Semiconductor process equipment and electromagnetic valve thereof

Abstract

The invention provides semiconductor equipment and an electromagnetic valve thereof, the electromagnetic valve comprises a valve body mechanism and a valve core mechanism, the valve body mechanism comprises a flow inlet, a flow outlet and a fluid channel communicating the flow outlet with the flow inlet; the valve core mechanism comprises a movable baffle plate and a movable core body, the movable baffle plate is movably mounted in the fluid channel and is in sealed connection with the fluid channel, the movable baffle plate is provided with an overflowing hole for communicating two sides of the movable baffle plate, the movable core body is movably mounted in the valve body mechanism, and at least part of the movable core body penetrates into the fluid channel; the valve element mechanism further comprises a first elastic piece and a second elastic piece. When the battery valve is closed, the first elastic piece supports the movable baffle, and the second elastic piece supports the movable core body to be attached to the overflowing hole so as to close the fluid channel. The electromagnetic valve can be controlled to be opened by controlling the movable core body to move in the direction away from the movable baffle so that the gap can be generated between the movable core body and the movable baffle, parts such as a pilot valve do not need to be opened, and therefore the response speed of the electromagnetic valve is increased.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and more specifically, to a semiconductor process apparatus and its solenoid valve. Background Technology

[0002] Solenoid valves are fundamental automation components controlled by electromagnetic induction, used to control fluid flow. They can be used with various circuits to achieve fluid flow control, offering high precision and flexibility. Mass Flow Controllers (MFCs) are used for the precise measurement and control of gas mass flow rates, and have important applications in various fields and production processes, including semiconductor and integrated circuit technology, specialty materials science, chemical industry, petroleum industry, pharmaceuticals, environmental protection, and vacuum systems. Solenoid valves are widely used in MFCs due to their high precision and fast response time.

[0003] In MFC (Multi-Functional Control System), solenoid valves may experience internal leakage, inability to open, and unstable flow control under high pressure conditions above 1 MPa. To make solenoid valves suitable for high-pressure environments, some MFCs use pilot-operated solenoid valves. While pilot-operated solenoid valves can meet the pressure requirements, they have a complex structure and slow response time.

[0004] Therefore, how to improve the response speed of solenoid valves is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] This application aims to solve at least one of the technical problems existing in the prior art, and proposes a semiconductor process equipment and its solenoid valve, which does not require a pilot valve, thereby improving the response speed of the solenoid valve.

[0006] To achieve the purpose of this application, a solenoid valve is provided, comprising a valve body mechanism and a valve core mechanism, wherein,

[0007] The valve body mechanism includes an inlet and an outlet, and the valve core mechanism is disposed between the inlet and the outlet to control the opening and closing of the inlet and the outlet;

[0008] The valve core mechanism includes a movable baffle and a movable core. The movable baffle is movably blocked between the inlet and the outlet. The movable baffle has a flow hole for connecting the inlet and the outlet. The movable core is movably installed in the valve body mechanism and corresponds to the position of the flow hole.

[0009] The valve core mechanism further includes a first elastic element and a second elastic element. The first elastic element is located on the side of the movable baffle away from the inlet and is used to support the movable baffle. The second elastic element is located between the movable core and the valve body mechanism and is used to drive the movable core to close the flow hole when the solenoid valve is closed.

[0010] In some embodiments, the valve core mechanism further includes a seat sleeve fixed between the inlet and the outlet, the seat sleeve having a through-flow cavity, and the movable baffle being movably installed in the through-flow cavity and sealing the cavity wall of the through-flow cavity.

[0011] In some embodiments, the seat cover includes a limiting portion disposed on the cavity wall of the flow cavity, the limiting portion being located on the side of the movable baffle away from the inlet and spaced around the movable core, the movable core having a sealing portion for closing the flow hole of the movable baffle;

[0012] The first elastic element is located between the limiting part and the movable baffle.

