Method for rapidly forming and processing V-shaped channel micropore array optical element on single transparent glass substrate and prepared micropore array optical element

Abstract

The invention provides a method for rapidly forming and processing a V-shaped channel micropore array optical element on a single transparent glass substrate and the prepared micropore array optical element, and the method comprises the following steps: carrying out synchronous laser drilling on a vertically placed glass sheet by adopting inclined double laser processing heads positioned on the same horizontal base line by utilizing a laser-induced etching technology; and then carrying out wet etching treatment, and rapidly forming and processing the V-shaped channel micropore array optical element on a single transparent glass substrate. The structure of the V-shaped channel is controlled by independently regulating and controlling the inclined angle, the wire length, the energy and the focus processing parameters of laser emitted by each laser processing head; the problems that a traditional straight-channel micro-channel plate is large in positive ion feedback noise, multiple stacked V-shaped and Z-shaped micro-channel plates are poor in position resolution time response performance, and a hot-melt pressure bending micro-channel plate is poor in curvature consistency are solved, and the micro-channel plate can be applied to the field of photoelectric detection imaging requiring low ion feedback, ultrahigh gain and fast time response.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of micro channel plate, in particular to V-shaped channel micro channel plate, and more particularly to a method for rapidly forming and processing V-shaped channel micro hole array optical element on a single transparent glass substrate and a prepared micro hole array optical element. BACKGROUND

[0002] Micro Channel Plate (MCP) is a two-dimensional electron multiplication array with a large number of micron-scale channels. When incident particles (electrons, ions, photons, neutrons, etc.) hit the inner wall of the channel, secondary electrons are generated. These electrons, accelerated by the high-voltage electric field at both ends of the channel, continue to hit the wall, generating more secondary electrons, thereby achieving extremely high gain electron multiplication. The core function is to amplify the input signal.

[0003] Due to the lead glass material used in MCP, the material itself will adsorb H2O, CO, CO2, H2, N2, O2, etc. during the smelting process. In the subsequent hydrogen reduction process, H2 molecules are adsorbed. In the MCP turnover process, affected by the external environment, H2O, O2, N2, CO2, etc. atmospheric components are adsorbed. These adsorbed gases will desorb or ionize when the MCP is working (under high vacuum and electric field), causing noise increase, gain instability, forming positive ion feedback damage to the photocathode, and shortening the service life. Although MCP is assembled into a vacuum image intensifier and other devices for use, it will be subjected to high-temperature baking and electron cleaning and degassing treatment. However, due to the micro-porous channel structure of MCP with a large specific surface area, adsorbed gases such as H2 cannot be completely removed, and ion feedback problems are still serious under high gain conditions, limiting the use of straight channel MCP in high gain, low noise, and long life demand scenarios.

[0004] In the prior art, there are two methods to reduce the positive ion feedback of straight channel array micro channel plate. One of them is to tightly stack two straight channel MCPs at a certain angle into a V shape, where the angle of the two pieces is usually 5°-15°, and the channel direction is correspondingly inclined, or to assemble three straight channel MCPs in a specific order and electrical connection method. The middle piece of the three MCPs is applied with an opposite bias voltage relative to the upper and lower two pieces, so that the electron flight path forms a "Z" shape. This V-shaped and Z-shaped MCP assembled by multiple pieces forms a "Z" shape. Through the continuous multiplication of electrons in two to three MCPs in turn, the "ion barrier" is formed by the reverse bias of the second MCP, achieving ultra-low ion feedback. However, due to the design of the V-shaped / Z-shaped MCP combination of multiple stacked pieces, there are problems of electron transit path lengthening and difficulty in accurately aligning the channels of multiple MCPs. Compared with the straight channel single MCP, the time response characteristic and spatial resolution of the V-shaped / Z-shaped MCP combination are poor, and it is difficult to apply to the micro-light imaging field.

