Target material backboard installation structure not prone to deformation

Abstract

The invention belongs to the field of display screen production, and particularly relates to a non-deformable target material and back plate mounting structure which comprises a plurality of long-strip-shaped back plates, one face of each long-strip-shaped back plate is used for mounting a target material, the other face of each long-strip-shaped back plate is used for fixing, a plurality of step-shaped notches are formed in the two long edge sides of the back plate fixing face, and the back plates are sequentially arranged at intervals. The long-strip-shaped supporting plates are perpendicular to the back plate, and the supporting plates are correspondingly arranged on the two long edge sides of the back plate fixing face; the connecting blocks are used for connecting the two adjacent supporting plates corresponding to the two adjacent back plates; the cushion block is arranged on the connecting block and faces the back plate surface; the positioning block corresponds to the step surface of the notch, supports the back plate and is connected with the cushion block; the frame body is used for framing the back plate and the supporting plate, and the two ends of the back plate and the two ends of the supporting plate are detachably connected with the frame body. The supporting strength is guaranteed, heat dissipation of the target material is not affected, and mounting, positioning and dismounting are very convenient. The deformation problem of the target material and the back plate can be effectively solved.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of display screen production, and particularly relates to a target material backboard mounting structure not prone to deformation. BACKGROUND

[0002] In the high-end manufacturing field of display panels, semiconductors and the like, with the product size continuously developing in the direction of large specifications, the application demand of G8.5 and above target materials is increasing. As key coating materials, the performance stability of such target materials directly affects the quality and yield of downstream products.

[0003] G8.5 and above target materials have a significant technical feature in the preparation and subsequent processing flow, that is, the key processing link (BP) takes a long time. This long processing cycle is due to the characteristics of the large size and relatively complex structure of the target material itself, which requires more time for related processes to ensure the uniformity and consistency of the material.

[0004] However, the long BP process brings the problem of easy deformation to the target material. In the long processing process, the target material is continuously affected by changes in environmental temperature and pressure, and the internal stress of the material is also difficult to release in time. In addition, the overall size of G8.5 and above target materials is relatively large, and the support stability of the structure itself is relatively weak. Under the continuous external action and internal stress action, it is easy to appear deformation phenomena such as warping and depression.

[0005] The deformation of the target material will cause a series of adverse effects on subsequent production. On the one hand, the deformed target material cannot be accurately matched with the coating equipment, resulting in uneven film thickness in the coating process, affecting the optical and electrical properties of the product, and thus reducing the product yield. On the other hand, severe deformation may even cause the target material to be unable to be normally installed and used, causing material waste and increasing production cost. At the same time, the deformed target material may also be broken due to unstable structure during transportation and handling, further aggravating production loss.

[0006] At present, the industry has taken some preliminary measures to address the problem of easy deformation of G8.5 and above target materials due to long BP, such as optimizing the process environmental temperature and increasing the temporary fixing structure. However, these methods are mostly at the relief level and are difficult to fundamentally solve the problem. Either they will have potential impact on the microstructure and performance of the target material, or they will increase the process complexity and production cycle, and cannot balance the technical effect and production efficiency. Therefore, solving the problem of easy deformation of G8.5 and above target materials due to long BP has become a technical bottleneck that needs to be broken through in the industry. SUMMARY

[0007] The target material backboard mounting structure not prone to deformation provided by the application can effectively solve the problems in the background art.

[0008] The application provides a target back plate mounting structure which is not easy to deform.

[0009] One surface is used for mounting the target material and the other surface is used for fixing the long strip-shaped back plate, the two long edges of the back plate fixing surface are provided with a plurality of stepped openings, the back plate is provided with a plurality of openings and is sequentially and spacedly arranged;

[0010] The long strip-shaped support plate is arranged perpendicularly to the back plate, and the two long edges of the back plate fixing surface are both provided with the support plate correspondingly;

[0011] The connecting block connects the two adjacent support plates corresponding to the two adjacent back plates, and the surface of the connecting block facing the back plate is provided with a threaded hole;

[0012] The spacer is arranged on the surface of the connecting block facing the back plate, the spacer is made of resin material, the spacer is provided with a countersunk hole corresponding to the threaded hole, the spacer is fixed on the connecting block through the threaded connection of the countersunk hole and the threaded hole, the surface of the spacer in contact with the connecting block is provided with a prismatic groove, the bottom of the groove is provided with a circular hole, and the groove is provided with a nut which is limited to rotate and move in the groove;

[0013] The positioning block corresponds to the stepped surface of the opening and supports the back plate, and the positioning block is fixed on the spacer through the threaded connection of the bolt penetrating through the positioning block and the circular hole;

[0014] In addition, the frame body frames the back plate and the support plate, and the two ends of the back plate and the support plate are detachably connected with the frame body.

[0015] As a further optimization of the application, the openings on the two long edges of the back plate are oppositely arranged.

[0016] As a further optimization of the application, the plurality of back plates are arranged in an array.

[0017] As a further optimization of the application, the connecting block is in a U-shaped structure, and the two ends of the U-shaped connecting block are respectively directed to the directions of the two openings of the adjacent back plate.