[0013] In some embodiments, the movable core further includes a guide portion connected to the sealing portion, and the valve body mechanism further includes a guide cavity located on the side of the seat sleeve away from the inlet, the guide portion passing through the guide cavity, the guide portion being used to cooperate with the cavity wall of the guide cavity to guide the movement of the movable core;

[0014] The second elastic element is located between the guide portion and the limiting portion.

[0015] In some embodiments, the movable baffle is provided with a first positioning groove on the side away from the inlet, and the limiting part is provided with a second positioning groove on the side near the inlet. The two ends of the first elastic member are respectively installed in the first positioning groove and the second positioning groove.

[0016] In some embodiments, a third positioning groove is provided on the side of the limiting portion away from the inlet, and one end of the second elastic member is installed in the third positioning groove.

[0017] In some embodiments, the movable baffle is provided with a limiting groove on the side away from the inlet, the movable core includes a limiting protrusion located near the inlet, the limiting groove cooperates with the limiting protrusion to limit the movable core, and the flow hole is arranged around the limiting groove.

[0018] In some embodiments, the valve body mechanism includes a valve seat and a valve body, the valve seat and the valve body are sealed together, a communicating cavity is provided between the valve seat and the valve body, the inlet and the outlet are spaced apart in the valve seat, the valve seat further includes an inlet channel for communicating the inlet and the communicating cavity and an outlet channel for communicating the outlet and the communicating cavity, and the guide cavity is disposed in the valve body;

[0019] The seat cover is installed in the entrance channel.

[0020] In some embodiments, the elastic coefficient of the first elastic element is equal to the elastic coefficient of the second elastic element.

[0021] In some embodiments, the diameter of the flow passage is less than 1 / 2 of the diameter of the baffle.

[0022] In some embodiments, the number of flow holes is two or more, and each flow hole is evenly arranged around the limiting groove.

[0023] This application also provides a semiconductor device, including a process chamber, a fluid pipeline, and any of the above-described solenoid valves, wherein the fluid pipeline is connected to the process chamber for supplying process fluid to the process chamber, and the solenoid valve is disposed in the fluid pipeline for controlling the flow rate of the process fluid.

[0024] This application has the following beneficial effects:

[0025] The solenoid valve provided in this application includes a valve body mechanism and a valve core mechanism. The valve body mechanism includes an inlet, an outlet, and a fluid passage connecting the outlet and the inlet. The valve core mechanism includes a movable baffle and a movable core. The movable baffle is movably installed in the fluid passage and is sealed to the fluid passage. The movable baffle has flow holes on both sides of the movable baffle. The movable core is movably installed in the valve body mechanism and at least partially penetrates the fluid passage. The valve core mechanism also includes a first elastic member and a second elastic member. The first elastic member supports the movable baffle, and the second elastic member supports the movable core to fit against the flow holes when the solenoid valve is closed, thereby closing the fluid passage.

[0026] The movable core, in conjunction with the movable baffle, closes the solenoid valve. The solenoid valve opens by controlling the movable core to move away from the movable baffle, creating a gap between them. This eliminates the need to open a pilot valve or other components, thus improving the solenoid valve's response speed. Attached Figure Description

[0027] Figure 1 A cross-sectional view of a solenoid valve provided in a specific embodiment of this application;

[0028] Figure 2 for Figure 1 A sectional view of the seat cover and the movable baffle in tandem;

[0029] Figure 3 for Figure 1 Cross-sectional view of the central valve core mechanism;

[0030] Figure 4 for Figure 1 A cross-sectional view of the movable baffle in the middle;

[0031] Figure 5 for Figure 1 Cross-sectional view of the middle valve seat;

[0032] Figure 6 for Figure 1 A schematic diagram of the structure of a solenoid valve.

