Miniaturized high-flow high-pressure high-dew-point saturated gas generating device

Abstract

The invention discloses a miniaturized high-flow high-pressure high-dew-point saturated gas generating device which comprises a mass flow controller, a first pressure controller, a pre-saturator, a gas inlet pipeline, a saturator, a second pressure controller, a water inlet valve, a water return valve, a constant-temperature water tank and a circulating water path, the mass flow controller controls the flow of input unsaturated gas and is connected with the pre-saturator through the first pressure controller, the pre-saturator is used for generating supersaturated moisture, the saturator is connected with the pre-saturator through a gas inlet pipeline, the supersaturated moisture generated by the pre-saturator is condensed, saturated moisture is output, and the saturated moisture is stored in the pre-saturator. The second pressure controller is connected with the saturator, the air outlet pressure of the saturator is controlled by controlling the outlet pressure, the constant-temperature water tank generates circulating water with constant and adjustable temperature, and the circulating water path conveys the circulating water generated by the constant-temperature water tank to the saturator to provide a constant-temperature environment for the saturator. High-flow, high-pressure, high-dew-point and high-stability saturated moisture generation can be realized.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of thermal metrology, and particularly relates to a miniaturized high-flow high-pressure high-dew-point saturated gas generating device. BACKGROUND

[0002] With the rapid development of high-end chip mass production and special gas manufacturing industries in China, the importance of gas humidity measurement and calibration is increasingly prominent, and higher requirements are put forward for saturated gas generating devices, which urgently need to have the characteristics of miniaturization, large flow, high temperature and high pressure, high stability, and long-term continuous operation.

[0003] At present, the widely used high-dew-point saturated gas generating device mostly adopts a bubbling saturator structure based on a large constant-temperature tank. This structure has the following limitations: first, since it relies on the whole constant-temperature tank for temperature control, the device is bulky and difficult to miniaturize; second, due to the limitation of the bubbling principle, the working flow is usually limited to less than 10 L / min to prevent liquid droplets from affecting the dew point accuracy, which cannot meet the application scenarios of large flow; third, the saturator generally operates at normal pressure, and the outlet humidity pressure cannot be adjusted, which limits its application in high-pressure environments; fourth, the constant-temperature tank has large thermal inertia and slow response, and fluctuations in liquid level and temperature can easily affect the long-term stability of the dew point output. These factors together make it difficult for traditional high-dew-point saturated gas generating devices to meet the urgent needs of high-efficiency, high-stability, and large-volume humidity calibration in high-end chip manufacturing and special gas industries. SUMMARY

[0004] The purpose of the present application is to provide a miniaturized high-flow high-pressure high-dew-point saturated gas generating device that can generate saturated humidity with large flow, high pressure, and high stability.

[0005] In order to achieve the above-mentioned purpose, one aspect of the present application provides a miniaturized high-flow high-pressure high-dew-point saturated gas generating device, which comprises a mass flow controller, a first pressure controller, a pre-saturator, an inlet gas pipeline, a saturator, a second pressure controller, a water inlet valve, a water return valve, a constant-temperature water tank, and a circulating water pipeline. The mass flow controller is used to control the flow of the input unsaturated gas and is connected to the pre-saturator through the first pressure controller. The first pressure controller is used to control the pressure in the pre-saturator by controlling the outlet pressure. The pre-saturator adopts a bubbling structure and is used to generate supersaturated humidity. The saturator is connected to the pre-saturator through the inlet gas pipeline and is used to condense the supersaturated humidity generated by the pre-saturator and output saturated humidity. The second pressure controller is connected to the saturator and is used to control the outlet pressure of the saturator by controlling the outlet pressure. The constant-temperature water tank is used to generate circulating water with constant and adjustable temperature. The circulating water pipeline is used to deliver the circulating water generated by the constant-temperature water tank to the saturator to provide a constant-temperature environment for it. The saturator comprises an internal gas path layer and an external water path layer, the water path layer is connected with the constant temperature water tank through the water inlet valve and the water return valve arranged on the circulating water path, and a constant temperature environment is provided for the gas path layer, and the gas path layer adopts a multi-layer tower plate type structure and is connected with the pre-saturator through the gas inlet pipeline.

