Characteristic impedance determination method and characteristic impedance determination device

Abstract

The invention provides a characteristic impedance determination method and a characteristic impedance determination device, the characteristic impedance determination method is used for determining a characteristic impedance value of a to-be-measured radio frequency source by using the characteristic impedance determination device, and the characteristic impedance determination device comprises an analog radio frequency source, the characteristic impedance determination method comprises the following steps: controlling a to-be-measured radio frequency source to output radio frequency electric energy with a target power value to a target load; impedance matching is performed on the to-be-tested radio frequency source and the target load; controlling the analog radio frequency source to output radio frequency electric energy with a target power value to a target load; acquiring a reflection coefficient of the analog radio frequency source to obtain a first reflection coefficient; determining a first impedance value and a second impedance value of the to-be-measured radio frequency source according to the characteristic impedance value of the analog radio frequency source and the first reflection coefficient; and at least according to the first impedance value and the second impedance value, determining a characteristic impedance value of the to-be-measured radio frequency source when outputting the radio frequency electric energy at the target power value. According to the invention, the characteristic impedance value of the radio frequency source when radio frequency electric energy is output at different powers can be rapidly determined.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of power supply testing, in particular to a characteristic impedance determination method and a characteristic impedance determination device. BACKGROUND

[0002] At present, with the popularity and development of various power supplies, the testing of power supplies is particularly important, especially for radio frequency sources. The characteristic impedance value of a radio frequency source may change when the radio frequency source outputs radio frequency electric energy at different power levels, which poses a challenge to the impedance matching of the radio frequency source. Therefore, how to quickly determine the characteristic impedance value of the radio frequency source when the radio frequency source outputs radio frequency electric energy at different power levels to meet the requirements of subsequent impedance matching has become a problem to be considered. SUMMARY

[0003] The present application provides a characteristic impedance determination method and a characteristic impedance determination device, which can quickly determine the characteristic impedance value of a radio frequency source when the radio frequency source outputs radio frequency electric energy at different power levels.

[0004] In a first aspect, a characteristic impedance determination method is provided, which is used to determine the characteristic impedance value of a to-be-tested radio frequency source by using a characteristic impedance determination device. The characteristic impedance determination device includes an analog radio frequency source. The characteristic impedance determination method includes the following steps: controlling the to-be-tested radio frequency source to output radio frequency electric energy with a target power value to a target load; performing impedance matching on the to-be-tested radio frequency source and the target load; controlling the analog radio frequency source to output radio frequency electric energy with the target power value to the target load; obtaining the reflection coefficient of the analog radio frequency source to obtain a first reflection coefficient; determining the first impedance value and the second impedance value of the to-be-tested radio frequency source according to the characteristic impedance value of the analog radio frequency source and the first reflection coefficient; determining the characteristic impedance value of the to-be-tested radio frequency source when the to-be-tested radio frequency source outputs radio frequency electric energy at the target power value according to at least the first impedance value and the second impedance value.

[0005] In a possible implementation, the determination of the characteristic impedance value of the to-be-tested radio frequency source when the to-be-tested radio frequency source outputs radio frequency electric energy at the preset power value according to at least the first impedance value and the second impedance value includes the following steps: controlling the characteristic impedance value of the to-be-tested radio frequency source to be adjusted to a third impedance value, wherein the third impedance value is any value between the first impedance value and the second impedance value, including the first impedance value and the second impedance value; controlling the to-be-tested radio frequency source with the adjusted characteristic impedance value to output radio frequency electric energy with the target power value to the target load; obtaining the reflection coefficient of the to-be-tested radio frequency source to obtain a second reflection coefficient; The characteristic impedance value of the RF source under test when it outputs RF power at the target power value is determined based at least on the relationship between the second reflection coefficient and the reflection coefficient threshold.

