Diaphragm structure for telecentricity adjustment of microscope objective and telecentricity adjustment method

Abstract

The invention discloses an internal diaphragm structure for telecentricity adjustment of a microscope objective and a telecentricity adjustment method. The internal diaphragm structure comprises a diaphragm, a diaphragm adjustment seat for accommodating the diaphragm, a diaphragm pressing ring and an objective shell for accommodating the diaphragm adjustment seat and a lens group component, the diaphragm is arranged in the diaphragm adjusting seat, and the diaphragm pressing ring is in threaded connection with the diaphragm adjusting seat so as to axially press the diaphragm in the diaphragm adjusting seat; the diaphragm adjusting seat and the objective lens shell are fixed in relative positions through a first fastener; the objective lens shell is provided with a plurality of threaded adjusting holes for the adjusting elements to penetrate through and act on the diaphragm, so that the position of the diaphragm is radially adjusted on the premise that the relative position of the diaphragm adjusting seat and the objective lens shell is not changed, and the telecentricity adjustment of the microscope objective lens is realized. According to the invention, the radial displacement or posture change of the lens group component can be avoided when the diaphragm is adjusted, so that the telecentricity adjustment is realized, and the overall imaging quality of the microscope objective is not degraded.

Description

Technical Field

[0001] This invention relates to the field of microscope objectives, specifically to an internal aperture structure and a method for adjusting the telecentricity of a microscope objective. Background Technology

[0002] The microscope objective is the core imaging component of an optical microscope, and its imaging quality directly affects the resolution, contrast, and depth of field of the entire system. Depth of field refers to the axial range in front of and behind the focal plane where a sharp image can be formed. In certain applications (such as automated inspection and scanning of thick samples), a large depth of field is required for the microscope objective to ensure image sharpness. Theory and practice show that the depth of field can be effectively increased by precisely adjusting the telecentricity of the microscope objective (i.e., the parallelism of the image-side principal ray to the optical axis).

[0003] Traditionally, to achieve telecentricity adjustment, an adjustable aperture structure is usually set inside the objective lens. However, due to the compact size of microscope objectives, such aperture structures are often in direct contact with or linked to the lens mount. When the aperture is radially adjusted to change its center position, it is very easy to cause radial displacement or attitude change of the lens assembly components (i.e., "moving assembly"), thereby introducing additional tilt and eccentric aberrations (such as coma and astigmatism), which seriously impairs the optimized image quality.

[0004] Therefore, designing an internal structure that can precisely adjust the position of the aperture stop to change the telecentricity within a limited internal space, while strictly isolating the effect of the adjustment process on the optical performance of the lens assembly, is a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide an internal aperture structure and a telecentricity adjustment method for adjusting the telecentricity of a microscope objective, which addresses the shortcomings of the prior art. The internal aperture structure and telecentricity adjustment method for adjusting the telecentricity of a microscope objective can ensure that the radial displacement or attitude change of the lens components is not caused when adjusting the aperture, thereby ensuring that the overall imaging quality of the microscope objective is not degraded while achieving telecentricity adjustment.

[0006] To achieve the above-mentioned technical objectives, the technical solution adopted by the present invention is as follows:

[0007] An internal aperture structure for adjusting the telecentricity of a microscope objective includes: an aperture, an aperture adjustment seat for accommodating the aperture, an aperture retaining ring for pressing the aperture and providing preload, and an objective housing for accommodating the aperture adjustment seat and lens assembly components.

[0008] The aperture is placed inside the aperture adjustment seat, and the aperture pressure ring is threadedly connected to the aperture adjustment seat, thereby axially pressing the aperture into the aperture adjustment seat.

[0009] The diaphragm adjusting seat and the objective lens shell are fixed in relative position by the first fastener;

[0010] The objective lens shell is provided with a plurality of threaded adjusting holes for the adjusting element to pass through and act on the diaphragm, so as to adjust the position of the diaphragm in the radial direction without changing the relative position of the diaphragm adjusting seat and the objective lens shell, thereby realizing the adjustment of the telecentricity of the microscope objective.

