Optimization method of wafer taking and placing scheduling logic animation

Abstract

The invention provides a wafer pick-and-place scheduling logic animation optimization method, which comprises the steps of simulating pick-and-place operations of different mechanical arms, obtaining simulation results, namely rotation angles of the mechanical arms rotating to different cavities, and constructing a mechanical arm rotation angle comparison table in an upper computer based on the simulation results; a canvas used for simulating a chip semiconductor machine table is created in the upper computer, and a simulation diagram of the mechanical arm and the cavity is constructed in the canvas according to the structure of the machine table; the upper computer is used for establishing signal connection with the mechanical arm, the currently executed mechanical arm fed back by the mechanical arm and a target cavity needing to be reached are obtained, and the rotation angle corresponding to the target cavity is found in the rotation angle comparison table; executing the rotation operation of the mechanical arm in the canvas according to the rotation angle corresponding to the cavity in the upper computer to form a rotation animation; according to the method, the rotation animation of the upper computer is made without using the rotation information of the mechanical arm, a large amount of calculation during rotation calculation of the mechanical arm is reduced, and more calculation is applied to the conveying process.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to an optimization method for wafer pick-and-place scheduling logic animation. Background Technology

[0002] In order to facilitate operators' monitoring of the production process, semiconductor equipment usually uses software interface simulation animations to provide real-time feedback on the movement of the robotic arm, so that operators can understand the current arm's actions and the progress of the process.

[0003] Conventional simulation animations are usually created using information from the target chamber and the actuator arm fed back by the robotic arm. In this process, the robotic arm's control system needs to handle a large amount of real-time calculations (such as inverse kinematics solving, collision avoidance detection, trajectory optimization, etc.). Its computational load gradually accumulates as the running time increases. Over time, the robotic arm's execution speed will decrease significantly. Therefore, if the rotation angle information fed back by the robotic arm is used to create the scheduling logic animation, the resulting animation may not match the actual processing trajectory of the robotic arm, resulting in delays and affecting wafer delivery. Summary of the Invention

[0004] This invention provides an optimization method for wafer pick-and-place scheduling logic animation to overcome the technical problem that if the scheduling logic animation is created using the rotation angle information fed back by the robotic arm, the resulting animation may not match the actual processing trajectory of the robotic arm, resulting in delays and affecting wafer transfer.

[0005] To achieve the above objectives, the technical solution of the present invention is as follows: An optimization method for wafer pick-and-place scheduling logic animation includes: S1: Simulate the pick-up and put-down operations of different robotic arms, obtain the simulation results, namely the rotation angle of each robotic arm to different chambers, and construct a reference table of robotic arm rotation angles in the host computer based on the simulation results. The absolute value of the rotation angle is between 0 degrees and 180 degrees. S2: Create a canvas in the host computer to simulate the semiconductor machine tool, and build a simulation diagram of the robotic arm and chamber in the canvas according to the structure of the machine tool. S3: Use the host computer to establish a signal connection with the robotic arm, obtain the currently executing robotic arm and the target chamber to be reached from the feedback of the robotic arm when the robotic arm performs pick-up and put-down operations, and find the rotation angle corresponding to the target chamber in the rotation angle lookup table. S4: In the host computer, the robotic arm rotates within the canvas according to the rotation angle corresponding to the chamber, thus creating a rotation animation.

[0006] Furthermore, in the host computer, the robotic arm's rotation is executed on the canvas according to the rotation angle corresponding to the chamber, forming a rotation animation, including: S41. Obtain the rotation angle of the target chamber reached during the previous rotation animation from the rotation angle reference table, and use it as the rotation angle of the current chamber in the current rotation animation. The rotation angle of the current chamber in the initial state of the robotic arm is 0 degrees. S42. Determine whether the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber meet the set judgment conditions, and determine whether it is necessary to calculate the supplementary angle based on the judgment result. S43. If the set judgment conditions are met, calculate the supplementary angle based on the rotation angle corresponding to the current chamber, determine whether the calculated supplementary angle meets the reasonableness judgment conditions, obtain the difference between the rotation angle corresponding to the current chamber and the supplementary angle that meets the reasonableness judgment conditions, and generate a rotation animation based on the difference; if the set judgment conditions are not met, obtain the difference between the rotation angle corresponding to the current chamber and the rotation angle corresponding to the target chamber, and generate a rotation animation. S44. If it is necessary to calculate the supplementary angle, determine whether the obtained supplementary angle meets the angle condition. If it meets the angle condition, map the supplementary angle and use the mapped angle value as the new rotation angle value corresponding to the current chamber. Repeat the judgment process of S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation. If the obtained supplementary angle does not meet the angle condition or does not need to be calculated, repeat the selection process of S41, use the rotation angle corresponding to the target chamber as the new rotation angle corresponding to the current chamber, and repeat the process of S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation.

