Sectional type air suspension bearing device for dry vacuum pump and assembly method

Abstract

The invention discloses a sectional type air suspension bearing device for a dry vacuum pump and an assembling method, and belongs to the technical field of vacuum pumps. The sectional type air suspension bearing device comprises a first air suspension bearing, a second air suspension bearing, a sealing outer ring seat, an end ring seat and an air gathering shell; a lubricating oil system is completely omitted, and the problems that a large amount of heat is generated due to bearing friction and lubricating oil volatilizes to enter a working cavity to pollute process gas are solved. Meanwhile, mechanical contact friction does not exist in the air film supporting mode, size change and shafting precision instability caused by thermal expansion are reduced, and therefore the reliability and stability of long-term operation of the vacuum pump are improved; the problems that in an existing multi-stage roots vacuum pump, the calorific value is large, the degree of dependence on lubricating oil is high, the process pollution risk is large, mechanical reliability is insufficient due to friction and thermal deformation, leaked gas exists on the peripheral side of a bearing main shaft, and the utilization efficiency of the gas is reduced are effectively solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum pumps, in particular to a segmented aerodynamic bearing device for a dry vacuum pump and an assembling method thereof. BACKGROUND

[0002] In the existing multi-stage Roots vacuum pump structure, the rotor shaft system is usually supported by rolling bearings, and common bearing forms include deep groove ball bearings, angular contact ball bearings or cylindrical roller bearings. Under long-term operation or extreme harsh process conditions of the multi-stage Roots vacuum pump, the existing support mode with rolling bearings as the core still has obvious deficiencies. On the one hand, the rolling bearings generate a large amount of heat under high-speed rotation and multi-stage compression conditions, and the viscosity, high-temperature resistance and oxidation resistance of the lubricating oil are extremely high. Once the lubricating system has insufficient oil supply, oil deterioration or reduced cooling effect, the bearing temperature rise will be abnormal, the wear will be aggravated, and even the bearing will fail. On the other hand, in a high-temperature, high-vacuum or strong corrosive process environment, the lubricating oil has a certain risk of evaporation and gasification, and the evaporated oil vapor may enter the working cavity through the shaft system or the sealing gap, thereby polluting the process gas being pumped, and further affecting the product quality and stability of the downstream process.

[0003] In addition, the gas outside the bearing main shaft reduces the utilization efficiency of the gas. SUMMARY

[0004] The present application relates to the technical field of vacuum pumps, in particular to a segmented aerodynamic bearing device for a dry vacuum pump and an assembling method thereof.

[0005] To solve the above technical problems, the first object of the present application is to provide: A segmented aerodynamic bearing device for a dry vacuum pump, comprising: An aerodynamic assembly comprising at least one first aerodynamic bearing; the first aerodynamic bearing is sleeved on the main shaft; the first aerodynamic bearing is provided with a first air inlet ring groove on the circumferential side; the inner side of the first aerodynamic bearing is provided with a first air inlet hole communicated with the first air inlet ring groove in the radial direction; A sealing outer ring seat for sleeving on the circumferential side of the first aerodynamic bearing; the inside of the sealing outer ring seat is provided with a first gas injection channel communicated with the first air inlet ring groove; the circumferential side of the sealing outer ring seat is provided with a first gas injection hole communicated with the first gas injection channel; Two end ring seats, the end ring seats are sleeved on the main shaft and fixed at both ends of the aerodynamic assembly and abut against the sealing outer ring seat from both sides; The side of the sealing outer ring seat is detachably provided with a gas gathering shell; the gas gathering shell is used for rotatingly sleeving the motor rotor; the inner side wall of the gas gathering shell is provided with a gas gathering ring groove opposite to the main shaft; the outer diameter of the gas gathering ring groove is greater than that of the main shaft; the circumferential side of the gas gathering ring groove is provided with two gas return holes penetrating to the outer side of the gas gathering shell; the gas return holes are provided with gas outlet check valves; the first gas injection hole and the second gas injection hole are both provided with three-way interfaces; the gas outlet check valves and the gas return ends of the three-way interfaces are communicated through a gas return pipe; the three-way interfaces are provided with gas supply ends for supplying external gas sources.

