Parallel vacuum pumping group for vacuum chamber

Abstract

This invention belongs to the field of vacuum pump technology and discloses a parallel vacuum pump assembly for a vacuum chamber, including a vacuum chamber, a molecular pump, a Roots pump, a backing pump, and a vacuum gauge mounted on the vacuum chamber. It also includes two containment units: one containing the molecular pump, a protection unit, a second tritium concentration detector, and a pressure gauge; and the other containing the protection unit, the Roots pump, the backing pump, a third tritium concentration detector, and a pressure gauge. In this invention, the containment units made of water-cooled aluminum alloy panels provide excellent heat exchange. Furthermore, since conventional molecular pumps require water cooling, the cooling water becomes nuclear wastewater during tritium removal, which is difficult to treat. By setting a water-cooled frame on the outside, the molecular pump can be air-cooled, thus eliminating cooling water in the pipes that are in direct contact with the gas, thereby reducing nuclear wastewater and lowering the difficulty of treatment.

Description

Technical Field

[0001] This invention belongs to the field of vacuum pump technology, specifically a parallel vacuum pump unit for vacuum chambers. Background Technology

[0002] Nuclear fusion is a clean and safe nuclear reaction in which two or more atomic nuclei combine to form a single atomic nucleus, releasing enormous amounts of energy. Because nuclear fusion holds promise as a clean and sustainable energy source in the future, it has been extensively studied. Ultra-high vacuum (UHV) is one of the key conditions for nuclear fusion, as it can only occur in high-temperature plasma, which needs to be generated in a vacuum environment to prevent plasma particles from interacting with other gases. Molecular pump assemblies, due to their high pumping speed, high ultimate vacuum, and oil-free operation, have become the core equipment of the high-vacuum system in nuclear fusion devices.

[0003] When evacuating a large chamber to a high vacuum, the molecular pump is installed on the chamber, while the backing pump is installed on the ground. The pipeline between the molecular pump and the backing pump lacks secondary containment protection. During long-term evacuation of radioactive gases, tritium may leak from the valve seals or welded joints into the atmosphere, potentially causing harm to humans. Therefore, improvements are made to address these issues. Summary of the Invention

[0004] To address the problem mentioned in the background art that tritium may leak from valve seals or welded parts into the atmosphere during long-term use and cause harm to the human body, the present invention provides a parallel vacuum pump set for vacuum chambers.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a parallel vacuum pump assembly for a vacuum chamber, comprising a vacuum chamber, a molecular pump, a Roots pump, a backing pump, and a vacuum gauge mounted on the vacuum chamber, and further comprising:

[0006] Two containment units are provided. One containment unit is equipped with a molecular pump, a protection unit, a second tritium concentration detector and a pressure gauge. The other containment unit is equipped with a protection unit, a Roots pump, a backing pump, a third tritium concentration detector and a pressure gauge. The two containment units are respectively connected to a first tritium removal pump and a second tritium removal pump.

[0007] The protection unit is wrapped around the sealing part of the molecular pump, the slide valve installed at the air inlet, and the angle valve installed at the exhaust outlet.

[0008] Preferably, the enclosing unit is a sealed box that can be opened on one side, and the upper, front, rear, left and right sealing panels of the enclosing unit are all water-cooled aluminum alloy panels.

[0009] Preferably, the protection unit includes a first sealing plate, a second sealing plate, a driving mechanism, a rotating mechanism, a winding and sealing mechanism, a clamping mechanism, a first vent pipe, a second vent pipe, and a first tritium concentration detector. The first and second sealing plates are hinged on one side and fastened to each other by bolts on the other side. The driving mechanism is disposed on the first sealing plate, the rotating mechanism is disposed inside the first and second sealing plates, the winding and sealing mechanism is disposed inside the rotating mechanism, the clamping mechanism is disposed on the inner wall of the first sealing plate, the first vent pipe and the second vent pipe are respectively connected to the first and second sealing plates, and the first tritium concentration detector is mounted on the first sealing plate.