[0006] In one possible implementation, the third impedance value is equal to the first impedance value or the second impedance value; Wherein, determining the characteristic impedance value of the RF source under test when outputting RF power at a target power value based at least on the relationship between the second reflection coefficient and the reflection coefficient threshold includes: When the second reflection coefficient is less than the reflection coefficient threshold, the characteristic impedance value of the RF source under test is determined to be one of the first impedance value and the second impedance value that is equal to the third impedance value when the RF source under test outputs RF power at the target power value. When the second reflection coefficient is greater than or equal to the reflection coefficient threshold, the characteristic impedance value of the RF source under test is determined to be one of the first impedance value and the second impedance value that is not equal to the third impedance value when it outputs RF power at the target power value.

[0007] In one possible implementation, the third impedance value is the average impedance value of the first impedance value and the second impedance value; The method for determining characteristic impedance further includes, after obtaining the reflection coefficient of the radio frequency source under test to obtain the second reflection coefficient: The control adjusts the characteristic impedance value of the radio frequency source under test from a third impedance value to a fourth impedance value in a first direction, wherein the fourth impedance value is any value between the first impedance value and the second impedance value, including the first impedance value and the second impedance value. After readjusting the characteristic impedance value, the radio frequency source under test outputs radio frequency power with the target power value to the target load. Obtain the reflection coefficient of the radio frequency source under test to obtain the third reflection coefficient.

[0008] In one possible implementation, determining the characteristic impedance value of the RF source under test when outputting RF power at a target power value, based at least on the relationship between the second reflection coefficient and the reflection coefficient threshold, includes: Based on the relationship between the second and third reflection coefficients, the characteristic impedance value of the RF source under test when it outputs RF power at the target power value is determined.

[0009] In one possible implementation, the first direction is the same as the direction in which the characteristic impedance value of the radio frequency source under test is adjusted from the first impedance value to the second impedance value; The step of determining the characteristic impedance value of the RF source under test when it outputs RF power at a target power value based on the relationship between the second reflection coefficient and the third reflection coefficient includes: When the second reflection coefficient is greater than the third reflection coefficient, the second impedance value is determined to be the characteristic impedance value of the RF source under test when it outputs RF power at the target power value. When the second reflection coefficient is less than the third reflection coefficient, the first impedance value is determined to be the characteristic impedance value of the RF source under test when it outputs RF power at the target power value.

[0010] In one possible implementation, the third impedance value is the average impedance value of the product of the first impedance value and the first weight value and the product of the second impedance value and the second weight value, wherein the first weight value and the second weight value are related to the degree of deviation of the first impedance value and the second impedance value from the preset impedance curve of the RF source under test, and / or are related to the reactance properties of the first impedance value and the second impedance value.

[0011] In one possible implementation, the first weight value includes a first sub-weight value and a second sub-weight value, the second weight value includes a third sub-weight value and a fourth sub-weight value, wherein the first sub-weight value and the third sub-weight value are related to the degree of deviation of the first impedance value and the second impedance value from the preset impedance curve, and the second sub-weight value and the fourth sub-weight value are related to the reactance properties of the first impedance value and the second impedance value.

[0012] In one possible implementation, the preset impedance curve is obtained based on the correspondence between multiple characteristic impedance values ​​of the radio frequency source under test when it outputs radio frequency power at multiple different power values. The method for determining characteristic impedance further includes: The first deviation value is determined based on the degree of deviation of the first impedance value from the preset impedance curve, and the second deviation value is determined based on the degree of deviation of the second impedance value from the preset impedance curve. The ratio of the first sub-weight value to the third sub-weight value is determined based on the ratio of the second deviation value to the first deviation value.

[0013] Secondly, a characteristic impedance determination device is also provided, the characteristic impedance determination device being used to determine the characteristic impedance value of a radio frequency source under test, the characteristic impedance determination device comprising: Analog radio frequency source; The control unit is used to control the radio frequency source under test to output radio frequency power with a target power value to the target load, and to perform impedance matching between the radio frequency source under test and the target load, and to control the analog radio frequency source to output radio frequency power with a target power value to the target load. An acquisition unit is used to acquire the reflection coefficient of the analog radio frequency source to obtain a first reflection coefficient; The control unit is further configured to determine the first impedance value and the second impedance value of the RF source under test based on the characteristic impedance value of the simulated RF source and the first reflection coefficient, and to determine the characteristic impedance value of the RF source under test when outputting RF power at the target power value based at least on the first impedance value and the second impedance value.

