Nanoscale powder preparation equipment and process method
By integrating high vacuum, induction heating, and high-speed collection into a nanoscale powder preparation equipment and process, the problems of complex equipment, high cost, low yield, and easy agglomeration of nanoparticles in existing technologies have been solved. This has enabled efficient and low-cost nanoscale powder preparation, with the ability to precisely control the diameter of nanoparticles and improve dispersibility.
Patent Information
- Application Number
- CN202511603693.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-04
- Publication Date
- 2026-01-23
AI Technical Summary
Existing methods for preparing nanoscale powders suffer from problems such as complex and costly equipment, low yield, easy agglomeration of nanoparticles, and introduction of impurities, making it difficult to meet the needs of large-scale industrial production.
The equipment and process for preparing nanoscale powders integrates high vacuum, induction heating, high-speed collection, and intelligent control. High vacuum is achieved through rotary vane pumps and molecular pumps, and metals are heated to above 1700°C using induction heaters. Combined with the high-speed rotation of the powder collection body and the multi-layered chipper plate structure, efficient collection and dispersion of nanoparticles are achieved.
It achieves efficient, low-cost, and high-quality preparation of nanoscale powders, solving the problems of high cost, wide diameter distribution, low yield, agglomeration, and impurity introduction. It can precisely control the diameter of nanoparticles and improve dispersibility.
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Figure CN121373440A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of nanomaterial preparation technology, specifically to a nanoscale powder preparation equipment and process. Background Technology
[0002] The raw materials for nanopowders are mainly metals, such as nickel, silver, copper, aluminum, and their related alloys, as well as oxides or nitrides of these metals, and some semiconductor materials with melting points below 2500℃. They have broad application prospects in many fields such as electronics, catalysis, and biomedicine. Currently, common methods for preparing nanopowders include physical vapor deposition, chemical precipitation, and mechanical ball milling.
[0003] However, these methods each have their limitations. Physical vapor deposition (PVD) involves complex equipment, high costs, and low yields, making it difficult to meet the demands of large-scale industrial production. Chemical precipitation methods produce nanoparticles that are prone to agglomeration, requiring complex subsequent processing for dispersion. While mechanical ball milling is relatively inexpensive, it easily introduces impurities during the milling process, affecting the purity and performance of the nanoparticles. Therefore, developing an efficient, low-cost equipment and process capable of preparing high-quality nanoscale powders is of significant practical importance. Summary of the Invention
[0004] Therefore, the present invention provides a nanoscale powder preparation equipment and process to solve the problems in the prior art.
[0005] To achieve the above objectives, the present invention provides the following technical solution: In a first aspect, a nanoscale powder preparation equipment includes a main platform, a metal evaporation component, a powder collection component, and a vacuum acquisition system. The main platform has an equipment body on its upper outer side, and the front end of the equipment body is fitted with a front door via a hinge. The equipment body has a vacuum chamber inside. A metal evaporation assembly is provided on the lower inner side of the main body of the equipment, and a powder collection assembly is provided in the middle of the main body of the equipment, located diagonally above the metal evaporation assembly. The main platform is equipped with a vacuum acquisition system, which consists of a rotary vane pump and a molecular pump. The rotary vane pump is installed inside the main platform, and the molecular pump is connected to the left side of the rotary vane pump. A vacuum pipeline is installed above the molecular pump, and the upper end of the vacuum pipeline extends into the main body of the equipment.
[0006] Furthermore, the upper middle part of the front door is provided with an observation screen and a front observation window from top to bottom.
[0007] Furthermore, the metal evaporation assembly includes an induction heater, an insulation layer, and an evaporation crucible. The evaporation crucible is placed on the bottom of the main body of the equipment via a workbench, and an insulation layer is provided on the outside of the evaporation crucible. The induction heater is connected to the left side of the insulation layer.
[0008] Furthermore, an upper cover is provided on the outer side of the upper end of the evaporation crucible, and a ceramic shielding layer is provided on the upper part of the upper cover to reduce the temperature at the top. The upper cover is provided with an upper outlet and a lower opening, and the size of the upper outlet is larger than the size of the lower opening, which is used to form a Laval nozzle form of crucible inner cavity, upper cover lower opening and upper outlet.
