Valve plate assembly, valve and self-cleaning sealing method of valve

Abstract

The invention provides a valve plate assembly, a valve and a self-cleaning sealing method of the valve, and relates to the technical field of valve self-cleaning. The valve plate assembly comprises a sealing piece, an action switching mechanism and a driving mechanism. The sealing piece comprises a first sealing plate and a second sealing plate; the first sealing plate and the second sealing plate are symmetrically arranged along the linear axis of the action switching mechanism; the action conversion mechanism is mechanically connected with the sealing piece and the driving mechanism; the action conversion mechanism is configured to convert linear motion of the driving mechanism into closing or opening of the first sealing plate and the second sealing plate; cleaning pieces are arranged on the first sealing plate and the second sealing plate; and the cleaning piece is configured to generate relative movement with the valve port sealing surface in the continuous contact process of the first sealing plate and the second sealing plate with the valve port sealing surface. By means of the device, when many impurities are generated in airflow, the wedge-shaped structure of the valve can push impurity sediments away from a sealing area, and therefore the sealing reliability under poor working conditions is guaranteed.

Description

Technical Field

[0001] This application relates to the field of valve self-cleaning technology, and more specifically, to a valve plate assembly, a valve, and a valve self-cleaning sealing method. Background Technology

[0002] In processes such as thin film and semiconductor device fabrication and integrated circuit manufacturing, some key processes generate a large number of particulate or thin film-like byproducts. These substances enter the vacuum pipeline with the process gas flow and are deposited and accumulated at locations where the flow field changes, such as inside valves.

[0003] Existing vacuum valve technology has significant drawbacks under this operating condition: deposits continuously accumulate on the sealing surface, directly hindering the effective fit of the sealing ring between the valve plate and the valve seat, and may scratch the sealing surface, leading to a gradual decline in sealing performance and an increase in vacuum leakage rate, which in turn affects the pressure stability and process repeatability of the process chamber.

[0004] Meanwhile, uneven deposition can easily cause valve plate movement to become stuck, incomplete opening and closing, or even drive failure, resulting in unplanned and unexpected downtime, severely disrupting continuous production and increasing capacity losses. In addition, the frequent disassembly, cleaning, or replacement of seals required to maintain valve function not only increases maintenance costs and spare parts consumption, but the disassembly and assembly process itself also introduces the risk of secondary contamination and installation errors, reducing the overall reliability of the system. Summary of the Invention

[0005] In view of this, the purpose of this application is to provide a valve plate assembly, a valve, and a self-cleaning sealing method for the valve, so as to improve the above-mentioned problems existing in the prior art.

[0006] In a first aspect, the valve plate assembly provided in the embodiments of this application includes: a sealing element, an action conversion mechanism, and a driving mechanism; the sealing element includes a first sealing plate and a second sealing plate; the first sealing plate and the second sealing plate are symmetrically arranged along the linear axis of the action conversion mechanism; the action conversion mechanism mechanically connects the sealing element and the driving mechanism; the action conversion mechanism is configured to convert the linear motion of the driving mechanism into the closing or opening of the first sealing plate and the second sealing plate; a cleaning element is provided on the first sealing plate and the second sealing plate; the cleaning element is configured to generate relative movement with the valve port sealing surface during the continuous contact between the first sealing plate and the second sealing plate and the valve port sealing surface.

[0007] In the above implementation process, the valve plate assembly includes a sealing element, an action conversion mechanism, and a drive mechanism. The linear motion of the drive mechanism is converted into the symmetrical closing or opening of the first and second sealing plates, ensuring uniform force distribution at the valve port. The cleaning element, along with the sealing plates, generates continuous relative motion with the valve port sealing surface during the sealing process. This relative motion instantly scrapes away any adhering substances, achieving synchronous self-cleaning of the sealing surface and effectively preventing impurity accumulation. The integrated action conversion mechanism simplifies the structure, reduces the number of components, and lowers the risk of jamming. This integrated design improves the sealing reliability of the valve during repeated opening and closing, extends the service life of the sealing elements, and reduces maintenance requirements.

[0008] Optionally, the motion conversion mechanism includes: a movable plate and a connecting assembly; the movable plate is connected to the output end of the drive mechanism; one end of the connecting assembly is connected to the movable plate, and the other end of the connecting assembly is connected to the first sealing plate and / or the second sealing plate; wherein, when the movable plate is driven to a first position, the first sealing plate and the second sealing plate are spread apart, and the cleaning component cleans the valve port sealing surface area contacted within the movement range; when the movable plate is driven to a second position, the connecting assembly drives the first sealing plate and the second sealing plate to close together, and the cleaning component cleans the valve port sealing surface area contacted within the movement range.

[0009] In the above implementation process, a combination of movable plates and connecting components is used to transmit the linear motion of the drive mechanism to the two sealing plates, ensuring the synchronicity and consistency of the symmetrical movement of the two plates. The cleaning component cleans the valve port sealing surface throughout the entire stroke of the sealing plates opening and closing, avoiding cleaning dead zones and maintaining the cleanliness of the sealing surface. The operation is smooth, and the synchronous completion of opening / closing and cleaning through mechanical linkage improves operational efficiency. The compact and reliable structure reduces the probability of failure under complex operating conditions.