[0033] Figure 7 for Figure 1 A schematic diagram of the fluid flow direction inside the solenoid valve;

[0034] in, Figures 1 to 7 The attached figures are labeled as follows:

[0035] 1. Valve body; 101. Guide cavity; 2. Valve seat; 21. Inlet; 22. Outlet;

[0036] 23. Inlet channel; 24. Outlet channel; 25. Mounting groove; 3. Movable core; 31. Guide part; 32. Sealing part; 33. Connecting rod; 34. Limiting protrusion; 35. Fourth positioning groove; 4. Seat sleeve; 41. Flow cavity; 42. Limiting part; 43. Second positioning groove; 44. Third positioning groove; 5. Movable baffle; 51. Flow hole; 52. Limiting groove; 53. First positioning groove; 6. First elastic element; 7. Second elastic element; 8. Coil assembly; 9. Valve cover; 10. Nut; 11. Gasket; 12. Sealing ring; 13. Connecting cavity. Detailed Implementation

[0037] To enable those skilled in the art to better understand the technical solutions of this application, the semiconductor process equipment and its solenoid valve provided in this application will be described in detail below with reference to the accompanying drawings.

[0038] In high-pressure environments, pilot-operated solenoid valves are often used. Because of the significant pressure difference between the inside and outside of the main valve, direct opening can easily damage the main valve. Therefore, when opening a pilot-operated solenoid valve, a pilot valve must first be opened to introduce pressure into the main valve, balancing the pressures on both sides before the main valve opens and the fluid flow is regulated. The process of opening the pilot valve prolongs the response time of the pilot-operated solenoid valve, resulting in a slower operation.

[0039] The solenoid valve provided in this application includes a valve body mechanism and a valve core mechanism. The valve body mechanism includes an inlet 21 and an outlet 22. The valve core mechanism is disposed between the inlet 21 and the outlet 22 to control the on / off state of the inlet 21 and the outlet 22.

[0040] It should be noted that the valve core assembly is located between the inlet 21 and the outlet 22. This means that the valve core assembly is located between the inlet 21 and the outlet 22 in the fluid flow path, that is, the fluid needs to flow through the inlet 21, the valve core assembly and the outlet 22 in sequence.

[0041] For example, the inlet 21 and the outlet 22 can be connected by a fluid channel. The fluid channel may include an inlet channel 23 connected to the inlet 21 and an outlet channel 24 connected to the outlet 22, with the inlet channel 23 and the outlet channel 24 interconnected. Fluid must pass through the inlet 21, the fluid channel, and the outlet 22 sequentially to achieve normal flow. The valve core mechanism may be disposed in the inlet channel 23.

[0042] The valve core mechanism includes a movable baffle 5 and a movable core 3. The movable baffle 5 is movably positioned between the inlet 21 and the outlet 22. Optionally, the movable baffle 5 can achieve a sealed connection with the fluid channel through an interference fit, and a small interference fit can be used so that the movable baffle 5 can move coaxially within the fluid channel when displaced under pressure, while maintaining a sealing effect. The movable baffle 5 has a flow hole 51 connecting the inlet 21 and the outlet 22, through which fluid must pass to enter the outlet 22. The movable core 3 is movably installed within the valve body mechanism and corresponds to the position of the flow hole 51. The movable core 3 can move towards or away from the movable baffle 5 under the drive of components such as the coil mechanism, thereby enabling the solenoid valve to regulate the fluid flow rate. The valve core mechanism also includes a first elastic element 6 and a second elastic element 7. The first elastic element 6 is located on the side of the movable baffle 5 away from the inlet 21 and is used to support the movable baffle 5. The second elastic element 7 is located between the movable core 3 and the valve body mechanism, and is used to drive the movable core 3 to close the flow hole 51 when the solenoid valve is closed.

