Workpiece supporting point switching device for vapor deposition furnace

Abstract

The invention relates to a workpiece supporting point switching device for a vapor deposition furnace, and relates to the technical field of vapor deposition. The workpiece supporting point switching device for the vapor deposition furnace comprises a base, the base is used for being arranged in the vapor deposition furnace, the base is further provided with a supporting mechanism, the supporting mechanism comprises a supporting frame, a switching frame and a lifting assembly, and the supporting frame and the switching frame are each provided with a plurality of abutting columns; each abutting column is used for abutting against the bottom of a to-be-deposited workpiece, the abutting positions of the abutting columns and the to-be-deposited workpiece are different, the abutting columns on the switching frame are lower than the abutting columns on the supporting frame, and the lifting assembly is used for driving the supporting frame to ascend and descend so that the to-be-deposited workpiece on the supporting frame can be separated from the bottom of the to-be-deposited workpiece. And the rotating shaft is placed on the switching frame. The method has the effect of improving the vapor deposition efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vapor deposition, in particular to a workpiece support point switching device for a vapor deposition furnace. BACKGROUND

[0002] Chemical vapor deposition (CVD) is a method that can transport gaseous substances into a reaction chamber and cause chemical reactions on the surface of a workpiece to produce solid deposits. As a special industrial equipment for depositing a layer of solid thin film on the surface of a substrate (substrate) by utilizing chemical reactions, a vapor deposition furnace (CVD furnace) can prepare high-performance thin film materials and thus plays an important role.

[0003] With regard to the related technologies in the above, since the vapor deposition furnace in the prior art is generally placed on the support frame in the furnace body when in use, and the support frame is generally in contact with the workpiece to be deposited, it is difficult for the vapor deposition to reach the position on the workpiece in contact with the support frame during deposition, so that the related personnel need to adjust the position of the workpiece after stopping the vapor deposition, so that the support changes, and the complete deposition of the workpiece can be realized. This increases the workload of the related personnel, and thus reduces the efficiency of vapor deposition, and thus needs to be improved. SUMMARY

[0004] In order to improve the efficiency of vapor deposition, the present application provides a workpiece support point switching device for a vapor deposition furnace.

[0005] The workpiece support point switching device for a vapor deposition furnace provided by the present application adopts the following technical solution: A workpiece support point switching device for a vapor deposition furnace, comprising a base, the base is used to be arranged in a vapor deposition furnace, and a support mechanism is further arranged on the base, the support mechanism comprises a support frame, a switching frame and a lifting assembly, a plurality of abutting columns are arranged on the support frame and the switching frame, each abutting column is used to abut the bottom of a workpiece to be deposited, the abutting positions of each abutting column and the workpiece to be deposited are different, the abutting columns on the switching frame are lower than the abutting columns on the support frame, and the lifting assembly is used to drive the support frame to lift, so that the workpiece to be deposited on the support frame is placed on the switching frame.

[0006] By adopting the above technical solution, compared with the prior art, which requires relevant personnel to stop vapor deposition and adjust the workpiece position to change the support position in order to achieve complete deposition of the workpiece, this application improves the workpiece deposition efficiency by setting up a support mechanism. After the workpiece is initially deposited on the support frame, the relevant personnel can control the lifting component to drive the support frame to descend, so that the workpiece on the support frame can move downward with the support frame and move to the switching frame. Then, when the support frame continues to move downward and separates from the workpiece, the support position of the workpiece can be changed, thus effectively realizing the automatic adjustment of the workpiece support position without manual operation by relevant personnel, reducing the workload of relevant personnel and effectively improving the vapor deposition efficiency of this application.

[0007] Preferably, the switching frame is further provided with a support column and a number of movable columns. The support column and the movable columns are located on different sides of the part to be processed. The abutting column on the switching frame is respectively provided on the support frame and the movable column. Each movable column is slidably connected to the base, and the sliding direction is towards the movable column. The switching frame is also provided with a moving mechanism for driving each movable column to slide.