[0010] Further, the connecting assembly includes: a reset element and a connecting element; one end of the reset element is connected to the movable plate, and the other end is connected to the side of the first sealing plate and / or the second sealing plate near the movable plate; the reset element is configured to provide an elastic force that tends to close the first sealing plate and the second sealing plate; one end of the connecting element is connected to the movable plate, and the other end is connected to the side of the first sealing plate and / or the second sealing plate near the movable plate; the connecting element is configured to control the maximum / minimum degree of closing and / or opening of the first sealing plate and the second sealing plate.

[0011] In the above implementation process, the reset element utilizes elastic force to ensure that the sealing plate automatically tends to close when the drive fails or there is no power, providing fail-safe protection and safe shut-off functions. The connecting element controls the maximum opening and final closing position of the valve by limiting the extreme positions of the sealing plate's movement, ensuring the stability and consistency of the seal. The coordinated work of the reset element and the connecting element achieves a balance between power drive and elastic reset in the mechanism, improving the controllability and reliability of the action, simplifying the control logic, reducing the absolute dependence on the positional accuracy of the drive mechanism, and enhancing the system's adaptability to repetitive actions.

[0012] Optionally, the first sealing plate and the second sealing plate are provided with mounting portions for mounting the reset element, the mounting portions having sealing grooves configured to accommodate isolation sealing rings.

[0013] In the above implementation process, the installation unit integrates the reset element within the sealing plate, optimizing the internal space layout and making the structure more compact. A sealing groove is created to accommodate the isolation sealing ring, establishing a physical barrier between the reset element and the medium, preventing the medium from entering or corroding the elastic element, and ensuring the durability of the reset function. This isolation measure reduces frictional resistance during the movement of the sealing plate, making the operation smoother. This structure enhances the environmental adaptability of key moving parts, improves the operational reliability of the valve under corrosive or particulate-containing media conditions, and extends the maintenance cycle of the reset element.

[0014] Furthermore, the cleaning component is an elastic scraper fixed to the edge of the seal.

[0015] In the above implementation process, an elastic scraper is used as the cleaning component. As the sealing plate moves, the scraper deforms to closely conform to the contour of the valve port sealing surface, effectively scraping away adhering substances. The elastic contact reduces the stringent requirements for the flatness of the sealing surface and minimizes wear caused by hard contact. The scraper material and its elastic properties give it self-compensating capabilities, maintaining good contact pressure during continuous cleaning. A reliable cleaning function is achieved with a simple structure, avoiding the need for an independent drive mechanism, reducing overall complexity and manufacturing costs, and minimizing the risk of seal failure due to insufficient cleaning.

[0016] Secondly, embodiments of this application provide a valve, the valve including: a valve body, a stroke adjustment assembly, and a valve plate assembly disposed inside the valve body; the stroke adjustment assembly includes: a limiting part; the limiting part is disposed inside the valve body and corresponds to the movement path of the movable plate in the valve plate assembly; the limiting part is configured to limit the final stroke of the movable plate when it moves toward a first position.

[0017] In the above implementation process, a limiting part corresponding to the movement path of the movable plate is set inside the valve body, directly and mechanically limiting the maximum opening stroke of the valve. This adjustment method provides a stable physical limit, ensuring the consistency of valve opening and avoiding damage to the mechanism due to drive overshoot. The introduction of the stroke adjustment component allows the valve opening to be adjusted and set according to operating conditions, improving the product's versatility and adaptability. This structure integrates the adjustment function into the valve body, eliminating the need to modify external drives or controls, simplifying on-site commissioning and maintenance operations, and enhancing the stability and repeatability of the valve's long-term operation.

[0018] Optionally, the limiting part includes: an adjusting column and an adjusting interface; the adjusting column is mechanically connected to the adjusting interface; the adjusting column is configured to change the sealing degree of the valve plate assembly by adjusting the connection length with the adjusting interface.

[0019] In the aforementioned process, the extreme positions of the movable plate can be fine-tuned by changing the connection length of the adjusting column and the adjusting interface, thereby achieving direct control over the final sealing degree of the valve. This mechanical adjustment method provides an intuitive and stable sealing pressure setting, allowing for external adaptive adjustment of the sealing effect. The structure is simple and reliable, avoiding reliance on complex electronic or hydraulic systems and reducing the cost and complexity of the adjustment process. This design facilitates calibration after installation or during maintenance, ensuring that the valve maintains its expected sealing performance under different operating conditions or after seal wear, extending the valve's service life.

[0020] Thirdly, this application also provides a self-cleaning sealing method for a valve. The self-cleaning sealing method is applied to a valve and / or valve plate assembly. The method includes: a valve opening step: controlling the drive mechanism in the valve plate assembly to output axial movement, and driving the sealing elements in the valve plate assembly to close together and disengage from the valve port sealing surface through the action conversion mechanism in the valve plate assembly, and then performing a translational movement to the fully open position; a valve closing step: controlling the drive mechanism to output axial movement in the opposite direction, and driving the sealing elements to translate towards the valve port sealing surface through the action conversion mechanism. During the continuous contact between the first sealing plate and the second sealing plate and the valve port sealing surface, the cleaning element and the valve port sealing surface generate relative movement, and then continue to move to make the sealing elements open together until they are tightly pressed against the valve port sealing surface to achieve a seal.