[0005] The second solution is to perform hot bending treatment on the straight channel micro-hole array to make the channels produce random and gentle bending, forming a curved micro-channel structure, which can effectively suppress ion feedback and maintain good time response and high spatial resolution, and can meet more than 90% of application requirements such as image intensifiers, photomultiplier tubes, and mass spectrometer detectors. For example, in the United States in the last century, a hot bending treatment method for MCP was proposed, but after bending, the channel deforms, and the curvature consistency of millions of channels is poor, resulting in problems such as uneven gain and reduced resolution. Therefore, in 2023, China Building Material Scientific Research and Design Institute Co., Ltd. proposed a design scheme of centrifugal bending of a micro-channel plate, and disclosed a centrifugal bending equipment and a micro-channel plate prepared by using the same in a patent application with publication number CN119626868A. The straight channel type micro-channel blank plate is bent at a certain angle, and then the bent blank plate is sliced, polished and etched to form a curved channel array, thereby solving the problems of channel aperture deformation and inconsistent bending curvature. However, this technical solution has an unavoidable problem, that is, the long cuboid with a length×width size≥30mm×30mm and a height≥45mm-60mm after the screen is arranged, the actual curvature of the bending is the curvature of the cuboid, and the curvature consistency of millions of channels is acceptable, but the curvature of each piece of MCP after slicing is different from the required curvature value of a single piece of MCP, and it is difficult to guarantee the consistency and reliability requirements of batch production. SUMMARY

[0006] In view of the technical problems existing in the prior art, the present application aims to provide a method for rapidly forming and processing a V-shaped channel micro-hole array optical element on a single transparent glass substrate. The method uses laser-induced etching technology and employs inclined double laser processing heads located on the same horizontal baseline to perform synchronous laser drilling on a vertically placed glass sheet. Then, the glass sheet is subjected to wet etching treatment to rapidly form and process a V-shaped channel micro-hole array optical element on a single transparent glass substrate. By individually adjusting the inclination angle, wire length, energy, and focal point processing parameters of each laser processing head, the structure of the V-shaped channel can be controlled, thereby solving the problems of large positive ion feedback noise of traditional straight channel micro-channel plates, poor position resolution and time response performance of multi-piece stacked V-shaped and Z-shaped micro-channel plates, and poor curvature consistency of hot melting and bending micro-channel plates. The method can be applied to the field of photoelectric detection imaging that requires low ion feedback, ultra-high gain, and fast time response.

[0007] According to the purpose of the present application, a method for rapidly forming and processing a V-shaped channel micro-hole array optical element on a single transparent glass substrate is provided, which comprises: A glass sheet of a certain thickness is fixed vertically on the upper surface of the XYZ three-axis motion platform of the laser device. The positions of the laser processing heads located on the left and right sides of the glass sheet are adjusted so that the point on the glass sheet where the laser beam emitted from the laser processing head is focused is at the same position, that is, the projection of the focal point of the beam emitted from one side on the other side completely coincides with the focal point of the beam emitted from the other side. Adjust the focusing beam filament length and tilt angle of the laser processing heads on the left and right sides respectively to control the turning angle of the V-shaped channel processed on the glass sheet; The motion platform of the laser equipment moves mechanically along the YZ axis to control the motion trajectory. The laser processing heads on the left and right sides of the glass sheet drill holes point by point according to the set pattern. The perforated glass sheet is subjected to wet etching treatment, and the etching parameters are controlled to adjust the aperture to the target value, forming a V-shaped channel micro-aperture array optical element.

[0008] As an optional implementation, the glass sheet is fixed in a metal clamp along the vertical direction. The metal clamp has a base that is fastened to the XYZ three-axis motion platform and a U-shaped groove defined by an ear extending upward from the base. The glass sheet is installed in the U-shaped groove and fastened from the left and right sides by plastic fasteners.

[0009] As an optional implementation, the glass sheet is moved within the YZ plane by YZ axis motion control.

[0010] As an optional implementation, the laser processing heads located on the left and right sides of the glass sheet adopt the same optical path system and have the same processing parameters to ensure fixed-point and timed processing.

[0011] As an optional implementation, by adjusting the left and right laser processing heads to be on the same horizontal line, and by determining the intersection point of the left and right laser outputs by the tilt angle of the left and right laser processing heads and the relative position distance of the glass sheet being processed, the glass sheet is moved along the X-axis so that the intersection point is placed in the middle of the glass sheet. During processing, the timing of the left and right laser pulses is controlled to be consistent to ensure synchronous processing at fixed points and times.