[0007] Furthermore, it determines whether the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber meet the set judgment conditions, and determines whether supplementary angles need to be calculated based on the judgment result, including: The judgment conditions are set, including a first judgment condition and a second judgment condition, and the specific conditions are as follows: First judgment condition: Determine whether the sum of the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber is greater than 180 degrees; if it is greater than 180 degrees, the judgment condition is met; if it is less than 180 degrees, the judgment condition is not met. The second judgment condition is to determine whether the rotation angle corresponding to the current chamber and the rotation angle corresponding to the target chamber are both positive or both negative. If the two rotation angles are both positive or both negative, the judgment condition is not met. If they are not both positive or both negative, the judgment condition is met. If the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber simultaneously satisfy the first and second judgment conditions, then the supplementary angle needs to be calculated; otherwise, the supplementary angle does not need to be calculated.

[0008] Furthermore, it is determined whether the calculated supplementary angle meets the reasonableness judgment conditions, which include: The first reasonableness judgment condition is: whether the sum of the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the supplementary angle is greater than 180 degrees; if it is greater than 180 degrees, the judgment condition is met; if it is less than 180 degrees, the condition is not met. The second reasonableness judgment condition is: whether the supplementary angle is greater than 180 degrees; if it is greater than 180 degrees, the judgment condition is met; if it is less than 180 degrees, the condition is not met. The third reasonableness judgment condition is to determine whether the rotation angle corresponding to the current chamber and the supplementary angle are both positive or both negative. If the two rotation angles are both positive or both negative, the judgment condition is not met. If they are not both positive or both negative, the condition is met. If the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber simultaneously satisfy the first reasonableness judgment condition, the second reasonableness judgment condition, and the third reasonableness judgment condition, then the supplementary angle can generate a rotation animation together with the rotation angle corresponding to the current chamber.

[0009] Furthermore, the process of calculating the supplementary angle includes: Determine if the rotation angle corresponding to the current chamber is greater than 0 degrees. If it is greater than 0 degrees, use the result of subtracting the absolute value of the rotation angle corresponding to the current chamber from 360 degrees as the supplementary angle. If the angle is less than 0 degrees, the opposite of the absolute value of the rotation angle corresponding to the current chamber is taken as the supplementary angle.

[0010] Furthermore, generating rotational animations includes: Set an error threshold, and subtract the absolute value of the rotation angle of the current chamber from the absolute value of the supplementary angle or the rotation angle corresponding to the target chamber. The result of the subtraction is the absolute value of the difference. The robotic arm performs a rotation action on the canvas with the absolute value of the difference to generate a rotation animation. When the absolute value of the difference is less than or equal to the error threshold, it means that the rotation animation has been completed.

[0011] Furthermore, it is determined whether the supplementary angle meets the angle condition. If the angle condition is met, the supplementary angle is mapped, and the mapped angle value is used as the new rotation angle value corresponding to the current chamber. The judgment process of S42-S43 is repeated with the rotation angle corresponding to the new target chamber to generate a new rotation animation. The specific judgment process of the angle condition includes: Determine whether the supplementary angle is greater than 180 degrees or less than -180 degrees. If the result is that the supplementary angle is greater than 180 degrees, subtract 360 degrees from the supplementary angle and use the resulting angle value as the new rotation angle value corresponding to the current chamber. Repeat process S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation. If the supplementary angle is less than -180 degrees, subtract the absolute value of the supplementary angle from 360 degrees and use the resulting angle value as the new rotation angle value corresponding to the current chamber. Repeat process S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation.

