Double drive variable position vacuum coating machine turret

Abstract

This invention relates to the field of coating machine rotating frame technology, and discloses a dual-drive variable-position vacuum coating machine rotating frame. The rotating frame includes a drive shaft, a revolving disk fixed thereon, a composite gear with upper and lower gear rings mounted on the drive shaft, a drive gear meshing with the lower gear ring, a planetary transmission assembly rotatably connected to the revolving disk, several rotating rods with transmission gears connected to their lower ends, and a displacement mechanism. By locking the drive gear or drive shaft separately and driving another component, a composite motion of the rotating rods revolving around the main shaft and rotating around their own axis can be achieved, or pure rotation can occur at a fixed circumferential position. The displacement mechanism includes an arc-shaped track on the revolving disk and a displacement bracket connecting the rotating rods, allowing the circumferential position of the rotating rods to be adjustable and locked in place. This invention offers flexible motion modes, displacement adjustment capabilities, and dynamic temperature measurement via a temperature sensor located within the hollow drive shaft, effectively improving the adaptability, uniformity, and controllability of the coating process.

Description

Technical Field

[0001] This invention relates to the field of coating machine rotating frame technology, specifically to a dual-drive variable-position vacuum coating machine rotating frame. Background Technology

[0002] Vacuum coating is a process in which gaseous particles of a target material are deposited onto the surface of a workpiece to form a thin film within a high-vacuum chamber. In this process, the rotating frame of the coating machine is a key component, and its movement directly affects the uniformity, density, and production efficiency of the film.

[0003] Currently, there are several technical approaches to achieving composite motion of workpieces in vacuum coating machine rotating frames, but all of them have certain limitations:

[0004] The first type of rotating frame can only realize the workpiece's revolution or a simple combination of revolution and rotation, and cannot enable the workpiece to rotate independently at a specific process position within the coating cavity (such as directly below the sputtering target). This limitation of motion mode restricts the flexibility of process optimization, makes it difficult to perform special treatment on local areas, and affects the realization of high-end coating processes.

[0005] To achieve comprehensive functionality, the second type of rotating frame employs a more complex transmission system. For example, some designs utilize a complete planetary gear mechanism independently mounted on each workpiece support arm to achieve compound motion. This structure results in a large number of gears, which, in the special environment of vacuum coating with metal dust and particulate contamination, easily leads to jamming and wear at the gear meshing points, resulting in a high equipment failure rate and frequent maintenance. Furthermore, to achieve position adjustment, some rotating frames adopt a cantilevered displacement structure, but its load-bearing capacity and rigidity are insufficient, making it difficult to stably support large or heavy workpieces, thus limiting its application range.

[0006] While the third type of rotating frame improves motion performance, it has inherent structural defects. For example, there is a type of rotating frame in the prior art that can realize both revolution and rotation, and a coating machine rotating frame that has the combined motion of revolution and rotation as well as rotation at a specific position. However, this solution also fails to solve the problem of flexible and adjustable workpiece position.

[0007] In summary, the existing vacuum coating machine rotating frame cannot simultaneously achieve reliable combined revolution and rotation motion, as well as rotation at a specific position, while also possessing a high-load-bearing variable displacement function. This is a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0008] This invention provides a dual-drive variable-position vacuum coating machine rotating frame to solve the above-mentioned problems.

[0009] This invention provides a dual-drive variable-position vacuum coating machine rotating frame, comprising:

[0010] A drive shaft, on which a rotating disk is fixedly connected;

[0011] A composite gear, wherein the composite gear is rotatably connected to the transmission shaft via a bearing, and is provided with an upper large gear ring and a lower small gear ring coaxially distributed;

[0012] The drive gear meshes with the lower small gear ring;

[0013] Several planetary transmission components are rotatably connected to the planetary disk via planetary shafts, and each planetary transmission component includes an upper gear and a lower gear fixed to the planetary shaft, wherein the lower gear meshes with the upper large gear ring.

[0014] Several rotating rods are configured to follow the revolution disk in revolution, and the lower end of each rotating rod is connected to a transmission gear that meshes with the upper gear.

[0015] The displacement mechanism includes an arc-shaped displacement track fixed to the upper surface of the rotary disk and a displacement bracket rotatably connected to the lower end of the rotating rod. The displacement bracket can slide along the displacement track and is fixed to different locking positions on the displacement track by locking members.

