Wet surface treatment tank structure and surface treatment method

Abstract

The invention discloses a wet surface treatment tank structure and a method, which are mainly applied to the field of semiconductor and circuit board manufacturing, the wet surface treatment tank structure comprises a drainage outer tank, a pressure regulating inner tank assembly arranged in the drainage outer tank and a conductive hanger, and the conductive hanger divides the pressure regulating inner tank assembly into an A-side pressure regulating cavity and a B-side pressure regulating cavity which are mutually independent; each pressure regulating cavity is provided with a bottom water inlet, a side jet flow module, a weir crest regulating mechanism, a stirring curtain and an upper cover opening and closing mechanism; through partitioned liquid supply of a bottom water inlet and a side jet flow module and precise opening control of a weir crest adjusting mechanism, in combination with real-time feedback of a pressure sensor, a high-precision dynamic hydraulic pressure difference is established and maintained between an A-side pressure adjusting cavity and a B-side pressure adjusting cavity, and the pressure difference drives liquid medicine to flow back and forth in a high-aspect-ratio through hole / blind hole, so that the liquid medicine can flow back and forth in a high-aspect-ratio through hole / blind hole. The problems of bubble discharge and liquid exchange in holes are effectively solved, and meanwhile hydraulic support is provided for a thin brittle substrate. According to the method, the excellent effects of high plating uniformity, high hole filling capacity, wide process adaptability and high equipment compactness are achieved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor and circuit board manufacturing technology, and in particular to a tank structure and method for wafer-level or board-level wet surface treatment, which is suitable for chemical plating or electroplating processes for high aspect ratio through holes or blind holes. Background Technology

[0002] In the fields of semiconductor packaging and high-end PCB manufacturing, as electronic products develop towards miniaturization and high density, extremely high requirements are placed on the metallization of high aspect ratio through-holes / blind vias (diameter / depth ratio of 1:10 to 1:30). Traditional wet surface treatment technologies face severe challenges in processing such fine structures.

[0003] In the prior art, reference document 1 (CN112391616 A) discloses a technical solution that establishes a pressure difference between two cavities by vacuum pumping. Although it can promote the entry of the liquid into the through hole to a certain extent, it has the following obvious shortcomings: the pressure control accuracy is limited, and it is difficult to achieve precise control by simply relying on the pressure difference generated by vacuum pumping, which cannot meet the personalized needs of hole structures with different aspect ratios; the liquid distribution is uneven, and there is a lack of an effective liquid distribution mechanism, resulting in large differences in the coating thickness at different locations in the hole; the equipment has poor adaptability and insufficient support and protection for brittle materials such as wafers and glass, which can easily lead to substrate damage; the process control method is simple, relying only on pressure difference drive, which cannot achieve fine control of local coating thickness.

[0004] Limitations of Reference Document 1: 1. Only applicable to through-hole substrates, unable to produce all products of this invention; 2. Only applicable to chemical plating and cleaning, unable to produce the products to be electroplated in this invention; 3. Uses a dedicated "sealing box", only applicable to products of specific shapes and sizes; 4. Can only achieve metallization of the through-hole surface and maintain the through-hole shape, unable to achieve the process of filling the hole with metal.

[0005] Prior art document 2 (CN112495926A) proposes a technique for generating pressure difference through liquid level difference, oscillation source, or piston thrust. Although this adds multiple pressure generation methods, it still has the following drawbacks:

[0006] The hydraulic fluctuation control is imprecise, and the amplitude and frequency of the fluctuations generated by the oscillation source are difficult to control precisely, which easily leads to the standing wave effect; the structure is highly complex, the piston drive mechanism occupies a large space, and there are problems with sealing reliability; local concentration control is lacking, and it is impossible to independently control the concentration of the drug solution in a specific area; the equipment integration is low, the layout of each functional module is loose, and the space utilization rate is not high.

[0007] Especially in high-end wafer-level packaging (CoWoS) and board-level packaging (CoPoS) applications, existing technologies cannot simultaneously meet the following requirements: providing effective support and protection for thin wafers with a thickness of less than 800μm; achieving perfect filling of vias with an aspect ratio of 1:20 or higher; ensuring that the uniformity error of the plating thickness within the via is less than 10%; and adapting to the processing needs of various substrates (silicon wafers, glass, organic substrates). They are only applicable to via substrates. They cannot be used for all products of this invention; they are only applicable to chemical plating and cleaning, and cannot be used for the products to be electroplated in this invention; they use a fixed oscillation source, and are only applicable to products of specific shapes and sizes; they can only achieve metallization on the surface of the via, maintaining the via shape, and cannot achieve the process of filling the via with metal.

[0008] Therefore, there is an urgent need for a new tank structure and method that can achieve precise hydraulic control, improve coating uniformity, and at the same time ensure equipment compactness and process adaptability. Summary of the Invention

[0009] To address the shortcomings of the existing technology, this invention provides a wet surface treatment tank structure and method. Through an innovative hydraulic precision adjustment mechanism, a zoned chemical solution control system, and a compact structural design, it solves the problems of coating uniformity and bubble removal in high aspect ratio holes, while improving the space utilization and process adaptability of the equipment.