[0008] By adopting the above technical solution, the setting of the support column and the moving column allows the relevant personnel to drive each moving column to slide closer to the support column through the moving mechanism when the workpiece deposition is completed and it needs to be removed. This makes the distance between the moving columns greater than the diameter of the workpiece, allowing the relevant personnel or robotic arm to directly grasp one end of the workpiece and remove the deposited workpiece, effectively facilitating the removal of the deposited workpiece.

[0009] Preferably, each of the moving columns is provided with a limiting mechanism, which includes a limiting frame and a linkage component. One end of the limiting frame is rotatably connected to the corresponding moving column. The workpiece to be processed placed on the moving column is located on the rotation path of the other end of the limiting frame. The moving mechanism drives the limiting frame to rotate through the linkage component.

[0010] By adopting the above technical solution and setting the limiting mechanism, the moving mechanism can drive the limiting frame to rotate through the linkage component during the movement of the moving column. This causes one end of the limiting frame to rotate above the workpiece to be processed, thereby limiting the workpiece and reducing the probability of the workpiece tilting during the movement of the moving column, thus reducing the probability of the workpiece detaching from the moving column.

[0011] Preferably, the linkage component includes a sliding frame, a transmission rod, and a conversion element. The sliding frame is slidably connected to the moving column. One end of the transmission rod is rotatably connected to the sliding frame, and the other end is rotatably connected to the limiting frame. The moving mechanism drives the sliding frame to slide through the conversion element.

[0012] By adopting the above technical solution and setting the linkage components, the moving mechanism can drive the sliding frame to slide through the conversion component when the moving column is displaced. This causes the sliding frame to drive the transmission rod to move, which in turn causes the transmission rod to drive the limit frame to rotate, thus driving the limit frame to rotate. At the same time, the moving mechanism can drive the limit frame to rotate while driving the moving column to move, effectively saving the active device for driving the limit frame to rotate.

[0013] Preferably, the conversion component includes a conversion frame, one end of which is rotatably connected to the switching frame, and the other end of which is rotatably connected to the sliding frame.

[0014] By adopting the above technical solution and setting the conversion frame, when the moving column slides, the moving column can drive the sliding frame to slide through the conversion frame. This allows the sliding frame to drive the limit frame to rotate during the sliding process, realizing the linkage between the limit frame and the moving column. This effectively facilitates the operation of relevant personnel and also saves the active device for driving the limit frame.

[0015] Preferably, the moving mechanism includes a moving frame, a moving component, and several transmission frames. The sliding frame is slidably connected to the switching frame. The moving component is used to drive the moving frame to slide. The transmission frames correspond to the moving columns, and one end of each transmission frame is rotatably connected to the corresponding moving column, and the other end is rotatably connected to the sliding frame.

[0016] By adopting the above technical solution and configuring the moving mechanism, when it is necessary to drive the moving column to slide, the moving component can drive the moving frame to slide, thereby causing the moving frame to drive each transmission frame to rotate relative to itself, and thus each transmission frame can drive the corresponding moving column to slide, thereby realizing the driving of the sliding of each moving column, effectively facilitating the operation of relevant personnel, and saving the configuration of the driving mechanism.

[0017] Preferably, the support frame is also provided with a positioning mechanism, which includes a positioning frame and a linkage component. The positioning frame is slidably connected to the support frame, and the workpiece to be deposited on the support frame is located on the sliding path of the positioning frame. The lifting component drives the positioning frame to slide through the linkage component.

[0018] By adopting the above technical solution and setting the positioning mechanism, when the lifting component drives the support frame to rise and fall, the lifting component can drive the positioning frame to slide through the linkage, so that the positioning frame can abut against the side end of the workpiece, thereby achieving the positioning of the workpiece and effectively ensuring the placement and deposition effect of the workpiece.

[0019] Preferably, the linkage component includes a linkage frame, one end of which is rotatably connected to the base, and the other end is inclined downward and rotatably connected to the positioning frame.