[0016] When a combined revolution and rotation motion is required, the drive gear is locked to prevent rotation, and then the drive shaft is rotated. The drive shaft drives the planetary disk and all planetary shafts to revolve. Because the upper large gear ring of the compound gear is fixed, the lower gear in the revolution will mesh with the fixed upper large gear ring and rotate, thereby driving the upper gear to rotate via the planetary shafts. The upper gear then drives the transmission gear and the rotating rod that mesh with it to rotate. Finally, the rotating rod revolves around the drive shaft while also continuously rotating on its own axis.

[0017] When it is necessary to achieve rotation only at a specific position, the drive shaft is locked (thus locking the planetary disk), and then the drive gear is driven to rotate. The drive gear drives the compound gear to rotate around the drive shaft. At this time, since the planetary disk is fixed, the planetary shaft does not revolve. The rotating upper large gear ring drives the lower gear meshing with it to rotate, and the power is finally transmitted to the rotating rod, causing it to rotate purely on its own axis at a fixed circumferential position.

[0018] When it is necessary to adjust the circumferential position (displacement) of the rotating rod, loosen the locking device and manually or with the aid of a tool push the displacement bracket along the displacement track, causing the lower end of the rotating rod to move. At the same time, the upper end of the rotating rod also moves synchronously, causing the transmission gear to rotate about the upper gear and maintain meshing. This allows adjustment of the rotating rod's position relative to the planetary transmission assembly's circumferential direction. When the desired position is reached, re-lock the displacement bracket onto the displacement track using the locking device. Simultaneously, the upper end of the rotating rod is also simultaneously limited, ensuring that the rotating rod can still rotate at this point.

[0019] In one optional embodiment, the dual-drive variable-position vacuum coating machine frame further includes a support plate and a drive shaft. The drive shaft is rotatably connected to the support plate, and the top end of the drive shaft is connected to the drive gear. The transmission shaft is rotatably connected to the support plate, and the compound gear is located between the rotating disk and the support plate.

[0020] In one optional embodiment, the rotating frame of the dual-drive variable-position vacuum coating machine further includes a retaining plate and a fixing rod. The lower end of the fixing rod is connected to the rotating disk, and the upper end is connected to the retaining plate. The retaining plate is provided with a plurality of mounting holes for mounting the rotating rod, and the distribution of the mounting holes corresponds to the preset locking positions on the variable-position track.

[0021] In one alternative embodiment, the dual-drive variable-position vacuum coating machine frame further includes an integral protective cover connected to the rotary table, the integral protective cover and the support plate forming a protective space for accommodating the gear transmission structure.

[0022] In one optional embodiment, the overall protective cover is provided with an arc-shaped notch for the rotating rod to pass through, and a through hole for the locking member to pass through at the corresponding locking position of the displacement track.

[0023] In one alternative embodiment, a plurality of workpiece mounting assemblies for loading workpieces are mounted on the shaft of the rotating rod.

[0024] In one alternative embodiment, the drive shaft is a hollow structure, with a temperature sensor installed inside, and the probe of the temperature sensor protruding through the drive shaft.

[0025] In one alternative embodiment, the dual-drive variable-position vacuum coating machine frame further includes a small gear protective cover covering the meshing area between the upper gear and the transmission gear.

[0026] In one optional embodiment, the locking member is a locking rod, the displacement bracket is provided with a first locking hole, the locking position is a second locking hole provided along the arc of the displacement track, and the locking rod can be inserted into the first locking hole and one of the second locking holes at the same time to fix the position of the displacement bracket.

[0027] In one alternative implementation, the center of the arc-shaped displacement orbit coincides with the axis of the planetary axis. Attached Figure Description

[0028] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of a dual-drive variable-position vacuum coating machine frame according to an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the structure of a dual-drive variable-position vacuum coating machine frame after removing the overall protective cover, according to an embodiment of the present invention.

[0031] Figure 3 This is a cross-sectional view of a rotating frame for a dual-drive variable-position vacuum coating machine according to an embodiment of the present invention;

[0032] Figure 4 for Figure 3 A magnified view of a section at point A in the middle;

[0033] Figure 5 This is a schematic diagram of the structure of the displacement bracket and displacement track in the rotating frame of a dual-drive variable displacement vacuum coating machine according to an embodiment of the present invention;

[0034] Figure 6 This is a schematic diagram of the displacement of the rotating rod of a dual-drive variable-position vacuum coating machine under a top-view angle, according to an embodiment of the present invention. Figure 1 ;

[0035] Figure 7 This is a schematic diagram of the displacement of the rotating rod of a dual-drive variable-position vacuum coating machine under a top-view angle, according to an embodiment of the present invention. Figure 2 .

