Optical modulator and laser radar

Abstract

The invention provides an optical modulation device. The optical modulation device comprises a light reflection layer, a conductive layer, a dielectric layer and a driving module which are arranged in a stacked mode. One side of the light reflecting layer is used for receiving first light. The conductive layer comprises a first conductive layer and a second conductive layer which are arranged at an interval, and the conductive layer is arranged on the other side of the light reflecting layer. The dielectric layer comprises a first dielectric layer and a second dielectric layer, the first dielectric layer is arranged between the light reflecting layer and the first conductive layer, and the second dielectric layer is arranged between the first conductive layer and the second conductive layer. The driving module is electrically connected to the light reflecting layer and the conductive layers, applies a first voltage to the light reflecting layer, applies a second voltage to the first conductive layer, and applies a third voltage to the second conductive layer. Wherein the driving module is used for changing the voltage difference between the light reflecting layer and the conductive layer, so that the first light is modulated into the second light on the surface of one side of the light reflecting layer. The invention also provides a laser radar using the optical modulator.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of laser radar, and in particular to an optical modulation device and a laser radar using the same. BACKGROUND

[0002] The adoption of an optical phased array in a laser radar can realize the scanning of a light beam in space without mechanical rotation, and has broad application prospects in the fields of laser ranging and free-space optical communication. When the phase of light and the deflection angle of light are regulated by voltage, in order to realize a larger deflection angle, the driving module needs a higher driving voltage. When a single-layer structure optical phased array is used, the higher the driving voltage, the greater the power consumption of the driving module, thereby reducing the service life of the laser radar and increasing the cost of the laser radar. SUMMARY

[0003] The first aspect of the present application provides an optical modulation device, comprising:

[0004] a light reflection layer, one side of which is configured to receive first light;

[0005] a conductive layer, comprising a first conductive layer and a second conductive layer arranged at intervals, the conductive layer being arranged on the other side of the light reflection layer;

[0006] a dielectric layer, comprising a first dielectric layer and a second dielectric layer, the first dielectric layer being arranged between the light reflection layer and the first conductive layer, and the second dielectric layer being arranged between the first conductive layer and the second conductive layer;

[0007] a driving module, electrically connected to the light reflection layer and the conductive layer, the driving module being configured to apply a first voltage to the light reflection layer, a second voltage to the first conductive layer, and a third voltage to the second conductive layer;

[0008] The driving module is configured to change the voltage difference between the light reflection layer and the conductive layer, so as to modulate the first light into second light on the surface of one side of the light reflection layer.

[0009] The optical modulation device provided by the embodiments of the present application can regulate the first light by arranging the light reflection layer, the conductive layer and the dielectric layer at intervals and changing the voltage difference between the light reflection layer and the conductive layer by using the driving module, which is conducive to reducing the power consumption of the driving module, thereby prolonging the service life of the optical modulation device and reducing the cost of the optical modulation device.

[0010] In an embodiment, the second voltage is a ground voltage.

[0011] In an embodiment, the first voltage is a positive voltage or a negative voltage, and the third voltage is a positive voltage or a negative voltage.

[0012] In an embodiment, the light reflection layer comprises one or more spaced light reflection units.

[0013] In an embodiment, the plurality of light reflection units form an array structure on a side surface of the first dielectric layer. In an embodiment, the first light is incident perpendicularly to the direction of the light reflection layer, and the deflection angle range of the second light relative to the first light comprises -15°-15°.

[0014] In an embodiment, the first light is incident perpendicularly to the direction of the light reflection layer, and the deflection angle range of the second light relative to the first light comprises 0°-30°.

[0015] In an embodiment, the material of the dielectric layer is an insulating material.

[0016] In an embodiment, the material of the light reflection layer and the conductive layer is a conductive material.

[0017] The second aspect of the present application provides a laser radar, comprising:

[0018] A laser emission system comprising a light source for emitting first light and the light modulation device of any of the above embodiments for modulating the first light into second light.