[0020] By adopting the above technical solution and setting the linkage frame, the linkage frame on the support frame can rotate relative to the base when the support frame is raised or lowered, thereby causing the linkage frame to drive the positioning frame to slide, realizing the linkage between the support frame and the positioning frame, effectively saving the driving mechanism for driving the positioning frame to slide, and facilitating the operation of relevant personnel.

[0021] Preferably, both the support frame and the switching frame are slidably connected to the base, and the sliding direction is the height direction of the base. The lifting component is used to drive the support frame and the switching frame to slide in opposite directions simultaneously.

[0022] By adopting the above technical solution, the support frame and the switching frame are slidably connected to the base, which allows the support frame and the switching frame to slide in opposite directions at the same time. This effectively reduces the amount of sliding required for a single sliding of the support frame or the switching frame, thus eliminating the need for a large-stroke active device and effectively facilitating the setting of the lifting components.

[0023] Preferably, the base is rotatably connected to the vapor deposition furnace, and the axis of rotation is oriented along the height of the vapor deposition furnace. The vapor deposition furnace is also provided with a rotating mechanism for driving the base to rotate.

[0024] By adopting the above technical solution and setting the base to rotate in relation to the vapor deposition furnace, the workpiece placed on the base can rotate during the deposition process, thereby increasing the uniformity of deposition and effectively improving the deposition effect.

[0025] In summary, this application includes at least one of the following beneficial technical effects: 1. The support mechanism is designed so that after the workpiece is initially deposited on the support frame, the relevant personnel can control the lifting component to drive the support frame to descend, thereby allowing the workpiece on the support frame to move downward with the support frame and move to the switching frame. Then, when the support frame continues to move downward and separates from the workpiece, the position of the support for the workpiece can be changed, thus effectively realizing the automatic adjustment of the workpiece support position without the need for manual operation by relevant personnel, reducing the workload of relevant personnel, and effectively improving the vapor deposition efficiency of this application. 2. The design of the support columns and moving columns allows personnel to drive each moving column to slide closer to the support column when the workpiece deposition is complete and it needs to be removed. This makes the distance between the moving columns greater than the diameter of the workpiece, allowing personnel or robotic arms to directly grasp one end of the workpiece and remove the deposited workpiece, effectively facilitating the removal of the deposited workpiece. 3. The positioning mechanism is designed so that when the lifting component moves the support frame up and down, the lifting component can move the positioning frame to slide through the linkage, so that the positioning frame can abut against the side of the workpiece, thereby achieving the positioning of the workpiece and effectively ensuring the placement and deposition effect of the workpiece. Attached Figure Description

[0026] Figure 1 This is a schematic diagram illustrating the overall workpiece support point switching device for a vapor deposition furnace in the embodiments of this application.

[0027] Figure 2 This is a structural schematic diagram illustrating the positioning mechanism in the embodiments of this application.

[0028] Figure 3 This is a structural schematic diagram used to illustrate the extension frame in the embodiments of this application.

[0029] Figure 4 This is a schematic diagram illustrating the structure of the transmission frame in the embodiments of this application.

[0030] Figure 5 This is a structural schematic diagram used to illustrate the linkage component in the embodiments of this application.

[0031] Explanation of reference numerals in the attached drawings: 1. Base; 11. Sliding guide rail; 2. Support mechanism; 21. Support frame; 22. Switching frame; 23. Lifting assembly; 231. Lifting component; 232. Gear; 233. Rack; 24. Abutment column; 25. Support column; 26. Extension frame; 27. Moving column; 3. End cap; 4. Rotating mechanism; 5. Positioning mechanism; 51. Positioning frame; 52. Linkage component; 521. Linkage frame; 6. Moving mechanism; 61. Moving frame; 62. Moving component; 63. Transmission frame; 7. Limiting mechanism; 71. Limiting frame; 711. Limiting part; 72. Linkage assembly; 721. Sliding frame; 722. Transmission rod; 723. Converter; 7231. Converter; 8. Additional column. Detailed Implementation

[0032] The following is in conjunction with the appendix Figures 1-5 This application will be described in further detail.