[0036] Explanation of reference numerals in the attached figures:

[0037] 1. Drive shaft; 101. Mounting hole;

[0038] 2. Revolutionary disk;

[0039] 3. Compound gear; 31. Lower small gear ring; 32. Upper large gear ring;

[0040] 4. Drive gear;

[0041] 51. Planetary shaft; 52. Upper gear; 53. Lower gear;

[0042] 6. Rotating rod;

[0043] 7. Transmission gears;

[0044] 8. Temperature sensor;

[0045] 9. Drive shaft;

[0046] 10. Hold the plate;

[0047] 11. Fixing rod;

[0048] 12. Displacement support;

[0049] 13. Displacement orbit;

[0050] 14. Overall protective cover; 141. Arc-shaped notch; 142. Through hole;

[0051] 15. Workpiece mounting assembly;

[0052] 16. Small gear protective cover;

[0053] 17. Support plate. Detailed Implementation

[0054] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0055] Vacuum coating is a process in which gaseous particles of a target material are deposited onto the surface of a workpiece to form a thin film within a high-vacuum chamber. In this process, the rotating frame of the coating machine is a key component, and its movement directly affects the uniformity, density, and production efficiency of the film.

[0056] Currently, there are several technical approaches to achieving composite motion of workpieces in vacuum coating machine rotating frames, but all of them have certain limitations:

[0057] The first type of rotating frame can only realize the workpiece's revolution or a simple combination of revolution and rotation, and cannot enable the workpiece to rotate independently at a specific process position within the coating cavity (such as directly below the sputtering target). This limitation of motion mode restricts the flexibility of process optimization, makes it difficult to perform special treatment on local areas, and affects the realization of high-end coating processes.

[0058] To achieve comprehensive functionality, the second type of rotating frame employs a more complex transmission system. For example, some designs utilize a complete planetary gear mechanism independently mounted on each workpiece support arm to achieve compound motion. This structure results in a large number of gears, which, in the special environment of vacuum coating with metal dust and particulate contamination, easily leads to jamming and wear at the gear meshing points, resulting in a high equipment failure rate and frequent maintenance. Furthermore, to achieve position adjustment, some rotating frames adopt a cantilevered displacement structure, but its load-bearing capacity and rigidity are insufficient, making it difficult to stably support large or heavy workpieces, thus limiting its application range.

[0059] While the third type of rotating frame improves motion performance, it has inherent structural defects. For example, there is a type of rotating frame in the prior art that can realize both revolution and rotation, and a coating machine rotating frame that has the combined motion of revolution and rotation as well as rotation at a specific position. However, this solution also fails to solve the problem of flexible and adjustable workpiece position.

[0060] In summary, the existing vacuum coating machine rotating frame cannot simultaneously achieve reliable combined revolution and rotation motion, as well as rotation at a specific position, while also possessing a high-load-bearing variable displacement function. This is a technical problem that urgently needs to be solved in this field.

[0061] The following is combined Figures 1 to 7 The following describes embodiments of the present invention.

[0062] According to an embodiment of the present invention, a dual-drive variable-position vacuum coating machine frame is provided, comprising a drive shaft 1, a planetary disk 2, a compound gear 3, a drive gear 4, a plurality of planetary transmission assemblies, a plurality of rotating rods 6, transmission gears 7, and a displacement mechanism; the drive shaft 1 is fixedly connected to the planetary disk 2; the compound gear 3 is rotatably connected to the drive shaft 1 via bearings, and is provided with an upper large gear ring 32 and a lower small gear ring 31 coaxially distributed; the drive gear 4 meshes with the lower small gear ring 31; the planetary transmission assemblies are rotatably connected to the planetary disk 2 via planetary shafts 51, and each planetary transmission assembly... The assembly includes an upper gear 52 and a lower gear 53 fixed to the planetary shaft 51, the lower gear 53 meshing with the upper large gear ring 32; a plurality of rotating rods 6 are configured to follow the revolution disk 2 in revolution, and the lower end of the rotating rod 6 is connected to a transmission gear 7 meshing with the upper gear 52; the displacement mechanism includes an arc-shaped displacement track 13 fixed to the upper surface of the revolution disk 2 and a displacement bracket 12 rotatably connected to the lower end of the rotating rod 6, the displacement bracket 12 being able to slide along the displacement track 13 and being fixed to different locking positions on the displacement track 13 by locking members.