[0009] Furthermore, the powder collection assembly includes a powder collection body, a powder collection trough, and an additional collection trough. The powder collection body is installed in the middle of the inner side of the equipment body, and an external drive servo connected to the powder collection body is installed on the outer rear end of the equipment body. A powder collection trough is provided on the lower left side of the powder collection body, and the powder collection trough is integrated with the front door. An inclined pinion plate structure that contacts the powder collection body is provided on the upper right side of the powder collection trough. An additional collection trough located diagonally below the powder collection body is installed on the lower right side of the equipment body, and the additional collection trough is installed on the outer upper end of the vacuum pipeline.
[0010] Furthermore, the powder collecting body forms a rotating structure within the equipment body, and the powder collecting body is made of PTEF or a metal of the same material as the metal being prepared.
[0011] Furthermore, an external inflation assembly is installed through the side wall of the main body of the equipment.
[0012] Furthermore, a cryogenic control component is installed on the upper right side of the main platform, and a cryogenic capture ring is installed on the left side of the cryogenic control component, with the cryogenic capture ring located in the upper right of the main body of the equipment.
[0013] Furthermore, a control panel component is provided on the outside of the main platform, and an alarm device is installed on the upper part of the control panel component. Secondly, a method for preparing nanoscale powder includes the following steps: S1: Add the metal raw material for the powder to be prepared into the evaporation crucible, close the front door, start the rotary vane pump, evacuate the air in the main body of the equipment to 5 Pa, then start the molecular pump. When the vacuum degree of the vacuum chamber is evacuated to 0.1 Pa, start the induction heater. S2: Start the external drive servo to make it drive the powder collection body to start rotating slowly, and at the same time turn on the cryogenic control component to make it start working on the cryogenic collection ring. S3: The vacuum pressure inside the vacuum chamber drops to 5x10. -3After the temperature reaches above 1700℃, the heating power of the induction heater remains stable, and the preparation of nanopowder begins. S4: Adjust the rotation speed of the powder collecting body to 10-300m / min. At this time, the evaporated high-temperature metal is sprayed onto the surface of the powder collecting body through a Laval-like nozzle. S5: As the powder collecting body rotates, the material nanoparticles on the surface of the powder collecting body come into contact with the collecting structure. Through the compression between the powder collecting body and the hairpin plate and the multi-layer structure of the hairpin plate, the powder falls into the powder collecting tank. This process continues until the metal raw material in the evaporation crucible is completely evaporated. S6: Turn off the induction heater. The powder collection body continues to work until the temperature measured by the infrared temperature measurement system is lower than the melting point of the material being prepared. After the temperature of the evaporation crucible is lower than 100°C, nitrogen gas is introduced into the vacuum chamber through the external gas filling component. Then, the front door is opened and the powder in the powder collection tank is collected and transferred.
[0014] The present invention has the following advantages: By integrating technologies such as high vacuum, induction heating, high-speed collection and intelligent control, the present invention achieves efficient, low-cost, high-quality and flexible preparation of nanoscale powders, and solves the problems of high cost, wide diameter distribution, low yield, agglomeration and impurity introduction in existing methods.
[0015] Meanwhile, by adjusting the rotation speed of the powder collecting body, the diameter of nanoparticles can be precisely controlled; the multi-layered slab structure further breaks down and stratifies the particles, reducing agglomeration and improving particle dispersibility.
[0016] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. Attached Figure Description
[0017] To more intuitively illustrate the prior art and this application, exemplary drawings are provided below. It should be understood that the specific shapes and structures shown in the drawings should not generally be regarded as limiting conditions for implementing this application; for example, based on the technical concept disclosed in this application and the exemplary drawings, those skilled in the art are capable of making conventional adjustments or further optimizations to the addition / reduction / classification of certain units, their specific shapes, positional relationships, connection methods, size ratios, etc.
[0018] Figure 1 This is a front cross-sectional view of a nanoscale powder preparation equipment according to the present invention.
[0019] Figure 2 This is a side cross-sectional view of a nanoscale powder preparation equipment according to the present invention.
[0020] Figure 3This is a flowchart illustrating the implementation of a nanoscale powder preparation process according to the present invention.
