Carrying system and photovoltaic preparation equipment

Abstract

The invention discloses a carrying system and photovoltaic preparation equipment. The carrying system comprises a manipulator, a detection module and a control module. The mechanical arm comprises a bearing part, the bearing part is provided with an open end, a closed end and a limiting piece, the open end and the closed end are oppositely arranged, and when a to-be-carried object is fed, the to-be-carried object enters the bearing part through the open end till making contact with the limiting piece; the first driving part drives the bearing part to move from the carrying starting point to the carrying ending point, so that the bearing part has displacement in the horizontal direction; the second driving part drives the bearing part to rotate around a rotating shaft, and the rotating shaft is perpendicular to the open end and / or the closed end; the detection device detects the acceleration of the to-be-carried object relative to the bearing part; the control module controls the first driving part and controls the second driving part according to the acceleration of the to-be-carried object relative to the bearing part, the mass of the to-be-carried object and the friction coefficient between the to-be-carried object and the contact face of the bearing part, so that the to-be-carried object slides reversely and returns to the position where the to-be-carried object makes contact with the limiting piece during feeding. The carrying efficiency is improved, and the position accuracy is improved.

Description

Technical Field

[0001] This invention relates to the technical field of automated material handling, and more particularly to a material handling system for transporting objects by flat-lifting, and photovoltaic equipment using the material handling system. Background Technology

[0002] Some existing handling systems move objects by clamping them, but for some objects that cannot be moved by clamping, some handling systems use a flat lifting method to move them.

[0003] Taking a silicon carbide epitaxial furnace in photovoltaic fabrication equipment as an example, it processes wafers one by one. The wafer is carried horizontally by a robotic arm and moved from one position to another. If the speed is too fast, the robotic arm's acceleration is large, which can cause deviation when reaching the target position. Existing robotic arm control schemes typically keep the transfer speed at a low rate to avoid wafer deviation caused by excessive speed during the transfer process. While this effectively avoids damage to the wafer due to deviation, it also reduces the transfer rate.

[0004] Therefore, how to provide a handling system that can move objects at a high speed while eliminating positional deviation is a technical problem to be solved. Summary of the Invention

[0005] In order to solve the technical problem of relatively low efficiency in the transfer of objects by robotic arms in the prior art, this invention proposes a handling system and photovoltaic fabrication equipment.

[0006] The technical solution adopted in this invention is:

[0007] This invention proposes a handling system, including a robotic arm, a detection module, and a control module.

[0008] Robotic arms include:

[0009] The support section is used to support the object to be transported. The support section has an open end and a closed end that are arranged opposite to each other, as well as a limiting member for limiting the distance between the object to be transported and the closed end. When the object to be transported is loaded, it enters through the open end until it comes into contact with the limiting member.

[0010] The first driving unit drives the supporting unit to move from the starting point of the transport to the ending point of the transport, so that the supporting unit has a horizontal displacement perpendicular to the central axis between the open end and the closed end.

[0011] The second drive unit drives the support unit to rotate around a rotation axis, which is parallel to the direction of the central axis between the open end and the closed end.

[0012] The detection device is installed on the support part and is used to detect the sliding distance of the object to be transported relative to the support part when the object to be transported slides away from the limiting member and slides in a direction perpendicular to the central axis between the open end and the closed end due to the transport acceleration.

[0013] The control module controls the first drive unit to load the object to be transported and transport it to the transport endpoint. Based on the sliding distance, the mass of the object to be transported, and the coefficient of friction between the object to be transported and the contact surface of the support unit, the second drive unit controls the rotation angle and rotation speed of the support unit above the transport endpoint, so that the object to be transported slides in the opposite direction and returns to the position where it was in contact with the limiting member when it was loaded.

[0014] Furthermore, the control module controls the second drive unit to operate at a constant angular velocity. Drive the support part to rotate.

