Gas filtering method, device and system of laser and medium

Abstract

The invention relates to the technical field of lasers, and discloses a gas filtering method, device and system of a laser and a medium. A first gas path and a second gas path which are communicated with a cavity are arranged outside a frequency doubling light path space of the cavity of the laser; acquiring a cleanliness parameter of gas in the cavity in real time through a cleanliness sensor arranged in the laser cavity; on the basis of cleanliness parameters fed back by the cleanliness sensor in real time, the working duration of the laser device and external environment parameters, a gas replacement strategy is generated through a preset intelligent control algorithm, and the gas replacement strategy at least comprises the pumping time, the inflation time and the replacement frequency of single replacement and the time interval of two adjacent replacement; and executing gas replacement operation according to the gas replacement strategy. Through cooperation of the sealing cover and the airtight air bag, the space light path cavity is completely isolated from the external environment, pollutants, water vapor and the like are prevented from entering the cavity through gas exchange, and the cleanliness and long-term stability of the light path are remarkably improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of lasers, in particular to a gas filtering method, device, system and medium for a laser. BACKGROUND

[0002] The ultraviolet laser has a short wavelength and high photon energy, and requires high cleanliness of gas in a frequency-doubling cavity. A small impurity may cause damage to a crystal or an optical film layer. In the prior art, the ultraviolet laser usually uses a circulating filtering system to clean the gas in the frequency-doubling cavity. The gas is driven to circulate between the cavity and the filtering system by a gas pump, and the impurities are removed by relying on the physical interception of the filtering material. However, this scheme has the following defects: first, the replacement rate of the circulating gas is low, and it is difficult to completely remove the accumulated macromolecular pollutants or reaction products in the cavity; second, the filtering precision is limited by the filter material, and the purification effect of small particles or macromolecules with active chemical properties is limited; and third, the existing system only performs filtering based on fixed periods or empirical parameters, lacks real-time monitoring of the cleanliness in the cavity and dynamic strategy adjustment, and cannot adapt to the demand for cleanliness caused by changes in the working state of the laser or the external environment (such as fluctuations in temperature, humidity, and dust concentration).

[0003] Therefore, there is an urgent need for a method to solve at least one of the above problems. SUMMARY

[0004] The present application provides a gas filtering method, device, system and medium for a laser, aiming to solve the problem that although the prior art tries to improve the effect by optimizing the filter structure or increasing the filtering stages, it is still essentially limited to the technical framework of "circulating filtering" and has not broken through the core problems of low replacement rate and rigid strategy. No technical solution has been proposed to actively replace the gas through a double-gas-path and combine an intelligent control algorithm to dynamically generate a gas replacement strategy based on real-time cleanliness parameters, working time and environmental parameters, so as to realize high-precision and adaptive gas purification. Therefore, the problem of how to greatly improve the gas replacement efficiency and realize dynamic and accurate purification through innovative gas path design and intelligent control mechanism.

[0005] In a first aspect, an embodiment of the present application provides a gas filtering method for a laser, comprising: A first gas path and a second gas path are arranged outside a frequency-doubling light path space of a laser cavity and are in communication with the cavity. The first gas path is connected with a vacuum pump and a first electromagnetic valve in sequence, and the second gas path is connected with a high-cleanliness gas source and a second electromagnetic valve in sequence. The cleanliness parameter of the gas in the cavity is obtained in real time by a cleanliness sensor arranged in the laser cavity; when the cleanliness parameter does not meet the preset cleanliness standard, a gas replacement operation is performed by an electric control system, the first electromagnetic valve and the vacuum pump are opened, the gas in the laser cavity is extracted through the first gas path, and after the cavity reaches the preset vacuum degree, the first electromagnetic valve and the vacuum pump are closed; the second electromagnetic valve is opened, and the high-purity gas in the high-cleanliness gas source is filled into the laser cavity through the second gas path, and after the cavity reaches the preset gas pressure, the second electromagnetic valve is closed. Based on the cleanliness parameter fed back in real time by the cleanliness sensor, the working time length of the laser, and the external environment parameter, a gas replacement strategy is generated by a preset intelligent control algorithm, the gas replacement strategy at least includes the pumping time, the filling time, the replacement number and the time interval between adjacent two replacements of a single replacement, so as to perform the gas replacement operation according to the gas replacement strategy.

[0006] In some embodiments, the gas replacement operation according to the gas replacement strategy includes: according to the gas replacement strategy, the first electromagnetic valve, the second electromagnetic valve and the vacuum pump are controlled to cyclically perform the gas replacement operation, and after the gas cleanliness parameter in the laser cavity continuously meets the preset cleanliness standard, a standby monitoring state is entered.

[0007] In some embodiments, after the gas replacement operation according to the gas replacement strategy, it further includes: in the working process of the laser, the changes of the cleanliness parameter, the working time length and the external environment parameter are monitored in real time, when it is detected that the cleanliness parameter fluctuation exceeds a preset threshold or the external environment parameter has a mutation, the update of the gas replacement strategy is automatically triggered, and the gas replacement operation is performed according to the updated gas replacement strategy; the external environment parameter includes temperature, humidity and air pressure.

[0008] In some embodiments, the cleanliness parameter of the gas in the cavity obtained in real time by the cleanliness sensor arranged in the laser cavity includes: the cleanliness sensor is controlled to detect the particulate matter concentration, the volatile organic matter content and the water vapor content in the gas in the laser cavity in real time, and the detection data is converted into an electric signal and transmitted to the electric control system as the cleanliness parameter.

[0009] In some embodiments, the opening the first electromagnetic valve and the vacuum pump to extract the gas in the laser cavity through the first gas path until the cavity reaches the preset vacuum degree, and then closing the first electromagnetic valve and the vacuum pump, comprises: during the gas extraction process, the vacuum pressure sensor arranged on the laser cavity is used to monitor the cavity pressure in real time, and when the monitored pressure value is lower than or equal to the preset vacuum degree, the electric control system sends a closing instruction to the first electromagnetic valve and the vacuum pump to stop the gas extraction operation; wherein the preset vacuum degree is set in advance according to the volume of the laser cavity, the gas extraction rate of the vacuum pump and the purity requirement of the high-purity gas.

[0010] In some embodiments, the opening the second electromagnetic valve to fill the high-purity gas in the high-purity gas source into the laser cavity through the second gas path until the cavity reaches the preset gas pressure, and then closing the second electromagnetic valve, comprises: during the gas filling process, the gas pressure sensor arranged on the laser cavity is used to monitor the cavity pressure in real time, and when the monitored pressure value reaches or exceeds the preset gas pressure, the electric control system sends a closing instruction to the second electromagnetic valve to stop the gas filling operation; wherein the preset gas pressure matches the working gas pressure of the laser cavity, and a flow control valve is arranged in the second gas path, and the electric control system adjusts the opening degree of the flow control valve to control the gas filling rate, so as to avoid the pressure jump during the gas filling process.

[0011] In some embodiments, the gas replacement strategy is generated by a preset intelligent control algorithm based on the real-time feedback of the cleanliness parameter of the cleanliness sensor, the working time length of the laser and the external environment parameter, which comprises: the intelligent control algorithm pre-establishes a multi-dimensional parameter database, inputs the real-time acquired cleanliness parameter, working time length and external environment parameter into the database for matching analysis, dynamically adjusts the gas extraction time, gas filling time, replacement times and time interval of adjacent two replacements based on the efficiency data of historical replacement operations and the running state of the laser; the external environment parameter includes temperature, humidity and air pressure; wherein when the working time length of the laser exceeds a preset threshold or the external environment humidity and particulate matter concentration increase, the algorithm automatically shortens the time interval of adjacent two replacements or increases the replacement times to adapt to the cleanliness maintenance requirement.

