Rotary spraying type wet process all-in-one machine

Abstract

The invention discloses a rotary spraying type wet process all-in-one machine which comprises a rack, a processing barrel, a liquid supply part and an air exhaust part, an upper area and a lower area are arranged in the rack in the height direction, the processing barrel is installed in the upper area, the liquid supply part is arranged in the lower area, and the liquid supply part comprises a plurality of liquid supply units; the liquid supply unit is used for supplying a solvent used in the processing process to the processing barrel; the liquid supply unit comprises a box body, an air pump and a liquid storage tank, the liquid storage tank is used for storing a solvent used in a treatment process, the liquid storage tank is communicated with the air pump through a pipeline, and the air pump at least provides power for flowing of the solvent; the air exhaust part comprises a first air exhaust unit and a second air exhaust unit, the first air exhaust unit is used for extracting volatile gas in the upper area, and the second air exhaust unit is used for extracting volatile gas in the box body. According to the rotary spraying type wet process all-in-one machine, volatile gas in the upper area and the liquid supply box body is extracted through the first gas extraction unit and the second gas extraction unit of the gas extraction part, global gas exhaust pipe control is achieved, and potential safety hazards caused by accumulation of solvent volatile gas are avoided.

Description

Technical Field

[0001] This invention relates to the field of wafer processing technology, and more particularly to a rotary spray wet processing integrated machine. Background Technology

[0002] A wafer is a silicon wafer used in the fabrication of silicon semiconductor integrated circuits. It is called a wafer because of its circular shape. Various circuit element structures can be fabricated on silicon wafers to create electronic components with specific electrical functions.

[0003] The rotary spray wet process machine is a wet drying machine used in wafer manufacturing in the semiconductor industry. It can be used for wet process processes with solvents such as strong acids, strong alkalis, and organic solvents, and is suitable for most wet processes of wafers from 2 inches to 12 inches.

[0004] Currently, existing rotary wet laminar flow machines are generally equipped with multiple liquid supply units to meet various process requirements. These units are installed side-by-side at the bottom of the chassis. Each unit includes an air pump and a storage tank. The storage tank is used to store the solvents used in the process. For some organic solvents (such as isopropanol), which is volatile and flammable, there is a certain risk of fire in the liquid supply units. However, the air pumps and storage tanks of existing liquid supply units are exposed inside the chassis. This means that if one liquid supply unit catches fire, it will quickly ignite other liquid supply units, causing serious economic losses. Summary of the Invention

[0005] To address the related technical problems, the present invention aims to provide a rotary spray wet process integrated machine to solve the safety issues of the liquid supply component.

[0006] To achieve the above objectives, the embodiments of the present invention adopt the following technical solutions:

[0007] A rotary jet wet scrubbing machine includes a frame, a processing cylinder, a liquid supply unit, and an air extraction unit, wherein:

[0008] The frame is provided with an upper region and a lower region along the height direction. The upper region is equipped with a processing cylinder, and the lower region is equipped with a liquid supply section. The liquid supply section includes multiple liquid supply units, which are configured to supply the processing cylinder with the solvent used in the process.

[0009] The liquid supply unit includes a housing, an air pump, and a liquid storage tank. The liquid storage tank and the air pump are spaced apart inside the housing. The liquid storage tank is configured to store the solvent used in the processing process. The liquid storage tank is connected to the air pump through a pipeline. A spray assembly is provided on the processing cylinder. The spray assembly is configured to spray the process solvent onto the wafer inside the processing cylinder. The air pump is at least configured to supply the solvent in the liquid storage tank to the spray assembly.

[0010] The extraction section includes a first extraction unit and a second extraction unit. The first extraction unit is configured to extract volatile gases in the upper region, and the second extraction unit is configured to extract volatile gases in the housing.

[0011] The first air extraction unit includes a first air extraction component and a first air extraction main pipe. The first air extraction main pipe is provided with a plurality of upward-facing vent holes. The air inlet end of the first air extraction main pipe is located in the upper region, and the air outlet end of the first air extraction main pipe is connected to the first air extraction component.