[0021] Explanation of reference numerals in the attached figures: 1. Main platform; 2. Induction heater; 3. Insulation layer; 4. Evaporation crucible; 5. Front observation window; 6. Observation screen; 7. Front door; 8. Main body of equipment; 9. Powder collection main body; 10. Cryogenic trap ring; 11. Cryogenic control components; 12. Rear observation window; 13. Powder collection tank; 14. Baffle; 15. Auxiliary collection tank; 16. Vacuum pipeline; 17. Molecular pump; 18. Rotary vane pump; 19. External drive servo; 20. Control panel components; 21. Alarm device; 22. External inflation components. Detailed Implementation
[0022] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. It should be understood that these embodiments are merely for further explanation of the present invention and should not be construed as limiting the scope of protection of the present invention. Technical engineers in the field can make some non-essential improvements and adjustments to the present invention based on the above-described content. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0023] Please see Figure 1 and Figure 2 A nanoscale powder preparation equipment includes a main platform 1, a metal evaporation component, a powder collection component, and a vacuum acquisition system. The upper outer side of the main platform 1 is provided with an equipment body 8, and the front end of the equipment body 8 is equipped with a front door 7 via a hinge. A vacuum chamber is provided inside the equipment body 8. The vacuum chamber and internal pipelines are all made of stainless steel and are polished manually or electrolytically. The vacuum chamber is divided into upper and lower parts by a partition, and a baffle 14 and an additional collection tank 15 are set inside the vacuum chamber to facilitate the recovery of excess powder and reduce cross-contamination between materials during long-term operation of the equipment.
[0024] Meanwhile, the upper middle part of the front door 7 is provided with an observation screen 6 and a front observation window 5 from top to bottom, and the right middle part of the main platform 1 is provided with a rear observation window 12. The observation screen 6 can block the front observation window 5 to facilitate observation of the powder preparation. The external gas filling component 22 is connected to an external infrared temperature measuring unit to monitor the temperature inside the evaporation crucible 4 in real time, and the infrared temperature measuring unit is electrically connected to the control panel component 20.
[0025] A control panel assembly 20 is installed on the outer side of the main platform 1, and an alarm 21 is mounted on the upper end of the control panel assembly 20. The control panel assembly 20 is used to precisely control and monitor the operating parameters of the entire preparation equipment. It includes various sensors such as temperature sensors, pressure sensors, and flow sensors, as well as a controller and a display screen. The sensors monitor parameters such as temperature, pressure, and raw material flow in the reaction chamber in real time and transmit the data to the controller. The controller automatically adjusts various parts of the equipment according to preset parameters, and the display screen can display the operating status and parameters of the equipment in real time.
[0026] A cryogenic control component 11 is installed on the upper right side of the main platform 1, and a cryogenic trapping ring 10 is installed on the left side of the cryogenic control component 11. The cryogenic trapping ring 10 is located in the upper right of the equipment body 8. The cryogenic control component 11 can drive the cryogenic trapping ring 10 to keep its temperature below -150°C so as to remove water molecules inside the vacuum chamber more preferentially.
[0027] The main platform 1 is equipped with a vacuum acquisition system, which consists of a rotary vane pump 18 and a molecular pump 17. The rotary vane pump 18 is installed inside the main platform 1, and the molecular pump 17 is connected to the left side of the rotary vane pump 18. A vacuum pipeline 16 is installed above the molecular pump 17, and the upper end of the vacuum pipeline 16 extends into the equipment body 8.
[0028] The combination of molecular pump 17 and rotary vane pump 18 enables the vacuum level in the vacuum chamber to reach the order of 10⁻⁴ Pa, which ensures a high-cleanliness environment during the material preparation process and guarantees the high purity of the prepared powder.
[0029] The equipment body 8 has a metal evaporation component inside the lower side. The metal evaporation component includes an induction heater 2, a heat insulation layer 3 and an evaporation crucible 4. The evaporation crucible 4 is placed on the bottom of the equipment body 8 via a workbench, and the heat insulation layer 3 is provided on the outside of the evaporation crucible 4. The induction heater 2 is connected to the left side of the heat insulation layer 3.
[0030] Among them, the induction heater 2 adopts the electromagnetic induction heating PVD method, which uses the electromagnetic induction effect to heat the pre-prepared material to the evaporation temperature corresponding to the vacuum degree of the vacuum chamber. At the same time, the induction heater 2 and the front door 7 are integrated into one structure, which can be opened and closed in one piece with the front door 7 to facilitate equipment operation and later maintenance.
