High-precision mixed gas online monitoring operation and maintenance system and method based on multi-dimensional sensing data

Abstract

The invention discloses a high-precision mixed gas online monitoring operation and maintenance system based on multi-dimensional sensing data, which is arranged between a gas inlet path and a gas utilization path and comprises a plurality of electromagnetic valves, an inlet pressure sensor, an inlet temperature sensor, an electromagnetic proportional valve MFC, an outlet pressure sensor and an outlet current sensor, the invention further discloses a matched online monitoring operation and maintenance method which comprises the following steps: firstly, acquiring data of each path of sensor in real time and preprocessing the data to generate multi-dimensional time sequence data; then, the sensor state, the gas source stability, the MFC state, the gas mixing stability, the gas supply stability and the electromagnetic valve state are monitored in real time through all the abnormity monitoring modules; intelligent analysis is carried out based on the multi-dimensional time sequence data, and operation and maintenance suggestions are given; according to the on-line monitoring operation and maintenance method provided by the invention, non-blind area monitoring of the whole flow state of the mixed gas is realized, the abnormity processing accuracy and efficiency are improved, the operation and maintenance cost is reduced, the stable operation of the system is guaranteed, and the method is suitable for scenes including but not limited to laser cutting or welding equipment and the like depending on shielding gas mixing.

Description

Technical Field

[0001] This invention belongs to the field of online monitoring technology for mixed gas, and specifically relates to a high-precision online monitoring and maintenance system and method for mixed gas based on multi-dimensional sensor data. Background Technology

[0002] In existing laser cutting operations, high-pressure mixed gas serves as a protective gas. By altering its composition, purity, and flow rate, it plays a crucial role in regulating energy transfer, optimizing metallurgical reactions, and ensuring process stability for different laser cutting processes. Maintaining a continuous and stable output of the mixed gas is vital for product quality. While existing technologies include real-time monitoring methods for high-pressure mixed gas, the sources of abnormal mixed gas output during actual monitoring are complex, and current technologies lack effective methods to differentiate and monitor these anomalies, thus failing to provide targeted maintenance recommendations. In summary, the market currently lacks online monitoring and maintenance methods for high-pressure mixed gas systems. Summary of the Invention

[0003] Purpose of the invention: To address the problems existing in the above-mentioned background technology, the present invention provides a high-precision online monitoring and maintenance system and method for mixed gas based on multi-dimensional sensor data. It provides an online monitoring method for various equipment failures, gas source instability, and gas pressure instability that may occur during the use of high-pressure mixed gas, and provides accurate maintenance suggestions through intelligent analysis of sensor data.

[0004] Technical Solution: A high-precision online monitoring and maintenance system for mixed gas based on multi-dimensional sensor data is installed between the inlet gas path and the outlet gas path. The inlet gas path includes several inlets, each supplying different types of protective gas. Different inlets are fed into a buffer gas tank through input pipes. The buffer gas tank is connected to the outlet gas path and supplies gas to external welding equipment through an output pipe. The system includes electrically connected solenoid valves, inlet pressure sensors, inlet temperature sensors, electromagnetic proportional valves (MFC), outlet pressure sensors, and outlet current sensors.

[0005] Furthermore, each air inlet is equipped with a solenoid valve for controlling the opening and closing of the air path; the solenoid valve, inlet pressure sensor, inlet temperature sensor, and electromagnetic proportional valve (MFC) are connected in series between each air inlet and the input pipeline; the inlet pressure sensor is used to measure the inlet pressure, the inlet temperature sensor is used to measure the inlet airflow temperature, and the electromagnetic proportional valve (MFC) is used to control the flow rate of the protective gas in this path; the output pipeline is connected in series with an outlet pressure sensor and an outlet current sensor to measure the outlet pressure and outlet current, respectively.

[0006] An online monitoring and maintenance method based on the above-mentioned high-precision mixed gas online monitoring and maintenance system includes the following steps: Step S1: Acquire data from each sensor in real time and preprocess it to generate multi-dimensional time series data; Step S2: Real-time monitoring of sensor status, gas source stability, MFC status, gas mixing stability, gas supply stability, and solenoid valve status is performed through each anomaly monitoring module.

