Cleaning frame for cleaning irregular semiconductor parts and working method thereof

Abstract

The invention relates to the technical field of part cleaning in the semiconductor industry, in particular to a cleaning frame for cleaning irregular semiconductor parts and a working method thereof.The cleaning frame comprises a main frame, a plurality of supporting strips, a pair of cross beams and interval replacement plates; the main frame is of a frame structure, two horizontal sliding ways are correspondingly formed in frames on the front face and the rear face respectively, and the frame structure is arranged on the bottom face in parallel in the front-back direction. The supporting strips are installed on the bottom face of the main frame, and parts are placed on the supporting strips and supported from the bottom for high-pressure cleaning. Spacing replacement plates are installed on the cross beams, the two ends of the cross beams are matched with the sliding ways, the distance between the two spacing replacement plates is adjusted, and the fixed part is clamped. The cleaning frame has universality for irregular-shaped parts, kidney-shaped sliding ways are designed on the side walls of the cleaning frame main frame, accessories for supporting the parts are replacement plates with different interval sizes, the replacement plates are high in universality, and the cleaning frame has the advantage that products are stable due to the fact that the bottoms support and the two sides are oppositely clamped; and the partition plates are locked on the cross beams through screws, so that the advantages of quick adjustment and stable support are achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor industry parts cleaning, in particular to a cleaning frame for irregular semiconductor parts cleaning and a working method thereof. BACKGROUND

[0002] In the semiconductor manufacturing process, the cleaning process is the main step to ensure the cleanliness of the chip surface, and stable clamping is an important part of the cleaning work. In the machining process, with the mass production of parts, the size, shape and thickness of the parts vary. If the traditional single high-pressure cleaning method is used, not only the cleaning effect is poor, but also it is very wasteful of manpower and resources, which seriously affects the production efficiency and the cleaning effect, and is easy to affect delivery. In the overall cycle of part production, it is necessary to ensure fast and batch completion of part cleaning, improve cleaning efficiency, reduce labor cost and improve production capacity. Therefore, it is necessary to ensure the cleanliness of the parts as an important indicator in the production link. SUMMARY

[0003] To solve the above technical problems, the present application provides a cleaning frame for irregular semiconductor parts cleaning and a working method thereof.

[0004] The specific technical solutions are as follows: A cleaning frame for irregular semiconductor parts cleaning, comprising a main frame, a plurality of support bars, a pair of cross beams and a spacing replacement plate; the main frame is a frame structure, two horizontal slides are respectively formed on the front and rear frames, and the bottom surface is provided with a frame structure in parallel along the front and rear directions; the support bars are installed on the bottom surface of the main frame, the parts are placed on the top, and the parts are supported from the bottom for high-pressure cleaning; the spacing replacement plate is installed on the cross beam, and the two ends are matched with the slide to adjust the distance between the two spacing replacement plates and clamp the parts.

[0005] The slide is a waist groove shape.

[0006] The main frame is vertically installed with a hanging rod on the left and right two end surfaces, and a bent hook is installed at the top end of the hanging rod.

[0007] A threaded hole A is formed on the bent hook.

[0008] The support bar is a triangular prism shape, a plurality of groups of wire sleeve holes A are uniformly formed on the top, a through hole is formed on the frame structure of the bottom surface of the main frame, and the through hole is installed with a stainless steel screw, and the upper edge is processed into a top R angle.

[0009] The cross beam is processed into a long waist groove along the length direction, threaded holes B are formed at both ends, and the cross beam is installed on the slide through butterfly screws.

[0010] The interval replacement plate comprises a 20-interval replacement plate and a 40-interval replacement plate, and a plurality of vertical 20-interval waist-shaped bosses and 40-interval waist-shaped bosses are arranged on the 20-interval replacement plate and the 40-interval replacement plate respectively according to the size of the parts, a row of wire sleeve holes B and wire sleeve holes C are evenly arranged at the upper and lower edges respectively, and the 20-interval replacement plate and the 40-interval replacement plate are installed with the long waist grooves of the two beams through stainless steel screws; the parts are arranged between the adjacent two 20-interval waist-shaped bosses or 40-interval waist-shaped bosses.

[0011] The number of the 20-interval waist-shaped bosses and the 40-interval waist-shaped bosses is 16 and 10 respectively.

[0012] The material of the main frame and the beam is 304 stainless steel, which is formed by welding 20*20*3mm hollow square steel; the material of the supporting strip and the interval replacement plate is Teflon.