[0012] Beneficial effects: This invention provides an optimization method for wafer pick-and-place scheduling logic animation, which can create upper computer rotation animation without using the rotation information of the robotic arm as feedback information, reducing the large amount of calculation when the robotic arm calculates rotation, and applying more calculation to the transfer process; the rotation animation created in the upper computer is closer to the actual rotation path of the machine, making it easier for operators to understand the actual wafer transfer process of the machine. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 A flowchart illustrating an optimization method for wafer pick-and-place scheduling logic animation provided by this invention; Figure 2 A schematic diagram of a canvas containing a robotic arm and a chamber, created for this invention. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0016] This embodiment provides an optimization method for wafer pick-and-place scheduling logic animation, such as... Figure 1 As shown, it includes: S1: Simulate the pick-up and put-down operations of different robotic arms, obtain the simulation results, namely the rotation angle of each robotic arm to different chambers, and construct a reference table of robotic arm rotation angles in the host computer based on the simulation results. The absolute value of the rotation angle is between 0 degrees and 180 degrees. S2: Create a canvas in the host computer to simulate the semiconductor machine tool, and build a simulation diagram of the robotic arm and chamber in the canvas according to the structure of the machine tool. S3: Use the host computer to establish a signal connection with the robotic arm, obtain the currently executing robotic arm and the target chamber to be reached from the feedback of the robotic arm when the robotic arm performs pick-up and put-down operations, and find the rotation angle corresponding to the target chamber in the rotation angle lookup table. S4: In the host computer, the robotic arm rotates within the canvas according to the rotation angle corresponding to the chamber, thus creating a rotation animation.

[0017] Specifically, the loading and unloading operations of different robotic arms are simulated to obtain simulation results, namely the rotation angle of each robotic arm to different chambers. A reference table of robotic arm rotation angles is constructed in the host computer based on the simulation results. The absolute value of the rotation angle is between 0 degrees and 180 degrees. Before creating the rotation animation, the rotation angles corresponding to all robotic arms reaching all chambers are obtained in advance. All angles are calculated and stored in advance and can be directly queried during runtime, avoiding real-time angle calculation (such as inverse kinematics solution), reducing the computational load of the system, reducing the latency of the simulation animation, and ensuring that the simulation animation can reflect the actual movement of the robotic arms in real time. Secondly, a canvas for simulating a chip semiconductor machine is created in the host computer, and a simulation diagram of the robotic arm and chamber is constructed on the canvas according to the machine structure. Various variables are set on the canvas to store rotation angles, and the robotic arm is rotated on the canvas based on the stored angles to obtain a rotation animation. Next, a signal connection is established between the host computer and the robotic arm. When the robotic arm performs pick-up and put-down operations, the current robotic arm and the target chamber to be reached are obtained from the feedback of the robotic arm. The corresponding rotation angle of the target chamber is found in the rotation angle lookup table. The real-time data (current chamber, target chamber, robotic arm ID) obtained by the host computer through IP communication is matched with the static angle table to accurately drive the rotation animation of the virtual robotic arm and ensure that the rotation animation is synchronized with the movement of the robotic arm. Finally, in the host computer, the robotic arm rotates within the canvas according to the rotation angle corresponding to the chamber, forming a rotation animation. By determining and calculating the supplementary angle, it is ensured that the angle difference does not exceed 180°, avoiding multiple rotations. The shortest clockwise / counterclockwise path is dynamically selected to achieve minimum path rotation, ensuring that the animation path is always the shortest, thus improving efficiency and user experience.

[0018] In a specific embodiment, the pick-up and place operations of different robotic arms are simulated to obtain the simulation results, namely the rotation angle of each robotic arm to different chambers. A robotic arm rotation angle reference table is then constructed in the host computer based on the simulation results. The scheme where the absolute value of the rotation angle is between 0 degrees and 180 degrees is as follows: S11: Simulate the robotic arm's pick-and-place operations, obtain the simulation results, i.e., the rotation angle of each robotic arm to different chambers, and create a list of each robotic arm's position to each chamber and its execution angle in the host computer based on the simulation results. Part of the content is as follows: CVD200Robot.AnimationTech.Add(new RobotTech() { LocationName = "A.PM1.Module", Angle = 117.5}); CVD200Robot.AnimationTech.Add(new RobotTech() { LocationName = "A.PM2.Module", Angle = 179.5}); The LocationName in this list is composed of "robotic arm + chamber", and Angle represents the rotation angle. This list contains the rotation angles corresponding to the rotation of all robotic arms to all chambers. S12: Set a timer to obtain the robot arm's status in real time through the OnTimer method and determine whether to perform a rotation action: 1. The robotic arm is in the initialization state; 2. The current chamber srcLoc exists; 3. The target chamber destLoc exists; 4. The robotic arm is in an idle state. 5. The arm is in motion; When the robotic arm is rotating, the system obtains real-time information on the current chamber, the next chamber, the current robotic arm, and the next robotic arm from the background. This information is divided into two groups: srcLoc (current execution item) and destLoc (next execution item). Each group is also composed of "robotic arm + chamber". This information is then compared with the execution list to obtain the corresponding rotation angle.