[0010] Preferably, the driving mechanism includes a stepper motor, a bevel gear, a gear ring, and a telescopic rod. The stepper motor is mounted on the first sealing plate via a bracket. The bevel gear is mounted on the output shaft of the stepper motor. The gear ring has two symmetrically distributed sets that are joined together to form a ring. The gear ring rotates on the inner walls of the first and second sealing plates and meshes with the bevel gear. The telescopic rod is mounted on the gear ring and connected to the rotating mechanism.

[0011] Preferably, each of the two gear rings is equipped with a first adsorption element, and the two first adsorption elements are magnetically adsorbed to the middle of the inner wall of the first sealing plate and the second sealing plate, respectively.

[0012] Preferably, the rotating mechanism includes a rotating ring, a threaded strip, and a second adsorption element. The rotating ring has two symmetrically distributed sets, and the two sets of rotating rings are combined to form a circular ring. The threaded strip is installed on the surface of the rotating ring, and the combined threaded strips on the surfaces of the two sets of rotating rings form a continuous thread. The second adsorption element is installed in the middle of the rotating ring, and the two second adsorption elements are magnetically adsorbed to the middle of the inner walls of the first sealing plate and the second sealing plate, respectively.

[0013] Preferably, the inner walls of the first sealing plate and the second sealing plate are provided with threaded grooves. The two sets of threaded grooves are combined to form a continuous thread. The rotating ring rotates inside the first sealing plate and the second sealing plate while moving axially.

[0014] Preferably, the winding and sealing mechanism includes a winding disc, a rubber belt, and a resistance mechanism. The winding disc is limited and locked inside the rotating ring by the resistance mechanism, and one end of the rubber belt is wound around the middle of the winding disc.

[0015] Preferably, the resistance mechanism includes a positioning block, a sliding block, a first spring, and a resistance frustum. The positioning block is locked to the inner wall of the rotating ring. The sliding block slides inside the positioning block and is rotatably connected to the inside of the winding disc. The resistance frustum is slidably connected to the surface of the sliding block. The first spring is sleeved on the surface of the sliding block and located on the opposite side of the resistance frustum and the positioning block. One end of the sliding block is round and the other end is square. The resistance frustum and the first spring are both located at the square end. The round end of the sliding block is located inside the winding disc. The resistance frustum elastically abuts against the winding disc through the first spring.

[0016] Preferably, the clamping mechanism includes a fixed block, a second spring, and a movable clamping block. The fixed block is fixedly connected to the inner wall of the first sealing plate, and the driving mechanism is elastically connected to the fixed block through the second spring. The other end of the rubber band is clamped by the fixed block and the movable clamping block.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0018] In this invention, the containment unit made of water-cooled aluminum alloy panel can provide excellent heat exchange. Since conventional molecular pumps require water cooling, the cooling water becomes nuclear wastewater when de-tritium is extracted, which is difficult to treat. By setting a water-cooled frame on the outside, the molecular pump can be air-cooled. In this way, there is no cooling water in the pipes that are in direct contact with the gas, thereby reducing nuclear wastewater and reducing the difficulty of treatment.

[0019] This invention uses a first tritium concentration detector to detect the tritium content in a closed cavity composed of a first sealing plate and a second sealing plate. After the first and second sealing plates are fastened with bolts, the interior forms a closed cavity to prevent tritium from leaking into the atmosphere. A drive mechanism drives a rotating mechanism to rotate and move, thereby driving a winding sealing mechanism to wind the sealing joint of the pipeline connection, thereby reinforcing the sealing joint and reducing tritium leakage.