[0012] In a second aspect, the application provides a gas filtering device of a laser, which comprises: A gas path communication unit is arranged outside the frequency-doubling light path space of the laser cavity and communicates with the cavity, and the first gas path and the second gas path are sequentially connected with a vacuum pump and a first electromagnetic valve, and the second gas path is sequentially connected with a high-purity gas source and a second electromagnetic valve; An electromagnetic closing unit is configured to acquire a cleanliness parameter of the gas in the cavity in real time through a cleanliness sensor arranged in the laser cavity; when the cleanliness parameter does not meet a preset cleanliness standard, a gas replacement operation is performed through an electric control system, the first electromagnetic valve and the vacuum pump are opened, the gas in the laser cavity is pumped out through the first gas path, and the first electromagnetic valve and the vacuum pump are closed after the cavity reaches a preset vacuum degree; the second electromagnetic valve is opened, and the high-purity gas in the high-cleanliness gas source is filled into the laser cavity through the second gas path, and the second electromagnetic valve is closed after the cavity reaches a preset gas pressure. A gas replacement unit is configured to generate a gas replacement strategy through a preset intelligent control algorithm based on the cleanliness parameter fed back in real time by the cleanliness sensor, the working time length of the laser and external environment parameters, and the gas replacement strategy at least includes the pumping time, the filling time, the replacement times and the time interval between adjacent two replacements of a single replacement, so as to perform the gas replacement operation according to the gas replacement strategy.

[0013] In a third aspect, an electric control system is provided, which includes a memory and a processor, the memory is configured to store a computer program, and the processor is configured to execute the computer program and implement the method provided in any of the embodiments of the present application when executing the computer program.

[0014] In a fourth aspect, a computer readable storage medium is provided, which stores a computer program, and the computer program causes a processor to implement the method provided in any of the embodiments of the present application when executed by the processor.

[0015] The laser gas filtering method, device, system and medium provided by the embodiments of the present application, the space optical path cavity is completely isolated from the external environment through the cooperation of the sealing cover and the air-tight air bag, which prevents pollutants, water vapor and the like from entering the cavity through gas exchange, significantly improves the optical path cleanliness and long-term stability; by utilizing the volume change of the elastic air bag to dynamically respond to the gas pressure fluctuation caused by temperature, it is not necessary to rely on external gas injection or discharge, and the internal and external air pressure difference is balanced in real time, avoiding the deformation of the large-size laser shell; by avoiding the adsorption saturation problem of the filter system, it is not necessary to replace the filter element, reducing the maintenance cost, and being suitable for high requirement scenes of long-term stable operation; since the internal and external gases are completely blocked, the humidity inside the cavity can be maintained at a very low level, effectively protecting the optical device from moisture erosion.

[0016] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0018] Figure 1 is a step schematic flow chart of a gas filtering method of a laser provided by an embodiment of the present application; Figure 2 is a schematic diagram of a gas filtering structure of a laser provided by an embodiment of the present application; Figure 3 is a structural schematic diagram of a gas filtering device of a laser provided by an embodiment of the present application; Figure 4 is a structural schematic block diagram of an electric control system provided by an embodiment of the present application.

[0019] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present application. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0021] The flow chart shown in the drawings is only an example, and does not necessarily include all the contents and operations / steps, and does not necessarily be executed in the described order. For example, some operations / steps can be decomposed, combined or partially merged, so that the actual execution order can be changed according to the actual situation.

[0022] It should be understood that, in order to clearly describe the technical solutions of the embodiments of the present application, in the embodiments of the present application, the same items or similar items with basically the same functions and effects are distinguished by using "first", "second" and the like. Those skilled in the art can understand that "first", "second" and the like do not limit the number and execution order, and "first", "second" and the like do not necessarily mean different.

[0023] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used in this specification and the appended claims, the singular forms "a," "an" and "the" include plural referents unless the context clearly dictates otherwise.

[0024] It is also to be understood that the term "and / or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items, and that the term is used in its full conjunctive sense, even though other terms such as "for example," "for instance," "e.g.", "e.g.," or the like are used in the detailed description and / or claims.

[0025] Some embodiments of the present application will now be described in detail in connection with the accompanying drawings. The embodiments described below and features in the embodiments can be combined with each other, without conflict.

[0026] The ultraviolet laser has a short wavelength and high photon energy, and requires high cleanliness of the gas in the frequency doubling cavity. A small impurity may cause damage to the crystal or optical film layer. In the prior art, the ultraviolet laser usually uses a circulating filtration system to clean the gas in the frequency doubling cavity. The gas is driven to circulate between the cavity and the filtration system by a gas pump, and the impurities are removed by the physical interception of the filtration material. However, this scheme has the following significant defects: first, the replacement rate of the circulating filtration gas is low, and it is difficult to completely remove the accumulated macromolecular pollutants or reaction products in the cavity; second, the filtration precision is limited by the filter material, and the purification effect of small particles or macromolecules with active chemical properties is limited; third, the existing system only performs filtration based on fixed periods or empirical parameters, lacks real-time monitoring of the cleanliness in the cavity and dynamic strategy adjustment, and cannot adapt to the demand for cleanliness caused by changes in the working state of the laser or external environment (such as fluctuations in temperature, humidity, and dust concentration).

[0027] Although the prior art attempts to improve the effect by optimizing the filter structure or increasing the number of filtration stages, it is still essentially limited to the technical framework of "circulating filtration" and has not broken through the core problems of low replacement rate and rigid strategy. No technical solution has been proposed to actively replace the gas through a double-gas-path combination with an intelligent control algorithm, dynamically generate a gas replacement strategy based on real-time cleanliness parameters, working time, and environmental parameters, to achieve high-precision and adaptive gas purification. Therefore, how to significantly improve the gas replacement efficiency and achieve dynamic and accurate purification through innovative gas path design and intelligent control mechanism has become a technical problem to be solved in this field.

[0028] To solve the above problems, please refer to Figure 1 The embodiments of the present application provide a gas filtration method for a laser, which is used for a gas filtration structure of a laser as shown in Figure 2 Figure 2 ​The gas filtration structure for the laser provided includes a laser cavity 1, a first solenoid valve 2, a vacuum pump 3, a second solenoid valve 4, high-purity air or high-purity nitrogen 5, and a gas pipe 6. The laser cavity 1 contains the frequency doubling optical path of the entire laser and is a space that needs to maintain high cleanliness. The first solenoid valve 2 is controlled by an electronic control system. When the vacuum pump 3 is activated, it extracts gas from the laser cavity 1. The second solenoid valve 4 is also controlled by an electronic control system. The gas pipe 6 connects the entire gas path.

[0029] Specifically, such as Figure 1 As shown, the gas filtration method for the provided laser includes steps S101 to S103. Details are as follows: Step S101. Set up a first gas path and a second gas path outside the frequency doubling optical path space of the laser cavity, which are connected to the cavity. The first gas path is connected to a vacuum pump and a first solenoid valve in sequence, and the second gas path is connected to a high-purity gas source and a second solenoid valve in sequence.

[0030] Specifically, two independent gas path systems are set outside the laser cavity (frequency doubling optical path space): a first gas path (vacuum path) and a second gas path (filling path), used to actively extract gas from the cavity and fill it with high-purity gas, respectively. The first gas path is connected in sequence to a vacuum pump and a first solenoid valve, and the second gas path is connected in sequence to a high-purity gas source (such as high-purity nitrogen or high-purity air) and a second solenoid valve. The two gas paths are connected to the laser cavity through gas pipes, forming a bidirectional active displacement gas path structure.

[0031] The gas path hardware design includes: Laser cavity: The interior is the frequency doubling optical path space, using a sealed structure, with two gas path interfaces reserved to connect to the first and second gas paths respectively. High-sealing materials (such as metal bellows or vacuum flanges) must be used at the interfaces to prevent external contaminants from seeping in. First gas path: Connected to the cavity's extraction port by a high-pressure resistant gas pipe, it is sequentially connected to a first solenoid valve (normally closed, electrically controlled on / off) and a vacuum pump (such as a diaphragm pump or vortex pump, characterized by low vibration and oil-free contamination), ultimately leading to the external atmosphere or waste gas treatment device (if the extracted gas contains contaminants). Second gas path: Connected to the cavity's filling port by a high-purity gas pipe, it is sequentially connected to a second solenoid valve (normally closed, electrically controlled on / off) and a high-purity gas source (such as a nitrogen cylinder with a purity ≥99.999%, or a clean air compressor with three-stage filtration). The gas source must be equipped with a pressure regulating valve and a gas purity monitoring module (such as an oxygen content sensor or particle counter).