[0015] Furthermore, the control module controls the rotation angle and rotation speed of the support part in the following stages:

[0016] In the first stage, the rotation angle is increased from 0° to the maximum critical angle. At this point, the object to be transported is stationary relative to the supporting part; then, the rotation angle is controlled to momentarily exceed the maximum critical angle. This causes the object to be transported to begin sliding towards the position where it contacts the limiting component during loading, reaching the maximum critical angle. The critical angle at which the object to be transported begins to slide due to the maximum static friction; the maximum critical angle. Satisfying the formula: ,in, This is the maximum static friction force between the object to be transported and the supporting part. For the mass of the item to be transported, It is the acceleration due to gravity;

[0017] In the second stage, the rotation angle is reduced from the maximum critical angle. Reduce to the first angle This causes the object to be transported to slide faster; first angle Satisfying the formula: ,in, The coefficient of sliding friction between the object to be transported and the supporting part;

[0018] In the third stage, the rotation angle is changed from the first angle. Reduce to the second angle This causes the object to be moved to slide slowly.

[0019] In the fourth stage, maintain the rotation angle at the second angle. The object to be transported is decelerated and slids until its speed reaches zero, then returns to the position in contact with the limiting component; the rotation angle remains at the second angle. When the acceleration is constant, the object to be transported is under constant acceleration. The motion decelerates uniformly until the velocity reaches 0, then accelerates at a constant speed. ;

[0020] In the fifth stage, the rotation angle is changed from the second angle. Reduce the angle to 0° to restore the support to a horizontal position.

[0021] Furthermore, the control module is configured to operate based on the sliding distance and the mass of the object to be transported. coefficient of friction and angular velocity Calculate the total movement time of the object to be transported relative to the support. And control the second drive unit during the total motion time The angle changes from the first stage to the fifth stage are completed within the body.

[0022] Furthermore, the control module aims to minimize the total motion time. To optimize the target, the angular velocity is adjusted. and / or second angle Perform optimization calculations.

[0023] Furthermore, the first drive unit adopts a two-bar linkage mechanism.

[0024] Furthermore, the second drive unit is connected between the first drive unit and the support unit.

[0025] The photovoltaic fabrication equipment proposed in this invention uses the handling system of the above-mentioned technical solution to handle the trays that carry the wafers.

[0026] Furthermore, the supporting part includes two opposing supporting fingers perpendicular to the open end and / or the closed end, and the limiting member includes a limiting surface disposed on each supporting finger for limiting the movement of the tray toward the closed end, and a first inclined surface for supporting the bottom surface of the tray;

[0027] The limiting surface is a curved surface perpendicular to the pallet surface, and the part of the curved surface near the closed end is consistent with the curvature of the circumferential surface of the pallet side;

[0028] The first inclined plane slopes from a height greater than or equal to the highest point of the curved surface toward the bottom surface of the other supporting finger, so that when the supporting part rotates around the rotation axis, the tray slides in a direction parallel to the central axis between the open end and the closed end.

[0029] Furthermore, the limiting component also includes a chamfered surface disposed on the side of the curved surface.

[0030] Furthermore, photovoltaic manufacturing equipment includes silicon carbide epitaxial furnace equipment.

[0031] Compared with the prior art, the present invention has the following advantages:

[0032] This invention detects the acceleration of the object to be transported relative to the supporting part and controls the rotation of the supporting part by a corresponding angle. This causes the object to move in the opposite direction relative to the supporting part, returning to the loading position, thus avoiding speed reduction and displacement of the object relative to the supporting part. Furthermore, this invention also controls the speed and acceleration of the object to be transported during its opposite movement relative to the supporting part, preventing collisions between the object and the limiting components. It is also suitable for fragile objects to be transported. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a force analysis diagram of an object to be transported when tilted according to an embodiment of the present invention;

[0035] Figure 2 This is a schematic diagram of a robotic arm structure according to an embodiment of the present invention;

[0036] Figure 3 This is a schematic diagram of the support structure according to an embodiment of the present invention.

[0037] Figure 4 This is a schematic diagram of a finger support structure according to an embodiment of the present invention.

[0038] Figure 5 yes Figure 4 Partial sectional view in the FF direction.

[0039] 1. First drive unit; 2. Second drive unit; 3. Support unit; 4. Tray; 5. Wafer.

[0040] 31. Finger support; 32. Side plate; 33. Connecting plate; 34. Limiting surface; 35. First inclined surface; 36. Chamfered surface. Detailed Implementation

[0041] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0042] The material handling system proposed in this invention includes a robotic arm, a detection module, and a control module.