[0010] The technical solution adopted in this invention is:

[0011] A wet surface treatment tank structure includes a pressure regulating inner tank assembly, a conductive hanger, and a drainage outer tank. The pressure regulating inner tank assembly is disposed in the drainage outer tank, and the conductive hanger divides the pressure regulating inner tank assembly into two independent pressure regulating cavities, A-side and B-side.

[0012] The pressure regulating inner tank assembly includes a hanger guide support frame located at the center;

[0013] The hanging fixture guide support frame is provided with A / B side upper cover support frame and A / B side weir baffle in sequence on both sides outward;

[0014] The hanger guide support frame, the A / B side weir baffle and the A / B side upper cover support frame are connected by screws;

[0015] The top of the A / B side cover support frame is equipped with an A / B side cover opening and closing mechanism;

[0016] The top of the weir baffle on the A / B side is equipped with an A / B side weir adjustment mechanism; the upper part of the transverse side is equipped with an opening for drainage, the A / B side weir.

[0017] The right / left sides of the upper cover support frame on the A / B side are respectively provided with A / B side stirring curtain and A / B side jet module on the outer sides of the core.

[0018] The hanger guide support frame, together with the A / B side cover support frame and the A / B side spray module, form a chamber that can hold the liquid medicine. After inserting the conductive hanger, it is divided into two or more liquid medicine chambers.

[0019] Preferably, the flow distribution chamber of the A / B side jet module adopts a partitioned layout, including a central array region and at least one annular array region surrounding the central array, and the flow rate and velocity of the liquid in each partition region can be independently controlled and adjusted.

[0020] The A / B side-jet module is equipped with multiple sets of side-jet nozzles, with the nozzles facing directly towards the conductive hanger. On the other side of each set of nozzles, multiple flow chambers are connected in parallel or series. The side-jet module is equipped with multiple pressure sensors. An anode plate is mounted on the side-jet module plate where the nozzles are installed; the anode plate can be a single piece or multiple sets assembled together.

[0021] On one side of the top of the two anode plates, multiple anode conductive strips are branched out corresponding to different anode plates;

[0022] Preferably, the A-side weir adjustment mechanism includes a motor, a camshaft driven by the motor, a cam mounted on the camshaft, and a water-blocking gate pushed by the cam. The opening and closing degree of the water-blocking gate relative to the weir is precisely controlled by the rotational movement of the cam.

[0023] The water-retaining gate is tightly fitted together by springs and cams, and the water-retaining gate is directly above the weir.

[0024] Preferably, the opening and closing mechanisms on both sides A and B correspond to the upper part of the conductive hanger, and the bottom of the hanger has a horizontal water baffle plate.

[0025] Preferably, the transverse baffle and cathode conductive pin of the B-side cover opening and closing mechanism are controlled by the air circuit system;

[0026] The cathode conductive pin is configured to be pushed out by air pressure to form electrical contact with the conductive pad on the conductive hanger, or to be retracted by air pressure to break the electrical contact.

[0027] Preferably, the pressure regulating inner tank assembly has a hidden curtain motor box on both sides. The motor box houses the curtain motor that drives the guide shaft, and the motor box is provided with a positive pressure inlet to maintain positive pressure inside the box for heat dissipation and corrosion protection.

[0028] Preferably, the pressure regulating chambers on the A and B sides are further equipped with pressure sensors arranged at multiple points to monitor the hydraulic data in the chambers in real time, and to form a closed-loop control system that is linked with the weir regulating mechanism on the A side, the weir regulating mechanism on the B side, the side jet module on the A side, the side jet module on the B side, the bottom inlet on the A side, and the bottom inlet on the B side.

[0029] A surface treatment method for a wet surface treatment tank structure includes the following steps:

[0030] a) Clamping steps: Install the substrate to be processed on the conductive hanger and insert the hanger into the voltage regulating inner groove assembly, so that the substrate divides the inner cavity into a voltage regulating cavity A and a voltage regulating cavity B.

[0031] b) Sealing and energizing steps: Control the movement of the transverse baffle of the A-side cover opening and closing mechanism and the transverse baffle of the B-side cover opening and closing mechanism to seal and contact with the hanger, and at the same time control the cathode conductive pins on both sides to push out and electrically connect with the conductive pads on both sides of the hanger.

[0032] c) Drug circulation and pressure regulation steps: Through the bottom water inlet A and the bottom water inlet B, the drug is delivered from bottom to top to both sides of the conductive hanger. The side spray module A and the side spray module B deliver another side drug into the pressure regulating chambers on the A and B sides. The side weir adjustment mechanism A and the side weir adjustment mechanism B establish and maintain a preset hydraulic pressure difference between the two chambers. The drug is driven by the pressure difference set by the program formula to repeatedly penetrate the through holes or blind holes on the substrate or maintain a consistent pressure balance.

[0033] d) Stirring and electroplating steps: Start the stirring curtain on side A and the stirring curtain on side B to vibrate up and down to promote uniform distribution of the solution. At the same time, positive current is passed through the anode plates on both sides and negative electrodes are connected to both sides of the conductive hanger through the cathode conductive pins. Electroplating surface treatment is performed simultaneously.