[0006] Further technical solutions are that the main shaft is further sleeved with a second gas suspension bearing; the second gas suspension bearing and the gas dynamic assembly are arranged at intervals; the circumferential side of the second gas suspension bearing is provided with a second gas inlet ring groove; the inner side of the ring of the second gas suspension bearing is radially provided with a second gas inlet hole communicating with the second gas inlet ring groove; The inner part of the sealing outer ring seat is provided with a second gas injection channel communicating with the second gas inlet ring groove; the circumferential side of the sealing outer ring seat is provided with a second gas injection hole communicating with the second gas injection channel.

[0007] Further technical solutions are that the first gas inlet ring groove and the second gas inlet ring groove are respectively provided with first and second blocking blocks for blocking the gas flow; the first and second blocking blocks are respectively away from the first and second gas inlet holes.

[0008] Further technical solutions are that the first gas injection channel and the second gas injection channel are away from each other.

[0009] Further technical solutions are that the sealing outer ring seat comprises a plurality of coaxially spliced sub-ring seats; the first gas injection channel comprises a first main channel and a first sub-channel; adjacent sub-ring seats are communicated through the first main channel; one end of the first sub-channel is communicated with the first main channel, and the other end is communicated with the first gas inlet ring groove.

[0010] Further technical solutions are that the second gas injection channel comprises a second main channel and a second sub-channel; adjacent sub-ring seats are communicated through the second main channel; one end of the second sub-channel is communicated with the second main channel, and the other end is communicated with the second gas inlet ring groove.

[0011] Another object of the present application is to provide: An assembly method of a segmented gas suspension bearing device for a dry vacuum pump, comprising the following steps: S1: preparing and preassembling a bearing assembly The first gas suspension bearing is coaxially sleeved on the main shaft in sequence, and the end faces of the first gas suspension bearings are aligned in contact with each other; A first blocking block is installed in the first air intake ring groove of each of the first air suspension bearings, so that it is located on the side away from the first air intake hole; If the second air suspension bearing is configured, it is sleeved on the main shaft and maintains a set axial distance from the first air suspension bearing, and the second blocking block is installed in its second air inlet ring groove; S2: Assemble the sealing outer ring seat Multiple sub-ring seats are coaxially spliced ​​together along the axial direction and detachably connected into one piece by bolts; Ensure that the first main channel and the second main channel between each of the sub-ring seats are connected and connected, and that the first sub-channel and the second sub-channel are respectively aligned with the positions of the first air intake ring groove of the first air suspension bearing and the second air intake ring groove of the second air suspension bearing; S3: Install the sealing outer ring seat to the pneumatic assembly The assembled sealing outer ring seat is fitted onto the outer periphery of the pneumatic component that has been installed on the main shaft; Adjust the position of the sealing outer ring seat so that the first sub-channel is connected to the first air intake ring groove and the second sub-channel is connected to the second air intake ring groove; S4: Install the end ring seat and fix it axially. The two end ring seats are respectively inserted from both ends of the main shaft so that they contact both ends of the pneumatic assembly; Bolts are used to sequentially pass through the corresponding mounting holes of the end ring seat, the first air suspension bearing, the second air suspension bearing, and the sealing outer ring seat, and appropriate torque is applied to tighten them, thereby achieving axial compression and overall fixation. S5: Install a gas-collecting shell and gas recovery system. The gas-gathering outer shell is installed on one side of the sealing outer ring seat, so that it is rotatably sleeved on the motor rotor; Adjust the position of the gas-gathering outer shell to ensure that its gas-gathering annular groove is directly facing the main shaft but not in contact with the main shaft; Install the exhaust check valve on each of the aforementioned return air ports; The three-way connector is installed on the first air injection hole and the second air injection hole respectively; S6: Connect to the gas system The return pipe is used to connect the outlet check valve on the gas-gathering shell to the return end of the three-way interface; Connect the external gas supply pipeline to the gas delivery end of the three-way interface; Check all gas connection points for leaks; S7: Install the entire assembly onto the vacuum pump Install the assembled device into the pump casing of the dry vacuum pump, and fix the sealing outer ring seat on the pump body or gearbox end cover. Connect the main shaft to the vacuum pump rotor to complete the mechanical assembly; S8: Gas Path Testing and Adjustment Turn on the external air source and supply air to the first air injection port and the second air injection port; Check whether a uniform air film is formed at each air suspension bearing and whether the main shaft achieves non-contact levitation. Monitor whether the gas recovery circuit is circulating normally, and adjust the gas supply pressure until the spindle runs smoothly.