[0019] In this solution, the rotation angles corresponding to the arrival of all robotic arms in all chambers are obtained in advance before the rotation animation is created. All angles are calculated and stored in advance and can be directly queried during runtime, avoiding real-time angle calculation (such as inverse kinematics solution), reducing the computational load of the system, reducing the latency of the simulation animation, and ensuring that the simulation animation can reflect the actual movement of the robotic arms in real time.

[0020] In a specific embodiment, the scheme of creating a canvas for simulating a chip semiconductor machine in the host computer, and constructing a simulation diagram of the robotic arm and chamber on the canvas according to the machine structure is as follows: First, create the main canvas, which includes the canvas's length, width, and background; Next, create a sub-canvas within the main canvas to store the simulation diagrams of the robotic arm and chamber; the drawn simulation diagrams are as follows: Figure 2 As shown; Specifically, the canvas is a Canvas, which is an element (tag) provided by WPF for drawing graphics or storing components. It is essentially a bitmap canvas that can be implemented programmatically, allowing developers to dynamically generate and manipulate elements (tags) within it. In this solution, the sub-canvas includes... <rotatetransform>,exist <rotatetransform>Given x: Name="ArmAnglePos", use ArmAnglePos to find the Angle property in the sub-canvas. Changing the value of this property controls the rotation of the canvas. Create a variable _currTheta in the program to store the target angle, and create a variable _endTheta in the program to store the current angle. When using it, assign the value of the current angle to the value of Angle to realize the rotation of the sub-canvas, thereby realizing the rotation of the robotic arm in the sub-canvas.

[0021] In a specific embodiment, the method of establishing a signal connection between a host computer and a robotic arm, obtaining feedback from the robotic arm on the currently executing robotic arm and the target chamber to be reached when the robotic arm performs a pick-up or put-down operation, and finding the corresponding rotation angle of the target chamber in the rotation angle lookup table is as follows: 1. Establish IP communication connection (1) Configure the robotic arm network interface; (2) Implement the communication protocol: Establish a Socket connection with the robotic arm via TCP / IP or UDP protocol; (3) Verify communication: Send a heartbeat packet or status query command to confirm that the robotic arm is responding normally; 2. Real-time acquisition of robotic arm feedback data (1) Subscribe to robotic arm status information: Periodically obtain the current status through the API or custom protocol provided by the robotic arm manufacturer: (2) Parse the feedback data: extract key fields and concatenate them into the LocationName format (consistent with the static list); 3. Matching rotation angle reference table Query static angle list: Match the rotation angle of the target chamber from the predefined RobotTech list.

[0022] In this solution, the host computer obtains real-time data (target chamber, robotic arm ID) through IP communication and matches it with a static angle table to precisely drive the rotation animation of the virtual robotic arm, ensuring that the rotation animation is synchronized with the rotation action of the robotic arm.

