Tail gas purification control method and device for hydrogen phosphide production, equipment and storage medium

Abstract

The invention provides a tail gas purification control method and device for hydrogen phosphide production, equipment and a storage medium, and belongs to the technical field of automatic control. The method comprises the steps that running state data of a tail gas purification system at multiple time points in the current time period are obtained; the operation state data comprises inlet gas concentration, outlet gas concentration and inlet and outlet pressure difference; determining an execution sequence of absorption liquid flow adjustment, catalyst bed temperature adjustment and gas flow rate adjustment in the tail gas purification system and respective adjustment directions of the absorption liquid flow adjustment, the catalyst bed temperature adjustment and the gas flow rate adjustment based on the operation state data at the plurality of time points; and controlling and adjusting the tail gas purification system based on the execution sequence and the adjusting direction. According to the tail gas purification control method and device for hydrogen phosphide production, the equipment and the storage medium, the tail gas purification effect can be improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of automatic control, and more particularly relates to a tail gas purification control method and device for phosphine production, equipment and a storage medium. BACKGROUND

[0002] Phosphine (PH3) as a gas with special chemical properties has a wide range of applications in the fields of semiconductor and electronic industry, agricultural storage, chemical synthesis, etc. The tail gas discharged in the production of phosphine usually contains unreacted raw materials, phosphine residues and by-products (such as hydrogen, dust, trace amounts of acidic / alkaline impurities), etc., which need to be purified by a tail gas purification system before being discharged.

[0003] The core processing unit of the tail gas purification system includes a catalytic bed and an absorption scrubbing device. In the catalytic bed, phosphine is converted into non-toxic phosphoric acid mist through catalytic oxidation. In the absorption scrubbing device such as a spray absorption tower or a packed absorption tower, uncompletely catalyzed phosphine, phosphoric acid mist, etc. are captured through countercurrent contact between the absorption liquid and the tail gas, so as to achieve end purification. By adjusting the absorption liquid flow rate, the catalyst bed temperature and the tail gas flow rate, the tail gas purification effect can be adjusted. Meanwhile, the absorption liquid flow rate, the catalyst bed temperature and the tail gas flow rate are coupled and related to each other, and improper adjustment of a certain parameter will offset the adjustment effect of another parameter, thereby leading to a decrease in the tail gas treatment efficiency. SUMMARY

[0004] The purpose of the present application is to provide a tail gas purification control method and device for phosphine production, equipment and a storage medium, so as to improve the tail gas purification effect.

[0005] The first aspect of the embodiment of the present application provides a tail gas purification control method for phosphine production, comprising: obtaining running state data of a tail gas purification system at multiple time points in a current period; the running state data includes an inlet gas concentration, an outlet gas concentration and an inlet-outlet pressure difference; determining an execution order of absorption liquid flow rate adjustment, catalyst bed temperature adjustment and gas flow rate adjustment in the tail gas purification system based on the running state data at the multiple time points, and a respective adjustment direction of the absorption liquid flow rate adjustment, the catalyst bed temperature adjustment and the gas flow rate adjustment; controlling and adjusting the tail gas purification system based on the execution order and the adjustment direction.

[0006] The second aspect of the embodiment of the present application provides a tail gas purification control device for phosphine production, comprising: The data acquisition module is configured to acquire operation state data of the tail gas purification system at multiple time points in a current time period, wherein the operation state data comprises inlet gas concentration, outlet gas concentration and inlet-outlet pressure difference. The decision module is configured to determine an execution sequence of absorbent flow adjustment, catalyst bed temperature adjustment and gas flow rate adjustment in the tail gas purification system based on the operation state data at the multiple time points, and a respective adjustment direction of the absorbent flow adjustment, the catalyst bed temperature adjustment and the gas flow rate adjustment. The control adjustment module is configured to perform control adjustment of the tail gas purification system based on the execution sequence and the adjustment direction.

[0007] In a third aspect, an electronic device is provided, which includes a memory, a processor, and a computer program stored in the memory and running on the processor, and the processor implements the steps of the tail gas purification control method for phosphine production when running the computer program.

[0008] In a fourth aspect, a computer readable storage medium is provided, which stores a computer program, and the computer program implements the steps of the tail gas purification control method for phosphine production when executed by a processor.

[0009] The tail gas purification control method and device for phosphine production, the equipment and the storage medium provided by the embodiments of the present application have the following beneficial effects: In the embodiments of the present application, by monitoring the operation state data at multiple time points and capturing the dynamic changes of the operation state data, different operation conditions of the tail gas purification system can be determined, the execution sequence of the absorbent flow adjustment, the catalyst bed temperature adjustment and the gas flow rate adjustment can be set for different operation conditions, and the respective adjustment direction of the absorbent flow adjustment, the catalyst bed temperature adjustment and the gas flow rate adjustment can be determined, so that the synergistic effect of the absorbent flow adjustment, the catalyst bed temperature adjustment and the gas flow rate adjustment can be improved, and thus the tail gas purification effect can be improved. BRIEF DESCRIPTION OF DRAWINGS

[0010] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0011] Figure 1 A flowchart of the tail gas purification control method for phosphine production provided by an embodiment of the present application is shown in the figure. Figure 2A structural block diagram of the tail gas purification control device for phosphine production provided in an embodiment of the present application is provided. Figure 3 A schematic block diagram of the electronic device provided in an embodiment of the present application is provided. DETAILED DESCRIPTION

[0012] In the following description, specific details such as specific system structures, techniques, etc. are presented in order to provide a thorough understanding of the embodiments of the present application. However, it will be apparent to those skilled in the art that the present application can be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, apparatuses, circuits, and methods are omitted in order not to obscure the description of the present application with unnecessary details.

[0013] It can be understood that, in the embodiments of the present application, data related to user information, etc. is involved, and when the embodiments of the present application are applied to specific products or technologies, user permission or consent needs to be obtained, and the collection, use, and processing of related data need to comply with relevant laws, regulations, and standards.