[0014] The characteristic impedance determination method and apparatus of this application, by performing impedance matching between an unknown RF source under test and a target load, and configuring a known simulated RF source to output RF power to the target load at the same target power value, can determine the characteristic impedance value of the RF source under test based on the reflection coefficient of the simulated RF source. The first reflection coefficient of the RF source under test and the characteristic impedance value of the simulated RF source can be used to determine the first impedance value and the second impedance value of the RF source. Therefore, based at least on the first impedance value and the second impedance value, the characteristic impedance value of the RF source under test when outputting RF power at the target power value can be quickly determined. Thus, the characteristic impedance value of the RF source when outputting RF power at other power levels can also be quickly determined based on the corresponding relevant parameters. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0016] Figure 1 This is a flowchart of a characteristic impedance determination method according to an embodiment of this application.

[0017] Figure 2 for Figure 1 The sub-flowchart of step S400 is shown.

[0018] Figure 3 for Figure 2 The sub-flowchart of step S440 is shown.

[0019] Figure 4 This is another flowchart of the characteristic impedance determination method in one embodiment of this application.

[0020] Figure 5 for Figure 4 The sub-flowchart of step S443 is shown.

[0021] Figure 6 This is another flowchart of the characteristic impedance determination method in one embodiment of this application.

[0022] Figure 7 This is a schematic diagram of a characteristic impedance determination device in one embodiment of this application.

[0023] Explanation of reference numerals in the attached figures: 1, characteristic impedance determination device; RP, analog RF source; 10, control unit; 20, acquisition unit; RF, RF source under test; RL, target load. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0025] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0026] In the description of the embodiments of this application, it should be noted that the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more.

[0027] In the description of the embodiments of this application, it should be noted that the terms "first," "second," "third," "fourth," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0028] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0029] Please see Figure 1 , Figure 1This is a flowchart of a characteristic impedance determination method according to an embodiment of this application. Figure 1 As shown, this application provides a method for determining characteristic impedance. The method uses a characteristic impedance determination device to determine the characteristic impedance value of a radio frequency (RF) source under test. The characteristic impedance determination device includes a simulated RF source. The characteristic impedance determination method includes: Step S100: Control the RF source under test to output RF power with the target power value to the target load; Step S110: Perform impedance matching between the RF source under test and the target load; Step S120: Control the analog RF source to output RF power with the target power value to the target load; Step S200: Obtain the reflection coefficient of the analog radio frequency source to obtain the first reflection coefficient; Step S300: Determine the first impedance value and the second impedance value of the RF source under test based on the characteristic impedance value of the simulated RF source and the first reflection coefficient. Step S400: Determine the characteristic impedance value of the RF source under test when it outputs RF power at the target power value, based at least on the first impedance value and the second impedance value.

[0030] Therefore, the characteristic impedance determination method of this application, by performing impedance matching between the unknown RF source under test and the target load, and configuring a known analog RF source to output RF power to the target load at the same target power value, can determine the characteristic impedance value of the RF source under test based on the reflection coefficient of the analog RF source. The first reflection coefficient of the RF source under test and the characteristic impedance value of the analog RF source can be used to determine the first impedance value and the second impedance value of the RF source. Thus, based at least on the first impedance value and the second impedance value, the characteristic impedance value of the RF source under test when outputting RF power at the target power value can be quickly determined. Therefore, the characteristic impedance value of the RF source when outputting RF power at other power levels can also be quickly determined based on the corresponding relevant parameters.

[0031] Specifically, by cleverly converting the characteristic impedance value of the RF source under test into a value corresponding to the impedance value of the target load, the characteristic impedance value of the RF source under test can be quickly determined by the impedance value of the target load, thus avoiding the reflection coefficient error caused by directly measuring the RF source under test with a non-target characteristic impedance value.