[0043] When the solenoid valve is closed, the movable core 3 fits against the outer periphery of the flow-through hole 51 of the movable baffle 5, sealing the flow-through hole 51. Fluid cannot pass through the movable baffle 5, thus closing the solenoid valve. When the solenoid valve is in a high-pressure environment, the gas in the inlet 21 is under high pressure, such as... Figure 1As shown, both the movable core 3 and the movable baffle 5 are subjected to fluid pressure, causing them to move upwards, thereby causing the first elastic element 6 and the second elastic element 7 to undergo elastic deformation. The first elastic element 6 and the second elastic element 7 apply supporting forces to the movable baffle 5 and the movable core 3, respectively. The supporting force of the first elastic element 6 is less than the fluid pressure borne by the movable baffle 5, while the supporting force of the second elastic element 7 is greater than the fluid pressure borne by the movable core 3. Under the combined action of the supporting force and the fluid pressure, the movable baffle 5 contacts and presses against the movable core 3. The supporting force applied by the second elastic element 7 to the movable core 3 balances the fluid pressure borne by the movable core 3 and the pressure applied by the movable baffle 5 to the movable core 3.

[0044] In this embodiment, the solenoid valve supports the movable baffle 5 and the movable core 3 respectively through the first elastic element 6 and the second elastic element 7, dispersing and canceling the fluid pressure, thus reducing the risk of damage to the solenoid valve caused by fluid pressure. Therefore, the solenoid valve does not need to be equipped with a pilot valve and can directly control the fluid flow rate by moving the movable core 3. This shortens the response time of the solenoid valve and improves its response speed. In addition, the solenoid valve does not need to be equipped with a pilot valve, which simplifies the structure of the solenoid valve and reduces its production cost.

[0045] In some embodiments, the valve core mechanism further includes a seat 4, which is sealed to the side wall of the fluid passage. The seat 4 can achieve a sealed connection to the side wall of the fluid passage through interference fit, threaded connection, or other means. The seat 4 has a through-flow cavity 41. Figure 1 As shown, the movable baffle 5 is located at the end of the seat 4 near the inlet 21, and the flow hole 51 connects the inlet 21 to the flow cavity 41. After the solenoid valve is opened, the fluid needs to pass through the flow hole 51 and the flow cavity 41 in sequence before flowing to the outlet 22. The movable baffle 5 is movably installed in the flow cavity 41 and is sealed against the cavity wall of the flow cavity 41. The movable core 3 seals the flow hole 51 of the movable baffle 5, thereby preventing the fluid from passing through the flow cavity 41 and closing the solenoid valve. The movable baffle 5 and the seat 4 can be slightly interference-fitted. While ensuring a seal, the movable baffle 5 can be displaced along the cavity wall of the flow cavity 41 when subjected to fluid pressure. For example, the interference between the movable baffle 5 and the seat 4 is greater than or equal to 10 μm and less than or equal to 20 μm. Of course, the user can also set the size of the interference as needed, which is not limited here.

[0046] The seat sleeve 4 is fixedly connected to the valve body mechanism. The movable baffle 5 moves within the seat sleeve 4, which avoids direct friction between the movable baffle 5 and the valve body mechanism, thereby preventing wear on the valve body mechanism and extending its service life. After prolonged use, if the movable baffle 5 or the seat sleeve 4 wears down, the worn parts can be replaced. The replacement quantity is small, thus reducing equipment costs.

[0047] In some embodiments, the seat sleeve 4 includes a limiting portion 42 disposed on the cavity wall of the flow cavity 41. For example... Figure 1 and Figure 2 As shown, the limiting part 42 is located on the seat 4 and on the side of the movable baffle 5 away from the inlet 21, and is spaced around the movable core 3. The movable core 3 passes through the limiting part 42 and is inserted into the flow cavity 41. A certain distance is maintained between the limiting part 42 and the movable core 3. When the solenoid valve is open, fluid can pass through the gap between the limiting part 42 and the movable core 3 and flow towards the outlet 22. The movable core 3 has a connecting rod 33 and a sealing part 32. Figure 3 As shown, the limiting part 42 has a through hole in the center, and the connecting rod 33 extends through the through hole into the flow cavity 41 of the seat sleeve 4. The sealing part 32 is located at the lower end of the connecting rod 33. The downward movement of the movable core 3 allows the sealing part 32 to fit against the movable baffle 5, thereby sealing the flow hole 51 on the movable baffle. The first elastic member 6 is located between the limiting part 42 and the movable baffle 5. Since the seat sleeve 4 is fixedly connected to the valve body mechanism, the limiting part 42 can provide support for the first elastic member 6, so that the elastic force of the first elastic member 6 can act completely on the movable baffle 5, improving the utilization efficiency of the elastic force and allowing the elastic force to offset the pressure of the fluid more effectively.

