Pressing mechanism for warped TGV glass substrate

Abstract

The invention relates to the technical field of defect detection of glass substrates, in particular to a material pressing mechanism for a warped TGV glass substrate, and mainly solves the technical problem that an effective and feasible material pressing part for the glass substrate is lacked in the prior art. The mechanism comprises a rack, a connecting plate, a detection platform, a middle material pressing assembly and an edge material pressing assembly, the middle material pressing assembly comprises a lifting driving part and a material pressing head, the edge material pressing assembly comprises a plurality of edge pressing structures distributed at intervals in the circumferential direction of the detection platform, and each edge pressing mechanism comprises a rotary pressing driving part and a pressing strip. According to the mechanism, a cutting channel area in the middle of the glass substrate is flattened through the middle material pressing assembly on the feeding station, then the edge area of the glass substrate is pressed and fixed through the edge material pressing assembly, then the middle material pressing assembly ascends and resets, and finally the detection platform is transferred to the detection station for defect detection. In this way, the flatness of the glass substrate can be guaranteed, and the space requirement during defect detection can be met.

Description

Technical Field

[0001] This invention relates to the field of glass substrate defect detection technology, and in particular to a pressing mechanism for a warped TGV glass substrate. Background Technology

[0002] TGV glass substrates (hereinafter referred to as glass substrates) play a crucial role in chip manufacturing as a core component of vertical stacking interconnect technology. In current mainstream processes, through-hole processing and optical defect detection are typically performed on the glass substrate before siding. The overall dimensions of the glass substrate before siding are generally between 370mm×460mm and 920mm×750mm, which is relatively large, and the thickness is generally less than 2mm. During through-hole processing, internal stress can easily cause a certain degree of warping deformation. When performing optical defect detection on the glass substrate, its overall flatness must first be ensured; therefore, a clamping component is needed to flatten the glass substrate to meet the requirements of defect detection.

[0003] Due to the unique structure of the glass substrate, the pressing component can only contact specific edge areas and the central kerf area of ​​the glass substrate during inspection. However, due to the object distance limitation of the high-magnification optical lens, the overall height of the pressing component during continuous pressing must be controlled within 5mm above the surface of the glass substrate; otherwise, it will interfere with the optical inspection lens. The pressing solution that presses down on the central kerf area requires a corresponding pressing component designed in the central region of the glass substrate where the high-magnification optical lens is located, which easily exceeds the aforementioned height limit, making this solution difficult to implement. Pressing only on the edge areas of the glass substrate cannot guarantee its overall flatness, resulting in the lack of an effective and feasible glass substrate pressing assembly in the current technology. Summary of the Invention

[0004] To overcome the technical deficiency of the lack of effective and feasible glass substrate pressing components in the prior art, the present invention provides a pressing mechanism for warping TGV glass substrates.

[0005] The pressing mechanism for a warped TGV glass substrate provided by the present invention includes:

[0006] The frame is equipped with a loading station and an inspection station;

[0007] A connecting plate, which is mounted on the frame and driven to move horizontally to switch between the loading station and the inspection station;

[0008] The testing platform is mounted on the connecting plate;

[0009] An intermediate pressing assembly is mounted on the frame and arranged corresponding to the loading station. The intermediate pressing assembly includes a lifting drive and a pressing head. The fixed part of the lifting drive is connected to the frame, and the pressing head is connected to the output part of the lifting drive and presses down on the middle cutting area of ​​the glass substrate on the detection platform of the loading station.

[0010] An edge pressing assembly includes multiple edge pressing structures spaced apart circumferentially along the detection platform. The edge pressing mechanism includes a rotary pressing drive and a pressing strip. The fixed part of the rotary pressing drive is connected to the connecting plate. The pressing strip is connected to the output part of the rotary pressing drive and is driven to have a working state of pressing against the edge area of ​​the glass substrate and a clearance state of being detached from the glass substrate.

[0011] Furthermore, the detection platform is also equipped with a pressure sensor, and multiple pressure sensors are provided and distributed at intervals along the edge of the detection platform.

[0012] Furthermore, the intermediate pressing assembly also includes a pressure sensor, which is installed inside the pressing head and used to detect the downward pressure of the pressing head on the glass substrate. The pressure sensor is connected to the lifting drive to control the downward pressure of the lifting drive.