[0007] Step S3: Perform intelligent analysis based on multi-dimensional time series data and provide operation and maintenance suggestions.

[0008] Furthermore, the specific steps for generating multidimensional time-series data in step S1 include: It receives data from various sensors and control records from controllers such as solenoid valves and MFCs, and simultaneously acquires soft sensor configurations and collects multi-dimensional time-series data in real time. The multi-dimensional time-series data includes the real-time gas source pressure measurement value collected by the pressure sensor at the inlet, the real-time gas source temperature measurement value collected by the temperature sensor at the inlet, the current gas source flow rate setting value of each gas path MFC, the actual calculated gas source flow rate value, the gas supply pressure setting value, the gas supply pressure measurement value, and the equipment current measurement value.

[0009] Further, the anomaly monitoring module described in step S2 writes multi-dimensional time-series data into the data processing window and processes it immediately when the data in the window reaches the processing standard. Specifically, the anomaly monitoring module includes a sensor data monitoring module for monitoring and processing the raw data of each sensor and marking the current status of each sensor; a gas source pressure monitoring module for monitoring and processing the gas source pressure measurement value; an equipment current monitoring module for monitoring and processing the equipment current measurement value; a gas source temperature monitoring module for monitoring and processing the gas source temperature measurement value and recording the gas source temperature data; a gas source flow monitoring module for monitoring and processing the set value and calculated value of the gas source flow, marking the current status of the MFC, and recording the mixing index; a gas supply pressure monitoring module for monitoring and processing the set value and measured value of the gas supply pressure, and recording various gas supply pressure indicators; and a solenoid valve status monitoring module for comparing the solenoid valve status with its control record and marking the current status of the solenoid valve.

[0010] Furthermore, the intelligent analysis steps specifically include: Step S3.1: The sensor data monitoring module analyzes the sensor status based on the raw sensor data to determine if there is any abnormality. When an abnormality occurs, it provides sensor maintenance suggestions in descending order of priority. If the previous maintenance suggestion cannot eliminate the abnormality, it automatically jumps to the next maintenance suggestion. (1) Adjust the sensor configuration, especially the sampling settings; (2) Check the sensor installation method and reinstall the sensor in a timely manner; (3) Check the sensor's working environment and take measures such as adding a frequency blocking cover to prevent interference if necessary; (4) Replace the sensor; Step S3.2: The gas source pressure monitoring module collects the gas source pressure measurement value in real time and analyzes the gas source stability based on the gas source pressure measurement value; when the gas source stability is abnormal, it further determines whether it is an abnormality of the intake air path; when the intake air path is abnormal, it provides intake air path maintenance suggestions in order of priority from high to low; when the previous maintenance suggestion cannot eliminate the abnormality, it automatically jumps to the next maintenance suggestion. (1) Check if the air intake pipe is blocked; (2) Check whether the connection between the gas source and the mixing device is reliable, and at the same time observe whether the pipeline is leaking; If no abnormality occurs in the gas path, further check whether the gas source is abnormal; if an abnormality occurs, provide gas source maintenance suggestions in descending order of priority; if the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion. (1) Check if the gas supply is sufficient and replenish the gas supply in a timely manner; (2) Increase the valve opening at the gas source; Step S3.3: Based on the real-time monitoring of the MFC status by the gas source flow monitoring module, and combined with the gas source temperature monitoring module and the equipment current monitoring module, the MFC status is comprehensively analyzed. When the MFC status is abnormal, it is further determined whether the abnormality is due to the MFC itself. If the MFC is abnormal, MFC operation and maintenance suggestions are given in descending order of priority. If the previous operation and maintenance suggestion cannot eliminate the abnormality, it will automatically jump to the next operation and maintenance suggestion. (1) Adjust the MFC configuration to ensure that the sensitivity, control parameters and other settings are within a reasonable range; (2) Check the MFC working environment and avoid using it in extreme temperature or strong interference scenarios; (3) Replace with MFC; If no abnormality is found in the MFC itself, then check whether there is an air path abnormality as described in step S3.2; if there is an air path abnormality, then give the intake air path maintenance suggestion as described in step S3.2; if there is no air path abnormality, then give the air source maintenance suggestion. Step S3.4: Analyze the gas mixing index and gas mixing stability based on the gas source flow monitoring module; when the gas mixing stability is abnormal, determine whether the gas mixing path is abnormal; when the gas mixing path is abnormal, give gas mixing path maintenance suggestions in order of priority from high to low; when the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion. (1) Check for foreign objects in the gas path from MFC to the buffer tank; (2) Check whether the connections at the MFC outlet and buffer tank are reliable, and observe whether the pipeline is leaking. (3) Reduce the air intake or replace with a larger container; (4) Check whether the inlet and outlet connections are reliable and check whether the tank is damaged; If no abnormality occurs in the gas mixing path, repeat the step S3.3 to determine whether the abnormality is due to the MFC itself. Step S3.5: Analyze whether the solenoid valve status is abnormal based on the solenoid valve status monitoring module; when an abnormality occurs, provide solenoid valve maintenance suggestions in descending order of priority; if the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion. (1) Check the installation method of the solenoid valve and observe whether the valve leaks air; (2) Replace the solenoid valve; Step S3.6: Analyze the gas supply stability based on the gas supply pressure monitoring module; when the gas supply stability is abnormal, further determine whether there is an abnormality in the gas consumption path; when an abnormality in the gas consumption path occurs, provide gas consumption path maintenance suggestions in order of priority from high to low; if the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion. (1) Check if the air outlet pipe is blocked; (2) Check whether the connection between the gas mixing device and the gas-using equipment is reliable, and at the same time observe whether the pipeline is leaking; (3) Reduce the gas consumption of gas-using equipment; When no abnormality occurs in the gas supply line, repeat the steps of analyzing gas mixing stability in step S3.4 and analyzing solenoid valve status in step S3.5, and provide corresponding operation and maintenance suggestions.

