generating new elements based on the template component, and then adjusting attributes according to operational instructions. For example, when creating a new loading port component, the server retrieves the default size and color from the existing loading port configuration items, and then creates a similar component in the new location. After creation, the new content is written to the original configuration item locations, updating the template's configuration item list.

[0063] When basic elements are created, the server adds them, such as text, circles, rectangles, or lines, at specified locations in the SVG template via configuration options. The attributes of the basic elements are specified by operation instructions, such as the value, color, and font-size of a text element. During creation, the server locates the target position (e.g., via coordinate configuration options) and then adds the element as a watermark, part identifier, or status indicator. For example, the text element "Loading Port" is added above the device diagram as an identifier.

[0064] This refinement makes the creation process more flexible and practical, supporting component reuse and the addition of basic elements, and enhancing the information carrying capacity of images. By utilizing template configuration items, the creation process maintains consistency and accuracy. For example, in a CVD equipment scenario, if the business requires adding a new loading port LP5, the server obtains the size and color information of LP1 from the template configuration items and then creates the LP5 component at the specified location. Simultaneously, a text element "Added" is added as a status indicator. In this way, the image can dynamically reflect the device expansion without modifying the original template.

[0065] In one embodiment, step S104, when the operation instruction is an update, includes: Update the overall content of the image, including the background color, background transparency, overall image visibility, and overall image transparency settings; Update the content of the device components in the image. Based on the configuration items, find the component in the image and other configuration items associated with this component, and make changes to the corresponding configuration items.

[0066] Implementation includes updating both the overall content of the images and the content of the device components.

[0067] To update the overall content of an image, the server modifies global attributes of the SVG template, such as background color (by modifying the root element's `fill` attribute), background opacity (via the `opacity` attribute), overall image visibility (via the `visibility` attribute), or overall image transparency. The update process is achieved by manipulating the top-level element of the SVG, affecting the overall visual appearance of the image. For example, setting the overall transparency to 50% makes the image appear semi-transparent.

[0068] When updating the content of device components in an image, the server locates the specific component and its associated configuration items based on the configuration settings, and then modifies the corresponding attributes. For example, when updating the visibility of a component, the server finds the component element and sets its display property to "none" or "block"; when updating the color, it modifies the fill property; and when updating the rotation angle, it adjusts the transform property. After modification, the server replaces the original configuration item values ​​to ensure the changes are persistent.

[0069] The above operations support both global and partial updates, allowing images to adapt to different display environments or business needs. Global updates simplify batch adjustments, while component updates enable precise control. For example, in a CVD equipment scenario, if adjusting parameters includes updating the overall background color to light gray and updating the LP1 component's color to red to indicate an abnormal state, the server will first modify the template root element's background, and then locate the LP1 component and change its color. Figure 3 As shown in the right image, the modified image background is grayed out, and LP1 is highlighted, improving the intuitiveness of status monitoring.

[0070] In one embodiment, when the operation instruction in step S104 is deletion, the relevant content of the SVG image template is deleted by specifying the component identifier list through parameters.

[0071] During implementation, the server parses the list of component identifiers in the operation instructions; these identifiers correspond to the `id` attribute of configuration items in the SVG template. Then, the server traverses the template structure, locates the elements corresponding to these identifiers, and removes them using SVG DOM manipulation methods. The deletion process ensures that other components are not affected; for example, the position or attributes of sibling elements are automatically adjusted after a component is removed. Parameters are provided as a list, supporting batch deletion for improved efficiency. For example, a deletion operation instruction might specify `["LP2","LP3", "LP4"]`, and the server will locate and delete these components sequentially.

[0072] By simplifying deletion operations, multiple components can be processed quickly, reducing duplicate requests. Parameterized lists provide flexible and easy-to-maintain operations. For example, in a CVD equipment scenario, when the business requires hiding redundant loading ports, parameters can be adjusted to specify the deletion of LP2, LP3, and LP4. The server directly removes these components, generating a simplified equipment diagram. Figure 3 As shown in the image on the right, the image after deletion only displays the necessary parts, reducing visual clutter.

[0073] In one embodiment, the conversion operation in step S105 outputs the SVG image as a PNG or JPG image through server-side processing.