[0013] The working method of the universal cleaning frame for irregular semiconductor parts cleaning comprises the following steps: (1) The supporting strip is installed on the bottom surface of the main frame through stainless steel screws to support the semiconductor parts for high-pressure cleaning, the bottom support enhances the supporting strength of the tooling and guarantees the stability of the parts during the cleaning process; (2) According to the thickness of the parts, the 20-interval replacement plate or the 40-interval replacement plate is selected, and the wire sleeve holes B or the wire sleeve holes C are installed with the long waist grooves of the two beams through stainless steel screws; (3) The threaded holes B at the two ends of the two beams are installed on the slide through butterfly screws, the parts are arranged between the adjacent two 20-interval waist-shaped bosses or 40-interval waist-shaped bosses, the distance between the two beams is adjusted according to the size of the parts, so that the distance between the two interval replacement plates is adjusted, the parts are clamped and fixed, and then the butterfly screws are locked to ensure the stability of the parts during high-pressure cleaning; (4) The cleaning frame is hung up for cleaning through the bent hooks, the corresponding top wire is used to top dead center after hanging, the stability of the cleaning frame is guaranteed, the cleaning process is free of dead angles, the upper surface of the parts is washed by using a high-pressure water gun, the water flows through the parts and flows out from the center hole of the workbench, so that the surface of the parts is free of impurities.

[0014] Compared with the prior art, the present application has the following beneficial technical effects: The present application is aimed at irregularly shaped parts, and the thickness and size of the parts are different. In order to guarantee the universality of the cleaning tool, the waist-shaped slide is designed on the side wall of the cleaning frame main frame, the supporting parts are the replacement plates with different interval sizes, the replacement plates have high universality and have the advantages of bottom support and clamping on both sides to stabilize the product; the interval plate is locked on the beam through screws, the beam side is connected with the cleaning frame main frame through butterfly screws, the beam is adjusted on the slide according to the size of the parts, and then the butterfly screws are used to top dead center to fix it. It has the advantages of quick adjustment and stable support.

[0015] The jig single piece used in the application is a plate type, which can be completed by using a three-axis machine tool. The frame body is welded by using hollow square steel. The overall jig realizes low cost and high efficiency. The various accessories are connected by using screws and nuts. The cost is low, and the locking and fastening are reliable. The overall structure is made of 304 stainless steel, which is convenient to maintain, stable in structure, and convenient to use on site. The slide way design of the cleaning frame main frame can adjust and replace the plate spacing according to the size of the parts, is suitable for different sizes of parts, and has strong universality. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a schematic diagram of the three-dimensional structure of the cleaning frame of the application Figure One ; Figure 2 is a schematic diagram of the three-dimensional structure of the cleaning frame of the application Figure Two ; Figure 3 is a schematic diagram of the three-dimensional structure of the main frame of the application Figure 4 is a schematic diagram of the three-dimensional structure of the support bar of the application Figure 5 is a schematic diagram of the three-dimensional structure of the cross beam of the application Figure 6 is a schematic diagram of the three-dimensional structure of the 20-interval replacement plate of the application Figure 7 is a schematic diagram of the three-dimensional structure of the 40-interval replacement plate of the application Figure 8 is a schematic diagram of the assembly of the cleaning frame and the parts of the application In the figure, 1 is a main frame; 11 is a slide way; 12 is a hanging rod; 13 is a hook; 14 is a threaded hole A; 15 is a through hole; 2 is a support bar; 21 is a wire sleeve hole A; 22 is a top R angle; 3 is a cross beam; 31 is a long waist groove; 32 is a threaded hole B; 4 is a 20-interval replacement plate; 41 is a wire sleeve hole B; 42 is a 20-interval waist-shaped boss; 5 is a 40-interval replacement plate; 51 is a wire sleeve hole C; 52 is a 40-interval waist-shaped boss; 6 is a butterfly screw; 7 is a stainless steel screw; and 8 is a part. DETAILED DESCRIPTION

[0017] The application will be described in detail below with reference to the drawings, but the protection scope of the application is not limited by the drawings.

