Flow calibration tool and method of using same

Abstract

The invention relates to a flow calibration tool and a use method thereof, and belongs to the technical field of semiconductor processing, the flow calibration tool comprises a pipeline, a flow meter is arranged on the pipeline, a flow meter jig connected with the pipeline through a spring buckle structure is arranged between the flow meter and the pipeline, a circuit is arranged on the flow meter, a switch is arranged on the circuit, and the flow meter jig is connected with the pipeline through a spring buckle structure. And a DC power supply module communicated with the circuit is arranged between the switch and the flowmeter. The device has the advantages of simple structure, convenient operation and good operation stability. The problems that in traditional flowmeter calibration, operation is complex, consumed time is too long, and production is affected are solved. The flowmeter can be compared and calibrated under the condition that the normal operation of the tested equipment is not influenced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and more specifically to a flow calibration tool and its usage method. Background Technology

[0002] In industrial production (such as semiconductor manufacturing, chemical industry, pharmaceutical industry, water treatment, etc.), flow meters are the "eyes" that ensure process stability, product quality, and energy measurement. However, traditional flow meter calibration has the following drawbacks: Production stoppage for calibration: This requires removing the flow meter and sending it to the laboratory, causing production line shutdown and incurring high costs.

[0003] Intrusive installation: Many standard calibration methods require cutting pipes and installing flanges, which are complex and pose a risk of leakage.

[0004] Inefficient: For widely distributed flow meters, calibrating each one individually is time-consuming and labor-intensive.

[0005] In semiconductor processing, some single-wafer processing equipment is equipped with flow meters of various models and specifications to control the amount of chemical solution added during processing in order to ensure processing results.

[0006] During factory testing or installation and commissioning, metrology engineers will use a measuring cup to simulate the actual liquid output from the outlet for one minute under normal production conditions to calibrate the flow meter.

[0007] Here I will use two mainstream single-wafer processing devices as examples to illustrate the shortcomings of the current method: 1. Polishing machine: This type of equipment requires the polishing slurry to be evenly distributed throughout the polishing disc. It is often equipped with multiple liquid outlets, which can lead to difficulties in collecting the liquid from the outlets.

[0008] 2. Single-piece cleaning machines contain hazardous chemicals such as HCl and HF that can be harmful to humans, posing safety risks during the liquid extraction process.

[0009] 3. Some machines use diaphragm pumps as the power source for liquid supply, which can cause flow fluctuations during the metering period, resulting in inaccurate metering.

[0010] 4. This calibration method requires shutdown for calibration, which will affect the equipment's uptime.

[0011] 5. In the final cleaning stage where the cleanliness level requirements are extremely high, this calibration operation is a new source of contamination. Summary of the Invention

[0012] This invention addresses the shortcomings of existing technologies by providing a flow meter calibration tool and its usage method, which boasts advantages such as simple structure, convenient operation, and good operational stability. It resolves the pain points of traditional flow meter calibration, including complex operations, excessive time consumption, and disruption to production. It enables the comparison and calibration of flow meters without affecting the normal operation of the equipment under test.

[0013] The above-mentioned technical problems of the present invention are mainly solved by the following technical solutions: A flow calibration tool includes a pipeline with a flow meter mounted on it. A flow meter fixture is connected to the pipeline via a spring-loaded clip structure. Installation and disassembly require no tools or pipeline cutting, significantly improving the efficiency and convenience of on-site operations. The flow meter has a circuit, a switch, and a DC power module connected to the circuit is located between the switch and the flow meter.

[0014] The DC power module, designed to meet the device's power requirements of 20-30V DC (300mA), comes standard with a DC24V lithium battery to power the flow meter, achieving portability. This lithium battery consists of eight 18650 lithium cells (3000mAh) connected in series. A DC-to-DC isolated step-down power supply module ensures a stable output of DC24V, and an overcharge / over-discharge protection module guarantees battery safety.

[0015] Preferably, the flow meter is an FD-Q flow meter.

[0016] A method for using a flow calibration tool includes the following steps: Step 1: Calibrate the FD-Q flow meter using a standard flow meter with the same pipe diameter as the pipeline being tested.

[0017] Step 2: Locate a non-horizontal installation location near the flow meter of the device under test, clean the pipeline surface, and then secure the FD-Q flow meter to the pipeline using the flow meter fixture.

[0018] Step 3: Assemble the FD-Q flow meter M12-4pin connector and cable. Connect the blue wire of the cable to the negative terminal of the lithium battery, and connect the brown wire to the positive terminal of the DC power module through the switch to complete the assembly of the FD-Q flow calibration device.