[0074] During implementation, the server uses image processing libraries (such as ImageMagick, Cairo, or a custom renderer) to convert the modified SVG image into a bitmap format. The conversion process involves reading the SVG content, parsing the vector graphics, and then rendering it as a raster image at a specified resolution. For example, when converting to PNG, the server sets parameters such as anti-aliasing and compression quality; when converting to JPG, the compression ratio can be adjusted to balance file size and clarity. The conversion is completed on the server side without the need for client-side intervention, ensuring processing efficiency.

[0075] The above operations ensure broad image compatibility, with PNG and JPG formats supporting web, mobile, and print scenarios, improving the method's practicality. Server-side processing reduces the burden on the client and enables centralized management. For example, in a CVD equipment scenario, a modified SVG image can be converted to PNG format and output as a high-resolution image, which can be directly embedded into the monitoring interface on the requesting end. After conversion, the image remains clear and does not lose quality even when scaled, meeting the display requirements of different devices.

[0076] Example 2 like Figure 4 As shown, a diversified image display system for semiconductor equipment condition monitoring includes: A receiving module is configured to receive an image generation request from a requesting end. The image generation request includes an image template identifier and adjustment parameters. The image template identifier is used to specify the acquisition of an SVG image template corresponding to a semiconductor device. The SVG image template includes at least one adjustable component, and each adjustable component is associated with a configuration item. The configuration item includes at least one of the following: id attribute, size information, coordinate information, color information, transparency information, rotation angle information, sorting information, or placeholder. The adjustment parameters include at least one operation instruction, which includes at least one of the following: create, update, or delete. A loading module is used to load the corresponding SVG image template from the storage medium based on the image template identifier; The parsing module is used to parse the adjustment parameters and identify the intent of the operation command; The modification module is used to perform content modification operations on the SVG image template according to the operation instructions; A conversion module is used to convert the modified SVG image into a target image format, including PNG or JPG format. The return module is used to return the converted image to the requesting client.

[0077] The semiconductor device condition monitoring system provided in this embodiment is a diversified display system for device images. Its implementation principle and the resulting technical effects are the same as those in the method embodiment in Embodiment 1. For the sake of brevity, any parts not mentioned in the system embodiment can be referred to the corresponding content in Embodiment 1.

[0078] Example 3 A computer-readable storage medium having a computer program stored thereon, the computer program being executed by a computer to perform a method for diverse presentation of device images in a semiconductor device condition monitoring system as described in Embodiment 1 above.

[0079] Example 4 An electronic device includes: a memory and a processor, wherein the processor and the memory are connected; The memory is used to store programs; The processor calls a program stored in the memory to execute a method for diverse presentation of device images in a semiconductor device condition monitoring system as described in Embodiment 1.

[0080] It should be noted that the electronic device mentioned may be, but is not limited to, personal computers (PCs), tablet computers, mobile internet devices (MIDs), etc.

[0081] It should be noted that processors, memory, and other components that may be present in electronic devices are electrically connected to each other, directly or indirectly, to enable data transmission or interaction. For example, processors, memory, and other components may be electrically connected to each other via one or more communication buses or signal lines.

[0082] It should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0083] In the several embodiments provided in this application, it should be understood that the disclosed systems and methods can also be implemented in other ways. The system embodiments described above are merely illustrative. For example, the flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions marked in the blocks may occur in a different order than those marked in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in a block diagram and / or flowchart, and combinations of blocks in block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.

[0084] In addition, the functional modules in the various embodiments of this application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0085] If the aforementioned functions are implemented as software functional modules and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, laptop, server, mobile phone, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0086] The above description is merely a preferred embodiment of the present invention and does not constitute any limitation on the present invention. Any simple modifications, alterations, or equivalent structural changes made to the above embodiments based on the technical essence of the present invention shall still fall within the protection scope of the present invention.< / g> < / circle> < / rect> < / g>

Claims

1. A method of diversified presentation of device pictures in a semiconductor device state monitoring system, characterized by, The method comprises the following steps: Step S101: receiving a picture generation request from a request end, the picture generation request comprising a picture template identifier and an adjustment parameter, wherein the picture template identifier is used to obtain an SVG picture template corresponding to a semiconductor device, the SVG picture template containing at least one adjustable component, each adjustable component being associated with a configuration item, the configuration item comprising at least one of an id attribute, size information, coordinate information, color information, transparency information, rotation angle information, sorting information or a placeholder, and the adjustment parameter comprising at least one operation instruction, the operation instruction comprising at least one of creation, update or deletion; Step S102: loading a corresponding SVG picture template from a storage medium based on the picture template identifier; Step S103: analyzing the adjustment parameter to identify the intention of the operation instruction; Step S104: performing a content modification operation on the SVG picture template according to the operation instruction; Step S105: converting the modified SVG picture into a target picture format, the target picture format comprising a PNG format or a JPG format; Step S106: returning the converted picture to the request end.