[0011] Compared with existing technical solutions, the technical solution adopted in this invention has the following advantages: (1) The method provided by the present invention realizes high-precision real-time monitoring of the entire chain of the gas mixing system. By deploying multiple types of sensors such as inlet pressure and temperature in the gas inlet path and the gas outlet path, multi-dimensional data is collected and time-series data is generated, covering the entire process from gas source input, gas mixing to equipment gas supply. This solves the problem that traditional monitoring only targets a single link or parameter and is prone to missing potential risks, ensuring that there are no blind spots in the perception of the system's operating status.

[0012] (2) This invention relies on a distributed anomaly monitoring module to classify and monitor key states such as sensors, gas sources, MFC, and gas mixing, and combines multi-dimensional data to locate the root cause of anomalies. It also provides operation and maintenance suggestions in order of priority for different anomaly scenarios, avoiding blind investigation, guiding staff to solve problems efficiently, and greatly shortening the fault handling time.

[0013] (3) This invention effectively reduces operation and maintenance costs and ensures system stability. By providing early warning of anomalies, prioritizing configuration adjustments, and checking connections, it reduces unnecessary component replacements and avoids equipment damage caused by the expansion of anomalies. This improves the reliability of the gas mixing system while reducing the manpower and material resources required for long-term operation and maintenance. Attached Figure Description

[0014] Figure 1 This invention provides a framework diagram of a high-precision online monitoring and maintenance system for mixed gas based on multi-dimensional sensor data. Figure 2 The schematic diagram shows the principle of the high-precision online monitoring and maintenance method for mixed gas based on multi-dimensional sensor data provided by this invention. Detailed Implementation

[0015] This invention provides a high-precision online monitoring and maintenance system and method for mixed gases based on multi-dimensional sensor data. It collects data from various sensors and equipment control records in real time, while simultaneously acquiring sensor configurations. Based on these configurations, it performs real-time data sampling and processing to generate multi-dimensional time-series data. Online monitoring is then performed based on this multi-dimensional time-series data, and corresponding anomaly maintenance methods are provided. The monitoring and maintenance system and method provided by this invention are described in detail below with reference to the accompanying drawings.

