Crucible device and vapor deposition apparatus provided with same

Abstract

A crucible device (1) is provided with: a main body section (2) having an internal space (2a) in which a vapor deposition material (8) is housed; a cover section (4) provided at an end section (2b) of the main body section (2); and shielding plates (5a-5e) attached to the cover section (4) so as to intersect the depth direction of the main body section (2).

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a crucible device having an internal space that accommodates an evaporation material, and an evaporation device provided with the crucible device. BACKGROUND

[0002] Conventionally, a crucible device is known that is provided with a main body portion having an internal space that accommodates an evaporation material, a heating device located on an outer surface of the main body portion, a cover member provided to an opening portion, and a plurality of shielding plates arranged in the internal space in a direction that intersects with a traveling direction of a vapor based on the evaporation material (Patent Document 1).

[0003] According to the configuration described in Patent Document 1, by the plurality of shielding plates, it is possible to filter out an undesirable metal oxide formed on a surface of the evaporation material, and prevent the metal oxide from adhering to a processed substrate. Prior art documents Patent documents

[0004] Patent Document 1: Japanese Patent Application Publication No. 2007-100216 SUMMARY Problems to be solved by the invention

[0005] However, in the above-described configuration of Patent Document 1, the plurality of shielding plates are mounted to an inner surface of the main body portion. Therefore, it is difficult to detach the shielding plates from the main body portion with the metal oxide of the evaporation material adhering between the shielding plates and the inner surface of the main body portion. As a result, it is difficult to replace the evaporation material accommodated in the main body portion. Solution to the problem

[0006] One aspect of the present disclosure relates to a crucible device provided with a main body portion having an internal space that accommodates an evaporation material, a cover portion provided to an end portion of the main body portion, and one or more shielding plates mounted to the cover portion in a manner that intersects with a depth direction of the main body portion.

[0007] Another aspect of the present disclosure relates to a crucible device provided with a main body portion having an internal space that accommodates an evaporation material, and a plurality of shielding plates that intersect with a depth direction of the main body portion, the plurality of shielding plates being arranged in the depth direction of the main body portion with a space therebetween, the plurality of shielding plates having a shielding portion of the same shape and an opening pattern of the same shape, the plurality of shielding plates being arranged in a manner that the opening patterns are offset from each other.

[0008] An evaporation device according to one aspect of the present disclosure is provided with a crucible device according to one aspect of the present disclosure, and a chamber connected to the crucible device. Effects of the invention

[0009] According to one aspect of the present disclosure, a crucible device capable of preventing metal oxides formed on the surface of an evaporation material from adhering to a substrate to be processed and easily replacing the crucible device in which the evaporation material is accommodated, and an evaporation device provided with the same can be provided. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 is a cross-sectional view of an evaporation device to which the embodiments relate. Figure 2 is a cross-sectional view of a crucible device provided in the above evaporation device. Figure 3 is a plan view of the above crucible device. Figure 4 is a side view of a cover member and five shielding plates provided in the above crucible device. Fig. 5 is a plan view of each of the above five shielding plates. Figure 6 is a partial perspective view of the above cover member and shielding plates. Figure 7 is a side view of the above cover member and five shielding plates when the above crucible device is in operation. Figure 8 is a view showing the state of adhesion of residues of an evaporation material to a substrate to be processed according to a comparative example. Fig. 9 is a graph showing the results of simulation of internal pressure of the main body portion of the above crucible device. Figure 10 is a graph showing the relationship between the opening ratio of the above shielding plates and the residues of the evaporation material accommodated in the main body portion. Figure 11 is a graph showing the relationship between the opening ratio of the above shielding plates and the residues of the evaporation material accommodated in the main body portion. Figure 12 is a graph showing the relationship between the opening ratio of the above shielding plates and the internal pressure of the main body portion and the adhesion rate to the substrate to be processed. DETAILED DESCRIPTION

[0011] Figure 1 is a cross-sectional view of an evaporation device 20 to which the embodiments relate.

[0012] The evaporation device 20 is provided with a crucible device 1 and a chamber 21 connected to the crucible device 1. In the chamber 21, a substrate to be processed 22, a mask 23 disposed on the crucible device 1 side of the substrate to be processed 22, and a rate detector 24 disposed between the substrate to be processed 22 and the crucible device 1 for measuring the amount of evaporation from the crucible device 1 are provided.