2. The method of claim 1, wherein, Before step S101, a preparation step of an SVG picture template is further included: Step S201: making an SVG picture template for an entity object in a business scenario, the SVG picture template being composed of a plurality of atomic shape groups and representing the appearance of the entity object; Step S202: adding a configuration item to an adjustable component in the SVG picture template, the configuration item being implemented through an SVG attribute and comprising an id attribute or other custom attributes, the value of the configuration item being used to locate and modify the component in a subsequent content modification operation, wherein the content modification operation comprises at least one of creation, update or deletion.

3. The method of claim 1, wherein, The construction method of the adjustment parameter in step S101 comprises: Step S301: analyzing business data to obtain state information of an entity object; Step S302: mapping the state information to a configuration item of the SVG picture template to generate an adjustment parameter in the form of a key-value pair, wherein the key represents the configuration item identifier and the value represents the modification content.

4. The method of claim 1, wherein, The content modification operation performed on the SVG picture template in step S104 comprises: When the operation instruction is creation, a new component or basic element is created at a specified position of the SVG picture template, the attributes of the new component or basic element being specified by the operation instruction, the attributes comprising size, color, coordinate or text content, wherein the basic element comprises text, circle, rectangle or line; When the operation instruction is update, the attributes of an existing component in the SVG picture template are modified, the attributes comprising at least one of a display state, a transparency value, a background color, a color, a zoom, a rotation angle; When the operation instruction is deletion, a specified component is removed from the SVG picture template.

5. The method of claim 4, wherein, When the operation instruction is creation in step S104, it comprises: When a new component is created, the required information is obtained from the configuration item of the SVG picture template, including the position, size, rotation angle, color, and transparency of the template component and the new component, and the new content is written in the original configuration item position after creation; When a basic element is created, the related basic element is added at the specified position of the SVG picture template through the configuration item, and the basic element serves as a watermark, component identifier, or state identifier.

6. The method of claim 4, wherein, In step S104, when the operation instruction is update, the following is included: Update of the overall content of the picture, including the background color, background transparency, overall picture visibility, and overall picture transparency of the picture; Update of the content of the device component in the picture, find the component and other configuration item information associated with the component in the picture according to the configuration item, and change the corresponding configuration item.

7. The method of claim 4, wherein, In step S104, when the operation instruction is delete, the related content of the SVG picture template is deleted through the parameter specified component identifier list.

8. A system for diversified presentation of device pictures in a semiconductor device state monitoring system, characterized by includes: a receiving module configured to receive a picture generation request from a request end, the picture generation request including a picture template identifier and adjustment parameters, wherein the picture template identifier is used to specify an SVG picture template corresponding to a semiconductor device, the SVG picture template including at least one adjustable component, each adjustable component being associated with a configuration item, the configuration item including at least one of an id attribute, size information, coordinate information, color information, transparency information, rotation angle information, sorting information, or a placeholder, and the adjustment parameters including at least one operation instruction, the operation instruction including at least one of creation, update, or deletion; a loading module configured to load a corresponding SVG picture template from a storage medium based on the picture template identifier; a parsing module configured to parse the adjustment parameters and identify the intention of the operation instruction; a modification module configured to perform a content modification operation on the SVG picture template according to the operation instruction; a conversion module configured to convert the modified SVG picture into a target picture format, the target picture format including a PNG format or a JPG format; a returning module configured to return the converted picture to the request end.

9. An electronic device, comprising: includes: a memory and a processor, the processor and the memory being connected; the memory is configured to store a program; the processor invokes the program stored in the memory to execute the method of any one of claims 1-7.

10. A computer-readable storage medium, characterized in that, a computer program is stored thereon, and the computer program is executed by a computer to perform the method of any one of claims 1-7.

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