[0011] As a further improved technical solution of the present application, the first fastener is a hexagonal flat end set screw, which is used to pass through the threaded clamping hole on the objective lens shell and clamp on the surface of the diaphragm adjusting seat.

[0012] As a further improved technical solution of the present application, it further comprises a first pin, which is used to pass through the threaded adjusting hole on the objective lens shell and the corresponding through hole on the diaphragm adjusting seat, so as to fix the relative position of the objective lens shell and the diaphragm adjusting seat when the first fastener is installed, and the first pin is removed after the first fastener passes through the threaded clamping hole on the objective lens shell and clamps on the surface of the diaphragm adjusting seat.

[0013] As a further improved technical solution of the present application, the adjusting element comprises a diaphragm adjusting bracket, a locking differential micrometer, a spring pin and a second pin;

[0014] The second pin can pass through the threaded adjusting hole in one direction on the objective lens shell and the corresponding through hole on the diaphragm adjusting seat, and abut against the diaphragm.

[0015] The diaphragm adjusting bracket can be assembled with the microscope objective, and the diaphragm adjusting bracket is provided with a threaded through hole;

[0016] The spring pin can be screwed into the threaded through hole on the diaphragm adjusting bracket, and pass through the threaded adjusting hole in another direction on the objective lens shell and the corresponding through hole on the diaphragm adjusting seat, so as to abut against the diaphragm for fixing the position of the diaphragm;

[0017] The locking differential micrometer can be screwed into the threaded through hole of the diaphragm adjusting bracket, and the micrometer end can abut against the second pin, so as to push the second pin and adjust the position of the diaphragm by rotating the locking differential micrometer and controlling the adjusting amount according to the scale.

[0018] As a further improved technical solution of the present application, the objective lens shell is provided with four threaded adjusting holes, which are distributed in up-down and left-right directions, for adjusting the position of the diaphragm in the up-down and left-right directions, respectively.

[0019] In order to achieve the above technical purpose, another technical solution adopted by the present application is:

[0020] A method for adjusting the telecentricity of a microscope objective with an internal aperture structure includes the following steps:

[0021] S1: Assemble the aperture assembly: Install the aperture into the aperture adjustment seat, and tighten the aperture retaining ring on the aperture adjustment seat so that the aperture retaining ring presses the aperture to form the aperture assembly;

[0022] S2: Assemble the objective lens: Install the aperture assembly and other lens components into the objective lens housing in sequence and fix them in place to obtain the microscope objective lens;

[0023] S3: Fixing the relative position: Use a first pin to pass through a threaded adjustment hole on the objective lens housing and a through hole on the aperture adjustment seat to fix the relative position of the objective lens housing and the aperture adjustment seat when installing the first fastener. Then, pass the first fastener through the threaded tightening hole on the objective lens housing and tighten it against the surface of the aperture adjustment seat to fix the relative position of the aperture adjustment seat and the objective lens housing. Remove the first pin.

[0024] S4: Preliminary Adjustment: Adjust the imaging quality of the microscope objective assembled in S3 until it meets the requirements;

[0025] S5: Fix the initial position of the aperture: Pass the two second pins through the threaded adjustment holes in the upper and lower directions of the objective lens housing and the through holes of the aperture adjustment seat, respectively, and hold the aperture in place;

[0026] S6: Install adjustment tool: Assemble the aperture adjustment bracket with the microscope objective, and screw the two spring pins into the threaded through holes on the aperture adjustment bracket respectively, so that one end of the spring pin passes through the threaded adjustment hole in the left and right direction of the objective housing and the through hole of the aperture adjustment seat, and presses against the aperture to fix its position in the left and right direction.

[0027] S7: Install the micrometer: Screw the two locking differential micrometers into the threaded through holes on the aperture adjustment bracket, so that their micrometer ends press against the two second pins in the up and down directions respectively.

[0028] S8: Adjustment and Testing: Control the adjustment amount according to the scale of the locking differential micrometer, rotate the locking differential micrometer to push the second pin and adjust the up and down position of the aperture. Determine whether the adjustment is complete by the collimation of the light spot. At the same time, use an interferometer to test the RMS value of the microscope objective to monitor the changes in imaging quality.

