Deburring and polishing method for yttrium oxide ceramic nozzle

Abstract

The invention discloses a deburring and polishing method for an yttrium oxide ceramic nozzle. The deburring and polishing method comprises the steps that S1, pretreatment is conducted; s2, precisely removing burrs; and S3, surface polishing. And aiming at the characteristics of high hardness and high brittleness of the yttrium oxide ceramic, a step-by-step strategy of firstly deburring and then polishing is adopted. And in the deburring stage, a micro sand blasting technology in which low air pressure is matched with a soft abrasive material is adopted, selective removal is carried out by utilizing the difference between burrs and body structural strength, and edge breakage and cracks easily caused by a traditional method are effectively avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision ceramic processing, and particularly relates to a deburring and polishing method for a yttria ceramic nozzle. BACKGROUND

[0002] Yttria ceramic is widely used in fields requiring high wear resistance and corrosion resistance, such as semiconductor sandblasting nozzles and spraying nozzles, due to its high purity, high corrosion resistance, excellent chemical stability and thermal shock resistance. However, these excellent properties also make the precision machining of the formed yttria ceramic extremely difficult.

[0003] Yttria ceramic nozzles are usually made by sintering. After sintering, micro burrs and flash are formed at the through holes of the nozzles, especially at the inlet and outlet. The presence of these burrs can significantly affect the fluid dynamics performance of the nozzle, causing unstable flow, poor atomization effect, easy clogging and other problems, and may contaminate the working medium or damage the equipment due to burr shedding. Therefore, deburring and surface polishing are crucial to ensure and improve the performance of the nozzle. For hard and brittle material ceramics, conventional mechanical methods (such as scraping with hard tools) are prone to cause chipping or micro-cracks on the ceramic surface, or even damage the entire part. Chemical polishing and other methods may not be effective due to the excellent chemical inertness of yttria ceramic, or may pose an environmental pollution risk. Therefore, the prior art lacks a special method for efficiently and non-destructively deburring and polishing yttria ceramic nozzles. SUMMARY

[0004] The present application aims to overcome the shortcomings of the prior art and provide an efficient, controllable and non-destructive yttria ceramic nozzle deburring and polishing method that can effectively remove micro-hole burrs and obtain a smooth inner surface, significantly improving the overall performance of the nozzle.

[0005] To achieve the above-mentioned purpose, the present application adopts the following technical solutions: A yttria ceramic nozzle deburring and polishing method comprises the following steps: S1, pretreatment: ultrasonic cleaning of the yttria ceramic nozzle; S2, precision deburring: using a micro-sandblasting process to deburr the micro-hole inlet and outlet areas of the nozzle, the abrasive used in the micro-sandblasting process is a soft granular abrasive, and the gas pressure is 0.1-0.4 MPa; the gas pressure range disclosed in the present application is the best, too low pressure cannot achieve precision deburring, too high pressure can easily damage the sample and increase the cost. S3, surface polishing: using an abrasive fluid polishing process to polish the inner hole and surface of the nozzle, the abrasive fluid polishing process uses a viscoelastic fluid containing micro-fine polishing abrasive to flow through the inner hole and surface under pressure.

[0006] In the S2, the soft granular abrasive is one or more of walnut shell abrasive, corn cob abrasive, glass microbeads, and silica-based spherical abrasive, and the particle size is 100-500 mesh, preferably 400 mesh. If the particle size of the abrasive is too small, the force is small and the deburring effect cannot be achieved. If the particle size is too large, the surface is easily damaged and the surface is rough.

[0007] Further, in the S2, the spray angle of the micro-sand blasting is 20-45° between the nozzle axis and the spray gun axis, preferably 30°, and the spray distance is 5-15 cm. The spray angle of the present application is good, and can improve the spray speed, save the spray time, and reduce the cost.

[0008] Further, in the S2, the treatment method of the micro-sand blasting is intermittent point shooting for each micro-hole, and the single point shooting time is 1-5 seconds, repeated 1-3 times, preferably 1 time. Intermittent point shooting can observe the polishing effect of the sample, improve the spray efficiency, ensure the spray quality, save the spray time, save the cost, and ensure the quality.