[0043] The robotic arm includes a support section, a first drive section, and a second drive section.

[0044] The support section is used to support the object to be transported. The support section has an open end and a closed end that are arranged opposite to each other, as well as a limiting member used to limit the relative distance between the object to be transported and the closed end. When the object to be transported is loaded, it enters through the open end of the support section, and after entering the support section, it is supported by the support section until it comes into contact with the limiting member.

[0045] The first driving unit drives the supporting unit to move from the transport starting point to the transport ending point, causing the supporting unit to have a horizontal displacement perpendicular to the central axis between the open and closed ends. Consequently, it will also generate acceleration and / or displacement perpendicular to the central axis between the open and closed ends. If the transport starting point and the transport ending point do not coincide in the vertical projection, and the transport starting point and the transport ending point coincide in the vertical projection, the supporting unit will only perform vertical movement, and the technical concept of this invention will not apply.

[0046] The second drive unit drives the support unit to rotate around a rotation axis, which is perpendicular to the open end and / or the closed end.

[0047] The detection device is installed on the support part and is used to detect the acceleration of the object to be transported relative to the support part when the object to be transported slides away from the limiting member in a direction perpendicular to the central axis between the open end and the closed end due to the transport acceleration.

[0048] The control module controls the first drive unit to load the object to be transported and transport it to the transport endpoint. Based on the acceleration of the object to be transported relative to the support unit, the mass of the object to be transported, and the coefficient of friction between the contact surface between the object to be transported and the support unit, the second drive unit above the transport endpoint controls the object to be transported to slide in the opposite direction and return to the position where it was in contact with the limiting member when it was loaded.

[0049] The first driving unit of the present invention causes the supporting unit to have a horizontal displacement perpendicular to the central axis between the open end and the closed end. Therefore, at a relatively high speed, the object to be transported will generate acceleration and / or displacement perpendicular to the central axis between the open end and the closed end. The second driving unit provides a rotational force to the supporting unit, causing the object to be transported to tilt, thereby generating a reverse force relative to the acceleration direction of the supporting unit. This allows the object to be transported to reach the transport endpoint at a relatively fast transport speed. At the transport endpoint, the rotating robotic arm supporting unit returns the object to its original position when it was loaded, so that it can be aligned with the corresponding point when it reaches the transport endpoint.

[0050] In one specific embodiment, the control module controls the second drive unit to operate at a constant angular velocity. Drive the support part to rotate.

[0051] By rotating at a constant angular velocity, the movement of the object to be transported relative to the support is controllable, so as to control the return of the object to be transported to the position where it contacts the limiting component when it was loaded.

[0052] In one specific embodiment, the control module controls the rotation angle and rotation speed of the support part in the following five stages.

[0053] In the first stage, the rotation angle is increased from 0° to the maximum critical angle. At this point, the object to be transported is stationary relative to the supporting part; then, the rotation angle is controlled to momentarily exceed the maximum critical angle. This causes the object to be transported to begin sliding towards the position where it contacts the limiting component during loading, reaching the maximum critical angle. The critical angle at which the object to be transported begins to slide after overcoming the maximum static friction;

[0054] In the second stage, the rotation angle is reduced from the maximum critical angle. Reduce to the first angle This causes the object to be moved to slide faster.

[0055] In the third stage, the rotation angle is changed from the first angle. Reduce to the second angle This causes the object to be moved to slide slowly.

[0056] In the fourth stage, maintain the rotation angle at the second angle. This causes the object to be transported to decelerate and slide until its speed reaches 0, and then return to the position where it contacts the limiting component.

[0057] In the fifth stage, the rotation angle is changed from the second angle. Reduce the angle to 0° to restore the support to a horizontal position.

[0058] By breaking down the movement process of the object to be transported into the above five stages and controlling them separately, the object to be transported can be steadily returned to its original position.

[0059] like Figure 1 As shown, in the above technical solution, the maximum critical angle Satisfying the formula: ,in, This is the maximum static friction force between the object to be transported and the supporting part. For the mass of the item to be transported, This is the acceleration due to gravity.