[0032] The electric control system integration includes that the first electromagnetic valve, the second electromagnetic valve and the vacuum pump are connected to the electric control unit (such as PLC or MCU) through control lines, and are controlled to start and stop by the electric control unit according to preset logic or algorithm instructions. The gas path layout needs to follow the principle of "short path and few elbows", to reduce the risk of gas retention and pipeline inner wall pollution, and the pipeline material is selected to be stainless steel 316L or polytetrafluoroethylene (PTFE), to avoid material volatilization or adsorption of pollutants.

[0033] In step S102, the cleanliness parameter of the gas in the cavity is acquired in real time by a cleanliness sensor arranged in the laser cavity; when the cleanliness parameter does not meet the preset cleanliness standard, a gas replacement operation is performed by an electric control system, the first electromagnetic valve and the vacuum pump are opened, the gas in the laser cavity is extracted through the first gas path, and the first electromagnetic valve and the vacuum pump are closed after the cavity reaches the preset vacuum degree; the second electromagnetic valve is opened, and the high-purity gas in the high-cleanliness gas source is filled into the laser cavity through the second gas path, and the second electromagnetic valve is closed after the cavity reaches the preset gas pressure.

[0034] Specifically, the cleanliness of the gas in the cavity is monitored in real time by the cleanliness sensor, and when the parameter is not up to standard, the active replacement process of "vacuum extraction-new gas filling" is triggered: the contaminated gas is first extracted through the first gas path to a preset vacuum degree, and then the high-cleanliness gas is filled through the second gas path to a target gas pressure, to realize complete replacement of the cavity gas, instead of cyclic filtration.

[0035] The cleanliness monitoring and triggering conditions include: sensor configuration: a multi-parameter cleanliness sensor is installed in the cavity, including at least a particle counter (monitoring ≥0.1 μm particle concentration) and a gas composition sensor (such as a VOC sensor, a humidity sensor), to collect parameters such as particle pollutant concentration, volatile organic compound (VOC) content and humidity in real time. The preset cleanliness standard: according to the tolerance threshold of the laser frequency-doubling crystal, the critical value for triggering replacement is set (such as particle concentration > 100 particles / cubic foot, humidity > 5% RH, VOCs > 50 ppb), and when any parameter is out of standard, the electric control system starts the replacement process.

[0036] The gas extraction process includes: opening the first electromagnetic valve and the vacuum pump, the cavity gas is quickly discharged through the first gas path, and the internal pressure of the cavity is monitored (through the built-in pressure sensor). When the pressure drops to a preset vacuum degree (such as 10 Pa absolute pressure, which is set according to the cavity material and the working gas pressure requirement of the laser), the first electromagnetic valve and the vacuum pump are closed, to ensure that the residual gas volume fraction in the cavity is <0.1% (theoretically, a gas replacement rate of ≥99.9% is achieved by vacuum extraction).

[0037] The inflation process includes: opening the second electromagnetic valve, the high-purity gas source inflates the cavity at a constant flow rate (such as 5 L / min), until the pressure reaches the preset gas pressure (such as 1 atmosphere or the required micro-positive pressure 105 kPa for laser operation). After the inflation is completed, the second electromagnetic valve is closed to form a "high-purity gas full replacement" clean environment, avoiding the accumulation of residual pollutants in the circulating filtration.

[0038] Step S103. Based on the cleanliness parameters fed back by the cleanliness sensor in real time, the working time length of the laser, and the external environment parameters, a gas replacement strategy is generated through a pre-set intelligent control algorithm, the gas replacement strategy at least including the pumping time, the inflation time, the replacement times, and the time interval between adjacent two replacements, to perform the gas replacement operation according to the gas replacement strategy.

[0039] Specifically, based on the real-time cleanliness data, the laser working time length (accumulative pollution risk), and the external environment parameters (such as temperature and humidity, dust concentration), a gas replacement strategy is dynamically generated through a pre-set intelligent control algorithm, including the pumping time, the inflation time, the replacement times, and the interval time of single replacement, to realize "replacement on demand" instead of fixed period operation, improve the purification efficiency, and adapt to environmental changes.

[0040] The input parameter collection includes: cleanliness parameters: real-time particle concentration, VOCs concentration, humidity (from internal cavity sensors). Working time length: cumulative running time of the laser (reflecting the material evaporation pollution risk caused by the heating of the frequency-doubling crystal, such as 20% increase in pollution rate per 100 hours of operation). External environment parameters: environmental dust concentration (such as PM2.5, PM10), temperature and humidity (high humidity accelerates the adsorption of pollutants, and high dust environment increases the invasion risk) collected by external sensors.

[0041] The intelligent control algorithm design includes: basic strategy model: establish a "replacement demand index" mathematical model, such as: replacement demand index = α*Cp + β*t + γ*Ed; wherein Cp is the cleanliness exceeding multiple, t is the working time length, Ed is the external pollution index, and α, β, γ are weight coefficients (calibrated by historical failure data).

[0042] The dynamic parameter generation includes: pumping time: calculated according to the vacuum pump flow rate and the cavity volume (such as a cavity volume of 1 L and a pump flow rate of 60 L / min, then about 30 seconds are required to pump to 10 Pa). Inflation time: set according to the gas source flow rate and the target gas pressure (such as 20 seconds required to inflate to 100 kPa). Replacement times: increase the number of times when continuously exceeding (such as performing 1 replacement when first exceeding, and performing 2 progressive replacements when exceeding again within 2 hours). Interval time: adjusted by a fuzzy logic algorithm, for example: when the environmental dust concentration is high, the interval time is shortened from the default 24 hours to 4 hours; when the cleanliness is long-term qualified, the interval time is extended to 48 hours.

[0043] The strategy execution and optimization write the replacement strategy output by the algorithm into the electronic control system in real time, drive the S102 step execution, and record the cleanliness recovery effect after each replacement. Through the closed-loop feedback mechanism (such as PID control), the weight coefficient is optimized to form a self-learning ability. The preset safety boundary is that the minimum replacement interval is not less than 30 minutes (to avoid frequent start-stop damage to the equipment), and the maximum number of replacements per day is not more than 10 times, to ensure system stability.

[0044] In some embodiments, the gas replacement operation is performed according to the gas replacement strategy, including: according to the gas replacement strategy, controlling the first electromagnetic valve, the second electromagnetic valve and the vacuum pump to cyclically perform the gas replacement operation until the gas cleanliness parameter in the laser cavity continuously meets the preset cleanliness standard, and then entering a standby monitoring state.

[0045] During the execution of the gas replacement strategy, a cyclic replacement mechanism is introduced, that is, according to the number of replacements or conditions set in the strategy, the first electromagnetic valve, the second electromagnetic valve and the vacuum pump are controlled to repeatedly perform the "pumping-gas" process until the cavity cleanliness parameter continuously and stably meets the standard, and the system enters a standby monitoring state with low power consumption, avoiding the problem of pollution residue caused by incomplete single replacement.

[0046] The cyclic replacement trigger logic triggers a single replacement (pumping-gas→gas filling) according to the strategy when the cleanliness parameter first fails to meet the standard, and continuously monitors the cleanliness (such as collecting data every 30 seconds) after the replacement is completed. If the cleanliness still does not meet the standard (such as the particle concentration decreases but does not drop below the critical value) after the replacement, or exceeds the standard again within a short time after meeting the standard (such as fluctuation of more than 10% within 10 minutes), the cyclic replacement is triggered, that is, the pumping-gas-gas filling process is repeatedly performed until the data of N consecutive monitoring periods (such as N=5, period 5 minutes) all meet the preset standard.