[0013] Figure 2FIG. 1 is a cross-sectional view of a crucible device 1 according to an embodiment. Figure 3 FIG. 2 is a plan view of the crucible device 1. Figure 4 FIG. 3 is a side view of a cap portion 4 and shielding plates 5a to 5e provided to the crucible device 1.

[0014] The crucible device 1 includes a substantially cylindrical main body portion 2 having an internal space 2a in which a deposition material 8 is accommodated, a cap portion 4 provided at an end portion 2b of the main body portion 2, and five shielding plates 5a, 5b, 5c, 5d, 5e installed to the cap portion 4 in a manner intersecting a depth direction (Z-axis direction) of the main body portion 2. For example, a vapor of the deposition material 8 travels along the Z-axis direction, and the shielding plates 5a to 5e are arranged along XY-plane directions. The shielding plates 5a to 5e are located in the internal space 2a. The shielding plates 5a to 5e are provided in a manner perpendicular to the depth direction of the main body portion 2. The shielding plates 5a to 5e are arranged in the depth direction of the main body portion 2 with spaces therebetween. The cap portion 4 and the shielding plates 5a to 5e are detachable with respect to the main body portion 2. The cap portion 4 is also detachable with respect to the main body portion 2 in a state where the shielding plates 5a to 5e are installed to the cap portion 4 as they are. The crucible device 1 includes a heating device 3 that heats an outer surface of the main body portion 2.

[0015] The cap portion 4 has a lid portion 4a and a shaft portion 4b protruding from the lid portion 4a toward the internal space 2a, and the plurality of shielding plates 5a to 5e are supported to the shaft portion 4b.

[0016] Thus, since the cap portion 4 has the shaft portion 4b protruding from the lid portion 4a toward the internal space 2a, the shielding plates 5a, 5b, 5c, 5d, 5e can be easily installed to the cap portion 4.

[0017] FIG. 5 is a plan view of each of the shielding plates 5a, 5b, 5c, 5d, 5e. Figure 6 FIG. 6 is a partial perspective view of the cap portion 4 and the shielding plates 5a to 5e. The same reference numerals are attached to the same constituent elements as those described above, and detailed description of these constituent elements is not repeated.

[0018] Each of the shielding plates 5a to 5e is a disc shape. Each of the shielding plates 5a to 5e has four shielding portions 7a to 7e and opening patterns 11a to 11e. The opening patterns 11a to 11e are constituted by four openings 6a to 6e formed in a manner along a periphery of each of the shielding plates 5a to 5e.

[0019] The shielding portions 7a to 7e are arranged along the periphery between the openings 6a to 6e. For example, as shown in Fig. 5, the four shielding portions 7a of the shielding plate 5a are arranged along the periphery between the four openings 6a. The four shielding portions 7b of the shielding plate 5b are arranged along the periphery between the four openings 6b. The four shielding portions 7c of the shielding plate 5c are arranged along the periphery between the four openings 6c. The four shielding portions 7d of the shielding plate 5d are arranged along the periphery between the four openings 6d. The four shielding portions 7e of the shielding plate 5e are arranged along the periphery between the four openings 6e.

[0020] The plurality of shielding plates 5a to 5e are arranged in a staggered manner with the opening patterns 11a to 11e. The opening patterns 11a to 11e of the shielding plates 5a to 5e and the intervals between the adjacent shielding plates become flow paths of the vapor deposition material 8 after vaporization. The opening patterns 11a to 11e of the shielding plates 5a to 5e are the same shape. In addition, the straight line L is drawn for facilitating understanding of the present application so as to be able to easily visually recognize that the opening patterns 11a to 11e of the shielding plates 5a to 5e are arranged in a staggered manner along the circumferential direction around the center axis.

[0021] Thus, the vapor of the vapor deposition material 8 after heating by the heating device 3 goes to the processed substrate 22 arranged outside the crucible device 1 in order through the opening 6e of the shielding plate 5e, the opening 6d of the shielding plate 5d, the opening 6c of the shielding plate 5c, the opening 6b of the shielding plate 5b, and the opening 6a of the shielding plate 5a.