[0060] When the object to be transported does not slide, the maximum frictional force between the object to be transported and the supporting part is measured. This maximum frictional force is based on the fact that the object to be transported and the supporting part are fixed values. Therefore, the maximum critical angle can be calculated. When the angle between the supporting part and the original horizontal position is less than or equal to the maximum critical angle, the object to be transported and the supporting part remain relatively stationary. When the angle between the supporting part and the original horizontal position is slightly greater than the maximum critical angle, relative movement will occur between the object to be transported and the supporting part.

[0061] In the above technical solution, the first angle Satisfying the formula: ,in, It is the coefficient of sliding friction between the object to be transported and the supporting part.

[0062] The goal of the above five stages is to return to the position where the material was in contact with the limiting component during loading, that is, to the center point of the original position, at which point the speed is 0 and the acceleration is also 0.

[0063] Maximum critical angle The solution formula is as follows .

[0064] First angle The solution formula is as follows .

[0065] During rotation, the angle of the supporting part changes at a constant speed. c is a constant.

[0066] In the first stage, the angle is increased from 0° to the maximum critical angle. This stage is characterized by stillness, with a motion time of 0 to 100 seconds. , Adding an instantaneous angle greater than the maximum critical angle. The small phases allow items like wafer trays to begin sliding and then quickly transition to the second phase.

[0067] In the second stage, the angle is changed from the maximum critical angle. Reduce to the first angle .

[0068] The force situation can be expressed as This phase is the acceleration phase, and the duration of the movement is... to , , .

[0069] speed is , , .

[0070] Displacement is , , , .

[0071] acceleration is acceleration .

[0072] The third stage, the angle from the first angle Reduce to the second angle This stage is the deceleration stage, and the force situation is as follows: .

[0073] Exercise time is to , , .

[0074] speed is , , , .

[0075] Displacement is , , .

[0076] acceleration is , .

[0077] In the fourth stage, maintain the second angle. This stage is the uniform deceleration stage, and the force situation is as follows: .

[0078] Exercise time is to .

[0079] speed is , .

[0080] Displacement is , ,

[0081] .

[0082] acceleration is At the end of this phase, the speed returns to 0, and the device moves to the center position.

[0083] The calculation process is as follows ,

[0084] .

[0085] We can obtain:

[0086] .

[0087] The fifth stage, the angle from the second angle Decrease to 0°, this stage is the stationary stage, the motion time is to .

[0088] ;

[0089] .

[0090] The total exercise time is Total distance traveled .

[0091] ;

[0092] ;

[0093] .

[0094] .

[0095] Therefore, if the object to be moved is to be returned to its original position as quickly as possible, the angular velocity of the second drive plate and the size of the second angle need to be optimized.

[0096] In the above embodiments, the first driving unit may adopt a two-bar linkage mechanism, but is not limited to a two-bar linkage mechanism. The specific driving unit is determined according to the position of the starting point and the ending point of the transport. For example, when the starting point and the ending point of the transport are located on the same plane, the first driving unit may also adopt a linear driving structure.

[0097] In one specific embodiment, the control module is configured to be based on the sliding distance and the mass of the object to be transported. coefficient of friction and angular velocity Calculate the total movement time of the object to be transported relative to the support. And control the second drive unit during the total motion time The angle changes from the first stage to the fifth stage are completed within the body.

[0098] For the same transported object, the mass of the object to be transported and the coefficient of friction between the object to be transported and the support can be obtained in advance. After obtaining the corresponding control quantity for the first time, the second drive unit can be controlled based on the same control quantity, thereby quickly realizing the return adjustment of the position of each object to be transported.

[0099] In a preferred embodiment, the control module aims to minimize the total motion time. To optimize the target, the angular velocity is adjusted. and / or second angle Optimization calculations are performed to enable the rapid return of the items to be transported.

[0100] In the above embodiments, the second driving unit is connected between the first driving unit and the supporting unit. That is, the first driving unit drives the second driving unit and the supporting unit to move together. In other embodiments, the second driving unit can also be connected to the starting end of the first driving unit, that is, the first driving unit only drives the supporting unit, while the second driving unit drives the first driving unit and the supporting unit to rotate together. In comparison, the second driving unit is a rotating mechanism, and its center of gravity remains at the same horizontal position during rotation, making it more stable. Therefore, the solution of connecting the second driving unit between the first driving unit and the supporting unit is better.