[0047] After the standby monitoring state meets the standard, all electromagnetic valves and pumps are closed and switched to "standby mode". At this time, the cleanliness sensor still monitors at a lower frequency (such as once per minute), and the electronic control system operates at low power consumption, and only wakes up the device when the parameter is abnormal. The cleanliness recovery curve after each replacement is recorded during the cycle, and if the cleanliness still does not meet the standard after 3 consecutive replacements, the system triggers an alarm (such as audible and visual alarm or remote communication error), prompting manual inspection of the gas path tightness or gas source purity.

[0048] In some embodiments, after performing the gas replacement operation according to the gas replacement strategy, further comprising: monitoring the cleanliness parameter, the working time length and the change of the external environment parameter in real time during the working process of the laser, and when it is detected that the cleanliness parameter fluctuation exceeds a preset threshold or the external environment parameter mutates, automatically triggering the update of the gas replacement strategy, and performing the gas replacement operation according to the updated gas replacement strategy; the external environment parameter includes temperature, humidity and air pressure.

[0049] By establishing a dynamic strategy updating mechanism after the replacement operation is completed, the cleanliness parameter fluctuation, the working time length accumulation and the external environment mutation (such as sudden increase of temperature and humidity, sudden increase of dust concentration) are tracked in real time, and when it is detected that the parameter change exceeds a preset threshold, the replacement strategy is automatically updated (such as shortening the interval time and increasing the replacement times), so as to ensure that the system adapts to the real-time pollution risk change.

[0050] Real-time parameter monitoring and threshold setting: cleanliness fluctuation threshold: if the real-time value of the particle concentration exceeds the baseline value after the last replacement by ±20%, or the VOCs content increases by ≥30ppb, the strategy update is triggered. External environment mutation: if the environmental humidity increases by ≥15%RH within 10 minutes, the temperature changes by ≥5°C, or the external dust concentration (PM2.5) exceeds 50μg / m³ (adjusted according to regional standards), it is considered that the environment is deteriorated, and the strategy optimization is automatically started.

[0051] The strategy updating logic includes: when the parameter fluctuation or the environment mutation is detected, the electric control system calls the latest data (current cleanliness, working time length of 8 hours, current humidity of 65%RH) to input the intelligent algorithm, and recalculates the replacement parameters. For example: if the external humidity suddenly increases from 40%RH to 65%RH (exceeding the preset threshold of 50%RH), the algorithm will shorten the adjacent replacement interval from the original 12 hours to 6 hours, and increase the inflation time of single replacement (from 20 seconds to 30 seconds to ensure dry gas filling). The updated strategy takes effect immediately, without waiting for the original interval time, realizing the "real-time responsive" purification, and avoiding the lag of the fixed strategy under sudden pollution.

[0052] In some embodiments, the cleanliness parameter of the gas in the cavity is obtained in real time by the cleanliness sensor arranged in the laser cavity, which includes: controlling the cleanliness sensor to detect the particle concentration and the volatile organic matter content and the water vapor content in the gas in the laser cavity in real time, and converting the detection data into an electric signal and transmitting it to the electric control system as the cleanliness parameter.

[0053] By defining the multi-parameter detection function of the cleanliness sensor, specifically including real-time detection of particulate matter concentration (sub-micron particles), volatile organic compound (VOCs) content, and water vapor (humidity), the sensor converts the physical / chemical signal into an electrical signal (such as voltage, current signal), which is transmitted to the electronic control system as the core data for cleanliness evaluation.

[0054] The sensor configuration and detection principle includes: particulate matter concentration: using a laser scattering particle counter (such as detecting ≥0.1 μm particles), converting the concentration by the scattering light intensity generated by laser irradiation of particles, outputting a 4-20 mA current signal or RS485 digital signal. VOCs content: integrating a photoionization detector (PID) or a metal oxide semiconductor sensor (MOS) to detect volatile pollutants such as benzene series and aldehydes, outputting a voltage signal (such as 0-5V corresponding to 0-1000ppb) in linear relationship with concentration. Water vapor content: using a capacitive humidity sensor to detect relative humidity (RH) and temperature (compensation parameter), outputting I2C or SPI digital signal.

[0055] Signal processing and transmission: through various sensors, the data is accessed to the electronic control system (such as the analog input module of PLC, the ADC interface of MCU) through a special interface module, after noise removal by filtering algorithm (such as sliding average filtering), the data is stored in real-time database for control algorithm calling. Set the sensor calibration period (such as once a month), calibrate the zero point and span with standard gas (such as particulate matter aerosol with known concentration, VOC standard gas) to ensure detection accuracy.

[0056] In some embodiments, the process of opening the first electromagnetic valve and vacuum pump to extract the gas in the laser cavity through the first gas path, and closing the first electromagnetic valve and vacuum pump after the cavity reaches the preset vacuum degree, includes: during the gas extraction process, the vacuum pressure sensor installed on the laser cavity is used to monitor the cavity pressure in real time, and when the monitored pressure value is lower than or equal to the preset vacuum degree, the electronic control system sends a closing instruction to the first electromagnetic valve and vacuum pump to stop the gas extraction operation; wherein the preset vacuum degree is pre-set according to the volume of the laser cavity, the gas extraction rate of the vacuum pump, and the purity requirement of the high-purity gas.

[0057] By introducing closed-loop pressure control during the gas extraction process, the cavity pressure is fed back in real time by the vacuum pressure sensor, and the gas extraction is automatically stopped when the preset vacuum degree is reached, ensuring that the residual amount of gas after single replacement is lower than the design standard. The setting of the preset vacuum degree takes into account the cavity volume, the gas extraction rate of the vacuum pump, and the target gas purity (such as requiring the residual original gas to be <0.1% after replacement).

[0058] The vacuum pressure monitoring and control is achieved by installing a high-precision vacuum pressure sensor (range 0-100 kPa, accuracy ±0.1% FS) on the cavity to collect absolute pressure values (such as 10 Pa, 100 Pa) in real time, and transmit the signals to the electric control system.

[0059] During the evacuation, the electric control system synchronously starts the vacuum pump and the first electromagnetic valve, and reads the pressure sensor data in real time. When it detects that the air pressure is ≤ the preset vacuum degree (such as 10 Pa), it immediately sends a closing instruction to avoid excessive evacuation or insufficient evacuation. The calculation method of the preset vacuum degree is based on the gas dynamics formula, and the preset vacuum degree Ptarget needs to satisfy the residual gas ratio R = Ptarget / Pinitial ≤ 0.1% (the initial air pressure is the standard atmospheric pressure 101325 Pa), so Ptarget ≤ 101.325 Pa. In actual application, according to the purity of high-purity gas (such as nitrogen purity 99.999%), it can be further reduced to 10 Pa to ensure the replacement efficiency. Combined with the evacuation rate of the vacuum pump (such as 60 L / min) and the cavity volume (1 L), the rationality of the preset vacuum degree is verified by the evacuation time formula t = V / Q*ln(Pinitial / Ptarget) to ensure that the evacuation is completed within a safe time (such as t = 30 seconds calculated).

[0060] In some embodiments, the opening of the second electromagnetic valve, the filling of the high-purity gas in the high-purity gas source into the laser cavity through the second gas path until the cavity reaches the preset air pressure, and the closing of the second electromagnetic valve, comprises: during the gas filling process, the cavity air pressure is monitored in real time by the air pressure sensor arranged on the laser cavity, and when the monitored air pressure value reaches or exceeds the preset air pressure, the electric control system sends a closing instruction to the second electromagnetic valve to stop the gas filling operation; wherein the preset air pressure matches the working air pressure of the laser cavity, and a flow control valve is arranged in the second gas path, and the electric control system adjusts the opening of the flow control valve to control the gas filling rate to avoid air pressure sudden change during the gas filling process.

[0061] By monitoring the cavity pressure in real time through the air pressure sensor during the gas filling process, the gas filling is automatically stopped when the preset air pressure (matching the laser working air pressure) is reached, and the gas filling rate is adjusted through the flow control valve to avoid air pressure sudden change (such as impact pressure damage to optical elements) caused by too fast gas filling, and to ensure smooth transition of the gas path.