[0033] This application discloses a workpiece support point switching device for a vapor deposition furnace. (Refer to...) Figure 1 andFigure 2 The workpiece support point switching device for a vapor deposition furnace includes a base 1, which is installed inside the vapor deposition furnace. A support mechanism 2 is also provided on the base 1, comprising a support frame 21, a switching frame 22, and a lifting assembly 23. Both the support frame 21 and the switching frame 22 are provided with several abutment posts 24, each abutting against the bottom of the workpiece to be deposited, and the abutment points of each post 24 are different. The abutment posts 24 on the switching frame 22 are lower than those on the support frame 21. The lifting assembly 23 drives the support frame 21 to rise and fall, so that the workpiece to be deposited on the support frame 21 is placed on the switching frame 22.

[0034] Reference Figure 1 A head 3 is also provided below the base 1, and the head 3 is fixedly installed inside the bottom of the vapor deposition furnace. The base 1 is rotatably connected to the head 3 by a pin, and the axis of rotation is vertically set (i.e., the vertical direction is the height direction of the vapor deposition furnace). A rotating mechanism 4 is also provided on the head 3. In this embodiment, the rotating mechanism 4 is a geared motor, which is fixedly installed at the bottom of the head 3, and the rotating shaft is set vertically upward and fixedly connected to the base 1 to drive the rotation of the base 1.

[0035] Reference Figure 1 and Figure 2 The switching frame 22 is located below the support frame 21, and both the switching frame 22 and the support frame 21 are slidably connected to the base 1 via slide rails, with the sliding direction set vertically. In this embodiment, the number of lifting components 23 is set to two, and they are located on opposite sides of the support frame 21. Each lifting component 23 includes a lifting element 231, a gear 232, and a rack 233. In this embodiment, the lifting element 231 is set as a cylinder.

[0036] Reference Figure 1 and Figure 2 The aforementioned cylinder is fixedly mounted on the base 1, with the piston rod vertically upward and bolted to the bottom of the support frame 21 to drive the lifting and lowering of the support frame 21. Each lifting assembly 23 contains two racks 233, one of which is fixedly connected to the bottom of the support frame 21, and the other is fixedly connected to the top of the switching frame 22. Each gear 232 is located between the corresponding two racks 233 and meshes with both racks 233, thereby achieving transmission between the two racks 233.

[0037] Reference Figure 1 and Figure 2The support frame 21 is also equipped with two support columns 25, which are located on opposite sides of the support frame 21. Each support column 25 is vertically installed and its bottom end is fixedly connected to the support frame 21. Each support column 25 is equipped with several extension frames 26, which are evenly and equidistantly distributed along the height direction of the support frame 21. Each extension frame 26 extends towards the center of the workpiece and extends directly below the corresponding workpiece.

[0038] Reference Figure 1 and Figure 2 The abutment posts 24 on the support frame 21 are located on the side of each extension frame 26 away from the corresponding support frame 21 and are fixedly connected to the corresponding extension frame 26. The top of each abutment post 24 abuts against the corresponding workpiece to support it. Two sliding guide rails 11 are also provided on the base 1, corresponding to the support posts 25 on the extension frames 26. The bottom end of each sliding guide rail 11 is fixedly connected to the base 1, and the end of the support frame 21 is embedded in the sliding guide rail 11 and slidably connected to it in the vertical direction.

[0039] Reference Figure 2 Each extension frame 26 is equipped with a positioning mechanism 5, and each positioning mechanism 5 includes a positioning frame 51 and a linkage component 52. Each linkage component 52 includes a linkage frame 521, one end of which is rotatably connected to the side wall of the corresponding sliding guide rail 11 via a pin, and the other end is rotatably connected to the positioning frame 51 via a pin. Each positioning frame 51 is sleeved on the corresponding extension frame 26 and is slidably connected to the corresponding extension frame 26, and the corresponding workpiece is located on the sliding path of the positioning frame 51. The side of the positioning frame 51 closest to the workpiece is arc-shaped to adapt to the shape of the workpiece.