[0022] When the plurality of shielding plates 5a to 5e are viewed in the depth direction of the main body portion 2 from the side of the cover portion 4, the vapor deposition material 8 is not visible. The shielding portions 7a to 7e shield the vapor deposition material 8 after boiling.

[0023] Thus, the metal oxide of the film of the vapor deposition material 8 after heating by the heating device 3 is shielded by the shielding portion 7e of the shielding plate 5e. In addition, the metal oxide that has passed through the opening 6e of the shielding plate 5e is shielded by the shielding portion 7d of the shielding plate 5d. The metal oxide that has passed through the opening 6d of the shielding plate 5d is shielded by the shielding portion 7c of the shielding plate 5c. The metal oxide that has passed through the opening 6c of the shielding plate 5c is shielded by the shielding portion 7b of the shielding plate 5b. The metal oxide that has passed through the opening 6b of the shielding plate 5b is shielded by the shielding portion 7a of the shielding plate 5a.

[0024] In addition, the cover portion 4a includes four through ports 4c through which the vapor deposition material 8 after vaporization passes. The four through ports 4c are formed along the periphery of the cover portion 4a. Under each of the through ports 4c, the shielding portions 7a to 7e included in the shielding plates 5a to 5e are overlapped in a spiral shape. When each of the through ports 4c is viewed in the depth direction of the main body portion 2 from the upper side of the cover portion 4, the vapor deposition material 8 is not visible.

[0025] Thus, the shielding portions 7a, 7b, 7c, 7d, 7e that shield the metal oxide based on the film of the evaporation material 8 heated by the heating device 3 are arranged in a spiral shape. Therefore, the metal oxide based on the film of the evaporation material 8 can be reliably shielded.

[0026] The size of the interval of the shielding plates 5a to 5e is changeable. The interval between the adjacent shielding plates 5a to 5e can be, for example, about 3 mm. The interval G1 between the shielding plate 5a and the shielding plate 5b can be, for example, about 3 mm.

[0027] The interval between the adjacent shielding plates 5a to 5e can be easily changed from about 3 mm to about 1 mm. By providing a nut between the shielding plates and changing the thickness of the nut, the interval G1 between the shielding plate 5a and the shielding plate 5b can be, for example, about 1 mm. In addition, by changing the thickness of the nut between the shielding plates, the number of the shielding plates can be adjusted to be five or less as needed.

[0028] The present embodiment has a structure in which the shielding plates 5a to 5e are attached to the cover portion 4 side, and thus has a high degree of freedom in changing the combination or the interval between the shielding plates, and it is easy to set the conditions to match the environment. In the case of attaching the shielding plates to the crucible side as in Patent Document 1, since the shielding plates are fixed to the crucible, the pattern or the number of the shielding plates is limited. Thus, the present embodiment has a large advantage in the cover member side structure in which the shielding plates 5a to 5e are attached to the cover portion 4.

[0029] It is preferable that the evaporation material 8 include magnesium. The evaporation material 8 can be a magnesium sheet covered with a magnesium oxide film, a granular magnesium covered with a magnesium oxide film, or a cast ingot-shaped magnesium covered with a magnesium oxide film. In addition, the evaporation material 8 can include at least one of silver and lithium fluoride.

[0030] Thus, the magnesium oxide film that floats in the main body portion 2 due to the bumping based on heating of the magnesium material on which the magnesium oxide (MgO) film is formed is shielded by the shielding plates 5a to 5e arranged in the internal space 2a of the main body portion 2.

[0031] The MgO film has a higher melting point and a higher boiling point than Mg, and in the case where the MgO film is used as the evaporation material 8 of the crucible device 1 as it is, even if Mg is gasified by heating, the MgO film has not yet reached the melting point, and the gasified Mg, that is, "gasified Mg" becomes a state of being enclosed in the MgO film. Furthermore, when heating is continued, the MgO film is gradually pressed by the gasified MgO that has expanded. As a result, a part of the MgO film is broken due to the pressing of the gasified MgO, and vapor is suddenly released from the broken part of the MgO film, and bumping occurs.