[0020] The present invention makes the entire winding and sealing mechanism detachable through the design of the resistance mechanism, which is convenient for installation. After installation, the first spring, which is in a compressed state, applies elastic force to the resistance frustum, so that there is friction between the resistance frustum and the winding disc. When the entire winding and sealing mechanism rotates with the rotating ring, the friction between the resistance frustum and the winding disc can make the rubber strip taut and wrapped around the sealing point, thus ensuring the sealing effect after winding. Attached Figure Description

[0021] Figure 1 This is a system layout diagram of the present invention;

[0022] Figure 2 This is a front view of the structure of the containing unit of the present invention;

[0023] Figure 3 This is a schematic diagram of the structure of the protection unit of the present invention;

[0024] Figure 4 This is a schematic diagram of the internal structure of the molecular pump and protection unit of the present invention;

[0025] Figure 5 This is a detailed structural diagram of the drive mechanism of the present invention;

[0026] Figure 6 This is a partial view of the internal structure of the first sealing plate and the second sealing plate of the present invention;

[0027] Figure 7 This is a schematic diagram showing the positional relationship of the winding and sealing mechanism of the present invention;

[0028] Figure 8 This is a detailed structural diagram of the winding and sealing mechanism of the present invention;

[0029] Figure 9 This is a detailed structural diagram of the clamping mechanism of the present invention.

[0030] In the diagram: 100, Vacuum chamber; 110, Vacuum gauge; 200, Enclosure unit; 210, Molecular pump; 220, Protection unit; 221, First sealing plate; 2211, Threaded groove; 222, Second sealing plate; 223, Drive mechanism; 2231, Stepper motor; 2232, Bevel gear; 2233, Gear ring; 2234, Telescopic rod; 22331, First adsorption element; 224, Rotation mechanism; 2241, Rotating ring; 2242, Threaded strip; 2243, Second adsorption element; 225, Winding and sealing mechanism; 2251, Winding disc; 2252, Rubber... 2253. Adhesive tape; 22531. Resistance mechanism; 22532. Positioning block; 22533. Sliding block; 22533. First spring; 22534. Resistance frustum; 226. Clamping mechanism; 2261. Fixing block; 2262. Second spring; 2263. Movable clamping block; 227. First vent pipe; 228. Second vent pipe; 229. First tritium concentration detector; 230. Roots pump; 240. Backing pump; 251. Second tritium concentration detector; 252. Third tritium concentration detector; 260. Pressure gauge; 310. First detritium removal pump; 320. Second detritium removal pump. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] like Figures 1 to 9 As shown, the present invention provides a parallel vacuum pump assembly for a vacuum chamber, including a vacuum chamber 100, a molecular pump 210, a Roots pump 230, a backing pump 240, and a vacuum gauge 110 mounted on the vacuum chamber 100, and further comprising:

[0033] Two containment units 200 are provided. One containment unit 200 is equipped with a molecular pump 210, a protection unit 220, a second tritium concentration detector 251 and a pressure gauge 260. The other containment unit 200 is equipped with a protection unit 220, a Roots pump 230, a backing pump 240, a third tritium concentration detector 252 and a pressure gauge 260. The two containment units 200 are respectively connected to a first tritium removal pump 310 and a second tritium removal pump 320.

[0034] The protection unit 220 is wrapped around the sealing part of the molecular pump, the slide valve installed at the air inlet, and the angle valve installed at the exhaust outlet.

[0035] The above solution involves enclosing the slide gate valve V1 and the exhaust port angle valve V3 through the protection unit 220, and installing the fore-pump 240 and the all-metal angle valve V4 inside the containment unit 200. In the event of a leak, tritium will not diffuse into the atmosphere.

[0036] like Figure 2 As shown, the containment unit 200 is a sealed box that can be opened on one side. The upper, front, rear, left and right sealing panels of the containment unit 200 are all water-cooled aluminum alloy panels.

[0037] The above solution provides excellent heat exchange through water cooling. Since conventional molecular pumps 210 require water cooling, the cooling water becomes nuclear wastewater during tritium extraction, which is difficult to treat. By setting a water-cooled frame on the outside, molecular pumps 210 can be air-cooled. This way, there is no cooling water in the pipes that are in direct contact with the gas, thereby reducing nuclear wastewater and lowering the difficulty of treatment.