[0019] The laser radar provided by the embodiments of the present application can more simply regulate and control the first light by setting the light modulation device having any of the above embodiments, which is conducive to reducing the overall power consumption of the laser radar, thereby being conducive to prolonging the service life of the laser radar and reducing the manufacturing cost of the laser radar. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 The structure diagram of the light modulation device of an embodiment of the present application.

[0021] Figure 2 The structure diagram of the light modulation device of another embodiment of the present application.

[0022] Figure 3 The structure diagram of the light modulation device of another embodiment of the present application.

[0023] Figure 4 The deflection angle diagram of the second light of an embodiment of the present application.

[0024] Figure 5 The deflection angle diagram of the second light of another embodiment of the present application.

[0025] Figure 6 Structure diagram of a laser radar according to an embodiment of the present application.

[0026] Main element symbol explanation

[0027] Optical modulation device 100

[0028] Light reflecting layer 2

[0029] Light reflecting unit 2a

[0030] Conductive layer 3

[0031] First conductive layer 31

[0032] Second conductive layer 33

[0033] Dielectric layer 4

[0034] First dielectric layer 41

[0035] Second dielectric layer 43

[0036] Drive module 5

[0037] First voltage V1

[0038] Second voltage V2

[0039] Third voltage V3

[0040] Laser radar 200

[0041] Laser emitting system 21

[0042] Light source 210

[0043] Collimation module 211

[0044] Optical phased array module 212

[0045] Optical splitter 212a

[0046] Optical waveguide 212b

[0047] External object 22

[0048] Laser receiving system 23

[0049] Optical amplifier 230

[0050] Transimpedance amplifier 231

[0051] Analog-to-digital converter 233

[0052] First light L1

[0053] Second light L2

[0054] Deflection angle θ

[0055] The following detailed description will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0056] The technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all of the embodiments of the present application.

[0057] Referring to Figure 1 The present application provides a light modulation device 100, comprising a light reflection layer 2, a conductive layer 3 and a dielectric layer 4 which are stacked, and a driving module 5. The light reflection layer 2 is used for receiving a first light L1 on one side. The conductive layer 3 comprises a first conductive layer 31 and a second conductive layer 33 which are spaced apart, and the conductive layer 3 is arranged on one side of the light reflection layer 2. The dielectric layer 4 comprises a first dielectric layer 41 and a second dielectric layer 43, the first dielectric layer 41 is arranged between the light reflection layer 2 and the first conductive layer 31, and is used for electrically isolating the light reflection layer 2 and the first conductive layer 31, and the second dielectric layer 43 is arranged between the first conductive layer 31 and the second conductive layer 33, and is used for electrically isolating the first conductive layer 31 and the second conductive layer 33. The driving module 5 is electrically connected to the light reflection layer 2 and the conductive layer 3, the driving module 5 applies a first voltage V1 to the light reflection layer 2, the driving module 5 applies a second voltage V2 to the first conductive layer 31, and the driving module 5 applies a third voltage V3 to the second conductive layer 33. Wherein, the driving module 5 is used for changing the voltage difference between the light reflection layer 2 and the conductive layer 3, so as to modulate the first light L1 into a second light L2 on the surface of one side of the light reflection layer 2.

[0058] The light modulation device 100 provided by the embodiments of the present application can be relatively simply regulated and controlled by spacing the light reflection layer 2, the conductive layer 3 and the dielectric layer 4, and changing the voltage difference between the light reflection layer 2 and the conductive layer 3 by the driving module 5, which is conducive to reducing the power consumption of the driving module 5, thereby being conducive to prolonging the service life of the light modulation device 100 and reducing the manufacturing cost of the light modulation device 100.