[0032] Please refer to the following: Figure 2 , Figure 2 for Figure 1 The sub-flowchart of step S400 is shown below. Figure 1 , Figure 2 As shown, step S400: Determine the characteristic impedance value of the RF source under test when it outputs at a preset power value, based at least on the first impedance value and the second impedance value, including: Step S410: Control and adjust the characteristic impedance value of the RF source under test to the third impedance value, wherein the third impedance value is any value between the first impedance value and the second impedance value, including the first impedance value and the second impedance value. Step S420: The RF source under test, after adjusting its characteristic impedance value, outputs RF power with the target power value to the target load; Step S430: Obtain the reflection coefficient of the RF source under test to obtain the second reflection coefficient; Step S440: Determine the characteristic impedance value of the RF source under test when it outputs RF power at the target power value, based at least on the relationship between the second reflection coefficient and the reflection coefficient threshold.

[0033] Therefore, in the above-described characteristic impedance determination method of this application, the first impedance value and the second impedance value are two solutions to the characteristic impedance value of the RF source under test. One of the first impedance value and the second impedance value is a definite solution, corresponding to the characteristic impedance value of the RF source under test, and the other impedance value is an interference solution. Thus, by controlling and adjusting the characteristic impedance value of the RF source under test to the third impedance value, at least based on the relationship between the second reflection coefficient corresponding to the third impedance value and the reflection coefficient threshold, a definite solution can be found, that is, the characteristic impedance value of the RF source under test when outputting RF power at the target power value can be determined.

[0034] Please refer to the following: Figure 3 , Figure 3 for Figure 2 The sub-flowchart of step S440 is shown. The third impedance value is equal to the first impedance value or the second impedance value. Wherein, as... Figure 2 , Figure 3 As shown, step S440: Determine the characteristic impedance value of the RF source under test when it outputs RF power at the target power value, at least based on the relationship between the second reflection coefficient and the reflection coefficient threshold, including: Step S441: When the second reflection coefficient is less than the reflection coefficient threshold, determine the characteristic impedance value of the RF source under test when it outputs RF power at the target power value, and determine one of the first impedance value and the second impedance value that is equal to the third impedance value. Step S442: When the second reflection coefficient is greater than or equal to the reflection coefficient threshold, determine one of the first impedance values ​​and the second impedance values ​​that is not equal to the third impedance value as the characteristic impedance value of the RF source under test when it outputs RF power at the target power value.

[0035] Therefore, in the characteristic impedance determination method of this application, the second reflection coefficient corresponding to the characteristic impedance value of the RF source under test when it outputs RF power at the target power value is very small. Thus, by the relationship between the second reflection coefficient and the reflection coefficient threshold, the first impedance value and the definite solution and interference solution in the second impedance value can be determined.

[0036] Please refer to the following: Figure 4 , Figure 4 This is another flowchart of a characteristic impedance determination method according to an embodiment of this application. The third impedance value is the average impedance value of the first impedance value and the second impedance value. Wherein, as... Figure 2 , Figure 4 As shown, after obtaining the reflection coefficient of the RF source under test in step S430 to obtain the second reflection coefficient, the characteristic impedance determination method further includes: Step S431: Control the characteristic impedance value of the RF source under test to be adjusted from the third impedance value to the fourth impedance value in the first direction, wherein the fourth impedance value is any value between the first impedance value and the second impedance value, including the first impedance value and the second impedance value. Step S432: The RF source under test, after its characteristic impedance value has been readjusted, outputs RF power with the target power value to the target load; Step S433: Obtain the reflection coefficient of the radio frequency source under test to obtain the third reflection coefficient.

[0037] Among them, the difference between the fourth impedance value and the third impedance value is less than the preset impedance difference value.

[0038] Therefore, the characteristic impedance determination method of this application avoids adjusting the characteristic impedance value of the RF source under test to the level of interference, which would cause large reflected power to destroy the target load. By configuring the third impedance value as the average impedance value of the first impedance value and the second impedance value, and then obtaining the reflection coefficient of the RF source under test again after fine-tuning, it is possible to avoid generating large reflected power.