[0038] like Figure 3 , Figure 4 and Figure 7As shown, the protection unit 220 includes a first sealing plate 221, a second sealing plate 222, a drive mechanism 223, a rotation mechanism 224, a winding and sealing mechanism 225, a clamping mechanism 226, a first vent pipe 227, a second vent pipe 228, and a first tritium concentration detector 229. The first sealing plate 221 and the second sealing plate 222 are hinged on one side and fastened to each other by bolts on the other side. The drive mechanism 223 is disposed on the first sealing plate 221. The rotation mechanism 224 is disposed inside the first sealing plate 221 and the second sealing plate 222. The winding and sealing mechanism 225 is disposed inside the rotation mechanism 224. The clamping mechanism 226 is disposed on the inner wall of the first sealing plate 221. The first vent pipe 227 and the second vent pipe 228 are respectively connected to the first sealing plate 221 and the second sealing plate 222. The first tritium concentration detector 229 is mounted on the first sealing plate 221.

[0039] The above scheme is adopted: the tritium content in the closed cavity composed of the first sealing plate 221 and the second sealing plate 222 is detected by the first tritium concentration detector 229. After the first sealing plate 221 and the second sealing plate 222 are fastened with bolts, the inside is a closed cavity to prevent tritium from leaking into the atmosphere. The drive mechanism 223 drives the rotating mechanism 224 to rotate and move, thereby driving the winding sealing mechanism 225 to wind the sealing part of the pipeline connection, thereby reinforcing the sealing part and reducing the leakage of tritium.

[0040] like Figures 3 to 5 As shown, the drive mechanism 223 includes a stepper motor 2231, a bevel gear 2232, a gear ring 2233, and a telescopic rod 2234. The stepper motor 2231 is mounted on the first sealing plate 221 via a bracket. The bevel gear 2232 is mounted on the output shaft of the stepper motor 2231. The gear ring 2233 has two symmetrically distributed sets, and the two sets of gear rings 2233 are joined together to form a ring. The gear ring 2233 rotates on the inner wall of the first sealing plate 221 and the second sealing plate 222 and meshes with the bevel gear 2232. The telescopic rod 2234 is mounted on the gear ring 2233 and connected to the rotating mechanism 224.

[0041] The above solution is adopted: the stepper motor 2231 drives the bevel gear 2232 to rotate, which in turn drives the gear ring 2233 to rotate, and then drives the rotating mechanism 224 to rotate as a whole through the telescopic rod 2234, so as to achieve the winding of the seal, which can effectively reduce the leakage of tritium; and each gear ring 2233 is semi-circular, so it can be fitted on the outside of the pipeline for easy use.

[0042] like Figure 6 As shown, each of the two toothed rings 2233 is equipped with a first adsorption element 22331, and the two first adsorption elements 22331 are magnetically adsorbed to the middle of the inner wall of the first sealing plate 221 and the second sealing plate 222, respectively.

[0043] The above solution is adopted: by setting the first adsorption component 22331, the two toothed rings 2233 can be fixed on the inner walls of the first sealing plate 221 and the second sealing plate 222 respectively by magnetic adsorption. This makes it convenient to install the first sealing plate 221 and the second sealing plate 222. Driven by the stepper motor 2231, the first adsorption component 22331 can be separated from the first sealing plate 221 and the second sealing plate 222, ensuring the rationality of operation.

[0044] like Figure 6 and Figure 7 As shown, the rotating mechanism 224 includes a rotating ring 2241, a threaded strip 2242, and a second adsorption member 2243. The rotating ring 2241 has two symmetrically distributed sets, and the two sets of rotating rings 2241 are combined to form a ring. The threaded strip 2242 is installed on the surface of the rotating ring 2241. The combined threaded strips 2242 on the surfaces of the two sets of rotating rings 2241 form a continuous thread. The second adsorption member 2243 is installed in the middle of the rotating ring 2241. The two second adsorption members 2243 are magnetically adsorbed to the middle of the inner walls of the first sealing plate 221 and the second sealing plate 222, respectively. The inner walls of the first sealing plate 221 and the second sealing plate 222 are both provided with threaded grooves 2211. The combined threaded grooves 2211 form a continuous thread. The rotating ring 2241 rotates inside the first sealing plate 221 and the second sealing plate 222 while moving axially.