[0048] Furthermore, the sum of the thickness of the movable baffle 5 and the length of the first elastic member 6 when naturally extended is less than the height of the seat sleeve 4, thus ensuring that the movable baffle 5 will not detach from the flow cavity 41. Alternatively, the user can install a locking structure such as a buckle on the cavity wall of the flow cavity 41 to prevent the movable baffle 5 from detaching. The movable baffle 5 and the first elastic member 6 can also be fixedly connected. If the distance between the movable baffle 5 and the limiting part 42 is greater than the length of the first elastic member 6 when naturally extended, the first elastic member 6 will apply a pulling force to the movable baffle 5, further reducing the risk of the movable baffle 5 detaching from the flow cavity 41.

[0049] In some embodiments, such as Figure 1 and Figure 3As shown, the movable core 3 also includes a guide portion 31 connected to the sealing portion 32. The sealing portion 32 and the guide portion 31 are connected by a connecting rod 33, the diameter of which is smaller than the diameter of the guide portion 31 and the diameter of the sealing portion 32. The connecting rod passes through the limiting portion 42 and forms a gap with the limiting portion 42. The valve body mechanism also includes a guide cavity 101 located on the side of the seat 4 away from the inlet 21, into which the guide portion 31 passes. The axial length of the guide cavity 101 may be greater than the axial length of the guide portion 31, and the limiting portion 42 is located between the guide portion 31 and the sealing portion 32. The guide portion 31 is used to cooperate with the cavity wall of the guide cavity 101 to guide the movement of the movable core 3. For example, the cross-section of the guide portion 31 and the cross-section of the guide cavity 101 may both be circular, and their diameters are equal. Therefore, the cavity wall of the guide cavity 101 can limit the guide part 31, so that the guide part 31 can only move along the axis of the guide cavity 101. The direction of the axis of the guide cavity 101 is the direction that is close to or away from the movable baffle 5.

[0050] like Figure 1 As shown, the second elastic element 7 is located between the guide portion 31 and the limiting portion 42, and the direction of the elastic force of the second elastic element 7 is distributed along the axis of the guide cavity 101. When the solenoid valve is closed, the movable core 3 is subjected to fluid pressure and the pressure exerted by the movable baffle 5 on the sealing portion 32, thus the movable core 3 moves away from the inlet 21. The second elastic element 7 is stretched to generate an elastic force, and when this elastic force balances the fluid pressure and the pressure exerted by the movable baffle 5 on the sealing portion 32, the movement of the movable core 3 stops. Of course, the second elastic element 7 can also be provided in other positions, such as between the bottom of the guide cavity 101 and the guide portion 31, which is not limited here.

[0051] In some embodiments, such as Figure 1 and Figure 3 As shown, the movable baffle 5 has a first positioning groove 53 on the side away from the inlet 21, and the limiting part 42 has a second positioning groove 43 on the side near the inlet 21. The two ends of the first elastic member 6 are respectively installed in the first positioning groove 53 and the second positioning groove 43, and the two ends of the first elastic member 6 can be fixed by bonding or welding. The first positioning groove 53 and the second positioning groove 43 can position the two ends of the first elastic member 6 radially on the seat sleeve 4, preventing radial displacement of the two ends of the first elastic member 6 during use. Furthermore, the positions of the first positioning groove 53 and the second positioning groove 43 correspond, thereby distributing the elastic force of the first elastic member 6 as much as possible along the direction parallel to the axis of the seat sleeve 4, reducing the radial force on the movable baffle 5, and thus reducing the friction between the movable baffle 5 and the seat sleeve 4.