[0023] In a specific embodiment, the method of executing the rotation operation of the robotic arm on the canvas according to the rotation angle corresponding to the chamber in the host computer to form a rotation animation is as follows: S41. Obtain the rotation angle of the target chamber reached during the previous rotation animation from the rotation angle reference table, and use it as the rotation angle of the current chamber in the current rotation animation. The rotation angle of the current chamber in the initial state of the robotic arm is 0 degrees. When the robotic arm is in its initial state, the rotation angle corresponding to the current chamber is 0 degrees. The current chamber during the second rotation is the target chamber during the first rotation. That is, after the robotic arm rotates for the first time, the current chamber in each rotation action is the target chamber to be reached in the previous rotation. The feedback during each rotation of the robotic arm is the target chamber to be reached, and the rotation angle corresponding to the current chamber is the rotation angle corresponding to the target chamber reached in the previous rotation. S42. Determine whether the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber meet the set judgment conditions, and determine whether it is necessary to calculate the supplementary angle based on the judgment result. The judgment conditions are set, including a first judgment condition and a second judgment condition, and the specific conditions are as follows: First judgment condition: Determine whether the sum of the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber is greater than 180 degrees; if it is greater than 180 degrees, the judgment condition is met; if it is less than 180 degrees, the judgment condition is not met. The second judgment condition is to determine whether the rotation angle corresponding to the current chamber and the rotation angle corresponding to the target chamber are both positive or both negative. If the two rotation angles are both positive or both negative, the judgment condition is not met. If they are not both positive or both negative, the judgment condition is met. In this scheme, "same positive and same negative" refers to whether the angle values ​​are both positive or negative. Rotation from the angle with the larger angle value to the angle with the smaller angle value is counterclockwise, and vice versa is clockwise. If the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber simultaneously satisfy the first and second judgment conditions, then the supplementary angle needs to be calculated; otherwise, the supplementary angle does not need to be calculated. S43. If the set judgment conditions are met, calculate the supplementary angle based on the rotation angle corresponding to the current chamber, determine whether the calculated supplementary angle meets the reasonableness judgment conditions, obtain the difference between the rotation angle corresponding to the current chamber and the supplementary angle that meets the reasonableness judgment conditions, and generate a rotation animation based on the difference; if the set judgment conditions are not met, obtain the difference between the rotation angle corresponding to the current chamber and the rotation angle corresponding to the target chamber, and generate a rotation animation. S431. Calculate the supplementary angle based on the current rotation angle of the chamber: Determine if the rotation angle corresponding to the current chamber is greater than 0 degrees. If it is greater than 0 degrees, use the result of subtracting the absolute value of the rotation angle corresponding to the current chamber from 360 degrees as the supplementary angle. If it is less than 0 degrees, then the opposite of the absolute value of the rotation angle corresponding to the current chamber is taken as the supplementary angle. S432. Determine whether the calculated supplementary angle meets the reasonableness judgment conditions, wherein the reasonableness judgment conditions include: The first reasonableness judgment condition is: whether the sum of the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the supplementary angle is greater than 180 degrees; if it is greater than 180 degrees, the judgment condition is met; if it is less than 180 degrees, the condition is not met. The second reasonableness judgment condition is: whether the supplementary angle is greater than 180 degrees; if it is greater than 180 degrees, the judgment condition is met; if it is less than 180 degrees, the condition is not met. The third reasonableness judgment condition is to determine whether the rotation angle corresponding to the current chamber and the supplementary angle are both positive or both negative. If the two rotation angles are both positive or both negative, the judgment condition is not met. If they are not both positive or both negative, the condition is met. If the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber simultaneously satisfy the first reasonableness judgment condition, the second reasonableness judgment condition, and the third reasonableness judgment condition, then the supplementary angle can generate a rotation animation together with the rotation angle corresponding to the current chamber. S433, Generating rotation animation based on difference: Set an error threshold, subtract the absolute value of the rotation angle of the current chamber from the absolute value of the rotation angle of the supplementary angle or the rotation angle corresponding to the target chamber, and obtain the result of the subtraction, that is, the absolute value of the difference. The robotic arm performs a rotation action in the canvas with the absolute value of the difference to generate a rotation animation. When the absolute value of the difference is less than or equal to the error threshold, it means that the rotation animation has been completed. In this scheme, the error threshold is set to 5 degrees. If the absolute value of the difference is within 5 degrees, the rotation animation can be considered complete. S44. If supplementary angles need to be calculated, determine whether the obtained supplementary angles meet the angle conditions. If they do, map the supplementary angles and use the mapped angle value as the new rotation angle value corresponding to the current chamber. Repeat the judgment process of S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation. If the obtained supplementary angles do not meet the angle conditions or do not need to be calculated, repeat the selection process of S41, use the rotation angle corresponding to the target chamber as the new rotation angle corresponding to the current chamber, and repeat the process of S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation. The specific judgment process includes: Determine whether the supplementary angle is greater than 180 degrees or less than -180 degrees. If the result is that the supplementary angle is greater than 180 degrees, subtract 360 degrees from the supplementary angle and use the resulting angle value as the new rotation angle value corresponding to the current chamber. Repeat process S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation. If the supplementary angle is less than -180 degrees, subtract the absolute value of the supplementary angle from 360 degrees and use the resulting angle value as the new rotation angle value corresponding to the current chamber. Repeat process S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation.

