Mask box transfer device

Abstract

The invention discloses a mask box transfer device, which relates to the related field of mask box transfer and comprises a shifting and stacking device and a pushing device. By arranging the shifting and stacking device capable of transferring one layer of mask plate box into two layers of stacked mask plate boxes, the space in the transferring process can be saved, driving is achieved through an independent motor and an air cylinder, the transferring number is large, automatic operation is achieved, manpower is effectively saved, and the working efficiency is improved; and the pushing device is installed on the left side of the shifting and stacking device, the pushing device can receive the mask plate boxes stacked by the shifting and stacking device and collect the mask plate boxes, after collection is completed, the mask plate boxes can be pushed to the positions where transferring and collecting need to be conducted through an internal shifting mechanism, the pushing stability is high, the efficiency is high, and the whole transferring efficiency is effectively improved.

Description

Technical Field

[0001] This invention relates to the field of photomask transfer, and more particularly to a photomask transfer device. Background Technology

[0002] Mask cassette transfer refers to the process of safely transporting a dedicated protective cassette containing a mask between different devices or memory units in semiconductor manufacturing or photolithography. This process typically relies on automated transport systems or manual operation to ensure that the mask is kept in a clean environment to avoid contamination, damage, or misalignment, thereby maintaining high-precision photolithography alignment and production stability.

[0003] When it is necessary to centrally transfer photomask boxes, a dedicated photomask box transfer device is required. However, most existing technologies involve semi-automatic or manual transfer, which is quite labor-intensive. Summary of the Invention

[0004] Therefore, in order to overcome the above-mentioned shortcomings, the present invention provides a mask box transfer device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a mask box transfer device, including a shifting and stacking device for transferring and stacking mask boxes, wherein a pushing device is provided at the bottom left end of the shifting and stacking device, and the pushing device is used to collect the mask boxes and push them. The shifting and stacking device includes a fixed plate for supporting and connecting the shifting and stacking device, support blocks at the four ends of the top of the fixed plate, a fixed seat at the front and rear positions of the left end of the top of the fixed plate, a first motor installed at the front end of the front fixed seat, a rotating rod between the two sets of fixed seats and connected to the output shaft of the first motor, two sets of left supports at the front and rear positions of the rotating rod, a clamping mechanism on the inner side of the left support, a pull rod hinged to the upper right end of the fixed seat, a connecting rod on the inner right end of the fixed seat, a linkage rod hinged to the other end of the pull rod, a right support hinged to the right end of the left support, and a support rod on the right end of the right support. The clamping mechanism is provided in the middle of the inner side of the right support, and the connecting rod is installed on the left end of the inner side of the right support.

[0006] Preferably, the fixing plate has openings at both the left and right ends, with the right opening being twice the size of the left opening.

[0007] Preferably, the fixing plate has round holes at both the front and rear ends.

[0008] Preferably, the clamping mechanism includes a fixed shell located inside the left support, a contact plate located at the other end of the fixed shell, a push-out cylinder located in the middle of the fixed shell, and a guide rod connected to the contact plate. The middle of the contact plate is connected to the push-out rod of the push-out cylinder, and the guide rod extends into the interior of the fixed shell.

[0009] Preferably, the pushing device includes a support member, a second motor located at the front end of the support member, a collection rack installed on the top of the support member, trays located at both ends of the bottom inside the collection rack, and a feeding mechanism located at the rear end of the top inside the collection rack.

[0010] Preferably, a lifting cylinder is provided at the front and rear positions of the bottom of the collection rack, and the top of the lifting cylinder push-out rod is connected to the support plate.

[0011] Preferably, the top center of the support member and the middle of the collection rack are open.

[0012] Preferably, the lower left and right ends of the collection rack have openings, and a blocking block is fixed at the right end of the opening.

[0013] Preferably, the dispensing mechanism includes a guide rail located at the rear end of the bottom of the collection rack, and a sliding groove is provided in the middle of the guide rail. The middle of the sliding groove is hollow. A sliding member is movably embedded in the sliding groove. A sliding guide post is located at the front end of the sliding member and passes through the hollow position of the sliding groove. A follower is located on the back of the sliding member. A toggle member is movably embedded in the middle of the follower. The lower end of the toggle member is cylindrical. A spring is sleeved in the cylindrical position. A swing rod is connected to the sliding guide post at the upper end. The upper end of the swing rod is U-shaped. A guide post is movably embedded in the lower end of the swing rod. A rotating member is located at the other end of the guide post. An upper support is connected to the other end of the rotating member and fixed to the support member. A lower support is connected to the support member and hinged to the lower end of the swing rod.