[0101] This invention also protects photovoltaic fabrication equipment that uses a handling system based on any of the above-described technical solutions to handle a tray carrying a wafer.

[0102] The robotic arm component of the handling system will be described in detail below with reference to the diagram.

[0103] like Figure 2 , Figure 3 As shown, the robotic arm includes a first drive unit 1, a second drive unit 2, and a support unit 3. The support unit 3 supports a tray 4, and a wafer 5 is placed on the tray 4.

[0104] The support part 3 includes support fingers 31 perpendicular to the open end and / or the closed end. In addition, the support fingers 31 of the support part 3 may also be provided with side plates 32 on both sides perpendicular to the open end and / or the closed end. The support fingers 31 may be two relatively parallel support strips connected by the connecting plate 33 of the closed end. In other application devices, the support fingers 31 may also be replaced with other shape combinations, such as a whole plate.

[0105] like Figure 4 , Figure 5 As shown, in this embodiment, the limiting member includes a limiting surface 34 and a first inclined surface 35.

[0106] The limiting surface 34 is used to restrict the movement of the tray 4 toward the closed end. The limiting surface 34 is provided on each supporting finger 31 and is a curved surface perpendicular to the surface of the tray 4. The part of the curved surface near the closed end is consistent with the circumferential arc of the side of the tray 4.

[0107] The first inclined surface 35 supports the bottom surface of the pallet 4. The first inclined surface 35 slopes towards the bottom surface of another supporting finger 31 from a height greater than or equal to the highest point of the curved surface. This allows the pallet 4 to slide parallel to the central axis between the open and closed ends when the supporting part 3 rotates around the rotation axis. The angle of the end of the first inclined surface 35 near the closed end is 0.5°-3°. The angle between the first inclined surface 35 and the horizontal plane is 5°-15°. In the figure, when the pallet 4 is handled, it can move left and right (perpendicular to the line connecting the free and closed ends). Therefore, by setting symmetrical inclined surfaces on the supporting fingers 31, and in conjunction with the above control, the pallet 4 can make slight movements using its own inertia during transportation and return to its original position, i.e., towards the positioning center. Furthermore, it can prevent the pallet 4 from moving forward (i.e., towards the closed end).

[0108] By setting the limiting surface 34 and the first inclined surface 35, the movement of the tray 4 toward the closed end can be restricted, while the tray 4 has a certain adjustment inclined surface in the direction perpendicular to the line connecting the closed end and the open end.

[0109] In a further embodiment, the limiting member also includes a chamfered surface 36 disposed on the side of the curved surface for easy processing.

[0110] The handling system of the present invention can be applied not only to photovoltaic preparation equipment, but also to other equipment for flat-supporting and handling objects. Moreover, the photovoltaic preparation equipment of the present invention includes, but is not limited to, silicon carbide epitaxial furnace equipment.

[0111] Through the technical concept of this invention, the object to be transported can be transported at a faster speed. Even if relative slippage occurs, the object to be transported can be controlled to return to its original position by the second drive unit. For fragile objects such as wafers, the wafer can be accurately returned to its original position by controlling the rotation angle during the wafer return process, avoiding serious collisions with the limiting parts, thereby improving production efficiency.

[0112] It should be noted that the terminology used above is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments of the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, operations, devices, components, and / or combinations thereof.

[0113] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "horizontal," "vertical," "horizontal," and "top," "bottom," etc., is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0114] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A handling system, comprising a robotic arm, a detection module, and a control module, characterized in that, The robotic arm includes: The support portion is used to support the object to be transported. The support portion has an open end and a closed end that are arranged opposite to each other, and a limiting member for limiting the distance between the object to be transported and the closed end. When the object to be transported is loaded, it enters through the open end until it contacts the limiting member. The first driving unit drives the supporting unit to move from the transport starting point to the transport ending point, so that the supporting unit has a horizontal displacement perpendicular to the central axis between the open end and the closed end; The second driving unit drives the supporting part to rotate around a rotation axis, the rotation axis being parallel to the direction of the central axis between the open end and the closed end; The detection device is disposed on the support portion and is used to detect the sliding distance of the object to be transported relative to the support portion when the object to be transported slides away from the limiting member and in a direction perpendicular to the central axis between the open end and the closed end due to the transport acceleration. The control module controls the first drive unit to load the object to be transported and transport it to the transport endpoint. Based on the sliding distance, the mass of the object to be transported, and the coefficient of friction between the object to be transported and the contact surface of the support unit, the second drive unit controls the rotation angle and rotation speed of the support unit above the transport endpoint, so that the object to be transported slides in the opposite direction and returns to the position where it was in contact with the limiting member when it was loaded.