[0012] The second extraction unit includes at least one first extraction branch pipe. Each first extraction branch pipe corresponds to a set of liquid supply components. The first end of the first extraction branch pipe is connected to the first extraction main pipe, and the second end of the first extraction branch pipe is connected to the first connector on the box. The first connector is connected to the inside of the box. The first extraction component is configured to extract volatile gases from the box through the first extraction main pipe and the first extraction branch pipe.

[0013] Optionally, the extraction unit further includes a third extraction unit, which includes a second extraction component, a second extraction main pipe, and at least one second extraction branch pipe. The exhaust end of the second extraction main pipe is connected to the second extraction component, the first end of the second extraction branch pipe is connected to the second extraction main pipe, and the second end of the second extraction branch pipe is connected to a third connector on the housing. The third connector is connected to the liquid storage tank through a pipe. The second extraction component is configured to extract volatile gases from the liquid storage tank through the second extraction main pipe.

[0014] Optionally, the first main exhaust pipe includes a first vertical pipe and a first horizontal pipe. The first end of the first vertical pipe is connected to the first exhaust component, and the second end of the first vertical pipe is connected to the first end of the first horizontal pipe. The first horizontal pipe extends along the length of the frame, and multiple second connectors are spaced along its own length on the first horizontal pipe. The second connectors are detachably connected to the first end of the first exhaust branch pipe.

[0015] Optionally, the second exhaust main pipe includes a second vertical pipe and a second horizontal pipe. The first end of the second vertical pipe is connected to the second exhaust component, and the second end of the second vertical pipe is connected to the first end of the second horizontal pipe. The second horizontal pipe extends along the length of the frame, and multiple fourth connectors are spaced along its own length on the second horizontal pipe. The fourth connectors are detachably connected to the first end of the second exhaust branch pipe.

[0016] Optionally, a condenser is provided on the second vertical pipe. The condenser is configured to condense the extracted volatile gas into a liquid and recover it to an external recovery component through a pipeline. A second connector is provided on the side wall of the first horizontal pipe, and a fourth connector is provided on the side wall of the second horizontal pipe.

[0017] Optionally, a first adapter plate and a second adapter plate are provided on the housing. The first adapter plate is provided with multiple first adapter parts. The first end of the first adapter part is connected to the liquid storage tank through a pipeline, and the second end of the first adapter part is connected to the liquid supply pipeline of the equipment. The second adapter plate is provided with multiple second adapter parts. The air pump is connected to the high-pressure air source and electrically connected to the external working parts through the multiple second adapter parts.

[0018] The enclosure is equipped with an environmental exhaust connector. The first end of the environmental exhaust connector is connected to the internal space of the enclosure and is connected to the second exhaust unit. The enclosure is also equipped with an overflow connector. The first end of the overflow connector is connected to the upper part of the liquid storage tank through a pipeline, and the second end of the overflow connector is connected to the equipment's drain pipeline.

[0019] Optionally, the enclosure includes a square frame with removable end plates on all six sides of the square frame. The end plates are configured to close the corresponding sides of the square frame to form an enclosed space, and an environmental exhaust vent is located on the top end plate of the square frame.

[0020] Optionally, the rotary wet scrubbing machine also includes a mounting frame, which is located in the middle of the frame. The first end of the mounting frame is connected to the first end of the frame along the first horizontal direction, and the second end of the mounting frame is connected to the second end of the frame along the first horizontal direction, so as to support two opposing support surfaces of the frame along the first horizontal direction. The mounting frame is also configured to install the equipment's pipes and other components. The mounting frame includes at least one hollow tube extending along the first horizontal direction. The hollow tube has an air inlet and at least one set of exhaust ports. The air inlet is connected to an external high-pressure air source through a first pipe. Each set of exhaust ports corresponds to an air pump. Each set of exhaust ports includes at least one exhaust port. A valve body is provided at the exhaust port. The valve body is connected to the air inlet of the corresponding air pump through a pipe. The high-pressure gas supplied by the external high-pressure air source is sent into the air pump after passing through the hollow tube.