[0009] In the S3, the micro-polishing abrasive is silicon carbide powder, boron carbide powder, diamond micro-powder, or cubic boron nitride micro-powder, and the particle size is W0.5-W5, preferably silicon carbide powder.

[0010] Further, in the S3, the pressure of the abrasive fluid polishing is 0.5-2.0 MPa, and the duration is 2-10 minutes.

[0011] After the S3, a step of magnetorheological polishing of the converging curved surface of the nozzle is further included.

[0012] Further, in the S1, the cleaning agent used in the ultrasonic cleaning is a neutral or weak alkaline solution, the cleaning temperature is 40-70℃, and the cleaning time is 5-10 minutes.

[0013] Further, the method further includes a step S4, cleaning and drying: the polished nozzle is ultrasonically cleaned, and dried with dry gas.

[0014] Preferably, the dry gas includes oil-free nitrogen, and the cleaning time is 5-20 minutes.

[0015] The beneficial effects of the present application are: 1. Strong targeting, non-destructive processing: The invention is aimed at the characteristics of yttria ceramic high hardness and high brittleness. The step-by-step strategy of "deburring first and then polishing" is adopted. In the deburring stage, the micro-sandblasting technology of low air pressure combined with soft abrasive is used to selectively remove the difference between the burr and the body structure strength, effectively avoiding the problems of traditional methods such as inability to process fine samples, inability to process samples in batches, time-consuming and laborious. And the traditional method is easy to cause edge collapse and cracks, while the method disclosed by the invention can guarantee product quality, improve efficiency, reduce time cost, damage rate and material cost, and has significant progress.

[0016] 2. Good polishing effect: The abrasive fluid polishing technology can uniformly and consistently polish complex shapes and internal channels, significantly reduce the surface roughness (Ra value can be reduced to below 0.1 μm), and improve the fluid performance.

[0017] 3. Strong controllability of process: By accurately controlling the air pressure, angle, time of micro-sandblasting and the pressure, abrasive particle size of abrasive fluid polishing, the whole process is controllable and repeatable, suitable for large-scale production.

[0018] 4. Improve product performance: The yttria ceramic nozzle processed by the method of the invention has no burr on the orifice and high internal surface finish, has more stable flow coefficient, better wear resistance and lower risk of blockage. BRIEF DESCRIPTION OF DRAWINGS Figure 1 It is the physical map of the yttria ceramic nozzle before polishing; Figure 2 It is the physical map of the yttria ceramic nozzle after polishing. DETAILED DESCRIPTION The following description is only a preferred embodiment of the invention and is not intended to limit the scope of protection of the invention. Any modification, equivalent replacement and improvement made within the spirit and principle of the invention shall be included in the scope of protection of the invention.

[0019] The following examples can be understood as part of the partial structure or method of the invention, or as a combination of examples to explain the larger scope of the structure or method of the invention.

[0020] Example 1: A deburring and polishing method for a yttria ceramic sandblasting nozzle with an inner diameter of 0.5 mm.

[0021] 1. Pretreatment: Put the nozzle into the ultrasonic cleaner, clean it with neutral cleaning agent at 60℃ for 8 minutes, then rinse it with deionized water and dry it with hot air.

[0022] 2. Precision Deburring: Using a precision sandblasting machine, 400-mesh glass microspheres are selected as the abrasive, and the air pressure is set to 0.2 MPa. Holding the spray gun at a 30° angle to the nozzle inlet, at a distance of approximately 10 cm, each hole is sprayed for 2 seconds. Immediately inspect under a 100x optical microscope. After repeating the spraying once, the burrs at the hole openings are completely removed, and the hole body remains undamaged.

[0023] 3. Surface Polishing: Fix the nozzle to the abrasive fluid polishing machine. Prepare a polishing fluid containing W3-sized silicon carbide micropowder, using a polymer carrier. Circulate the polishing fluid through the nozzle's inner channels and the surface for 5 minutes at a pressure of 1.0 MPa.