[0029] Once the vertical position of the aperture is adjusted, disassemble and lock the micrometer, aperture adjustment bracket, spring pin, and second pin.

[0030] Pass the two second pins through the threaded adjustment holes in the left and right directions of the objective lens housing and the through hole of the aperture adjustment seat, respectively, and press them against the aperture.

[0031] After rotating the aperture adjustment bracket 90 degrees, assemble it with the microscope objective. Then screw the two spring pins into the threaded through holes on the aperture adjustment bracket, so that one end of the spring pin passes through the threaded adjustment hole in the vertical direction of the objective housing and the through hole of the aperture adjustment seat, and holds the aperture to fix its position in the vertical direction.

[0032] Screw the two locking differential micrometers into the threaded through holes on the aperture adjustment bracket, so that their micrometer ends press against the two second pins in the left and right directions respectively.

[0033] The adjustment amount is controlled by the scale of the locking differential micrometer. The locking differential micrometer is rotated to push the second pin and adjust the left and right positions of the aperture. The adjustment is judged by the collimation of the light spot. At the same time, the RMS value of the microscope objective is tested by an interferometer to monitor the changes in imaging quality.

[0034] If the left and right positions of the aperture are adjusted, disassemble and lock the micrometer, aperture adjustment bracket, spring pin and second pin, and proceed to the next step;

[0035] S9: Use four screws to tighten into the four threaded adjustment holes in the up, down, left, and right directions of the objective lens housing and the four through holes on the aperture adjustment seat, respectively, to hold the aperture in place and fix its up and down and left and right positions.

[0036] As a further improvement of the present invention, in step S1, after tightening the aperture retaining ring, thread-locking adhesive is used to adjust the relative position of the aperture retaining ring and the aperture adjustment seat.

[0037] As a further improvement of the present invention, in step S4, an interferometer is used to detect the RMS data of the microscope objective, and the microscope objective is repeatedly adjusted according to the spherical aberration, coma, and astigmatism data.

[0038] The beneficial effects of this invention are as follows:

[0039] 1. Achieves isolation of adjustment: By rigidly fixing the aperture adjustment seat to the objective lens housing, this invention fundamentally eliminates the possibility of the lens assembly "moving" when adjusting the aperture, thus ensuring the stability of the core imaging components.

[0040] 2. Ensures imaging quality: Quantitative comparison of the interferometer before and after adjustment in this invention conclusively proves that this method can maintain the original high level of imaging quality of the microscope objective when the telecentricity parameter is changed.

[0041] 3. Intuitive and efficient adjustment process: This invention creatively introduces "spot collimation" as a real-time visual criterion for the adjustment process. Operators can adjust and observe simultaneously, quickly approaching the optimal adjustment point, greatly improving debugging efficiency and reducing over-reliance on operator experience.

[0042] 4. High adjustment accuracy: The present invention uses a locking differential micrometer as the driving element, which can accurately read and lock the adjustment amount. Combined with the direct force transmission of the second pin, it realizes precise displacement control at the micrometer level or even the submicrometer level, with good adjustment accuracy and repeatability.

[0043] 5. Compact structure and strong applicability: The internal structure of the present invention is compact and does not significantly increase the external size of the objective lens. The adjustment fixture is detachable and is suitable for the production and post-calibration of various microscope objectives that require high telecentricity.

[0044] In summary, this invention can adjust the telecentricity by adjusting the aperture, thereby giving the microscope objective a greater depth of field and ensuring high image clarity, without affecting the overall imaging quality of the microscope objective. Attached Figure Description

[0045] Figure 1 Flowchart for adjusting the aperture.

[0046] Figure 2 This is a diagram illustrating the principle of telecentricity adjustment.

[0047] Figure 2 (a) in the diagram is a schematic of the depth of field when the aperture is at position one.

[0048] Figure 2 (b) in the diagram is a schematic of the depth of field when the aperture is at position two.

[0049] Figure 3 This is a schematic diagram of the assembly of the aperture component.