[0013] Furthermore, the lifting drive component is a telescopic cylinder, and the air inlet of the telescopic cylinder is equipped with an electro-proportional valve. The pressure sensor is connected to the electro-proportional valve to control the downward pressure by adjusting the gas pressure inside the telescopic cylinder.

[0014] Furthermore, the intermediate pressing assembly also includes a cylinder fixing back plate and an adjusting back plate. The adjusting back plate is connected to the frame, the cylinder fixing back plate is mounted on the adjusting back plate and a leveling structure is provided between them, and the cylinder body of the telescopic cylinder is connected to the cylinder fixing back plate.

[0015] Furthermore, the pressing head includes a pressing mounting plate and pressing blocks. The pressing mounting plate is connected to the output part of the lifting drive component, and multiple pressing blocks are provided and all are installed on the lower surface of the pressing mounting plate.

[0016] Furthermore, the rotary pressing drive is a rotary pressing cylinder, and the pressing structure also includes a rotary limiting block and a positioning mating block. The rotary limiting block is fixedly arranged relative to the cylinder body of the rotary pressing cylinder and is provided with a guide slope and a limiting vertical surface. The positioning mating block is connected between the piston rod and the pressing strip of the rotary pressing cylinder and is a cuboid block. The guide slope is used to guide the positioning mating block to rotate until the side wall fits against the limiting vertical surface.

[0017] Furthermore, the lower surface of the pressure strip is provided with a biomimetic friction pad.

[0018] Furthermore, it also includes a clamping and positioning assembly, which includes a positioning block and a clamping block. The positioning block and the clamping block are respectively located at a set of diagonal points on the detection platform, and the positioning block is connected to the connecting plate. The clamping block is mounted on the connecting plate and is driven to move horizontally so as to cooperate with the positioning block to clamp and position the glass substrate.

[0019] Furthermore, there are two positioning blocks and two clamping blocks, and the two positioning blocks or the two clamping blocks are respectively set on two adjacent sides of the corner of the detection platform.

[0020] The technical solution provided by this invention has the following advantages compared with the prior art:

[0021] The pressing mechanism for warped TGV glass substrates provided by this invention first flattens the central cutting area of ​​the glass substrate at the loading station using an intermediate pressing component, then clamps and fixes the edge area of ​​the glass substrate using an edge pressing component. Next, the intermediate pressing component is raised and reset, and finally, the inspection platform is transferred to the inspection station for defect detection. In this way, on the one hand, the flatness of the glass substrate is ensured through the cooperation of the intermediate and edge pressing components; on the other hand, only the edge pressing component is retained at the inspection station, and the pressing strip of the edge pressing component is driven by a rotary pressing drive, which meets the space requirements for defect detection. Attached Figure Description

[0022] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the overall structure of the pressing mechanism in an embodiment of the present invention;

[0025] Figure 2 This is a schematic diagram of the structure of the intermediate pressing assembly in an embodiment of the present invention;

[0026] Figure 3 express Figure 2 A magnified view of a section at point A in the middle;

[0027] Figure 4 This is a schematic diagram showing the structure of the edge pressing mechanism and related components in an embodiment of the present invention;

[0028] Figure 5 express Figure 4 A magnified view of a section at point B in the middle;

[0029] Figure 6 This is a schematic diagram of the pressure edge structure in an embodiment of the present invention;

[0030] Figure 7 A schematic diagram showing the pressure edge structure in an under-rotation state in an embodiment of the present invention;

[0031] Figure 8 A schematic diagram showing the pressure edge structure in an over-rotated state in an embodiment of the present invention;

[0032] Figure 9 This is a schematic diagram showing the structure of the clamping block and related components in an embodiment of the present invention.

[0033] In the picture:

[0034] 1. Connecting plate; 2. Detection platform; 21. Pressure sensor; 3. Intermediate pressure assembly; 31. Lifting drive; 311. Electro-proportional valve; 32. Pressure head; 321. Pressure mounting plate; 322. Pressure block; 33. Pressure sensor; 34. Cylinder fixing back plate; 35. Adjusting back plate; 36. Leveling structure; 4. Edge pressure assembly; 41. Edge pressing structure; 411. Rotary clamping drive; 412. Pressure strip; 413. Rotary limit block; 4131. Guide slope; 4132. Limiting vertical surface; 414. Positioning mating block; 415. Bionic friction pad; 5. Clamping and positioning assembly; 51. Positioning block; 52. Clamping block. Detailed Implementation

[0035] To better understand the above-mentioned objectives, features, and advantages of the present invention, the solutions of the present invention will be further described below. It should be noted that, unless otherwise specified, the embodiments of the present invention and the features thereof can be combined with each other.

