Sand raising device of quartz crucible mold

Abstract

The invention relates to a sand raising device of a quartz crucible mold. A sand raising device of a quartz crucible mold comprises a supporting frame, and a butt joint part used for being in butt joint with a mechanical arm of a robot is installed on the supporting frame. The first hopper and the second hopper are arranged side by side left and right; the first material guide pipeline is in butt joint with the bottom of the first hopper; the device further comprises a second material guiding pipeline used for being in butt joint with the bottom of the second hopper, the second material guiding pipeline comprises a fixedly-arranged fixed pipe and a rotatable rotating pipe, the bottom of the fixed pipe is in butt joint with the rotating pipe, and the bottom of the supporting frame is detachably connected with a supporting outer sleeve arranged on the outer side of the rotating pipe in a sleeving mode. The supporting outer sleeve is rotationally connected with the rotating pipe through a bearing. The bottom of the rotating pipe is detachably connected with an upper rotating disc and a lower sand leakage rotating disc; an opening in the lower end of the first guide pipeline directly faces the upper surface of the upper rotary disc; and the lower end opening of the rotating pipe directly faces the center of the lower sand leakage rotating disc. The sand blowing device automatically blows sand and is good in uniformity.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing equipment, in particular to a sand blowing device. BACKGROUND

[0002] The quartz crucible mold of the original melting machine is manually filled with sand. Manual sanding may result in uneven sanding, leading to poor quality of the produced quartz crucible. Manual work is low in efficiency and time-consuming. In order to solve this problem, the applicant has filed a patent application for a quartz crucible automatic sanding forming equipment with the application number 202310541164.4.

[0003] However, the structure in the application still has the following problems:

[0004] 1) The original automatic sanding forming equipment cannot automatically sand the quartz sand at the R angle of the bottom of the mold, and can only be manually sanded.

[0005] 2) There is a risk of mixing different types of quartz sand, especially the innermost layer of high-purity quartz sand, which requires the highest purity and is expensive.

[0006] There is an urgent need for a sand blowing device to overcome the above problems. SUMMARY

[0007] In view of the problems existing in the prior art, the present application provides a sand blowing device for a quartz crucible mold to solve at least one of the above technical problems.

[0008] In order to achieve the above purpose, the present application provides a sand blowing device for a quartz crucible mold, comprising a support frame, characterized in that a docking portion for docking a robot mechanical arm is installed on the support frame.

[0009] It also includes a first hopper and a second hopper arranged side by side, and the first hopper and the second hopper are detachably installed on the support frame.

[0010] It also includes a first material guide pipeline for docking the bottom of the first hopper, which extends downward through the support frame.

[0011] It also includes a second material guide pipeline for docking the bottom of the second hopper, which includes a fixed pipe and a rotatable pipe. The bottom of the fixed pipe is docked with the rotatable pipe, and the rotatable pipe extends downward through the support frame. The bottom of the support frame is detachably connected with a support sleeve which is sleeved outside the rotatable pipe, and the support sleeve and the rotatable pipe are rotatably connected through a bearing.

[0012] A rotation driving mechanism is installed on the support frame for driving the rotation of the rotatable pipe.

[0013] The support sleeve is fixed relative to the first material guide pipe by a pipe clamp;

[0014] The bottom of the rotating pipe extends out of the support sleeve, and the bottom of the rotating pipe is detachably connected with an upper rotating disc and a lower sand leaking disc arranged in an up-down manner, the central axes of the upper rotating disc and the lower sand leaking disc coincide, and the outer diameter of the upper rotating disc is greater than the outer diameter of the lower sand leaking disc;

[0015] The lower end of the first material guide pipe is opposite to the upper surface of the upper rotating disc;

[0016] The lower end of the rotating pipe is opposite to the center of the lower sand leaking disc, and the center of the lower sand leaking disc is provided with a sand leaking hole.

[0017] Further preferably, the rotating drive mechanism comprises a motor, the power output shaft of the motor is connected with a driving pulley, a driven pulley is installed on the rotating pipe, and the driving pulley and the driven pulley are connected by a synchronous belt.