[0034] The aforementioned side-sprayed liquid will pass through the spaced strip holes of the stirring curtain. The curtain will vibrate, so the position of the strip holes will constantly change, which can avoid the fixed mark of the jet and achieve the effects of stirring and ion dispersion. In addition, the liquid flowing in from the bottom inlet will flow from bottom to top across both sides of the substrate, providing the main metal ion supply, and is not affected by the position of the curtain.

[0035] e) Drainage and Completion Steps: The liquid from the two pressure regulating chambers is discharged from the gap between the water gate and the weir into the inner side of the outer drainage tank. After it collects at the bottom of the outer drainage tank, the plating solution is discharged from the outer tank drain outlet. The discharged plating solution is connected to the external filter circulation and chemical addition device (not shown) and then circulated back to the bottom inlet and side spray module on both sides of the pressure regulating inner tank assembly.

[0036] Steps c) to e) described above can be performed synchronously, sequentially, or selectively.

[0037] Preferably, in step d), when the conductive pin is to be ejected, positive air pressure enters the ejection chamber from the pin ejection air passage, pushing the annular pusher to eject the pin along the guide plate. At this time, the front end of the ejected pin makes electrical contact with the conductive pad of the conductive hanger, and the cathode conductive contact at the end of the conductive pin is connected to the negative terminal of the electroplating special rectifier by wire to form a circuit connection.

[0038] When the pin is to retract, positive air pressure is introduced into the retraction chamber of the pin retraction air passage. At this time, the air pressure pushes the annular push plate in the reverse direction, pushing the pin back in the reverse direction. The transverse baffle is connected to the transverse baffle telescopic mechanism. When positive air pressure is introduced into the baffle ejection air passage, the transverse baffle extends and is in close contact with the conductive hanger. When positive air pressure is introduced into the baffle retraction air passage, the baffle retracts back to its original position.

[0039] Preferably, in step d), the two ends of the stirring curtain are connected to the left and right guide shafts respectively. The curtain plate is interconnected with the shaft by multiple connectors passing through multiple coupling holes. The top ends of the left and right guide shafts are fixed and connected to the left and right curtain motors by left and right connecting elbows respectively. When the motor moves up and down, it drives the stirring curtain to vibrate up and down. The oscillation frequency is about 5 to 8 times per second, but not limited to this.

[0040] Preferably, in step c), the adjustment of the hydraulic differential is performed dynamically, divided into multiple stages according to the processing progress, with different target differential pressure values ​​set for each stage, and the differential pressure adjustment accuracy controlled within ±0.5% of the set value.

[0041] The substrate is a wafer, a glass substrate, an organic substrate, or an inorganic substrate;

[0042] The substrate can be placed vertically, horizontally, or at any tilt angle in the conductive mounting fixture.

[0043] The surface treatment process includes chemical plating, electroplating, etching, degumming, or cleaning.

[0044] The frequency range of the up-and-down reciprocating vibration of the A stirring curtain is 1 to 10 times per second, and the amplitude of its upper and lower strokes can be independently set to an asymmetric mode.

[0045] The advantages of this invention over the prior art are:

[0046] This invention relates to a wet surface treatment tank structure and method, which significantly improves precision control capabilities, increasing hydraulic control accuracy tenfold to ±0.5% of the set value; achieves a coating thickness uniformity with a coefficient of variation of <8%; supports perfect filling of 1:30 aspect ratio through-holes with a yield rate >99%. It expands process adaptability, handling various brittle substrates with thicknesses from 50-1000μm; adapts to various process requirements including chemical plating, electroplating, and cleaning; and supports single-sided, double-sided, and selective area treatment. Production efficiency is significantly improved; equipment footprint is reduced by more than 40%; process cycle time is shortened by 25-30%; and maintenance intervals are extended to over 2000 hours. Product quality consistency is guaranteed, eliminating intra-hole bubble defects with a void rate of <0.1%; reducing edge effects and increasing effective area utilization by 15%; and achieving high consistency in product performance within and between batches.

[0047] This invention relates to a wet surface treatment tank structure and method, applicable to substrates with surface routing lines (RDL), blind holes, and through holes; 2. Applicable to electroplating, compatible with chemical plating and cleaning; employs conductive racks, and different shapes and sizes of substrates can be matched by changing the conductive racks; can perform hole-filling electroplating of blind holes and through holes, filling blind holes or through holes with metal.

[0048] The present invention relates to a wet surface treatment tank structure and method, which employs a bracket with conductivity and airtightness; the bracket has guide strip mechanisms on both sides.

[0049] This invention relates to a wet surface treatment tank structure and method, featuring bottom water inlet (adjustable flow rate), side matrix nozzle water inlet (adjustable flow rate), and an adjustable overflow gate. By utilizing signals from a pressure sensor that receives data acquisition data, the gate opening and closing degree of the two chambers is adjusted, achieving interactive hydraulic control between the two ends. A servo motor controls the gate opening and closing degree, instantly achieving the required pressure difference between the two chambers. Multiple water inlets allow for zoned control and fine-tuning for uniformity.