[0050] Figure 4 This is a schematic diagram showing how the aperture assembly is fixed within the objective lens housing using a first pin to secure the relative positions of the aperture adjustment mount and the objective lens housing.

[0051] Figure 5 This is a schematic diagram of the process where the second pin is about to press against the aperture.

[0052] Figure 6 This is a cross-sectional view of the process when the second pin is about to press against the aperture.

[0053] Figure 7 A schematic diagram of the assembly of the microscope and aperture adjustment bracket.

[0054] Figure 8 This is a schematic diagram of aperture adjustment. Detailed Implementation

[0055] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0056] This embodiment provides an internal aperture structure for adjusting the telecentricity of a microscope objective, which includes: an aperture adjustment seat 2 for accommodating the aperture 1, an aperture retaining ring 3 for pressing the aperture 1 and providing pre-tightening force, and an objective housing 10 for accommodating the aperture adjustment seat 2 and the lens assembly components.

[0057] like Figure 3 As shown, the aperture 1 is placed inside the aperture adjustment seat 2, and the aperture pressure ring 3 is threadedly connected to the aperture adjustment seat 2, thereby axially pressing the aperture 1 inside the aperture adjustment seat 2.

[0058] like Figure 4 As shown, the aperture adjustment base 2 and the objective lens housing 10 are fixed in relative position by four first fasteners 4. The first fasteners 4 are hexagonal flat-end set screws, which are used to pass through the threaded tightening holes 1002 on the objective lens housing 10 and press against the surface of the aperture adjustment base 2.

[0059] The objective lens housing 10 is provided with multiple threaded adjustment holes 1001 for the adjustment element to pass through and act on the aperture 1, so as to adjust the position of the aperture 1 radially without changing the relative position of the aperture adjustment seat 2 and the objective lens housing 10, thereby realizing the telecentricity adjustment of the microscope objective 7.

[0060] like Figure 4 As shown, this embodiment also includes a first pin 5, which is used to pass through one of the threaded adjustment holes 1001 on the objective lens housing 10 and the corresponding through hole 201 on the aperture adjustment seat 2, so as to fix the relative position of the objective lens housing 10 and the aperture adjustment seat 2 when the first fastener 4 is installed. After the first pin 5 is installed, the four first fasteners 4 are respectively passed through the four threaded tightening holes 1002 on the objective lens housing 10 and tightened against the surface of the aperture adjustment seat 2. After the four first fasteners 4 are installed, the first pin 5 is removed.

[0061] In this embodiment, there are four threaded adjustment holes 1001 and four threaded tightening holes 1002, and there is one threaded tightening hole 1002 between every two threaded adjustment holes 1001.

[0062] The adjustment elements in this embodiment include one aperture adjustment bracket 6, two locking differential micrometers 8, two spring pins 9, and two second pins 11.

[0063] The second pin 11 can pass through the threaded adjustment hole 1001 on the objective lens housing 10 in one direction and the corresponding through hole 201 on the aperture adjustment seat 2, and press against the aperture 1.

[0064] The aperture adjustment bracket 6 can be assembled with the microscope objective 7 using existing technology, such as bolt connection. Additionally, the aperture adjustment bracket 6 has four threaded through holes.

[0065] The spring pin 9 can be screwed into the threaded through hole on the aperture adjustment bracket 6, and pass through the threaded adjustment hole 1001 on the objective lens housing 10 in another direction and the corresponding through hole 201 on the aperture adjustment seat 2, so as to hold the aperture 1 in place to fix its position.

[0066] The locking micrometer 8 can be screwed into the threaded through hole of the aperture adjustment bracket 6, and its micrometer end can press against the second pin 11. By rotating the locking micrometer 8 and controlling the adjustment amount according to its scale, the second pin 11 is pushed to adjust the position of the aperture 1.

[0067] In this embodiment, the four threaded adjustment holes 1001 on the objective lens housing 10 are distributed vertically and horizontally, and are used to adjust the position of the aperture 1 in the vertical and horizontal directions respectively.