[0021] Optionally, the mounting bracket also includes a first support rod, a second support rod, a connecting plate, and a connecting rod. The first support rod is arranged parallel to the first side of the hollow tube. The first end of the connecting plate is connected to the hollow tube, and the second end of the connecting plate is connected to the first support rod. The connecting plate has an oblong hole. The second support rod is arranged parallel to the second side of the hollow tube. The first end of the connecting rod is connected to the hollow tube, and the second end of the connecting rod is connected to the first support rod. The connecting rod has multiple mounting holes.

[0022] The beneficial effects of this invention are as follows: Compared with the prior art, the rotary jet wet grouting machine provided by this invention has the following beneficial effects:

[0023] 1. This rotary spray wet process integrated machine extracts volatile gases from the upper area and the liquid supply tank through the first and second extraction units of the extraction section, respectively, to achieve full-area exhaust control and avoid the accumulation of solvent volatile gases that may cause safety hazards.

[0024] 2. The first main exhaust pipe of the first exhaust unit fully covers the upper area through multiple upward-facing vents, capturing volatile gases around the treatment cylinder; the exhaust branch pipes of the second exhaust unit are connected to each liquid supply tank. The connection design between the main pipe and the branch pipes enables centralized extraction of gases from multiple tanks, eliminating the need for separate exhaust components, simplifying the structure and reducing energy consumption; the detachable connection between the branch pipes and the main pipe facilitates later maintenance and component additions and subtractions, improving equipment flexibility.

[0025] 3. The third extraction unit separately extracts volatile gases from the liquid storage tank, controlling the evaporation of solvents at the source and further improving the targeting and efficiency of exhaust. The layout of the second extraction main pipe and branch pipes is adapted to the liquid storage tanks of multiple liquid supply units to achieve centralized exhaust control. Together with the first and second extraction units, it forms a triple exhaust protection to avoid the risk of gas leakage. Attached Figure Description

[0026] To more clearly illustrate and understand the technical solutions in the embodiments of the present invention, the accompanying drawings used in the background technology and embodiment descriptions of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of a rotary jet wet grouting machine provided in an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of the liquid supply section in a rotary jet wet process integrated machine provided in an embodiment of the present invention;

[0029] Figure 3 This is a schematic diagram of the air extraction section in a rotary jet wet process integrated machine provided in an embodiment of the present invention;

[0030] Figure 4 This is a perspective view of the liquid supply section in a rotary jet wet process integrated machine provided in an embodiment of the present invention;

[0031] Figure 5 This is a schematic diagram showing the positional relationship of the mounting bracket in a rotary jet wet grouting machine provided in an embodiment of the present invention;

[0032] Figure 6 This is a schematic diagram of the mounting frame in a rotary jet wet process integrated machine provided in an embodiment of the present invention. Detailed Implementation

[0033] The present invention will be further described in detail below with reference to the accompanying drawings.

[0034] To facilitate understanding of the present invention, a more complete description of the invention will be given below with reference to the accompanying drawings. Preferred embodiments of the invention are shown in the drawings. However, the invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a thorough and complete understanding of the disclosure of the invention. It should be noted that when a component is referred to as being "fixed to" another component, it can be directly on the other component or there may be an intermediate component. When a component is referred to as being "connected to" another component, it can be directly connected to the other component or there may be an intermediate component. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementations. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0035] Please see Figures 1 to 6 As shown, this embodiment provides a rotary spray wet process integrated machine, which includes a frame 10, a processing cylinder 20, a liquid supply unit 30, and an air extraction unit 40. The frame 10 has an upper region and a lower region arranged along its height. The processing cylinder 20 is installed in the upper region, and the liquid supply unit 30 is located in the lower region. The liquid supply unit 30 includes multiple liquid supply units 31, which are configured to supply the processing cylinder 20 with the solvent used in the process. Each liquid supply unit 31 includes a housing 32, an air pump 33, and a liquid storage tank 34. The liquid storage tank 34 and the air pump 33 are spaced apart from each other in the housing 32. Inside, the storage tank 34 is configured to store the solvent used in the processing process. The storage tank 34 is connected to the air pump 33 through a pipeline. The processing cylinder 20 is equipped with a spray assembly, which is configured to spray the wafer inside the processing cylinder 20 with the solvent used in the processing process. The air pump 33 is configured to supply the solvent in the storage tank 34 to the spray assembly. The extraction unit 40 includes a first extraction unit and a second extraction unit. The first extraction unit is configured to extract volatile gases in the upper region, and the second extraction unit is configured to extract volatile gases in the housing 32.