[0012] Compared with the prior art, the beneficial effects of the present invention are: 1. Compared to existing multi-stage Roots vacuum pumps that generally use rolling bearings and rely on lubricating oil for lubrication and cooling, this invention completely eliminates the lubricating oil system, avoiding the problems of excessive heat generated by bearing friction and lubricating oil evaporation entering the working chamber and contaminating the process gas. Simultaneously, the absence of mechanical contact friction under the film-supported design significantly reduces bearing heat generation, minimizes dimensional changes and shaft instability caused by thermal expansion, thereby improving the long-term reliability and stability of the vacuum pump.

[0013] 2. By encapsulating multiple pneumatic bearings with a sealed outer ring seat and securing them axially from both ends with two end ring seats, the segmented air suspension bearing maintains good modularity while ensuring assembly stability, facilitating assembly, maintenance, and replacement. This effectively solves the problems of high heat generation, high dependence on lubricating oil, high risk of process contamination, and insufficient mechanical reliability due to friction and thermal deformation found in existing multi-stage Roots vacuum pumps.

[0014] 3. The second pneumatic bearing, together with the first pneumatic bearing, forms a multi-point air suspension support structure with axial distribution. The second pneumatic bearing also injects gas into the circumference of the main shaft through the second inlet ring groove and the second inlet hole, thereby forming independent air film support areas at corresponding positions. This provides targeted suspension support to different axial positions according to the main shaft length and force distribution, effectively improving the overall rigidity and operational stability of the main shaft and avoiding problems such as air film instability or increased vibration caused by concentrated load in a single support area. This further improves the dynamic stability of the main shaft under high-speed operation, meeting the bearing support performance requirements of multi-stage Roots vacuum pumps under high speed and high load conditions.

[0015] 4. The method of the present invention, through a modular, standardized, and pre-testing assembly process, not only achieves high-precision and high-efficiency installation of segmented air suspension bearings, but also ensures from the manufacturing source that its core advantages of oil-free lubrication, low heat generation, high stability, and easy maintenance are reliably realized. It is especially suitable for high-value, long-cycle industrial equipment such as multi-stage Roots vacuum pumps.

[0016] 5. A gas-collecting shell is provided on one side of the sealing outer ring seat, and a gas-collecting ring groove is formed on its inner side to collect and guide the gas leaking from the circumference of the main shaft. Since the inner diameter of the gas-collecting ring groove is larger than that of the main shaft, contact between the gas-collecting shell and the main shaft can be avoided, thereby eliminating the risk of additional wear. Attached Figure Description

[0017] To make the objectives, technical solutions, and beneficial effects of this invention clearer, the following figures are provided for illustration: Figure 1 This is a three-dimensional diagram of the present invention.

[0018] Figure 2 For the present invention Figure 1 A three-dimensional diagram of the local structure.

[0019] Figure 3 For the present invention Figure 2 A three-dimensional view of the second air suspension bearing mounted on the main shaft.

[0020] Figure 4 For the present invention Figure 2 A three-dimensional view of the first air suspension bearing mounted on the main shaft.

[0021] Figure 5 This is a three-dimensional view of the first air suspension bearing and the second air suspension bearing of the present invention.

[0022] Figure 6 This is a three-dimensional view of the gas-gathering shell of the present invention.