[0045] The above solution involves the engagement of two threaded strips 2242 with the threaded grooves 2211 on the inner sides of the first sealing plate 221 and the second sealing plate 222, allowing the two rotating rings 2241 that are assembled into a circular ring to rotate inside the first sealing plate 221 and the second sealing plate 222. Simultaneously, they move along the threaded direction, ensuring that the rubber strip 2252 is fully wound and guaranteeing a sealing effect. Two second adsorption components 2243 are connected to the first sealing plate 221 and the second sealing plate 222 via magnetic adsorption, facilitating the installation and use of the first sealing plate 221 and the second sealing plate 222.

[0046] like Figure 7 and Figure 8As shown, the winding and sealing mechanism 225 includes a winding disc 2251, a rubber band 2252, and a resistance mechanism 2253. The winding disc 2251 is limited and engaged inside the rotating ring 2241 by the resistance mechanism 2253. One end of the rubber band 2252 is wound around the middle of the winding disc 2251. The resistance mechanism 2253 includes a positioning block 22531, a sliding block 22532, a first spring 22533, and a resistance frustum 22534. The positioning block 22531 is limited and engaged inside the rotating ring 2241, and the sliding block 22532 slides inside the positioning block 22531 and rotates continuously. The resistance frustum 22534 is slidably connected to the surface of the sliding block 22532 inside the winding disc 2251. The first spring 22533 is sleeved on the surface of the sliding block 22532 and located on the opposite side of the resistance frustum 22534 and the positioning block 22531. One end of the sliding block 22532 is round and the other end is square. The resistance frustum 22534 and the first spring 22533 are both located at the square end. The round end of the sliding block 22532 is located inside the winding disc 2251. The resistance frustum 22534 elastically abuts against the winding disc 2251 through the first spring 22533.

[0047] The above solution employs the following design: the resistance mechanism 2253 is designed to make the entire winding and sealing mechanism 225 detachable for easy installation. Furthermore, the first spring 22533, which is compressed after installation, applies elastic force to the resistance frustum 22534, creating friction between the resistance frustum 22534 and the winding disc 2251. As the winding and sealing mechanism 225 rotates with the rotating ring 2241, the friction between the resistance frustum 22534 and the winding disc 2251 ensures that the rubber strip 2252 is taut and wound around the sealing area, thus guaranteeing a sealing effect after winding. The sliding engagement of the sliding block 22532 with the rotating ring 2241 and its rotational connection with the winding disc 2251 ensures that one end of the positioning block 22531 always points towards the center of the rotating ring 2241, facilitating disassembly, while also ensuring that the winding disc 2251 can rotate.

[0048] like Figure 5 and Figure 9 As shown, the clamping mechanism 226 includes a fixed block 2261, a second spring 2262, and a movable clamping block 2263. The fixed block 2261 is fixedly connected to the inner wall of the first sealing plate 221. The driving mechanism 223 is elastically connected to the fixed block 2261 through the second spring 2262. The other end of the rubber band 2252 is clamped by the fixed block 2261 and the movable clamping block 2263.

[0049] The above solution is adopted: the second spring 2262 causes the fixed block 2261 and the movable clamping block 2263 to move towards each other, thereby achieving the clamping and fixing of the movable end of the threaded strip 2242. The clamping surfaces of the fixed block 2261 and the movable clamping block 2263 have matching protrusions and depressions, which can ensure the clamping effect of the threaded strip 2242 and thus promote the winding effect of the threaded strip 2242.