[0006] Preferably, the pre-saturator comprises a cylinder, cover plates at left and right ends, a baffle, a gas inlet and a gas outlet, the gas inlet and the gas outlet are arranged on one end cover plate, gas enters the pre-saturator through the gas inlet, the gas outlet is communicated with the saturator gas inlet pipeline, the baffle is arranged on one end cover plate and between the gas inlet and the gas outlet, the baffle is seamlessly welded with the cylinder and one end cover plate, and is used for prolonging the contact path of gas and liquid.

[0007] Preferably, the pre-saturator further comprises a platinum resistance thermometer, a heating rod, a liquid level meter and a water inlet, the platinum resistance thermometer is used for detecting the water temperature in the pre-saturator, the heating rod is used for heating the water in the pre-saturator to make the outlet gas reach a supersaturated state, the liquid level meter is used for detecting the liquid level, and the water inlet is used for automatically supplementing water to maintain the stability of the liquid level when the liquid level detected by the liquid level meter is lower than a preset value.

[0008] Preferably, the device further comprises a condensed water return pipeline, the gas path layer is connected with the pre-saturator through the condensed water return pipeline, and the pre-saturator further comprises a water return port communicated with the condensed water return pipeline.

[0009] Preferably, the installation position of the saturator is higher than that of the pre-saturator, and the condensed water in the saturator can return to the water return port of the pre-saturator through the condensed water return pipeline by gravity, so that the condensed water is recycled.

[0010] Preferably, the temperature of the pre-saturator is higher than that of the saturator, and the supersaturated wet gas generated in the pre-saturator is condensed to form saturated wet gas after entering the saturator.

[0011] The miniaturized large-flow high-pressure high-dew-point saturated gas generating device of the above aspect of the present application can realize large-flow, high-pressure high-dew-point and high-stability saturated wet gas generation. BRIEF DESCRIPTION OF DRAWINGS

[0012] In order to more clearly illustrate the technical solutions of the present application, the following will briefly introduce the drawings used in the description of the embodiments of the present application. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor on the basis of these drawings: Figure 1 is a structure schematic diagram of a miniaturized large-flow high-pressure high-dew-point saturated gas generating device of an embodiment of the present application; Figure 2is a structural schematic diagram of a pre-saturator of an embodiment of the present application; Figure 3 is a structural schematic diagram of a saturator of an embodiment of the present application. DETAILED DESCRIPTION

[0013] For the purpose, technical solutions and advantages of the present application to be clearer, the technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0014] One embodiment of the present application provides a miniaturized high-flow high-pressure high-dew-point saturated gas generating device. As shown in Figure 1 、 Figure 2 and Figure 3 , the miniaturized high-flow high-pressure high-dew-point saturated gas generating device of the embodiment of the present application comprises a mass flow controller 1, a first pressure controller 2, a pre-saturator 3, an air inlet pipeline 4, a condensate water return pipeline 5, a saturator 6, a second pressure controller 7, a water inlet valve 8, a water return valve 9, a constant-temperature water tank 10 and a circulating water pipeline 11.

[0015] The mass flow controller 1 is used to control the flow of the input unsaturated gas and is connected with the pre-saturator 3 through the first pressure controller 2. The first pressure controller 2 controls the pressure in the pre-saturator 3 by controlling the outlet pressure, thereby controlling the pressure in the saturator 6, so as to realize the generation of high-pressure wet gas. The pre-saturator 3 is used to generate supersaturated wet gas. The saturator 6 is connected with the pre-saturator through the air inlet pipeline 4 and is used to condense the supersaturated wet gas generated by the pre-saturator 3 and output saturated wet gas. The second pressure controller 7 is connected with the saturator 6 and controls the outlet pressure of the saturator 6 by controlling the outlet pressure thereof, so that the outlet pressure is adjustable. The constant-temperature water tank 10 is used to generate circulating water with constant and adjustable temperature. The circulating water pipeline 11 is used to deliver the constant-temperature water in the constant-temperature water tank 10 to the saturator 6 to provide a constant-temperature environment for the saturator 6.