[0059] Referring to Figure 1 The light reflection layer 2 comprises a light reflection unit 2a. Referring to Figure 2The light-reflecting layer 2 includes a plurality of spaced light-reflecting units 2a. The plurality of light-reflecting units 2a are arranged on the first dielectric layer 41 and are spaced apart from each other. The plurality of light-reflecting units 2a form an array structure on one side surface of the first dielectric layer 41. By changing the voltage difference between the light-reflecting layer 2 and the conductive layer 3 through the driving module 5, the light can be deflected in different directions. In the present embodiment, the driving module 5 applies the first voltage VI to each light-reflecting unit 2a in parallel. In other embodiments, the driving module 5 can independently apply the first voltage VI to each light-reflecting unit 2a, which is not limited in the present application.

[0060] The material of the dielectric layer 4 is an insulating material. The insulating material is a material that does not conduct electricity under a permissible voltage, but is not a material that does not conduct electricity at all. Under the action of a certain external electric field intensity, the material will also undergo processes such as conduction, polarization, loss, breakdown, etc., and will also age over a long period of use. Among them, the material of the first dielectric layer 41 and the second dielectric layer 43 can include at least one insulating material from among polypropylene, polyethylene, polyvinyl chloride, polyester, silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, and zirconium oxide. In the present embodiment, the first dielectric layer 41 and the second dielectric layer 43 are formed of the same material. In other embodiments, the first dielectric layer 41 and the second dielectric layer 43 are formed of different materials, which is not limited in the present application.

[0061] The light-reflecting layer 2, the conductive layer 3, and the dielectric layer 4 are in a stacked connection relationship. The material of the light-reflecting layer 2 is a conductive material. In the present embodiment, the material of the light-reflecting layer 2 includes electro-optic material, i.e., an optical functional material having an electro-optic effect. Under the action of an external electric field, the light-reflecting layer 2 undergoes a change in refractive index, which is referred to as an electro-optic effect. In the present embodiment, the material of the light-reflecting layer 2 can include any one of potassium dideuterium phosphate (DKDP), dihydrogen amine phosphate (ADP), gallium arsenide (GaAs), cadmium telluride (CdTe), and lithium tantalate (LT) crystals. In other embodiments, the material of the light-reflecting layer 2 can include a metal material having high conductivity. For example, any one of copper (Cu), aluminum (Al), nickel (Ni), iron (Fe), cobalt (Co), zinc (Zn), titanium (Ti), ruthenium (Ru), rhodium (Rh), palladium (Pd), platinum (Pt), silver (Ag), osmium (Os), iridium (Ir), and gold (Au), or an alloy formed of at least two of the above-mentioned metals. In addition, the material of the light-reflecting layer 2 can also include any one of a carbon nanostructure such as graphene or a carbon nanotube (CNT), and a conductive oxide, which is not limited in the present application.

[0062] The material of the conductive layer 3 is a conductive material. The material of the first conductive layer 31 can be a transparent conductive oxide (TCO), such as indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO), aluminum gallium zinc oxide (AGZO). The material of the second conductive layer 33 can be the same as or different from the material of the first conductive layer 31. In the embodiment, the material of the second conductive layer 33 is the same as or similar to the material of the light reflecting layer 2. For example, the material of the second conductive layer 33 can include any one of copper (Cu), aluminum (Al), nickel (Ni), iron (Fe), cobalt (Co), zinc (Zn), titanium (Ti), ruthenium (Ru), rhodium (Rh), palladium (Pd), platinum (Pt), silver (Ag), osmium (Os), iridium (Ir), and gold (Au), or an alloy formed by at least two of the above-mentioned metals. In other embodiments, the material of the second conductive layer 33 can be a transparent conductive oxide (TCO), such as indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO), aluminum gallium zinc oxide (AGZO), which is not limited in the application.

[0063] The driving module 5 can adopt any one of a switching power supply, an inverter power supply, an AC voltage stabilizing power supply, a DC voltage stabilizing power supply, and a DC / DC power supply as the power supply, which is not limited in the application.