[0014] Preferably, the bottom of the actuating element is cylindrical, and a nut is screwed onto the bottom of the follower at the cylindrical position.

[0015] The beneficial effects of this invention are: This invention features a shifting and stacking device that can transfer a single-layer mask box into a stack of two layers. This saves space during the transfer process and is driven by an independent motor and cylinder. It can handle large transfer volumes, operates automatically, and effectively saves manpower to improve work efficiency. Furthermore, a pushing device is installed on the left side of the shifting and stacking device. This pushing device can receive and collect the stacked mask boxes. After collection, the internal conveying mechanism can push the mask boxes to the location where they need to be transferred and collected. The pushing mechanism is stable and efficient, effectively improving the overall transfer efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention.

[0017] Figure 2 This is a schematic diagram of the structure of the shifting and stacking device of the present invention.

[0018] Figure 3 This is a schematic diagram of the clamping mechanism of the present invention.

[0019] Figure 4 This is a schematic diagram of the pushing device structure of the present invention.

[0020] Figure 5 This is a schematic diagram of the dialing mechanism of the present invention.

[0021] Figure 6 This is a schematic diagram of the dialing mechanism of the present invention from another perspective.

[0022] The components include: a shifting and stacking device-1, a pushing device-2, a fixing plate-11, a support block-12, a fixing seat-13, a first motor-14, a rotating rod-15, a left support-16, a clamping mechanism-17, a pull rod-18, a connecting rod-19, a linkage rod-110, a right support-111, a support rod-112, a fixing shell-171, a contact plate-172, an ejecting cylinder-173, a guide rod-174, a support member-21, a second motor-22, a collecting rack-23, a tray-24, a lifting cylinder-241, a conveying mechanism-a, a guide rail-a1, a sliding member-a2, a sliding guide column-a21, a follower-a3, a toggle member-a4, a spring-a5, a swing rod-a6, a guide column-a7, a rotating member-a8, an upper support-a9, and a lower support-a10. Detailed Implementation

[0023] To further explain the technical solution of the present invention, a detailed description is provided below through specific embodiments.

[0024] Please see Figure 1 The present invention provides a photomask transfer device, including a transfer and stacking device 1 that can shift and stack one photomask in two layers. A pushing device 2 is installed at the bottom left end of the transfer and stacking device 1. The pushing device 2 can collect the multi-layered photomask and push them out layer by layer. The left end of the pushing device 2 can be connected to an external collection device. The transfer and stacking device 1 can be connected to a lifting device for mobile photomask transfer.

[0025] Please see Figures 2-3The shifting and stacking device 1 includes a fixed plate 11 for support. Support blocks 12 are welded to the four ends of the top of the fixed plate 11. Openings are provided at both the left and right ends of the fixed plate 11, with the right opening being twice the size of the left opening. Fixed seats 13 are welded to the front and rear positions of the left end of the top of the fixed plate 11. A first motor 14 is installed at the front end of the front fixed seat 13. A rotating rod 15 is provided in the middle of the fixed seat 13, with its front end connected to the output shaft of the first motor 14. A set of left supports 16 are fixed to the front and rear ends of the outer side of the rotating rod 15. A clamping mechanism 17 is installed inside the left supports 16. Connecting rods 19 are installed inside the two sets of left supports 16 for support. Two sets of fixed seats... A pull rod 18 is hinged to the upper right end of the inner side of the 13. The other end of the pull rod 18 is hinged to the linkage rod 110. Each of the two sets of left supports 16 has a set of right supports 111 hinged to its right end. The outer left end of the two sets of right supports 111 is hinged to the linkage rod 110. A connecting rod 19 is also fixed to the inner left end of the two sets of right supports 111. A clamping mechanism 17 for clamping the mask box is also installed in the middle of the inner side of the two sets of right supports 111. A support rod 112 is fixed to the inner right end of the two sets of right supports 111. The bottom right end of the right support 111 is placed on the top of the support block 12 at the right end. The front and rear ends of the fixing plate 11 have round holes to facilitate the connection of external lifting equipment for operation. The clamping mechanism 17 includes a fixed housing 171 fixed inside the right support 111. A contact plate 172 is provided inside the fixed housing 171. An ejection cylinder 173 is installed in the middle of the fixed housing 171. The ejection rod of the ejection cylinder 173 passes through the fixed housing 171 and connects to the contact plate 172. Both ends of the inner side of the contact plate 172 extend into the interior of the fixed housing 171 through guide rods 174.