[0023] Icons: Sealing outer ring seat 1, first air injection hole 11, second air injection hole 12, end ring seat 2, first air suspension bearing 3, first air inlet ring groove 31, first blocking block 311, first air inlet hole 32, first air injection channel 4, second air suspension bearing 5, second air inlet ring groove 51, second blocking block 511, second air inlet hole 52, second air injection channel 6, air gathering shell 7, air gathering ring groove 71, air return hole 72, motor rotor 8, air outlet check valve 9, three-way interface 10, air return end 101, air supply end 102. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0025] Example: like Figures 1-6 As shown, the present invention provides a segmented air suspension bearing device for a dry vacuum pump, comprising: a pneumatic assembly, a sealing outer ring seat 1, and two end ring seats 2; the pneumatic assembly includes three first air suspension bearings 3; the three first air suspension bearings 3 are sleeved on a main shaft 4 and in contact with each other; each first air suspension bearing 3 has a first air inlet ring groove 31 on its circumference; the inner side of the ring of the first air suspension bearing 3 has a first air inlet hole 32 that communicates with the first air inlet ring groove 31 along the radial direction; The sealing outer ring seat 1 is used to be sleeved on the periphery of the three first air suspension bearings 3; the interior of the sealing outer ring seat 1 is provided with a first air injection channel 4 communicating with the first air inlet ring groove 31; the periphery of the sealing outer ring seat 1 is provided with a first air injection hole 11 communicating with the first air injection channel 4. Two end ring seats 2 are fitted onto the main shaft and are bolted through to both ends of the pneumatic assembly, and abut against the sealing outer ring seat 1 from both sides.

[0026] The principles and beneficial effects of the above technical solution: By employing a segmented air-suspended bearing structure in the dry vacuum pump, gas dynamic pressure support replaces the traditional rolling bearing support method, enabling the main shaft to be in a non-contact suspended state during operation. Specifically, three first pneumatic bearings are sequentially sleeved along the axial direction of the main shaft and in contact with each other. Gas is uniformly injected into the gap between the main shaft and the bearings through the first radially arranged air inlet 32 ​​on their inner sides, forming a stable gas film between the bearings and the main shaft, thereby achieving radial support and positioning of the main shaft.

[0027] Compared to existing multi-stage Roots vacuum pumps that generally use rolling bearings and rely on lubricating oil for lubrication and cooling, this invention completely eliminates the lubricating oil system, avoiding the problems of excessive heat generated by bearing friction and lubricating oil evaporation entering the working chamber and contaminating the process gas. Simultaneously, the absence of mechanical contact friction under the film-supported design significantly reduces bearing heat generation, minimizes dimensional changes and shaft instability caused by thermal expansion, thereby improving the long-term reliability and stability of the vacuum pump.

[0028] Furthermore, by using a sealing outer ring seat 1 to completely enclose multiple pneumatic bearings, and then securing them axially from both ends with two end ring seats 2, the segmented air suspension bearings maintain good modularity while ensuring assembly stability, facilitating assembly, maintenance, and replacement. This effectively solves the problems existing in current multi-stage Roots vacuum pumps, such as high heat generation, high dependence on lubricating oil, high risk of process contamination, and insufficient mechanical reliability due to friction and thermal deformation.

[0029] In this embodiment, a second air suspension bearing 5 is also sleeved on the main shaft; the second air suspension bearing 5 and the pneumatic components are arranged at intervals; a second air inlet ring groove 51 is provided on the periphery of the second air suspension bearing 5; a second air inlet hole 52 communicating with the second air inlet ring groove 51 is opened radially on the inner side of the ring of the second air suspension bearing 5. The sealing outer ring seat 1 has a second air injection channel 6 inside that communicates with the second air inlet ring groove 51; the sealing outer ring seat 1 has a second air injection hole 12 on its periphery that communicates with the second air injection channel 6.

[0030] The principles and beneficial effects of the above technical solution: Based on the aforementioned pneumatic components, second pneumatic bearings are spaced apart on the main shaft, forming an axially distributed multi-point air suspension support structure with the first pneumatic bearings. The second pneumatic bearings also inject gas into the periphery of the main shaft through the second air inlet ring groove 51 and the second air inlet hole 52, thereby forming independent air film support areas at corresponding positions.