[0012] As an optional implementation, the turning angle of the V-shaped channel can be controlled and adjusted to adapt to the requirements of different aspect ratios and aperture channels for turning curvature.

[0013] As an optional implementation, by changing the focus of the laser processing heads on the left and right sides, the effective processing depth is adjusted, and the cross point of the left and right emitted lasers is controlled to be finely adjusted in the X-axis direction inside the glass substrate, thereby controlling the V-turn point of the V-shaped channel. At the same time, by changing the tilt angle of the left and right laser processing heads, the turning angle of the V-shaped channel can be adjusted.

[0014] As an optional implementation, the laser-modified channels are treated by wet etching to form the final V-shaped channel micropore array. The etching solution is a mixed solution of HF / NH4F / H2O with 0.1wt%~5wt% fluorocarbon surfactants added, wherein the concentration of HF and NH4F is 1vol%~20vol%. The pore size of the V-shaped channels is controlled by controlling the temperature, concentration and etching time of the etching solution.

[0015] As an optional embodiment, the thickness of the glass sheet is 0.1mm-1mm.

[0016] According to the purpose of this invention, a V-shaped channel micro-aperture array optical element prepared by the above method is also proposed. A resistive layer and an emitting layer are prepared on the substrate end face and / or within the micro-aperture channel forming the through-hole structure of the obtained V-shaped channel micro-aperture array optical element. Metal electrode layers are respectively deposited on both end faces of the V-shaped channel micro-aperture array substrate to form a V-shaped channel micro-channel product.

[0017] The present invention provides a method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a single transparent glass substrate. Addressing the issues of inconsistent channel deformation and curvature in existing wire-drawn micro-aperture array fabrication methods using hot-melt bending, and the contradiction between the low ion feedback / high gain and time response / spatial resolution performance of existing straight-channel MCPs and V / Z-shaped stacked MCPs, the present invention employs a symmetrical dual-laser fixed-point timing processing system. This system performs fixed-point, timing, and synchronous point-to-point laser cutting of the glass sheet on both sides. Combined with the control and adjustment of the V-shaped channel turning angle and subsequent wet etching, the etching parameters are controlled to adjust the aperture to the target value, forming a V-shaped channel micro-aperture array optical element. This achieves the fabrication of a V-shaped channel array plate with precisely controllable curvature. Furthermore, a resistive layer and an emitter layer are deposited on the obtained V-shaped channel array plate, and input and output electrodes are plated, thereby preparing a functionalized microchannel plate product. According to a first aspect of the present invention, a method for rapidly forming and processing V-shaped channel micro-hole array optical elements on a single transparent glass substrate is proposed. Based on laser-induced etching technology, a symmetrical dual-laser fixed-point timing processing system is built to perform apex-timed synchronous laser drilling on a vertically placed glass sheet from the left and right sides. After that, wet etching is performed to enlarge the laser-modified channels, thereby forming a V-shaped channel micro-hole array structure, fundamentally solving the problem of inconsistent curvature of each piece caused by hot bending and slicing of the entire section.

[0018] The technical advantage of the method in the first aspect of the present invention lies in the fact that, using a glass sheet as a substrate, the glass sheet sample is vertically fixed on the XYZ three-axis motion platform of the laser processing equipment, rather than being placed horizontally as is conventional. The glass sheet is moved according to the design pattern plane by the YZ axis motion control. Laser processing heads that are on the same baseline and symmetrical are assembled on the left and right sides of the glass sheet. The intersection point of the left and right laser outputs is determined by the tilt angle of the left and right laser processing heads and the relative position distance of the glass sheet being processed. The glass sheet is moved in the X-axis direction so that the intersection point is placed in the middle position of the glass sheet. During processing, the timing of the left and right laser pulses is controlled to be consistent, so as to achieve fixed-point and timed processing, ensure the continuous connection of the left and right channels, and avoid misalignment.

[0019] The technical advantage of the method in the first aspect of this invention lies in its ability to synchronously and independently control the process parameters of the laser processing heads on both sides, thereby achieving V-shaped channel processing with different turning angles. As an optional implementation, the effective processing depth is adjusted by changing the wire length and focal point of the left and right laser processing heads; the intersection point of the left and right emitted lasers is finely adjusted left and right along the X-axis inside the glass substrate, thereby controlling the V-turn point of the V-shaped channel; simultaneously, the tilt angle of the left and right laser processing heads is changed to jointly adjust the turning angle of the V-shaped channel.