[0050] This invention relates to a wet surface treatment tank structure and method, in which fluid is introduced through multiple nozzles at the bottom and sides, and overflowed from the top, with both chambers at full liquid level. Each chamber can operate independently, or both chambers can be used in combination.

[0051] The present invention relates to a wet surface treatment tank structure and method, wherein the two chambers correspond to the atmospheric end and do not require special sealing; the tank structure does not come into contact with the product. Attached Figure Description

[0052] Figure 1 This is a three-dimensional structural diagram of a wet surface treatment tank structure according to the present invention;

[0053] Figure 2 This is a schematic diagram of the main structure of a wet surface treatment tank according to the present invention;

[0054] Figure 3 yes Figure 2 A schematic diagram of the AA cross-sectional structure;

[0055] Figure 4 This is a three-dimensional structural diagram of the pressure regulating inner tank assembly;

[0056] Figure 5 This is a schematic diagram of the main structure of the pressure regulating inner tank assembly;

[0057] Figure 6 yes Figure 5 Schematic diagram of the BB cross-sectional structure;

[0058] Figure 7 yes Figure 5 CC cross-sectional view of the structure;

[0059] Figure 8 This is a schematic diagram of the three-dimensional structure of the hanger guide support frame;

[0060] Figure 9 This is a schematic diagram of the conductive mounting bracket;

[0061] Figure 10 This is a schematic diagram of the connection structure between the conductive hanger and the stirring curtain;

[0062] Figure 11 yes Figure 10 Schematic diagram of the DD cross-sectional structure;

[0063] Figure 12 This is a schematic diagram of the main structure of the side spray jet module;

[0064] Figure 13 yes Figure 12 A schematic diagram of the EE cross-sectional structure;

[0065] Figure 14 yes Figure 12 A schematic diagram of the FF cross-sectional structure;

[0066] Figure 15 This is a rear view structural diagram of the side spray jet module;

[0067] Figure 16 This is a schematic diagram of the three-dimensional structure of the side-jet spray module;

[0068] Figure 17 This is a schematic diagram of the three-dimensional structure of the weir regulating mechanism;

[0069] Figure 18 This is a schematic diagram of the connection structure between the weir baffle and the guide support frame of the hanging device;

[0070] Figure 19 This is a three-dimensional structural diagram showing the connection between the top cover opening and closing mechanism and the conductive hanger;

[0071] Figure 20 This is a top view schematic diagram of the connection between the top cover opening and closing mechanism and the conductive hanger;

[0072] Figure 21 This is a three-dimensional structural diagram of the top cover opening and closing mechanism;

[0073] Figure 22 This is a perspective three-dimensional structural diagram of the top cover opening and closing mechanism;

[0074] Figure 23 This is Example 1, a linear relationship diagram showing the inverse relationship between the gate opening degree and the hydraulic pressure value;

[0075] Figure 24 This is Example 1, showing a steep increase in the hydraulic pressure value on the high-pressure side;

[0076] Figure 25 This is Example 1, a diagram showing the electroplating process of the through-hole in the substrate;

[0077] Figure 26 This is Example 2, constant hydraulic pressure mode control diagram.

[0078] Explanation of symbols for key components in the attached diagram:

[0079] In the picture:

[0080] 1. Pressure regulating inner tank assembly; 11. Pressure regulating chamber on side A; 12. Pressure regulating chamber on side B; 111. Upper cover support frame on side A; 121. Upper cover support frame on side B; 112. Weir baffle on side A; 122. Weir baffle on side B; 113. Weir on side A; 123. Weir on side B; 114. Upper cover opening and closing mechanism on side A; 124. Upper cover opening and closing mechanism on side B; 115. Weir adjustment mechanism on side A; 125. Weir adjustment mechanism on side B; 116. Side jet module on side A; 126. Side jet module on side B; 118. Anode junction box on side A; 128. Anode junction box on side B; 13. Hanger guide support frame; 131. Screw; 132. Right side curtain electric... 1. Chassis; 1321, Right side positive pressure inlet; 1321', Left side positive pressure inlet; 133, A side bottom water inlet connector; 1331, Water inlet connector; 134, A side bottom water inlet; 134', B side bottom water inlet; 135, Right side curtain motor; 135', Left side curtain motor; 136, Coupling hole; 137, A side stirring curtain; 137', B side stirring curtain; 1371, Strip hole; 138, Guide wheel; 2. Conductive hanger; 21, A side conductive pad; 21', B side conductive pad; 22, Guide strip; 3. Drainage outer tank; 31, Outer tank drain outlet; 32, Bottom water inlet interface; 81, Base plate; 82, Metal. Detailed Implementation

[0081] The present invention will now be described in detail with reference to the accompanying drawings and embodiments:

[0082] like Figures 1 to 4 As shown, a surface treatment tank structure with adjustable hydraulic pressure is mainly composed of a pressure regulating inner tank assembly 1, a conductive hanger 2, and a drainage outer tank 3. The conductive hanger 2 divides the pressure regulating inner tank assembly 1 into two symmetrical independent pressure chambers: a pressure regulating chamber 11 on side A and a pressure regulating chamber 12 on side B.