[0031] This structure can provide targeted suspension support at different axial positions based on the spindle length and force distribution, effectively improving the overall rigidity and operational stability of the spindle and avoiding problems such as gas film instability or increased vibration caused by concentrated load in a single support area. This further enhances the dynamic stability of the spindle under high-speed operating conditions, meeting the bearing support performance requirements of multi-stage Roots vacuum pumps under high speed and high load conditions.

[0032] In this embodiment, the first air intake ring groove 31 and the second air intake ring groove 51 are respectively provided with a first blocking block 311 and a second blocking block 511 for blocking the flow of gas; the first blocking block 311 and the second blocking block 511 are respectively far away from the first air intake hole 32 and the second air intake hole 52.

[0033] The principles and beneficial effects of the above technical solution: A first blocking block 311 and a second blocking block 511 are respectively provided in the first air intake ring groove 31 and the second air intake ring groove 51, and the blocking blocks are located on the side away from the air intake hole. Their function is to limit and guide the gas flow in the ring groove.

[0034] Without a baffle block, gas tends to flow randomly in the circumferential direction within the annular groove, potentially causing pressure disturbances at the junction of the inlet and the annular groove. This affects the uniform gas supply to the inner side of the bearing, thereby disrupting the stability of the gas film. By installing a baffle block, ineffective circumferential flow of gas within the annular groove can be effectively blocked, ensuring that the injected gas preferentially enters the inner clearance of the bearing through the inlet, thus guaranteeing uniform gas distribution and stable gas film pressure.

[0035] In this embodiment, the first gas injection channel 4 and the second gas injection channel 6 are far apart from each other.

[0036] The principles and beneficial effects of the above technical solution: By physically isolating the first and second air intake channels within the sealed outer ring seat 1, mutual interference between the air supply systems corresponding to different pneumatic bearings can be avoided. This structure ensures that the gas pressure and flow rate required by each pneumatic bearing are independently controllable, preventing insufficient or fluctuating local air film pressure due to channel series connection or backflow.

[0037] In this embodiment, the sealing outer ring seat 1 includes multiple coaxially spliced ​​sub-ring seats; the multiple sub-ring seats are detachably connected together by bolts; the first gas injection channel 4 includes a first main channel 41 and a first sub-channel 42; adjacent sub-ring seats are connected through the first main channel; one end of the first sub-channel is connected to the first main channel, and the other end is connected to the first annular groove; the second gas injection channel 6 includes a second main channel 61 and a second sub-channel 62; adjacent sub-ring seats are connected through the second main channel; one end of the second sub-channel is connected to the second main channel, and the other end is connected to the second annular groove; specifically, in the sub-ring seat located between the two ends, the first main channel and the second main channel pass through both ends.

[0038] The principles and beneficial effects of the above technical solution: The sealing outer ring seat 1 adopts a structure of multiple coaxially spliced ​​sub-ring seats, which are detachably connected by bolts, so that the first air intake channel and the second air intake channel are respectively composed of a main channel and a sub-channel. This structure not only ensures that the gas can be continuously and stably delivered to the corresponding air intake ring groove in the axial direction, but also facilitates the segmented assembly and disassembly of the outer ring seat according to actual needs.

[0039] In particular, by ensuring that the main channel within the central ring seat is continuous while the ends are not, end leakage can be effectively prevented, thereby improving gas utilization efficiency and gas film stability. This modular structure not only facilitates manufacturing, assembly, and maintenance but also enhances the sealing performance and reliability of the gas circuit system.