[0040] Reference Figure 1 and Figure 2 In the initial state, when no workpiece is placed on the extension frame 26, the support frame 21 has not slid to the top of its sliding path, and the positioning frame 51 is located on the side of its sliding path closest to the support column 25. When the support frame 21 slides upward, the linkage frame 521 on the extension frame 26 rotates relative to the corresponding sliding guide rail 11, thereby causing the linkage frame 521 to drive the positioning frame 51 to slide, so that the positioning frame 51 abuts against the side of the workpiece after sliding, thus achieving the positioning of the workpiece.

[0041] Reference Figure 2 and Figure 3The switching frame 22 is also equipped with a support column 25. The bottom end of the support frame 21 is fixedly connected to the top of the switching frame 22, and the top end passes through the support frame 21. The support column 25 is located between the two support columns 25 on the support frame 21, and also extends with an extension frame 26 and an abutment column 24 (the arrangement and connection relationship of the extension frame 26 and the abutment column 24 have been described above, so they will not be repeated). The height of the abutment column 24 on the support column 25 is lower than the height of the abutment column 24 on the two support columns 25 on the support frame 21.

[0042] Reference Figure 1 , Figure 2 and Figure 3 The switching frame 22 is also provided with a number of movable columns 27. In this embodiment, the number of movable columns 27 is set to two, and they are located on the side of the switching frame 22 away from its own upper support column 25. The top of each movable column 27 is slidably connected to the switching frame 22 via a slide rail, and the sliding trajectory is arc-shaped, and the arc-shaped trajectory is coaxial with the switching frame 22.

[0043] Reference Figure 2 Each movable column 27 extends vertically upward from its top and passes through the support frame 21. Two arc-shaped through slots are also formed on the top wall of the support frame 21 for the corresponding movable column 27 to pass through. The inner sidewall of each arc-shaped through slot abuts against the sidewall of the corresponding movable column 27, thereby guiding the sliding of the movable column 27.

[0044] Reference Figure 2 and Figure 4 The switching frame 22 is also equipped with a moving mechanism 6, which includes a moving frame 61, a moving part 62, and several transmission frames 63. In this embodiment, the number of transmission frames 63 is set to two, and they are arranged one-to-one with the moving column 27. One end of each transmission frame 63 is sleeved on the corresponding moving column 27 and rotatably connected to the corresponding moving column 27, and the other end is rotatably connected to the moving frame 61 through a pin.

[0045] Reference Figure 4 The movable frame 61 is located between the two movable columns 27 and is slidably connected to the top of the switching frame 22 via a slide rail. In this embodiment, the movable component 62 is configured as a cylinder, which is fixedly mounted on the switching frame 22, and the piston rod is fixedly connected to the movable frame 61 to drive the sliding of the movable frame 61.

[0046] Reference Figure 2 and Figure 3Each movable column 27 is also equipped with an extension frame 26 and abutment posts 24. The extension frames 26 on each movable column 27 are distributed vertically and are fixedly connected to their respective movable columns 27. The abutment posts 24 on each extension frame 26 are fixedly connected to their respective extension frames 26 and extend vertically upwards. The top of each abutment post 24 is used to support the workpiece after contacting its bottom.

[0047] Reference Figure 1 and Figure 2 The height of the moving column 27 on the switching frame 22 and the abutting column 24 on each layer of the support column 25 are the same, and they are all lower than the height of the abutting column 24 on the same layer of the support column 25 of the support frame 21, so that after the support frame 21 moves down, the workpiece on each layer can be placed on the switching frame 22.

[0048] Reference Figure 2 and Figure 5 Each movable column 27 is equipped with a limiting mechanism 7, and there are several limiting mechanisms 7 on each movable column 27, each corresponding to one of the abutting columns 24. The top of the switching frame 22 is also equipped with two additional columns 8, each corresponding to one of the movable columns 27, and each located on one side of the corresponding movable column 27. The bottom end of each additional column 8 is fixedly connected to the switching frame 22, and the top end extends vertically upwards, passing through the support frame 21.