[0021] In the above implementation process, by controlling the axial movement of the drive mechanism, the linear motion is converted into the closing action of the seal when it disengages from the valve port via the motion conversion mechanism, reducing friction and drag of the sealing surface during the opening process. During the closing process, the cleaning component begins relative movement while the sealing plate is in contact with the valve port, cleaning the sealing surface before the final tight seal. This combines the sealing action and self-cleaning function into a single continuous stroke, optimizing the valve opening and closing sequence. While achieving reliable sealing, it automatically maintains the cleanliness of the sealing surface, avoiding separate cleaning steps, improving operational efficiency, and reducing the risk of seal failure due to contaminants.

[0022] Optionally, in the valve closing step, the movement of the seals opening apart is achieved by the following method: the drive mechanism drives the seals toward the valve port sealing surface via the movable plate; when the seals contact the limiting part in the valve body, the axial movement stops, while the movable plate continues to move, causing the connecting component in the valve plate assembly to actuate and open the seals to both sides.

[0023] In the above process, when the seal contacts the valve body's limiting part, its axial movement stops, while the movable plate continues to move forward under the drive mechanism, forcing the connecting assembly to open the seal to both sides and press it tightly against the sealing surface. In other words, the cleaning component is first cleaned through translation, and then the opening action establishes the final sealing pressure. This method optimizes the force transmission path, efficiently converting the linear thrust of the drive mechanism into radial sealing force, ensuring uniform and reliable sealing while reducing impact on the sealing surface. The entire process is continuous and mechanically linked, improving the coordination of valve closing actions and sealing consistency.

[0024] Optionally, the method further includes a sealing compression adjustment step: by adjusting the extension length of the adjusting column in the limiting part, limiting the final stroke of the movable plate when it moves toward the first position, and controlling the final distance at which the first sealing plate and the second sealing plate are stretched, the compression of the sealing members on the first sealing plate and the second sealing plate is adjusted.

[0025] In the above implementation process, the sealing compression adjustment step mechanically sets the final stroke of the movable plate by adjusting the extension length of the adjusting column, thereby directly controlling the final distance the seal is opened and the compression of the sealing component. The adjustment process is based on mechanical limits and is stable after setting, ensuring consistency of compression under repeated actions. This step simplifies the maintenance of sealing performance, compensating for seal wear or adapting to different pressure requirements without disassembling the valve, helping to maintain the sealing reliability of the valve during long-term operation and extending the service life of the seal. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a first schematic diagram of a valve plate assembly provided in an embodiment of this application; Figure 2 This is a second schematic diagram of the valve plate assembly provided in an embodiment of this application; Figure 3 This is a third schematic diagram of the valve plate assembly provided in an embodiment of this application; Figure 4 This is a first schematic diagram of a valve provided in an embodiment of this application; Figure 5 This is a second schematic diagram of a valve provided in an embodiment of this application; Figure 6 This is a first schematic diagram of a self-cleaning sealing method for a valve provided in an embodiment of this application; Figure 7 This is a second schematic diagram of a valve self-cleaning sealing method provided in an embodiment of this application.

[0028] Icons: Cleaning component-001; Rubber ring-002; Mounting part-003; Seal-100; First sealing plate-110; Second sealing plate-120; Action conversion mechanism-200; Movable plate-210; Connecting assembly-220; Drive mechanism-300; Connecting rod-310; Drive component-320; Stroke adjustment assembly-400; Adjusting column-410; Adjusting block-420; Adjustment interface-430; Housing-500; Valve plate assembly-1000; Valve-2000. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of the embodiments of this application.

[0030] Firstly, please refer to Figure 1 , Figure 1 This is a first schematic diagram of the valve plate assembly 1000 provided in an embodiment of this application.

[0031] The valve plate assembly 1000 provided in this application embodiment includes: a sealing element 100, an action conversion mechanism 200, and a drive mechanism 300; the sealing element 100 includes a first sealing plate 110 and a second sealing plate 120; the first sealing plate 110 and the second sealing plate 120 are symmetrically arranged along the linear axis of the action conversion mechanism 200; the action conversion mechanism 200 is mechanically connected to the sealing element 100 and the drive mechanism 300; the action conversion mechanism 200 is configured to convert the linear motion of the drive mechanism 300 into the closing or opening of the first sealing plate 110 and the second sealing plate 120; a cleaning element 001 is provided on the first sealing plate 110 and the second sealing plate 120; the cleaning element 001 is configured to generate relative movement with the valve port sealing surface during the continuous contact between the first sealing plate 110 and the second sealing plate 120 and the valve port sealing surface.

[0032] In the above implementation process, initially, the drive mechanism 300 is in the retracted position. The action conversion mechanism 200 synchronously transmits the linear retraction force to the first sealing plate 110 and the second sealing plate 120, causing the two plates to be in the open position, the sealing element 100 to disengage from the valve port sealing surface, and the valve to remain open or in standby state. When it is necessary to close the valve, the drive mechanism 300 extends outward along the axis, outputting a linear thrust; the action conversion mechanism 200 decomposes the linear thrust in one direction into a pair of equal and opposite lateral components, pushing the first sealing plate 110 and the second sealing plate 120 to close simultaneously in the axial direction. During the closing process of the two sealing plates, the cleaning element 001 on its outer edge first contacts the valve port sealing surface; as the sealing plates continue to close, relative sliding occurs between the cleaning element 001 and the sealing surface, thereby pre-scraping away particles, dust, or crystals attached to the sealing surface, achieving cleaning before sealing. When the sealing plate finally closes to its limit position, the outer edge of the sealing element 100 presses against the valve port sealing surface, completing valve closure and sealing. At this time, the cleaning element 001 is slightly compressed, maintaining slight contact with the sealing surface, providing continuous wiping. When the valve is opened again, the drive mechanism 300 retracts in the opposite direction, and the action conversion mechanism 200 converts the linear retraction force into a lateral opening force. The first sealing plate 110 and the second sealing plate 120 move away from the axis simultaneously, and the cleaning element 001 slides and sweeps the sealing surface again, carrying out any new impurities that may have been generated during the closing phase. When the sealing plate is fully opened, the valve returns to the open state, waiting for the next cycle. Through the above steps, the valve plate assembly 1000, in the entire cycle of opening, closing, and opening, utilizes the opening and closing action of the sealing plate itself to perform bidirectional repeated cleaning of the valve port sealing surface without additional drive, reducing the risk of leakage and extending the sealing life.