[0014] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0015] In order to make the purpose, technical solutions and advantages of the present application clearer, specific embodiments will be described below with reference to the accompanying drawings.

[0016] Reference will be made to Figure 1 , Figure 1 A flowchart of the tail gas purification control method for phosphine production provided in an embodiment of the present application is provided. The tail gas purification control method for phosphine production provided in the embodiment of the present application can be executed by an electronic device, and the method can include: S101: Obtain running state data of the tail gas purification system at multiple time points in a current time period; the running state data includes inlet gas concentration, outlet gas concentration, and inlet-outlet pressure difference.

[0017] In the embodiment, the main component of the phosphine production tail gas is phosphine, therefore, the inlet gas concentration of the tail gas purification system can be the concentration of the inlet phosphine gas, and the outlet gas concentration of the tail gas purification system can be the concentration of the outlet phosphine gas. The inlet-outlet pressure difference of the tail gas purification system is the pressure difference between the outlet gas pressure and the inlet gas pressure.

[0018] S102: Determine the execution sequence of the absorbent flow regulation, catalyst bed temperature regulation and gas flow rate regulation in the tail gas purification system based on the operating state data at multiple time points, and the regulation direction of each of the absorbent flow regulation, catalyst bed temperature regulation and gas flow rate regulation.

[0019] In this embodiment, by monitoring the operating state data at multiple time points and capturing the dynamic changes of the operating state data, different operating conditions of the tail gas purification system can be determined, and the execution sequence of the absorbent flow regulation, catalyst bed temperature regulation and gas flow rate regulation and the regulation direction of each of the absorbent flow regulation, catalyst bed temperature regulation and gas flow rate regulation can be set for different operating conditions, which can improve the synergy of the absorbent flow regulation, catalyst bed temperature regulation and gas flow rate regulation, thereby improving the tail gas purification effect.

[0020] S103: Control and adjust the tail gas purification system based on the execution sequence and the regulation direction.

[0021] In this embodiment, the control and adjustment of the tail gas purification system can be realized by regulating the operation of the absorbent flow valve, catalyst bed temperature control device and gas delivery adjustment mechanism based on the above execution sequence and regulation direction, which can ensure that the control and adjustment always accurately matches the real-time operating demand and improves the tail gas purification effect.

[0022] In an embodiment of the present application, the execution sequence of the absorbent flow regulation, catalyst bed temperature regulation and gas flow rate regulation in the tail gas purification system and the regulation direction of each of the absorbent flow regulation, catalyst bed temperature regulation and gas flow rate regulation are determined based on the operating state data at multiple time points, which includes: If the average value of the inlet gas concentration in the current period is greater than the preset first concentration threshold value, the change rate of the inlet gas concentration in the current period is greater than the preset change rate threshold value, and the average value of the outlet gas concentration in the current period is greater than the preset second concentration threshold value, the step of reducing the gas flow rate is performed first, then the step of increasing the absorbent flow rate is performed, and finally the step of increasing the catalyst bed temperature is performed; If the change rate of the inlet gas concentration in the current period is less than or equal to the preset change rate threshold value, the average value of the outlet gas concentration in the current period is greater than the preset second concentration threshold value, and the inlet and outlet pressure difference is greater than the preset pressure difference threshold value, the step of reducing the gas flow rate is performed first, then the step of increasing the catalyst bed temperature is performed, and finally the step of increasing the absorbent flow rate is performed.

[0023] In this embodiment, for the two typical operating conditions of the tail gas purification system, the corresponding regulation strategies are as follows: For the high-load impact working condition, the average value of the inlet gas concentration in the current period is greater than the preset first concentration threshold, indicating that the tail gas load to be purified is large; the change rate of the inlet gas concentration in the current period is greater than the preset change rate threshold, indicating that the tail gas load to be purified is in a rapid rising trend, which belongs to the impact load; and the average value of the outlet gas concentration in the current period is greater than the preset second concentration threshold, indicating that the current purification capacity is insufficient. The first concentration threshold, the change rate threshold and the second concentration threshold are all preset constants, and the specific values of the above preset constants can be designed by the person skilled in the art according to actual needs. For example, the first concentration threshold is 850 ppm, the change rate threshold is 6%, and the second concentration threshold is 0.3 ppm.

[0024] Under the above high-load impact working condition, the gas flow rate can be first reduced to prolong the residence time of the gas in the purification system, so that the gas has more sufficient time to contact the absorption liquid and react with the catalyst; then the absorption liquid flow rate is increased to increase the adsorption capacity and improve the gas removal amount per unit time, so as to rapidly reduce the outlet gas concentration. Conversely, if the absorption liquid flow rate is first increased and then the gas flow rate is reduced, the absorption liquid will accumulate, which may cause the inlet and outlet pressure difference to rise. Further, the temperature of the catalyst bed can be increased to compensate for the catalyst activity and accelerate the catalytic reaction rate.

[0025] For the stable load and abnormal pressure difference working condition, the change rate of the inlet gas concentration in the current period is less than or equal to the preset change rate threshold, indicating that the tail gas load to be purified is in a stable state; the average value of the outlet gas concentration in the current period is greater than the preset second concentration threshold, indicating that the current purification capacity is insufficient; and the inlet and outlet pressure difference is greater than the preset pressure difference threshold, indicating that the flow resistance of the gas in the purification system is large.

[0026] At this time, the gas flow rate is first reduced to directly reduce the impact of the gas flow on the catalyst bed and the absorption liquid system, rapidly reduce the system resistance, and avoid safety risks such as pipe rupture and phosphine leakage caused by excessive resistance; thereafter, since the load is stable, the absorption liquid flow rate does not need to be adjusted to rapidly reduce the load, and the temperature can be directly increased to improve the catalyst activity, thereby avoiding further increase of the system resistance caused by the excessively high absorption liquid flow rate; finally, after the catalytic reaction is strengthened, the absorption liquid flow rate is increased to further improve the purification effect.