[0024] 4. Final cleaning and drying: Place the nozzle in an ultrasonic cleaner and clean it with alcohol for 12 minutes, then dry it with oil-free nitrogen.

[0025] Upon inspection, the nozzle inlet was found to be smooth and free of defects, and the surface roughness Ra of the inner channel decreased from 2 μm before treatment to 0.08 μm, improving the stability of flow test by approximately 30%.

[0026] Example 2: A method for deburring and polishing a yttrium oxide ceramic blasting nozzle with an inner diameter of 0.6 mm: 1. Pretreatment: Place the nozzle into an ultrasonic cleaner and clean it with NH4OH alkaline cleaning agent at 40℃ for 5 minutes, then rinse with deionized water and dry with hot air.

[0027] 2. Precision Deburring: Using a precision sandblasting machine, select 200-mesh walnut shell abrasive grains as the abrasive material, and set the air pressure to 0.4 MPa. Hold the spray gun at a 30° angle to the nozzle inlet, approximately 5 cm away, and spray each hole for 3 seconds. Immediately inspect under a 100x optical microscope. After repeating the spraying once, the burrs at the hole openings are completely removed, and the body remains undamaged.

[0028] 3. Surface Polishing: Fix the nozzle to the abrasive fluid polishing machine. Prepare a polishing fluid containing W0.5 particle size diamond micron powder, using a polymer carrier. Circulate the polishing fluid through the nozzle's inner channel and surface for 2 minutes at a pressure of 0.5 MPa.

[0029] 4. Final cleaning and drying: Place the nozzle in an ultrasonic cleaner and clean it with deionized water for 15 minutes, then dry it with oil-free nitrogen.

[0030] Testing revealed that the nozzle inlet was smooth and defect-free, and the surface roughness Ra of the inner channel decreased from 2 μm before treatment to 0.05 μm, resulting in an approximately 32% improvement in flow test stability.

[0031] Example 3: Taking a yttrium oxide ceramic blasting nozzle with an inner diameter of 0.8 mm as an example.

[0032] 1. Pretreatment: Place the nozzle into an ultrasonic cleaner and clean it with NH4OH alkaline cleaning agent at 40℃ for 5 minutes, then rinse with deionized water and dry with hot air.

[0033] 2. Precision Deburring: Using a precision sandblasting machine, select 200-mesh corn cob abrasive grains and set the air pressure to 0.4 MPa. Hold the spray gun at a 30° angle to the nozzle inlet, approximately 15 cm away, and spray each hole for 3 seconds. Immediately inspect under a 100x optical microscope. After repeating the spraying twice, the burrs at the hole openings are completely removed, and the body remains undamaged.

[0034] 3. Surface Polishing: Fix the nozzle to the abrasive fluid polishing machine. Prepare a polishing fluid containing cubic boron nitride micropowder with W1 particle size, using a polymer carrier. Circulate the polishing fluid through the nozzle's inner channels and the surface for 8 minutes at a pressure of 1 MPa.

[0035] 4. Final cleaning and drying: Place the nozzle in an ultrasonic cleaner and clean it with alcohol for 10 minutes, then dry it with oil-free nitrogen.

[0036] Upon inspection, the nozzle inlet was found to be smooth and free of defects, and the surface roughness Ra of the inner channel decreased from 2 μm before treatment to 0.05 μm, resulting in an improvement of approximately 32% in flow test stability.

[0037] Example 4: A method for deburring and polishing a yttrium oxide ceramic nozzle, comprising the following steps: S1. Pretreatment: Ultrasonic cleaning of yttrium oxide ceramic nozzles; S2. Precision deburring: The micro-blasting process is used to deburr the inlet and outlet areas of the nozzle micro-holes. The abrasive used in the micro-blasting process is soft granular abrasive, and the air pressure is 0.1-0.4 MPa. S3. Surface polishing: The inner channel and surface of the nozzle are polished using an abrasive fluid polishing process, wherein the abrasive fluid polishing process uses a viscoelastic fluid containing micro-polishing abrasives to flow through the inner channel and surface under pressure.