[0018] Figure 1 is a schematic diagram of the three-dimensional structure of the cleaning frame of the application Figure One , Figure 2 is a schematic diagram of the three-dimensional structure of the cleaning frame of the application Figure Two , Figure 3 is a schematic diagram of the three-dimensional structure of the main frame of the application Figure 4 is a schematic diagram of the three-dimensional structure of the support bar of the application Figure 5It is a perspective view of the beam of the present application, Figure 6 It is a perspective view of the 20 interval replacement plate of the present application, Figure 7 It is a perspective view of the 40 interval replacement plate of the present application, as shown in the figure: the universal cleaning frame for irregular semiconductor parts cleaning of the present application comprises a main frame 1, a plurality of support bars 2, a pair of beams 3 and interval replacement plates; the main frame 1 is a frame structure, two horizontal waist groove-shaped slides are respectively formed on the front and back frames, and the bottom surface is provided with a frame structure in parallel along the front and back directions; the left and right two end surfaces of the main frame 1 are vertically installed with hanging rods 12, the top end of the hanging rod 12 is installed with a bent hook 13, a threaded hole A14 is formed on the bent hook 13, which is used for suspending the corresponding top pin and ensuring the stability of the cleaning frame. The cleaning frame is hung up for cleaning, and dead angles are avoided in the cleaning process. The support bar 2 is installed on the bottom surface of the main frame 1, and the semiconductor parts 8 are placed thereon for high-pressure cleaning; the support bar 2 is in the shape of a triangular prism, a plurality of groups of wire sleeve holes A21 are uniformly formed thereon, a through hole 15 is formed on the frame structure of the bottom surface of the main frame 1, and the support bar 2 is installed through the through hole 15 by means of a stainless steel screw 7, a top R corner 22 is processed on the upward one edge to reduce the contact area of the parts and the jig and increase the cleaning area of the parts. The interval replacement plate is installed on the beam 3, the two ends are matched with the slide, the interval between the two interval replacement plates is adjusted, and the semiconductor parts 8 are clamped and fixed; the beam 3 is processed into a long waist groove 31 along the length direction, threaded holes B32 are formed at the two ends, and the beam 3 is installed on the slide through a butterfly screw 6; the interval replacement plate comprises a 20 interval replacement plate 4 and a 40 interval replacement plate 5, which are selected according to the size of the parts, the 20 interval replacement plate 4 and the 40 interval replacement plate 5 are respectively provided with 16 vertical 20 interval waist-shaped bosses 42 and 10 vertical 40 interval waist-shaped bosses 52, a row of wire sleeve holes B41 and wire sleeve holes C51 are uniformly formed at the upper and lower edges, and the 20 interval replacement plate 4 and the 40 interval replacement plate 5 are installed through the wire sleeve holes B41 and the wire sleeve holes C51 by means of the stainless steel screw 7 and the long waist grooves 31 of the two beams 3; the semiconductor parts 8 are placed between the adjacent two 20 interval waist-shaped bosses 42 or 40 interval waist-shaped bosses 52.

[0019] The main frame 1 and the beam 3 are made of 304 stainless steel and are formed by welding 20x20x3mm hollow square steel; the support bar 2 and the interval replacement plate are made of Teflon to avoid the risk of collision when the parts contact the cleaning frame.

[0020] Figure 8 It is an assembly view of the cleaning frame and the parts, as shown in the figure: the working method of the universal cleaning frame for irregular semiconductor parts cleaning of the present application, which specifically comprises the following steps: (1) the support bar 2 is installed on the bottom surface of the main frame 1 through the stainless steel screw 7, the semiconductor parts are supported for high-pressure cleaning, the bottom support enhances the support strength of the tooling and ensures the stability of the parts during the cleaning process; (2) According to the thickness of the part 8, select 20 interval replacement plate 4 or 40 interval replacement plate 5, through the stainless steel screw 7 install the wire sleeve hole B41 or the wire sleeve hole C51 with the long waist groove 31 of two beams 3; (3) The threaded hole B32 at both ends of the two beams 3 is installed on the slide through the winged screw 6, the part 8 is placed between the two 20 interval waist-shaped bosses 42 or the 40 interval waist-shaped bosses 52, according to the size of the part 8, adjust the distance between the two beams 3, so as to adjust the distance between the two interval replacement plates, after clamping and fixing the part 8, lock the winged screw 6, ensure the stability of the part 8 during high pressure cleaning; (4) Hang the cleaning frame by the hook 13 for cleaning, after hanging, use the corresponding jack to jack up, ensure the stability of the cleaning frame, ensure that there is no dead angle in the cleaning process, use the high pressure water gun to wash the upper surface of the part, the water flow through the part, flow out from the center hole of the workbench, so that the surface of the part is free of impurities.