[0033] Optionally, please refer to Figure 2 , Figure 2 This is a second schematic diagram of the valve plate assembly provided in an embodiment of this application.

[0034] The motion conversion mechanism 200 includes: a movable plate 210 and a connecting assembly 220; the movable plate 210 is connected to the output end of the drive mechanism 300; one end of the connecting assembly 220 is connected to the movable plate 210, and the other end of the connecting assembly 220 is connected to a first sealing plate 110 and / or a second sealing plate 120; wherein, when the movable plate 210 is driven to a first position, the first sealing plate 110 and the second sealing plate 120 are spread apart, and the cleaning component 001 cleans the valve port sealing surface area contacted within the movement range; when the movable plate 210 is driven to a second position, the connecting assembly 220 drives the first sealing plate 110 and the second sealing plate 120 to close together, and the cleaning component 001 cleans the valve port sealing surface area contacted within the movement range.

[0035] In the above implementation process, in the initial open state, the drive mechanism 300 retracts, and the movable plate 210 is in the first position, that is, the side closer to the drive mechanism 300. At this time, the connecting component 220 converts the linear retraction force of the movable plate 210 into an outward lateral thrust, causing the first sealing plate 110 and the second sealing plate 120 to open synchronously and move away from the axis of the movable plate 210. The sealing element 100 disengages from the valve port sealing surface, and the valve remains fully open. At the same time, the cleaning element 001 on the outer edge of each sealing plate performs a first relative sliding sweep with the sealing surface within the opening stroke, carrying out the particles, crystals, or dust remaining in the previous closing stage, thus achieving cleaning. In the closing stage, when the system issues a valve closing command, the drive mechanism 300 extends and pushes the movable plate 210 along the axis to the second position, that is, the side away from the drive mechanism 300, for linear movement. The connecting component 220 then changes the direction of the force, decomposing the single axial thrust into a pair of lateral pulling forces pointing towards the axis, causing the first sealing plate 110 and the second sealing plate 120 to close synchronously. During the closing process, the cleaning component 001 slides over the sealing surface again for a second pre-cleaning; when the movable plate 210 reaches the second position limit, the outer edges of the two sealing plates press against the valve port sealing surface to form a seal, and the valve closes.

[0036] In one embodiment of this application, during the sealing and holding phase, the movable plate 210 remains in the second position, the drive mechanism 300 maintains the extension force, and the connecting component 220 self-locks to prevent the sealing plate from rebounding, ensuring a constant sealing specific pressure; at this time, the cleaning component 001 is slightly compressed and always keeps in contact with the sealing surface, so that it can continuously wipe in the small relative displacement caused by fluid pulsation or temperature change, and inhibit the adhesion of new impurities.

[0037] In one embodiment of this application, the connecting component 220 may be a mechanical component capable of realizing the above process, such as a symmetrical hinged connecting rod, a groove-roller slider, or a gear-rack synchronization mechanism.

[0038] Further, the connecting assembly 220 includes: a reset element and a connecting element; one end of the reset element is connected to the movable plate 210, and the other end is connected to the side of the first sealing plate 110 and / or the second sealing plate 120 near the movable plate 210; the reset element is configured to provide an elastic force that tends to close the first sealing plate 110 and the second sealing plate 120; one end of the connecting element is connected to the movable plate 210, and the other end is connected to the side of the first sealing plate 110 and / or the second sealing plate 120 near the movable plate 210; the connecting element is configured to control the maximum / minimum limits of closing and / or opening of the first sealing plate 110 and the second sealing plate 120.

[0039] In the above implementation process, the reset element always applies an elastic preload force pointing towards the axis to the first sealing plate 110 and the second sealing plate 120, causing the first sealing plate 110 and the second sealing plate 120 to tend to close. When the movable plate 210 moves to the second position and the connecting element forcibly pulls the distance between the first sealing plate 110 and the second sealing plate 120 to the closing limit, the reset force is further stored. Once the drive mechanism 300 loses pressure or power, the stored energy is released to automatically complete the emergency seal and prevent the valve from opening accidentally. At the same time, the connecting element sets the maximum closing position and / or minimum opening position through mechanical hard limit, which not only avoids damage to the valve port sealing surface due to overpressure of the sealing plate, but also ensures that it does not interfere with the flow channel wall when opening. The reset element and the connecting element work together to give the sealing plate dual protection of elastic compensation and rigid limit throughout the process, improving the sealing reliability and service life.