[0016] The pre-saturator 3 adopts a bubbling structure and mainly comprises a barrel 12, left and right cover plates 13, an air inlet 14, an air outlet 15, a water return port 16, a water injection port 17, a baffle 18, a platinum resistance thermometer 19, a heating rod 20 and a liquid level meter 21. The air inlet 14 and the air outlet 15 are arranged on the cover plate 13 at one end, the gas enters the pre-saturator 3 from the air inlet 14, the air outlet 15 is communicated with the air inlet pipeline 4, the baffle 18 is arranged on the cover plate 13 at one end and between the air inlet 14 and the air outlet 15, the baffle 18 is connected with the barrel 12 and the cover plate 13 at one end by seamless welding, which effectively prolongs the contact path of the gas and the liquid and enhances the pre-saturation effect. The platinum resistance thermometer 19 is used for detecting the water temperature in the pre-saturator 3. The heating rod 20 heats the internal water body, so that the outlet gas can quickly reach the supersaturation state, and the response speed of the dew point control is improved. In addition, the liquid level meter 21 is used for liquid level monitoring, when the detected liquid level is lower than the preset value, the water can be automatically supplemented through the water injection port 17, so that the device can work continuously for a long time, and the saturated moisture with high stability of the dew point value is output.

[0017] The saturator 6 comprises an external water path layer 22 and an internal gas path layer 23, the water path layer 22 is connected with the constant temperature water tank 10 through the water inlet valve 8 and the water return valve 9 arranged on the circulating water path 11, and provides a constant temperature environment for the gas path layer 23. The gas path layer 23 adopts a tower plate structure. The saturator 6 adopts a double-layer structure combining the internal gas path layer 23 and the external water path layer 22, discards the traditional large constant temperature tank design, significantly reduces the device size, and realizes miniaturization. The structure realizes effective separation of the gas path and the water path, when the gas path layer is in a high pressure state, the circulating work of the water path layer will not be affected, and the safe and stable operation of the device under high pressure is ensured. The water path layer is connected with the external constant temperature water tank through the water inlet valve and the water return valve, and circulates the constant temperature water and provides a stable constant temperature environment for the internal gas path layer. The gas path layer adopts a multi-layer tower plate structure, which greatly increases the gas-liquid contact area and efficiency, so that the large flow gas can be fully and uniformly saturated, while effectively avoiding liquid droplet entrainment, and ensuring the accuracy and stability of the output dew point. In an embodiment, the overall size of the saturator 6 is φ89mm*250mm, and six tower plates are arranged inside.

[0018] The temperature of the pre-saturator 3 is set to be higher than that of the saturator 6. The supersaturated moisture generated in the pre-saturator 3 condenses after entering the saturator 6, thereby forming saturated gas. The installation position of the saturator 6 is higher than that of the pre-saturator 3, so that the condensed water in the saturator 6 can return to the water return port of the pre-saturator 3 by gravity through the condensed water return pipeline 5, realizing recycling. The structure design effectively avoids the common liquid droplet entrainment problem under large flow and high pressure working conditions, and improves the stability and accuracy of the gas output.

[0019] Taking the saturated wet gas with a pressure of 1 MPa and a dew point temperature of 80 DEG C as an example, first, the temperature of the constant-temperature water tank 10 is set to 80 DEG C, and the temperature of the pre-saturator 3 is set to 85 DEG C; after the water temperature in the water tank reaches the set value and stabilizes, the water inlet valve 8 and the backwater valve 9 are opened. At this time, the temperature of the constant-temperature water tank 10 will fluctuate, and after the temperature stabilizes, the unsaturated gas enters the pre-saturator 3 through the mass flow controller 1 and the first pressure controller 2, forming a supersaturated gas with a pressure of 1 MPa and a dew point temperature of 85 DEG C, which enters the internal gas path layer 23 of the saturator 6 through the gas outlet 15. The supersaturated gas condenses in the saturator 6 to form 80 DEG C saturated gas, and the second pressure controller 7 forms a supersaturated gas with a pressure of 1 MPa and a dew point temperature of 80 DEG C. The condensed water in the saturator 6 returns to the pre-saturator 3 through the backwater outlet 16.

[0020] The miniaturized large-flow high-pressure high-dew-point saturated gas generating device of the above-mentioned embodiment of the present application can realize the output of saturated wet gas with large flow, high pressure, high dew point and high stability, and has the following beneficial effects: 1. Realize miniaturization and integration of the device: by abandoning the traditional large constant-temperature tank structure, adopting the saturator with double-layer design, and separating the gas path and the water path, the overall volume of the device is significantly reduced, which is convenient for deployment in application scenarios with limited space.