[0036] As can be seen, this rotary spray wet processing integrated machine achieves functional zoning through the layered layout of the frame 10. Multiple liquid supply units 31 independently store and supply solvents for different processes, adapting to the multi-process wet processing needs of wafers. The first and second extraction units of the extraction section 40 respectively extract volatile gases from the upper area and the liquid supply tank 32, achieving full-area exhaust control and avoiding the accumulation of solvent evaporation gases that may cause safety hazards. The overall structure integrates liquid supply, processing, and exhaust functions, improving the integration level of the equipment.

[0037] As one implementation, a mounting plate is provided at the bottom of the housing 32, and mounting holes are provided on the mounting plate. Threaded holes are provided on the equipment frame 10 to match the mounting holes. Fixing screws pass through the mounting holes and are locked in the corresponding threaded holes to fix the housing 32 on the equipment frame 10.

[0038] In one embodiment, a guide assembly is provided between the housing 32 and the equipment frame 10. The guide assembly includes a linear guide rail and a slider. The linear guide rail is laid on the equipment frame 10 extending in a first horizontal direction, and the slider is fixed on the housing 32 and slidably mounted on the linear guide rail.

[0039] In one embodiment, the first extraction unit includes a first extraction component 41 and a first extraction main pipe 42. The first extraction main pipe 42 is provided with a plurality of upward-facing vent holes 43. The air inlet end of the first extraction main pipe 42 is located in the upper region, and the exhaust end of the first extraction main pipe 42 is connected to the first extraction component 41. The second extraction unit includes at least one first extraction branch pipe 44. Each first extraction branch pipe 44 corresponds to a set of liquid supply component housings 32. The first end of the first extraction branch pipe 44 is connected to the first extraction main pipe 42, and the second end of the first extraction branch pipe 44 is connected to a first connector on the housing 32. The first connector is connected to the interior of the housing 32. The first extraction component 41 is configured to extract volatile gases from the housing 32 through the first extraction main pipe 42 and the first extraction branch pipe 44.

[0040] As can be seen, the first main exhaust pipe 42 of the first exhaust unit fully covers the upper area through multiple upward-facing vents 43, capturing volatile gases around the processing cylinder 20; the exhaust branch pipes of the second exhaust unit are connected to each liquid supply tank 32, and the gas from multiple tanks 32 is centrally extracted through the connection design between the main pipe and the branch pipes, eliminating the need for separate exhaust components, simplifying the structure and reducing energy consumption; the detachable connection between the branch pipes and the main pipe facilitates later maintenance and component additions and subtractions, improving equipment flexibility.

[0041] In one embodiment, the extraction unit 40 further includes a third extraction unit, which includes a second extraction component 45, a second extraction main pipe 46, and at least one second extraction branch pipe 47. The exhaust end of the second extraction main pipe 46 is connected to the second extraction component 45. The first end of the second extraction branch pipe 47 is connected to the second extraction main pipe 46, and the second end of the second extraction branch pipe 47 is connected to a third connector on the housing 32. The third connector is connected to the liquid storage tank 34 through a pipe. The second extraction component 45 is configured to extract volatile gases from the liquid storage tank through the second extraction main pipe 46.