[0062] The air pressure control and flow regulation includes: a cavity-mounted absolute pressure / gauge pressure sensor (range 0-200 kPa, accuracy ±0.25% FS) that monitors pressure changes in real time during the inflation process, and when the air pressure is greater than or equal to a preset value (e.g., 105 kPa, which is 5 kPa higher than atmospheric pressure), the second electromagnetic valve is closed. A proportional flow control valve (e.g., an electrically adjustable valve with an opening degree of 0-100%) is connected in series in the second air path. The electronic control system calculates the initial opening degree (e.g., 50%) based on the cavity volume and the target inflation time (e.g., 20 seconds to 105 kPa), and dynamically adjusts the opening degree during the inflation process through a PID algorithm to control the pressure rise rate at ≤10 kPa / s, avoiding pressure shock.

[0063] Matching principle of preset air pressure: The preset air pressure should be consistent with the working air pressure of the laser (e.g., the design requires the cavity to maintain a micro-positive pressure of 105 kPa to prevent external contaminants from penetrating), and the input pressure is stabilized at 120 kPa through a pressure reducing valve (e.g., a precision pressure regulating valve) of the gas source, ensuring that the flow control valve has sufficient adjustment margin. After the inflation is completed, the pressure sensor continuously monitors for 1 minute, and if the air pressure drops by more than 1 kPa (indicating air path leakage), the sealing detection process is triggered, and all valves are automatically closed and an alarm is sounded.

[0064] In some embodiments, the cleanliness parameters based on real-time feedback from the cleanliness sensor, the working time of the laser, and external environmental parameters are used to generate a gas replacement strategy through a preset intelligent control algorithm, which includes: the intelligent control algorithm pre-establishes a multi-dimensional parameter database, inputs the real-time acquired cleanliness parameters, working time, and external environmental parameters into the database for matching analysis, dynamically adjusts the single replacement pumping time, inflation time, replacement frequency, and time interval between adjacent replacements based on historical replacement operation efficiency data and the running state of the laser; the external environmental parameters include temperature, humidity, and air pressure; wherein when the working time of the laser exceeds a preset threshold or the external environmental humidity and particulate matter concentration increase, the algorithm automatically shortens the time interval between adjacent replacements or increases the replacement frequency to adapt to the cleanliness maintenance requirements.

[0065] By establishing a multi-dimensional parameter database to store historical replacement data (such as pumping time, inflation time, and cleanliness data after each replacement), laser running state (such as cumulative working time, power output curve), and external environmental data (temperature, humidity, and air pressure), the intelligent algorithm analyzes the data correlation and dynamically adjusts the replacement strategy parameters to achieve "data-driven" adaptive control.

[0066] Database structure and data input include: database fields include: timestamp, cleanliness parameters (particle concentration, VOCs, humidity), working hours (hours), external temperature and humidity (°C, %RH), replacement parameters (exhaust time, inflation time, number of times, interval), replacement effect (compliance time, residual pollutant concentration). Algorithm input: real-time data and historical data are matched, for example, when the working hours exceed the preset threshold (such as 500 hours, the aging of the optical film layer causes the pollution rate to rise), or the external humidity is >60%RH (high humidity promotes the condensation of pollutants), the "high-frequency replacement mode" is automatically triggered.

[0067] Dynamic adjustment strategy includes: time interval shortening: when the external dust concentration (PM10) >100μg / m³, the original interval of 24 hours is shortened to 8 hours; the interval time is reduced by 10% for every 100 hours of working hours. Increase the number of replacements: historical data shows that when the humidity is >70%RH, the single replacement compliance rate decreases to 60%, and the algorithm automatically changes the single replacement to 2 consecutive replacements (exhaustion-inflation-again-exhaustion-again-inflation), which improves the purification efficiency. Machine learning algorithms (such as random forests) are used to train the database to identify the optimal replacement strategy under different parameter combinations, and the algorithm model is updated regularly (such as every week) to adapt to the purification needs after the device ages or the environment changes.

[0068] In some embodiments, a pollution trend prediction model is constructed by a long short-term memory network (LSTM), based on historical cleanliness data, working hours and external environmental parameters, to predict the risk of pollution exceeding the standard in advance, and to actively trigger preventive replacement when the cleanliness does not meet the standard, to achieve "prediction-intervention" proactive control, rather than passive response purification.

[0069] Data input and model training are performed by collecting historical data (particle concentration, VOCs, humidity, working hours, external temperature and humidity, dust concentration), constructing a time series data set, and setting a sliding window of 24 hours (including the previous 72 hours of data for trend analysis). Train the LSTM model: the input layer includes 6 features (3 cleanliness parameters + 3 environmental parameters), the hidden layer has 2 layers (each with 128 neurons), and the output layer predicts the probability of cleanliness exceeding the standard in the next 1 hour (the threshold is set to ≥70% to trigger an alarm).

[0070] The active replacement triggering mechanism triggers the replacement process in advance when the model predicts that the probability of exceeding the standard in the next 1 hour is ≥70% (such as when the current cleanliness meets the standard but the predicted pollution rises), and the replacement strategy is dynamically adjusted according to the predicted pollution peak: if the predicted particle concentration will rise to 1.5 times the critical value, the single exhaust time will be increased by 10% and the inflation time will be increased by 5%, to ensure the preventive purification effect.

[0071] Model updating and self-calibration adapt to seasonal changes (e.g., increased VOCs volatilization due to high summer temperatures) or equipment aging (e.g., increased material volatilization rate of frequency-doubling crystals after 1 year of use) by training the model with the latest 24-hour data increment during the daily early morning laser downtime.

[0072] In some embodiments, a deep reinforcement learning (DRL) algorithm is introduced to minimize replacement energy consumption and maximize the length of time that the cleanliness meets the standard, with the objective function being the optimal replacement strategy learned by the system through autonomous trial and error. The agent selects replacement actions (pumping time, charging time, interval, etc.) based on the current state (cleanliness, working time, environmental parameters), and iteratively optimizes the strategy through a reward function (the longer the compliance time, the higher the reward, and the higher the energy consumption, the greater the penalty) to balance efficiency and energy consumption, which is difficult to achieve with traditional fixed algorithms.

[0073] The state space and action space definitions include: State: [particle concentration, VOCs concentration, humidity, working time, external temperature and humidity, last replacement time interval] (7 dimensions in total). Action: discretized replacement parameter combination (pumping time: 30s / 45s / 60s; charging time: 20s / 30s / 40s; interval time: 4h / 8h / 12h / 24h), a total of 3x3x4=36 actions. Reward function (Reward): compliance reward: +10 for each hour of compliance, -50 for non-compliance. Energy consumption penalty: calculate energy consumption based on the start and stop times of the vacuum pump and solenoid valve, and penalize -0.1 for each Wh consumed. Long-term reward: use a discount factor γ=0.95 to encourage long-term stable compliance.

[0074] Strategy execution and online learning include: in the initial stage, an ε-greedy strategy (ε=0.3) is used to explore new actions, and experience data is accumulated in the replay buffer (capacity 100,000). When the laser is in a low-load period (such as night standby), the DRL model (such as the DQN algorithm) is trained offline using the data. The strategy is updated once every 100 replacements, and gradually converges to the optimal replacement parameter combination (such as "short interval + fast replacement" for high pollution periods and "long interval + energy-saving mode" for low pollution periods).

[0075] In some embodiments, by building a digital twin model of the laser cavity and gas circuit, the pressure, flow, and cleanliness changes of the physical system are mapped in real time, the failure probability of gas circuit components (solenoid valve, vacuum pump, sensor) is predicted through simulation, and redundant gas circuits are dynamically switched to solve the problem of purification failure caused by traditional single gas circuit failure, thereby improving system reliability.