[0040] In one embodiment of this application, the reset element may be a compression spring, tension spring, disc spring, or elastic plate, which can provide elastic force; the connecting element may be an adjustable connecting rod, a combination of a slide and a limit pin, or a combination of a wedge and a stop.

[0041] Optionally, please refer to Figure 3 , Figure 3 This is a third schematic diagram of the valve plate assembly provided in an embodiment of this application.

[0042] The first sealing plate 110 and the second sealing plate 120 are provided with mounting portions 003 for mounting reset elements. The mounting portions 003 have sealing grooves configured to accommodate isolation sealing rings.

[0043] In the above implementation process, the mounting part 003 is integrally formed on the inner side of the first sealing plate 110 and the second sealing plate 120 near the movable plate 210, and is in the form of a boss or countersunk hole; the end of the reset element is sleeved or hooked on the outer periphery of the mounting part 003, and the sealing groove opened on the outer periphery of the mounting part 003 is embedded with an isolation sealing ring. When the valve is in a dusty, high-humidity or corrosive fluid environment, the isolation sealing ring forms a radial or end face seal with the mounting part 003 and the side wall of the movable plate 210, preventing the medium from seeping into the spring cavity along the gap of the reset element, avoiding spring corrosion, jamming or force attenuation; during disassembly and maintenance, the reset element can be quickly replaced simply by pulling out the sealing ring, extending the life of the connecting assembly 220 and reducing the failure rate.

[0044] Alternatively, the sealing ring can be made of oil- and temperature-resistant fluororubber, EPDM, or PTFE-coated elastomer, and its type can be O-ring, star ring, or rectangular ring, depending on the medium temperature and corrosiveness.

[0045] Optionally, the first sealing plate 110 and the second sealing plate 120 are provided with rubber rings 002. When the valve is closed, the rubber rings 002 are squeezed between the first sealing plate 110 and the second sealing plate 120 and the valve sealing surface, forming an elastic barrier that completely isolates the two sides of the valve (atmospheric side and vacuum side). Even if tiny particles are pressed into the sealing surface, the elasticity of the rubber rings 002 can deform them, still encapsulating the particles and maintaining effective sealing contact, preventing particles from creating permanent leakage channels. As a relatively soft component, the rubber rings 002 bear most of the friction and compression. It can protect the surface of the metal valve seat from being scratched by hard particles, extending the life of the valve's core components. The rubber rings 002 themselves are consumable parts, and the cost of periodic replacement is far lower than the cost of repairing the metal valve seat.

[0046] Furthermore, the cooperation between the aforementioned action conversion mechanism 200 and the first sealing plate 110 and the second sealing plate 120 is more flexible than that of the traditional integral molded valve plate and reduces the wear of the rubber ring 002, thus extending the valve life.

[0047] Furthermore, the cleaning component 001 is an elastic scraper fixed to the edge of the seal 100.

[0048] In one embodiment of this application, the elastic scraper is directly vulcanized on the outer edge of the sealing plate, which is the annular end face edge of the sealing plate facing the valve port sealing surface and first contacting the valve port. The material is temperature- and corrosion-resistant EPDM or fluororubber, with a thin cutting edge in the cross-section; the cutting edge protrudes 1 to 2 mm above the sealing surface and adheres tightly to the sealing surface due to its own elasticity. As the valve opens and closes, the cutting edge scrapes back and forth like a windshield wiper, sweeping particles and liquid films out of the sealing area. Simultaneously, the elasticity allows for automatic compensation of minor wear, maintaining long-term effective cleaning.

[0049] In one embodiment of this application, the clamping force applied by the cleaning component to the sealing surface is sufficient to keep the blade edge in contact and peel off adhering particles, while remaining below the yield limit of the sealing material, ensuring that the sealing surface remains intact and free of visible scratches after scraping. This force, when converted, is approximately equivalent to a load of 3 to 5 grams per millimeter on the outer edge of the sealing plate, which is only slightly less than the force of a light pinch with a finger. This is sufficient to maintain contact during scraping, yet far below the critical load that would cause visible scratches on the sealing surface.

[0050] Alternatively, the material of the elastic scraper can be silicone rubber, fluororubber or EPDM. All three can maintain their resilience in the range of -50 ℃ to 150 ℃, and are resistant to steam, acids and alkalis. You only need to choose one of the three according to the temperature and corrosiveness of the medium on site.

[0051] In one embodiment of this application, silicone rubber is preferred for low-temperature oily or polymer dust environments because it maintains high resilience at -50°C; EPDM is selected for medium-temperature acid and alkali vapor environments because it is resistant to hydrolysis, alkali, and is the most economical; and fluororubber is used for high-temperature strongly corrosive or halogen-containing media because it can withstand temperatures above 150°C and strong oxidation and corrosion.

[0052] Optionally, the drive mechanism 300 includes: a drive component 320 and a connecting rod 310; the drive component 320 is mechanically connected to the connecting rod 310; the drive component 320 can be a cylinder, an electric push rod, or a handwheel-screw pair; the connecting rod 310 is coaxially fixed to the movable plate 210, directly transmitting the linear thrust or pull force of the drive component 320 to the movable plate 210 to realize the opening and closing of the valve.