[0052] In some embodiments, such as Figure 1 and Figure 3As shown, the limiting part 42 has a third positioning groove 44 on the side away from the inlet 21, and the guide part 31 has a fourth positioning groove 35 on the side near the limiting part 42. The two ends of the second elastic member 7 are respectively installed in the third positioning groove 44 and the fourth positioning groove 35, and the two ends of the second elastic member 7 can be fixed by means of bonding or welding. The third positioning groove 44 and the fourth positioning groove 35 can position the two ends of the second elastic member 7 in the radial direction of the seat sleeve 4, so as to avoid the radial displacement of the two ends of the second elastic member 7 during use. In addition, the positions of the third positioning groove 44 and the fourth positioning groove 35 correspond to each other, so that the elastic force of the second elastic member 7 is distributed as much as possible along the direction parallel to the axis of the guide cavity 101, reducing the radial force on the guide part 31, and thus reducing the friction between the guide part 31 and the guide cavity 101.

[0053] In some embodiments, the diameter of the flow-through orifice 51 is less than half the diameter of the movable baffle 5. For example... Figure 1 As shown, when the solenoid valve is closed, the fluid pressure on the movable baffle 5 causes it to move upward, which in turn causes the movable core 3 to move upward. At this time, the first elastic element 6 and the second elastic element 7 undergo elastic deformation and form a downward supporting force. Because the diameter of the flow hole 51 is small, the fluid pressure on the movable baffle 5 is greater than the fluid pressure on the movable core 3. The supporting force of the second elastic element 7 is greater than the fluid pressure on the movable core 3, so the second elastic element 7 can support the movable core 3 to fit against the outer periphery of the flow hole 51, thereby ensuring the sealing of the solenoid valve under high pressure. In this embodiment, the selection of the first elastic element 6 and the second elastic element 7 is sufficient to achieve the above functions.

[0054] Optionally, the elastic coefficient of the first elastic element 6 can be equal to that of the second elastic element 7. Having equal elastic coefficients and identical dimensions for both reduces the computational burden of selecting the elastic element and allows for substitution, thereby lowering the assembly difficulty and spare parts cost of the solenoid valve. Of course, users can also choose the elastic coefficients of the first elastic element 6 and the second elastic element 7 as needed; this is not limited here.

[0055] In some embodiments, such as Figure 4 and Figure 5 As shown, the movable baffle 5 has a limiting groove 52 on the side away from the inlet 21, and the movable core 3 includes a limiting protrusion 34 located near the inlet 21. The limiting groove 52 cooperates with the limiting protrusion 34 to limit the movable core 3, and the flow hole 51 is arranged around the limiting groove 52. The cooperation between the limiting groove 52 and the limiting protrusion 34 can ensure the concentricity of the movable core 3 and the movable baffle 5, and can also ensure that there is no lateral displacement between the movable baffle 5 and the movable core 3 when the movable baffle 5 moves under the action of fluid pressure.

[0056] Optionally, the number of flow holes 51 is two or more, and each flow hole 51 is evenly arranged around the limiting groove 52.

[0057] For example, there are two flow holes 51, which are symmetrically distributed about the center of the limiting groove 52 to ensure that the gas pressure on the sealing gaskets on both sides of the movable core 3 is the same, and to ensure that the movable core does not shift during operation. Of course, the flow holes 51 can also adopt other distribution methods, such as three flow holes 51, which are evenly distributed around the limiting groove 52. This is not limited here.

[0058] In some embodiments, the sealing portion 32 may be made of rubber material. When the movable baffle 5 is in contact with the sealing portion 32, the pressure between them can cause the sealing portion 32 to undergo elastic deformation, further improving the sealing effect. The sealing portion 32 may also be made of other materials, such as silicone, plastic, etc., and is not limited thereto.