[0036] Many specific details are set forth in the following description in order to provide a full understanding of the invention, but the invention may also be practiced in other ways different from those described herein; obviously, the embodiments in the specification are only some embodiments of the invention, and not all embodiments.

[0037] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0038] like Figure 1 As shown, this embodiment provides a pressing mechanism for warping TGV glass substrates, including a frame, a connecting plate 1, a detection platform 2, an intermediate pressing assembly 3, and an edge pressing assembly 4.

[0039] The frame is equipped with a loading station and an inspection station.

[0040] It should be noted that the rack is mainly used to provide hardware support for other components, and its structure is not limited. Figure 1 It is not shown in the text.

[0041] Specifically, the loading station and the inspection station can be located on the same straight line trajectory, or on a composite trajectory of two or more straight lines (L-shaped trajectory, polygonal trajectory, etc.). For example, in this embodiment, the loading station and the inspection station are located on the same straight line trajectory.

[0042] Among them, reference Figure 1 and Figure 4 The connecting plate 1 is mounted on the frame and is driven to move horizontally to switch between the loading station and the inspection station.

[0043] It is easy to understand that the connecting plate 1 is used to connect the output of the drive component, so that it can move horizontally under the drive of the drive component. The structure of the drive component can be determined according to the spatial layout of the loading station and the inspection station. For example, in this embodiment, the drive component is a linear module. The output of the linear module is connected to the connecting plate 1 to drive the connecting plate 1 to move horizontally in a linear manner, thereby realizing the switching of the connecting plate 1 between the loading station and the inspection station.

[0044] Among them, reference Figure 1 and Figure 4 The testing platform 2 is installed on the connecting plate 1.

[0045] It is easy to understand that the testing platform 2 can be fixed to the connecting plate 1 using a common connection structure.

[0046] Specifically, the testing platform 2 is preferably designed as a rectangle to fit the shape of the current mainstream glass substrates.

[0047] To improve the reliability of automated operation, the detection platform 2 in this embodiment is also equipped with multiple pressure sensors 21, which are distributed at intervals along the edge of the detection platform 2. The next step is triggered only when all pressure sensors 21 detect the presence of material after the glass substrate has been flattened.

[0048] Among them, reference Figure 2 and Figure 3 The intermediate pressing assembly 3 is installed on the frame and arranged corresponding to the loading station. The intermediate pressing assembly 3 includes a lifting drive 31 and a pressing head 32. The fixed part of the lifting drive 31 is connected to the frame, and the pressing head 32 is connected to the output part of the lifting drive 31 and presses down on the middle cutting area of ​​the glass substrate on the detection platform 2 at the loading station.

[0049] Specifically, the type of lifting drive component 31 is not limited. For example... Figure 2As shown in the figure, the lifting drive component 31 in this embodiment is a telescopic cylinder. The cylinder body of the telescopic cylinder is fixed on the frame. The free end of the piston rod of the telescopic cylinder faces downward and is connected to the pressing head 32. The air inlet of the telescopic cylinder is equipped with an electric proportional valve 311. The gas pressure in the telescopic cylinder is controlled by the electric proportional valve 311 to ensure the downward pressure.

[0050] It is easy to understand that the pressing head 32 should include a pressing mounting plate 321 and pressing blocks 322. The pressing mounting plate 321 is connected to the output part of the lifting drive 31, and multiple pressing blocks 322 are provided and all are installed on the lower surface of the pressing mounting plate 321. When pressing down, the pressing blocks 322 contact the glass substrate.

[0051] Specifically, the shape of the pressing mounting plate 321 is not limited; it can be designed according to the shape of the cutting groove area in the middle of the glass substrate. For example... Figure 2 As shown, the pressing mounting plate 321 in this embodiment is designed as a cross structure, with two pressing blocks 322 installed on each branch of the cross structure, and a pressing block 322 is also provided at the center of the cross structure to adapt to the glass substrate that is subsequently divided into four pieces; for the glass substrate that is subsequently divided into six pieces, the pressing mounting plate 321 should be designed as a grid.

[0052] Specifically, the clamping block 322 should be made of a material that does not damage the glass substrate. For example, in this embodiment, the clamping block 322 is made of polyetheretherketone (PEEK).