[0083] The pressure regulating chambers 11 / 12 on the A / B sides, through the water inflow from the bottom inlets 134 / 134' on the A / B sides, the water inflow from the side jet modules 116 / 126 on the A / B sides, and the opening and closing degree of the weir adjustment mechanism 115 / 125 relative to the weir 113 / 123 on the A / B sides, combined with the analog data acquired by the pressure sensors 1163 / 1263 on the A / B sides, precisely adjust the difference in hydraulic pressure between the pressure regulating chambers on both sides. This allows for more accurate adjustment of the metal ion concentration and fine-tuning of the coating thickness within the pressure chambers on both sides, without necessarily relying on current to adjust the film thickness. Furthermore, when the conductive hanger clamps a substrate with through holes, the alternating high and low micro-pressure difference between the two sides forces the liquid to flow back and forth into the through holes, solving the problem of high aspect ratio through hole structures. This forces metal ions to be convection-transported into the through holes, ensuring preferential electroplating connection in the middle part of the through holes. Furthermore, because there are hydraulic supports on both sides, it can prevent the thin substrate from cracking. The reciprocating hydraulic fluctuations also help to expel air bubbles from the blind holes and avoid plating cavitation.

[0084] like Figures 5 to 7 The bottom of the drainage tank 3 is equipped with an inclined drainage base plate. The lowest end of the inclined base plate is equipped with an outer tank drain outlet 31 to drain water and connect to an external circulation pump. The side is equipped with a bottom water inlet interface 32 and a connecting pipe to lead the medicine to the bottom of the hanger guide support frame 13. The end of the pipe is divided into two paths, which are connected to the bottom water inlet 134 on side A and the bottom water inlet 134' on side B, respectively. The medicine is supplied fresh from the bottom of the hanger on both sides of A / B from bottom to top.

[0085] The structure of the pressure regulating inner tank assembly 1 consists of a hanging guide support frame 13 in the core area, which horizontally extends outward to the A / B sides to form A / B side upper cover support frames 111 / 121 and A / B side weir baffles 112 / 122, respectively, and is locked in series with multiple evenly distributed screws 131. Left / right side curtain motor boxes 132' / 132 are installed on the exterior of the longitudinal sides of the hanging guide support frame 13; the top of the A / B side upper cover support frames 111 / 121 is fixed with A / B side upper cover opening and closing mechanisms 114 / 124 and A / B side anode junction boxes 118 / 128. The top of the A / B side weir baffle 112 / 122 is fixed with the A / B side weir adjustment mechanism 115 / 125, the lateral side opening has the A / B side weir 113 / 123 for upper drainage, and the bottom has the A / B side water inlet opening 1121 / 1221. The water inlet opening is equipped with the A / B side water inlet connector 1331 / 1331' for convenient water circuit connection and maintenance.

[0086] like Figure 5 The left / right curtain motor box 132' / 132 houses a concealed left / right curtain motor 135' / 135. The motor box also features left / right positive pressure inlets 1321' / 1321. Compared to traditional exposed and extended motors, this design saves installation space, provides better chemical protection, and offers superior heat dissipation. On the inner sides of the hanging fixture guide support frame 13, multiple sets of symmetrical guide wheels 138 are vertically installed. The guide strips 22 on both sides of the conductive hanging fixture 2 are positioned between the two symmetrical guide wheels, facilitating the guide and limiting of the fixture's entry and exit. The hanging fixture guide support frame 13 serves as the central core, with A / B side stirring curtains 137 / 137' and A / B side jet modules 116 / 126 installed horizontally outwards from the core. When the hanger guide support frame 13 is combined with the A / B side upper cover support frame 111 / 121 and the A / B side side spray module 116 / 126, a chamber that can hold the liquid medicine is formed. After the conductive hanger is inserted, it is divided into two liquid medicine chambers.

[0087] like Figures 12-14The side-spray module, taking side A as an example, has multiple sets of side-spray nozzles 1161, facing the conductive hanger side. On the other side of these nozzles, multiple flow-dividing chambers 1162 are connected in parallel or series, as illustrated in the diagram, divided into four areas: a central array with three outward-expanding annular arrays. The sprayed liquid is introduced through multiple inlet connectors 1331 and guided to the multiple flow-dividing chambers 1162. Each flow-dividing chamber simultaneously outputs liquid via multiple nozzles connected in series. Each inlet of a different flow-dividing chamber is connected to its respective flow control valve and flow meter, allowing for individual adjustment of flow rate and velocity. The spray module is equipped with multiple pressure sensors 1163, which can detect changes in the hydraulic details of chambers A and B. The side-spray module allows for more precise control and adjustment of the concentration of lateral metal ion supply, thereby enabling more accurate control of hydraulic pressure and coating thickness. On the side spray module plate where the nozzles are installed, an anode plate 1182 is mounted. The anode plate can be a single piece or multiple sets spliced ​​together. The illustration shows the shape corresponding to the flow distribution cavity. The central square is paired with an outwardly expanding annular anode plate. The anode plate is generally made of titanium, indium, stainless steel, or their composite materials, and can be plate-shaped or mesh-shaped, but is not limited to these. The anode plate is provided with multiple nozzle clearance holes to facilitate the installation and replacement of nozzles. On the top side of the anode plate, multiple anode conductive strips 1181 are branched out from different anode plates, and are respectively connected to the positive terminal of one or more electroplating-specific rectifiers (not shown) by conductive copper wires. The conductive strips can be shielded by an anode junction box 118 to protect the safety of personnel and equipment.