[0020] It should be understood that all combinations of the foregoing concepts and the additional concepts described in more detail below may be considered part of the inventive subject matter of this disclosure, provided that such concepts do not contradict each other. Furthermore, all combinations of the claimed subject matter are considered part of the inventive subject matter of this disclosure.

[0021] The foregoing and other aspects, embodiments, and features of the teachings of the present invention will be more fully understood from the following description in conjunction with the accompanying drawings. Other additional aspects of the invention, such as features and / or beneficial effects of exemplary embodiments, will become apparent from the following description or may be learned through practice of specific embodiments according to the teachings of the present invention. Attached Figure Description

[0022] The accompanying drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component shown in the various figures may be denoted by the same reference numeral. For clarity, not every component is labeled in each figure. Embodiments of various aspects of the invention will now be described by way of example and with reference to the accompanying drawings.

[0023] Figure 1 This is a schematic diagram of processing V-shaped channel micro-hole array optical elements based on a symmetrical dual-laser processing head system according to an embodiment of the present invention.

[0024] Figure 2 This is a schematic diagram of a V-shaped channel according to an embodiment of the present invention.

[0025] Figure 3a, 3b 3c and 3c respectively illustrate different V-shaped channel structures according to embodiments of the present invention.

[0026] Figure 4 This is a schematic diagram of the movement trajectories of electrons and positive ions within a V-shaped channel according to an embodiment of the present invention.

[0027] The meanings of the various reference numerals in the diagram are as follows: Figure 1 In the middle: 1. XYZ axis motion platform; 2. Glass sheet fixing metal clamp; 3. Metal screw; 4. Plastic screw; 5. Right laser processing head; 6. Left laser processing head; 7. Glass sheet.

[0028] Figure 2 In the middle: 11. Distance between the V-shaped angle and the end face; 12. Channel wall; 13. Hollow channel; 14. V-shaped angle.

[0029] In Figure 3: 21. Tilting angle of the right laser processing head; 22. Tilting angle of the left laser processing head; 23. Location of the turning point.

[0030] Figure 4 In the middle: 31. Initial input electrons; 32. Electrons after multiplication; 33. Gas molecules; 34. Positive ions. Detailed Implementation

[0031] To better understand the technical content of the present invention, specific embodiments are described below in conjunction with the accompanying drawings.

[0032] Various aspects of the invention are described in this disclosure with reference to the accompanying drawings, which illustrate numerous illustrative embodiments. The embodiments of this disclosure are not necessarily intended to encompass all aspects of the invention. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed herein are not limited to any particular implementation. Furthermore, some aspects of the invention disclosed may be used alone or in any suitable combination with other aspects of the invention disclosed.

[0033] {Example 1} Combination Figures 1 to 4 As shown, the method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate according to an embodiment of the present invention is applied in the fabrication process of microchannel plate micro-aperture array substrates that combine low ion feedback, ultra-high gain, and fast time response performance. The method includes the following steps: A glass sheet 7 of a certain thickness is fixed vertically to the upper surface of the XYZ three-axis motion platform 1 of the laser equipment. The positions of the laser processing heads (the first laser processing head 5 on the left and the second laser processing head 6 on the right) located on the left and right sides of the glass sheet 7 are adjusted so that the points where the laser beams emitted from the two laser processing heads are focused on the glass sheet are at the same position. Figure 1 As shown, the projection of the focal point of the beam emitted from one side onto the other side completely coincides with the focal point of the beam emitted from the other side. Adjust the focusing beam filament length and tilt angle of the laser processing heads on the left and right sides respectively to control the turning angle of the V-shaped channel processed on the glass sheet; The motion platform of the laser equipment moves mechanically along the YZ axis to control the motion trajectory. The laser processing heads on the left and right sides of the glass sheet drill holes point by point according to the set pattern. The perforated glass sheet is subjected to wet etching treatment, and the etching parameters are controlled to adjust the aperture to the target value, forming a V-shaped channel micro-aperture array optical element.