[0053] To monitor the downward pressure in real time, the intermediate pressing assembly 3 in this embodiment also includes a pressure sensor 33. The pressure sensor 33 is installed inside the pressing head 32 and is used to detect the downward pressure of the pressing head 32 on the glass substrate. The pressure sensor 33 is connected to the lifting drive 31 to control the downward pressure of the lifting drive 31. In this embodiment, the pressure sensor 33 is connected to the electro-proportional valve 311 to control the downward pressure by adjusting the gas pressure in the telescopic cylinder.

[0054] It is easy to understand that the pressure sensor 33 should be installed at the bottom where the pressure head 32 contacts the glass substrate, that is, the pressure sensor 33 is installed inside the pressure block 322. The number of pressure sensors 33 is not limited; pressure sensors 33 can be installed in only one pressure block 322, or pressure sensors 33 can be installed in two or more pressure blocks 322. For example... Figure 2 and Figure 3 As shown, in this embodiment, a pressure sensor 33 is provided only in the pressure block 322 at the center of the cross structure.

[0055] To ensure the vertical downward pressure of the pressing head 32 on the glass substrate, the intermediate pressing assembly 3 in this embodiment further includes a cylinder fixing back plate 34 and an adjusting back plate 35. The adjusting back plate 35 is connected to the frame, and the cylinder fixing back plate 34 is mounted on the adjusting back plate 35 with a leveling structure 36 between them. The cylinder body of the telescopic cylinder is connected to the cylinder fixing back plate 34. The verticality of the cylinder fixing back plate 34 can be adjusted by the leveling structure 36, thereby ensuring the vertical downward pressure of the pressing head 32.

[0056] Specifically, the type of leveling structure 36 is not limited. For example, leveling can be achieved by using a three-point leveling technique with the help of screws and set screws.

[0057] Among them, reference Figures 4 to 9 The edge pressing assembly 4 includes multiple edge pressing structures 41 spaced apart along the circumference of the detection platform 2. The edge pressing mechanism includes a rotary pressing drive 411 and a pressing strip 412. The fixing part of the rotary pressing drive 411 is connected to the connecting plate 1. The pressing strip 412 is connected to the output part of the rotary pressing drive 411 and is driven to have a working state of pressing against the edge area of ​​the glass substrate and a clearance state of being removed from the glass substrate.

[0058] Specifically, the number of pressure-edge structures 41 is not limited. For example Figure 4 As shown, the pressing structure 41 in this embodiment has eight parts, and two parts are provided for each side of the glass substrate.

[0059] It should be noted that the pressure strip 412 is driven by a rotary pressing drive 411 because it needs to be rotated to remove the pressure strip 412 from the top of the glass substrate, so as to avoid interference with the loading of the glass substrate.

[0060] Specifically, the rotary clamping drive 411 can be any drive capable of outputting both lifting and rotating motion; it can be a single drive or a combination of two or more drive components. For example... Figure 7 As shown, the rotary clamping drive 411 in this embodiment is a rotary clamping cylinder.

[0061] It should be noted that the cylinder uses an air source as its power source, which is more compatible with designs such as vacuum adsorption and is more suitable for glass substrate processing equipment. However, the rotational precision of the rotary clamping cylinder is relatively low, and it cannot guarantee that the position bar 412 is exactly parallel to the edge of the glass substrate after rotation stops. Therefore, the pressing structure 41 of this embodiment adds a rotation limit block 413 and a positioning mating block 414 to the rotary clamping cylinder. The rotation limit block 413 is fixedly set relative to the cylinder body of the rotary clamping cylinder and is provided with a guide slope 4131 and a limiting vertical surface 4132. The positioning mating block 414 is connected between the piston rod of the rotary clamping cylinder and the pressure bar 412 and is a cuboid block. The guide slope 4131 is used to guide the positioning mating block 414 to rotate until the side wall fits against the limiting vertical surface 4132. During operation, when the rotary clamping cylinder rotates to the preset angle, the side wall of the positioning block 414 is precisely in contact with the limiting vertical surface 4132. This prevents the rotary clamping cylinder from over-rotating. Figure 8 As shown; if the rotary clamping cylinder under-rotates, during the descent of the piston rod of the rotary clamping cylinder, the corner of the positioning mating block 414 will preferentially contact the guide slope 4131. Then, as it continues to descend, guided by the guide slope 4131, the piston rod will rotate a small amount until the side wall of the positioning mating block 414 is precisely against the limiting vertical surface 4132. Figure 7 As shown; in this way, over-rotation or under-rotation of the rotary clamping cylinder can be avoided, thereby ensuring the rotational accuracy of the rotary clamping cylinder.