[0076] The digital twin model is constructed based on computational fluid dynamics (CFD) to establish a cavity flow field model, and a thermodynamic equation is used to simulate the pressure change during the pumping and charging process. A fault tree analysis (FTA) is used to establish a probability model for electromagnetic valve sticking, vacuum pump efficiency decline, and sensor drift. Real-time synchronization of physical sensor data (pressure, flow, cleanliness) to the digital twin is achieved through Kalman filtering to fuse measured values with simulation values, and a component health index (HI, 0-100 points, <80 points for early warning) is calculated.

[0077] The redundant gas path design and switching strategy includes: hardware level: set up double redundant gas path (main gas path + backup gas path), each gas path is independently configured with electromagnetic valve, vacuum pump, flow sensor. When the digital twin model predicts that the main gas path electromagnetic valve HI is less than 70 points (the probability of sticking in the next 24 hours is greater than 30%), or the vacuum pump pumping rate decreases by more than 15%, the electronic control system automatically switches to the backup gas path, and simultaneously triggers a main gas path component maintenance reminder (such as sending a work order to the operation and maintenance system).

[0078] The self-repairing strategy targets minor sensor drift (such as humidity sensor deviation > 5% RH), the digital twin model automatically compensates for the measured data (based on historical calibration curves) and marks abnormal sensors, guiding automatic calibration during the next shutdown (by injecting known humidity gas through an internal standard gas bag).

[0079] In some embodiments, a fuzzy neural network (FNN) hybrid algorithm is designed to combine the advantages of fuzzy logic language rules (handling imprecise parameters such as "high humidity" and "rapid pollution rise") and the nonlinear fitting capabilities of neural networks, dynamically generating refined replacement strategies to address the lack of adaptability of traditional algorithms to complex pollution scenarios (such as multiple pollutant coupling).

[0080] The fuzzy rule base is constructed by defining language variables, including: input variables: particle concentration (low / medium / high), VOCs growth rate (slow / medium / fast), external dust level (good / medium / poor). Output variables: replacement interval (long / medium / short), pumping time coefficient (1.0 / 1.2 / 1.5), charging flow (low / medium / high). 50 fuzzy rules are established (such as "if particle concentration is high and VOCs grow fast, then replacement interval is short and pumping time coefficient is 1.5").

[0081] The neural network optimizes fuzzy parameters by using a BP neural network to dynamically adjust the membership functions of fuzzy rules (such as redefining the threshold for "high humidity" based on seasonal changes: > 65% RH in summer and > 50% RH in winter), with historical replacement effect data (compliance time, energy consumption) as input and the center value and width of the membership function as output.

[0082] Real-time control flow includes: after the cleanliness data is fuzzed, the corresponding rules are activated, the initial replacement parameters are output, and the final strategy is formed by adjusting the correction coefficient (such as ±10%) predicted by the neural network (such as when detecting external dust "poor" and cavity humidity "high", the fuzzy logic outputs an interval of 4 hours, and the neural network adds a correction coefficient of +20% according to historical data, and the final interval is shortened to 3.2 hours).

[0083] In some embodiments, for the energy consumption optimization requirements of long-time running of the laser, a multi-objective genetic algorithm (MOGA) is used to simultaneously optimize the cleanliness compliance rate, replacement energy consumption, and equipment life (reduce the number of electromagnetic valve starts and stops), generate a Pareto optimal strategy set, and adapt to different working modes through dynamic weight distribution (such as high-power processing mode prioritizing cleanliness, and low-power testing mode prioritizing energy saving).

[0084] Multi-objective function definition includes: target 1: cleanliness compliance rate (maximize, weight ω1=0.6, increase to 0.8 in high-power mode); target 2: single replacement energy consumption (minimize, weight ω2=0.3, increase to 0.5 in low-power mode); target 3: component life loss (minimize, quantified by the number of electromagnetic valve starts and stops and the running time of the vacuum pump, weight ω3=0.1).

[0085] Genetic algorithm parameter optimization includes: encoding method: encode the replacement parameters (pumping time, filling time, interval time) into a real number vector, such as [30s, 25s, 10h]. The fitness calculation dynamically adjusts the weights according to the current working mode (identified by the laser power sensor), and in high-power mode, the "high pumping time + short interval" strategy is preferred, and in low-power mode, the "low energy consumption + long interval" strategy is selected.

[0086] Strategy library dynamic update generates a Pareto optimal strategy set (including 10 typical scene strategies, such as "high temperature and high humidity strategy" and "low load energy saving strategy") once a week, and stores it in the local database of the electronic control system. In real-time control, the optimal strategy is matched according to the current power, cleanliness, and environmental parameters, such as detecting laser power > 20W (high-power mode), automatically calling "high cleanliness guarantee strategy" (pumping time 45s, interval 6 hours, energy consumption increased by 15% but compliance rate increased to 99%).

[0087] Please refer to Figure 3 as shown, Figure 3Figure 1 is a structural schematic diagram of a gas filtering device 200 of a laser provided by an embodiment of the present application. The gas filtering device 200 of the laser is used to perform the steps of the gas filtering method of the laser shown in each of the embodiments described above. The gas filtering device 200 of the laser can be a single server or a server cluster, or the gas filtering device 200 of the laser can be a terminal, which can be a handheld terminal, a notebook computer, a wearable device, or a robot, etc.

[0088] As shown in Figure 1, the gas filtering device 200 of the laser includes: Figure 3 a gas path communication unit 201, configured to set a first gas path and a second gas path in communication with a cavity of a laser cavity outside a frequency-doubling light path space of the laser cavity, the first gas path being connected to a vacuum pump and a first electromagnetic valve in sequence, and the second gas path being connected to a high-purity gas source and a second electromagnetic valve in sequence; an electromagnetic closing unit 202, configured to acquire a cleanliness parameter of gas in the cavity in real time through a cleanliness sensor arranged in the laser cavity; when the cleanliness parameter does not meet a preset cleanliness standard, performing a gas replacement operation through an electric control system, opening the first electromagnetic valve and the vacuum pump, and pumping out the gas in the laser cavity through the first gas path until the cavity reaches a preset vacuum degree, and then closing the first electromagnetic valve and the vacuum pump; opening the second electromagnetic valve, and filling high-purity gas in the high-purity gas source into the laser cavity through the second gas path until the cavity reaches a preset gas pressure, and then closing the second electromagnetic valve; a gas replacement unit 203, configured to generate a gas replacement strategy through a preset intelligent control algorithm based on the cleanliness parameter fed back in real time by the cleanliness sensor, a working time length of the laser, and an external environment parameter, the gas replacement strategy at least including pumping time, filling time, replacement times, and time interval between adjacent two replacements of a single replacement, so as to perform the gas replacement operation according to the gas replacement strategy.

[0089] In some embodiments, performing the gas replacement operation according to the gas replacement strategy includes: controlling the first electromagnetic valve, the second electromagnetic valve, and the vacuum pump to cyclically perform the gas replacement operation according to the gas replacement strategy, until the cleanliness parameter of the gas in the laser cavity continuously meets the preset cleanliness standard, and then entering a standby monitoring state.

[0090] ​In some embodiments, after the gas replacement operation is performed according to the gas replacement strategy, the method further comprises: monitoring the cleanliness parameter, the working time length and the change of the external environment parameter in real time during the working process of the laser, and automatically triggering the update of the gas replacement strategy when it is detected that the cleanliness parameter fluctuates beyond a preset threshold or the external environment parameter changes abruptly, and performing the gas replacement operation according to the updated gas replacement strategy; the external environment parameter includes temperature, humidity and air pressure.

[0091] In some embodiments, the cleanliness parameter of the gas in the cavity is obtained in real time by the cleanliness sensor arranged in the laser cavity, which comprises: controlling the cleanliness sensor to detect the concentration of particulate matter, the content of volatile organic compounds and the content of water vapor in the gas in the laser cavity in real time, and converting the detection data into an electrical signal and transmitting it to the electric control system as the cleanliness parameter.