[0031] The required materials are placed in a high-purity ceramic evaporation crucible 4 in advance. The outside of the evaporation crucible 4 is a graphite heating element. During normal operation, the induction heater 2 drives the graphite heater to heat up. The operating frequency of the induction heater 2 is 100Hz-2500Hz. The heat of the graphite heating element is transferred to the internal evaporation material through heat conduction.
[0032] An upper cover is provided on the outer side of the upper end of the evaporation crucible 4, and a ceramic shielding layer is provided on the upper part of the upper cover to reduce the temperature at the top. The upper cover has an upper outlet and a lower opening, and the size of the upper outlet is larger than the size of the lower opening, which is used to form a Laval nozzle shape for the crucible cavity, the lower opening of the upper cover, and the upper outlet. The spray direction of the vaporized powder is controlled by the position and shape of the opening. Generally, the angle between the spray gas direction and the vertical direction is not less than 15°. This promotes vapor expansion, which is beneficial to the formation and directional deposition of nanoparticles.
[0033] The insulation layer 3 is generally composed of graphite felt / carbon felt, and the thickness of the insulation layer 3 is generally no more than 40mm; A powder collection component is located in the middle of the equipment body 8, which is diagonally above the metal evaporation component. The powder collection component includes a powder collection body 9, a powder collection tank 13, and an auxiliary collection tank 15. The powder collection body 9 is installed in the middle of the inner side of the equipment body 8, and an external drive servo 19 connected to the powder collection body 9 is installed on the outer rear end of the equipment body 8. A powder collection tank 13 is located on the lower left side of the powder collection body 9, and the powder collection tank 13 is integrated with the front door 7.
[0034] An auxiliary collection tank 15 is installed on the lower right side of the main body 8, which is located diagonally below the powder collection body 9, and the auxiliary collection tank 15 is installed on the upper outer side of the vacuum pipeline 16.
[0035] The powder collecting body 9 and powder collecting tank 13 are the main working units, with an additional collecting tank 15 used to improve material collection rate and ensure internal cleanliness. The powder collecting body 9 forms a rotating structure within the main equipment body 8, and is made of PTFE or a metal of the same material as the prepared metal. During nanomaterial preparation, the powder collecting body 9 is constantly rotating at high speed to achieve continuous acquisition and collection / separation of nanoscale materials. A water-cooling mechanism is installed inside the powder collecting body 9 to ensure that the temperature of the powder collecting body 9 does not exceed 200℃ and does not fall below 20℃ during powder collection.
[0036] The rotational speed of the powder collecting body 9 can be set by an external drive servo 19. With a fixed material evaporation rate, the rotational speed of the powder collecting body 9 directly determines the diameter of the prepared nanomaterials, and the relevant linear velocity during preparation is generally not less than 30 m / min. This achieves continuous evaporation, condensation, and collection of nanopowders, significantly improving production efficiency.
[0037] The powder collection trough 13 is integrated with the front door 7 to facilitate powder collection; An inclined pinion plate structure is provided on the upper right side of the powder collection tank 13, which contacts the powder collection body 9. The pinion plates adopt an interleaved structure with more than two layers, and the interlayer spacing generally does not exceed 10 times the diameter of the prepared material. During normal operation, the pinion plates are in close contact with the surface of the powder collection body 9 to achieve separation of the powder from the collection body and complete collection. The multi-layer structure of the pinion plate structure can further stratify and break down the nanoparticles, which is beneficial to the stable preparation of nanoscale particles.
[0038] Furthermore, by adjusting the rotation speed of the powder collecting body 9 from 30 m / min to 60 m / min, the particle diameter is reduced from 200 nm, and the diameter range of nanoparticles can be precisely controlled to 50-500 nm with a narrow distribution; the multilayer slab structure further breaks down and layers the particles, reduces agglomeration, and improves the monodispersity of the particles.
[0039] An external gas filling component 22 is installed through the side wall of the main body 8. When preparing high-purity metal powder, the external gas filling component 22 does not fill the gas. When it is necessary to prepare some oxide powder or nitride powder, the external gas filling component 22 fills oxygen or nitrogen into it through the gas filling valve.