[0062] It is easy to understand that the guide slope 4131 causes the top of the positioning mating block 414 to form a chamfered structure.

[0063] To avoid excessive wear between the positioning mating block 414 and the guide slope 4131, the corners of the positioning mating block 414 can be designed as rounded corners; or wear-resistant Teflon or other materials can be added to the guide slope 4131.

[0064] Specifically, the method of fixing the rotation limit block 413 is not limited. For example... Figure 5 As shown, the rotating limiting block 413 in this embodiment is designed as an L-shape and is directly fixed to the top of the cylinder body of the rotating clamping cylinder.

[0065] To avoid relative movement between the pressure strip 412 and the glass substrate, such as Figure 6 As shown, in this embodiment, a biomimetic friction pad 415 is provided on the lower surface of the pressure strip 412.

[0066] In addition, to improve the loading accuracy of the glass substrate, this embodiment also includes a clamping and positioning component 5. The clamping and positioning component 5 includes a positioning block 51 and a clamping block 52. The positioning block 51 and the clamping block 52 are located at a set of diagonal points on the detection platform 2, and the positioning block 51 is connected to the connecting plate 1. The clamping block 52 is mounted on the connecting plate 1 and is driven to move horizontally so as to cooperate with the positioning block 51 to clamp and position the glass substrate. During loading, the external robot first places the glass substrate on the detection platform 2, and then the clamping block 52 pushes the glass substrate from one corner to abut the positioning block 51 at the opposite corner, thus achieving the positioning of the glass substrate. It should be noted that since the edge area and the middle cutting area of ​​the glass substrate protrude from the detection area on both the upper and lower sides, the detection area will not be worn or scratched when the glass substrate moves relative to the detection platform 2.

[0067] Specifically, the structure of the positioning block 51 and the clamping block 52 is not limited. For example... Figure 4 As shown, in this embodiment, there are two positioning blocks 51 and two clamping blocks 52. The two positioning blocks 51 or the two clamping blocks 52 are respectively set to the two adjacent sides of the corner of the detection platform 2. The clamping block 52 pushes the glass substrate to the positioning block 51 on the opposite side to realize the positioning of the glass substrate in this direction.

[0068] Specifically, the driving structure of clamping block 52 is not limited. For example... Figure 9 As shown, in this embodiment, the clamping block 52 is driven by a horizontally arranged telescopic cylinder to cooperate with the positioning block 51 to clamp and position the glass substrate.

[0069] The working principle of the pressing mechanism for the warped TGV glass substrate in this embodiment is as follows:

[0070] S1. Connecting plate 1 is driven to move to the loading station of the frame;

[0071] S2. The external robotic arm places the glass substrate on the inspection platform 2. At this time, the pressure bar 412 is in a clearance state, and the clamping block 52 is disengaged from the corresponding area of ​​the glass substrate.

[0072] S3. The clamping block 52 works with the positioning block 51 to position the glass substrate, thus confining the glass substrate within the target area;

[0073] S4. The pressure head 32 of the intermediate pressure assembly 3 descends to press down on the middle cutting area of ​​the glass substrate. During the pressing process, the pressure sensor 33 and the electric proportional valve 311 work together to ensure the pressing force.

[0074] S5. The pressure bar 412 of the edge pressing assembly 4 is first driven to rotate above the edge area of ​​the glass substrate, and then lowered to switch to the working state. During the descent of the pressure bar 412, the rotation limit block 413 and the positioning mating block 414 work together to correct the rotation angle.

[0075] S6. When all the material pressure sensors 21 detect a material signal, the intermediate material pressure assembly 3 is reset;

[0076] S7. Connecting plate 1 is driven to move to the inspection station of the frame for defect inspection.

[0077] The above description is merely a specific embodiment of the present invention, enabling those skilled in the art to understand or implement the present invention. Although detailed descriptions have been provided with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments, and they should all be covered within the protection scope of the claims.