[0018] Further preferably, the bottom of the rotating pipe is detachably connected with a support ring, the center of the upper rotating disc is provided with a perforation for passing through the rotating pipe, the support ring is located on the lower side of the upper rotating disc, and the upper rotating disc is arranged on the support ring;

[0019] The support ring is detachably connected with the lower sand leaking disc by at least three ceramic bolts arranged in a circumferential direction.

[0020] Further preferably, the support frame comprises a hopper seat and a support base arranged in an up-down manner, and the support frame further comprises a support arranged vertically, the upper side of the support is connected with the hopper seat, and the lower side of the support is connected with the support base.

[0021] A hopper clamp for fixing a hopper is detachably connected on the support.

[0022] The hopper seat is provided with a first insertion slot for longitudinally inserting the first hopper and a second insertion slot for longitudinally inserting the second hopper.

[0023] Further preferably, the first material guide pipe is provided, adjacent to the end of the first hopper, with a first pipe clamp valve and a flow limiter arranged in an up-down manner;

[0024] The second material guide pipe is provided, adjacent to the end of the second hopper, with a second pipe clamp valve and a flow limiter arranged in an up-down manner.

[0025] Further preferably, the fixed pipe comprises an upper butt joint portion, an inclined portion and a lower butt joint portion connected in sequence from top to bottom.

[0026] The upper docking part and the lower docking part are vertically arranged, the upper docking part docks the second hopper, and the lower docking part docks the rotating pipe;

[0027] The spacing between the inclined part and the first material guiding pipe decreases from top to bottom.

[0028] Further preferably, the lower sand leaking rotating disc comprises a sand leaking part, a conical part and a ring-shaped blocking part which are sequentially connected from inside to outside in the radial direction, and the sand leaking part is provided with the sand leaking holes.

[0029] Further preferably, the docking part is provided with a gas source interface for docking a gas source and a power source interface for docking a power source.

[0030] When the docking part is connected with the robot mechanical arm, the gas source and the power source are supplied. The sand is automatically lifted by the robot mechanical arm, and manual lifting of the sand is not needed, and the uniformity is good.

[0031] Further preferably, the first hopper is used for sanding the straight wall of the inner layer of the quartz crucible.

[0032] The second hopper is used for sanding the bottom R corner of the inner layer of the quartz crucible.

[0033] Further preferably, in use, the robot mechanical arm is connected with the docking part.

[0034] The sand lifting device is placed at the bottom R corner of the vertically rotating quartz crucible mold, the second pipe clamp valve is opened, and the high-purity quartz sand in the second hopper starts to fall along the second material guiding pipe to the rotating lower sand leaking rotating disc; at the same time, the robot mechanical arm carries the sand lifting device to move back and forth along the radial direction of the quartz crucible mold, and at this time, the high-purity quartz sand in the second hopper is uniformly thrown to the bottom R corner of the quartz crucible mold.

[0035] The sand lifting device is placed at the straight wall of the vertically rotating quartz crucible mold, the first pipe clamp valve is opened, and the high-purity quartz sand in the first hopper starts to fall along the first material guiding pipe to the rotating upper rotating disc; at the same time, the robot mechanical arm carries the sand lifting device to move back and forth along the axial direction of the quartz crucible mold, and at this time, the high-purity quartz sand in the first hopper is uniformly thrown to the straight wall of the quartz crucible mold.

[0036] Compared with the prior art, the device has the following beneficial effects:

[0037] The device is automatically lifted by the robot mechanical arm, and manual lifting of the sand is not needed, and the uniformity is good.

[0038] Because the high-purity quartz sand in the innermost layer is relatively expensive, and the total amount of sand is much less than that of the outer layer sand and the middle layer sand, in order to avoid sand pollution, the sand feeding device of the quartz crucible mold is divided into two hoppers, the high-purity quartz sand in each hopper is weighed in advance and placed in the hopper, and the precise sand amount control is realized. One of the two hoppers adds sand to the R corner of the bottom of the inner layer of the quartz crucible, and the other adds sand to the straight wall of the inner layer of the quartz crucible, and the sand bucket is separated to realize precise sand amount control. BRIEF DESCRIPTION OF DRAWINGS

[0039] Fig. 1 It is a structural schematic view of embodiment 1 of the application.