[0039] like Figure 2 , Figure 4 As shown, step S440: Determine the characteristic impedance value of the RF source under test when it outputs RF power at the target power value, at least based on the relationship between the second reflection coefficient and the reflection coefficient threshold, including: Step S443: Determine the characteristic impedance value of the RF source under test when it outputs RF power at the target power value based on the relationship between the second reflection coefficient and the third reflection coefficient.

[0040] Therefore, the characteristic impedance determination method of this application can quickly determine the characteristic impedance value of the RF source under test when it outputs RF power at the target power value by judging whether the reflection coefficient of the RF source under test increases.

[0041] Please refer to the following: Figure 5 , Figure 5 for Figure 4 The sub-flowchart for step S443 is shown. The first direction is the same as the direction in which the characteristic impedance value of the RF source under test is adjusted from the first impedance value to the second impedance value. Wherein, as... Figure 4 ,Figure 5 As shown, step S443: Based on the relationship between the second reflection coefficient and the third reflection coefficient, determine the characteristic impedance value of the RF source under test when outputting RF power at the target power value, including: Step S444: When the second reflection coefficient is greater than the third reflection coefficient, determine the second impedance value as the characteristic impedance value of the RF source under test when it outputs RF power at the target power value. Step S445: When the second reflection coefficient is less than the third reflection coefficient, determine the first impedance value as the characteristic impedance value of the RF source under test when it outputs RF power at the target power value.

[0042] Therefore, the characteristic impedance determination method of this application can determine whether the first direction is the direction pointing to the correct solution based on the relationship between the second reflection coefficient and the third reflection coefficient.

[0043] In some embodiments, the third impedance value is the average impedance value of the product of the first impedance value and the first weight value and the product of the second impedance value and the second weight value, wherein the first weight value and the second weight value are related to the degree of deviation of the first impedance value and the second impedance value from the preset impedance curve of the RF source under test, and / or are related to the reactance properties of the first impedance value and the second impedance value.

[0044] Therefore, the characteristic impedance determination method of this application introduces a weight value to further reduce the reflected power generated during the determination of the characteristic impedance value of the RF source under test, so that the third impedance value is a weighted average of the first impedance value and the second impedance value.

[0045] In some embodiments, the first weight value includes a first sub-weight value and a second sub-weight value, and the second weight value includes a third sub-weight value and a fourth sub-weight value. The first sub-weight value and the third sub-weight value are related to the degree of deviation of the first impedance value and the second impedance value from the preset impedance curve, and the second sub-weight value and the fourth sub-weight value are related to the reactance properties of the first impedance value and the second impedance value.

[0046] Furthermore, the first weight value is the sum of the first sub-weight value and the second sub-weight value, the second weight value is the sum of the third sub-weight value and the fourth sub-weight value, and the sum of the first weight value and the second weight value is 100%.

[0047] Therefore, the characteristic impedance determination method described above in this application introduces a dual-parameter weighting method, which further reduces the reflected power generated during the determination of the characteristic impedance value of the RF source under test.

[0048] Please see Figure 6 , Figure 6This is another flowchart of the characteristic impedance determination method in one embodiment of this application. The preset impedance curve is obtained based on the correspondence between multiple characteristic impedance values ​​of the RF source under test when it outputs RF power at multiple different power values. For example, Figure 6 As shown, the method for determining characteristic impedance also includes: Step S90: Determine the first deviation value based on the degree of deviation of the first impedance value from the preset impedance curve, and determine the second deviation value based on the degree of deviation of the second impedance value from the preset impedance curve. Step S91: Determine the ratio of the first sub-weight value to the third sub-weight value based on the ratio of the second deviation value to the first deviation value.

[0049] Furthermore, the sum of the first sub-weight value and the third sub-weight value is greater than 0% and less than 100%.

[0050] Therefore, the characteristic impedance determination method described above in this application can determine the ratio of the first sub-weight value to the third sub-weight value by the ratio of the second deviation value to the first deviation value, and can then be used to determine the third impedance value.

[0051] Among them, the least squares algorithm can be used to fit multiple characteristic impedance values ​​of the RF source under test when it outputs RF power at multiple different power values, so as to obtain the preset impedance curve.