[0024] In this scheme, the calculated value of the rotation angle must be greater than 180 degrees. That is, the absolute value of the rotation angle obtained in the first calculation must meet the reasonableness judgment condition. Adding this judgment condition has the following three effects: 1. Generating rotation animation, including calculating supplementary angles, is a real-time refresh process. During the refresh process, new supplementary angles are continuously calculated. Because the calculated supplementary angle must exceed 180° (since the sum of the current chamber's angle and the current chamber's angle exceeds 180°, rotation cannot be performed within (-180°, 180°). Instead, the source domain must be mapped to (-360°, 0) or (0, 360°) which exceed 180° for calculation, so that the rotation does not rotate multiple times), the calculated supplementary angle value is assigned to the target chamber angle value (not the target chamber angle value in the table). This allows the rotation animation of the current chamber and the target chamber to be calculated within this source domain. Therefore, in order to prevent repeated calculation of the supplementary angle, there must be a condition that the absolute value of the target chamber angle, i.e., the supplementary angle, must be less than 180°. In this way, if the three conditions for judging the rationality of the supplementary angle are not met, the supplementary angle will not be recalculated, but the calculation of the rotation animation will be executed instead.

[0025] 2. When the absolute value of the target chamber angle after replacement is less than 180°, it means that the rotation animation has been completed. This is because no matter how many times the target chamber angle value is mapped in the source domain, it will eventually be mapped back to (-180°, 180°). Therefore, when the program makes another judgment, it means that the previous rotation animation has been completed and the judgment and calculation for the next rotation animation will be performed. While acquiring only the chamber where the robotic arm is currently in place and the chamber it is about to reach can solve the problem of robotic arm feedback delay, it introduces an impulse problem during the simulation animation process. This means that in the animation, the robotic arm may undergo multiple unnecessary rotations to reach the designated position, and the rotations may not follow the minimum path for actual wafer transfer. This severely affects the accuracy of the simulation animation and fails to effectively assist operators in understanding the real-time wafer transfer process. In this solution, by determining and calculating the supplementary angle, we ensure that the angle difference does not exceed 180°, avoid multiple rotations, and dynamically select the shortest clockwise / counterclockwise path to achieve minimum path rotation. The animation path is always the shortest, improving efficiency and user experience.

[0026] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.< / rotatetransform> < / rotatetransform>

Claims

1. An optimization method for wafer pick-and-place scheduling logic animation, characterized in that, include: S1: Simulate the pick-up and put-down operations of different robotic arms, obtain the simulation results, namely the rotation angle of each robotic arm to different chambers, and construct a reference table of robotic arm rotation angles in the host computer based on the simulation results. The absolute value of the rotation angle is between 0 degrees and 180 degrees. S2: Create a canvas in the host computer to simulate the semiconductor machine tool, and build a simulation diagram of the robotic arm and chamber in the canvas according to the structure of the machine tool. S3: Use the host computer to establish a signal connection with the robotic arm, obtain the currently executing robotic arm and the target chamber to be reached from the feedback of the robotic arm when the robotic arm performs pick-up and put-down operations, and find the rotation angle corresponding to the target chamber in the rotation angle lookup table. S4: In the host computer, the robotic arm rotates within the canvas according to the rotation angle corresponding to the chamber, thus creating a rotation animation.

2. The method for optimizing wafer pick-and-place scheduling logic animation according to claim 1, characterized in that, In the host computer, the robotic arm rotates within the canvas according to the rotation angle corresponding to the chamber, creating a rotation animation, including: S41. Obtain the rotation angle of the target chamber reached during the previous rotation animation from the rotation angle reference table, and use it as the rotation angle of the current chamber in the current rotation animation. The rotation angle of the current chamber in the initial state of the robotic arm is 0 degrees. S42. Determine whether the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber meet the set judgment conditions, and determine whether it is necessary to calculate the supplementary angle based on the judgment result. S43. If the set judgment conditions are met, calculate the supplementary angle based on the rotation angle corresponding to the current chamber, determine whether the calculated supplementary angle meets the reasonableness judgment conditions, obtain the difference between the rotation angle corresponding to the current chamber and the supplementary angle that meets the reasonableness judgment conditions, and generate a rotation animation based on the difference; if the set judgment conditions are not met, obtain the difference between the rotation angle corresponding to the current chamber and the rotation angle corresponding to the target chamber, and generate a rotation animation. S44. If it is necessary to calculate the supplementary angle, determine whether the obtained supplementary angle meets the angle condition. If it meets the angle condition, map the supplementary angle and use the mapped angle value as the new rotation angle value corresponding to the current chamber. Repeat the judgment process of S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation. If the obtained supplementary angle does not meet the angle condition or does not need to be calculated, repeat the selection process of S41, use the rotation angle corresponding to the target chamber as the new rotation angle corresponding to the current chamber, and repeat the process of S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation.