[0032] When the bumping occurs, Mg or MgO adheres to the processed substrate 22, which is the evaporation target, and not only causes thermal damage but also makes it impossible to maintain a stable evaporation rate. In addition, in the cavity, residues of Mg or MgO remain on the adhesion-preventing plate. The adhesion-preventing plate with the residues needs to be cleaned after being removed to be reused. Therefore, in order to remove the Mg or MgO film that adheres firmly to the adhesion-preventing plate, it is necessary to incur costs for cleaning and the like, and in addition, it takes time until it can be reused. As a result, the replacement maintenance of the adhesion-preventing plate deteriorates as a whole.

[0033] The reason why Mg or MgO adheres to the processed substrate 22 is that, since the lid member of the main body 2 is generally opened with a large diameter in order to easily release the vapor, Mg or MgO based on bumping flies out from the main body 2 into the cavity without being hindered by the lid member.

[0034] Therefore, the present embodiment proposes a structure of the cover 4 in which, along the XY plane intersecting the Z-axis direction in which Mg or MgO based on bumping travels, a shielding plate 5a to 5e for hindering the travel of Mg or MgO based on bumping upward is provided, so that Mg or MgO based on bumping does not escape outside the main body 2.

[0035] Thus, the evaporation material 8 accommodated in the internal space 2a of the main body 2 is heated by the heating device 3 located on the outer surface of the main body 2. Therefore, the metal oxide based on the film of the evaporation material 8 heated by the heating device 3 travels in the Z-axis direction toward the cover 4 together with the vapor of the evaporation material 8. Then, the metal oxide based on the film of the evaporation material 8 is shielded by the shielding plates 5a to 5e arranged in the internal space 2a of the main body 2.

[0036] Since the shielding plates 5a to 5e are installed to the cover 4, a gap is formed between the shielding plates 5a to 5e and the inner surface of the main body 2. Therefore, the metal oxide of the evaporation material 8 does not adhere between the shielding plates 5a to 5e and the inner surface of the main body 2. Thus, the shielding plates 5a to 5e are easily removed from the main body 2. As a result, it is possible to prevent the metal oxide formed on the surface of the evaporation material 8 from adhering to the processed substrate 22, and it is also possible to easily replace the evaporation material 8 accommodated in the main body 2.

[0037] The Mg vapor that has passed through the opening 6e of the shielding plate 5e from the evaporation material 8 side reaches the shielding portion 7d of the shielding plate 5d, changes the traveling direction by approximately 90 degrees to travel in the XY plane direction, passes through the through port 4c, and goes to the processed substrate 22. The Mg vapor that has passed through the opening 6d of the shielding plate 5d from the evaporation material 8 side reaches the shielding portion 7c of the shielding plate 5c, changes the traveling direction by approximately 90 degrees to travel in the XY plane direction, passes through the through port 4c, and goes to the processed substrate 22. The Mg vapor that has passed through the opening 6c of the shielding plate 5c from the evaporation material 8 side reaches the shielding portion 7b of the shielding plate 5b, changes the traveling direction by approximately 90 degrees to travel in the XY plane direction, passes through the through port 4c, and goes to the processed substrate 22. The Mg vapor that has passed through the opening 6b of the shielding plate 5b from the evaporation material 8 side reaches the shielding portion 7a of the shielding plate 5a, changes the traveling direction by approximately 90 degrees to travel in the XY plane direction, passes through the through port 4c, and goes to the processed substrate 22. The Mg vapor that has passed through the opening 6a of the shielding plate 5a from the evaporation material 8 side reaches the shielding portion 4d provided to the cover portion 4a of the cover portion 4, changes the traveling direction by approximately 90 degrees to travel in the XY plane direction, passes through the through port 4c, and goes to the processed substrate 22. Since the flow path of the Mg vapor is constituted in this way, even if the shielding plates 5a to 5e are provided to hinder the traveling of the Mg or MgO based on the bumping in the Z axis direction, the film formation speed of the Mg vapor to the processed substrate 22 is not hindered.

[0038] In this way, the shielding plates 5a to 5e are constituted in a manner to hinder the traveling of the Mg or MgO based on the bumping in the Z axis direction. That is, when the cover portion 4 installed to the main body portion 2 is viewed from above, the through port 4c of the cover portion 4 is shielded by the shielding portions 7a, 7b, 7c, 7d, 7e, and there is no opening to the evaporation material 8 housed in the internal space 2a. That is, the cover portion 4 is constituted to have no opening when viewed from above.