[0092] In some embodiments, the gas in the laser cavity is extracted through the first gas path by opening the first electromagnetic valve and the vacuum pump until the cavity reaches a preset vacuum degree, and then the first electromagnetic valve and the vacuum pump are closed, which comprises: during the gas extraction process, the vacuum pressure sensor arranged on the laser cavity is used to monitor the cavity gas pressure in real time, and when it is detected that the gas pressure value is lower than or equal to the preset vacuum degree, the electric control system sends a closing instruction to the first electromagnetic valve and the vacuum pump to stop the gas extraction operation; wherein the preset vacuum degree is set in advance according to the volume of the laser cavity, the gas extraction rate of the vacuum pump and the purity requirement of the high-purity gas.

[0093] In some embodiments, the high-purity gas in the high-purity gas source is filled into the laser cavity through the second gas path by opening the second electromagnetic valve until the cavity reaches a preset gas pressure, and then the second electromagnetic valve is closed, which comprises: during the gas filling process, the gas pressure sensor arranged on the laser cavity is used to monitor the cavity gas pressure in real time, and when it is detected that the gas pressure value reaches or exceeds the preset gas pressure, the electric control system sends a closing instruction to the second electromagnetic valve to stop the gas filling operation; wherein the preset gas pressure matches the working gas pressure of the laser cavity, and a flow control valve is arranged in the second gas path, and the electric control system adjusts the opening degree of the flow control valve to control the gas filling rate, so as to avoid the gas pressure from changing abruptly during the gas filling process.

[0094] In some embodiments, the cleanliness parameter based on the real-time feedback of the cleanliness sensor, the working time length of the laser and the external environment parameter are used to generate a gas replacement strategy through a preset intelligent control algorithm, including: the intelligent control algorithm pre-establishes a multi-dimensional parameter database, inputs the real-time acquired cleanliness parameter, working time length and external environment parameter into the database for matching analysis, dynamically adjusts the single replacement pumping time, charging time, replacement times and time interval of adjacent two replacements based on the efficiency data of historical replacement operations and the running state of the laser; the external environment parameter includes temperature, humidity and air pressure; wherein when the working time length of the laser exceeds a preset threshold or the external environment humidity and particulate matter concentration increase, the algorithm automatically shortens the time interval of adjacent two replacements or increases the replacement times to adapt to the cleanliness maintenance requirement.

[0095] It should be noted that, for the convenience and brevity of description, the specific working process of the above-described gas filtering device of the laser and each module can refer to the corresponding process in the above-described laser gas filtering method embodiments, which will not be described here.

[0096] The above-described laser gas filtering method can be implemented in the form of a computer program, which can run on the device as shown in the figure. Figure 3 The device shown in the figure includes a processor, a memory and a network interface connected through a device bus.

[0097] Please refer to Figure 4 , Figure 4 is a structural schematic block diagram of the electric control system provided by the embodiment of the application. The electric control system includes a processor, a memory and a network interface connected through a device bus, wherein the memory can include a storage medium and an internal memory.

[0098] The storage medium can store an operating device and a computer program. The computer program includes program instructions, which, when executed, can cause the processor to execute any kind of laser gas filtering method.

[0099] The processor is used to provide computing and control capabilities to support the operation of the entire electric control system.

[0100] The internal memory provides an environment for the operation of the computer program in the non-volatile storage medium, which, when executed by the processor, can cause the processor to execute any kind of laser gas filtering method.

[0101] The network interface is used for network communication, such as sending assigned tasks, etc. Those skilled in the art can understand that Figure 4The structure shown in the figure is only a block diagram of part of the structure related to the scheme of the present application, and does not constitute a limitation on the terminal to which the scheme of the present application is applied. The specific electric control system can include more or fewer components than those shown in the figure, or combine certain components, or have a different component arrangement.

[0102] It should be understood that the processor can be a central processing unit (CPU), and can also be other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or any conventional processor.

[0103] In one embodiment, the processor is configured to run a computer program stored in the memory to perform the following steps: A first gas path and a second gas path in communication with the cavity are arranged outside the frequency-doubling optical path space of the laser cavity, the first gas path is connected with a vacuum pump and a first electromagnetic valve in sequence, and the second gas path is connected with a high-purity gas source and a second electromagnetic valve in sequence; The cleanliness parameter of the gas in the cavity is acquired in real time by a cleanliness sensor arranged in the laser cavity; when the cleanliness parameter does not meet the preset cleanliness standard, a gas replacement operation is performed by an electric control system, the first electromagnetic valve and the vacuum pump are opened, the gas in the laser cavity is pumped out through the first gas path, and the first electromagnetic valve and the vacuum pump are closed after the cavity reaches the preset vacuum degree; the second electromagnetic valve is opened, the high-purity gas in the high-purity gas source is filled into the laser cavity through the second gas path, and the second electromagnetic valve is closed after the cavity reaches the preset gas pressure; Based on the cleanliness parameter fed back in real time by the cleanliness sensor, the working time length of the laser, and the external environment parameter, a gas replacement strategy is generated by a preset intelligent control algorithm, the gas replacement strategy at least includes the pumping time, the filling time, the replacement times and the time interval between adjacent two replacements of a single replacement, so as to perform the gas replacement operation according to the gas replacement strategy.

[0104] In some embodiments, the gas replacement operation is performed according to the gas replacement strategy, including: controlling the first electromagnetic valve, the second electromagnetic valve and the vacuum pump to cyclically perform the gas replacement operation according to the gas replacement strategy, until the gas cleanliness parameter in the laser cavity continuously meets the preset cleanliness standard, and then entering a standby monitoring state.

[0105] In some embodiments, after the gas replacement operation is performed according to the gas replacement strategy, the method further includes: monitoring the cleanliness parameter, the working time length and the change of the external environment parameter in real time during the working process of the laser, and when it is detected that the cleanliness parameter fluctuates beyond a preset threshold or the external environment parameter changes abruptly, triggering the update of the gas replacement strategy automatically, and performing the gas replacement operation according to the updated gas replacement strategy; the external environment parameter includes temperature, humidity and air pressure.

[0106] In some embodiments, the cleanliness parameter of the gas in the cavity is obtained in real time by the cleanliness sensor arranged in the laser cavity, including: controlling the cleanliness sensor to detect the particulate matter concentration and the volatile organic matter content and the water vapor content in the gas in the laser cavity in real time, and converting the detection data into an electrical signal and transmitting the electrical signal to the electric control system as the cleanliness parameter.

[0107] In some embodiments, the gas in the laser cavity is extracted through the first gas path by opening the first electromagnetic valve and the vacuum pump until the cavity reaches a preset vacuum degree, and then the first electromagnetic valve and the vacuum pump are closed, including: during the gas extraction process, the vacuum pressure sensor arranged on the laser cavity is used to monitor the gas pressure in the cavity in real time, and when it is monitored that the gas pressure value is lower than or equal to the preset vacuum degree, the electric control system sends a closing instruction to the first electromagnetic valve and the vacuum pump to stop the gas extraction operation; wherein the preset vacuum degree is set in advance according to the volume of the laser cavity, the gas extraction rate of the vacuum pump and the purity requirement of the high-purity gas.

[0108] In some embodiments, the high-purity gas in the high-purity gas source is filled into the laser cavity through the second gas path by opening the second electromagnetic valve until the cavity reaches a preset air pressure, and then the second electromagnetic valve is closed, including: during the gas filling process, the gas pressure sensor arranged on the laser cavity is used to monitor the gas pressure in the cavity in real time, and when it is monitored that the gas pressure value reaches or exceeds the preset air pressure, the electric control system sends a closing instruction to the second electromagnetic valve to stop the gas filling operation; wherein the preset air pressure matches the working air pressure of the laser cavity, and a flow control valve is arranged in the second gas path, and the electric control system controls the filling rate by adjusting the opening degree of the flow control valve to avoid the occurrence of air pressure mutation during the gas filling process.