[0027] In an embodiment of the present application, the step of reducing the gas flow rate is first performed, then the step of increasing the absorption liquid flow rate is performed, and finally the step of increasing the temperature of the catalyst bed is performed, comprising: The parameter adjustment operation is performed multiple times until the stop condition is met; The parameter adjustment operation comprises: Obtain the latest outlet gas concentration at multiple time points, and calculate the average of the latest outlet gas concentration based on the latest outlet gas concentration at multiple time points; Reduce the gas flow rate in the first step; After reducing the gas flow rate for a set time, the absorbent flow rate is increased in a second step. After increasing the absorbent flow rate for a set time, the catalyst bed temperature is increased in a third step; the first, second, and third step lengths are all positively correlated with the latest average outlet gas concentration. The stopping conditions are: the latest average value of the outlet gas concentration is less than or equal to the preset third concentration threshold; the third concentration threshold is less than the second concentration threshold.

[0028] In this embodiment, the outlet gas concentration can be gradually brought to the target through multiple rounds of parameter adjustment. Taking a high-load impact condition as an example, each time a parameter adjustment operation is performed, the latest outlet gas concentration at multiple time points is first obtained, and the average value of the latest outlet gas concentration is calculated by arithmetic mean. Based on this, the first step length is determined according to the positive correlation between the average value of the latest outlet gas concentration and the first step length. The gas flow rate is reduced by the first step length. After reducing the gas flow rate, wait for a set time (e.g., 5 minutes), and then increase the absorbent flow rate by the second step length to improve the adsorption effect. After increasing the absorbent flow rate, wait for a set time again (e.g., 5 minutes), and then increase the catalyst bed temperature by the third step length to accelerate the catalytic reaction rate.

[0029] Specifically, the first step length, the second step length, and the third step length can be calculated using the following first formula: ; in, This represents the length of the first step when performing the parameter adjustment operation for the t-th time. This represents the latest average concentration of the outlet gas. This indicates the third concentration threshold. This indicates the maximum value of the preset gas flow rate change (e.g., 8%). Indicates the rate of change of gas flow velocity. This represents the gas flow rate during the t-th parameter adjustment operation; This represents the second step size during the t-th execution of the parameter adjustment operation. This indicates the maximum value of the preset rate of change of absorbent flow rate (e.g., 10%). express rate of change of absorbent flow rate This represents the absorbent flow rate during the t-th parameter adjustment operation. This represents the length of the third step during the t-th execution of the parameter adjustment operation. represents a preset maximum value of the catalyst bed temperature adjustment step (for example, 5℃).

[0030] In the above first formula, the greater the average value of the latest outlet gas concentration, the greater the first step, the second step and the third step. When the outlet gas concentration is large, a larger adjustment range can achieve rapid adjustment of the tail gas treatment system. When the outlet gas concentration is small, a smaller adjustment range can avoid system fluctuations.

[0031] Wherein, the first step is determined by the gas flow rate change rate and the gas flow rate at the tth time of executing the parameter adjustment operation, which can adapt to different initial values of the gas flow rate and ensure smooth adjustment of the gas flow rate; Similarly, the second step is determined by the absorption liquid flow rate change rate and the absorption liquid flow rate at the tth time of executing the parameter adjustment operation, which can adapt to different initial values of the absorption liquid flow rate and ensure smooth adjustment of the absorption liquid flow rate; The catalytic efficiency of the catalyst is directly related to the absolute value of the catalyst bed temperature. The third step is determined based on the preset maximum value of the catalyst bed temperature adjustment step, and a relative increase (temperature change rate) is not used, which can accurately control the temperature rise range and avoid over-temperature deactivation caused by the relative increase, while limiting high energy consumption and temperature oscillation.

[0032] It should be noted that the first step, the second step and the third step all have corresponding maximum limits. When the first step, the second step and the third step calculated by the above first formula are greater than the corresponding maximum limits, the first step, the second step and the third step are corrected to the corresponding maximum limits, so as to avoid system risks, equipment damage or resource waste caused by excessive adjustment.

[0033] From the above, it can be seen that the present embodiment can achieve steady decline of the outlet gas concentration by gradually reducing the outlet gas concentration through multiple cycles, avoiding failure to meet the standard due to insufficient single adjustment.

[0034] In an embodiment of the present application, the tail gas purification system comprises a pretreatment unit, a catalyst bed and a catalyst regeneration device. Before controlling and adjusting the tail gas purification system based on the execution sequence and the adjustment direction, the method further comprises: obtaining the working parameters of the catalyst bed; determining the working state of the catalyst in the catalyst bed based on the working parameters of the catalyst bed; the working state of the catalyst comprises a normal state, a mild poisoning state, a moderate poisoning state or a severe poisoning state; If the working state of the catalyst is a mild poisoning state, the working parameters of the pretreatment unit are adjusted to intercept poisons. If the working state of the catalyst is a moderate poisoning state, the catalyst regeneration device is started.

[0035] In the embodiment, toxic substances such as sulfur compounds, chlorine compounds and heavy metals exist in the phosphine production tail gas, which can occupy active sites through chemical adsorption, or corrode the catalyst carrier and destroy the active structure, causing catalyst poisoning and leading to a decrease in catalytic conversion capacity.