[0039] Since the flow path of the Mg vapor that has passed through any one of the openings 6e to 6b of the shielding plates 5e to 5b from the evaporation material 8 side is constituted to change the traveling direction by approximately 90 degrees to extend in the direction along the XY plane, for example, even if the evaporation is continuously performed for 2 weeks, clogging does not occur as in the patent document 1.

[0040] In addition, by overlapping the plurality of shielding plates 5a to 5e with gaps therebetween, local accumulation or clogging can be avoided.

[0041] Although the internal space 2a is likely to increase in internal pressure when the through port 4c of the cover portion 4 is blocked by the shielding plates 5a to 5e configured in such a manner that the cover portion 4 has no opening when viewed from the Z-axis direction, the increase in internal pressure of the internal space 2a is advantageous in the present embodiment. When the internal pressure increases, the temperature of the evaporation material 8 itself is also likely to increase from a low temperature (output) of the heating device 3, and the time required until the evaporation rate (amount of vapor) is detected is likely to be shortened, and the time until the rate stabilizes is likely to be faster.

[0042] Figure 7 FIG. 8 is a side view of the cover portion 4 and the shielding plates 5a to 5e when the crucible device 1 according to the present embodiment is in operation. Figure 8 FIG. 9 is a graph showing the attachment of the residue 9 of the evaporation material 8 to the processed substrate 22. Figure 8 FIG. 10 is a graph showing (1) the present embodiment and (2) a comparative example in which the shielding plates 5a to 5e are not provided. The same reference numerals are assigned to the same components as those described above. The detailed description of these components is not repeated.

[0043] According to the configuration of the cover portion 4 and the shielding plates 5a to 5e according to the present embodiment, the maintenance of the crucible device 1 is improved. That is, the residue 9 of Mg or MgO based on the bumping is likely to be blocked by the shielding plates 5a to 5e and attached to the shielding plates 5a to 5e, and thus is not likely to be scattered from the main body portion 2 into the cavity, and thus the maintenance of the cavity involving the replacement of the anti-attachment plate is simplified. In addition, the shielding plates 5a to 5e according to the present embodiment are attached to the side of the cover portion 4 rather than the inside of the main body portion 2, and thus the replacement of the main body portion 2 and the evaporation material 8 is facilitated, and the maintenance of the crucible device 1 is simplified.

[0044] In the crucible device according to the comparative example in which the shielding plates 5a to 5e are not provided, the residue 9 of Mg or MgO based on the bumping is likely to be scattered from the main body portion 2 into the cavity, and is likely to be attached to the pixel 10 on which the evaporation material 8 is evaporated as shown in (2) of FIG. 10. Figure 8 The pixel 10 to which the residue 9 of Mg or MgO based on the bumping is attached as shown in (2) of FIG. 10 is not likely to normally emit light. Since the processed substrate 22 on which the pixel 10 is evaporated enters a sealing process after a cathode is formed, the attached residue 9 cannot be removed, and thus the display panel based on the processed substrate 22 cannot be shipped. Figure 8

[0045] FIG. 9 is a graph showing the simulation results of the internal pressure of the main body portion 2. The same reference numerals are assigned to the same components as those described above. The detailed description of these components is not repeated.

[0046] ​In the crucible device 1 according to the present embodiment, the shielding plates 5a to 5e are arranged so as to be offset from each other in the circumferential direction around the central axis as viewed from the Z-axis direction as shown in FIG. 5. Therefore, as a whole of the shielding plates 5a to 5e and the cover portion 4, the surface of the evaporation material 8 is not visible as viewed from the Z-axis direction, and the opening ratio becomes 0%. In a state in which the upper surface of the crucible device 1 is open, that is, in a state in which the cover portion 4 is removed, the opening ratio becomes 100%. The internal pressure of the main body portion 2 at this time is 4.1 Pa.

