Combined heating power supply

Abstract

The invention discloses a combined heating power supply which comprises a power supply cabinet, and three load power supplies are arranged in the power supply cabinet side by side. A front shell of the power supply cabinet is provided with a power supply main switch indicating lamp, three power supply operation indicating lamps, three power supply fault indicating lamps and a control touch screen, wherein the three power supply operation indicating lamps are respectively used for indicating whether the three load power supplies operate or not in a one-to-one correspondence manner; the three power supply fault indicating lamps are respectively used for indicating whether the three load power supplies fail or not in a one-to-one correspondence manner. The integrated design is adopted, and three devices or three heaters corresponding to one device can be directly used for heating. The power supply has the advantages of energy conservation, high efficiency, small occupied area and the like. And rapid, efficient and stable production can be realized.

Description

Technical Field

[0001] This invention relates to a heating power supply, and more specifically to a combined heating power supply. Background Technology

[0002] In the field of semiconductor material manufacturing, various types of large-size heat treatment furnaces or crystal growth furnaces have emerged along with innovations in processes and materials. These are suitable for use in semiconductor material processing or other application areas.

[0003] Existing heating power supplies typically use one power supply for each heater, resulting in low efficiency and a large footprint. Summary of the Invention

[0004] To address the problems of existing technologies, this invention provides a combined heating power supply with an integrated design, capable of directly heating three devices or three heaters of one device. This is in contrast to previous systems where each heater required a separate power supply. This power supply offers advantages such as energy saving, high efficiency, and small footprint. It enables rapid, efficient, and stable production.

[0005] The technical solution of the present invention is: a combined heating power supply, including a power cabinet, wherein three load power supplies are arranged side by side in the power cabinet, and the front shell of the power cabinet is provided with a main power switch indicator light, three power operation indicator lights that are used to indicate whether the three load power supplies are running, three power failure indicator lights that are used to indicate whether the three load power supplies are faulty, and a control touch screen.

[0006] Furthermore, including the main air switch Q1 and the incoming line inductor L1, the input power is connected to the incoming line inductor L1 through the main air switch Q1, and then distributed to three different load power main circuits;

[0007] The three load power supplies are the first load power supply, the second load power supply, and the third load power supply;

[0008] The first load power supply includes a first contactor KM1, a first fuse FU1, a first power control main board, and a first power output transformer T1 connected in series in sequence;

[0009] The second load power supply includes a second contactor KM2, a second fuse FU2, a second power control main board, and a second power output transformer T2 connected in series in sequence;

[0010] The third load power supply includes a third contactor KM3, a third fuse FU3, a third power control main board, and a third power output transformer T3 connected in series in sequence.

[0011] Furthermore, water cooling is employed.

[0012] Furthermore, it features phase-shifting and power-adjusting operating modes, and the triggering mode can be switched by modifying parameters through the touchscreen.

[0013] Furthermore, it features constant power, constant voltage, and constant current modes, and parameters can be set and operating modes can be switched via the touchscreen.

[0014] Furthermore, the power control motherboard corresponding to each load power supply can collect the primary voltage and current signals of the power output transformer for feedback.

[0015] Furthermore, it has a leak detection function.

[0016] The beneficial effects of this invention are: it provides a combined heating power supply with an integrated design, capable of directly heating three devices or three heaters of one device. Compared to previous equipment where each heater required a separate power supply, this power supply offers advantages such as energy saving, high efficiency, and small footprint. It enables rapid, efficient, and stable production.

[0017] The power supply is mainly equipped with a main circuit breaker, contactors, fuses, and various power control main boards. The power control main board uses a digital circuit board to regulate and control the power output, which is then stepped down by a three-phase transformer before being output to the load, and the voltage varies depending on the materials and processes used.

[0018] This power supply is characterized by safety, high efficiency, convenience, and high stability during use. Attached Figure Description

[0019] Figure 1 The circuit connection diagram for the combined heating power supply;

[0020] Figure 2 This is a schematic diagram of the combined heating power supply.

[0021] In the diagram: 1 is the power cabinet, 2 is the main power switch indicator light, 3 is the power operation indicator light, 4 is the power fault indicator light, and 5 is the control touch screen. Detailed Implementation

[0022] The present invention will now be further described with reference to the accompanying drawings.

[0023] like Figure 2 As shown, the combined heating power supply includes a power cabinet 1, in which three load power supplies are arranged side by side. The front shell of the power cabinet 1 is provided with a main power switch indicator 2, three power operation indicator lights 3, three power failure indicator lights 4, and a control touch screen 5.

[0024] like Figure 1As shown, the combined heating power supply includes a main air switch Q1 and an input inductor L1. The input power is connected to the input inductor L1 through the main air switch Q1, and then distributed to three different load power supply main circuits.

[0025] The three load power supplies are designated as a first load power supply, a second load power supply, and a third load power supply. The first load power supply comprises a first contactor KM1, a first fuse FU1, a first power control main board, and a first power output transformer T1, connected in series. The second load power supply comprises a second contactor KM2, a second fuse FU2, a second power control main board, and a second power output transformer T2, connected in series. The third load power supply comprises a third contactor KM3, a third fuse FU3, a third power control main board, and a third power output transformer T3, connected in series.

[0026] The combined heating power supply is water-cooled. It features phase-shifting and power-adjusting operating modes, which can be switched by modifying parameters via the touchscreen. It also supports constant power, constant voltage, and constant current modes, with parameter settings and mode switching accessible through the touchscreen. Each load power supply's corresponding power control board can collect feedback from the primary side voltage and current signals of the power output transformer. It also includes a leakage detection function.

[0027] This power supply features an integrated design, capable of directly powering three devices or three heaters within a single device. This is a significant improvement over previous systems where each heater required its own power supply. This power supply offers advantages such as energy efficiency, high performance, and a small footprint.

[0028] This power supply is characterized by safety, high efficiency, convenience, and high stability during use.

[0029] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A combined heating power supply, characterized in that: Includes a power cabinet (1), in which three load power supplies are arranged side by side. The front shell of the power cabinet (1) is provided with a main power switch indicator (2), three power operation indicator lights (3) used to indicate whether the three load power supplies are running, three power failure indicator lights (4) used to indicate whether the three load power supplies are faulty, and a control touch screen (5).

2. The combined heating power supply according to claim 1, characterized in that: Includes a main air switch (Q1) and an input inductor (L1). The input power is connected to the input inductor (L1) through the main air switch (Q1) and then distributed to three different load power main circuits. The three load power supplies are the first load power supply, the second load power supply, and the third load power supply; The first load power supply includes a first contactor (KM1), a first fuse (FU1), a first power control main board, and a first power output transformer (T1) connected in series in sequence. The second load power supply includes a second contactor (KM2), a second fuse (FU2), a second power control main board, and a second power output transformer (T2) connected in series in sequence. The third load power supply includes a third contactor (KM3), a third fuse (FU3), a third power control main board, and a third power output transformer (T3) connected in series in sequence.

3. The combined heating power supply according to claim 1, characterized in that: Water cooling is used.

4. The combined heating power supply according to claim 1, characterized in that: It features phase-shifting and power-adjusting operating modes, and the triggering mode can be switched by modifying parameters through the touch screen.

5. The combined heating power supply according to claim 1, characterized in that: It features constant power, constant voltage, and constant current modes, and parameters can be set and operating modes can be switched via the touch screen.

6. The combined heating power supply according to claim 1, characterized in that: The power control motherboard corresponding to each load power supply can collect the voltage and current signals of the primary side of the power output transformer and provide feedback.

7. The combined heating power supply according to claim 1, characterized in that: It has a leak detection function.

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