[0016] like Figure 1 As shown, the high-precision online monitoring and maintenance system for mixed gas based on multi-dimensional sensor data provided by this invention is installed in the gas inlet and gas consumption paths of the mixed gas system. The gas inlet path includes several inlets, each supplying different types of protective gas. The different inlets are fed into a buffer gas tank through input pipes for thorough mixing. The buffer gas tank is then connected to the gas consumption path, which supplies gas to external welding equipment through an output pipe.

[0017] The online monitoring and maintenance system provided by this invention includes a solenoid valve, an inlet pressure sensor, an inlet temperature sensor, an electromagnetic proportional valve (MFC), an outlet pressure sensor, and an outlet current sensor. Each air inlet is equipped with a solenoid valve for controlling the opening and closing of the air path; the solenoid valve, along with the inlet pressure sensor, inlet temperature sensor, and electromagnetic proportional valve (MFC), are connected in series between each air inlet and the input pipeline. The inlet pressure sensor measures the inlet pressure, the inlet temperature sensor measures the inlet airflow temperature, and the electromagnetic proportional valve (MFC) controls the flow rate of the protective air in that path. The output pipeline is connected in series with an outlet pressure sensor and an outlet current sensor to measure the outlet pressure and outlet current, respectively.

[0018] Based on the aforementioned online monitoring and maintenance system, this invention designs a corresponding online monitoring and maintenance method. For potential hardware anomalies in the system, such as those involving sensors, solenoid valves, and MFC, a distributed anomaly monitoring module continuously retrieves real-time sensor data, controller control records, and monitoring data, writing this time-series data into a data processing window. When the data in the window reaches the processing standard, it is processed immediately, and the current status is marked. Specific maintenance suggestions are provided when an abnormal status is detected. The principle of the high-precision online monitoring and maintenance method for mixed gas based on multi-dimensional sensor data provided by this invention is explained below with reference to the accompanying drawings.

[0019] like Figure 2 As shown, the online monitoring and maintenance method provided by this invention includes the following steps: Step S1: Acquire data from each sensor in real time and preprocess it to generate multi-dimensional time series data.

[0020] It continuously receives data from various sensors and control records from controllers such as solenoid valves and MFCs reported by the equipment. Simultaneously, it acquires soft sensor configurations and, based on these configurations, performs a series of logical processes, including combination and calculation, to obtain multi-dimensional time-series data. Specifically, this includes: real-time gas source pressure measurements from the inlet pressure sensor, real-time gas source temperature measurements from the inlet temperature sensor, the current gas source flow rate setpoints for each gas path's MFC, the actual calculated gas source flow rate, the gas supply pressure setpoints, the measured gas supply pressure, and the equipment current measurements.

[0021] Step S2: Real-time monitoring of sensor status, gas source stability, MFC status, gas mixing stability, gas supply stability, and solenoid valve status is performed using each anomaly monitoring module. Specifically, Each anomaly monitoring module writes multi-dimensional time-series data into a data processing window and processes it immediately when the data within its window reaches the processing standard. Specifically, the anomaly monitoring modules include: a sensor data monitoring module for monitoring and processing raw data from various sensors and marking the current status of each sensor; a gas source pressure monitoring module for monitoring and processing gas source pressure measurements; an equipment current monitoring module for monitoring and processing equipment current measurements; a gas source temperature monitoring module for monitoring and processing gas source temperature measurements and recording gas source temperature data; a gas source flow monitoring module for monitoring and processing the setpoint and calculated values ​​of gas source flow, marking the current MFC status, and recording mixing indicators; a gas supply pressure monitoring module for monitoring and processing the setpoint and measured values ​​of gas supply pressure and recording various gas supply pressure indicators; and a solenoid valve status monitoring module for comparing the solenoid valve status with its control records and marking the current status of the solenoid valve.

[0022] Step S3: Perform intelligent analysis based on multi-dimensional time-series data and provide operation and maintenance suggestions. Specifically, Step S3.1: The sensor data monitoring module analyzes the raw sensor data to determine if the sensor status is abnormal. When an abnormality occurs, it provides sensor maintenance suggestions in descending order of priority. If the previous maintenance suggestion cannot eliminate the abnormality, it automatically jumps to the next maintenance suggestion.

[0023] (1) Adjust the sensor configuration, especially the sampling settings.