[0064] Please refer to Figure 3 and Figure 4 , the first conductive layer 31 is grounded, and the second voltage V2 is a ground voltage. One of the first voltage V1 and the third voltage V3 is a positive voltage, and the other is a negative voltage. When the second voltage V2 on the first conductive layer 31 is 0V, the third voltage V3 applied to the second conductive layer 33 by the driving module 5 is a negative voltage, and the first voltage V1 applied to the light reflecting layer 2 by the driving module 5 is a positive voltage. The light reflecting layer 2 and the second conductive layer 33 have different charge concentrations to form a voltage difference. When the first light L1 is modulated into the second light L2 on one side surface of the light reflecting layer 2, the characteristics of the second light L2 relative to the first light L1 change according to the charge concentrations of the light reflecting layer 2 and the second conductive layer 33. That is, the deflection angle θ of the second light L2 relative to the first light L1 can be controlled by adjusting the voltage of the driving module 5. In other embodiments, the first voltage V1 is a negative voltage, and the third voltage V3 is a positive voltage, which is not limited in the application.

[0065] The first light L1 is incident perpendicularly to the direction of the light reflection layer 2, and the deflection angle θ of the outgoing light is changed by changing the voltage difference between the light reflection layer 2 and the conductive layer 3. The deflection angle θ of the second light L2 relative to the first light L1 ranges from 0° to 30°. The reflection phase of the second light L2 relative to the first light L1 changes according to the voltage difference, and the phase change of the second light L2 ranges from 0 to 2π. Please refer to Figure 5 , the first light L1 is incident perpendicularly to the direction of the light reflection layer 2, and the deflection angle θ of the second light L2 relative to the first light L1 ranges from -15° to 15°. The phase change of the second light L2 ranges from 0 to 2π. Please refer to Figure 1 , the thickness of the light reflection layer 2 ranges from 10um to 100um. The thickness of the first conductive layer 31 and the second conductive layer 33 ranges from 10um to 100um. The thickness of the light reflection layer 2 and the conductive layer 3 depends on the voltage applied by the driving module 5. When the first voltage V1, the second voltage V2 and the third voltage V3 are larger, the thickness of the light reflection layer 2 and the conductive layer 3 can be thicker, and the thicker light reflection layer 2 and the conductive layer 3 are beneficial to reduce the processing difficulty. When the first voltage V1, the second voltage V2 and the third voltage V3 are smaller, the thickness of the light reflection layer 2 and the conductive layer 3 can be thinner. The thickness of the first dielectric layer 41 and the second dielectric layer 43 ranges from 10um to 100um. The present application is not limited.

[0066] The light modulation device 100 provided by the embodiment of the present application can more simply control the first light L1 by changing the voltage difference between the light reflection layer 2 and the conductive layer 3 by using the driving module 5, which is beneficial to reduce the power consumption of the driving module 5, thereby being beneficial to prolong the service life of the light modulation device 100 and beneficial to reduce the manufacturing cost of the light modulation device 100.

[0067] Please refer to Figure 6 , Figure 4 and Figure 1The embodiment of the present application also provides a laser radar 200, comprising a laser emitting system 21 and a laser receiving system 23. The laser emitting system 21 comprises a light source 210, a collimating module 211 and a light control phased array module 212. The light source 210 emits first light L1, the first light L1 enters the collimating module 211, and the collimating module 211 is used for collimating the first light L1. The collimated first light L1 is incident on the light control phased array module 212. The light control phased array module 212 is used for changing the direction of the first light L1, thereby realizing the scanning function of the laser radar 200. The light control phased array module 212 comprises a light splitter 212a, a light modulation device 100 and a light waveguide 212b. The light modulation device 100 is arranged in the light control phased array module 212 and is used for modulating the first light L1 into second light L2. Wherein, the first light L1 enters the light waveguide 212b through the light splitter 212a, the light waveguide 212b transmits the first light L1 to the light modulation device 100, the light modulation device 100 changes the voltage difference between the light reflecting layer 2 and the conductive layer 3 through the driving module 5, thereby changing the deflection angle θ and the phase of the first light L1, and modulating the first light L1 into the second light L2. The second light L2 is different from the first light L1 in that the phase and the deflection angle θ are different. The light control phased array module 212 is used for controlling the scanning direction of the second light L2. The second light L2 is emitted from the light control phased array module 212 to the free space and is reflected by an external object 22.