[0040] Fig. 2 It is a structural schematic view of another perspective of embodiment 1 of the application.

[0041] Fig. 3 It is a sectional view of embodiment 1 of the application.

[0042] In the figure: 1 is a support, 2 is a first hopper, 3 is a connecting plate, 4 is a first pipe clamp valve, 5 is an upper pipe, 6 is a support, 7 is a pipe clamp, 8 is a lower pipe, 9 is an upper rotating disc, 10 is a support sleeve, 11 is a fixed pipe, 12 is a second pipe clamp valve, 13 is a hopper seat, 14 is a second hopper, 15 is a hopper clamp, 16 is a hopper cover, 17 is a butt joint, 18 is a motor, 19 is a driving pulley, 20 is a motor support, 21 is a sealing ring, 22 is a lower sand leakage rotating disc, 23 is a ceramic bolt, 24 is a support ring, 25 is a bearing, 26 is a rotating pipe, 27 is a driven pulley, 28 is a synchronous belt, and 29 is a flow restrictor. DETAILED DESCRIPTION

[0043] The application will be further described below in conjunction with the drawings.

[0044] Reference Figs. 1 to 3, specific embodiment 1: a sand blasting device of a quartz crucible mold, comprising a support frame, a docking portion 17 for docking a robot manipulator is installed on the support frame; further comprising a first hopper 2 and a second hopper 14 arranged side by side. The top of the first hopper and the second hopper is provided with a hopper cover 16. The first hopper 2 and the second hopper 14 are detachably installed on the support frame; further comprising a first material guide pipeline for docking the bottom of the first hopper 2, the first material guide pipeline extends downward through the support frame. The first material guide pipeline comprises an upper pipeline 5 and a lower pipeline 8 connected in sequence. A sealing ring 21 is arranged at the connection between the upper pipeline 5 and the lower pipeline 8. Further comprising a second material guide pipeline for docking the bottom of the second hopper 14, the second material guide pipeline comprises a fixed pipe 11 and a rotatable pipe 26, the bottom of the fixed pipe 11 is docked with the rotatable pipe 26, the rotatable pipe 26 extends downward through the support frame, the bottom of the support frame is detachably connected with a support sleeve 10 sleeved outside the rotatable pipe 26, the support sleeve 10 and the rotatable pipe 26 are rotationally connected through a bearing 25; a rotation driving mechanism for driving the rotatable pipe 26 to rotate is installed on the support frame; the support sleeve 10 and the first material guide pipeline are relatively fixed through a pipe clamp 7; the bottom of the rotatable pipe 26 extends out of the support sleeve 10, and the bottom of the rotatable pipe 26 is detachably connected with an upper rotating disc 9 and a lower sand leakage disc 22 arranged in sequence, the center axes of the upper rotating disc 9 and the lower sand leakage disc 22 coincide, and the outer diameter of the upper rotating disc 9 is greater than that of the lower sand leakage disc 22; the lower end opening of the first material guide pipeline is opposite to the upper surface of the upper rotating disc 9; the lower end opening of the rotatable pipe 26 is opposite to the center of the lower sand leakage disc 22, and a sand leakage hole is formed in the center of the lower sand leakage disc 22.

[0045] The rotation driving mechanism comprises a motor 18, a driving pulley 19 is connected with the power output shaft of the motor 18, a driven pulley 27 is installed on the rotatable pipe 26, and the driving pulley 19 and the driven pulley 27 are transmissionally connected through a synchronous belt 28. The motor 18 is installed on a motor bracket 20, and the motor bracket is installed on the support frame.

[0046] The bottom of the rotatable pipe 26 is detachably connected with a support ring 24, a perforation for passing through the rotatable pipe 26 is formed in the center of the upper rotating disc 9, the support ring 24 is located on the lower side of the upper rotating disc 9, and the upper rotating disc 9 is arranged on the support ring 24; the support ring 24 is detachably connected with the lower sand leakage disc 22 through at least three ceramic bolts 23 arranged in a circumferential direction.