[0053] In one embodiment of this application, the driving component 320 is a double-acting cylinder. When the piston of the double-acting cylinder descends to its position, it drives the movable plate 210 to move downwards synchronously. At this time, the reset element retracts, and the first and second sealing plates 120 close inwards and disengage from the valve port. The assembly continues to descend until the valve is fully open. During the reverse movement, the piston moves upwards, and the elastic scraper on the outer edge of the sealing plate first contacts the valve port sealing surface, sweeping out impurities. Then, the sealing plate stops when it hits the limit part, and the movable plate 210 continues to move upwards. The connecting assembly 220 is forced to open, so that the two sealing plates are tightly pressed against the cover to the left and right respectively, and the isolation sealing ring is compressed to achieve a seal.

[0054] Optionally, the valve plate assembly also includes a bellows seal (not shown) for sealing the output shaft of the drive mechanism 300.

[0055] In the aforementioned process, the vacuum valve requires external power (motor, cylinder, etc.) to drive the internal valve plate to open and close. However, the output shaft of the drive mechanism 300 must penetrate into the vacuum chamber and connect to the valve plate to transmit power. The vacuum chamber must be completely sealed; any gap penetrating the component will become a fatal leak point. If only a common O-ring is used to seal this rotating or linearly moving shaft, the relative movement between the shaft and the sealing ring will cause continuous friction, eventually leading to wear and leakage. Moreover, for high vacuum or ultra-high vacuum applications, the leakage rate of this dynamic sealing method is still too high. The bellows seal is a flexible, expandable tubular component made of metal (usually stainless steel). One end is welded to the valve body (integrated with the vacuum chamber), and the other end is welded to the drive shaft. Because both ends are welded, it physically completely isolates the drive shaft from the internal vacuum environment.

[0056] Secondly, please refer to Figure 4 , Figure 4 This is a first schematic diagram of a valve provided in an embodiment of this application.

[0057] This application provides a valve 2000, which includes a valve body, a stroke adjustment assembly 400, and a valve plate assembly 1000 disposed inside the valve body. The stroke adjustment assembly 400 includes a limiting part. The limiting part is disposed inside the valve body and corresponds to the movement path of the movable plate 210 in the valve plate assembly 1000. The limiting part is configured to limit the final stroke of the movable plate 210 when it moves toward a first position.

[0058] In the above-described process, the stroke adjustment component 400 hard-limits the return stroke (towards the first position) of the movable plate 210 through the limiting part, the drive mechanism 300 retracts, and the movable plate 210, carrying the first sealing plate 110 and / or the second sealing plate 120, moves together towards the first position. When the movable plate 210 approaches the ultimate opening position, its end face or side flange meets the limiting part pre-fixed inside the valve body, forming a mechanical stop. The limiting part absorbs the remaining inertia and forcibly stops the movable plate 210, so that the sealing plate reaches the fully open but not over-extension state, avoiding excessive opening that would cause the seal 100 to fall out of the valve port or hit the inner wall of the valve body. By rotating the limiting screw or replacing the gasket, the axial position of the limiting part can be finely adjusted online, thereby changing the final stopping point of the movable plate 210, realizing a two-stage adjustment from coarse to fine for the flow area of ​​the valve 2000 or the initial gap of the sealing plate. After the adjustment is completed, the back nut is locked, and the limiting part remains fixed. Each subsequent valve opening repeats the same endpoint to ensure that the opening degree of the batch of valves 2000 is consistent. It protects the sealing plate and cleaning component 001 from excessive impact, and provides an adjustable means for on-site flow matching without disassembly.

[0059] Alternatively, the limiting part can be an adjustable screw, a stepped boss, or a retaining ring.

[0060] Optionally, in Figure 4 Based on, combined Figure 5 This is a second schematic diagram of a valve provided in an embodiment of this application.

[0061] The limiting part includes: an adjusting column 410 and an adjusting interface 430; the adjusting column 410 and the adjusting interface 430 are mechanically connected; the adjusting column 410 is configured to change the sealing degree of the valve plate assembly 1000 by adjusting the connection length with the adjusting interface 430.

[0062] In the above implementation process, the limiting part is fixed inside the valve 2000, and the adjusting column 410 is screwed into the adjusting interface 430 on the side wall of the valve body. Its length extending into the valve cavity can be adjusted in real time by hand or with tools outside the valve. When the movable plate 210 moves to the first position and is about to reach the end point where the first sealing plate 110 and the second sealing plate 120 are fully open, it first encounters the inner end face of the adjusting column 410 rather than the valve body itself; as the adjusting column 410 continues to be screwed in, its inner end face protrudes further into the valve cavity, the movable plate 210 is stopped in advance, the opening amplitude of the sealing plate is reduced accordingly, the initial gap between the sealing element 100 and the sealing surface of the valve port becomes smaller, the closing stroke required when closing is shortened, and the sealing specific pressure increases. Conversely, when it is screwed out, the sealing specific pressure decreases. There is no need to disassemble the valve on site. Simply screw the adjusting column 410 outside the valve and tighten the back nut to adjust the opening end point and sealing pressure to the optimal value in one go during the trial operation phase. By adjusting the extension length of the limiting part, the final outward movement distance of the sealing plate can be controlled, thereby accurately setting the compression amount of the sealing ring, preventing overpressure damage, and extending its service life.

[0063] In the above embodiments, the adjusting column 410 can be a fully threaded stud or a fine-pitch screw, and the adjusting interface 430 can be a welded nut or a threaded seat with a sealing ring. An adjusting block 420 can also be added to indicate the degree of positioning. A rigid adjusting block 420 is added to the end of the adjusting column 410. When its end face is flush with the inner wall of the valve body, it indicates that the movable plate 210 has reached the preset fully open limit, quickly confirming the endpoint position without additional measurement.