[0040] In this embodiment, a gas-gathering shell 7 is detachably provided on one side of the sealing outer ring seat 1; the gas-gathering shell 7 is rotatably sleeved on the motor rotor 8; the inner side wall of the gas-gathering shell 7 is provided with a gas-gathering ring groove 71 facing the main shaft; the outer diameter of the gas-gathering ring groove 71 is larger than the main shaft; two return air holes 72 are provided on the periphery of the gas-gathering ring groove 71, extending to the outside of the gas-gathering shell 7; a one-way valve 9 is provided on the return air hole 72; a three-way interface 10 is provided on both the first air injection hole 11 and the second air injection hole 12; the one-way valve 9 and the return air end 101 of the three-way interface 10 are connected through a return air pipe; the three-way interface 10 is provided with an air supply end 102 for supplying air from an external air source.

[0041] The principles and beneficial effects of the above technical solution: A gas-collecting shell 7 is provided on one side of the sealing outer ring seat 1, and a gas-collecting ring groove 71 is formed on its inner side to collect and guide the gas leaking from the circumference of the main shaft. Since the inner diameter of the gas-collecting ring groove 71 is larger than that of the main shaft, the gas-collecting shell 7 can avoid contact with the main shaft, thereby eliminating the risk of additional wear.

[0042] By setting a return air hole 72 on the gas-gathering shell 7 and using a one-way valve, the recovered gas is redirected back to the return air end 101 of the three-way interface 10, realizing gas recycling and reducing external gas supply consumption. At the same time, the gas-gathering shell 7 is only set outside the vacuum pump, avoiding interference with the internal working chamber of the vacuum pump, and facilitating the arrangement of external gas sources through the motor housing, exposing the gas supply end 102, thus improving the integration and maintainability of the overall system.

[0043] Therefore, this invention ensures the stable operation of the air suspension bearing while achieving effective gas recovery and reuse, further improving the system's economy, safety, and environmental friendliness.

[0044] Another object of the present invention is to provide an assembly method for a segmented air-suspended bearing device for a dry vacuum pump, comprising the following steps: Step 1: Prepare and pre-assemble bearing assemblies Three first air suspension bearings 3 are coaxially sleeved on the main shaft in sequence, and the end faces of each first air suspension bearing 3 are aligned and in contact with each other. A first blocking block 311 is installed in the first air inlet ring groove 31 of each first air suspension bearing 3, so that it is located on the side away from the first air inlet 32; If a second air suspension bearing 5 is configured, it is sleeved on the main shaft and maintains a set axial distance from the first air suspension bearing 3, and a second blocking block 511 is installed in its second air intake ring groove 51.

[0045] Step 2: Assemble the sealing outer ring seat Multiple sub-ring seats are coaxially spliced ​​together along the axial direction and detachably connected into one piece by bolts; Ensure that the first main channel and the second main channel between each sub-ring seat are connected and connected, and that the first sub-channel and the second sub-channel are respectively aligned with the positions of the first air intake ring groove 31 of the first air suspension bearing 3 and the second air intake ring groove 51 of the second air suspension bearing 5.

[0046] Step 3: Install the sealing outer ring seat to the pneumatic assembly The assembled sealing outer ring seat 1 is fitted onto the outer periphery of the pneumatic component that has been installed on the main shaft; Adjust the position of the sealing outer ring seat 1 so that the first sub-channel is connected to the first intake ring groove 31 and the second sub-channel is connected to the second intake ring groove 51.

[0047] Step 4: Install the end ring seat and fix it axially. Insert the two end ring seats 2 into the two ends of the main shaft respectively, so that they contact the two ends of the pneumatic assembly; Bolts are used to sequentially pass through the corresponding mounting holes of the end ring seat 2, the first air suspension bearing 3, the second air suspension bearing 5, and the sealing outer ring seat 1, and appropriate torque is applied to tighten them, thereby achieving axial compression and overall fixation.

[0048] Step 5: Install the gas-gathering shell and gas recovery system An air-gathering shell 7 is installed on one side of the sealing outer ring seat 1, so that it is rotatably sleeved on the motor rotor 8; Adjust the position of the gas-gathering outer shell 7 to ensure that its gas-gathering ring groove 71 is aligned with the main shaft and does not contact the main shaft; Install an exhaust check valve 9 on each vent 72; A three-way connector 10 is installed on the first air injection port 11 and the second air injection port 12 respectively.