[0047] The support frame comprises a hopper seat 13 arranged vertically and a support base 6, and further comprises a support frame 1 arranged vertically, the upper side of the support frame 1 is connected with the hopper seat 13, and the lower side of the support frame 1 is connected with the support base 6; a hopper clamp 15 for fixing the hopper is detachably connected to the support frame 1; the hopper seat 13 is provided with a first insertion slot for longitudinally inserting the first hopper 2 and a second insertion slot for longitudinally inserting the second hopper 14. The support base 6 is connected with the two sides of the support frame 1 through the inclined connecting plates 3.

[0048] The first material guide pipe is provided with the first pipe clamp 7 and the valve 4 and the flow limiter 29 arranged vertically at the end of the first hopper 2; and the second material guide pipe is provided with the second pipe clamp 7 and the valve 12 and the flow limiter 29 arranged vertically at the end of the second hopper 14.

[0049] The fixed pipe 11 comprises an upper butt joint portion 17, an inclined portion and a lower butt joint portion 17 connected in sequence from top to bottom; the upper butt joint portion 17 and the lower butt joint portion 17 are arranged vertically, the upper butt joint portion 17 is connected with the second hopper 14, and the lower butt joint portion 17 is connected with the rotating pipe 26; the distance between the inclined portion and the first material guide pipe decreases from top to bottom.

[0050] The lower sand leakage rotating disc 22 comprises a sand leakage portion, a conical portion and a ring-shaped surrounding portion connected in sequence from inside to outside in the radial direction, and the sand leakage portion is provided with sand leakage holes.

[0051] The butt joint portion 17 is provided with a gas source interface for connecting with a gas source and a power source interface for connecting with a power source; when the butt joint portion 17 is connected with the robot mechanical arm, the gas source and the power source are supplied; the sand is automatically lifted by the robot mechanical arm, and manual lifting is not needed, and the uniformity is good.

[0052] The first hopper 2 is used for adding sand to the straight wall of the inner layer of the quartz crucible; and the second hopper 14 is used for adding sand to the R corner of the bottom of the inner layer of the quartz crucible.

[0053] In use, the robot mechanical arm is connected with the butt joint portion 17;

[0054] The sand lifting device is placed in the R corner of the bottom of the quartz crucible mold rotating in the vertical state, the second pipe clamp 7 is opened, and the high-purity quartz sand in the second hopper 14 starts to fall along the second material guide pipe to the lower sand leakage rotating disc 22 rotating in the second material guide pipe; at the same time, the robot mechanical arm carries the sand lifting device to move back and forth along the radial direction of the quartz crucible mold, and at this time, the high-purity quartz sand in the second hopper 14 is uniformly thrown to the R corner of the bottom of the quartz crucible mold.

[0055] The quartz crucible mold is in a vertical state, the first pipe clamp 7 valve is opened, and the high-purity quartz sand in the first hopper 2 starts to fall along the first material guide pipe to the upper rotating disc 9 in rotation; at the same time, the robot manipulator arm carries the sand blowing device to move up and down along the axial direction of the quartz crucible mold, and at this time, the high-purity quartz sand in the first hopper 2 is uniformly thrown to the straight wall of the quartz crucible mold in rotation.

[0056] The above is only the preferred embodiment of the present application, it should be pointed out that, for those skilled in the art, without departing from the principles of the present application, can also make a number of improvements and refinements, these improvements and refinements should also be considered as the protection scope of the present application.

Claims

1. A sand-lifting device for a quartz crucible mold, comprising a support frame, characterized in that, The support frame is equipped with a docking part for docking the robotic arm; It also includes a first hopper and a second hopper arranged side by side, the first hopper and the second hopper being detachably mounted on the support frame; It also includes a first guide pipe for docking with the bottom of the first hopper, the first guide pipe extending downward through the support frame; It also includes a second material guide pipe for docking with the bottom of the second hopper. The second material guide pipe includes a fixed pipe and a rotatable rotating pipe. The bottom of the fixed pipe docks with the rotating pipe. The rotating pipe extends downward through the support frame. The bottom of the support frame is detachably connected to a support sleeve sleeved on the outside of the rotating pipe. The support sleeve and the rotating pipe are rotatably connected by a bearing. The support frame is equipped with a rotary drive mechanism for driving the rotating tube to rotate. The supporting jacket is fixed relative to the first material guide pipe by a pipe clamp; The bottom of the rotating tube extends from the supporting sleeve. The bottom of the rotating tube is detachably connected to an upper rotating disk and a lower sand-leaking rotating disk arranged vertically. The central axes of the upper rotating disk and the lower sand-leaking rotating disk coincide, and the outer diameter of the upper rotating disk is larger than the outer diameter of the lower sand-leaking rotating disk. The lower opening of the first feed pipe faces the upper surface of the upper rotating disk; The lower end opening of the rotating tube is directly opposite the center of the lower sand-leaking disc, and a sand-leaking hole is provided in the center of the lower sand-leaking disc.