[0026] Please see Figures 4-6 The pushing device 2 includes a support member 21 for support. A second motor 22 is provided at the lower end of the front end face of the support member 21. A collection rack 23 is welded to the top of the support member 21. A set of trays 24 are provided at the front and rear positions of the bottom of the collection rack 23. The top middle of the support member 21 and the middle of the collection rack 23 are open. A lifting cylinder 241 is provided at the front and rear positions of the top of the collection rack 23. The top push rod of the lifting cylinder 241 passes through the collection rack 23 and connects to the trays 24. A feeding mechanism a is installed at the rear end of the top of the collection rack 23. The feeding mechanism a can push the stacked mask boxes inside the collection rack 23 one by one. Openings are provided at the left and right positions of the lower end of the collection rack 23 to facilitate the pushing of the mask box placed at the bottom. A blocking block is fixed at the right end of the opening position of the collection rack 23. A fixing plate 11 is connected to the top of the collection rack 23. The dispensing mechanism a includes a guide rail a1 fixed to the rear end of the bottom of the collection rack 23. A sliding groove is formed in the middle of the guide rail a1, and the middle of the sliding groove is hollow. A sliding member a2 is movably embedded in the sliding groove. A follower a3 is fixed to the back of the sliding member a2. A toggle member a4 is movably embedded in the middle of the follower a3. The bottom of the toggle member a4 is cylindrical. A nut is screwed onto the bottom of the follower a3 at the cylindrical position, which is used for limiting the movement. A spring a5 is fitted onto the upper end of the cylindrical position for convenient limiting. The right end of the top of the toggle member a4 is convex for stable dispensing. The front end of the sliding member a2 is... A sliding guide post a21 is provided through the hollow position of the sliding groove. The outer front end of the sliding guide post a21 contacts the rocker arm a6. The upper end of the rocker arm a6 is U-shaped, and the sliding guide post a21 is placed in the middle of the U-shaped position. A sliding groove is provided at the lower end of the rocker arm a6. A guide post a7 is movably embedded in the sliding groove. The front end of the guide post a7 is connected to a rotating component a8. The other end of the rotating component a8 is connected to an upper support a9 fixed inside the support component 21. The rotating component a8 is connected to the output shaft of the second motor 22. The lower end of the rocker arm a6 is hinged to the lower support a10, and the other end of the lower support a10 is connected to the support component 21.

[0027] The specific implementation process is as follows: When it is necessary to transfer the photomask box, first connect the fixing plate 11 to the external lifting equipment through the round hole. Then, the external lifting equipment can be used to move the transfer and stacking device 1 to the top of the photomask box to be transferred. The right end opening of the fixing plate 11 faces the top of the photomask box storage cabinet and is then lowered so that the photomask box is placed inside the opening, and the transfer of one layer of photomask box begins. The ejection cylinder 173 is activated, acting on the contact plate 172. Guided by the guide rod 174, the contact plate 172 extends and clamps the photomask box. After both sets of contact plates 172 clamp the photomask box, the first motor 14 is activated, rotating the rotating rod 15, causing the left support 16 to move accordingly. The left support 16 acts on the right support 111, and under the guidance of the pull rod 18 and the linkage rod 110, the left support 16 and the right support 111 fold together. Then move to the left opening of the fixed plate 11. After the movement is completed, start the lifting cylinder 241 to lift the tray 24 so that the tray 24 is placed in the left opening of the fixed plate 11. Then start the push-out cylinder 173 to release the clamping of the mask box. The mask box loses the clamping force, and the two layers of mask boxes can be placed on the upper end of the tray 24 for stacking. Then the tray 24 is driven down by the lifting cylinder 241 and the transfer work is repeated. This cycle continues until the placement of multiple layers of mask boxes is completed in the collection rack 23. When it is necessary to remove the stacked photomask boxes one by one, the left end of the pushing device 2 can be connected to the external receiving and collecting device through the lifting equipment. Then, the second motor 22 is started. The second motor 22 drives the rotating part a8 to rotate. During the rotation of the rotating part a8, the guide column a7 can push the swing rod a6. During the swing of the swing rod a6, the lower end is supported by the lower support a10, and the upper end acts on the sliding guide column a21. The sliding guide column a21 causes the sliding part a2 to move back and forth in the guide rail a1. During the movement, the follower a3 connected to the sliding part a2 moves along the movement. The actuating part a4 in the middle of the follower a3 can move along the hollow position of the tray 24, thereby pushing the bottommost photomask box. Finally, the photomask box is removed from the left end of the collecting rack 23, thus completing the cycle and completing the delivery of the photomask box.