[0063] The rotating frame includes a vertically arranged drive shaft 1, with a disc-shaped revolving disk 2 fixedly connected (e.g., via a key or flange connection) to its upper end. A compound gear 3 is rotatably mounted on the drive shaft 1 via bearings (e.g., deep groove ball bearings) and located below the revolving disk 2. The compound gear 3 is either an integral structure or a fixed assembly structure, having an upper large gear ring 32 and a lower small gear ring 31 coaxially distributed. A drive gear 4 is disposed on one side of the compound gear 3 and directly meshes with the lower small gear ring 31.

[0064] On the planetary disk 2, multiple planetary shaft 51 mounting holes 101 are evenly distributed along its circumference. Each mounting hole 101 houses a planetary shaft 51 via a bearing. Each planetary shaft 51 is fixedly mounted (e.g., connected by a key) with two gears: a lower gear 53 located below and an upper gear 52 located above, which rotate synchronously with the planetary shaft 51. All lower gears 53 mesh with the upper large gear ring 32 of the compound gear 3.

[0065] The rotating frame also includes multiple rotating rods 6, the number of which typically corresponds to the number of planetary shafts 51. A transmission gear 7 is fixedly connected to the lower end of each rotating rod 6. This transmission gear 7 meshes with the upper gear 52 in the corresponding planetary transmission assembly directly below it. The upper end of the rotating rod 6 is configured to move synchronously with or be restricted by the lower end of the rotating rod 6, thereby enabling the rotating rod 6 to revolve with the orbital disk 2 while simultaneously rotating on its own axis via gear transmission.

[0066] To achieve flexible adjustment of the circumferential position of the rotating rod 6, this embodiment includes a displacement mechanism. This mechanism includes an arc-shaped displacement track 13, which is fixedly mounted on the upper surface of the rotary disk 2 by bolts or welding. At the lower end of each rotating rod 6, a displacement bracket 12 is hinged or connected via a bearing. The bottom of the displacement bracket 12 is equipped with a slider or roller, allowing it to slide along the arc-shaped groove of the displacement track 13. A series of locking positions (such as lock holes or grooves) are spaced along the arc on the displacement track 13. When the displacement bracket 12 slides to the target position, a locking element (such as a pin or screw) passes through the displacement bracket 12 and is fastened to the locking position of the displacement track 13, thereby fixing the lower end position of the rotating rod 6.

[0067] When a combined revolution and rotation motion is required, the drive gear 4 is locked to prevent rotation, and then the drive shaft 1 is driven to rotate. The drive shaft 1 drives the revolution disk 2 and all planetary shafts 51 to revolve. Since the upper large gear ring 32 of the compound gear 3 is fixed (through the locked drive gear 4 and the compound gear 3), the revolving lower gear 53 will mesh with the fixed upper large gear ring 32 and rotate, thereby driving the upper gear 52 to rotate via the planetary shafts 51. The upper gear 52 then drives the transmission gear 7 and the rotating rod 6, which mesh with it, to rotate. Finally, the rotating rod 6 revolves around the drive shaft 1 while also continuously rotating on its own axis.

[0068] When it is necessary to achieve rotation only at a specific position, the drive shaft 1 is locked (thus locking the planetary disk 2), and then the drive gear 4 is driven to rotate. The drive gear 4 drives the compound gear 3 to rotate around the drive shaft 1. At this time, since the planetary disk 2 is fixed, the planetary shaft 51 does not revolve. The rotating upper large gear ring 32 drives the lower gear 53 meshing with it to rotate, and the power is finally transmitted to the rotating rod 6, causing it to rotate purely on its own axis at a fixed circumferential position.