[0024] (2) Check the sensor installation method and reinstall the sensor in a timely manner.

[0025] (3) Check the sensor’s working environment and take measures such as adding a frequency blocking cover to prevent interference if necessary.

[0026] (4) Replace the sensor.

[0027] Step S3.2: The gas source pressure monitoring module collects real-time gas source pressure measurements and analyzes gas source stability based on these measurements. When gas source stability is abnormal, it further determines whether the problem is related to an intake air path malfunction. If an intake air path malfunction occurs, maintenance recommendations are provided in descending order of priority. If the previous maintenance recommendation cannot resolve the malfunction, the system automatically moves to the next recommended maintenance suggestion.

[0028] (1) Check if the air intake pipe is blocked.

[0029] (2) Check whether the connection between the gas source and the mixing device is reliable, and at the same time observe whether the pipeline is leaking.

[0030] If no abnormality is found in the gas path, further checks are performed to determine if the gas source is abnormal. If an abnormality is found, gas source maintenance recommendations are provided in descending order of priority. If the previous maintenance recommendation cannot eliminate the abnormality, the system automatically moves to the next maintenance recommendation.

[0031] (1) Check whether the gas supply is sufficient and replenish the gas supply in time.

[0032] (2) Increase the valve opening at the gas source.

[0033] Step S3.3: Based on the real-time monitoring of the MFC status by the gas source flow monitoring module, and combined with the gas source temperature monitoring module and the equipment current monitoring module, a comprehensive analysis of the MFC status is performed. When an abnormality occurs in the MFC status, it is further determined whether the abnormality is due to the MFC itself. If an MFC abnormality occurs, MFC maintenance suggestions are given in descending order of priority. If the previous maintenance suggestion cannot eliminate the abnormality, the process automatically jumps to the next maintenance suggestion.

[0034] (1) Adjust the MFC configuration to ensure that the sensitivity, control parameters and other settings are within a reasonable range.

[0035] (2) Check the working environment of MFC and avoid using it in extreme temperature or strong interference scenarios.

[0036] (3) Replace MFC.

[0037] If no abnormality is detected in the MFC itself, then the gas path abnormality is detected as described in step S3.2. If a gas path abnormality is found, then the intake gas path maintenance suggestions are given as described in step S3.2; if no gas path abnormality is found, then the gas source maintenance suggestions are given.

[0038] Step S3.4: Analyze the gas mixing indicators and stability based on the gas source flow monitoring module. When gas mixing stability is abnormal, determine whether a gas mixing path abnormality has occurred. If a gas mixing path abnormality occurs, provide gas mixing path maintenance suggestions in descending order of priority. If the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion.

[0039] (1) Check if there are any foreign objects in the gas path from MFC to buffer tank.

[0040] (2) Check whether the connections at the MFC outlet and buffer tank are reliable, and observe whether the pipeline is leaking.

[0041] (3) Reduce the air intake or replace with a larger container.

[0042] (4) Check whether the connection at the inlet and outlet is reliable and check whether the tank is damaged.

[0043] If no abnormality occurs in the gas mixing path, repeat the step S3.3 to determine whether the abnormality is due to the MFC itself.

[0044] Step S3.5: Analyze whether the solenoid valve status is abnormal based on the solenoid valve status monitoring module. When an abnormality occurs, solenoid valve maintenance suggestions are given in descending order of priority. If the previous maintenance suggestion cannot eliminate the abnormality, it will automatically jump to the next maintenance suggestion.

[0045] (1) Check the installation method of the solenoid valve and observe whether the valve leaks air.

[0046] (2) Replace the solenoid valve.

[0047] Step S3.6: Analyze gas supply stability based on the gas supply pressure monitoring module. When gas supply stability is abnormal, further determine whether an abnormality has occurred in the gas consumption path. If an abnormality occurs in the gas consumption path, provide maintenance suggestions for the gas consumption path in descending order of priority. If the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion.

[0048] (1) Check if the air outlet pipe is blocked.

[0049] (2) Check whether the connection between the gas mixing device and the gas-using equipment is reliable, and at the same time observe whether the pipeline is leaking.

[0050] (3) Reduce the gas consumption of gas-using equipment.