[0059] In some embodiments, the valve body mechanism includes a valve seat 2 and a valve body 1, which are sealed together. For example... Figure 1 and Figure 5 As shown, the valve seat 2 has a mounting groove 25 on the side near the valve body 1, and the valve body 1 is fixed in the mounting groove 25 by means of threaded connection or welding. A sealing ring 12 is provided between the mating surfaces of the valve seat 2 and the valve body 1, thereby improving the sealing performance between the valve body 1 and the valve seat 2. A communicating cavity 13 is formed between the valve seat 2 and the valve body 1. The lower end of the valve body 1 and the bottom of the mounting groove 25 are a certain distance apart, thereby forming a communicating cavity 13 between the valve seat 2 and the valve body 1. An inlet 21 and an outlet 22 are distributed alternately in the valve seat 2. The valve seat 2 also includes an inlet channel 23 for connecting the inlet 21 and the communicating cavity 13 and an outlet channel 24 for connecting the outlet 22 and the communicating cavity 13. The inlet channel 23, the communicating cavity 13, and the outlet channel 24 form a fluid channel, such as Figure 7 As shown, fluid can pass through the fluid channel into the outlet 22. A guide cavity 101 is disposed in the valve body 1 and located on the side of the connecting cavity 13 away from the inlet 21. The guide portion 31 of the movable core 3 is disposed in the guide cavity 101, and the sealing portion 32 extends into the fluid channel. A seat 4 is disposed in the inlet channel 23. The seat 4 can be installed in the inlet channel 23 via a threaded connection, and a sealing ring 12 is provided between the seat 4 and the side wall of the inlet channel 23 to ensure sealing.

[0060] In some embodiments, the solenoid valve further includes a coil assembly 8 and a valve cover 9. For example... Figure 1As shown, the coil assembly 8 is sleeved on the outer periphery of the valve body 1, used to control the movement of the movable core 3 towards or away from the movable baffle 5. Both the solenoid valve body 1 and the movable core 3 are made of soft magnetic material. Electromagnetic force is generated through an electromagnetic circuit, causing the movable core 3 to move and change the distance between itself and the flow orifice 51, thereby changing the fluid flow rate. The valve cover 9 is fitted over the outer periphery of the coil assembly 8 and connected to the valve body 1. The valve cover 9 can be fixed to the top of the valve body 1 via a gasket 11 and a nut 10. The valve cover 9 protects the coil assembly 8 from collisions with other objects. Of course, users can also use other methods to fix the valve cover 9 as needed; this is not limited here.

[0061] When fluid flow is required, the current signal input from the external control device acts on the coil assembly 8, causing an upward electromagnetic force at the upper end of the valve body 1. This electromagnetic force pulls the movable core 3 upward, separating the sealing part 32 of the movable core 3 from the movable baffle 5. The electromagnetic force and the elastic force of the second elastic element 7 are then in equilibrium, allowing fluid to flow at a certain flow rate. The magnitude of the current signal can change the magnitude of the electromagnetic force on the valve body 1, thereby controlling the distance between the sealing part 32 and the movable baffle 5, thus achieving the function of controlling the gas flow rate.

[0062] It should be noted that the solenoid valve provided in this application can be used not only in high-pressure environments but also in medium- and low-pressure environments. Users can select the elastic coefficients of the first elastic element 6 and the second elastic element 7 according to different application scenarios. The higher the pressure of the scenario, the higher the elastic coefficients of the first elastic element 6 and the second elastic element 7 should be selected.

[0063] This application also provides a semiconductor device, including a process chamber, a fluid pipeline, and a solenoid valve as described in any of the above embodiments. The fluid pipeline is connected to the process chamber for supplying process fluid to the process chamber. The solenoid valve is disposed in the fluid pipeline for controlling the flow rate of the process fluid. The solenoid valve can improve the response speed of the control process, thereby improving the accuracy of fluid flow control and enhancing process performance.