[0069] When it is necessary to adjust the circumferential position (displacement) of the rotating rod 6, loosen the locking device and manually or with the aid of a tool push the displacement bracket 12 along the displacement track 13, causing the lower end of the rotating rod 6 to move. At the same time, the upper end of the rotating rod 6 also moves synchronously, causing the transmission gear 7 to rotate about the upper gear 52 and maintain a meshing relationship. The position of the rotating rod 6 about the circumferential direction of the planetary transmission assembly can be adjusted. When the desired position is reached, the displacement bracket 12 is fixed to the displacement track 13 again with the locking device. At the same time, the upper end of the rotating rod 6 is also simultaneously limited, ensuring that the rotating rod 6 can rotate at this time.

[0070] In one embodiment, the rotating frame of the dual-drive variable-position vacuum coating machine further includes a support disk 17 and a drive shaft 9. The drive shaft 9 is rotatably connected to the support disk 17, the top end of the drive shaft 9 is connected to the drive gear 4, the transmission shaft 1 is rotatably connected to the support disk 17, and the compound gear 3 is located between the rotating disk 2 and the support disk 17.

[0071] The rotating frame in this embodiment also includes a support plate 17. The support plate 17 is typically a horizontally arranged rigid disc or frame structure, serving as the basic component for the entire rotating frame system to be installed into the vacuum coating machine cavity.

[0072] A drive shaft 9 is vertically mounted and rotatably mounted on a support plate 17 via bearings. The top end (upper end) of the drive shaft 9 is fixedly connected to the drive gear 4 via a key or flange, for inputting rotational power to the drive gear 4. The bottom end (lower end) of the drive shaft 9 is used to connect to an external power source (such as a motor).

[0073] The drive shaft 1 is also rotatably connected to the support disk 17 via bearings. Specifically, the drive shaft 1 can pass through the central hole of the support disk 17, and is rotatably supported relative to the support disk 17 by a set of bearings. The compound gear 3 is located in the axial space between the revolution disk 2 and the support disk 17. The upper surface of the support disk 17 can provide axial support or limit the lower end face of the compound gear 3, thereby constraining the axial position of the compound gear 3 together with the revolution disk 2 above, allowing it to rotate freely only around the drive shaft 1.

[0074] This embodiment, by adding a support plate 17, provides a stable and reliable mounting reference for the transmission shaft 1, drive shaft 9, and the entire upper transmission structure, ensuring the long-term stability of the concentricity of each rotating component. The independent rotational connection design between the drive shaft 9 and the support plate 17 makes the power input of the drive gear 4 smoother and more independent, facilitating precise control. Simultaneously, the compound gear 3 is constrained within a defined space between the revolving disk 2 and the support plate 17, resulting in a more stable running trajectory and contributing to improved reliability of the entire gear transmission system.

[0075] In one embodiment, the rotating frame of the dual-drive variable-position vacuum coating machine further includes a retaining plate 10 and a fixing rod 11. The lower end of the fixing rod 11 is connected to the rotating disk 2, and the upper end is connected to the retaining plate 10. The retaining plate 10 is provided with a plurality of mounting holes 101 for mounting the rotating rod 6. The distribution of the mounting holes 101 corresponds to the preset locking position on the variable-position track 13.

[0076] The rotating frame in this embodiment also includes a retaining plate 10 and at least one fixing rod 11. The lower end of the fixing rod 11 is fixedly connected to the rotating disk 2 by means of threaded connection or welding, and its upper end is also fixedly connected to the retaining plate 10. There can be three or four fixing rods 11, which are evenly distributed circumferentially, thereby stably supporting the retaining plate 10 above the rotating disk 2 and keeping it parallel to and rotating synchronously with the rotating disk 2.

[0077] The retaining plate 10 has several mounting holes 101, and the upper end of each rotating rod 6 is rotatably mounted in a corresponding mounting hole 101 via a bearing or bushing. Thus, the upper and lower ends of the rotating rod 6 are supported by the retaining plate 10 and the displacement bracket 12 respectively, forming a stable double support structure, which significantly enhances the rigidity of the rotating rod 6 during high-speed rotation and reduces vibration.

[0078] Crucially, the circumferential distribution of the mounting holes 101 on the retaining plate 10 precisely corresponds to a series of preset locking positions (i.e., positions that allow the displacement bracket 12 to be fixed) on the displacement track 13. This means that when the operator loosens the locking mechanism and slides the displacement bracket 12 along the displacement track 13 to adjust the circumferential position of a certain rotating rod 6, once the displacement bracket 12 is fixed in any of the preset locking positions on the track, the upper end of the rotating rod 6 can be aligned with the corresponding mounting hole 101 on the retaining plate 10, thus allowing the upper end of the rotating rod 6 to be smoothly inserted into the hole for fixing. This design enables the rapid and accurate alignment of the upper and lower support points of the rotating rod 6 after displacement adjustment, greatly facilitating operation.