[0068] Depend on Figure 2 As shown in Figures (a) and (b), when the aperture stop is in position one, the change is relatively gradual, resulting in a large depth of field and a wide area of ​​sharp imaging before and after the focal point. When the aperture stop is in position two, the change is more rapid, resulting in a large depth of field but a smaller area of ​​sharp imaging. The depth of field can be increased by adjusting the aperture stop position. Therefore, this embodiment designs the aforementioned internal aperture stop structure for adjusting the telecentricity of the microscope objective and devises the following telecentricity adjustment method.

[0069] This embodiment provides a method for adjusting the telecentricity of a microscope objective based on the aforementioned internal aperture structure. The specific process is as follows: Figure 1 As shown, it includes the following steps:

[0070] S1: Assemble the aperture assembly: such as Figure 3 As shown, the aperture 1 is installed into the aperture adjustment seat 2, and the aperture retaining ring 3 is tightened onto the aperture adjustment seat 2, thereby pressing the aperture 1 together to form an aperture assembly. Tightening the aperture retaining ring 3 compresses the aperture 1, giving it a certain preload. After tightening the aperture retaining ring 3, thread-locking adhesive is used to position the aperture retaining ring 3 relative to the aperture adjustment seat 2.

[0071] S2: Assemble the objective lens: Install the aperture assembly and other lens components (existing structure) into the objective lens housing 10 in sequence and use a torque wrench to press the clamping ring to the aperture assembly and other lens components to achieve axial fixation, thereby obtaining the microscope objective lens 7.

[0072] S3: Fixed relative position: such as Figure 4 As shown, a first pin 5 is used to pass through a threaded adjustment hole 1001 on the objective lens housing 10 and a through hole 201 on the aperture adjustment seat 2 to fix the relative position of the objective lens housing 10 and the aperture adjustment seat 2 when the first fastener 4 is installed. Then, four M2.5X2 hexagon socket head cap screws (i.e., the first fastener 4) are passed through the threaded tightening hole 1002 on the objective lens housing 10 and tightened against the surface of the aperture adjustment seat 2 to fix the relative position of the aperture adjustment seat 2 and the objective lens housing 10. After completion, the first pin 5 is removed.

[0073] S4: Preliminary Adjustment: The imaging quality of the microscope objective 7 assembled in S3 is adjusted until it meets the requirements. The specific method of imaging quality adjustment is to use an interferometer to detect the RMS data of the microscope objective 7, and to repeatedly adjust the microscope objective 7 according to the data of spherical aberration, coma, and astigmatism.

[0074] S5: Fix the initial position of the aperture stop: as shown Figure 5 As shown, two φ2 second pins 11 are passed through the threaded adjustment hole 1001 in the vertical direction of the objective lens housing 10 and the through hole 201 of the aperture adjustment seat 2, respectively, and pressed against the aperture 1.

[0075] S6: Install adjustment tools: Similarly Figure 7 As shown, the aperture adjustment bracket 6 is assembled with the microscope objective 7, and two spring pins 9 are screwed into the threaded through holes on the aperture adjustment bracket 6, so that one end of the spring pin 9 passes through the threaded adjustment hole 1001 in the left and right direction of the objective housing 10 and the through hole 201 of the aperture adjustment seat 2, and presses against the aperture 1 to fix its position in the left and right direction.

[0076] S7: Install the micrometers: Screw the two locking differential micrometers 8 into the threaded through holes on the aperture adjustment bracket 6, so that their micrometer ends press against the two second pins 11 in the up and down directions.

[0077] S8: Adjustment and Testing: Control the adjustment amount according to the scale of the locking micrometer 8. Rotate the locking micrometer 8 to push the second pin 11, thereby adjusting the vertical position of the aperture 1. Determine whether the adjustment is complete by observing the collimation of the light spot (i.e., place a frosted glass observation screen about 500mm behind the microscope objective 7 and illuminate the front lens of the objective with parallel light). Slowly and alternately rotate the two locking micrometers 8 while closely observing the vertical height of the light spot on the observation screen. Quickly move the observation screen back and forth slightly, and you will find that the vertical height of the light spot changes. Continuously adjust the locking micrometer 8 until a position is found where the vertical height of the light spot changes minimally when the observation screen is moved back and forth, and the sharpness of the upper and lower edges is consistent. At this point, the telecentricity in the vertical direction has been adjusted to the optimal level. Simultaneously, use an interferometer to test the RMS value of the microscope objective 7 to monitor changes in image quality (i.e., immediately place the microscope objective 7 back on the interferometer for testing. Compare the measured RMS value with the reference value. In this embodiment, the difference between the two is less than the preset value, which is within the instrument error range, proving that the adjustment is effective and has not damaged the image quality). Once the vertical position adjustment of the aperture 1 is complete, disassemble the locking micrometer 8, the aperture adjustment bracket 6, the spring pin 9, and the second pin 11.