[0064] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this application, and this application is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and substance of this application, and these modifications and improvements are also considered to be within the scope of protection of this application.

Claims

1. A solenoid valve, characterized in that, It includes a valve body mechanism and a valve core mechanism, wherein, The valve body mechanism includes an inlet and an outlet, and the valve core mechanism is disposed between the inlet and the outlet to control the opening and closing of the inlet and the outlet; The valve core mechanism includes a movable baffle and a movable core. The movable baffle is movably blocked between the inlet and the outlet. The movable baffle has a flow hole for connecting the inlet and the outlet. The movable core is movably installed in the valve body mechanism and corresponds to the position of the flow hole. The valve core mechanism further includes a first elastic element and a second elastic element. The first elastic element is located on the side of the movable baffle away from the inlet and is used to support the movable baffle. The second elastic element is located between the movable core and the valve body mechanism and is used to drive the movable core to close the flow hole when the solenoid valve is closed.

2. The solenoid valve according to claim 1, characterized in that, The valve core mechanism also includes a seat sleeve, which is fixed between the inlet and the outlet. The seat sleeve has a through flow cavity, and the movable baffle is movably installed in the flow cavity and seals against the cavity wall.

3. The solenoid valve according to claim 2, characterized in that, The seat sleeve includes a limiting part disposed on the cavity wall of the flow cavity. The limiting part is located on the side of the movable baffle away from the inlet and is spaced around the movable core. The movable core has a sealing part for closing the flow hole of the movable baffle. The first elastic element is located between the limiting part and the movable baffle.

4. The solenoid valve according to claim 3, characterized in that, The movable core also includes a guide portion connected to the sealing portion, and the valve body mechanism also includes a guide cavity located on the side of the seat sleeve away from the inlet. The guide portion passes into the guide cavity and is used to cooperate with the cavity wall of the guide cavity to guide the movement of the movable core. The second elastic element is located between the guide portion and the limiting portion.

5. The solenoid valve according to claim 3, characterized in that, The movable baffle has a first positioning groove on the side away from the inlet, and the limiting part has a second positioning groove on the side near the inlet. The two ends of the first elastic member are respectively installed in the first positioning groove and the second positioning groove.

6. The solenoid valve according to claim 4, characterized in that, The limiting part is provided with a third positioning groove on the side away from the inlet, and one end of the second elastic member is installed in the third positioning groove.

7. The solenoid valve according to any one of claims 1 to 6, characterized in that, The movable baffle is provided with a limiting groove on the side away from the inlet. The movable core includes a limiting protrusion located near the inlet. The limiting groove cooperates with the limiting protrusion to limit the movable core. The flow hole is arranged around the limiting groove.

8. The solenoid valve according to claim 4, characterized in that, The valve body mechanism includes a valve seat and a valve body, the valve seat and the valve body are sealed together, a communicating cavity is provided between the valve seat and the valve body, the inlet and the outlet are distributed at intervals in the valve seat, the valve seat also includes an inlet channel for connecting the inlet and the communicating cavity and an outlet channel for connecting the outlet and the communicating cavity, and the guide cavity is disposed in the valve body; The seat cover is installed in the entrance channel.

9. The solenoid valve according to any one of claims 1 to 6, characterized in that, The elastic coefficient of the first elastic element is equal to the elastic coefficient of the second elastic element.

10. The solenoid valve according to any one of claims 1 to 6, characterized in that, The diameter of the flow passage is less than 1 / 2 of the diameter of the baffle.

11. The solenoid valve according to claim 7, characterized in that, The number of flow passages is two or more, and each flow passage is evenly arranged around the limiting groove.

12. A semiconductor device, characterized in that, The device includes a process chamber, a fluid pipeline, and a solenoid valve as described in any one of claims 1 to 11, wherein the fluid pipeline is connected to the process chamber for supplying process fluid to the process chamber, and the solenoid valve is disposed in the fluid pipeline for controlling the flow rate of the process fluid.

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