[0068] The laser receiving system 23 receives the second light L2 reflected by the external object 22. The laser receiving system 23 comprises an optical amplifier 230, a transimpedance amplifier 231 and an analog-to-digital converter 233. The optical amplifier 230 is used for amplifying the optical signal of the second light L2, converting the optical signal of the second light L2 into a current signal and transmitting the current signal to the transimpedance amplifier 231. The transimpedance amplifier 231 is used for further amplifying the current signal into a voltage signal. Finally, the voltage signal passes through the analog-to-digital converter, and the analog-to-digital converter is used for converting the continuous analog signal into a discrete digital signal, thereby facilitating the processing of the signal and the conversion of the data, and facilitating the control and calculation of the computer.

[0069] The laser radar 200 provided by the embodiment of the present application can relatively simply regulate and control the first light L1 by arranging the light modulation device 100 with any of the above embodiments, thereby being beneficial to reducing the overall power consumption of the laser radar 200, thereby being beneficial to prolonging the service life of the laser radar 200 and being beneficial to reducing the manufacturing cost of the laser radar 200.

[0070] The above embodiments are only used to illustrate the technical solutions of the present application and not limit the present application. Although the present application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or replaced by equivalents without departing from the spirit and scope of the present application.

Claims

1. An optical modulation device, characterized by, The application relates to a light modulating device, comprising: a light reflecting layer, one side of which is used for receiving first light; a conductive layer, comprising a first conductive layer and a second conductive layer which are arranged at intervals, the conductive layer being arranged on one side of the light reflecting layer; a dielectric layer, comprising a first dielectric layer and a second dielectric layer, the first dielectric layer being arranged between the light reflecting layer and the first conductive layer and used for electrically isolating the light reflecting layer and the first conductive layer, the second dielectric layer being arranged between the first conductive layer and the second conductive layer and used for electrically isolating the first conductive layer and the second conductive layer; a driving module, which is electrically connected to the light reflecting layer and the conductive layer, the driving module being used for applying a first voltage to the light reflecting layer, the driving module being used for applying a second voltage to the first conductive layer, and the driving module being used for applying a third voltage to the second conductive layer; wherein the driving module is used for changing the voltage difference between the light reflecting layer and the conductive layer, so as to modulate the first light into second light on the surface of one side of the light reflecting layer.

2. The optical modulation device according to claim 1, wherein The second voltage is a ground voltage.

3. The optical modulation device according to claim 2, wherein One of the first voltage and the second voltage is a positive voltage, and the other is a negative voltage.

4. The optical modulation device according to claim 1, wherein The light reflecting layer comprises one or more light reflecting units arranged at intervals.

5. The optical modulation device according to claim 4, wherein The light reflecting units form an array structure on one side of the first dielectric layer.

6. The optical modulation device according to claim 1, wherein The first light is incident on the light reflecting layer perpendicularly, and the deflection angle range of the second light relative to the first light is -15 DEG -15 DEG.

7. The optical modulation device according to claim 1, wherein The first light is incident on the light reflecting layer perpendicularly, and the deflection angle range of the second light relative to the first light is 0 DEG -30 DEG.

8. The optical modulation device according to claim 1, wherein The material of the dielectric layer is an insulating material.

9. The optical modulation device according to claim 1, wherein, The material of the light reflecting layer and the conductive layer is a conductive material.

10. A lidar, comprising: The application further relates to a laser emitting system, comprising a light source and the light modulating device, the light source being used for emitting first light, and the light modulating device being used for modulating the first light into second light. ​

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