[0047] In the crucible device 91 described in Patent Document 1, the shielding plates 95a, 95b, 95c of a disc shape are attached to the inner circumferential surface of the crucible 92. The shielding plate 95a is formed with an opening 96a having an opening ratio of 8.2% in the center. The shielding plate 95b is formed with six openings 96b having an opening ratio of 12.2% in the circumferential direction. The shielding plate 95c is formed with six openings 96c smaller than the openings 96b having an opening ratio of 5.4% in the circumferential direction. According to the pattern of the openings 96a, 96b, 96c, the surface of the evaporation material is not visible as a whole of the shielding plates 95a to 95c as viewed from the Z-axis direction, and the opening ratio becomes 0%. The internal pressure of the crucible 92 at this time is 7.0 Pa.

[0048] If the crucible device 1 and the crucible device 91 each having an opening ratio of 0% are compared, the internal pressure of the crucible device 1 is lower. Therefore, the temperature rise of the crucible device 1 is smaller than that of the crucible device 91, and thus the evaporation material 8 is not unnecessarily consumed as compared with the crucible device 91.

[0049] The crucible device 91 has a large temperature rise, and thus the evaporation amount of the evaporation material is larger than that of the crucible device 1. Therefore, clogging is likely to occur at the openings 96c of the shielding plate 95c of the lowermost layer. Even if the shielding plate 95c of the lowermost layer is moved to the second layer or the third layer from below, the internal pressure does not change, and thus clogging is likely to occur in long-term use.

[0050] In contrast to this, the crucible device 1 according to the present embodiment is configured so that the flow path of the Mg vapor passing through any one of the openings 6e to 6b of the shielding plates 5e to 5b from the evaporation material 8 side changes the traveling direction by substantially 90 degrees to extend in the lateral direction along the XY plane, and thus the crucible device 1 does not clog without providing the openings 96c having a small opening ratio as in Patent Document 1.

[0051] It is also possible to provide three shielding plates 5a, 5b, 5c as in the crucible device 1A. In this case, the opening ratio as viewed from the Z-axis direction becomes 10% as a whole of the shielding plates 5a, 5b, 5c and the cover portion 4, and the internal pressure of the main body portion 2 becomes 3.7 Pa.

[0052] One shielding plate 5a can also be provided as in the crucible device IB. In this case, the opening ratio when viewed from above as a whole of the shielding plate 5a and the cover portion 4 is 24%, and the internal pressure of the main body portion 2 is 3.3 Pa.

[0053] In the case where no shielding plate 5a is provided as in the crucible device 1C, the opening ratio when the cover portion 4C is viewed from the Z-axis direction is 32%, and the internal pressure of the main body portion 2 is 2.8 Pa.

[0054] In this way, as the number of shielding plates increases, the internal pressure of the main body portion 2 increases. Also, the opening ratio decreases, and thus the effect of not discharging Mg or MgO based on bumping to the outside of the main body portion 2 increases.

[0055] Figure 10 is a graph showing the relationship between the opening ratio of the shielding plates 5a to 5e and the residue 9 of the evaporation material 8 accommodated in the main body portion 2. Figure 11 is a graph showing the relationship between the opening ratio of the shielding plates 5a to 5e and the residue 9 of the evaporation material 8 accommodated in the main body portion 2. Figure 12 is a graph showing the relationship between the opening ratio of the shielding plates 5a to 5e and the internal pressure of the main body portion 2 and the adhesion ratio to the processed substrate 22. The same reference numerals are attached to the same constituent elements as the aforementioned constituent elements. The detailed description of these constituent elements is not repeated.

[0056] As shown in Figure 10 and Figure 11 When the opening ratio when viewed from above as a whole of the shielding plates 5a to 5e and the cover portion 4 decreases, the counted number of the residue 9 of Mg or MgO scattered from the main body portion 2 into the cavity decreases. When the opening ratio is 32%, the counted number of the residue 9 exceeds 3000. However, when the opening ratio is decreased to 24%, the counted number of the residue 9 drastically decreases to 1000 or less. Also, when the opening ratio is decreased to 10%, the counted number of the residue 9 further decreases, and when the opening ratio becomes 0%, the counted number of the residue 9 decreases to close to zero.