[0040] Please see Figure 3 A method for preparing nanoscale powder includes the following steps: S1: Add the metal raw material for the powder to be prepared into the evaporation crucible 4, close the front door 7, start the rotary vane pump 18, evacuate the air in the main body 8 to 5 Pa, and then start the molecular pump 17. When the vacuum degree of the vacuum chamber is evacuated to 0.1 Pa, the induction heater 2 starts to work.
[0041] S2: Start the external drive servo 19 to drive the powder collection body 9 to start rotating slowly to ensure that no powder agglomeration is generated during the process. At the same time, turn on the cryogenic control component 11 to drive the cryogenic trapping ring 10 to start working to reduce water molecules inside the vacuum chamber.
[0042] S3: The vacuum pressure inside the vacuum chamber drops to 5x10. -3 After the temperature reaches above 1700℃ in the metal thermometer inside the evaporation crucible 4, the heating power of the induction heater 2 remains stable, and the preparation of nanopowder begins.
[0043] S4: Adjust the rotation speed of the powder collecting body 9 to 10-300 m / min. At this time, the evaporated high-temperature metal is sprayed onto the surface of the powder collecting body 9 through a Laval-like nozzle. Due to the angle between the nozzle and the surface of the powder collecting body 9, the high-temperature metal is in the expansion stage after exiting the top cover, which is more conducive to powder preparation.
[0044] S5: As the powder collecting body 9 rotates, the material nanoparticles on the surface of the powder collecting body 9 come into contact with the collecting structure. Through the pressing between the powder collecting body 9 and the hairpin plate and the multi-layer structure of the hairpin plate, the nanoparticles evaporated and condensed on the surface of the powder collecting body 9 are peeled off and collected, so that most of the powder falls into the powder collecting tank 13. This process continues until the metal raw material in the evaporation crucible 4 is evaporated.
[0045] S6: Turn off the induction heater 2. The powder collection body 9 continues to operate until the temperature measured by the infrared temperature measurement system is lower than the melting point of the prepared material. After the temperature of the evaporation crucible 4 is lower than 100°C, nitrogen gas is introduced into the vacuum chamber through the external gas filling component 22 to facilitate subsequent opening of the chamber. After opening the front door 7, the powder collected in the powder collection tank 13 is transferred.
[0046] Assuming that the powder diameter can be prepared when the original high-purity nickel block is 30 m / min, when the rotation speed of the powder collecting body 9 is 60 m / min, the thickness of the material deposited on the powder collecting body 9 will be reduced to 50% of the original thickness, and the diameter of the prepared particles will decrease. By combining this method with the collecting plate, nanoparticles of different diameters can be prepared.
[0047] When preparing alumina, the general process is the same, but it is only necessary to open the gas filling pipeline after 1700°C to introduce oxygen into the cavity so that it reacts with the metal oxide to form alumina before reaching the main body.
[0048] In summary, the equipment and process of this invention, by integrating technologies such as high vacuum, induction heating, high-speed collection and intelligent control, achieve efficient, low-cost, high-quality and flexible preparation of nanoscale powders, solving the problems of high cost, wide diameter distribution, low yield, agglomeration and impurity introduction in existing methods, and has broad application prospects in the field of nanomaterials.
[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A nanoscale powder preparation equipment, characterized in that, It includes a main platform (1), a metal evaporation assembly, a powder collection assembly and a vacuum acquisition system. The main platform (1) has an equipment body (8) on its upper outer side, and the front end of the equipment body (8) is fitted with a front door (7) via a hinge. The equipment body (8) has a vacuum chamber inside. A metal evaporation assembly is provided on the lower inner side of the equipment body (8), and a powder collection assembly located obliquely above the metal evaporation assembly is provided in the middle of the equipment body (8). The main platform (1) is equipped with a vacuum acquisition system, which consists of a rotary vane pump (18) and a molecular pump (17). A vacuum pipeline (16) is installed above the molecular pump (17), and the upper end of the vacuum pipeline (16) extends into the equipment body (8).
2. The nanoscale powder preparation equipment according to claim 1, characterized in that, The upper middle part of the front door (7) is provided with an observation screen (6), a front observation window (5), and a metal evaporation assembly, arranged from top to bottom.