Claims

1. A pressing mechanism for warping TGV glass substrates, characterized in that, include: The frame is equipped with a loading station and an inspection station; A connecting plate (1) is mounted on the frame and is driven to move horizontally to switch between the loading station and the inspection station; The testing platform (2) is mounted on the connecting plate (1); An intermediate pressing assembly (3) is installed on the frame and arranged corresponding to the loading station. The intermediate pressing assembly (3) includes a lifting drive (31) and a pressing head (32). The fixed part of the lifting drive (31) is connected to the frame, and the pressing head (32) is connected to the output part of the lifting drive (31) and presses the middle cutting area of ​​the glass substrate on the detection platform (2) at the loading station. The edge pressing assembly (4) includes multiple edge pressing structures (41) spaced apart circumferentially along the detection platform (2). The edge pressing mechanism includes a rotary pressing drive (411) and a pressing strip (412). The fixing part of the rotary pressing drive (411) is connected to the connecting plate (1). The pressing strip (412) is connected to the output part of the rotary pressing drive (411) and is driven to have a working state of pressing against the edge area of ​​the glass substrate and a avoidance state of being removed from the glass substrate.

2. The pressing mechanism for warping TGV glass substrates according to claim 1, characterized in that, The detection platform (2) is also provided with a pressure sensor (21), and there are multiple pressure sensors (21) distributed at intervals along the edge of the detection platform (2).

3. The pressing mechanism for warped TGV glass substrates according to claim 1, characterized in that, The intermediate pressing assembly (3) also includes a pressure sensor (33), which is installed inside the pressing head (32) and is used to detect the downward pressure of the pressing head (32) on the glass substrate. The pressure sensor (33) is connected to the lifting drive (31) to control the downward pressure of the lifting drive (31).

4. The pressing mechanism for warped TGV glass substrates according to claim 3, characterized in that, The lifting drive component (31) is a telescopic cylinder. The air inlet of the telescopic cylinder is equipped with an electro-proportional valve (311). The pressure sensor (33) is connected to the electro-proportional valve (311) to control the downward pressure by adjusting the gas pressure in the telescopic cylinder.

5. The pressing mechanism for warped TGV glass substrates according to claim 4, characterized in that, The intermediate pressing assembly (3) also includes a cylinder fixing back plate (34) and an adjusting back plate (35). The adjusting back plate (35) is connected to the frame. The cylinder fixing back plate (34) is installed on the adjusting back plate (35) and a leveling structure (36) is provided between them. The cylinder body of the telescopic cylinder is connected to the cylinder fixing back plate (34).

6. The pressing mechanism for warping TGV glass substrates according to any one of claims 3 to 5, characterized in that, The pressing head (32) includes a pressing mounting plate (321) and a pressing block (322). The pressing mounting plate (321) is connected to the output part of the lifting drive (31). The pressing block (322) is provided in multiples and is installed on the lower surface of the pressing mounting plate (321).

7. The pressing mechanism for warping TGV glass substrates according to claim 1, characterized in that, The rotary pressing drive (411) is a rotary pressing cylinder. The pressing structure (41) also includes a rotary limiting block (413) and a positioning mating block (414). The rotary limiting block (413) is fixedly arranged relative to the cylinder body of the rotary pressing cylinder and is provided with a guide slope (4131) and a limiting vertical surface (4132). The positioning mating block (414) is connected between the piston rod and the pressing strip (412) of the rotary pressing cylinder and is a cuboid block. The guide slope (4131) is used to guide the positioning mating block (414) to rotate to fit the side wall against the limiting vertical surface (4132).

8. The pressing mechanism for warped TGV glass substrates according to claim 1 or 7, characterized in that, The lower surface of the pressure strip (412) is provided with a biomimetic friction pad (415).

9. The pressing mechanism for warped TGV glass substrates according to claim 1, characterized in that, It also includes a clamping and positioning component (5), which includes a positioning block (51) and a clamping block (52). The positioning block (51) and the clamping block (52) are located at a set of diagonal points on the detection platform (2), and the positioning block (51) is connected to the connecting plate (1). The clamping block (52) is mounted on the connecting plate (1) and is driven to move horizontally so as to cooperate with the positioning block (51) to clamp and position the glass substrate.

10. The pressing mechanism for warped TGV glass substrates according to claim 9, characterized in that, Two positioning blocks (51) and two clamping blocks (52) are provided, and the two positioning blocks (51) or the two clamping blocks (52) are respectively set on the two adjacent sides of the corner of the detection platform (2).

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