[0079] This embodiment provides an upper support point for the rotating rod 6 by adding a retaining disc 10 supported by a fixed rod 11, transforming it from a cantilever beam structure to a simply supported beam structure, significantly improving the system's rigidity, stability, and load-bearing capacity. Simultaneously, the ingenious design of "mounting holes 101 corresponding to the locking position" solves the problem of realigning the upper and lower ends after adjusting the position of the rotating rod 6, making the repositioning operation intuitive, fast, and accurate, thus improving the equipment's adjustment efficiency and practicality.

[0080] In one embodiment, the rotating frame of the dual-drive variable-position vacuum coating machine also includes an integral protective cover 14 connected to the rotating disk 2. The integral protective cover 14 and the support disk 17 together form a protective space for accommodating the gear transmission structure.

[0081] The overall protective cover 14 is positioned above and outside the gear train, including the planetary transmission assembly, the rotary disk 2, the compound gear 3, the drive gear 4, and the planetary transmission components. A small gap is maintained between its lower edge and the upper surface of the fixed support disk 17, or a dynamic sealing structure such as a labyrinth seal or a magnetic fluid seal is used to achieve a seal against relative movement. Thus, the overall protective cover 14 and the support disk 17 together form a essentially enclosed protective space. This protective space completely accommodates key transmission structures such as the meshing pairs of the drive gear 4 and the compound gear 3, and the meshing pairs of the upper large gear ring 32 of the compound gear 3 and all the lower gears 53, isolating them from the main process area of ​​the vacuum coating chamber.

[0082] This embodiment effectively isolates the internal precision gear transmission system from the external coating environment by setting up an overall protective cover 14 that rotates synchronously with the revolution disk 2 and forming a dynamic enclosed space with the fixed support disk 17. This prevents contaminants such as metal particles and sputtering dust generated during the coating process from entering the gear meshing surface, greatly reducing gear jamming, abnormal wear, and malfunctions caused by contamination, and significantly improving the long-term operational reliability and service life of the transmission system in the harsh vacuum coating environment.

[0083] In one embodiment, the overall protective cover 14 is provided with an arc-shaped notch 141 through which the rotating rod 6 passes, and a through hole 142 through which the locking member passes at the corresponding locking position of the displacement track 13.

[0084] First, at the top of the overall protective cover 14, corresponding to the position of each rotating rod 6, an arc-shaped notch 141 is provided. The curvature of this arc-shaped notch 141 is completely consistent with the arc of the displacement track 13 located directly below it, and the two are concentric. Each rotating rod 6 passes through the corresponding arc-shaped notch 141. This design ensures that when the displacement bracket 12 at the lower end of the rotating rod 6 slides along the displacement track 13 to adjust its circumferential position, the upper part of the rotating rod 6 can move synchronously and smoothly within the arc-shaped notch 141 without interfering with the protective cover. The width of the arc-shaped notch 141 is slightly larger than the diameter of the rotating rod 6, which ensures freedom of movement while minimizing the opening size to maintain the protective effect.

[0085] Secondly, at the top of the overall protective cover 14, a through hole 142 is provided for each preset locking position on the displacement track 13. This through hole 142 is a circular through hole, precisely aligned with the hole on the displacement track 13 for inserting a locking component (such as a locking rod). When it is necessary to lock or unlock the displacement bracket 12, the operator can directly insert or remove the locking component from the outside of the overall protective cover 14 through the corresponding through hole 142 into the locking hole between the displacement bracket 12 and the displacement track 13, thereby completing the displacement fixing or release operation without opening or disassembling the overall protective cover 14.

[0086] In one embodiment, a plurality of workpiece mounting assemblies 15 for loading workpieces are mounted on the shaft of the rotating rod 6.

[0087] In this embodiment, each of the rotating rods 6 is no longer merely a rod that transmits motion, but rather a core component that supports the workpiece. Along its vertical rod, a plurality of workpiece mounting assemblies 15 for loading the workpiece are installed at axial intervals.