2. The handling system as described in claim 1, characterized in that, The control module controls the second drive unit to operate at a constant angular velocity. Drive the support part to rotate.

3. The handling system as described in claim 2, characterized in that, The control module controls the rotation angle and rotation speed of the support part in the following stages: In the first stage, the rotation angle is increased from 0° to the maximum critical angle. At this point, the object to be transported is stationary relative to the supporting part; then, the rotation angle is controlled to momentarily exceed the maximum critical angle. The object to be transported begins to slide towards the position where it contacts the limiting member during loading, and the maximum critical angle... The critical angle at which the object to be transported begins to slide due to the maximum static friction; the maximum critical angle. Satisfying the formula: ,in, This is the maximum static friction force between the object to be transported and the supporting part. The mass of the object to be transported. It is the acceleration due to gravity; In the second stage, the rotation angle is reduced from the maximum critical angle. Reduce to the first angle This causes the object to be transported to slide faster; the first angle Satisfying the formula: ,in, The coefficient of sliding friction between the object to be transported and the supporting part; In the third stage, the rotation angle is changed from the first angle. Reduce to the second angle This causes the object to be transported to slide at a slower speed; In the fourth stage, maintain the rotation angle at the second angle. The object to be transported is decelerated and slides until its speed reaches 0, then returns to the position in contact with the limiting member; the rotation angle is maintained at the second angle. When the acceleration remains constant, the object to be transported is at a constant acceleration. The motion decelerates uniformly until the velocity reaches 0, then accelerates at a constant speed. ; In the fifth stage, the rotation angle is changed from the second angle. Reduce the angle to 0° to restore the support to a horizontal position.

4. The handling system as described in claim 3, characterized in that, The control module is configured to operate based on the sliding distance and the mass of the object to be transported. The friction coefficient and the angular velocity Calculate the total movement time of the object to be transported relative to the support. And control the second drive unit during the total motion time The angle changes from the first stage to the fifth stage are completed within the body.

5. The handling system as described in claim 4, characterized in that, The control module aims to minimize the total motion time. To optimize the target, the angular velocity is adjusted. and / or the second angle Perform optimization calculations.

6. The handling system according to any one of claims 1 to 5, characterized in that, The first drive unit adopts a two-bar linkage mechanism.

7. The handling system according to any one of claims 1 to 5, characterized in that, The second drive unit is connected between the first drive unit and the support unit.

8. A photovoltaic manufacturing device, characterized in that, The pallet carrying the wafer is handled using the handling system as described in any one of claims 1 to 7.

9. The photovoltaic manufacturing equipment as described in claim 8, characterized in that, The supporting part includes two opposing supporting fingers perpendicular to the open end and / or the closed end, and the limiting member includes a limiting surface disposed on each of the supporting fingers for limiting the movement of the tray toward the closed end, and a first inclined surface for supporting the bottom surface of the tray; The limiting surface is a curved surface perpendicular to the surface of the tray, and the portion of the curved surface near the closed end has the same curvature as the circumferential surface of the side of the tray. The first inclined surface slopes from a height greater than or equal to the highest point of the curved surface toward the bottom surface of the other supporting finger, so that when the supporting part rotates around the rotation axis, the tray slides in a direction parallel to the central axis between the open end and the closed end.

10. The photovoltaic fabrication equipment as described in claim 9, characterized in that, The limiting component also includes a chamfered surface disposed on the side of the curved surface.

11. The photovoltaic manufacturing equipment according to any one of claims 8 to 10, characterized in that, The photovoltaic fabrication equipment includes a silicon carbide epitaxial furnace.

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