[0064] Thirdly, please combine Figure 6 and Figure 7 , Figure 6 This is a first schematic diagram of a valve self-cleaning sealing method provided in an embodiment of this application. Figure 7 This is a second schematic diagram of a valve self-cleaning sealing method provided in an embodiment of this application.

[0065] This application embodiment also provides a valve self-cleaning sealing method, which is applied to a valve 2000 and / or a valve plate assembly 1000. The method includes: a valve 2000 opening step: controlling the drive mechanism 300 in the valve plate assembly 1000 to output axial movement, and driving the sealing element 100 in the valve plate assembly 1000 to close together and disengage from the valve port sealing surface through the action conversion mechanism 200 in the valve plate assembly 1000, and then performing translational movement to the fully open position; a valve 2000 closing step: controlling the drive mechanism 300 to output axial movement in the opposite direction, and driving the sealing element 100 to translate towards the valve port sealing surface through the action conversion mechanism 200. During the continuous contact between the first sealing plate 110 and the second sealing plate 120 and the valve port sealing surface, the cleaning element 001 generates relative movement with the valve port sealing surface, and then continues to move to make the sealing element 100 open together until it is tightly pressed against the valve port sealing surface to achieve a seal.

[0066] In the above process, the valve 2000 automatically completes a three-stage cleaning and sealing process with each opening and closing. First, in the opening stage, the drive mechanism 300 outputs a short-stroke axial pulling force, and the action conversion mechanism 200 converts the pulling force into the closing force of the two sealing plates, causing the sealing element 100 to quickly detach from the valve port sealing surface, avoiding hard scraping. Then, the drive mechanism 300 continues to move in the same direction, and the entire valve plate assembly 1000 moves to the fully open position, ensuring complete unobstructed flow. Second, in the closing stage, the drive mechanism 300 outputs a reverse axial thrust, and the valve plate assembly 1000 moves towards the valve port as a whole. When the cleaning element 001 on the outer edge of the sealing plate contacts the sealing surface, it begins to slide and sweep, pushing particles, liquid films, or crystal layers forward away from the sealing area. Finally, in the final pressure stage, once the sealing plate stops axially when it reaches the limit, the movable plate 210 continues to advance, forcing the action conversion mechanism 200 to open. The two sealing plates move outward to the left and right respectively, and the sealing ring is evenly compressed to the design specific pressure, tightly adhering to the valve port sealing surface to complete the seal. At this time, the cleaning component 001 still maintains a slight interference fit, allowing for continuous micro-rubbing during subsequent pressure pulsations to inhibit the adhesion of new impurities. Through the above steps, the valve 2000 automatically completes the cleaning of the sealing surface and reliable compression sealing in a single reciprocating cycle, eliminating the need for an external cleaning system and preventing the sealing ring from being sheared by impurities, thus extending its service life.

[0067] Optionally, during the valve 2000 closing step, the movement of the seals 100 opening apart is achieved by the following method: the drive mechanism 300 drives the seals 100 toward the valve port sealing surface via the movable plate 210; when the seals 100 contact the limiting part in the valve body, the axial movement stops, while the movable plate 210 continues to move, causing the connecting component 220 in the valve plate assembly 1000 to actuate and open the seals 100 to both sides.

[0068] In the above process, the remaining stroke of the moving plate 210 is converted into lateral displacement by the connecting component 220: the hinge link or wedge slider of the connecting component 220 is forced to open, just enough to make the sealing ring reach the compression amount; the limiting part at the same time blocks the sealing plate from moving forward, ensuring that only pure lateral opening is generated, without shearing slip, and the cleaning part 001 is still tightly attached to the cover at the moment of opening.

[0069] Optionally, the method further includes a sealing compression adjustment step: by adjusting the extension length of the adjusting column 410 in the limiting part, limiting the final stroke of the movable plate 210 when it moves toward the first position, and controlling the final distance at which the first sealing plate 110 and the second sealing plate 120 are stretched, the compression of the sealing members on the first sealing plate 110 and the second sealing plate 120 is adjusted.

[0070] In the above implementation process, by adjusting the extension length of the adjusting column 410 in the limiting part, the final stop position of the movable plate 210 is changed, thereby controlling the distance by which the sealing plate is stretched open, and thus adjusting the compression amount of the sealing component.

[0071] In summary, this application provides a valve plate assembly 1000, a valve 2000, and a valve self-cleaning sealing method, relating to the field of valve 2000 self-cleaning technology. The valve plate assembly 1000 includes: a sealing element 100, an action conversion mechanism 200, and a drive mechanism 300; the sealing element 100 includes a first sealing plate 110 and a second sealing plate 120; the first sealing plate 110 and the second sealing plate 120 are symmetrically arranged along the linear axis of the action conversion mechanism 200; the action conversion mechanism 200 mechanically connects the sealing element 100 and the drive mechanism 300; the action conversion mechanism 200 is configured to convert the linear motion of the drive mechanism 300 into the closing or opening of the first sealing plate 110 and the second sealing plate 120; a cleaning element 001 is provided on the first sealing plate 110 and the second sealing plate 120; the cleaning element 001 is configured to generate relative movement with the valve port sealing surface during the continuous contact between the first sealing plate 110 and the second sealing plate 120 and the valve port sealing surface. With the aforementioned device, when a large amount of impurities are generated in the airflow, the wedge-shaped structure of the valve 2000 can push the impurity deposits away from the sealing area, thereby ensuring the reliability of the seal under adverse operating conditions. Furthermore, it significantly reduces hardware friction and extends the number of initial maintenance cycles for the valve 2000.