[0052] The degree of deviation of the first impedance value from the preset impedance curve is the distance between the first impedance value and the preset impedance curve, which is the first deviation value. The degree of deviation of the second impedance value from the preset impedance curve is the distance between the second impedance value and the preset impedance curve, which is the second deviation value.

[0053] In some embodiments, the characteristic impedance determination method further includes: when the reactance attribute of the first impedance value is inductive and the reactance attribute of the second impedance value is capacitive, the second sub-weight value is less than the fourth sub-weight value; when the reactance attribute of the first impedance value is capacitive and the reactance attribute of the second impedance value is inductive, the second sub-weight value is greater than the fourth sub-weight value; when the reactance attributes of both the first impedance value and the second impedance value are capacitive or both are inductive, the second sub-weight value is equal to the fourth sub-weight value.

[0054] Therefore, the characteristic impedance determination method described above in this application can provide a higher weighting value for capacitive impedance values, based on the fact that the RF source under test is generally capacitive in the power range of RF power.

[0055] Furthermore, the second sub-weight value and the fourth sub-weight value are any one of the first preset weight value, the second preset weight value and the third preset weight value, the sum of the first preset weight value and the second preset weight value is greater than 0% and less than 100%, and the third preset weight value is 0%.

[0056] In some embodiments, obtaining the reflection coefficient of an analog radio frequency source to obtain a first reflection coefficient includes: obtaining the forward power value and the reflected power value of the analog radio frequency source; and determining the reflection coefficient of the analog radio frequency source based on the forward power value and the reflected power value to obtain the first reflection coefficient.

[0057] The first reflection coefficient is the ratio of the reflected power value to the forward power value. The aforementioned second and third reflection coefficients can be obtained according to the steps described above.

[0058] In some embodiments, impedance matching between the RF source under test and the target load includes: controlling and adjusting the impedance value of the target load to perform impedance matching between the RF source under test and the target load. The target load may include a load and an impedance matching network.

[0059] In some embodiments, before controlling the RF source under test to output RF power with a target power value to the target load, the characteristic impedance determination method includes: controlling the disconnection of the power transmission path between the analog RF source and the target load, and connecting the power transmission path between the RF source under test and the target load.

[0060] In some embodiments, before controlling the analog RF source to output RF power with a target power value to the target load, the characteristic impedance determination method includes: controlling the disconnection of the power transmission path between the RF source under test and the target load, and connecting the power transmission path between the analog RF source and the target load.

[0061] In some embodiments, the first reflection coefficient is the ratio of the difference between the impedance value of the target load and the characteristic impedance value of the simulated RF source to the sum of the impedance value of the target load and the characteristic impedance value of the simulated RF source, and the characteristic impedance value of the RF source under test is conjugate to the characteristic impedance value of the target load.

[0062] Furthermore, based on the characteristic impedance value of the simulated RF source and the first reflection coefficient, the first impedance value and the second impedance value of the RF source under test are determined, including: determining the two impedance values ​​of the target load based on the characteristic impedance value of the simulated RF source and the first reflection coefficient; and determining the first impedance value and the second impedance value of the RF source under test based on the two impedance values ​​of the target load.

[0063] Specifically, the characteristic impedance value of the RF source under test is also the overall impedance value of the RF source under test. Controlling and adjusting the characteristic impedance value of the RF source under test is also controlling and adjusting the overall impedance value of the RF source under test.

[0064] The characteristic impedance of the analog RF source can be 50Ω. Specifically, the characteristic impedance of the analog RF source is also the overall impedance of the analog RF source.

[0065] The impedance of the target load can be 50Ω.

[0066] The characteristic impedance determination method of this application, through the above steps, can quickly determine the characteristic impedance value of an RF source when outputting RF power at different power levels, even with a relatively small reflection coefficient.