[0036] To avoid the above problems, the embodiment can monitor the working parameters of the catalytic bed in real time, and determine the current working state of the catalyst in the catalytic bed based on the working parameters of the catalytic bed. If the catalyst is in a normal state, the adjustment of the absorbent flow, the catalyst bed temperature and the gas flow rate in the tail gas purification system is performed normally. If the catalyst is in a mild poisoning state, the working parameters of the pretreatment unit need to be adjusted when the adjustment of the absorbent flow, the catalyst bed temperature and the gas flow rate in the tail gas purification system is performed, such as increasing the adsorbent replacement frequency of the pretreatment unit, increasing the spray liquid flow rate of the pretreatment unit or optimizing the filtering precision, to strengthen the interception of toxic substances (such as sulfur, chlorine and heavy metals) in the tail gas and reduce the entry of toxic substances into the catalytic bed to avoid the poisoning from being aggravated. If the catalyst is in a moderate poisoning state, the catalyst regeneration device needs to be started when the adjustment of the absorbent flow, the catalyst bed temperature and the gas flow rate in the tail gas purification system is performed, such as through thermal regeneration, chemical regeneration and the like to remove the adsorbed toxic substances on the surface of the catalyst and restore the activity. If the catalyst is in a severe poisoning state, an alarm information can be output to prompt manual replacement of the catalyst.

[0037] In an embodiment of the present application, the working state of the catalyst in the catalytic bed is determined based on the working parameters of the catalytic bed, which includes: characteristic extraction is performed on the working parameters of the catalytic bed to obtain running characteristic data of the catalytic bed; based on the running characteristic data of the catalytic bed, the catalyst is identified as being in a normal state or a poisoning state through a binary classification model; if the catalyst is in a poisoning state, the catalyst is identified as being in a mild poisoning state, a moderate poisoning state or a severe poisoning state through a multi-classification model based on the running characteristic data of the catalytic bed.

[0038] In the embodiment, the working parameters of the catalytic bed can include the inlet gas concentration and the outlet gas concentration of the catalytic bed, the multi-point temperature of the catalytic bed, the inlet oxygen content and the outlet oxygen content of the catalytic bed, and the pressure difference between the inlet and the outlet of the catalytic bed, wherein the multi-point temperature of the catalytic bed includes the temperatures of multiple temperature measuring points at the inlet of the catalytic bed, the temperatures of multiple temperature measuring points inside the catalytic bed and the temperatures of multiple temperature measuring points at the outlet of the catalytic bed. Characteristic extraction is performed on the above working parameters to obtain running characteristic data such as actual catalytic efficiency, temperature difference attenuation rate, oxygen consumption temperature difference ratio, toxic substance accumulation amount and bed temperature uniformity.

[0039] The actual catalytic efficiency can directly represent the activity of the catalyst; the temperature difference attenuation rate can represent the attenuation degree of the temperature difference between the inlet and outlet of the catalytic bed. Since the catalytic process of phosphine will release a large amount of heat, the attenuation degree of the temperature difference can represent the decline degree of the reaction intensity after the catalyst is poisoned. The oxygen consumption temperature difference ratio is the ratio of the oxygen consumption and the temperature difference of the catalytic bed. When the catalyst is poisoned, the catalytic reaction is not synchronized with the oxygen consumption, and the oxygen consumption temperature difference ratio will be greatly increased. The poison accumulation amount is used to represent the total mass of the toxic substances accumulated and retained in the catalyst in the catalytic bed. The poison accumulation amount can directly reflect the influence degree of the toxic substances on the activity of the catalyst, and is the key quantitative basis for the poisoning degree classification. The bed temperature uniformity is the maximum value of the temperature deviation of multiple temperature measuring points (for example, three temperature measuring points) in the catalytic bed. When there is local poisoning of the catalyst in the catalytic bed, the maximum value of the temperature deviation will be greatly increased.

[0040] The calculation process of each operating characteristic data described above is introduced as follows: (1) The determination method of the actual catalytic efficiency includes: determining the initial catalytic efficiency based on the inlet gas concentration and the outlet gas concentration of the catalytic bed; determining the load correction coefficient based on the relative size of the inlet gas concentration and the preset standard concentration of the catalytic bed; correcting the initial catalytic efficiency based on the load correction coefficient to obtain the actual catalytic efficiency.

[0041] Exemplarily, the actual catalytic efficiency can be calculated by the following second formula: ; wherein, represents the actual catalytic efficiency, represents the inlet gas concentration of the catalytic bed, represents the outlet gas concentration of the catalytic bed, represents the rated value of the inlet gas concentration of the catalytic bed, represents the initial catalytic efficiency, represents the load correction coefficient.

[0042] In the above second formula, it is considered that under the high load working condition, is larger, even if the activity of the catalyst has been attenuated, because the base is large, the molecular may still maintain a large value, resulting in that the catalytic efficiency seems normal, which covers up the problem of insufficient real activity of the catalyst. The load correction coefficient The catalytic efficiency under high load is calibrated to the rated load scene based on the rated value of the imported gas concentration, so that the influence of the concentration base difference can be eliminated, and therefore, the actual catalytic efficiency obtained by correcting the initial catalytic efficiency by the load correction coefficient can truly reflect the insufficient catalytic activity under high load, and the poisoning degree can be avoided to be underestimated under the high load working condition.

[0043] (2) The calculation formula of the temperature difference attenuation rate is: ; Wherein, represents the temperature difference attenuation rate, represents the initial value of the temperature difference at the inlet and outlet of the catalytic bed, and specifically, the average value of the temperature difference when the newly put catalytic bed is stably running can be taken as the initial value of the temperature difference, represents the current temperature difference value at the inlet and outlet of the catalytic bed.

[0044] (3) The calculation formula of the oxygen consumption temperature difference ratio is: ; Wherein, represents the oxygen consumption temperature difference ratio, represents the current temperature difference value at the inlet and outlet of the catalytic bed, represents the oxygen consumption, that is, the difference between the inlet oxygen content and the outlet oxygen content of the catalytic bed.

[0045] (4) The calculation formula of the poison accumulation amount is: ; Wherein, represents the poison accumulation amount, represents the mass of the catalyst, represents the maximum poison adsorption amount corresponding to the unit mass of the catalyst, which can be obtained from the factory parameters of the catalyst, represents the actual catalytic efficiency, represents the catalytic efficiency of the newly put catalyst.

[0046] In the above formula, represents the attenuation degree of the catalytic efficiency of the catalyst, and the greater the attenuation degree of the catalytic efficiency of the catalyst, the more the adsorption amount of the poison, and the greater the poison accumulation amount.