[0038] Example 5: A method for deburring and polishing a yttrium oxide ceramic nozzle, comprising the following steps: S1. Pretreatment: Ultrasonic cleaning of yttrium oxide ceramic nozzles; S2. Precision deburring: The micro-blasting process is used to deburr the inlet and outlet areas of the nozzle micro-holes. The abrasive used in the micro-blasting process is soft granular abrasive, and the air pressure is 0.1-0.4 MPa. S3. Surface polishing: The inner channel and surface of the nozzle are polished using an abrasive fluid polishing process, wherein the abrasive fluid polishing process uses a viscoelastic fluid containing micro-polishing abrasives to flow through the inner channel and surface under pressure; In step S2, the soft granular abrasive is corn cob abrasive and silica-based spherical abrasive, with a particle size of 400 mesh. In S2, the spray angle of the micro-blasting is 35° between the nozzle axis and the spray gun axis, and the spray distance is 12cm. In S2, the micro-blasting process involves intermittently blasting each micro-hole, with each blast lasting 2 seconds and repeated once. In step S3, the micro-polishing abrasive is silicon carbide powder with a particle size of W0.5-W5. In step S3, the pressure of the abrasive fluid polishing is 1.0 MPa, and the duration is 50 minutes. In step S1, the ultrasonic cleaning agent used is a weak alkaline solution, the cleaning temperature is 45°C, and the cleaning time is 6 minutes.

[0039] Example 6: A method for deburring and polishing a yttrium oxide ceramic nozzle, comprising the following steps: S1. Pretreatment: Ultrasonic cleaning of yttrium oxide ceramic nozzles; S2. Precision deburring: The micro-blasting process is used to deburr the inlet and outlet areas of the nozzle micro-holes. The abrasive used in the micro-blasting process is soft granular abrasive, and the air pressure is 0.1-0.4 MPa. S3. Surface polishing: The inner channel and surface of the nozzle are polished using an abrasive fluid polishing process, wherein the abrasive fluid polishing process uses a viscoelastic fluid containing micro-polishing abrasives to flow through the inner channel and surface under pressure; In step S2, the soft granular abrasive is a silica-based spherical abrasive with a particle size of 300 mesh. In S2, the spray angle of the micro-blasting is 40° between the nozzle axis and the spray gun axis, and the spray distance is 7cm. In S2, the micro-blasting process involves intermittently blasting each micro-hole, with each blast lasting 1 second, and repeated twice. In S3, the micro-polishing abrasive is boron carbide powder with a particle size of W3; In step S3, the pressure of the abrasive fluid polishing is 2.0 MPa, and the duration is 3 minutes.

[0040] Example 7: A method for deburring and polishing a yttrium oxide ceramic nozzle, comprising the following steps: S1. Pretreatment: Ultrasonic cleaning of yttrium oxide ceramic nozzles; S2. Precision deburring: The micro-blasting process is used to deburr the inlet and outlet areas of the nozzle micro-holes. The abrasive used in the micro-blasting process is soft granular abrasive, and the air pressure is 0.1-0.4 MPa. S3. Surface polishing: The inner channel and surface of the nozzle are polished using an abrasive fluid polishing process, wherein the abrasive fluid polishing process uses a viscoelastic fluid containing micro-polishing abrasives to flow through the inner channel and surface under pressure; In step S2, the soft granular abrasive is glass microspheres and silica-based spherical abrasive with a particle size of 400 mesh. In S2, the spray angle of the micro-blasting is 205° between the nozzle axis and the spray gun axis, and the spray distance is 5cm. In step S3, the micro-polishing abrasive is cubic boron nitride micro powder with a particle size of W2.5-W5; in step S3, the pressure of the abrasive fluid polishing is 1.5-2.0 MPa, and the duration is 6 minutes.