[0078] like Figure 6 As shown, two φ2 second pins 11 are passed through the threaded adjustment hole 1001 in the left-right direction of the objective lens housing 10 and the through hole 201 of the aperture adjustment seat 2, respectively, and pressed against the aperture 1. Figures 7-8 As shown, after rotating the aperture adjustment bracket 6 90 degrees, assemble it with the microscope objective 7, and gently screw the two spring pins 9 into the threaded through holes on the aperture adjustment bracket 6, so that one end of the spring pin 9 passes through the threaded adjustment hole 1001 in the vertical direction of the objective housing 10 and the through hole 201 of the aperture adjustment seat 2. When the spring pin 9 touches the aperture 1, stop screwing the spring pin 9 (do not use too much force when screwing, and ensure that the spring pin 9 will not move the position of the aperture 1). At this time, the two spring pins 9 press against the upper and lower surfaces of the aperture 1 respectively to fix its position in the vertical direction. Figures 7-8As shown, two locking micrometers 8 are screwed into the threaded through holes on the aperture adjustment bracket 6, so that their micrometer ends press against the two second pins 11 in the left and right directions respectively. The adjustment amount is controlled according to the scale of the locking micrometers 8. Continue to rotate the locking micrometers 8 to push the second pins 11, thereby adjusting the left and right positions of the aperture 1. The collimation of the light spot is used to determine whether the adjustment is complete. Simultaneously, an interferometer is used to test the RMS value of the microscope objective 7 to monitor changes in image quality (i.e., the process of adjusting the horizontal width of the light spot based on the observed vertical height change of the light spot and the interferometer verification steps). If the left and right positions of the aperture 1 are adjusted, the locking micrometers 8, aperture adjustment bracket 6, spring pin 9, and second pins 11 are disassembled. At this point, the telecentricity of the microscope objective 7 in both orthogonal directions is optimized. Measurements using an MTF meter showed that the modulation transfer function (MTF) curves across the entire field of view were close to the diffraction limit at the designed spatial frequencies, and the depth of field range was significantly expanded compared to before adjustment, achieving the design goal of increasing depth of field. The next step was then executed.

[0079] S9: Use four screws to tighten the four threaded adjustment holes 1001 in the up / down and left / right directions of the objective lens housing 10 and the four through holes 201 on the aperture adjustment seat 2, respectively, to hold the aperture 1 in place and fix its up / down and left / right positions. Note that when tightening the four screws, tighten them gently. Stop tightening the aperture 1 when the screws touch it (do not use too much force when tightening to ensure that the screws do not move the aperture 1).

[0080] This invention allows for multiple adjustments of the aperture position based on the scale on the locking differential micrometer 8, where the maximum adjustment is equal to the gap between the outer diameter of the aperture 1 and the inner hole of the aperture adjustment seat 2. The adjusted RMS data of the microscope objective is then tested using an interferometer. Within the test error accuracy range, the test results determine whether the internal aperture structure for telecentric adjustment of the microscope objective, as described in this invention, satisfies the telecentricity adjustment requirement without affecting the overall imaging quality of the microscope objective.

[0081] This invention allows for adjustment of the telecentricity by adjusting the aperture, enabling the microscope objective to have a greater depth of field and ensuring high image clarity without affecting the overall imaging quality of the microscope objective.