[0042] As can be seen, the third extraction unit extracts volatile gases from the storage tank 34 separately, controlling the evaporation of solvents at the source, and further improving the targeting and efficiency of exhaust. The layout of the second extraction main pipe 46 and branch pipes is adapted to the storage tanks 34 of multiple liquid supply units 31, realizing centralized exhaust control. Together with the first and second extraction units, it forms a triple exhaust protection to avoid the risk of gas leakage.

[0043] In one embodiment, the first exhaust main pipe 42 includes a first vertical pipe and a first horizontal pipe. The first end of the first vertical pipe is connected to the first exhaust component 41, and the second end of the first vertical pipe is connected to the first end of the first horizontal pipe. The first horizontal pipe extends along the length direction of the frame 10, and a plurality of second connectors are spaced apart along its own length direction on the first horizontal pipe. The second connectors are detachably connected to the first end of the first exhaust branch pipe 44.

[0044] As can be seen, the vertical pipe connects to the air extraction component, and the horizontal pipe extends along the length of the frame 10 and connects to the branch pipe through the connector. This adapts to the layered layout of the frame 10 and the arrangement of the multiple liquid supply units 31. The pipeline route is neat and reduces space occupation. The connector is set on the side wall of the horizontal pipe, which can prevent impurities from falling into the pipeline and facilitate the disassembly and assembly of the branch pipe. The detachable connector design allows the equipment to flexibly adjust the branch pipe configuration according to the number of liquid supply units 31, improving versatility.

[0045] In one embodiment, the second exhaust main pipe 46 includes a second vertical pipe and a second horizontal pipe. The first end of the second vertical pipe is connected to the second exhaust component 45, and the second end of the second vertical pipe is connected to the first end of the second horizontal pipe. The second horizontal pipe extends along the length direction of the frame 10. Multiple fourth connectors are spaced along the length direction of the second horizontal pipe. The fourth connectors are detachably connected to the first end of the second exhaust branch pipe 47.

[0046] As can be seen, the second exhaust pipe extends to the liquid storage tank and extracts its volatile gases, covering the entire process of solvent storage with exhaust control, thus preventing the leakage of volatile gases from the liquid storage tank and preventing environmental pollution. The exhaust is uniformly processed through the second exhaust component 45, which simplifies the exhaust pipeline design, improves gas collection efficiency, and facilitates subsequent centralized processing and recycling, in line with green production requirements.

[0047] In one embodiment, a condenser 48 is provided on the second vertical pipe. The condenser 48 is configured to condense the extracted volatile gas into a liquid and recover it to an external recovery component through a pipeline. A second connector is provided on the side wall of the first horizontal pipe, and a fourth connector is provided on the side wall of the second horizontal pipe.

[0048] As can be seen, the condenser 48 on the second vertical pipe can condense volatile solvent gas into liquid for recovery, reducing solvent loss and production costs, and avoiding environmental pollution caused by direct emission of gaseous solvent; the joint is set on the side wall of the horizontal pipe, which not only ensures the stability of the pipeline connection, but also reduces gas flow resistance, improves the pumping efficiency, and avoids dust accumulation and pipeline blockage caused by the joint facing upward.

[0049] In one embodiment, the housing 32 is provided with a first adapter plate 320 and a second adapter plate 321. The first adapter plate 320 is provided with a plurality of first adapter parts 322. The first end of the first adapter part 322 is connected to the liquid storage tank 34 through a pipeline, and the second end of the first adapter part 322 is connected to the liquid supply pipeline of the equipment. The second adapter plate 321 is provided with a plurality of second adapter parts 323. The air pump 33 is connected to the high-pressure air source and electrically connected to the external working parts through the plurality of second adapter parts 323. The housing 32 is provided with an environmental exhaust connector 324. The first end of the environmental exhaust connector 324 is connected to the internal space of the housing 32 and is connected to the second exhaust unit. The housing 32 is provided with an overflow connector 325. The first end of the overflow connector 325 is connected to the upper part of the liquid storage tank 34 through a pipeline, and the second end of the overflow connector 325 is connected to the liquid drain pipeline of the equipment.