[0057] As shown in Figure 12 When the opening ratio when viewed from above as a whole of the shielding plates 5a to 5e and the cover portion 4 decreases, as shown by the curve Cl, the internal pressure of the main body portion 2 increases, and as shown by the curve C2, the adhesion ratio of the residue 9 of Mg or MgO based on bumping to the processed substrate 22 decreases.

[0058] The present disclosure is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and embodiments obtained by appropriately combining the technical means disclosed in the different embodiments are also included in the technical scope of the present disclosure. Also, by combining the technical means disclosed in each of the embodiments, a new technical feature can be formed. Explanation of reference signs

[0059] 1 Crucible device 2 Main body 2a Internal space 2b End portion 3 Heating device 4 Cover 4a Cover portion 4b Shaft portion 4c Passage 5a to 5e Shielding plate 6a to 6e Opening 7a to 7e Shielding portion 8 Evaporation material 11a to 11e Opening pattern 12 Ejection cover

Claims

1. A crucible apparatus, characterized by, Possessing: a main body portion having an internal space in which an evaporation material is housed; a cover portion provided at an end portion of the main body portion; and one or more shielding plates installed in the cover portion in a manner intersecting a depth direction of the main body portion.

2. The crucible device according to claim 1, wherein the one or more shielding plates are located in the internal space.

3. The crucible device according to claim 1 or 2, wherein the one or more shielding plates are provided in a manner perpendicular to the depth direction of the main body portion.

4. The crucible device according to claim 1, wherein a plurality of shielding plates are provided as the one or more shielding plates, the plurality of shielding plates are arranged in the depth direction of the main body portion with a space therebetween.

5. The crucible device according to claim 4, wherein each shielding plate has a shielding portion and an opening pattern.

6. The crucible device according to claim 5, wherein the plurality of shielding plates are arranged in a manner staggered with respect to the opening patterns.

7. The crucible device according to claim 6, wherein when the plurality of shielding plates are viewed in the depth direction of the main body portion from the side of the cover portion, the evaporation material is not visible.

8. The crucible device according to claim 6, wherein the cover portion has a lid portion and a shaft portion protruding from the lid portion toward the internal space, the plurality of shielding plates are supported by the shaft portion.

9. The crucible device according to claim 8, wherein the lid portion includes a plurality of passage openings through which the evaporation material after vaporization passes.

10. The crucible device according to claim 9, wherein below each passage opening, a plurality of shielding portions included in the plurality of shielding plates are overlapped in a spiral shape.

11. The crucible device according to claim 9, wherein when each passage opening is viewed in the depth direction of the main body portion from the upper side of the cover portion, the evaporation material is not visible.

12. The crucible device according to claim 9, wherein the plurality of passage openings are formed along the periphery of the lid portion.

13. The crucible device according to any one of claims 1 to 12, wherein the cover portion and the one or more shielding plates are detachable with respect to the main body portion.

14. The crucible device according to claim 4, wherein each shielding plate is disc-shaped.

15. The crucible device according to claim 4, wherein the size of the space is changeable.

16. The crucible device according to claim 5, wherein the opening pattern is composed of a plurality of openings formed in a manner along the periphery of each shielding plate.

17. The crucible device according to claim 5, wherein the shielding portion shields the evaporation material after boiling.

18. The crucible device according to claim 5, wherein the opening pattern and the space form a flow path for the evaporation material after vaporization.

19. The crucible device according to claim 6, wherein the opening patterns of the plurality of shielding plates are the same shape.

20. The crucible device according to any one of claims 1 to 19, wherein the evaporation material includes magnesium.

21. The crucible device according to claim 20, wherein The evaporation material includes a magnesium sheet covered with a magnesium oxide film.

22. The crucible apparatus according to any one of claims 1 to 21, wherein, a heating device that heats an outer surface of the main body portion.

23. A crucible apparatus, characterized by provided with: a main body portion having an internal space that accommodates an evaporation material; and a plurality of shield plates that intersect the depth direction of the main body portion, the plurality of shield plates are arranged in the depth direction of the main body portion with spaces between them, the plurality of shield plates have shield portions of the same shape and opening patterns of the same shape, the plurality of shield plates are arranged with the opening patterns offset from each other.

24. An evaporation apparatus, characterized by, provided with: the crucible apparatus according to any one of claims 1 to 23; and a chamber connected to the crucible apparatus.

Images