[0088] The specific form of the workpiece mounting assembly 15 can be a clamp, chuck, bracket, or mounting plate with standard interfaces (such as threaded holes or dovetail grooves). They can be fixed or adjustablely mounted on the shaft of the rotating rod 6 by means of clamps, bolts, or welding. Each workpiece mounting assembly 15 is configured to reliably clamp one or more substrates (workpieces) to be coated, ensuring that the workpiece remains stable and aligned during revolution, rotation, or displacement adjustment with the rotating rod 6.

[0089] This configuration allows the multi-layered workpiece mounting assembly 15 to support multiple workpieces simultaneously on a single rotating rod 6, significantly improving the loading capacity and space utilization in a single coating production cycle. Driven by the rotating frame, all workpieces on the rotating rod 6 can synchronously undergo compound motion or fixed-point rotation, ensuring a uniform and consistent thin film deposition effect on the surface of each workpiece.

[0090] In one embodiment, the drive shaft 1 is a hollow structure, and a temperature sensor 8 is installed inside it, with the probe of the temperature sensor 8 extending out of the drive shaft 1.

[0091] In this embodiment, the drive shaft 1 is constructed as a hollow structure, meaning that a through hole is machined along the axial center of its interior. A temperature sensor 8, such as a thermocouple or a platinum resistance thermometer, is installed inside this hollow cavity.

[0092] The probe (sensing end) of the temperature sensor 8 extends through a pre-drilled hole in the side wall or end of the drive shaft 1. The specific position of the probe can be set according to the needs of the process temperature measurement point; for example, it can be positioned directly opposite a fixed area on the rotary table 2, near a planetary transmission component, or directly pointing towards the workpiece mounting area on the rotating rod 6. The leads of the temperature sensor 8 are led out through the internal cavity of the drive shaft 1 and connected to an external data acquisition device or control system.

[0093] Temperature sensor 8 and its probe are fixedly connected to drive shaft 1. Therefore, regardless of whether drive shaft 1 is stationary or revolving around the rotating disk 2, temperature sensor 8 rotates along with it. By integrating temperature sensor 8 inside the hollow drive shaft 1 and having it rotate with the shaft, the problem of continuous and dynamic temperature measurement at a specific location while the vacuum coating machine's rotating frame is in motion is creatively solved. The probe can always be aimed at a fixed process location (such as the plasma enrichment area directly below the target material), monitoring the temperature change at that point in real time. This provides crucial direct data for accurately controlling coating process parameters (such as deposition rate and film stress). Compared to indirect measurement by mounting sensors on a fixed cavity wall, this solution obtains more direct and accurate temperature data without interfering with the normal movement of the rotating frame and the process.

[0094] In one embodiment, the dual-drive variable-position vacuum coating machine frame further includes a small gear protective cover 16 covering the meshing area between the upper gear 52 and the transmission gear 7.

[0095] The rotating frame in this embodiment also includes one or more pinion guards 16. Each pinion guard 16 is specifically used to cover the meshing area between an upper gear 52 and a transmission gear 7.

[0096] This pinion gear protective cover 16 can be a separate two-part housing or a cover with an opening. It is directly fixed to the planetary disk 2 or near the bearing housing of the planetary shaft 51 by bolts or snaps, ensuring its position remains fixed to the gear pair that needs protection. The shape of the pinion gear protective cover 16 is designed to tightly surround the meshing tooth surfaces of the upper gear 52 and the drive gear 7, while leaving a small gap to avoid friction with the rotating gears. Its cover effectively prevents contaminants from the sides or above from directly splashing onto the meshing surfaces of this gear pair.

[0097] In one embodiment, the locking element is a locking rod, the displacement bracket 12 is provided with a first locking hole, the locking position is a second locking hole provided along the arc of the displacement track 13, and the locking rod can be inserted into the first locking hole and one of the second locking holes at the same time to fix the position of the displacement bracket 12.

[0098] In this embodiment, the locking element for fixing the displacement bracket 12 is specifically implemented as a locking rod (e.g., a pin, locating pin, or bolt). Correspondingly, a first locking hole is machined at an appropriate position on the displacement bracket 12 (e.g., its bottom or side). Simultaneously, multiple second locking holes are spaced apart along the arc-shaped trajectory of the displacement track 13. The positions of these second locking holes are the aforementioned "preset locking positions." The diameters of the first and second locking holes match, both slightly larger than the diameter of the locking rod, to ensure smooth insertion of the locking rod.