[0050] Specifically, the first adapter plate 320 is located on the top surface of the housing 32 and near the liquid storage tank 34, the second adapter plate 321 is located on the side of the housing 32 and near the air pump 33, and the overflow connector 325 is located on the second adapter plate 321.

[0051] As can be seen, the first and second adapter plates 321 of the housing 32 achieve centralized and orderly connection of pipelines and electrical connections, the first adapter 322 ensures precise connection of solvent delivery, the second adapter 323 simplifies the air source and electrical connection of the air pump 33, and improves the convenience of installation and maintenance; the environmental exhaust connector 324 enhances the exhaust effect of the housing 32, and the overflow connector 325 can achieve safe overflow when the liquid storage tank 34 is overpressured or full, ensuring the stability and safety of equipment operation.

[0052] In one embodiment, the enclosure 32 includes a square frame, on which sealing plates are detachably mounted on all six sides. The sealing plates are configured to close the corresponding sides of the square frame to form a closed space, and an environmental exhaust vent 324 is provided on the top sealing plate of the square frame.

[0053] As can be seen, the housing 32 adopts a square frame design with a detachable cover plate, which facilitates the installation, inspection and maintenance of the internal components of the liquid supply unit 31; the environmental exhaust connector 324 of the top cover plate can efficiently exhaust the volatile gases rising inside the housing 32, improve exhaust efficiency, and the detachable cover plate makes it easy to flexibly disassemble the corresponding surface according to maintenance needs, reducing the difficulty of operation.

[0054] As one implementation, the rotary wet scrubbing machine also includes a mounting frame 50, which is located in the middle of the frame 10. The first end of the mounting frame 50 is connected to the first end of the frame 10 along the first horizontal direction, and the second end of the mounting frame 50 is connected to the second end of the frame 10 along the first horizontal direction, so as to support two opposing support surfaces of the frame 10 along the first horizontal direction. The mounting frame 50 is also configured to install the equipment's pipes and other components. The mounting frame 50 includes at least one hollow tube 51 extending along the first horizontal direction. An air inlet 510 and at least one set of exhaust ports 511 are opened on the hollow tube 51. The air inlet 510 is connected to an external high-pressure air source through a first pipe. Each set of exhaust ports 511 corresponds to an air pump 33. Each set of exhaust ports 511 includes at least one exhaust port 511. A valve body 512 is provided at the exhaust port 511. The valve body 512 is connected to the air inlet end of the corresponding air pump 33 through a pipe. The high-pressure gas supplied by the external high-pressure air source is sent into the air pump 33 after passing through the hollow tube 51.

[0055] As can be seen, the mounting bracket 50 connects the two ends of the frame 10, which not only strengthens the structural strength of the frame 10, but also provides installation support for pipelines and components; the hollow tube 51 serves as a centralized air supply channel, which distributes the external high-pressure air source to each air pump 33 in a unified manner, simplifying the layout of the air supply pipeline and reducing space occupation; the valve body 512 of the exhaust port 511 can independently control the air supply on / off and flow rate of each air pump 33, which facilitates the start / stop or maintenance of a single pump without affecting the operation of other units and improving the reliability of equipment operation.

[0056] In one embodiment, the mounting bracket 50 further includes a first support rod 52, a second support rod 53, a connecting plate 54, and a connecting rod 55. The first support rod 52 is arranged parallel to the first side of the hollow tube 51. The first end of the connecting plate 54 is connected to the hollow tube 51, and the second end of the connecting plate 54 is connected to the first support rod 52. The connecting plate 54 has an oblong hole. The second support rod 53 is arranged parallel to the second side of the hollow tube 51. The first end of the connecting rod 55 is connected to the hollow tube 51, and the second end of the connecting rod 55 is connected to the first support rod 52. The connecting rod 55 has multiple mounting holes.