[0082] The scope of protection of this invention includes, but is not limited to, the above embodiments. The scope of protection of this invention is defined by the claims. Any substitutions, modifications, or improvements to this technology that are easily conceived by those skilled in the art fall within the scope of protection of this invention.

Claims

1. An internal aperture structure for adjusting the telecentricity of a microscope objective, characterized in that, include: Aperture (1), aperture adjustment seat (2) for accommodating aperture (1), aperture retaining ring (3) for pressing aperture (1) and providing preload, and objective lens housing (10) for accommodating aperture adjustment seat (2) and lens assembly components. The aperture (1) is placed inside the aperture adjustment seat (2), and the aperture pressure ring (3) is threadedly connected to the aperture adjustment seat (2) to axially press the aperture (1) inside the aperture adjustment seat (2); The aperture adjustment seat (2) and the objective lens housing (10) are fixed in relative position by the first fastener (4); The objective lens housing (10) is provided with multiple threaded adjustment holes (1001) for the adjustment element to pass through and act on the aperture (1) so as to radially adjust the position of the aperture (1) without changing the relative position of the aperture adjustment seat (2) and the objective lens housing (10), thereby realizing the telecentricity adjustment of the microscope objective (7).

2. The internal aperture structure for adjusting the telecentricity of a microscope objective according to claim 1, characterized in that, The first fastener (4) is an internal hexagonal flat-end set screw. The first fastener (4) is used to pass through the threaded tightening hole (1002) on the objective lens housing (10) and press against the surface of the aperture adjustment seat (2).

3. The internal aperture structure for adjusting the telecentricity of a microscope objective according to claim 1 or 2, characterized in that, It also includes a first pin (5), which is used to pass through the threaded adjustment hole (1001) on the objective lens housing (10) and the corresponding through hole (201) on the aperture adjustment seat (2) to fix the relative position of the objective lens housing (10) and the aperture adjustment seat (2) when the first fastener (4) is installed. After the first fastener (4) passes through the threaded tightening hole (1002) on the objective lens housing (10) and is tightened against the surface of the aperture adjustment seat (2), the first pin (5) is removed.

4. The internal aperture structure for adjusting the telecentricity of a microscope objective according to claim 3, characterized in that, The adjustment element includes an aperture adjustment bracket (6), a locking differential micrometer (8), a spring pin (9), and a second pin (11). The second pin (11) can pass through the threaded adjustment hole (1001) in one direction on the objective lens housing (10) and the corresponding through hole (201) on the aperture adjustment seat (2) to hold the aperture (1). The aperture adjustment bracket (6) can be assembled with the microscope objective (7), and the aperture adjustment bracket (6) is provided with a threaded through hole; The spring pin (9) can be screwed into the threaded through hole on the aperture adjustment bracket (6) and pass through the threaded adjustment hole (1001) on the objective lens housing (10) in another direction and the corresponding through hole (201) on the aperture adjustment seat (2) to hold the aperture (1) in place to fix its position. The locking micrometer (8) can be screwed into the threaded through hole of the aperture adjustment bracket (6), and its micrometer end can press against the second pin (11). By rotating the locking micrometer (8) and controlling the adjustment amount according to its scale, the second pin (11) is pushed to adjust the position of the aperture (1).

5. The internal aperture structure for adjusting the telecentricity of a microscope objective according to claim 4, characterized in that, The objective lens housing (10) is provided with four threaded adjustment holes (1001), which are distributed in the up, down and left and right directions, and are used to adjust the position of the aperture (1) in the up and down and left and right directions respectively.