[0088] like Figure 17 and Figure 18 Taking side A as an example, the detailed schematic diagram of the weir adjustment mechanism 115 on side A shows that the camshaft 1153 is connected to the motor 1151 by the coupling 1152. When the motor 1151 rotates, it drives the cam 1154 on the camshaft 1153 to rotate, thereby pushing the opening and closing of the water-blocking gate 1156 below. The water-blocking gate 1156 is in close contact with the cam 1154 by the spring 1155. The water-blocking gate 1156 is directly above the weir 113. The rotation position of the cam can adjust the opening and closing degree of the weir discharge.

[0089] like Figures 19 to 22Taking side B as an example, the detailed description of the opening and closing mechanism 124 of the upper cover on side B is as follows: The opening and closing mechanisms on both sides A and B correspond to the upper position of the conductive hanger 2. At its bottom, there is a horizontal baffle plate 1242. After the conductive hanger 2 is inserted and positioned, the horizontal baffle plates on both sides move closer to the conductive hanger. The ends of the baffle plates have waterproof sealing strips. Finally, the two baffle plates on both sides are tightly attached to the two side walls of the conductive hanger, so that the liquid in the pressure regulating chambers on both sides A and B can only flow out from the weir. The movement of the horizontal baffle plate 1242 and the extension and retraction movement of the cathode conductive pin 1284 are illustrated. In order to reduce the space, pneumatic control is adopted, but electric control can also be used. When the conductive pin is to be ejected, positive air pressure enters the ejection chamber 1244 from the pin ejection air passage 1246, pushing the annular pusher 1286 to eject the pin along the guide plate 1287. At this time, the front end of the ejected pin makes electrical contact with the conductive pad 21' of the conductive hanger 2. The cathode conductive contact 1285 at the end of the conductive pin is connected to the negative terminal (not shown) of the electroplating rectifier by wire, forming a circuit connection. When the pin is to be retracted, positive air pressure enters the retraction chamber 1245 of the pin retraction air passage 1247. At this time, the air pressure pushes the annular pusher 1286 in the reverse direction, pushing the pin back in the reverse direction. Similarly, the transverse baffle 1242 is connected to the transverse baffle telescopic mechanism 1243. When positive air pressure is introduced into the baffle outlet air passage 1288, the transverse baffle extends and is in close contact with the conductive hanger 2. When positive air pressure is introduced into the baffle retraction air passage 1289, the baffle retracts back to its original position.

[0090] Figure 10 and 11 The A / B side stirring curtain 137 / 137' is made of a non-deformable plate material, with multiple rows of elongated holes 1371 penetrating the plate. The curtain moves like a shutter. The two ends of the stirring curtain are connected to the left / right guide shafts 1352' / 1352 respectively. The curtain plate is interconnected with the left / right guide shafts 1352' / 1352 by multiple connectors (bolts / screws) passing through multiple coupling holes 136 (coupling holes 136 are provided on both sides of the hanger guide support frame 13). The left / right guide shafts 1... The top of 352' / 1352 is connected to the left / right curtain motors 135' / 135 via left / right connecting elbows 1351' / 1351. When the motor moves up / down, it drives the stirring curtain to vibrate up / down. The oscillation frequency is about 5 to 8 times per second, but it is not limited to this. The amplitude of each oscillation can be inconsistent, so as to avoid the formation of strip-shaped marks on the surface of the object to be plated and to make the concentration of metal ions in the solution more even in the upper / lower regions of the chamber.

[0091] Conductive mounting brackets can seal circular, square, or irregularly shaped wafers, glass, inorganic substrates, or organic substrates, as well as other materials with conductive seed layers. They can be used as single-sided or double-sided mounting brackets, but are not limited to these. The conductive substrate can be patterned with photoresist, and can also be used on substrates with multiple blind vias or through-holes, or composite structures with patterns, blind vias, and through-holes. The example mounting bracket is shown in a vertical orientation, but this is not a limitation; it can be placed horizontally or at any angle.