[0057] As can be seen, the first and second support rods 53 of the mounting bracket 50, together with the connecting plate 54 and the connecting rod 55, form a stable frame structure, which greatly improves the load-bearing capacity and rigidity of the mounting bracket 50 and prevents the hollow tube 51 from deforming due to air supply pressure or external load. The oblong hole of the connecting plate 54 allows for fine adjustment of the installation position, adapts to the size deviation of the frame 10, and alleviates vibration stress. The multiple mounting holes of the connecting rod 55 can flexibly mount pipelines, sensors and other components, expand the function of the mounting bracket 50, and further optimize the internal layout of the equipment.

[0058] The working principle of the above-mentioned rotary jet wet washing machine is as follows:

[0059] The upper processing cylinder 20 performs the wafer wet processing process, while the lower multiple liquid supply units 31 independently store and supply different process solvents. The mounting frame 50 not only strengthens the support strength of the frame 10 but also achieves centralized distribution of external high-pressure gas source to the air pumps 33 of each liquid supply unit 31 through the hollow tube 51. The first extraction unit extracts volatile gases around the processing cylinder 20, the second extraction unit extracts gases inside the liquid supply tank 32, and the third extraction unit directly extracts volatile gases from the storage tank 34. The condenser 48 of the second extraction unit can condense and recover gaseous solvents.

[0060] In the embodiments disclosed in this invention, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; "linking" can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments disclosed in this invention according to the specific circumstances.

[0061] The above embodiments merely illustrate the basic principles and characteristics of the present invention. The present invention is not limited to the above examples. Various changes and modifications can be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A rotary jet wet laminator, characterized in that, The rotary jet wet scrubbing machine includes a frame, a processing cylinder, a liquid supply unit, and an air extraction unit, wherein: The frame has an upper region and a lower region arranged along the height direction. The processing cylinder is installed in the upper region, and the liquid supply section is arranged in the lower region. The liquid supply section includes multiple liquid supply units, which are configured to supply the processing cylinder with the solvent used in the process. The liquid supply unit includes a housing, an air pump, and a liquid storage tank. The liquid storage tank and the air pump are spaced apart inside the housing. The liquid storage tank is configured to store the solvent used in the processing. The liquid storage tank is connected to the air pump through a pipeline. A spray assembly is provided on the processing cylinder. The spray assembly is configured to spray the solvent used in the processing onto the wafer inside the processing cylinder. The air pump is configured to at least supply the solvent in the liquid storage tank to the spray assembly. The extraction section includes a first extraction unit and a second extraction unit. The first extraction unit is configured to extract volatile gases in the upper region, and the second extraction unit is configured to extract volatile gases in the housing.

2. The rotary jet wet laminator according to claim 1, characterized in that, The first suction unit includes a first suction component and a first suction main pipe. The first suction main pipe is provided with a plurality of upward-facing vent holes. The air inlet of the first suction main pipe is located in the upper region, and the air outlet of the first suction main pipe is connected to the first suction component. The second extraction unit includes at least one first extraction branch pipe, each first extraction branch pipe corresponding to a set of liquid supply component housings. The first end of the first extraction branch pipe is connected to the first extraction main pipe, and the second end of the first extraction branch pipe is connected to a first connector on the housing. The first connector is connected to the interior of the housing. The first extraction component is configured to extract volatile gases from the housing through the first extraction main pipe and the first extraction branch pipe.

3. The rotary jet wet laminator according to claim 2, characterized in that, The extraction section further includes a third extraction unit, which includes a second extraction component, a second extraction main pipe, and at least one second extraction branch pipe. The exhaust end of the second extraction main pipe is connected to the second extraction component. The first end of the second extraction branch pipe is connected to the second extraction main pipe, and the second end of the second extraction branch pipe is connected to a third connector on the housing. The third connector is connected to the liquid storage tank via a pipe. The second extraction component is configured to extract volatile gases from the liquid storage tank through the second extraction main pipe.