[0034] As an optional implementation, the glass sheet is fixed in a metal clamp 2 along the vertical direction. The metal clamp 2 has a base 3 that is fastened to the XYZ three-axis motion platform and a U-shaped groove defined by an ear 8 extending upward from the base. The glass sheet is installed in the U-shaped groove and fastened from the left and right sides by plastic fasteners 4 respectively.

[0035] As an optional implementation, the glass sheet is moved within the YZ plane by YZ axis motion control.

[0036] As an optional implementation, the laser processing heads located on the left and right sides of the glass sheet adopt the same optical path system, and the processing parameters of the two are the same to ensure fixed-point and timed processing.

[0037] As an optional implementation method, such as Figure 1 , combined Figure 2 As shown, by adjusting the left and right laser processing heads to be on the same horizontal line, and by determining the intersection point of the left and right laser outputs by the tilt angle of the left and right laser processing heads and the relative position distance of the glass sheet being processed, the glass sheet is moved along the X-axis to place the intersection point in the middle of the glass sheet. During processing, the timing of the left and right laser pulses is controlled to be consistent to ensure synchronous processing at fixed points and times.

[0038] As an optional implementation, the turning angle of the V-shaped channel can be controlled and adjusted to adapt to the requirements of different aspect ratios and aperture channels for turning curvature.

[0039] As an optional implementation method, such as Figure 3a , 3bAs shown in the example of 3c, by changing the focus of the laser processing heads on the left and right sides, the effective processing depth is adjusted, and the cross point of the left and right emitted lasers is controlled to be finely adjusted in the X-axis direction inside the glass substrate, thereby controlling the V-turn point of the V-shaped channel. At the same time, such as Figure 3a , 3b As shown in Figures 3c and 3c, by changing the tilt angles of the left and right laser processing heads, the V-shaped channel turning angle can be adjusted.

[0040] As an optional implementation, the laser-modified channels are treated by wet etching to form the final V-shaped channel micropore array. The etching solution is a mixed solution of HF / NH4F / H2O with 0.1wt%~5wt% fluorocarbon surfactants added, wherein the concentration of HF and NH4F is 1vol%~20vol%. The pore size of the V-shaped channels is controlled by controlling the temperature, concentration and etching time of the etching solution.

[0041] As an optional embodiment, the thickness of the glass sheet 7 is adapted to be between 0.1 mm and 1 mm.

[0042] According to the purpose of this invention, a V-shaped channel micro-aperture array optical element prepared by the above method is also proposed. A resistive layer and an emitting layer are prepared on the substrate end face and / or within the micro-aperture channel forming the through-hole structure of the obtained V-shaped channel micro-aperture array optical element. Metal electrode layers are respectively deposited on both end faces of the V-shaped channel micro-aperture array substrate to form a V-shaped channel micro-channel product.

[0043] {Example 2} In this embodiment, we will further elaborate on the implementation of the method of the foregoing embodiment with reference to the accompanying drawings.

[0044] In this embodiment, the method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate includes the following processes: Select a transparent glass sheet with a thickness of 0.1mm-1mm and fix it on a metal clamp. The metal clamp is a convex metal block with a groove in the convex part. The glass sheet is clamped in the groove, and the glass sheet is fixed by tightening the plastic screws on the left and right sides of the groove. The metal clamp is then fixed to the XYZ axis sample of the laser device by screws, thus transforming the conventional horizontal XY movement into vertical YZ movement. On the left and right sides of the laser processing sample stage, that is, on the left and right sides of the vertically placed glass sheet, a dual-optical-path system and dual laser processing heads are assembled. When the glass sheet moves according to the set pattern, the dual laser processing heads on the left and right sides emit light simultaneously to perform laser drilling. The beams are focused on the same point on the glass sheet. The control system of each laser processing head is independent. By individually adjusting the parameters such as the tilt angle, filament length, energy, and focus of the laser emitted by each laser processing head, V-shaped channel processing with different turning angles can be achieved.