[0049] Step 6: Connect the gas system Connect the outlet check valve 9 on the gas-gathering shell 7 to the return end 101 of the three-way interface 10 using the return pipe; Connect the external gas supply pipeline to the gas delivery end 102 of the tee interface 10; Check all gas connection points for leaks to ensure there are no leaks.

[0050] Step 7: Install the entire assembly onto the vacuum pump Install the assembled device into the pump casing of the dry vacuum pump, and fix the sealing outer ring seat 1 on the pump body or gearbox end cover. Connect the main shaft to the vacuum pump rotor to complete the mechanical assembly.

[0051] Step 8: Gas circuit testing and adjustment Turn on the external air source and supply air to the first air injection port 11 and the second air injection port 12; Check whether a uniform air film is formed at each air suspension bearing and whether the main shaft achieves non-contact levitation. Monitor whether the gas recovery circuit is circulating normally, and adjust the gas supply pressure until the spindle runs smoothly.

[0052] The method of this invention, through a modular, standardized, and pre-testing assembly process, not only achieves high-precision and high-efficiency installation of segmented air suspension bearings, but also ensures the reliable realization of their core advantages of oil-free lubrication, low heat generation, high stability, and easy maintenance from the manufacturing source. It is especially suitable for high-value, long-cycle industrial equipment such as multi-stage Roots vacuum pumps.

[0053] Although the invention has been described herein with reference to several illustrative embodiments, it should be understood that many other modifications and implementations can be devised by those skilled in the art, which will fall within the scope and spirit of the principles disclosed herein. More specifically, various variations and modifications can be made to the components and / or layout of the subject matter arrangement within the scope of the disclosure, drawings, and claims. Besides variations and modifications to the components and / or layout, other uses will be apparent to those skilled in the art.

Claims

1. A segmented air-suspended bearing device for a dry vacuum pump, characterized in that, include: A pneumatic assembly includes at least one first air bearing; the first air bearing is sleeved on a main shaft; a first air inlet ring groove is provided on the periphery of the first air bearing; a first air inlet hole communicating with the first air inlet ring groove is opened radially on the inner side of the first air bearing. A sealing outer ring seat is used to be sleeved on the periphery of the first air suspension bearing; the interior of the sealing outer ring seat is provided with a first air injection channel communicating with the first air inlet ring groove; the periphery of the sealing outer ring seat is provided with a first air injection hole communicating with the first air injection channel. Two end ring seats are sleeved on the main shaft and fixed to both ends of the pneumatic assembly, and abut against the sealing outer ring seat from both sides; One side of the sealing outer ring seat is detachably provided with a gas-gathering shell; the gas-gathering shell is used to rotatably fit on the motor rotor; the inner side wall of the gas-gathering shell is provided with a gas-gathering ring groove directly opposite the main shaft; the outer diameter of the gas-gathering ring groove is larger than the main shaft; the periphery of the gas-gathering ring groove is provided with two return air holes that penetrate to the outside of the gas-gathering shell; the return air holes are provided with one-way valves; both the first and second air injection holes are provided with three-way interfaces; the one-way valves are connected to the return air end of the three-way interfaces through a return air pipe; the three-way interfaces are provided with an air supply end for supplying air from an external air source.

2. The segmented air-suspended bearing device for a dry vacuum pump according to claim 1, characterized in that: The main shaft is also fitted with a second air suspension bearing; the second air suspension bearing and the pneumatic component are arranged at intervals; the second air suspension bearing is provided with a second air inlet ring groove on its circumference; the inner side of the second air suspension bearing is radially opened with a second air inlet hole that communicates with the second air inlet ring groove; The sealing outer ring seat has a second air injection channel inside that communicates with the second air inlet ring groove; the sealing outer ring seat has a second air injection hole on its periphery that communicates with the second air injection channel.

3. A segmented air-suspended bearing device for a dry vacuum pump according to claim 2, characterized in that: The first air intake ring groove and the second air intake ring groove are respectively provided with a first blocking block and a second blocking block for blocking the gas flow; the first blocking block and the second blocking block are respectively far away from the first air intake hole and the second air intake hole.