[0028] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A photomask transfer device, characterized in that: It includes a shifting and stacking device for transferring and stacking photomask boxes, wherein a pushing device is provided at the bottom left end of the shifting and stacking device for collecting and pushing the photomask boxes; The shifting and stacking device includes a fixed plate for supporting and connecting the shifting and stacking device, support blocks at the four ends of the top of the fixed plate, a fixed seat at the front and rear positions of the left end of the top of the fixed plate, a first motor installed at the front end of the front fixed seat, a rotating rod between the two sets of fixed seats and connected to the output shaft of the first motor, two sets of left supports at the front and rear positions of the rotating rod, a clamping mechanism on the inner side of the left support, a pull rod hinged to the upper right end of the fixed seat, a connecting rod on the inner right end of the fixed seat, a linkage rod hinged to the other end of the pull rod, a right support hinged to the right end of the left support, and a support rod on the right end of the right support. The clamping mechanism is provided in the middle of the inner side of the right support, and the connecting rod is installed on the left end of the inner side of the right support.

2. The photomask transfer device according to claim 1, characterized in that: The fixing plate has openings at both the left and right ends, with the right opening being twice the size of the left opening.

3. The photomask transfer device according to claim 2, characterized in that: The fixing plate has round holes at both the front and rear ends.

4. The photomask transfer device according to claim 2, characterized in that: The clamping mechanism includes a fixed shell located inside the left support, a contact plate located at the other end of the fixed shell, a push-out cylinder located in the middle of the fixed shell, and a guide rod connected to the contact plate. The middle of the contact plate is connected to the push-out rod of the push-out cylinder, and the guide rod extends into the interior of the fixed shell.

5. The photomask transfer device according to claim 1, characterized in that: The pushing device includes a support member, a second motor located at the front end of the support member, a collection rack installed on the top of the support member, trays located at both ends of the bottom inside the collection rack, and a feeding mechanism located at the rear end of the top inside the collection rack.

6. The photomask transfer device according to claim 5, characterized in that: The bottom of the collection rack is equipped with lifting cylinders at the front and rear positions, and the top of the lifting cylinder push-out rod is connected to the support plate.

7. The photomask transfer device according to claim 6, characterized in that: The top center of the support member and the middle of the collection rack are open.

8. The photomask transfer device according to claim 7, characterized in that: The collection rack has openings at the lower left and right positions, and a blocking block is fixed at the right end of the opening.

9. The photomask transfer device according to claim 6, characterized in that: The dispensing mechanism includes a guide rail located at the rear end of the bottom of the collection rack, and a sliding groove is provided in the middle of the guide rail. The middle of the sliding groove is hollow. A sliding member is movably embedded in the sliding groove. A sliding guide post is located at the front end of the sliding member and passes through the hollow position of the sliding groove. A follower is located on the back of the sliding member. A toggle member is movably embedded in the middle of the follower. The lower end of the toggle member is cylindrical. A spring is sleeved in the cylindrical position. A swing rod is connected to the sliding guide post at the upper end. The upper end of the swing rod is U-shaped. A guide post is movably embedded in the lower end of the swing rod. A rotating member is located at the other end of the guide post. An upper support is connected to the other end of the rotating member and fixed to the support member. A lower support is connected to the support member and hinged to the lower end of the swing rod.

10. The photomask transfer device according to claim 9, characterized in that: The bottom of the actuating component is cylindrical, and a nut is screwed onto the bottom of the follower component at the cylindrical position.

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