[0018] As a further optimization of the application, the groove is in a cubic shape.

[0019] As a further optimization of the application, the openings on each long edge of the back plate are provided with three openings, and the openings on each long edge are equidistantly arranged.

[0020] As a further optimization of the application, each connecting block is provided with two spacers and positioning blocks corresponding to the two openings of the adjacent back plate.

[0021] As a further optimization of the application, the frame body is made of aluminum alloy material.

[0022] As a further optimization of the application, the connecting plate is arranged between the adjacent back plates and connects the connecting blocks between the adjacent back plates.

[0023] As a further optimization of the application, the connecting plate is provided with a strip-shaped rib plate whose length direction is consistent with that of the connecting plate.

[0024] The application provides a target back plate mounting structure which is not easy to deform.

[0025] The two end faces of the pad block are respectively provided with mounting hole positions of different specifications, which can realize the precise assembly and connection of the pad block and the connecting block and the pad block and the positioning block.

[0026] The connecting block can connect the local stress of a single support plate to the collaborative bearing of the overall frame, avoiding local stress concentration caused by independent stress of the support plate and reducing the influence of deformation of the support structure itself on the back plate from the root.

[0027] The support plate is arranged to be perpendicular to the back plate, which can maximize the stiffness of the unit support area from the perspective of mechanical transmission, avoid local stress deviation of the back plate caused by deviation of the support direction, and reduce the warping of the back plate caused thereby.

[0028] The application can fundamentally improve the deformation problem of the target and the back plate through the collaborative design of multiple components, and takes into account the structural stability, heat dissipation performance and operation convenience. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 This is a schematic diagram of the structure of this embodiment;

[0030] Figure 2 yes Figure 1 Rear structure diagram;

[0031] Figure 3 yes Figure 1 A cross-section of the structure with part of the back panel hidden;

[0032] Figure 4 yes Figure 3 Enlarged schematic diagram of a local structure;

[0033] Figure 5 This is a schematic diagram of the backplate fixing surface structure in this embodiment;

[0034] Figure 6 yes Figure 5 Enlarged schematic diagram of a local structure;

[0035] Figure 7 This is a schematic diagram of the connecting block structure in this embodiment;

[0036] Figure 8 This is a schematic diagram of the pad block structure in this embodiment;

[0037] Figure 9 yes Figure 8 Another perspective structural diagram;

[0038] Among them, the back plate 1, mounting surface 1a, fixing surface 1b, notch 1c, support plate 2, connecting block 3, pad block 4, countersunk hole 4a, groove 4b, round hole 4c, positioning block 5, frame 6, target material 7, connecting plate 8, and stiffening plate 9. Detailed Implementation

[0039] like Figures 1-9 As shown, this embodiment includes a back plate 1, a support plate 2, a connecting block 3, a pad block 4, a positioning block 5, and a frame 6.

[0040] The back plate 1 is a long strip-shaped plate structure. One side of the back plate 1 is the mounting surface 1a, which is used to mount the target material 7; the other side of the back plate 1 is the fixing surface 1b, which is used to fix, support and position the back plate 1.

[0041] like Figure 6 As shown, the two long sides of the fixing surface 1b of the back plate 1 are provided with a number of stepped notches 1c. Specifically, each long side of the fixing surface 1b is provided with three notches 1c, and the three notches 1c are arranged at equal intervals. The three notches 1c on the two long sides of the fixing surface 1b are all arranged opposite each other.

[0042] The back plate 1 of the embodiment is provided with seven, seven back plates 1 are coplanar and arranged in sequence with intervals, specifically arranged with equal intervals, and a certain gap is arranged between two adjacent back plates 1. In other embodiments, the number of back plates 7 can also be other numbers.

[0043] The support plate 2 in the embodiment also adopts a long strip plate structure, two support plates 2 are arranged correspondingly for one back plate 1, and the two support plates 2 are respectively located on the two long side of the fixed surface 1b. The long side of the support plate 2 corresponds to the long side of the back plate 1, the support plate 2 and the back plate 1 are arranged vertically but there is a gap between them and they do not directly contact.

[0044] The adjacent support plates 2 corresponding to the two adjacent back plates 1 are connected through the connecting block 3, that is, the connecting block 3 is located between the two adjacent back plates 1, and the two sides of the connecting block 3 are respectively fixed with the support plates 2 on both sides. The position of the connecting block 3 is arranged corresponding to the position of the groove 4b on the back plate 1.

[0045] The connecting block 3 in the embodiment adopts a U-shaped structure, and the two ends of the U-shaped connecting block 3 respectively face the direction of the two openings 1c of the two adjacent back plates 1.

[0046] The cushion block 4 is arranged on the surface of the connecting block 3 facing the back plate 1. Specifically, two cushion blocks 4 are arranged correspondingly for each connecting block 3, and the two cushion blocks 4 are respectively fixed on the two ends of the U-shaped connecting block 3.