[0050] Working principle and usage process of this invention:

[0051] The second tritium concentration detector 251, molecular pump 210, gate valve V1, exhaust port angle valve V3, bypass pipe, and bypass valve V2 are installed inside one of the containment units 200. Gate valve V1 is connected to the inlet of molecular pump 210 and sealed with a copper gasket. Exhaust port angle valve V3 is connected to the exhaust port of molecular pump 210 and sealed with a KF metal seal. Pressure gauge 260 is installed on the outside of containment unit 200 and sealed with a copper gasket. When the second tritium concentration detector 251 detects that the tritium concentration in containment unit 200 exceeds the threshold, purge valve V5 and exhaust valve V7 are opened alternately to replace the gas in containment unit 200 with nitrogen.

[0052] Roots pump 230, all-metal angle valve V4, and third tritium concentration detector 252 are installed in another containment unit 200. All-metal angle valve V4 and Roots pump 230 are sealed with CF copper gaskets. Another pressure gauge 260 is installed outside containment unit 200 and is sealed with CF. When the third tritium concentration detector 252 detects that the tritium concentration in containment unit 200 exceeds the threshold, purge valve V6 and exhaust valve V8 are opened alternately to replace the gas in containment unit 200 with nitrogen.

[0053] When it is necessary to quickly evacuate the vacuum chamber 100 from atmospheric pressure to below 100 Pa, the slide gate valve V1 is closed and the bypass valve V2 is opened. The bypass pipeline and the Roots pump 230 quickly evacuate the chamber. When the pressure in the chamber drops below 100 Pa, the slide gate valve V1 is opened and the bypass valve V2 is closed. The molecular pump 210 is used as the main pump to evacuate the chamber to a high vacuum.

[0054] When the sealing effect deteriorates and tritium gas leaks, the first tritium concentration detector 229 detects that the tritium concentration exceeds the threshold. The purge valve V6 and exhaust valve V8 or the purge valve V7 and exhaust valve V5, which are connected to the first vent pipe 227 and the second vent pipe 228, are opened alternately to replace the gas in the first sealing plate 221 and the second sealing plate 222 with nitrogen. At the same time, the stepper motor 2231 is started, and the gear ring 2233 is rotated through the bevel gear 2232. This, in turn, drives the rotating mechanism 224 to rotate as a whole through the telescopic rod 2234. When the rotating mechanism 224 rotates, the internal threaded strip 2242 engages with the threaded groove 2211 in the first sealing plate 221 and the second sealing plate 222. The rotating ring 2241 is rotated by the telescopic rod 2234 and moves with the thread direction of the threaded groove 2211. This causes the rubber strip 2252 to wrap around the surface of the seal, thereby reinforcing the seal.