[0049] Reference Figure 2 and Figure 5 Each limiting mechanism 7 includes a limiting frame 71 and a linkage component 72. Each linkage component 72 includes a sliding frame 721, a transmission rod 722, and a conversion component 723. Each conversion component 723 includes a conversion frame 7231. One end of each conversion frame 7231 is rotatably connected to the corresponding additional column 8 via a pin. The other end of each conversion frame 7231 is inclined and rotatably connected to the top of the corresponding sliding frame 721 via a pin. Each sliding frame 721 is slidably connected to the corresponding moving column 27 via a slide rail, and the sliding direction is set to the horizontal direction.

[0050] Reference Figure 2 and Figure 5 One end of each transmission rod 722 is rotatably connected to the side of the corresponding sliding frame 721 via a pin, and the other end is rotatably connected to the end of the corresponding limiting frame 71 via a pin. Each limiting frame 71 is located above the corresponding abutment post 24, and its middle part is rotatably connected to the corresponding moving post 27 via a pin. Each limiting frame 71 has an upwardly extending limiting portion 711 at the end away from the corresponding transmission rod 722. The limiting portion 711 is integrally formed with the limiting frame 71 and is used to position itself above the corresponding workpiece after rotation, thereby reducing the probability of the workpiece tilting.

[0051] ReferenceFigure 2 and Figure 5 In the initial state, when the moving column 27 is located on the side of its sliding path away from the support column 25 on the switching frame 22, the limiting frame 71 does not rotate, and the limiting part 711 on the limiting frame 71 is set upward. At this time, the sliding frame 721 is located on the side of its sliding path away from the limiting frame 71. When the moving column 27 moves closer to the support column 25 on the switching frame 22, the conversion frame 7231 rotates relative to the added column 8, thereby causing the conversion frame 7231 to drive the corresponding sliding frame 721 to slide, so that the sliding frame 721 moves closer to the limiting frame 71.

[0052] Reference Figure 2 and Figure 5 During this process, the sliding frame 721 drives the transmission rod 722 to rotate relative to itself, causing the end of the transmission rod 722 to move away from the sliding frame 721, which in turn drives the corresponding limiting frame 71 to rotate. This causes the limiting part 711 on the limiting frame 71 to rotate downward and gradually approach the workpiece, thereby limiting the workpiece in the vertical direction. When the moving column 27 slides to the end of its sliding path that is close to the support column 25 on the switching frame 22, the angle between the lines connecting the two moving columns 27 to the axis of the switching frame 22 is greater than or equal to 90 degrees. This allows relevant personnel or robotic arms to directly remove the deposited material from the side after opening the side door of the furnace. The implementation principle of a workpiece support point switching device for a vapor deposition furnace according to Embodiment 2 of this application is as follows: In use, the workpiece is placed on the support frame 21, with the workpiece abutting against the abutting post 24 on the support frame 21. After initial deposition of the workpiece, the lifting assembly 23 drives the support frame 21 to move downwards. During this process, the support frame 21, through gears 232 and racks 233, drives the switching frame 22 to slide upwards, thereby reducing the sliding amount of the support frame 21. When the bottom of the workpiece on the support frame 21 abuts against the top of the abutting post 24 on the switching frame 22, the support frame 21 continues to move downwards, thereby separating the abutting post 24 from the workpiece and allowing the workpiece on the switching frame 22 to move upwards to its initial height, thus achieving the switching of the contact point.