[0019] Step 4: Turn on the switch. The FD-Q flow meter will perform a self-test. When 1 to 4 "Stable Indicator Lights" are lit, it indicates that the calibration operation has begun.

[0020] Step 5: Calibrate the flow meter of the device under test by comparing the flow rate values ​​of the FD-Q flow meter and the flow meter of the device under test.

[0021] Simultaneously read the displayed value (standard value) of the FD-Q flow meter and the displayed value of the flow meter of the device under test. Record the difference between the two, and adjust the internal parameters (such as coefficient, zero point, range, etc.) of the flow meter under test according to its instruction manual to make its reading consistent with the reading of the FD-Q flow meter.

[0022] Step 6: Disconnect the switch, remove the FD-Q flow meter, and calibrate it on other machines using the same method.

[0023] As a preferred option, for instantaneous flow rate verification, the output mode should be selected as Std; the up and down setting buttons can be used to adjust the displayed setting value to match the set value of the flow meter on the test device; when the current value is displayed higher or lower than the set value, a large status indicator light will illuminate for easy identification.

[0024] As a preferred option, the output mode for upper and lower limit calibration is ArEA.

[0025] As a preferred option, the response time SPd should be 60.0s for stable flow and 0.5s for fluctuating flow; the display resolution rESo should be 0.01LPM; the zero cutoff flow cut should be 0LPM; and the flow direction dir should be selected according to the actual flow direction.

[0026] Preferably, the FD-Q flow meter is calibrated using the flow span adjustment (SPAn). By adjusting the flow span adjustment (SPAn), the flow meter's range can be precisely calibrated, ensuring linearity and accuracy throughout the entire measurement range.

[0027] The present invention can achieve the following effects: This invention provides a flow meter calibration tool and its usage method, which, compared with existing technologies, has the advantages of simple structure, convenient operation, and good operational stability. It solves the pain points of traditional flow meter calibration, such as complex operation, excessive time consumption, and impact on production. It enables the comparison and calibration of flow meters without affecting the normal operation of the equipment under test.

[0028] Intrusive installation: Using a spring-loaded clip, the FD-Q flow meter can be directly fixed to the outside of existing pipelines like a clamp. This avoids time-consuming and labor-intensive work such as cutting pipes and welding flanges, which is key to achieving "rapid calibration".

[0029] Portable power supply: The independent DC power module and switch eliminate the system's dependence on on-site power. Operators can carry it with them and work wherever needed, greatly improving flexibility.

[0030] Standardized operating procedures: From calibrating the standard to on-site comparison and parameter setting, the entire process is logically clear and the steps are well-defined, which helps to ensure the consistency and reliability of calibration results.

[0031] Intelligent parameter configuration: The FD-Q flow meter offers a wealth of parameter settings (such as SPd, rESo, dir), enabling it to adapt to different operating conditions such as stable flow and fluctuating flow, thereby improving the accuracy and applicability of calibration. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the structure of the present invention.

[0033] Figure 2 This is a schematic diagram of the flow meter of the present invention.

[0034] In the diagram: Flow meter 1, DC power module 2, circuit 3, switch 4, pipeline 5, flow meter fixture 6. Detailed Implementation

[0035] The technical solution of the invention will be further described in detail below through embodiments and in conjunction with the accompanying drawings.

[0036] Example: Figure 1 and Figure 2 As shown, a flow calibration tool includes a pipeline 5, on which a flow meter 1 is installed. The flow meter 1 is an FD-Q flow meter. A flow meter fixture 6 is provided between the flow meter 1 and the pipeline 5 and is connected to the pipeline 5 by a spring clip structure. A circuit 3 is provided on the flow meter 1, and a switch 4 is provided on the circuit 3. A DC power module 2 connected to the circuit 3 is provided between the switch 4 and the flow meter 1.

[0037] A method for using a flow calibration tool includes the following steps: Step 1: Calibrate the FD-Q flow meter using a standard flow meter with the same diameter as the pipe being tested (pipe 5).

[0038] Step 2: Locate a non-horizontal installation location near the flow meter of the device under test, clean the pipe surface, and then clamp the FD-Q flow meter onto the pipe 5 using the flow meter fixture 6.

[0039] Step 3: Assemble the FD-Q flow meter M12-4pin connector and cable. Connect the blue wire of the cable to the negative terminal of the lithium battery, and connect the brown wire to the positive terminal of DC power module 2 through the switch to complete the assembly of the FD-Q flow calibration device.