[0109] In some embodiments, the cleanliness parameter based on the real-time feedback of the cleanliness sensor, the working time length of the laser, and the external environment parameter are used to generate a gas replacement strategy by a preset intelligent control algorithm, including: the intelligent control algorithm pre-establishes a multi-dimensional parameter database, inputs the real-time acquired cleanliness parameter, working time length, and external environment parameter into the database for matching analysis, dynamically adjusts the single replacement pumping time, charging time, replacement times, and time interval between adjacent two replacements based on the efficiency data of historical replacement operations and the running state of the laser; the external environment parameter includes temperature, humidity, and air pressure; wherein when the working time length of the laser exceeds a preset threshold or the external environment humidity and particulate matter concentration increase, the algorithm automatically shortens the time interval between adjacent two replacements or increases the replacement times to adapt to the cleanliness maintenance requirement.

[0110] The application further provides a computer readable storage medium, which stores a computer program, and the computer program is executed by a processor to make the processor realize the steps of the gas filtering method of the laser provided by any one of the embodiments of the application.

[0111] The computer readable storage medium can be an internal storage unit of the electronic control system, such as a hard disk or a memory of the electronic control system. The computer readable storage medium can also be an external storage device of the electronic control system, such as a plug-in hard disk, a smart media card (SMC), a secure digital (SD) card, a flash card, and the like.

[0112] The above is merely specific implementation manners of the application, but the protection scope of the application is not limited to this. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical range disclosed by the application, and these modifications or replacements should be covered in the protection scope of the application. Therefore, the protection scope of the application should be subject to the protection scope of the claims.

Claims

1. A gas filtering method of a laser, characterized by, The application relates to a laser cavity gas replacement system. A first gas path and a second gas path are arranged outside a frequency doubling light path space of a laser cavity and are in communication with the cavity, the first gas path is sequentially connected with a vacuum pump and a first electromagnetic valve, and the second gas path is sequentially connected with a high-purity gas source and a second electromagnetic valve; A cleanliness sensor arranged in the laser cavity is used to acquire a cleanliness parameter of gas in the cavity in real time; when the cleanliness parameter does not meet a preset cleanliness standard, a gas replacement operation is performed by an electric control system, the first electromagnetic valve and the vacuum pump are opened, the gas in the laser cavity is extracted through the first gas path, and the first electromagnetic valve and the vacuum pump are closed after the cavity reaches a preset vacuum degree; the second electromagnetic valve is opened, high-purity gas in the high-purity gas source is filled into the laser cavity through the second gas path, and the second electromagnetic valve is closed after the cavity reaches a preset gas pressure; Based on the cleanliness parameter fed back by the cleanliness sensor in real time, a working time length of the laser and external environment parameters, a gas replacement strategy is generated by a preset intelligent control algorithm, the gas replacement strategy at least includes an air extraction time, a gas filling time, a replacement frequency and a time interval between adjacent two replacements, so that the gas replacement operation is performed according to the gas replacement strategy.

2. The method of claim 1, wherein, The gas replacement operation performed according to the gas replacement strategy includes: According to the gas replacement strategy, the first electromagnetic valve, the second electromagnetic valve and the vacuum pump are controlled to cyclically perform the gas replacement operation, and after the cleanliness parameter of the gas in the laser cavity continuously meets the preset cleanliness standard, a standby monitoring state is entered.

3. The method of claim 1, wherein, After the gas replacement operation performed according to the gas replacement strategy, the following steps are further included: During the working process of the laser, the cleanliness parameter, the working time length and the change of the external environment parameters are monitored in real time, when it is detected that the cleanliness parameter fluctuation exceeds a preset threshold value or the external environment parameters have a mutation, the gas replacement strategy is automatically updated, and the gas replacement operation is performed according to the updated gas replacement strategy; the external environment parameters include temperature, humidity and gas pressure.

4. The method of claim 1, wherein, The cleanliness parameter of the gas in the cavity acquired by the cleanliness sensor arranged in the laser cavity in real time includes: The cleanliness sensor is controlled to detect the particulate matter concentration, volatile organic matter content and water vapor content in the gas in the laser cavity in real time, and the detection data is converted into an electric signal and transmitted to an electric control system as the cleanliness parameter.

5. The method of claim 1, wherein, The gas in the laser cavity is extracted through the first gas path by opening the first electromagnetic valve and the vacuum pump, and the first electromagnetic valve and the vacuum pump are closed after the cavity reaches a preset vacuum degree, including: During the air extraction process, a vacuum pressure sensor arranged on the laser cavity is used to monitor the cavity gas pressure in real time, when it is monitored that the gas pressure value is lower than or equal to the preset vacuum degree, the electric control system sends a closing instruction to the first electromagnetic valve and the vacuum pump to stop the air extraction operation; The preset vacuum degree is previously set according to the volume of the laser cavity, the air extraction rate of the vacuum pump and the purity requirement of the high-purity gas.

6. The method of claim 1, wherein, The opening of the second electromagnetic valve fills the high-purity gas in the high-purity gas source into the laser cavity through the second gas path until the cavity reaches the preset air pressure, and then the second electromagnetic valve is closed, comprising: During the gas filling process, the air pressure in the cavity is monitored in real time by the air pressure sensor arranged on the laser cavity, and when the monitored air pressure value reaches or exceeds the preset air pressure, the electric control system sends a closing instruction to the second electromagnetic valve to stop the gas filling operation; Wherein, the preset air pressure matches the working air pressure of the laser cavity, and the flow control valve is arranged in the second gas path, and the electric control system controls the filling rate by adjusting the opening degree of the flow control valve to avoid air pressure sudden change during the gas filling process.

7. The method of claim 1, wherein, The cleanliness parameters fed back in real time by the cleanliness sensor, the working time length of the laser, and the external environment parameters are used to generate a gas replacement strategy through a preset intelligent control algorithm, comprising: The intelligent control algorithm pre-establishes a multi-dimensional parameter database, inputs the real-time acquired cleanliness parameters, working time length, and external environment parameters into the database for matching analysis, dynamically adjusts the single replacement pumping time, filling time, replacement frequency, and time interval between adjacent two replacements based on the efficiency data of historical replacement operations and the running state of the laser; the external environment parameters include temperature, humidity, and air pressure; Wherein, when the working time length of the laser exceeds the preset threshold or the external environment humidity and particulate matter concentration increase, the algorithm automatically shortens the time interval between adjacent two replacements or increases the replacement frequency to adapt to the cleanliness maintenance requirement.

8. A gas filtering device for a laser, characterized by Comprising: The gas path communication unit is arranged outside the frequency-doubled light path space of the laser cavity and is connected with the cavity, the first gas path is connected with the vacuum pump and the first electromagnetic valve in sequence, and the second gas path is connected with the high-purity gas source and the second electromagnetic valve in sequence; The electromagnetic closing unit is used to acquire the cleanliness parameters of the gas in the cavity in real time through the cleanliness sensor arranged in the laser cavity; when the cleanliness parameters do not meet the preset cleanliness standard, the electric control system performs a gas replacement operation, opens the first electromagnetic valve and the vacuum pump, pumps out the gas in the laser cavity through the first gas path, closes the first electromagnetic valve and the vacuum pump when the cavity reaches the preset vacuum degree, opens the second electromagnetic valve, and fills the high-purity gas in the high-purity gas source into the laser cavity through the second gas path until the cavity reaches the preset air pressure, and then the second electromagnetic valve is closed; The gas replacement unit is used to generate a gas replacement strategy through a preset intelligent control algorithm based on the cleanliness parameters fed back in real time by the cleanliness sensor, the working time length of the laser, and the external environment parameters, and the gas replacement strategy at least includes the pumping time, filling time, replacement frequency, and time interval between adjacent two replacements of single replacement, so as to perform the gas replacement operation according to the gas replacement strategy.

9. An electric control system characterized by comprising: The electric control system comprises a memory and a processor; The memory is used to store a computer program; The processor is configured to execute the computer program and implement the method of any one of claims 1 to 7 when executing the computer program.

10. A computer-readable storage medium, characterized in that, The computer readable storage medium stores a computer program, and the computer program, when executed by a processor, causes the processor to implement the method of any one of claims 1 to 7.

Images