[0051] When no abnormality occurs in the gas supply line, repeat the steps of analyzing gas mixing stability in step S3.4 and analyzing solenoid valve status in step S3.5, and provide corresponding operation and maintenance suggestions.

[0052] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A high-precision online monitoring and maintenance system for mixed gas based on multi-dimensional sensor data, characterized in that, It is located between the intake air path and the consumption air path; the intake air path includes several air inlets, each air inlet supplies different types of protective gas; different air inlets are fed into the buffer gas tank through input pipes; the buffer gas tank is connected to the consumption air path and supplies gas to external welding equipment through the output pipe; it includes a solenoid valve, an inlet pressure sensor, an inlet temperature sensor, an electromagnetic proportional valve (MFC), an outlet pressure sensor, and an outlet current sensor.

2. The high-precision online monitoring and maintenance system for mixed gas based on multi-dimensional sensor data according to claim 1, characterized in that, Each air inlet is equipped with a solenoid valve for controlling the opening and closing of the air path; the solenoid valve, inlet pressure sensor, inlet temperature sensor, and electromagnetic proportional valve (MFC) are connected in series between each air inlet and the input pipeline; the inlet pressure sensor is used to measure the inlet pressure, the inlet temperature sensor is used to measure the inlet air temperature, and the electromagnetic proportional valve (MFC) is used to control the flow rate of the protective gas in this path; the output pipeline is connected in series with an outlet pressure sensor and an outlet current sensor to measure the outlet pressure and outlet current, respectively.

3. An online monitoring and maintenance method for a high-precision online monitoring and maintenance system for mixed gas based on multi-dimensional sensor data as described in any one of claims 1-2, characterized in that, Includes the following steps: Step S1: Acquire data from each sensor in real time and preprocess it to generate multi-dimensional time series data; Step S2: Real-time monitoring of sensor status, gas source stability, MFC status, gas mixing stability, gas supply stability, and solenoid valve status is performed through each anomaly monitoring module. Step S3: Perform intelligent analysis based on multi-dimensional time series data and provide operation and maintenance suggestions.

4. The high-precision online monitoring and maintenance method for mixed gas based on multi-dimensional sensor data according to claim 3, characterized in that, The specific steps for generating multidimensional time series data in step S1 include: It receives data from various sensors and control records from controllers such as solenoid valves and MFCs, and simultaneously acquires soft sensor configurations and collects multi-dimensional time-series data in real time. The multi-dimensional time-series data includes the real-time gas source pressure measurement value collected by the pressure sensor at the inlet, the real-time gas source temperature measurement value collected by the temperature sensor at the inlet, the current gas source flow rate setting value of each gas path MFC, the actual calculated gas source flow rate value, the gas supply pressure setting value, the gas supply pressure measurement value, and the equipment current measurement value.

5. The high-precision online monitoring and maintenance method for mixed gas based on multi-dimensional sensor data according to claim 3, characterized in that, The anomaly monitoring module described in step S2 writes multi-dimensional time-series data into the data processing window and processes it immediately when the data in the window reaches the processing standard. Specifically, the anomaly monitoring module includes a sensor data monitoring module, which monitors and processes the raw data of each sensor and marks the current status of each sensor; a gas source pressure monitoring module, which monitors and processes the gas source pressure measurement value; and an equipment current monitoring module, which monitors and processes the equipment current measurement value. The gas source temperature monitoring module is used to monitor and process the gas source temperature measurement values ​​and record the gas source temperature data. The gas source flow monitoring module is used to monitor and process the set value and calculated value of the gas source flow, mark the current status of MFC, and record the gas mixing index; the gas supply pressure monitoring module is used to monitor and process the set value and measured value of the gas supply pressure, and record various gas supply pressure indicators; the solenoid valve status monitoring module compares the solenoid valve status with its control record and marks the current status of the solenoid valve.