6. A method for adjusting the telecentricity of a microscope objective based on the internal aperture structure described in claim 5, characterized in that, Includes the following steps: S1: Assemble the aperture assembly: Install the aperture (1) into the aperture adjustment seat (2), and tighten the aperture retaining ring (3) on the aperture adjustment seat (2) so that the aperture retaining ring (3) presses the aperture (1) to form the aperture assembly; S2: Assemble the objective lens: Install the aperture assembly and other lens components into the objective lens housing (10) in sequence and fix them to obtain the microscope objective lens (7). S3: Fixing the relative position: Use a first pin (5) to pass through a threaded adjustment hole (1001) on the objective lens housing (10) and a through hole (201) on the aperture adjustment seat (2) to fix the relative position of the objective lens housing (10) and the aperture adjustment seat (2) when installing the first fastener (4). Then, pass the first fastener (4) through the threaded tightening hole (1002) on the objective lens housing (10) and tighten it on the surface of the aperture adjustment seat (2) to fix the relative position of the aperture adjustment seat (2) and the objective lens housing (10). Remove the first pin (5). S4: Preliminary adjustment: Adjust the imaging quality of the microscope objective (7) assembled in S3 until it is qualified; S5: Fix the initial position of the aperture: Pass the two second pins (11) through the threaded adjustment hole (1001) in the vertical direction of the objective lens housing (10) and the through hole (201) of the aperture adjustment seat (2) respectively, and press against the aperture (1). S6: Install adjustment tool: Assemble the aperture adjustment bracket (6) with the microscope objective (7), and screw the two spring pins (9) into the threaded through holes on the aperture adjustment bracket (6) respectively, so that one end of the spring pin (9) passes through the threaded adjustment hole (1001) in the left and right direction of the objective housing (10) and the through hole (201) of the aperture adjustment seat (2), and presses against the aperture (1) to fix its position in the left and right direction; S7: Install micrometers: Screw the two locking differential micrometers (8) into the threaded through holes on the aperture adjustment bracket (6) respectively, so that their micrometer ends press against the two second pins (11) in the up and down directions respectively. S8: Adjustment and testing: Control the adjustment amount according to the scale of the locking differential micrometer (8), rotate the locking differential micrometer (8) to push the second pin (11) and adjust the up and down position of the aperture (1), judge whether the adjustment is completed by the collimation of the light spot, and at the same time use the interferometer to test the RMS value of the microscope objective (7) to monitor the changes in imaging quality. If the position adjustment of the aperture (1) in the up and down direction is completed, then disassemble and lock the micrometer (8), aperture adjustment bracket (6), spring pin (9) and second pin (11). The two second pins (11) are passed through the threaded adjustment hole (1001) in the left and right direction of the objective lens housing (10) and the through hole (201) of the aperture adjustment seat (2) respectively, and pressed against the aperture (1). After rotating the aperture adjustment bracket (6) 90 degrees, assemble it with the microscope objective (7), and screw the two spring pins (9) into the threaded through holes on the aperture adjustment bracket (6) respectively, so that one end of the spring pin (9) passes through the threaded adjustment hole (1001) in the vertical direction of the objective housing (10) and the through hole (201) of the aperture adjustment seat (2), and presses against the aperture (1) to fix its position in the vertical direction; Screw the two locking micrometers (8) into the threaded through holes on the aperture adjustment bracket (6) respectively, so that their micrometer ends press against the two second pins (11) in the left and right directions respectively. According to the scale control adjustment of the locking differential micrometer (8), rotate the locking differential micrometer (8) to push the second pin (11) and adjust the left and right positions of the aperture (1). The adjustment is completed by judging by the collimation of the light spot. At the same time, the RMS value of the microscope objective (7) is tested by the interferometer to monitor the changes in imaging quality. If the left and right positions of the aperture (1) are adjusted, then disassemble the locking micrometer (8), aperture adjustment bracket (6), spring pin (9), and second pin (11) and proceed to the next step. S9: Use four screws to screw into the four threaded adjustment holes (1001) in the up, down and left and right directions of the objective lens housing (10) and the four through holes (201) on the aperture adjustment seat (2) respectively, to press against the aperture (1) to fix the up and down position and left and right position of the aperture (1).

7. The method for adjusting the telecentricity of a microscope objective according to claim 6, characterized in that, In step S1, after tightening the aperture retaining ring (3), threadlocker is used to adjust the relative position of the aperture retaining ring (3) and the aperture adjustment seat (2).

8. The method for adjusting the telecentricity of a microscope objective according to claim 6, characterized in that, In step S4, the RMS data of the microscope objective (7) is detected using an interferometer, and the microscope objective (7) is repeatedly adjusted based on the spherical aberration, coma, and astigmatism data.

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