4. The rotary jet wet laminator according to claim 3, characterized in that, The first main exhaust pipe includes a first vertical pipe and a first horizontal pipe. The first end of the first vertical pipe is connected to the first exhaust component, and the second end of the first vertical pipe is connected to the first end of the first horizontal pipe. The first horizontal pipe extends along the length of the frame, and a plurality of second connectors are spaced apart along its own length. The second connectors are detachably connected to the first end of the first exhaust branch pipe.

5. A rotary jet wet laminator according to claim 3, characterized in that, The second main exhaust pipe includes a second vertical pipe and a second horizontal pipe. The first end of the second vertical pipe is connected to the second exhaust component, and the second end of the second vertical pipe is connected to the first end of the second horizontal pipe. The second horizontal pipe extends along the length of the frame, and a plurality of fourth connectors are spaced apart along its own length. The fourth connectors are detachably connected to the first end of the second exhaust branch pipe.

6. A rotary jet wet laminator according to claim 4, characterized in that, A condenser is provided on the second vertical pipe. The condenser is configured to condense the extracted volatile gas into liquid and recover it to an external recovery component through a pipeline. The second connector is provided on the side wall of the first horizontal pipe, and the fourth connector is provided on the side wall of the second horizontal pipe.

7. The rotary jet wet laminator according to claim 1, characterized in that, The housing is provided with a first adapter plate and a second adapter plate. The first adapter plate is provided with a plurality of first adapter parts. The first end of the first adapter part is connected to the liquid storage tank through a pipeline, and the second end of the first adapter part is connected to the liquid supply pipeline of the equipment. The second adapter plate is provided with a plurality of second adapter parts. The air pump is connected to a high-pressure air source and electrically connected to external working components through the plurality of second adapter parts. The housing is equipped with an environmental exhaust connector. The first end of the environmental exhaust connector is connected to the internal space of the housing and is connected to the second extraction unit. The housing is also equipped with an overflow connector. The first end of the overflow connector is connected to the upper part of the storage tank through a pipeline, and the second end of the overflow connector is connected to the drainage pipeline of the equipment.

8. A rotary jet wet laminator according to claim 7, characterized in that, The enclosure includes a square frame, on which sealing plates are detachably installed on all six sides. The sealing plates are configured to close corresponding sides of the square frame to form an enclosed space. The environmental exhaust vent is located on the top sealing plate of the square frame.

9. A rotary jet wet laminator according to claim 1, characterized in that, The rotary spray wet process integrated machine also includes a mounting frame, which is disposed in the middle of the frame. The first end of the mounting frame is connected to the first end of the frame along the first horizontal direction, and the second end of the mounting frame is connected to the second end of the frame along the first horizontal direction, so as to support two opposing support surfaces of the frame along the first horizontal direction. The mounting frame is also configured to install pipes and other components of the equipment. The mounting frame includes at least one hollow tube extending along the first horizontal direction. An air inlet and at least one set of exhaust ports are opened on the hollow tube. The air inlet is connected to an external high-pressure air source through a first pipe. Each set of exhaust ports corresponds to one air pump. Each set of exhaust ports includes at least one exhaust port. A valve body is provided at the exhaust port. The valve body is connected to the air inlet of the corresponding air pump through a pipe. The high-pressure gas supplied by the external high-pressure air source is sent into the air pump after passing through the hollow tube.

10. A rotary jet wet laminator according to claim 9, characterized in that, The mounting bracket further includes a first support rod, a second support rod, a connecting plate, and a connecting rod. The first support rod is arranged parallel to the first side of the hollow tube. The first end of the connecting plate is connected to the hollow tube, and the second end of the connecting plate is connected to the first support rod. The connecting plate has an oblong hole. The second support rod is arranged parallel to the second side of the hollow tube. The first end of the connecting rod is connected to the hollow tube, and the second end of the connecting rod is connected to the first support rod. The connecting rod has multiple mounting holes.

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