2. The sand-lifting device for a quartz crucible mold according to claim 1, characterized in that: The rotary drive mechanism includes a motor, the power output shaft of which is connected to a drive pulley, and a driven pulley is mounted on the rotary tube. The drive pulley and the driven pulley are connected by a synchronous belt drive.

3. The sand-lifting device for a quartz crucible mold according to claim 1, characterized in that: The bottom of the rotating tube is detachably connected to a support ring, and the center of the upper rotating disk has a through hole for the rotating tube to pass through. The support ring is located on the lower side of the upper rotating disk, and the upper rotating disk rests on the support ring. The support ring is detachably connected to the lower sand-leaking disc by at least three circumferentially arranged ceramic bolts.

4. The sand-lifting device for a quartz crucible mold according to claim 1, characterized in that: The support frame includes a hopper seat and a support arranged vertically. The support frame also includes a vertically arranged bracket. The upper side of the bracket is connected to the hopper seat, and the lower side of the bracket is connected to the support. The bracket is detachably connected to a hopper clamp for fixing the hopper; The hopper seat is provided with a first slot for longitudinally inserting the first hopper and a second slot for longitudinally inserting the second hopper.

5. The sand-lifting device for a quartz crucible mold according to claim 1, characterized in that: The first feed pipe is equipped with a first clamp valve and a flow limiter installed at the end near the first hopper. The second feed pipe is equipped with a second clamp valve and a flow limiter installed at the end adjacent to the second hopper.

6. The sand-lifting device for a quartz crucible mold according to claim 1, characterized in that: The fixed tube includes an upper connecting part, an inclined part, and a lower connecting part connected sequentially from top to bottom; The upper docking part and the lower docking part are vertically arranged, the upper docking part docks with the second hopper, and the lower docking part docks with the rotating tube; The distance between the inclined portion and the first feed pipe decreases from top to bottom.

7. The sand-lifting device for a quartz crucible mold according to claim 1, characterized in that: The lower sand-leaking disc includes a sand-leaking section, a conical section, and an annular enclosure section connected radially from the inside to the outside, and the sand-leaking section has the sand-leaking hole.

8. The sand-lifting device for a quartz crucible mold according to claim 1, characterized in that: The docking section is provided with an air source interface for connecting to an air source and a power source interface for connecting to a power source.

9. The sand-lifting device for a quartz crucible mold according to claim 1, characterized in that: The first hopper is used to add sand to the straight wall of the inner layer of the quartz crucible; The second hopper is used to add sand to the bottom R-corner of the inner layer of the quartz crucible.

10. The sand-lifting device for a quartz crucible mold according to claim 1, characterized in that: When in use, the robot's robotic arm is connected to the docking section; The sand-lifting device is placed at the bottom R-corner of the vertically rotating quartz crucible mold. The second pipe clamp valve is opened, and the high-purity quartz sand in the second hopper begins to fall along the second feed pipe onto the rotating lower sand-leaking disc. At the same time, the robot arm, carrying the sand-lifting device, moves back and forth along the radial direction of the quartz crucible mold. At this time, the high-purity quartz sand in the second hopper is evenly thrown towards the bottom R-corner of the quartz crucible mold while rotating. The sand-lifting device is placed on the vertical wall of the quartz crucible mold that is rotating in a vertical position. The first clamp valve is opened, and the high-purity quartz sand in the first hopper begins to fall along the first feed pipe onto the rotating upper disc. At the same time, the robotic arm, carrying the sand-lifting device, moves back and forth along the axis of the quartz crucible mold. At this time, the high-purity quartz sand in the first hopper is evenly thrown towards the vertical wall of the quartz crucible mold while rotating.

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