[0040] Step 4: Turn on switch 4. The FD-Q flow meter will perform a self-test. Observe the "Stable Indicator" on the panel. When 1 to 4 lights are lit, it indicates that the equipment has entered a stable working state and calibration can begin.

[0041] Step 5: Calibrate the flow meter of the device under test by comparing the flow rate values ​​of the FD-Q flow meter and the flow meter of the device under test. Use the flow span adjustment SPAN to calibrate the FD-Q flow meter.

[0042] For instantaneous flow rate verification, select the Std output mode; use the up and down setting buttons to adjust the displayed setting value to match the flow meter setting value of the test device; when the current value is higher or lower than the set value, a large status indicator light will illuminate for easy identification.

[0043] For calibration of the upper and lower limits, the output mode can be selected as ArEA.

[0044] Response time SPd: For stable flow rates, select 60.0s to achieve an extremely stable and smooth reading through long-term averaging, filtering out minute fluctuations. For fluctuating flow rates, select 0.5s to quickly respond to changes in flow rate and capture instantaneous values. Display resolution rESo: Select 0.01LPM to determine the smallest unit of display. Zero cutoff flow rate cut: Select 0LPM to set the minimum flow rate at which the display shows zero. Flow direction dir: Select according to the actual flow direction; it must be consistent with the actual flow direction, otherwise the measurement value will be incorrect.

[0045] Step 6: Disconnect the switch, remove the FD-Q flow meter, and calibrate it on other machines using the same method.

[0046] In summary, this flow meter calibration tool and its usage method have the advantages of simple structure, convenient operation, and good operational stability. It solves the pain points of traditional flow meter calibration, such as complex operation, excessive time consumption, and impact on production. It enables the comparison and calibration of flow meters without affecting the normal operation of the equipment under test.

[0047] The above description is only a specific embodiment of the present invention, but the structural features of the present invention are not limited thereto. Any changes or modifications made by those skilled in the art within the scope of the present invention are covered by the patent scope of the present invention.

Claims

1. A flow calibration tool, comprising a conduit (5), characterized in that: A flow meter (1) is provided on the pipeline (5). A flow meter fixture (6) is provided between the flow meter (1) and the pipeline (5) and is connected to the pipeline (5) by a spring snap-fit ​​structure. A circuit (3) is provided on the flow meter (1). A switch (4) is provided on the circuit (3). A DC power module (2) connected to the circuit (3) is provided between the switch (4) and the flow meter (1).

2. The method of using the flow calibration tool according to claim 1, characterized in that: The flow meter (1) mentioned is an FD-Q flow meter.

3. A method of using the flow calibration tool according to claim 2, characterized in that... The following steps are included: Step 1: Calibrate the FD-Q flow meter using a standard flow meter with the same diameter as the pipe being tested (5); Step 2: Locate a non-horizontal installation location near the flow meter of the device under test, clean the pipe surface, and then clamp the FD-Q flow meter onto the pipe (5) using the flow meter fixture (6); Step 3: Assemble the FD-Q flow meter M12-4pin connector and cable. Connect the blue wire of the cable to the negative terminal of the lithium battery and the brown wire to the positive terminal of the DC power module (2) through the switch to complete the assembly of the FD-Q flow calibration device. Step 4: Turn on switch (4), the FD-Q flow meter will perform a self-test. When 1 to 4 "stable indicator lights" are lit, it indicates that the calibration operation has started. Step 5: Calibrate the flow meter of the device under test by comparing the flow rate values ​​of the FD-Q flow meter and the flow meter of the device under test; Step 6: Disconnect the switch, remove the FD-Q flow meter, and calibrate it on other machines using the same method.

4. The method of using the flow calibration tool according to claim 3, characterized in that: For instantaneous flow rate verification, select the Std output mode; use the up and down setting buttons to adjust the displayed setting value to match the flow meter setting value of the test device; when the current value is higher or lower than the set value, a large status indicator light will illuminate for easy identification.

5. The method of using the flow calibration tool according to claim 4, characterized in that: For calibration of the upper and lower limits, the output mode can be selected as ArEA.

6. The method of using the flow calibration tool according to claim 4, characterized in that: Response time SPd: 60.0s for stable traffic, 0.5s for fluctuating traffic; Display resolution rESo: 0.01LPM. Zero cut-off flow rate, select 0LPM; Select the flow direction (dir) based on the actual flow direction.

7. The method of using the flow calibration tool according to claim 3, characterized in that: Use the flow span adjustment SPAN to calibrate the FD-Q flow meter.

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