[0045] After laser drilling of glass sheets, the holes are enlarged by wet etching. The etching solution is a mixed solution of HF / NH4F / H2O with 0.1wt%~5wt% of perfluorobutylsulfonyl and other fluorocarbon surfactants. The concentration of HF and NH4F is 1vol%~20vol%. The temperature, concentration and etching time of the etching solution are controlled to precisely control the diameter of the V-shaped channel.

[0046] Finally, the device is cleaned and dried using deionized water and ethanol to obtain a V-shaped channel micro-aperture optical element. A resistive layer and an emitting layer are then deposited, and electrodes are plated. Specifically (using existing coating processes): a resistive layer and an emitting layer are prepared on the substrate end face and / or within the micro-aperture channel forming the through-hole structure of the V-shaped channel micro-aperture optical element. Metal electrode layers are plated on both end faces of the V-shaped channel micro-aperture substrate, thereby obtaining a V-shaped channel micro-channel product and fabricating a functionalized V-shaped channel micro-channel plate.

[0047] Preparation Example 1 (1) Corning fused silica glass was selected for this preparation example 1. After shaping, slicing, fine grinding and polishing, the thickness of the final glass sheet was 0.3 mm. (2) Place the glass sheet vertically into the convex metal clamp with grooves, tighten the plastic screws on the left and right sides of the grooves to strengthen the fixation of the glass sheet, and then fix the metal clamp to the XYZ axis motion platform of the laser processing equipment with metal screws, and use the YZ axis motion of the platform to control the two-dimensional plane movement of the glass sheet. (3) Adjust the position of the laser processing head on the left and right sides of the laser processing sample stage so that they are on the same baseline and tilted at the same angle. The two are symmetrical to each other, so that the laser beams emitted from the left and right laser processing heads are focused on the glass sheet at the same position. The laser tilt angle of the left and right laser processing heads is set to 9°, the wire length is 0.5mm, and the focal point is raised 100μm relative to the surface of the glass sheet. The glass sheet is located in the middle of the left and right laser processing heads. (4) The laser-modified glass sheet is placed in a mixed solution of HF / NH4F / H2O with 1 wt% perfluorobutylsulfonyl added and stirred. The volume ratio of HF / NH4F / H2O is 1:1:2, the concentration of the core component HF is 1 vol%~20 vol%, the temperature of the etching solution is 5℃~30℃, and the etching time depends on the array design aperture and the concentration / temperature of the etching solution. For example, if the aperture is 5 μm, the etching time is 10~300 min. (5) After etching, the glass sheet was subjected to alternating ultrasonic treatment with deionized water and ethanol three times, with each solution ultrasonicated for 15 minutes. Then it was transferred to an oven and vacuum baked at 200°C for 2 hours to obtain V-shaped channel micro-hole array optical element.

[0048] Based on this example 1, a V-shaped channel micro-aperture array optical element was fabricated, with the V-shaped bend point located in the middle of the channel, such as... Figure 3a As shown, the upper and lower parts of the channel are symmetrical.

[0049] Preparation Example 2

[0050] (1) Corning fused silica glass was selected for this preparation example 2. After shaping, slicing, fine grinding and polishing, the thickness of the final glass sheet was 0.3 mm. (2) Place the glass sheet vertically into the convex metal clamp with grooves, tighten the plastic screws on the left and right sides of the grooves to strengthen the fixation of the glass sheet, and then fix the metal clamp to the XYZ axis motion platform of the laser processing equipment with metal screws, and use the YZ axis motion of the platform to control the two-dimensional plane movement of the glass sheet. (3) Adjust the positions of the laser processing heads on the left and right sides of the laser processing sample stage so that they are on the same baseline and tilted at the same angle. The two are symmetrical to each other, so that the laser beams emitted from the left and right laser processing heads are focused on the glass sheet at the same position. The laser tilt angle of the left laser processing head is set to 9°, the wire length is 0.3mm, and the focal point is raised 100μm relative to the surface of the glass sheet. The laser tilt angle of the right laser processing head is set to 9°, the wire length is 0.5mm, and the focal point is raised 50μm relative to the surface of the glass sheet. The glass sheet is located in the middle of the left and right laser processing heads. (4) The laser-modified glass sheet is placed in a mixed solution of HF / NH4F / H2O with 1 wt% perfluorobutylsulfonyl added and stirred. The volume ratio of HF / NH4F / H2O is 1:1:2, the concentration of the core component HF is 1 vol%~20 vol%, the temperature of the etching solution is 5℃~30℃, and the etching time depends on the array design aperture and the concentration / temperature of the etching solution. For example, if the aperture is 5 μm, the etching time is 10~300 min. (5) After etching, the glass sheet was subjected to alternating ultrasonic treatment with deionized water and ethanol three times, with each solution ultrasonicated for 15 minutes. Then it was transferred to an oven and vacuum baked at 200°C for 2 hours to obtain V-shaped channel micro-hole array optical element.