[0067] Please see Figure 7 , Figure 7 This is a schematic diagram of a characteristic impedance determination device according to an embodiment of this application. Figure 7 As shown, this application also provides a characteristic impedance determination device 1, which is used to determine the characteristic impedance value of a radio frequency source RF under test. The characteristic impedance determination device 1 includes: Analog radio frequency source RP; The control unit 10 is used to control the radio frequency source under test RF to output radio frequency power with a target power value to the target load RL, and to perform impedance matching between the radio frequency source under test RF and the target load RL, and to control the analog radio frequency source RP to output radio frequency power with a target power value to the target load RL. The acquisition unit 20 is used to acquire the reflection coefficient of the analog radio frequency source RP to obtain the first reflection coefficient; The control unit 10 is also used to determine the first impedance value and the second impedance value of the radio frequency source RF under test based on the characteristic impedance value of the analog radio frequency source RP and the first reflection coefficient, and to determine the characteristic impedance value of the radio frequency source RF under test when it outputs radio frequency power at the target power value based at least on the first impedance value and the second impedance value.

[0068] The operations performed by the characteristic impedance determination device 1 or the control unit 10 correspond to the steps in the characteristic impedance determination method of any of the foregoing embodiments. Further operations that the characteristic impedance determination device 1 or the control unit 10 can perform are detailed in the relevant content of the characteristic impedance determination method of any of the foregoing embodiments, and will not be repeated here.

[0069] The acquisition unit 20 is mainly used to perform the relevant steps of acquiring the reflection coefficient of the radio frequency source RF under test. The acquisition unit 20 may include a power sensor, an arithmetic unit, etc.

[0070] The control unit 10 is mainly used to execute other specific steps of the above preparation method. The control unit 10 may include a processor, a regulator, etc. The processor may be a general-purpose processor such as a central processing unit (CPU), or a logic control device such as a digital signal processor (DSP), application specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, etc., or a microprocessor such as a micro control unit (MCU).

[0071] The characteristic impedance determination method and characteristic impedance determination device 1 of this application, through the above steps and structure, can quickly determine the characteristic impedance value of the RF source when outputting RF power at different power levels while generating a small reflection coefficient.

[0072] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for determining characteristic impedance, characterized in that, This is used to determine the characteristic impedance value of a radio frequency source under test using a characteristic impedance determination device, wherein the characteristic impedance determination device includes an analog radio frequency source. The method for determining characteristic impedance includes: Control the radio frequency source under test to output radio frequency power with a target power value to the target load; Impedance matching is performed between the RF source under test and the target load. Control the analog radio frequency source to output radio frequency power with the target power value to the target load; Obtain the reflection coefficient of the simulated radio frequency source to obtain the first reflection coefficient; Based on the characteristic impedance value of the simulated RF source and the first reflection coefficient, determine the first impedance value and the second impedance value of the RF source under test. The characteristic impedance value of the RF source under test when it outputs RF power at the target power value is determined based at least on the first impedance value and the second impedance value.

2. The method for determining characteristic impedance according to claim 1, characterized in that, Determining the characteristic impedance value of the RF source under test when outputting at a preset power value, based at least on the first impedance value and the second impedance value, includes: The characteristic impedance of the radio frequency source under test is controlled and adjusted to a third impedance value, wherein the third impedance value is any value between the first impedance value and the second impedance value, including the first impedance value and the second impedance value. The radio frequency source under test, after adjusting its characteristic impedance, outputs radio frequency power with a target power value to the target load. Obtain the reflection coefficient of the radio frequency source under test to obtain the second reflection coefficient; The characteristic impedance value of the RF source under test when it outputs RF power at the target power value is determined based at least on the relationship between the second reflection coefficient and the reflection coefficient threshold.

3. The method for determining characteristic impedance according to claim 2, characterized in that, The third impedance value is equal to the first impedance value or the second impedance value; Wherein, determining the characteristic impedance value of the RF source under test when outputting RF power at a target power value based at least on the relationship between the second reflection coefficient and the reflection coefficient threshold includes: When the second reflection coefficient is less than the reflection coefficient threshold, the characteristic impedance value of the RF source under test is determined to be one of the first impedance value and the second impedance value that is equal to the third impedance value when the RF source under test outputs RF power at the target power value. When the second reflection coefficient is greater than or equal to the reflection coefficient threshold, the characteristic impedance value of the RF source under test is determined to be one of the first impedance value and the second impedance value that is not equal to the third impedance value when it outputs RF power at the target power value.