[0099] When the operator needs to adjust the position of the rotating rod 6, first pull out the locking rod to unlock the displacement bracket 12 from the displacement track 13. Then, slide the displacement bracket 12 along the displacement track 13 to the target angle. At this time, the first locking hole on the displacement bracket 12 will align with a corresponding second locking hole on the displacement track 13. Finally, insert the locking rod into both the aligned first and second locking holes simultaneously, thus mechanically restricting the displacement bracket 12's freedom of movement along the track and firmly fixing it to the target position.

[0100] In one embodiment, the center of the arc-shaped displacement orbit 13 coincides with the axis of the planetary axis 51.

[0101] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A rotating frame for a dual-drive variable-position vacuum coating machine, characterized in that, include: A drive shaft (1) is fixedly connected to a rotating disk (2); The composite gear (3) is rotatably connected to the transmission shaft (1) via a bearing, and is provided with an upper large gear ring (32) and a lower small gear ring (31) coaxially distributed. The drive gear (4) meshes with the lower small gear ring (31); Several planetary transmission components are rotatably connected to the planetary disk (2) via planetary shafts (51), and each planetary transmission component includes an upper gear (52) and a lower gear (53) fixed to the planetary shaft (51), wherein the lower gear (53) meshes with the upper large gear ring (32); Several rotating rods (6) are configured to follow the revolution disk (2) in revolution, and the lower end of the rotating rods (6) is connected to a transmission gear (7) that meshes with the upper gear (52). The displacement mechanism includes an arc-shaped displacement track (13) fixed to the upper surface of the rotary disk (2) and a displacement bracket (12) rotatably connected to the lower end of the rotating rod (6). The displacement bracket (12) can slide along the displacement track (13) and be fixed to different locking positions on the displacement track (13) by locking members. The center of the arc-shaped displacement orbit (13) coincides with the axis of the planetary axis (51).

2. The dual-drive variable-position vacuum coating machine frame according to claim 1, characterized in that, It also includes a support disk (17) and a drive shaft (9), the drive shaft (9) being rotatably connected to the support disk (17), the top end of the drive shaft (9) being connected to the drive gear (4), the transmission shaft (1) being rotatably connected to the support disk (17), and the compound gear (3) being located between the revolution disk (2) and the support disk (17).

3. The dual-drive variable-position vacuum coating machine frame according to claim 2, characterized in that, It also includes a retaining plate (10) and a fixing rod (11). The lower end of the fixing rod (11) is connected to the revolving disk (2), and the upper end is connected to the retaining plate (10). The retaining plate (10) is provided with a plurality of mounting holes (101) for mounting the rotating rod (6). The distribution of the mounting holes (101) corresponds to the preset locking position on the displacement track (13).

4. The dual-drive variable-position vacuum coating machine frame according to claim 3, characterized in that, It also includes an integral protective cover (14) connected to the rotatable disk (2), the integral protective cover (14) and the support disk (17) together forming a protective space for accommodating the gear transmission structure.

5. The dual-drive variable-position vacuum coating machine turntable according to claim 4, characterized in that, The overall protective cover (14) is provided with an arc-shaped notch (141) through which the rotating rod (6) passes, and a through hole (142) through which the locking member passes at the corresponding locking position of the displacement track (13).

6. The dual-drive variable-position vacuum coating machine turntable according to any one of claims 1-5, characterized in that, The rotating rod (6) is equipped with several workpiece mounting assemblies (15) for loading workpieces.

7. The dual-drive variable-position vacuum coating machine turntable according to any one of claims 1-5, characterized in that, The drive shaft (1) is a hollow structure, and a temperature sensor (8) is installed inside it. The probe of the temperature sensor (8) extends out of the drive shaft (1).

8. The dual-drive variable-position vacuum coating machine frame according to claim 7, characterized in that, It also includes a pinion guard (16) covering the meshing area between the upper gear (52) and the transmission gear (7).

9. The dual-drive variable-position vacuum coating machine turntable according to claim 1, characterized in that, The locking component is a locking rod. The displacement bracket (12) is provided with a first locking hole. The locking position is a second locking hole provided along the arc of the displacement track (13). The locking rod can be inserted into the first locking hole and one of the second locking holes at the same time to fix the position of the displacement bracket (12).

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