[0047] (5) The calculation formula of the bed temperature uniformity is: ; Wherein, represents the bed temperature uniformity, represents the maximum value of the internal temperature of the catalytic bed, represents the minimum value of the internal temperature of the catalytic bed, The average value of the temperature inside the catalytic bed, i.e., the average value of the temperatures of multiple temperature measuring points inside the catalytic bed.

[0048] In the above formula, (Tcat) represents the average value of the temperature inside the catalytic bed, i.e., the average value of the temperatures of multiple temperature measuring points inside the catalytic bed. ) represents the degree of dispersion of the temperature inside the catalytic bed, and is divided by the average value of the temperature The absolute temperature influence can be eliminated, and the bed temperature uniformity at different temperatures is more comparable.

[0049] On the basis of obtaining the above operating characteristic data, the catalyst working state can be identified based on the above operating characteristic data. In the prior art, a multi-classification model is usually directly used to directly output the normal state, the mild poisoning state, the moderate poisoning state or the severe poisoning state of the catalyst. In the present embodiment, considering that the normal state accounts for the majority, a two-classification model is first used to perform coarse screening of the normal state or the poisoning state, and when the catalyst is determined to be in the poisoning state according to the two-classification model, a multi-classification model is used to subdivide the poisoning state. Since the catalyst is in the normal state in most cases, the method of the present embodiment can only subdivide the poisoning state in a small number of cases, thereby reducing the amount of calculation.

[0050] The two-classification model can be implemented by using an existing support vector machine model or a light random forest, and the multi-classification model can be implemented by using an existing support vector machine model or a random forest.

[0051] In an embodiment of the present application, the two-classification model is a first support vector machine model, and the multi-classification model is a second support vector machine model; the first support vector machine model is trained based on a first sample data set, and the second support vector machine model is obtained based on a second sample data set and an expanded sample data set; the second sample data includes sample data of the mild poisoning state, sample data of the moderate poisoning state and sample data of the severe poisoning state, and the first sample data set includes sample data of the normal state and the second sample data set. The determination manner of the expanded sample data set includes: The support vectors corresponding to the poisoning state are selected from all the support vectors of the first support vector machine model as first target support vectors; Feature extraction is performed on the sample data of the severe poisoning state to obtain multiple feature vectors; For each first target support vector, the similarity between the first target support vector and each feature vector is calculated, and if there is a feature vector with a similarity greater than a similarity threshold, the first target support vector is taken as a second target support vector; Random disturbance is added to each second target support vector to obtain the expanded sample data set.

[0052] In the embodiment, the binary classification model and the multi-classification model can be implemented by using a support vector machine model. Specifically, a first support vector machine model can be trained based on the first sample data set to obtain the binary classification model, and a second support vector machine model can be trained based on the second sample data set to obtain the multi-classification model. The first sample data set and the second sample data set share sample data of the mild poisoning state, sample data of the moderate poisoning state, and sample data of the severe poisoning state.

[0053] For example, the first sample data set includes sample data of the normal state, sample data of the mild poisoning state, sample data of the moderate poisoning state, and sample data of the severe poisoning state. The sample data of the normal state can be labeled as "normal" and the corresponding label can be 0. The sample data of the mild poisoning state, the sample data of the moderate poisoning state, and the sample data of the severe poisoning state can be labeled as "poisoning" and the corresponding label can be 1. The first support vector machine model is trained based on the first sample data set after the labeling.

[0054] Similarly, the second sample data set includes sample data of the mild poisoning state, sample data of the moderate poisoning state, and sample data of the severe poisoning state. The sample data of the mild poisoning state can be labeled as mild poisoning and the corresponding label can be 1. The sample data of the moderate poisoning state can be labeled as moderate poisoning and the corresponding label can be 2. The sample data of the severe poisoning state can be labeled as severe poisoning and the corresponding label can be 3. The second support vector machine model is trained based on the second sample data set after the labeling.

[0055] Further, considering that the sample data of the severe poisoning state is less, the embodiment performs data augmentation based on the training result of the first support vector machine model to obtain an augmented sample data set, and trains the second support vector machine model based on the second sample data set and the augmented sample data set.

[0056] Specifically, from all support vectors in the first support vector machine model, support vectors labeled 1 (poisoned state) are selected and denoted as the first target support vector. The first target support vector is the core of the decision boundary between the normal state and the poisoned state, with strong feature representativeness, and can accurately characterize the key feature distribution of the poisoned sample. Simultaneously, following the method described in the above embodiment, feature extraction is performed on the sample data of the severely poisoned state to obtain multiple feature vectors. For each first target support vector, the similarity between the first target support vector and multiple feature vectors is calculated. If there is a feature vector with a similarity greater than a similarity threshold, it indicates that the first target support vector has a high similarity to the severely poisoned sample data, and this first target support vector is used as the second target support vector. The similarity calculation can use existing cosine similarity or Euclidean distance calculation methods. The similarity threshold is a preset constant, which can be set by those skilled in the art according to actual needs, for example, it can be set to 0.7.

[0057] Furthermore, for each second target support vector, a small random perturbation (e.g., 5% to 10% of the feature standard deviation) is added to each feature dimension, such as actual catalytic efficiency and cumulative toxicity, to ensure that the sample retains the core features after perturbation, while increasing sample diversity. The multiple second target support vectors with added random perturbation are used as the expanded sample dataset.

[0058] It should be noted that, in order to ensure the dominant role of the original severely poisoned sample data, the number of second target support vectors needs to be limited when training the second support vector machine model. For example, the number of second target support vectors cannot exceed 30% of the total number of training samples for the second support vector machine.