[0072] In the several embodiments provided in this application, it should be understood that the disclosed device can also be implemented in other ways. The device embodiments described above are merely illustrative. For example, the block diagrams in the accompanying drawings show the possible architecture, functions, and operations of the device according to various embodiments of this application. The above descriptions are merely embodiments of this application and are not intended to limit the scope of protection of this application. For those skilled in the art, this application can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application. It should be noted that similar reference numerals and letters in the following drawings indicate similar items. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0073] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

[0074] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A valve plate assembly, characterized in that, The valve plate assembly includes: a seal, an action conversion mechanism, and a drive mechanism; The sealing element includes a first sealing plate and a second sealing plate; the first sealing plate and the second sealing plate are symmetrically arranged along the linear axis of the action conversion mechanism. The motion conversion mechanism is mechanically connected to the seal and the drive mechanism; the motion conversion mechanism is configured to convert the linear motion of the drive mechanism into the closing or opening of the first sealing plate and the second sealing plate; The first sealing plate and the second sealing plate are provided with a cleaning element; the cleaning element is configured to move relative to the valve port sealing surface during the continuous contact between the first sealing plate and the second sealing plate and the valve port sealing surface.

2. The valve plate assembly according to claim 1, characterized in that, The motion conversion mechanism includes: a movable plate and a connecting component; The movable plate is connected to the output end of the drive mechanism; one end of the connecting component is connected to the movable plate, and the other end of the connecting component is connected to the first sealing plate and / or the second sealing plate; When the movable plate is driven to the first position, the first sealing plate and the second sealing plate are spread apart, and the cleaning component cleans the valve port sealing surface area within the movement range; when the movable plate is driven to the second position, the connecting assembly drives the first sealing plate and the second sealing plate to close together, and the cleaning component cleans the valve port sealing surface area within the movement range.

3. The valve plate assembly according to claim 2, characterized in that, The connection assembly includes: a reset element and a connection element; One end of the reset element is connected to the movable plate, and the other end is connected to the side of the first sealing plate and / or the second sealing plate near the movable plate; the reset element is configured to provide an elastic force that tends to close the first sealing plate and the second sealing plate. One end of the connecting element is connected to the movable plate, and the other end is connected to the side of the first sealing plate and / or the second sealing plate near the movable plate; the connecting element is configured to control the maximum / minimum degree to which the first sealing plate and the second sealing plate close and / or open.

4. The valve plate assembly according to claim 3, characterized in that, in, The first sealing plate and the second sealing plate are provided with mounting portions for mounting the reset element. The mounting portions have sealing grooves configured to accommodate isolation sealing rings.

5. The valve plate assembly according to claim 4, characterized in that, in, The cleaning component is an elastic scraper fixed to the edge of the seal.

6. A valve, characterized in that, The valve includes: a valve body, a stroke adjustment assembly, and a valve plate assembly as described in any one of claims 1 to 5 disposed inside the valve body; The stroke adjustment component includes: a limiting part; The limiting part is disposed inside the valve body and corresponds to the movement path of the movable plate in the valve plate assembly; the limiting part is configured to limit the final stroke of the movable plate when it moves toward the first position.

7. The valve according to claim 6, characterized in that, The limiting part includes: an adjusting column and an adjusting interface; The adjusting column is mechanically connected to the adjusting interface; the adjusting column is configured to change the sealing degree of the valve plate assembly by adjusting the connection length with the adjusting interface.

8. A self-cleaning sealing method for a valve, characterized in that, The self-cleaning sealing method for the valve is applied to the valve as described in any one of claims 6 to 7, the method comprising: Valve opening steps: Control the drive mechanism in the valve plate assembly to output axial movement, drive the sealing elements in the valve plate assembly to close together through the motion conversion mechanism in the valve plate assembly to disengage from the valve port sealing surface, and then perform translational movement to the fully open position; Valve closing steps: Control the drive mechanism to output axial movement in the opposite direction, and drive the sealing element to move towards the valve port sealing surface through the action conversion mechanism. During the continuous contact between the first sealing plate and the second sealing plate and the valve port sealing surface, the cleaning element and the valve port sealing surface generate relative movement. Then, the movement continues to make the sealing elements open up to each other until they are tightly pressed against the valve port sealing surface to achieve a seal.

9. The method according to claim 8, characterized in that, In the valve closing step, the movement of the seals opening apart from each other is achieved in the following way: The drive mechanism drives the sealing element to move toward the valve port sealing surface via the movable plate; When the seal contacts the limiting part inside the valve body, it stops moving axially, while the movable plate continues to move, causing the connecting component in the valve plate assembly to move and push the seal open to both sides.

10. The method according to claim 9, characterized in that, The method further includes a sealing compression adjustment step: By adjusting the extension length of the adjusting column in the limiting part, the final stroke of the movable plate when it moves toward the first position is limited, and the final distance between the first sealing plate and the second sealing plate is controlled, thereby adjusting the compression of the sealing members on the first sealing plate and the second sealing plate.

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