[0092] Example 1: Using a fixed opening / closing control mode, the hydraulic pressure for filling the through-holes of the double-sided substrate is adjusted. Chambers A and B each have an inflow rate of 8.2 liters per minute (3.5 liters per minute for bottom inlet and 4.7 liters per minute for side jet). The inverse linear relationship between the gate opening / closing degree and the hydraulic pressure value is shown in the attached diagram. Figure 23 At specified time intervals (e.g., 5-60 seconds), chamber A is adjusted to a fixed 60% / 20% opening degree, while chamber B is adjusted to the opposite 20% / 60% opening degree. This misalignment creates a pressure difference between the two chambers. At this time, the product placed between the two chambers has tens of thousands of through-holes. On the high-pressure side, besides flowing through the weir, some of the chemical discharge will flow into the low-pressure side through these through-holes. Because this significantly restricts the drainage volume at the weir, it causes a rise in hydraulic pressure within the chamber; the same applies to the low-pressure side. Initially, the reciprocating hydraulic pressure remains relatively stable. As the electroplating time increases and due to the characteristics of the electroplating chemicals, the plating layers in the middle of the through-holes gradually connect, and the hydraulic pressure increases slightly. When the plating layers in the middle of the through-holes connect and bridge, the original through-holes become bidirectional blind holes, preventing the chemical from penetrating the product. Under the same drainage volume, this causes a sharp increase in the hydraulic pressure value on the high-pressure side. Figure 24 and 25 Once it can be determined that the metal layer inside the through hole has been or is close to being connected and bridged, the next stage of blind hole electroplating on both sides can be carried out. The two chambers can be restored to the same hydraulic value, maintaining the consistent opening and closing degree of the drain gate. The blind holes are filled and the surface copper is thickened until the hole is filled with metal.

[0093] Example 2: Constant hydraulic pressure control mode, adjusting the gate opening and closing degree to maintain a fixed hydraulic pressure value for high and low reciprocating motion, such as... Figure 26 The point at which the opening and closing degree increases sharply is the time point when the coating in the middle of the hole is bridged.

[0094] The above description is merely a preferred embodiment of the present invention and does not constitute any limitation on the structure of the present invention. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention shall fall within the scope of the technical solution of the present invention.

Claims

1. A wet surface treatment tank structure, comprising a pressure regulating inner tank assembly (1), a conductive hanger (2), and a drainage outer tank (3), wherein the pressure regulating inner tank assembly (1) is disposed within the drainage outer tank (3), and the conductive hanger (2) divides the pressure regulating inner tank assembly (1) into mutually independent pressure regulating chambers A-side (11) and B-side (12), characterized in that: The pressure regulating inner tank assembly (1) includes a hanger guide support frame (13) set in the center; The hanging guide support frame (13) is provided with A / B side upper cover support frame (111 / 121) and A / B side weir baffle (112 / 122) in a horizontal outward direction on both sides. The hanger guide support frame (13), the A / B side weir baffle (112 / 122) and the A / B side upper cover support frame (111 / 121) are connected by screws (131); The top of the A / B side cover support frame (111 / 121) is provided with an A / B side cover opening and closing mechanism (114 / 124). The top of the A / B side weir baffle (112 / 122) is equipped with an A / B side weir adjustment mechanism (115 / 125); the upper part of the transverse side is equipped with an A / B side weir opening (113 / 123) for drainage. The right / left side of the A / B side cover support frame (111 / 121) is equipped with an A / B side stirring curtain (137 / 137') and an A / B side jet module (116 / 126) on the outer sides of the core. After the hanger guide support frame (13) is combined with the A / B side cover support frame (111 / 121) and the A / B side spray module (116 / 126), a chamber that can hold the liquid medicine is formed. After the conductive hanger (2) is inserted, it is divided into two liquid medicine chambers.

2. The wet surface treatment tank structure according to claim 1, characterized in that: The A / B side jet module (116 / 126) has a split chamber (1162 / 1262) with a partitioned layout, including a central array area and at least one annular array area surrounding the central array. The flow rate and velocity of the liquid in each partition area can be independently controlled and adjusted. The A / B side-jet module (116 / 126) is equipped with multiple sets of side-jet nozzles (1161 / 1261), with the side-jet nozzles facing directly towards the conductive hanger. On the other side of the multiple sets of nozzles, multiple sets of flow distribution chambers (1162 / 1262) are connected in parallel or series. The side-jet module is equipped with multiple sets of pressure sensors (1163 / 1263). On both sides of the jet module plate where the nozzles are installed, anode plates (1182 / 1282) are installed. The anode plates can be a single piece or multiple sets spliced ​​together. On one side of the top of the two anode plates, multiple anode conductive strips (1181 / 1281) are connected to the different anode plates.

3. The wet surface treatment tank structure according to claim 1, characterized in that: The A-side weir adjustment mechanism (115) includes a motor (1151), a camshaft (1153) driven by the motor, a cam (1154) set on the camshaft, and a water-blocking gate (1156) pushed by the cam. The opening degree of the water-blocking gate relative to the weir (113) is precisely controlled by the rotational motion of the cam. The water gate (1156) is tightly attached to the cam (1154) by a spring (1155), and the water gate (1156) is directly above the weir (113).

4. The wet surface treatment tank structure according to claim 1, characterized in that: The opening and closing mechanisms on both sides of A / B correspond to the upper part of the conductive hanger (2), and the bottom of it has a horizontal water baffle (1242).

5. The wet surface treatment tank structure according to claim 1, characterized in that: The transverse baffle (1242) and cathode conductive pin (1284) of the B-side upper cover opening and closing mechanism (124) are controlled by the air circuit system; The cathode conductive pin (1284) is configured to be pushed out by air pressure to form an electrical contact with the conductive pad (21) on the conductive hanger (2), or to be retracted by air pressure to disconnect the electrical contact.