3. The method for optimizing wafer pick-and-place scheduling logic animation according to claim 2, characterized in that, Determine whether the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber meet the set judgment conditions, and determine whether supplementary angles need to be calculated based on the judgment result, including: The judgment conditions are set, including a first judgment condition and a second judgment condition, and the specific conditions are as follows: First judgment condition: Determine whether the sum of the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber is greater than 180 degrees; if it is greater than 180 degrees, the judgment condition is met; if it is less than 180 degrees, the judgment condition is not met. The second judgment condition is to determine whether the rotation angle corresponding to the current chamber and the rotation angle corresponding to the target chamber are both positive or both negative. If the two rotation angles are both positive or both negative, the judgment condition is not met. If they are not both positive or both negative, the judgment condition is met. If the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber simultaneously satisfy the first and second judgment conditions, then the supplementary angle needs to be calculated; otherwise, the supplementary angle does not need to be calculated.

4. The method for optimizing wafer pick-and-place scheduling logic animation according to claim 3, characterized in that, Determine whether the calculated supplementary angle meets the reasonableness judgment criteria, which include: The first reasonableness judgment condition is: whether the sum of the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the supplementary angle is less than 180 degrees; if it is less than 180 degrees, the judgment condition is not met; if it is greater than 180 degrees, the condition is met. The second reasonableness judgment condition is: whether the supplementary angle is greater than 180 degrees; if it is greater than 180 degrees, the judgment condition is met; if it is less than 180 degrees, the condition is not met. The third reasonableness judgment condition is to determine whether the rotation angle corresponding to the current chamber and the supplementary angle are both positive or both negative. If the two rotation angles are both positive or both negative, the judgment condition is not met. If they are not both positive or both negative, the condition is met. If the absolute value of the rotation angle corresponding to the current chamber and the absolute value of the rotation angle corresponding to the target chamber simultaneously satisfy the first reasonableness judgment condition, the second reasonableness judgment condition, and the third reasonableness judgment condition, then the supplementary angle can generate a rotation animation together with the rotation angle corresponding to the current chamber.

5. The method for optimizing wafer pick-and-place scheduling logic animation according to claim 3, characterized in that, The process of calculating the supplementary angle includes: Determine if the rotation angle corresponding to the current chamber is greater than 0 degrees. If it is greater than 0 degrees, use the result of subtracting the absolute value of the rotation angle corresponding to the current chamber from 360 degrees as the supplementary angle. If the angle is less than 0 degrees, the opposite of the absolute value of the rotation angle corresponding to the current chamber is taken as the supplementary angle.

6. The method for optimizing wafer pick-and-place scheduling logic animation according to claim 2, characterized in that, Generating rotational animations includes: Set an error threshold, and subtract the absolute value of the rotation angle of the current chamber from the absolute value of the supplementary angle or the rotation angle corresponding to the target chamber. The result of the subtraction is the absolute value of the difference. The robotic arm performs a rotation action on the canvas with the absolute value of the difference to generate a rotation animation. When the absolute value of the difference is less than or equal to the error threshold, it means that the rotation animation has been completed.

7. The method for optimizing wafer pick-and-place scheduling logic animation according to claim 2, characterized in that, Determine if the supplementary angle meets the angle condition. If it does, map the supplementary angle and use the mapped angle value as the new rotation angle value corresponding to the current chamber. Repeat the judgment process S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation. The specific judgment process of the angle condition includes: Determine whether the supplementary angle is greater than 180 degrees or less than -180 degrees. If the result is that the supplementary angle is greater than 180 degrees, subtract 360 degrees from the supplementary angle and use the resulting angle value as the new rotation angle value corresponding to the current chamber. Repeat process S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation. If the supplementary angle is less than -180 degrees, subtract the absolute value of the supplementary angle from 360 degrees and use the resulting angle value as the new rotation angle value corresponding to the current chamber. Repeat process S42-S43 with the rotation angle corresponding to the new target chamber to generate a new rotation animation.

Images