Claims

1. A cleaning frame for cleaning of irregular semiconductor parts, characterized in that: The utility model provides a semiconductor parts cleaning device, including main frame (1), a plurality of support strip (2), a pair of crossbeam (3) and interval replacement board, the main frame (1) is frame structure, and two horizontal slide (11) are set up respectively on the frame of front and back surface, and the frame structure is arranged in parallel along the front and back direction on the bottom surface, the support strip (2) is installed on the bottom surface of main frame (1), and the upper surface places parts (8), and the bottom supports parts (8) to clean, interval replacement board is installed on the crossbeam (3), and two ends cooperate with slide (11), and the interval between the interval replacement board of two is adjusted, and parts (8) are clamped and fixed.

2. The cleaning frame for cleaning of irregular semiconductor parts according to claim 1, wherein: The slide (11) is a waist groove shape.

3. The cleaning frame for cleaning of irregular semiconductor parts according to claim 1, wherein: The main frame (1) vertically installs the hanging rod (12) on the left and right two end surfaces, and the top end of the hanging rod (12) is installed with a bent hook (13).

4. The cleaning frame for cleaning of irregular semiconductor parts according to claim 3, wherein: Threaded holes A (14) are formed on the bent hook (13).

5. The cleaning frame for cleaning of irregular semiconductor parts according to claim 1, wherein: The support strip (2) is in the shape of a triangular prism, a plurality of groups of wire sleeve holes A (21) are uniformly formed on the upper surface, a through hole (15) is formed on the frame structure of the bottom surface of the main frame (1), and the support strip (2) is installed with the through hole (15) through a stainless steel screw (7), and an R angle (22) is formed on the upper one edge.

6. The cleaning frame for cleaning of irregular semiconductor parts according to claim 1, wherein: The crossbeam (3) is processed into a long waist groove (31) along the length direction, threaded holes B (32) are formed at both ends, and the crossbeam (3) is installed on the slide (11) through a butterfly screw (6).

7. The cleaning frame for cleaning of irregular semiconductor parts according to claim 1, wherein: The interval replacement board includes a 20-interval replacement board (4) and a 40-interval replacement board (5), which are selected according to the size of the parts (8), a plurality of vertical 20-interval waist-shaped bosses (42) and 40-interval waist-shaped bosses (52) are formed on the 20-interval replacement board (4) and the 40-interval replacement board (5) respectively, a row of wire sleeve holes B (41) and wire sleeve holes C (51) are uniformly formed at the upper and lower edges respectively, and the 20-interval replacement board (4) and the 40-interval replacement board (5) are installed with the long waist grooves (31) of the two crossbeams (3) through stainless steel screws (7); the parts (8) are placed between the adjacent two 20-interval waist-shaped bosses (42) or 40-interval waist-shaped bosses (52).

8. The cleaning frame for cleaning of irregular semiconductor parts according to claim 7, wherein: The number of the 20-interval waist-shaped bosses (42) and the 40-interval waist-shaped bosses (52) is 16 and 10 respectively.

9. The cleaning frame for cleaning of irregular semiconductor parts according to claim 1, wherein: The main frame (1) and the crossbeam (3) are made of 304 stainless steel and are formed by welding 20x20x3mm hollow square steel; the support strip (2) and the interval replacement board are made of Teflon.

10. The method of claim 1, wherein the cleaning frame is used for cleaning irregular semiconductor parts. Specifically, the following steps are included: (1) install the support strip (2) on the bottom surface of the main frame (1) through a stainless steel screw (7) to support the semiconductor parts (8) for high-pressure cleaning, enhance the support strength of the tooling at the bottom, and ensure the stability of the parts (8) during the cleaning process; (2) select the 20-interval replacement board (4) or the 40-interval replacement board (5) according to the thickness of the parts (8), and install the wire sleeve holes B (41) or the wire sleeve holes C (51) with the long waist grooves (31) of the two crossbeams (3) through stainless steel screws (7). (3) the threaded holes B (32) at both ends of the two beams (3) are installed on the slide (11) through the wing nuts (6), the parts (8) are placed between the two 20 interval waist-shaped bosses (42) or 40 interval waist-shaped bosses (52), according to the size of the parts (8), the distance between the two beams (3) is adjusted, so as to adjust the distance between the two interval replacement plates, after clamping and fixing the parts (8), the wing nuts (6) are locked to ensure the stability of the parts (8) during high-pressure cleaning; (4) the cleaning frame is hung up for cleaning through the hooks (13), and after hanging up, the corresponding jacks are used to jack up to ensure the stability of the cleaning frame and ensure that there is no dead angle in the cleaning process. The upper surface of the part (8) is washed by using a high-pressure water gun, the water flows through the part (8), and flows out from the center hole of the workbench, so that the surface of the part (8) is free of impurities.

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