6. The wet surface treatment tank structure according to claim 1, characterized in that: The pressure regulating inner tank assembly (1) has a hidden curtain motor box (132) on both sides. The motor box contains the curtain motor (135) that drives the guide shaft (1352), and the motor box is provided with a positive pressure inlet (1321) to maintain positive pressure inside the box for heat dissipation and corrosion protection.

7. The wet surface treatment tank structure according to claim 1, characterized in that: The pressure regulating chambers (11) on the A side and (12) on the B side are also equipped with pressure sensors (1163) arranged at multiple points, which are used to monitor the hydraulic data in the chambers in real time and form a closed-loop control system that is linked with the weir regulating mechanism (115) on the A side, the weir regulating mechanism (125) on the B side, the side jet module (116) on the A side, the side jet module (126) on the B side, the bottom inlet (134) on the A side, and the bottom inlet (134') on the B side.

8. A surface treatment method employing the wet surface treatment tank structure described in any one of claims 1 to 7, characterized in that, Includes the following steps: a) Clamping steps: Install the substrate to be processed on the conductive hanger (2) and insert the hanger into the voltage regulating inner groove assembly (1) so that the substrate divides the inner cavity into the A-side voltage regulating cavity (11) and the B-side voltage regulating cavity (12). b) Sealing and energizing steps: Control the horizontal water baffle (1242) of the A-side cover opening and closing mechanism (114) and the horizontal water baffle (1242) of the B-side cover opening and closing mechanism (124) to move and seal with the hanger, while controlling the cathode conductive pins (1184 / 1284) on both sides to push out and electrically connect with the conductive pads (21 / 21') on both sides of the hanger; c) Drug circulation and pressure regulation steps: A axial drug solution is delivered from bottom to top to both sides of the conductive hanger through the bottom water inlet (32) A-side bottom water inlet (134) and B-side bottom water inlet (134'), and another lateral drug solution is delivered to the pressure regulating chambers on the A and B sides through the A-side side spray module (116) and B-side side spray module (126). The A-side weir adjustment mechanism (115) and B-side weir adjustment mechanism (125) are used to establish and maintain a preset hydraulic pressure difference between the two chambers, so that the drug solution can reciprocate through the through holes or blind holes on the substrate or maintain a consistent pressure balance under the pressure difference driven by the program formula setting. d) Stirring and electroplating steps: Start the stirring curtain (137) on side A and the stirring curtain (137') on side B to vibrate up and down to promote uniform distribution of the solution. At the same time, positive current is passed through the anode plates (1182 / 1282) on both sides and negative electrodes are connected to both sides of the conductive hanger (2) through the cathode conductive pins (1185 / 1285). Electroplating surface treatment is performed at the same time. The aforementioned side-sprayed liquid will pass through the spaced strip holes (1371) of the stirring curtain. The curtain will vibrate, and the position of the strip holes will constantly change, avoiding fixed marks of the jet and achieving the effects of stirring and ion dispersion. In addition, the liquid flowing in from the bottom inlet (134 / 134') will flow from bottom to top across both sides of the substrate, providing the main supply of metal ions, and is not affected by the position of the curtain. e) Drainage and completion steps: The drained liquid from the two pressure regulating chambers is discharged from the gap between the water gate (1156 / 1256) and the weir (113 / 123) into the inner side of the drainage outer tank (3). After it is collected at the bottom of the drainage outer tank, the plating solution is discharged from the drainage outlet (31) of the outer tank. The discharged plating solution is connected to the external filter circulation and chemical addition device, and then circulated back to the bottom water inlet and side spray module on both sides of the pressure regulating inner tank assembly (1). Steps c) to e) described above can be performed synchronously, sequentially, or selectively.

9. The surface treatment method according to claim 8, characterized in that: In step d), when the conductive pin is to be ejected, positive air pressure enters the ejection chamber (1244) from the pin ejection air passage (1246), pushing the annular pusher (1286) to eject the pin along the guide plate (1287). At this time, the front end of the ejected pin makes electrical contact with the conductive pad (21') of the conductive hanger (2), and the cathode conductive contact (1285) at the end of the conductive pin is connected to the negative terminal of the electroplating special rectifier by wire to form a circuit connection. When the pin is to retract, positive air pressure is introduced into the retraction chamber (1245) of the pin retraction air passage (1247). At this time, the air pressure pushes the annular push plate (1286) in the opposite direction, pushing the pin back in the opposite direction. The transverse baffle (1242) is connected to the transverse baffle telescopic mechanism (1243). When positive air pressure is introduced into the baffle ejection air passage (1288), the transverse baffle extends and is in close contact with the conductive hanger (2). When positive air pressure is introduced into the baffle retraction air passage (1289), the baffle retracts back to its original position.

10. The surface treatment method according to claim 8, characterized in that: In step d), the two ends of the stirring curtain are connected to the left and right guide shafts (1352' / 1352) respectively. The curtain plate is interconnected with the shaft by multiple connectors passing through multiple coupling holes (136). The top of the left and right guide shafts (1352' / 1352) is fixed and connected to the left and right curtain motors (135' / 135) by left and right connecting elbows (1351' / 1351) respectively. When the motor moves up and down, it drives the stirring curtain to vibrate up and down. The oscillation frequency is about 5 to 8 times per second.

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