[0055] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0056] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A parallel vacuum pump assembly for a vacuum chamber, comprising a vacuum chamber (100), a molecular pump (210), a Roots pump (230), a backing pump (240), and a vacuum gauge (110) mounted on the vacuum chamber (100), characterized in that, Also includes: Two containment units (200), one of which contains a molecular pump (210), a protection unit (220), a second tritium concentration detector (251), and a pressure gauge (260), and the other contains a protection unit (220), a Roots pump (230), a backing pump (240), a third tritium concentration detector (252), and a pressure gauge (260). The two containment units (200) are respectively connected to a first tritium removal pump (310) and a second tritium removal pump (320). The protection unit (220) is wrapped around the sealing part of the molecular pump, the slide valve installed at the air inlet, and the angle valve installed at the exhaust outlet. The protection unit (220) includes a first sealing plate (221), a second sealing plate (222), a drive mechanism (223), a rotation mechanism (224), a winding and sealing mechanism (225), a clamping mechanism (226), a first vent pipe (227), a second vent pipe (228), and a first tritium concentration detector (229). The first sealing plate (221) and the second sealing plate (222) are hinged on one side and fastened to each other by bolts on the other side. The drive mechanism (223) is mounted on the first sealing plate (221). The rotating mechanism (224) is disposed inside the first sealing plate (221) and the second sealing plate (222), the winding and sealing mechanism (225) is disposed inside the rotating mechanism (224), the clamping mechanism (226) is disposed on the inner wall of the first sealing plate (221), the first vent pipe (227) and the second vent pipe (228) are respectively connected to the first sealing plate (221) and the second sealing plate (222), and the first tritium concentration detector (229) is installed on the first sealing plate (221); The drive mechanism (223) includes a stepper motor (2231), a bevel gear (2232), a gear ring (2233), and a telescopic rod (2234). The stepper motor (2231) is mounted on the first sealing plate (221) via a bracket. The bevel gear (2232) is mounted on the output shaft of the stepper motor (2231). The gear ring (2233) has two symmetrically distributed sets, and the two sets of gear rings (2233) are joined together to form a ring. The gear ring (2233) rotates on the inner wall of the first sealing plate (221) and the second sealing plate (222) and meshes with the bevel gear (2232). The telescopic rod (2234) is mounted on the gear ring (2233) and connected to the rotating mechanism (224). The rotating mechanism (224) includes a rotating ring (2241), a threaded strip (2242), and a second adsorption element (2243). The rotating ring (2241) is provided with two symmetrically distributed sets of rotating rings (2241) that are combined to form a circular ring. The threaded strip (2242) is installed on the surface of the rotating ring (2241). The threaded strips (2242) on the surfaces of the two sets of rotating rings (2241) form a continuous thread. The second adsorption element (2243) is installed in the middle of the rotating ring (2241). The two second adsorption elements (2243) are magnetically adsorbed to the middle of the inner walls of the first sealing plate (221) and the second sealing plate (222), respectively. The inner walls of the first sealing plate (221) and the second sealing plate (222) are provided with threaded grooves (2211). The two sets of threaded grooves (2211) are combined to form a continuous thread. The rotating ring (2241) rotates inside the first sealing plate (221) and the second sealing plate (222) through the threaded bar (2242) and the threaded grooves (2211) and moves axially at the same time. The winding and sealing mechanism (225) includes a winding disc (2251), a rubber strip (2252), and a resistance mechanism (2253). The winding disc (2251) is limited and locked inside the rotating ring (2241) by the resistance mechanism (2253), and one end of the rubber strip (2252) is wound around the middle of the winding disc (2251).

2. The parallel vacuum pump assembly for a vacuum chamber according to claim 1, characterized in that: The enclosing unit (200) is a sealed box that can be opened on one side. The upper, front, rear, left and right sealing panels of the enclosing unit (200) are all water-cooled aluminum alloy panels.

3. The parallel vacuum pump assembly for a vacuum chamber according to claim 1, characterized in that: Each of the two toothed rings (2233) is equipped with a first adsorption element (22331), and the two first adsorption elements (22331) are magnetically adsorbed to the middle of the inner wall of the first sealing plate (221) and the second sealing plate (222), respectively.

4. The parallel vacuum pump assembly for a vacuum chamber according to claim 1, characterized in that: The resistance mechanism (2253) includes a positioning block (22531), a sliding block (22532), a first spring (22533), and a resistance frustum (22534). The positioning block (22531) is locked to the inner wall of the rotating ring (2241). The sliding block (22532) slides inside the positioning block (22531) and is rotatably connected to the inside of the winding disc (2251). The resistance frustum (22534) is slidably connected to the surface of the sliding block (22532). The first spring (22533)... 33) Sleeve on the surface of the sliding block (22532) and located on the opposite side of the resistance frustum (22534) and the positioning block (22531), the sliding block (22532) is round at one end and square at the other end, the resistance frustum (22534) and the first spring (22533) are both located at the square end, the round end of the sliding block (22532) is located inside the winding disc (2251), and the resistance frustum (22534) is elastically abutted against the winding disc (2251) by the first spring (22533).

5. The parallel vacuum pump assembly for a vacuum chamber according to claim 1, characterized in that: The clamping mechanism (226) includes a fixed block (2261), a second spring (2262), and a movable clamping block (2263). The fixed block (2261) is fixedly connected to the inner wall of the first sealing plate (221). The driving mechanism (223) is elastically connected to the fixed block (2261) through the second spring (2262). The other end of the rubber band (2252) is clamped by the fixed block (2261) and the movable clamping block (2263).

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