[0047] The shape of the positioning block 5 corresponds to the stepped surface of the opening 1c, and the positioning block 5 is arranged on the stepped surface of the opening 1c, which not only plays a positioning role but also plays a role of supporting the back plate 1, and the positioning block 5 is connected with the cushion block 4.

[0048] The frame 6 of the embodiment adopts an aluminum alloy material, and the frame 6 has a rectangular structure. The frame 6 frames the seven back plates 1 and the support plates 2, and the two ends of the seven back plates 1 and the support plates 2 are detachably mounted on the frame 6.

[0049] The cushion block 4 in the embodiment adopts a resin material. Considering the cost, a high-strength reinforced synthetic resin will not be selected, and the strength of the ordinary and inexpensive resin is poor, so the embodiment does not directly arrange a threaded hole on the cushion block 4.

[0050] The embodiment is provided with a threaded hole on the surface of the connecting block 3 facing the back plate 1, the cushion block 4 is provided with a countersunk hole 4a corresponding to the threaded hole, and a countersunk bolt is threadedly connected with the threaded hole to fix the cushion block 4 on the connecting block 3 through the countersunk hole 4a.

[0051] At the same time, the surface of the cushion block 4 in contact with the connecting block 3 is provided with a four-prism-shaped groove 4b, and the bottom of the groove 4b is provided with a circular hole 4c; further comprising a nut arranged in the groove 4b and limited to rotate and move by the groove 4b; the bolt is threadedly connected with the nut to fix the positioning block 5 on the cushion block 4 after passing through the positioning block 5 and the circular hole 4c.

[0052] The embodiment is further provided with a connecting plate 8 arranged between adjacent back plates 1 and connecting the three connecting blocks 3 between the adjacent back plates 1, and a rib plate 9 can be arranged on the connecting plate 8 to increase the strength of the connecting plate 8 if necessary, the rib plate 9 is strip-shaped, and the length direction of the rib plate 9 is consistent with the connecting plate 8.

[0053] It should be understood that the expressions of up, down, left, right, front, back, top, bottom, tail, horizontal, vertical and the like of the orientation or position relationship described in the present application are referred to the drawings of the specification, and are only used to more clearly express the technical solutions and simplify the description, and thus cannot be understood as indicating or implying that the devices or elements must have a specific orientation, a specific orientation structure and operation, and thus cannot be understood as limiting the protection scope of the present application.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit the protection scope of the present application. Although the present application has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. A target backplate mounting structure that is not easily deformed, characterized in that, The utility model relates to a target material fixing device, including: a long strip backboard with one surface for mounting target material and the other surface for fixing, and two long edge sides of the fixing surface of the backboard are provided with a plurality of stepped openings, the backboard is provided with a plurality of openings and is arranged in sequence and at intervals; a long strip support plate is arranged perpendicularly to the backboard, and the two long edge sides of the fixing surface of the backboard are each provided with a corresponding support plate; a connecting block is arranged for connecting two adjacent support plates corresponding to two adjacent backboards, and the surface of the connecting block facing the backboard is provided with a threaded hole; a pad block is arranged on the surface of the connecting block facing the backboard, the pad block is made of resin material, the pad block is provided with a countersunk hole corresponding to the threaded hole, a countersunk bolt is screwed into the threaded hole and the threaded hole to fix the pad block on the connecting block, the surface of the pad block in contact with the connecting block is provided with a prismatic groove, the bottom of the groove is provided with a circular hole, and a nut is arranged in the groove and is limited to rotate and move by the groove; a positioning block corresponding to the stepped surface of the opening and supporting the backboard, a bolt is screwed into the positioning block and the circular hole to fix the positioning block on the pad block; and a frame body surrounding the backboard and the support plate, and the two ends of the backboard and the support plate are detachably connected to the frame body.

2. The non-deformable target backing plate mounting structure according to claim 1, wherein The openings on the two long edge sides of the backboard are arranged oppositely.

3. The non-deformable target backing plate mounting structure of claim 1, wherein A plurality of backboards are arranged in an array.

4. The non-deformable target backing plate mounting structure of claim 1, wherein The connecting block is in a U-shaped structure, and the two ends of the U-shaped connecting block are respectively directed towards the directions of the two openings of the adjacent backboards.

5. The non-deformable target backing plate mounting structure of claim 1, wherein The groove is in a cubic shape.

6. The non-deformable target backing plate mounting structure of claim 1, wherein Three openings are arranged on each long edge side of the backboard, and the openings on each long edge side are arranged at equal distances.

7. The non-deformable target backing plate mounting structure of claim 1, wherein Two pad blocks and positioning blocks corresponding to the two openings of the adjacent backboard are arranged on each connecting block.

8. The non-deformable target backing plate mounting structure of claim 1, wherein The frame body is made of aluminum alloy.

9. The non-deformable target backing plate mounting structure of claim 1, wherein, The utility model further includes a connecting plate arranged between the adjacent backboards and connecting the connecting blocks between the adjacent backboards.

10. The non-deformable target backing plate mounting structure of claim 9, wherein The connecting plate is provided with a strip-shaped rib plate, and the length direction of the rib plate is consistent with the connecting plate.

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