[0051] Based on this example 2, a V-shaped channel micro-aperture array optical element was fabricated, with the V-shaped bend point located on the left side of the channel, such as... Figure 3b As shown, but the turning angle is the same as in Example 1.

[0052] Preparation Example 3

[0053] (1) Corning fused silica glass was selected for this preparation example 3. After shaping, slicing, fine grinding and polishing, the thickness of the final glass sheet was 0.3 mm. (2) Place the glass sheet vertically into the convex metal clamp with grooves, tighten the plastic screws on the left and right sides of the grooves to strengthen the fixation of the glass sheet, and then fix the metal clamp to the XYZ axis motion platform of the laser processing equipment with metal screws, and use the YZ axis motion of the platform to control the two-dimensional plane movement of the glass sheet. (3) Adjust the positions of the laser processing heads on the left and right sides of the laser processing sample stage so that they are on the same baseline and tilted at the same angle. The two are symmetrical to each other, so that the laser beams emitted from the left and right laser processing heads are focused on the glass sheet at the same position. The laser tilt angle of the left laser processing head is set to 5°, the wire length is 0.5mm, and the focal point is raised 100μm relative to the surface of the glass sheet. The laser tilt angle of the right laser processing head is set to 9°, the wire length is 0.5mm, and the focal point is raised 100μm relative to the surface of the glass sheet. The glass sheet is located in the middle of the left and right laser processing heads. (4) The laser-modified glass sheet is placed in a mixed solution of HF / NH4F / H2O with 1 wt% perfluorobutylsulfonyl added and stirred. The volume ratio of HF / NH4F / H2O is 1:1:2, the concentration of the core component HF is 1 vol%~20 vol%, the temperature of the etching solution is 5℃~30℃, and the etching time depends on the array design aperture and the concentration / temperature of the etching solution. For example, if the aperture is 5 μm, the etching time is 10~300 min. (5) After etching, the glass sheet was subjected to alternating ultrasonic treatment with deionized water and ethanol three times, with each solution being ultrasonicated for 15 minutes. Then it was transferred to an oven and vacuum baked at 200°C for 2 hours to obtain V-shaped channel micro-pore array optical elements. Based on this example 3, a V-shaped channel micro-aperture array optical element was fabricated, with the V-shaped bend point located in the middle of the channel. Figure 3c As shown, but the turning angle is smaller than that of Example 1 and Example 2.

[0054] {Test Comparison} Based on the above fabrication examples 1-3, and following the fabrication method described above, a V-shaped channel micro-aperture array optical element was fabricated. Figure 3a , 3b The inflection point positions and inflection angles of the example shown in 3c are shown in Table 1 below.

[0055] Table 1. Comparison of test data for V-shaped channel micro-aperture array optical elements in various fabrication examples.

[0056]

[0057] Therefore, it can be seen that the manufacturing method of the V-shaped channel array plate optical element (microchannel array plate) according to the above embodiments of the present invention can adjust the position and turning angle of the V-shaped corner by only changing the tilt angle, wire length, focus and other parameters of the left and right laser processing heads. Combined with wet etching treatment, V-shaped channel micro-hole array optical elements with different V-shaped structures can be prepared.

[0058] Based on this, a resistive layer and an emitting layer can be further prepared on the end face of the V-shaped channel micro-aperture array optical element and / or within the micro-aperture channel forming a through-hole structure, and a metal electrode layer can be deposited on both end faces of the V-shaped channel micro-aperture array optical element to obtain a functionalized V-shaped channel microchannel plate.