[0059] In one embodiment of this application, during the training process of the first support vector machine model, in order to maximize the recall rate of abnormal samples (poisoned samples), that is, to minimize the false negative probability of abnormal samples, class weights can be added to the loss function of the first support vector machine model to impose a greater penalty on the error of "classifying an abnormal sample as normal". For example, the loss function of the first support vector machine model can take the following form: ; in, Represents the loss function. Represents the feature weight vector. Indicates weight, This represents the feature vector of a single sample. Represents the decision function. It was determined to be a state of poisoning. This is considered a normal state. This is an L2 regularization term used to prevent the model from overfitting; Indicates the penalty coefficient. This represents the total number of samples in the first sample dataset. This represents the class weight of the i-th sample, where k=0 represents a normal sample. k=1 represents a poisoned sample, corresponding to , This represents the true label of the sample (0 or 1).

[0060] In the above formula, when the first support vector machine model misclassifies a poisoned sample as a normal sample... , If positive, then multiply by The total loss will increase sharply, prompting model optimization. and This reduces such errors; conversely, when the first support vector machine model misclassifies normal samples as poisoned samples, although it will also incur losses, The loss ratio is low, allowing for a small number of misclassifications. Therefore, by setting the above loss function, the first support vector machine model is made to prioritize correcting normal samples as poisoned samples over correcting poisoned samples during training, thus further improving the reliability of catalyst poisoning detection.

[0061] Based on the same inventive concept, this application also provides a phosphine production tail gas purification control device for implementing the above-mentioned phosphine production tail gas purification control method. The solution provided by this device is similar to the solution described in the above method; therefore, the specific limitations in one or more embodiments of the phosphine production tail gas purification control device provided below can be found in the limitations of the phosphine production tail gas purification control method described above, and will not be repeated here.

[0062] This application provides a tail gas purification and control device for phosphine production, such as... Figure 2 As shown, the tail gas purification and control device 20 for phosphine production includes: a data acquisition module 21, a decision module 22, and a control and regulation module 23.

[0063] The data acquisition module 21 is used to acquire the operating status data of the exhaust gas purification system at multiple time points within the current period; the operating status data includes the inlet gas concentration, the outlet gas concentration, and the inlet and outlet pressure difference; The decision module 22 is used to determine the execution order of the absorbent flow rate regulation, catalyst bed temperature regulation and gas flow rate regulation in the exhaust gas purification system based on the operating status data at multiple time points, as well as the regulation direction of each of the absorbent flow rate regulation, catalyst bed temperature regulation and gas flow rate regulation. The control adjustment module 23 is configured to perform control adjustment of the tail gas purification system based on the execution sequence and the adjustment direction.

[0064] In an embodiment of the present application, the decision module 22 is specifically configured to: if the average value of the inlet gas concentration in the current period is greater than the preset first concentration threshold value, the rate of change of the inlet gas concentration in the current period is greater than the preset rate of change threshold value, and the average value of the outlet gas concentration in the current period is greater than the preset second concentration threshold value, then the step of reducing the gas flow rate is performed first, the step of increasing the absorbent flow rate is performed second, and the step of increasing the catalyst bed temperature is performed last; if the rate of change of the inlet gas concentration in the current period is less than or equal to the preset rate of change threshold value, the average value of the outlet gas concentration in the current period is greater than the preset second concentration threshold value, and the inlet and outlet pressure difference is greater than the preset pressure difference threshold value, then the step of reducing the gas flow rate is performed first, the step of increasing the catalyst bed temperature is performed second, and the step of increasing the absorbent flow rate is performed last.

[0065] In an embodiment of the present application, the decision module 22 is specifically further configured to: perform the parameter adjustment operation multiple times until a stop condition is met; wherein each parameter adjustment operation includes: obtaining the outlet gas concentration at the latest multiple time points, and calculating the average value of the latest outlet gas concentration based on the outlet gas concentration at the latest multiple time points; reducing the gas flow rate by a first step length; increasing the absorbent flow rate by a second step length after a set time length of reducing the gas flow rate; increasing the catalyst bed temperature by a third step length after a set time length of increasing the absorbent flow rate; the first step length, the second step length, and the third step length are in a positive correlation with the average value of the latest outlet gas concentration; the stop condition is that the average value of the latest outlet gas concentration is less than or equal to a preset third concentration threshold value; the third concentration threshold value is less than the second concentration threshold value.

[0066] In an embodiment of the present application, the tail gas purification system includes a pretreatment unit, a catalyst bed, and a catalyst regeneration device; before performing the control adjustment of the tail gas purification system based on the execution sequence and the adjustment direction, the control adjustment module 23 is specifically configured to: obtain the working parameters of the catalyst bed; determine the working state of the catalyst in the catalyst bed based on the working parameters of the catalyst bed; the working state of the catalyst includes a normal state, a mild poisoning state, a moderate poisoning state, or a severe poisoning state; if the working state of the catalyst is the mild poisoning state, adjust the working parameters of the pretreatment unit to intercept the poison. If the working state of the catalyst is the moderate poisoning state, the catalyst regeneration device is started.

[0067] In an embodiment of the present application, the control adjustment module 23 is specifically further configured to: perform feature extraction on the working parameters of the catalytic bed to obtain operation characteristic data of the catalytic bed; identify the catalyst as being in a normal state or a poisoning state based on the operation characteristic data of the catalytic bed and through a binary classification model; if the catalyst is in a poisoning state, identify the catalyst as being in a mild poisoning state, a moderate poisoning state or a severe poisoning state based on the operation characteristic data of the catalytic bed and through a multi-classification model.

[0068] In an embodiment of the present application, the binary classification model is a first support vector machine model, and the multi-classification model is a second support vector machine model; the first support vector machine model is trained based on a first sample data set, and the second support vector machine model is obtained based on a second sample data set and an expanded sample data set; the second sample data includes sample data of a mild poisoning state, sample data of a moderate poisoning state and sample data of a severe poisoning state, and the first sample data set includes sample data of a normal state and the second sample data set; the control adjustment module 23 is specifically further configured to: select, from all support vectors of the first support vector machine model, support vectors corresponding to poisoning states as first target support vectors; perform feature extraction on the sample data of the severe poisoning state to obtain a plurality of feature vectors; for each first target support vector, calculate the similarity between the first target support vector and each of the plurality of feature vectors, and if there is a feature vector with a similarity greater than a similarity threshold, the first target support vector is taken as a second target support vector; add random disturbance to each second target support vector to obtain the expanded sample data set.