6. The high-precision online monitoring and maintenance method for mixed gas based on multi-dimensional sensor data according to claim 3, characterized in that, The intelligent analysis steps specifically include: Step S3.1: The sensor data monitoring module analyzes the sensor status based on the raw sensor data to determine if there is any abnormality. When an abnormality occurs, it provides sensor maintenance suggestions in descending order of priority. If the previous maintenance suggestion cannot eliminate the abnormality, it automatically jumps to the next maintenance suggestion. (1) Adjust the sensor configuration, especially the sampling settings; (2) Check the sensor installation method and reinstall the sensor in a timely manner; (3) Check the sensor's working environment and take measures such as adding a frequency blocking cover to prevent interference if necessary; (4) Replace the sensor; Step S3.2: The gas source pressure monitoring module collects the gas source pressure measurement value in real time and analyzes the gas source stability based on the gas source pressure measurement value; when the gas source stability is abnormal, it further determines whether it is an abnormality of the intake air path; when the intake air path is abnormal, it provides intake air path maintenance suggestions in order of priority from high to low; when the previous maintenance suggestion cannot eliminate the abnormality, it automatically jumps to the next maintenance suggestion. (1) Check if the air intake pipe is blocked; (2) Check whether the connection between the gas source and the mixing device is reliable, and at the same time observe whether the pipeline is leaking; If no abnormality occurs in the gas path, further check whether the gas source is abnormal; if an abnormality occurs, provide gas source maintenance suggestions in descending order of priority; if the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion. (1) Check if the gas supply is sufficient and replenish the gas supply in a timely manner; (2) Increase the valve opening at the gas source; Step S3.3: Based on the real-time monitoring of the MFC status by the gas source flow monitoring module, and combined with the gas source temperature monitoring module and the equipment current monitoring module, the MFC status is comprehensively analyzed. When the MFC status is abnormal, it is further determined whether the abnormality is due to the MFC itself. If the MFC is abnormal, MFC operation and maintenance suggestions are given in descending order of priority. If the previous operation and maintenance suggestion cannot eliminate the abnormality, it will automatically jump to the next operation and maintenance suggestion. (1) Adjust the MFC configuration to ensure that the sensitivity, control parameters and other settings are within a reasonable range; (2) Check the MFC working environment and avoid using it in extreme temperature or strong interference scenarios; (3) Replace with MFC; If no abnormality is found in the MFC itself, then check whether there is an air path abnormality as described in step S3.2; if there is an air path abnormality, then give the intake air path maintenance suggestion as described in step S3.2; if there is no air path abnormality, then give the air source maintenance suggestion. Step S3.4: Analyze the gas mixing index and gas mixing stability based on the gas source flow monitoring module; when the gas mixing stability is abnormal, determine whether the gas mixing path is abnormal; when the gas mixing path is abnormal, give gas mixing path maintenance suggestions in order of priority from high to low; when the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion. (1) Check for foreign objects in the gas path from MFC to the buffer tank; (2) Check whether the connections at the MFC outlet and buffer tank are reliable, and observe whether the pipeline is leaking. (3) Reduce the air intake or replace with a larger container; (4) Check whether the inlet and outlet connections are reliable and check whether the tank is damaged; If no abnormality occurs in the gas mixing path, repeat the step S3.3 to determine whether the abnormality is due to the MFC itself. Step S3.5: Analyze whether the solenoid valve status is abnormal based on the solenoid valve status monitoring module; when an abnormality occurs, provide solenoid valve maintenance suggestions in descending order of priority; if the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion. (1) Check the installation method of the solenoid valve and observe whether the valve leaks air; (2) Replace the solenoid valve; Step S3.6: Analyze the gas supply stability based on the gas supply pressure monitoring module; when the gas supply stability is abnormal, further determine whether there is an abnormality in the gas consumption path; when an abnormality in the gas consumption path occurs, provide gas consumption path maintenance suggestions in order of priority from high to low; if the previous maintenance suggestion cannot eliminate the abnormality, automatically jump to the next maintenance suggestion. (1) Check if the air outlet pipe is blocked; (2) Check whether the connection between the gas mixing device and the gas-using equipment is reliable, and at the same time observe whether the pipeline is leaking; (3) Reduce the gas consumption of gas-using equipment; When no abnormality occurs in the gas supply line, repeat the steps of analyzing gas mixing stability in step S3.4 and analyzing solenoid valve status in step S3.5, and provide corresponding operation and maintenance suggestions.

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