[0053] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A workpiece support point switching device for a vapor deposition furnace, comprising a base (1), the base (1) being disposed within the vapor deposition furnace, characterized in that: The base (1) is also provided with a support mechanism (2), which includes a support frame (21), a switching frame (22) and a lifting assembly (23). The support frame (21) and the switching frame (22) are each provided with a plurality of abutting posts (24). Each abutting post (24) is used to abut against the bottom of the workpiece to be deposited. The abutting points of each abutting post (24) and the workpiece to be deposited are different. The abutting posts (24) on the switching frame (22) are lower than the abutting posts (24) on the support frame (21). The lifting assembly (23) is used to drive the support frame (21) to rise and fall so that the workpiece to be deposited on the support frame (21) is placed on the switching frame (22).

2. The workpiece support point switching device for a vapor deposition furnace according to claim 1, characterized in that: The switching frame (22) is also provided with a support column (25) and a number of movable columns (27). The support column (25) and the movable columns (27) are located on different sides of the part to be processed. The abutting column (24) on the switching frame (22) is respectively provided on the support frame (21) and the movable column (27). Each movable column (27) is slidably connected to the base (1), and the sliding direction is close to the movable column (27). The switching frame (22) is also provided with a moving mechanism (6), which is used to drive each movable column (27) to slide.

3. A workpiece support point switching device for a vapor deposition furnace according to claim 2, characterized in that: Each of the moving columns (27) is provided with a limiting mechanism (7). The limiting mechanism (7) includes a limiting frame (71) and a linkage component (72). One end of the limiting frame (71) is rotatably connected to the corresponding moving column (27). The workpiece to be processed placed on the moving column (27) is located on the rotation path of the other end of the limiting frame (71). The moving mechanism (6) drives the limiting frame (71) to rotate through the linkage component (72).

4. A workpiece support point switching device for a vapor deposition furnace according to claim 3, characterized in that: The linkage component (72) includes a sliding frame (721), a transmission rod (722), and a conversion component (723). The sliding frame (721) is slidably connected to the moving column (27). One end of the transmission rod (722) is rotatably connected to the sliding frame (721), and the other end is rotatably connected to the limiting frame (71). The moving mechanism (6) drives the sliding frame (721) to slide through the conversion component (723).

5. A workpiece support point switching device for a vapor deposition furnace according to claim 4, characterized in that: The conversion component (723) includes a conversion frame (7231), one end of which is rotatably connected to the switching frame (22), and the other end is rotatably connected to the sliding frame (721).

6. A workpiece support point switching device for a vapor deposition furnace according to claim 2, characterized in that: The moving mechanism (6) includes a moving frame (61), a moving component (62), and several transmission frames (63). The sliding frame (721) is slidably connected to the switching frame (22). The moving component (62) is used to drive the moving frame (61) to slide. The transmission frame (63) corresponds to the moving column (27), and one end of each transmission frame (63) is rotatably connected to the corresponding moving column (27), and the other end is rotatably connected to the sliding frame (721).

7. A workpiece support point switching device for a vapor deposition furnace according to claim 1, characterized in that: The support frame (21) is also provided with a positioning mechanism (5), which includes a positioning frame (51) and a linkage (52). The positioning frame (51) is slidably connected to the support frame (21), and the workpiece to be deposited on the support frame (21) is located on the sliding path of the positioning frame (51). The lifting component (23) drives the positioning frame (51) to slide through the linkage (52).

8. A workpiece support point switching device for a vapor deposition furnace according to claim 7, characterized in that: The linkage component (52) includes a linkage frame (521), one end of which is rotatably connected to the base (1), and the other end is inclined downward and rotatably connected to the positioning frame (51).

9. A workpiece support point switching device for a vapor deposition furnace according to claim 1, characterized in that: The support frame (21) and the switching frame (22) are both slidably connected to the base (1), and the sliding direction is the height direction of the base (1). The lifting component (23) is used to drive the support frame (21) and the switching frame (22) to slide in opposite directions at the same time.

10. A workpiece support point switching device for a vapor deposition furnace according to claim 1, characterized in that: The base (1) is rotatably connected to the vapor deposition furnace, and the axis of rotation is in the direction of the height of the vapor deposition furnace. The vapor deposition furnace is also provided with a rotating mechanism (4), which is used to drive the base (1) to rotate.

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