[0041] Example 8: A method for deburring and polishing a yttrium oxide ceramic nozzle, comprising the following steps: S1. Pretreatment: Ultrasonic cleaning of yttrium oxide ceramic nozzles; S2. Precision deburring: The micro-blasting process is used to deburr the inlet and outlet areas of the nozzle micro-holes. The abrasive used in the micro-blasting process is soft granular abrasive, and the air pressure is 0.1-0.4 MPa. S3. Surface polishing: The inner channel and surface of the nozzle are polished using an abrasive fluid polishing process, wherein the abrasive fluid polishing process uses a viscoelastic fluid containing micro-polishing abrasives to flow through the inner channel and surface under pressure; In step S2, the soft granular abrasive is walnut shell abrasive with a particle size of 400 mesh.

[0042] Example 9: A method for deburring and polishing a yttrium oxide ceramic nozzle, comprising the following steps: S1. Pretreatment: Ultrasonic cleaning of yttrium oxide ceramic nozzles; S2. Precision deburring: The micro-blasting process is used to deburr the inlet and outlet areas of the nozzle micro-holes. The abrasive used in the micro-blasting process is soft granular abrasive, and the air pressure is 0.1-0.4 MPa. S3. Surface polishing: The inner channel and surface of the nozzle are polished using an abrasive fluid polishing process, wherein the abrasive fluid polishing process uses a viscoelastic fluid containing micro-polishing abrasives to flow through the inner channel and surface under pressure; In step S3, the micro-polishing abrasive is silicon carbide powder with a particle size of W0.5-W5. This invention is not limited to the specific embodiments described above. Within the scope of the inventive concept, those skilled in the art can make appropriate adjustments to the process parameters, and all such adjustments should be covered within the protection scope of this invention.

Claims

1. A method for deburring and polishing a yttrium oxide ceramic nozzle, characterized in that, Including the following steps: S1. Pretreatment: Ultrasonic cleaning of yttrium oxide ceramic nozzles; S2. Precision deburring: The micro-blasting process is used to deburr the inlet and outlet areas of the nozzle micro-holes. The abrasive used in the micro-blasting process is soft granular abrasive, and the air pressure is 0.1-0.4 MPa. S3. Surface polishing: The inner channel and surface of the nozzle are polished using an abrasive fluid polishing process, wherein the abrasive fluid polishing process uses a viscoelastic fluid containing micro-polishing abrasives to flow through the inner channel and surface under pressure.

2. The method according to claim 1, characterized in that, In step S2, the soft granular abrasive is one or more of the following: walnut shell abrasive, corn cob abrasive, glass microspheres, and silica-based spherical abrasive, with a particle size of 100-500 mesh, preferably 400 mesh.

3. The method according to claim 1 or 2, characterized in that, In S2, the spray angle of the micro-blasting is 20-45° between the nozzle axis and the spray gun axis, preferably 30°, and the spray distance is 5-15 cm.

4. The method according to claim 1, characterized in that, In S2, the micro-blasting process involves intermittently spraying each microhole, with each spray lasting 1-5 seconds, repeated 1-3 times, preferably once.

5. The method according to claim 1, characterized in that, In step S3, the micro-polishing abrasive is silicon carbide powder, boron carbide powder, diamond micro powder, or cubic boron nitride micro powder, with a particle size of W0.5-W5, preferably silicon carbide powder.

6. The method according to claim 1 or 5, characterized in that, In step S3, the pressure of the abrasive fluid polishing is 0.5-2.0 MPa, and the duration is 2-10 minutes.

7. The method according to claim 1, characterized in that, Following S3, the process further includes a step of magnetorheological polishing of the nozzle-converging curved surface.

8. The method according to claim 1, characterized in that, In step S1, the ultrasonic cleaning agent is a neutral or weakly alkaline solution, the cleaning temperature is 40-70℃, and the cleaning time is 5-10 minutes.

9. The method according to claim 1, characterized in that, It also includes step S4, cleaning and drying: ultrasonically cleaning the polished nozzle and drying it with dry gas.

10. The method according to claim 9, characterized in that, The drying gas includes oil-free nitrogen, and the cleaning time is 5-20 minutes.

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