4. The method for determining characteristic impedance according to claim 2, characterized in that, The third impedance value is the average impedance value of the first impedance value and the second impedance value; The method for determining characteristic impedance further includes, after obtaining the reflection coefficient of the radio frequency source under test to obtain the second reflection coefficient: The control adjusts the characteristic impedance value of the radio frequency source under test from a third impedance value to a fourth impedance value in a first direction, wherein the fourth impedance value is any value between the first impedance value and the second impedance value, including the first impedance value and the second impedance value. After readjusting the characteristic impedance value, the radio frequency source under test outputs radio frequency power with the target power value to the target load. Obtain the reflection coefficient of the radio frequency source under test to obtain the third reflection coefficient.

5. The method for determining characteristic impedance according to claim 4, characterized in that, The determination of the characteristic impedance value of the RF source under test when outputting RF power at a target power value, based at least on the relationship between the second reflection coefficient and the reflection coefficient threshold, includes: Based on the relationship between the second and third reflection coefficients, the characteristic impedance value of the RF source under test when it outputs RF power at the target power value is determined.

6. The method for determining characteristic impedance according to claim 5, characterized in that, The first direction is the same as the direction in which the characteristic impedance value of the radio frequency source under test is adjusted from the first impedance value to the second impedance value; The step of determining the characteristic impedance value of the RF source under test when it outputs RF power at a target power value based on the relationship between the second reflection coefficient and the third reflection coefficient includes: When the second reflection coefficient is greater than the third reflection coefficient, the second impedance value is determined to be the characteristic impedance value of the RF source under test when it outputs RF power at the target power value. When the second reflection coefficient is less than the third reflection coefficient, the first impedance value is determined to be the characteristic impedance value of the RF source under test when it outputs RF power at the target power value.

7. The method for determining characteristic impedance according to claim 4, characterized in that, The third impedance value is the average impedance value of the product of the first impedance value and the first weight value and the product of the second impedance value and the second weight value, wherein the first weight value and the second weight value are related to the degree of deviation of the first impedance value and the second impedance value from the preset impedance curve of the RF source under test, and / or are related to the reactance properties of the first impedance value and the second impedance value.

8. The method for determining characteristic impedance according to claim 7, characterized in that, The first weight value includes a first sub-weight value and a second sub-weight value, and the second weight value includes a third sub-weight value and a fourth sub-weight value. The first sub-weight value and the third sub-weight value are related to the degree of deviation of the first impedance value and the second impedance value from the preset impedance curve, and the second sub-weight value and the fourth sub-weight value are related to the reactance properties of the first impedance value and the second impedance value.

9. The method for determining characteristic impedance according to claim 8, characterized in that, The preset impedance curve is obtained based on the correspondence between multiple characteristic impedance values ​​of the radio frequency source under test when it outputs radio frequency power at multiple different power values. The method for determining characteristic impedance further includes: The first deviation value is determined based on the degree of deviation of the first impedance value from the preset impedance curve, and the second deviation value is determined based on the degree of deviation of the second impedance value from the preset impedance curve. The ratio of the first sub-weight value to the third sub-weight value is determined based on the ratio of the second deviation value to the first deviation value.

10. A characteristic impedance determination device, characterized in that, The characteristic impedance determination device is used to determine the characteristic impedance value of a radio frequency source under test. Analog radio frequency source; The control unit is used to control the radio frequency source under test to output radio frequency power with a target power value to the target load, and to perform impedance matching between the radio frequency source under test and the target load, and to control the analog radio frequency source to output radio frequency power with a target power value to the target load. An acquisition unit is used to acquire the reflection coefficient of the analog radio frequency source to obtain a first reflection coefficient; The control unit is further configured to determine the first impedance value and the second impedance value of the RF source under test based on the characteristic impedance value of the simulated RF source and the first reflection coefficient, and to determine the characteristic impedance value of the RF source under test when outputting RF power at the target power value based at least on the first impedance value and the second impedance value.

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