[0069] In an embodiment of the present application, the working parameters of the catalytic bed include the inlet gas concentration and the outlet gas concentration of the catalytic bed, and the operation characteristic data of the catalytic bed includes an actual catalytic efficiency; the control adjustment module 23 is specifically further configured to: determine an initial catalytic efficiency based on the inlet gas concentration and the outlet gas concentration of the catalytic bed; determine a load correction coefficient based on the relative size of the inlet gas concentration of the catalytic bed and a preset standard concentration; correct the initial catalytic efficiency based on the load correction coefficient to obtain the actual catalytic efficiency.

[0070] Referring to Figure 3 , Figure 3A schematic block diagram of an electronic device is provided in an embodiment of the present application. As shown in the figure Figure 3 The electronic device 300 in the embodiment can include one or more processors 301, one or more input devices 302, one or more output devices 303, and one or more memories 304. The above-mentioned processor 301, input device 302, output device 303, and memory 304 can complete communication with each other through a communication bus 305. The memory 304 is configured to store a computer program, and the computer program includes program instructions. The processor 301 is configured to execute the program instructions stored in the memory 304. The processor 301 is configured to invoke the program instructions to execute the functions of each module / unit in the above-mentioned device embodiments, for example Figure 2 the functions of the data acquisition module 21, decision module 22, and control adjustment module 23 shown in the figure.

[0071] It should be understood that, in the embodiments of the present application, the processor 301 can be a central processing unit (CPU), and the processor can also be other general-purpose processors, digital signal processors (DSPs), application specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor.

[0072] The input device 302 can include a touchpad, a fingerprint acquisition sensor (used to acquire fingerprint information and direction information of a fingerprint of a user), a microphone, etc., and the output device 303 can include a display (LCD, etc.), a loudspeaker, etc.

[0073] The memory 304 can include read-only memory and random access memory, and provide instructions and data for the processor 301. A portion of the memory 304 can also include non-volatile random access memory. For example, the memory 304 can also store preset constants such as the first concentration threshold, the rate threshold, and the second concentration threshold.

[0074] In specific implementations, the processor 301, input device 302, and output device 303 described in the embodiments of the present application can execute the implementation manners described in the tail gas purification control method for hydrogen phosphide production provided by the embodiments of the present application, and can also execute the implementation manners of the electronic device described in the embodiments of the present application, which will not be described here.

[0075] In another embodiment of the present application, a computer readable storage medium is provided, which stores a computer program. The computer program includes program instructions, which, when executed by a processor, implement all or part of the processes of the above-mentioned embodiment methods. The computer program can also instruct related hardware to complete the implementation. The computer program can be stored in a computer readable storage medium. When the computer program is executed by the processor, the steps of the above-mentioned various method embodiments can be implemented. The computer program includes computer program code, which can be in the form of source code, object code, executable files or some intermediate form. The computer readable medium can include any entity or device capable of carrying the computer program code, recording medium, U disk, mobile hard disk, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signal, telecommunication signal and software distribution medium, etc.

[0076] The computer readable storage medium can be an internal storage unit of the electronic device of any of the preceding embodiments, such as a hard disk or a memory of the electronic device. The computer readable storage medium can also be an external storage device of the electronic device, such as a plug-in hard disk, a smart media card (SMC), a secure digital (SD) card, a flash card, etc. Further, the computer readable storage medium can include both the internal storage unit and the external storage device of the electronic device. The computer readable storage medium is used to store the computer program and other programs and data required by the electronic device. The computer readable storage medium can also be used to temporarily store data that has been output or will be output.

[0077] Those skilled in the art can appreciate that the modules / units and algorithm steps of the examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software or a combination of both. In order to clearly illustrate the interchangeability of hardware and software, the components and steps of the examples have been described in general terms in the above description. Whether the functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. A person skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present application.

[0078] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the electronic device and the units described above can refer to the corresponding processes in the above-mentioned method embodiments, which will not be described here.

[0079] In several embodiments provided in the present application, it should be understood that the disclosed electronic device and method can be implemented in other manners. For example, the division of the above-described apparatus embodiments is merely an example, and there can be other division manners. For example, multiple modules or units can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed mutual couplings or direct couplings or communication connections can be indirect couplings or communication connections through some interfaces, or can be in electrical, mechanical or other forms.

[0080] The modules or units illustrated as separate parts can or can not be physically separate, and the parts illustrated as modules or units can or can not be physical modules or units, i.e., can be located in one place, or can be distributed on multiple network modules or units. Some or all of the modules or units can be selected according to actual needs to achieve the purposes of the embodiments of the present application.

[0081] In addition, each functional module / unit in each embodiment of the present application can be integrated into a processing module / unit, or each module / unit can exist physically separately, or two or more modules / units can be integrated into one module / unit. The integrated module / unit can be implemented in the form of hardware or in the form of a software functional module / unit.

[0082] The above is merely specific embodiments of the present application, and the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A method for controlling tail gas purification for phosphine production, characterized by, The method comprises: acquiring operation state data of the tail gas purification system at multiple time points in a current period; the operation state data comprises inlet gas concentration, outlet gas concentration and pressure difference between inlet and outlet; determining execution sequence of absorbent flow adjustment, catalyst bed temperature adjustment and gas flow rate adjustment in the tail gas purification system based on the operation state data at the multiple time points, and adjustment direction of each of the absorbent flow adjustment, the catalyst bed temperature adjustment and the gas flow rate adjustment; controlling and adjusting the tail gas purification system based on the execution sequence and the adjustment direction.