[0059] like Figure 4 As shown, it represents based on Figure 3a The example shown illustrates the movement trajectories of electrons and positive ions within a single V-channel of the V-shaped channel array optical element. Compared to a straight-channel microchannel plate, this effectively reduces positive ion feedback and lowers ion feedback noise.

[0060] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Those skilled in the art can make various modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention shall be determined by the claims.

Claims

1. A method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate, characterized in that, include: A glass sheet (7) of a certain thickness is fixed vertically on the upper surface of the XYZ three-axis motion platform (1) of the laser device. The positions of the laser processing heads (5, 6) located on the left and right sides of the glass sheet (7) are adjusted so that the points on the glass sheet where the laser beam emitted from the laser processing head (5, 6) is focused are at the same position, that is, the projection of the focal point of the beam emitted from one side on the other side is completely coincident with the focal point of the beam emitted from the other side. Adjust the focusing beam filament length and tilt angle of the laser processing heads (5, 6) on the left and right sides respectively to control the turning angle of the V-shaped channel processed on the glass sheet (7); The motion platform of the laser equipment moves mechanically along the YZ axis to control the motion trajectory. The laser processing heads (5, 6) on the left and right sides of the glass sheet (7) drill holes point by point according to the set pattern. The perforated glass sheet is subjected to wet etching treatment, and the etching parameters are controlled to adjust the aperture to the target value, forming a V-shaped channel micro-aperture array optical element.

2. The method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate according to claim 1, characterized in that, The glass sheet is fixed in a metal clamp along the vertical direction. The metal clamp has a base (2) that is fastened to the XYZ three-axis motion platform (1) and a U-shaped groove defined by an ear (8) extending upward from the base (2). The glass sheet (7) is installed in the U-shaped groove and fastened from the left and right sides by plastic fasteners (4).

3. The method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate according to claim 1, characterized in that, The glass sheet (7) is moved within the YZ plane by controlling the motion along the YZ axis.

4. The method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate according to claim 1, characterized in that, The laser processing heads (5, 6) located on the left and right sides of the glass sheet (7) adopt the same optical path system and have the same processing parameters to ensure fixed-point and timed processing.

5. The method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate according to claim 4, characterized in that, By adjusting the left and right laser processing heads to be on the same horizontal line, and by determining the relative position distance between the tilt angles of the left and right laser processing heads and the glass sheet being processed, the intersection point of the left and right emitted lasers is determined. The glass sheet is then moved along the X-axis to place the intersection point in the middle of the glass sheet. During processing, the timing of the left and right laser pulses is controlled to be consistent.

6. The method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate according to claim 1, characterized in that, By controlling and adjusting the turning angle of the V-shaped channel, it is used to adapt to the requirements of different aspect ratios and aperture channels for turning curvature.

7. The method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate according to claim 6, characterized in that, By changing the focus of the laser processing heads on the left and right sides, the effective processing depth is adjusted, and the intersection of the left and right emitted lasers is finely adjusted in the X-axis direction inside the glass substrate, thereby controlling the V-turn point of the V-shaped channel. At the same time, by changing the tilt angle of the left and right laser processing heads, the turning angle of the V-shaped channel can be adjusted.

8. The method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate according to any one of claims 1-7, characterized in that, The laser-modified channels are treated by wet etching to form a final V-shaped channel micropore array. The etching solution is a mixed solution of HF / NH4F / H2O with 0.1wt%~5wt% fluorocarbon surfactants added, wherein the concentration of HF and NH4F is 1vol%~20vol%. The pore size of the V-shaped channels is controlled by controlling the temperature, concentration and etching time of the etching solution.

9. The method for rapidly fabricating V-shaped channel micro-aperture array optical elements on a monolithic transparent glass substrate according to any one of claims 1-7, characterized in that, The thickness of the glass sheet is 0.1mm-1mm.

10. A V-shaped channel micro-aperture array optical element, characterized in that, The method described in any one of claims 1-9 is used to prepare the V-shaped channel micro-aperture optical element; a resistive layer and an emitting layer are prepared on the substrate end face and / or within the micro-aperture channel forming the through-hole structure of the obtained V-shaped channel micro-aperture optical element; metal electrode layers are deposited on both end faces of the V-shaped channel micro-aperture substrate to form a V-shaped channel micro-channel product.

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