3. The nanoscale powder preparation equipment according to claim 1, characterized in that, The metal evaporation assembly includes an induction heater (2), a heat insulation layer (3), and an evaporation crucible (4). The bottom of the main body (8) is equipped with an evaporation crucible (4) placed on a workbench, and a heat insulation layer (3) is provided on the outside of the evaporation crucible (4). The induction heater (2) is connected to the left side of the heat insulation layer (3).
4. The nanoscale powder preparation equipment according to claim 3, characterized in that, The upper outer side of the evaporation crucible (4) is provided with a top cover, and a ceramic shielding layer is provided on the upper part of the top cover to reduce the temperature at the top. The top cover is provided with an upper outlet and a lower opening, and the size of the upper outlet is larger than the size of the lower opening, which is used to form a Laval nozzle with crucible inner cavity, upper cover lower opening and upper outlet.
5. The nanoscale powder preparation equipment according to claim 1, characterized in that, The powder collection assembly includes a powder collection body (9), a powder collection trough (13), and an additional collection trough (15). The powder collection body (9) is installed in the middle of the inner side of the equipment body (8), and an external drive servo (19) connected to the powder collection body (9) is installed on the outer rear end of the equipment body (8). The powder collection trough (13) is provided on the lower left side of the powder collection body (9), and the powder collection trough (13) is integrated with the front door (7). An inclined pinion plate structure that contacts the powder collection body (9) is provided on the upper right side of the powder collection trough (13). An additional collection trough (15) located diagonally below the powder collection body (9) is installed on the lower right side of the equipment body (8), and the additional collection trough (15) is installed on the outer upper end of the vacuum pipeline (16).
6. The nanoscale powder preparation equipment according to claim 5, characterized in that, The powder collecting body (9) forms a rotating structure within the equipment body (8), and the powder collecting body (9) is made of PTEF or a metal of the same material as the metal to be prepared.
7. The nanoscale powder preparation equipment according to claim 1, characterized in that, An external inflation assembly (22) is installed through the side wall of the main body of the equipment (8).
8. The nanoscale powder preparation equipment according to claim 1, characterized in that, The main platform (1) is equipped with a cryogenic control component (11) on the upper right side, and a cryogenic capture ring (10) is installed on the left side of the cryogenic control component (11), and the cryogenic capture ring (10) is located in the upper right of the equipment body (8).
9. The nanoscale powder preparation equipment according to claim 1, characterized in that, The main platform (1) is provided with a control panel component (20) on its outer side, and an alarm device (21) is installed on the upper end of the control panel component (20).
10. A method for preparing nanoscale powder, characterized in that, Includes the following steps: S1: Add the metal raw material for the powder to be prepared into the evaporation crucible (4), close the front door (7), start the rotary vane pump 18, evacuate the air in the main body (8) to 5pa, then start the molecular pump 17, and when the vacuum degree of the vacuum chamber is evacuated to 0.1pa, start the induction heater (2). S2: Start the external drive servo (19) to drive the powder collection body (9) to start rotating slowly, and at the same time turn on the cryogenic control component (11) to drive the cryogenic collection ring (10) to start working; S3: The vacuum pressure inside the vacuum chamber drops to 5x10. -3 After the metal thermometer in the evaporation crucible (4) reaches above 1700℃, the heating power of the induction heater (2) remains stable, and the preparation of nanopowder begins. S4: Adjust the rotation speed of the powder collecting body (9) to 10-300 m / min. At this time, the evaporated high-temperature metal is sprayed onto the surface of the powder collecting body (9) through a Laval-like nozzle. S5: As the powder collecting body (9) rotates, the material nanoparticles on the surface of the powder collecting body (9) come into contact with the collecting structure. Through the pressing between the powder collecting body (9) and the hairpin plate and the multi-layer structure of the hairpin plate, the powder falls into the powder collecting tank (13). This process continues until the metal raw material in the evaporation crucible (4) is evaporated. S6: Turn off the induction heater (2), and the powder collection body (9) continues to work until the temperature measured by the infrared temperature measurement system is less than the melting point of the material. After the temperature of the evaporation crucible (4) is less than 100°C, nitrogen gas is introduced into the vacuum chamber through the external gas filling component (22). After opening the front door (7), the powder collection tank (13) is transferred.