[0021] 2. Support stable generation of large-flow high-pressure saturated gas: the pre-saturator combines the structures of bubbling and heating to quickly generate supersaturated wet gas, and the multi-layer tray-type gas path structure in the saturator greatly improves the heat and mass transfer efficiency, so that it still maintains high dew point precision under large flow conditions. At the same time, the first pressure controller and the second pressure controller realize flexible and controllable pressure in the system and at the outlet, which expands the application ability in high-pressure environment.

[0022] 3. Significantly improve the stability and accuracy of dew point output: the pre-saturator is provided with liquid level automatic compensation and temperature control, and the saturator realizes accurate temperature control through an external constant-temperature water tank, combined with the two-stage treatment of "pre-saturation + condensation" and the gravity backflow circulation design, which not only avoids liquid droplet entrainment, but also realizes the recycling of condensed water, thereby ensuring that the device can still output saturated wet gas with high stability and high accuracy in long-term continuous operation.

[0023] 4. Enhance system working condition adaptability and reliability: the physical separation design of the gas path and the water path makes the high pressure not affect the water path circulation, and the whole machine has good high-temperature and high-pressure adaptability, which can meet the strict requirements of high-end chip manufacturing and special gas industry on high-stability and high-efficiency humidity measurement and calibration.

[0024] The foregoing merely illustrates some exemplary embodiments of the application, and it will be appreciated that those skilled in the art will be able to devise various modifications without departing from the spirit and scope of the application. The appended drawings and description are illustrative only, and are not intended to be limiting.

Claims

1. A miniaturized, high-flow-rate, high-pressure, high-dew-point saturated gas generator, characterized in that, It includes a mass flow controller, a first pressure controller, a pre-saturator, an air inlet pipe, a saturator, a second pressure controller, an inlet valve, a return valve, a constant temperature water tank, and a circulating water circuit; A mass flow controller is used to control the flow rate of the input unsaturated gas and is connected to a pre-saturator through a first pressure controller. The first pressure controller is used to control the pressure inside the pre-saturator by controlling the outlet pressure. The pre-saturator adopts a bubble-type structure to generate supersaturated moisture. The saturator is connected to the pre-saturator through an inlet pipe to condense the supersaturated moisture generated by the pre-saturator and output saturated moisture. A second pressure controller is connected to the saturator to control the outlet pressure of the saturator by controlling the outlet pressure. A constant temperature water tank is used to generate circulating water with a constant and adjustable temperature. The circulating water circuit is used to transport the circulating water generated by the constant temperature water tank to the saturator to provide it with a constant temperature environment. The saturator includes an internal gas path layer and an external water path layer. The water path layer is connected to a constant temperature water tank through an inlet valve and a return valve installed on the circulating water path, providing a constant temperature environment for the gas path layer. The gas path layer adopts a multi-layer tower plate structure and is connected to the pre-saturator through an inlet pipe.

2. The apparatus according to claim 1, characterized in that, The presaturator includes a cylinder, cover plates at both ends, baffles, an air inlet, and an air outlet. The air inlet and air outlet are located on one end cover plate. Gas enters the presaturator through the air inlet. The air outlet is connected to the saturator's air inlet pipe. The baffle is located on one end cover plate and between the air inlet and the air outlet. The baffle is seamlessly welded to the cylinder and one end cover plate to extend the contact path between the gas and the liquid.

3. The apparatus according to claim 2, characterized in that, The presaturator also includes a platinum resistance thermometer, a heating rod, a level gauge, and a water inlet. The platinum resistance thermometer is used to detect the water temperature in the presaturator, the heating rod is used to heat the water in the presaturator so that the outlet gas reaches a supersaturated state, the level gauge is used to detect the liquid level, and the water inlet is used to automatically replenish water to maintain a stable liquid level when the level gauge detects that the liquid level is lower than a preset value.

4. The apparatus according to any one of claims 1-3, characterized in that, It also includes a condensate return water pipeline, and the gas path layer of the saturator is connected to the pre-saturator through the condensate return water pipeline. The pre-saturator also includes a return water port connected to the condensate return water pipeline.

5. The apparatus according to claim 4, characterized in that, The saturator is installed higher than the pre-saturator, and the condensate in the saturator can flow back to the return port of the pre-saturator through the condensate return pipe by gravity, thus achieving recycling.

6. The apparatus according to any one of claims 1-3, characterized in that, The temperature of the pre-saturator is higher than that of the saturator. The supersaturated moisture generated in the pre-saturator enters the saturator and condenses to form saturated moisture.

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