4. A segmented air-suspended bearing device for a dry vacuum pump according to claim 2, characterized in that: The first gas injection channel and the second gas injection channel are far apart from each other.

5. A segmented air-suspended bearing device for a dry vacuum pump according to claim 2, characterized in that: The sealing outer ring seat includes multiple coaxially spliced ​​sub-ring seats; the first gas injection channel includes a first main channel and a first sub-channel; adjacent sub-ring seats are connected through the first main channel; one end of the first sub-channel is connected to the first main channel, and the other end is connected to the first annular groove.

6. A segmented air-suspended bearing device for a dry vacuum pump according to claim 5, characterized in that: The second gas injection channel includes a second main channel and a second sub-channel; adjacent sub-ring seats are connected through the second main channel; one end of the second sub-channel is connected to the second main channel, and the other end is connected to the second annular groove.

7. An assembly method for a segmented air-suspended bearing device for a dry vacuum pump according to any one of claims 1-6, characterized in that: Includes the following steps: S1: Preparation and pre-assembly of bearing assemblies: The first air suspension bearings are sequentially and coaxially sleeved on the main shaft, and the end faces of each first air suspension bearing are aligned and in contact with each other. A first blocking block is installed in the first air intake ring groove of each of the first air suspension bearings, so that it is located on the side away from the first air intake hole; If the second air suspension bearing is configured, it is sleeved on the main shaft and maintains a set axial distance from the first air suspension bearing, and the second blocking block is installed in its second air inlet ring groove; S2: Assemble the sealing outer ring seat: Multiple sub-ring seats are coaxially spliced ​​together along the axial direction and detachably connected into one piece by bolts; Ensure that the first main channel and the second main channel between each of the sub-ring seats are connected and connected, and that the first sub-channel and the second sub-channel are respectively aligned with the positions of the first air intake ring groove of the first air suspension bearing and the second air intake ring groove of the second air suspension bearing; S3: Install the sealing outer ring seat to the pneumatic assembly: The assembled sealing outer ring seat is fitted onto the outer periphery of the pneumatic component that has been installed on the main shaft; Adjust the position of the sealing outer ring seat so that the first sub-channel is connected to the first air intake ring groove and the second sub-channel is connected to the second air intake ring groove; S4: Install the end ring seat and fix it axially: The two end ring seats are respectively inserted from both ends of the main shaft so that they contact both ends of the pneumatic assembly; Bolts are used to sequentially pass through the corresponding mounting holes of the end ring seat, the first air suspension bearing, the second air suspension bearing, and the sealing outer ring seat, and appropriate torque is applied to tighten them, thereby achieving axial compression and overall fixation. S5: Install a gas-concentrating shell and gas recovery system: The gas-gathering outer shell is installed on one side of the sealing outer ring seat, so that it is rotatably sleeved on the motor rotor; Adjust the position of the gas-gathering outer shell to ensure that its gas-gathering annular groove is directly facing the main shaft but not in contact with the main shaft; Install the exhaust check valve on each of the aforementioned return air ports; The three-way connector is installed on the first air injection hole and the second air injection hole respectively; S6: Connect to the gas system: The return pipe is used to connect the outlet check valve on the gas-gathering shell to the return end of the three-way interface; Connect the external gas supply pipeline to the gas delivery end of the three-way interface; Check all gas connection points for leaks; S7: Install the entire assembly onto the vacuum pump: Install the assembled device into the pump casing of the dry vacuum pump, and fix the sealing outer ring seat on the pump body or gearbox end cover. Connect the main shaft to the vacuum pump rotor to complete the mechanical assembly; S8: Gas Path Testing and Adjustment: Turn on the external air source and supply air to the first air injection port and the second air injection port; Check whether a uniform air film is formed at each air suspension bearing and whether the main shaft achieves non-contact levitation. Monitor whether the gas recovery circuit is circulating normally, and adjust the gas supply pressure until the spindle runs smoothly.

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