2. The tail gas purification control method for production of phosphine according to Claim 1, characterized by, The method comprises: if the average value of the inlet gas concentration in the current period is greater than a preset first concentration threshold, the rate of change of the inlet gas concentration in the current period is greater than a preset rate of change threshold, and the average value of the outlet gas concentration in the current period is greater than a preset second concentration threshold, first performing the step of reducing the gas flow rate, then performing the step of increasing the absorbent flow rate, and finally performing the step of increasing the catalyst bed temperature; if the rate of change of the inlet gas concentration in the current period is less than or equal to the preset rate of change threshold, the average value of the outlet gas concentration in the current period is greater than the preset second concentration threshold, and the pressure difference between the inlet and the outlet is greater than a preset pressure difference threshold, first performing the step of reducing the gas flow rate, then performing the step of increasing the catalyst bed temperature, and finally performing the step of increasing the absorbent flow rate.

3. The tail gas purification control method for hydrogen phosphide production according to claim 2, characterized by, The method comprises: performing the parameter adjustment operation multiple times until a stop condition is met; each parameter adjustment operation comprises: acquiring the outlet gas concentration at the latest multiple time points, and calculating the average value of the outlet gas concentration at the latest multiple time points based on the outlet gas concentration at the latest multiple time points; reducing the gas flow rate by a first step length; after a set time length for reducing the gas flow rate, increasing the absorbent flow rate by a second step length; after a set time length for increasing the absorbent flow rate, increasing the catalyst bed temperature by a third step length; the first step length, the second step length and the third step length are in a positive correlation with the average value of the outlet gas concentration at the latest multiple time points; the stop condition is that the average value of the outlet gas concentration at the latest multiple time points is less than or equal to a preset third concentration threshold; the third concentration threshold is less than the second concentration threshold.

4. The tail gas purification control method for hydrogen phosphide production according to Claim 1, characterized by, The tail gas purification system comprises a pretreatment unit, a catalyst bed and a catalyst regeneration device; before the controlling and adjusting the tail gas purification system based on the execution sequence and the adjustment direction, the method further comprises: acquiring working parameters of the catalyst bed; determining the working state of the catalyst in the catalyst bed based on the working parameters of the catalyst bed; the working state of the catalyst comprises normal state, mild poisoning state, moderate poisoning state or severe poisoning state; if the working state of the catalyst is a mild poisoning state, adjusting the working parameters of the pretreatment unit to intercept the poison; if the working state of the catalyst is a moderate poisoning state, starting the catalyst regeneration device.

5. The tail gas purification control method for production of phosphine according to claim 4, characterized by, The working state of the catalyst in the catalytic bed is determined based on the working parameters of the catalytic bed, comprising: characteristic extraction is performed on the working parameters of the catalytic bed to obtain operating characteristic data of the catalytic bed; based on the operating characteristic data of the catalytic bed, and through a binary classification model, the catalyst is identified as a normal state or a poisoning state; if the catalyst is in a poisoning state, based on the operating characteristic data of the catalytic bed, and through a multi-classification model, the catalyst is identified as a mild poisoning state, a moderate poisoning state or a severe poisoning state.

6. The tail gas purification control method for production of phosphine according to Claim 5, characterized by, The binary classification model is a first support vector machine model, and the multi-classification model is a second support vector machine model; the first support vector machine model is trained based on a first sample data set, and the second support vector machine model is obtained based on a second sample data set and an expanded sample data set; the second sample data includes sample data of a mild poisoning state, sample data of a moderate poisoning state and sample data of a severe poisoning state, and the first sample data set includes sample data of a normal state and the second sample data set; The determination method of the expanded sample data set comprises: selecting the support vectors corresponding to the poisoning state from all the support vectors of the first support vector machine model as first target support vectors; characteristic extraction is performed on the sample data of the severe poisoning state to obtain a plurality of feature vectors; for each first target support vector, the similarity between the first target support vector and the plurality of feature vectors is calculated, and if there is a feature vector with a similarity greater than a similarity threshold, the first target support vector is taken as a second target support vector; a random disturbance is added to each second target support vector to obtain the expanded sample data set.

7. The tail gas purification control method for production of phosphine according to claim 5, characterized by, The working parameters of the catalytic bed include the inlet gas concentration and the outlet gas concentration of the catalytic bed, and the operating characteristic data of the catalytic bed includes the actual catalytic efficiency, and the determination method of the actual catalytic efficiency comprises: determining the initial catalytic efficiency based on the inlet gas concentration and the outlet gas concentration of the catalytic bed; determining a load correction coefficient based on the relative size of the inlet gas concentration of the catalytic bed and the preset standard concentration; correcting the initial catalytic efficiency based on the load correction coefficient to obtain the actual catalytic efficiency.

8. A tail gas purification control device for phosphine production, characterized by comprising: a phosphine production device; a tail gas purification device; and a control device. comprising: a data acquisition module for acquiring operating state data of the tail gas purification system at a plurality of time points in a current period; The operating state data includes inlet gas concentration, outlet gas concentration and inlet and outlet pressure difference; a decision module for determining the execution order of the absorbent flow adjustment, the catalyst bed temperature adjustment and the gas flow rate adjustment in the tail gas purification system based on the operating state data at the plurality of time points, and the adjustment direction of each of the absorbent flow adjustment, the catalyst bed temperature adjustment and the gas flow rate adjustment; A control adjustment module is configured to perform control adjustment of the tail gas purification system based on the execution sequence and the adjustment direction.

9. An electronic device comprising a memory, a processor, and a computer program stored in the memory and running on the processor, characterized in that, The computer program, when executed by the processor, implements the steps of the method according to any one of claims 1 to 7.

10. A computer-readable storage medium storing a computer program, the computer program comprising instructions that, when executed by a computer, cause the computer to perform the method of any one of claims 1 to 9. The computer program, when executed by the processor, implements the steps of the method according to any one of claims 1 to 7.

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