Coating uniformity self-adaptive adjusting system and method based on multi-section air pressure dynamic regulation and control

Abstract

The invention discloses a coating uniformity self-adaptive adjusting system and method based on multi-section air pressure dynamic regulation and control, and belongs to the technical field of film preparation. The system comprises a coating chamber, a multi-section inflation system, a real-time monitoring system and a central control system. The multi-section inflation system comprises a plurality of independent gas injection sections, and each gas injection section is provided with a flow controller and a gas pressure sensor. The real-time monitoring system obtains film thickness distribution in real time through a film thickness sensor. And the central control system receives the monitoring data, and calculates and dynamically adjusts the gas flow and the gas pressure of each injection section by combining a preset uniformity target and applying a closed-loop control algorithm. According to the invention, the problems of non-uniform gas distribution, difficulty in compensating dynamic non-uniformity, dependence on artificial experience and the like during film coating of a complex substrate are effectively solved by precisely regulating and controlling gas parameters in a segmented manner and combining real-time feedback, and the uniformity of the film thickness and the process repeatability are remarkably improved.

Description

Technical Field

[0001] This invention belongs to the field of thin film preparation technology, and specifically relates to an adaptive adjustment system and method for coating uniformity based on multi-segment dynamic air pressure control. Background Technology

[0002] In vacuum coating processes, film uniformity is one of the core indicators for evaluating coating quality, directly affecting the optical, electrical, and mechanical properties of the thin film. In traditional coating processes, uneven gas distribution and pressure fluctuations often lead to inconsistent film thicknesses. Existing technologies typically employ a single, fixed-position gas inlet or a static, zoned gas supply method, which has the following drawbacks: 1. For complex substrate surfaces (such as irregularly shaped or large-sized substrates), uneven gas distribution can easily lead to differences in film thickness gradient; 2. During the coating process, dynamic non-uniformity caused by factors such as evaporation source consumption and temperature changes is difficult to compensate for in real time; 3. Relying on manual experience to adjust inflation parameters results in delayed response and poor repeatability.

[0003] Therefore, there is an urgent need for a solution that can automatically sense the film thickness distribution and dynamically regulate the multi-segment gas input. Summary of the Invention

[0004] To address the problems of uneven gas distribution, difficulty in real-time compensation of dynamic uniformity, and poor accuracy and repeatability caused by reliance on manual adjustment in the existing coating process, this invention provides a coating uniformity adaptive adjustment system and method based on multi-segment dynamic gas pressure control, aiming to achieve high-precision and high-uniformity film thickness preparation.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: An adaptive adjustment system for coating uniformity based on multi-segment dynamic air pressure control includes: Coating chamber; A multi-stage inflation system, comprising multiple independent gas injection stages disposed within the coating chamber, each gas injection stage being equipped with an independent gas flow controller and an independent gas pressure sensor; A real-time monitoring system, comprising at least one thin film thickness sensor for real-time monitoring of the thin film thickness distribution on the substrate surface during the coating process; and The central control system is electrically connected to the gas flow controller and pressure sensor of the multi-segment inflation system, as well as the film thickness sensor of the real-time monitoring system. The central control system is configured to: receive film thickness distribution data transmitted by the real-time monitoring system; calculate the gas flow rate and / or pressure adjustment amount of each gas injection segment based on the film thickness distribution data and a preset uniformity target; and issue control commands to the corresponding gas flow controllers according to the adjustment amounts to dynamically adjust the gas injection parameters of each segment.

[0006] Furthermore, the number of the plurality of independent gas injection sections is 4-8, and the position and angle of each gas injection section are optimized according to the shape and size distribution of the substrate to be coated, so as to ensure uniform gas distribution.

[0007] Furthermore, the thin film thickness sensor is a quartz crystal film thickness controller, which can monitor the thin film thickness distribution in real time with high precision.

[0008] Furthermore, the central control system is equipped with a closed-loop control algorithm to calculate the adjustment amount based on the film thickness distribution data. The closed-loop control algorithm is a PID (proportional-integral-derivative) control algorithm or a fuzzy control algorithm to achieve fast and stable dynamic adjustment.

[0009] Accordingly, the present invention also provides an adaptive adjustment method for coating uniformity based on multi-segment dynamic air pressure control, comprising the following steps: a) Place the substrate into the coating chamber and start the vacuum system to evacuate the coating chamber to a preset vacuum level; b) Activate the multi-stage inflation system and inject gas into the coating chamber through multiple independent gas injection stages according to the initial parameters. Each gas injection stage is equipped with an independent gas flow controller and a gas pressure sensor. c) Start the coating process and simultaneously activate the real-time monitoring system. Monitor the film thickness distribution on the substrate surface in real time using a film thickness sensor and transmit the monitoring data to the central control system. d) The central control system automatically calculates the gas flow rate and / or gas pressure regulation of each gas injection section based on the received film thickness distribution data and the preset uniformity target, and dynamically adjusts the gas flow controller of each gas injection section using a closed-loop control algorithm to eliminate film thickness non-uniformity. e) After the coating is completed, turn off the multi-stage inflation system and the real-time monitoring system, and remove the substrate.

[0010] Furthermore, in step b), the number of the plurality of independent gas injection sections is 4-8, and the position and angle of each gas injection section are optimized according to the shape and size distribution of the substrate to be coated.

[0011] Furthermore, in step c), the thin film thickness sensor is a quartz crystal thin film thickness controller.

[0012] Furthermore, in step d), the closed-loop control algorithm is a PID control algorithm or a fuzzy control algorithm.

[0013] Further, in step d), when the real-time monitoring system detects that the film thickness in the edge region of the substrate is too thin, the central control system increases the gas flow rate and / or gas pressure of the gas injection section corresponding to the edge region until the thickness uniformity reaches the target.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. This invention, through multiple independent gas injection segments and optimized design of their positions and angles, can achieve more precise gas distribution control for complex shapes and large-sized substrates, effectively improving the problem of film thickness gradient differences caused by traditional single or static zoned gas supply.

[0015] 2. The system integrates a real-time monitoring system with a central control system. It uses a thin film thickness sensor to provide real-time feedback on film thickness information and dynamically adjusts the gas parameters of each segment through a closed-loop control algorithm. This enables real-time perception and compensation of dynamic non-uniformity during the coating process (such as consumption of evaporation source and temperature changes), overcoming the lag of manual adjustment.

[0016] The entire adjustment process is automated, reducing reliance on human experience, improving process repeatability and stability, and thus enhancing product yield and consistency. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the coating chamber and multi-segment inflation system in one embodiment of the present invention.

[0018] Figure 2 This is a flowchart of a method according to an embodiment of the present invention.

[0019] (1-Coating chamber, 2-Substrate, 3-Gas injection section, 31-Gas flow controller, 32-Gas pressure sensor, 4-Thin film thickness sensor, 5-Central control system.) Detailed Implementation The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., used to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] like Figure 1 As shown, the present invention discloses an adaptive adjustment system for coating uniformity based on multi-segment air pressure dynamic control, which mainly includes a coating chamber 1, a multi-segment air inflation system, a real-time monitoring system and a central control system 5.

[0022] The multi-stage inflation system includes multiple independent gas injection sections 3 (e.g., 4-8) disposed within the coating chamber 1. Each gas injection section 3 is equipped with an independent gas flow controller 31 and an independent pressure sensor 32. The positions and angles of these gas injection sections 3 are optimized according to the shape and size of the substrate 2 to be coated, to ensure that the gas can be evenly distributed on the surface area of ​​the substrate 2.

[0023] The real-time monitoring system mainly consists of at least one thin film thickness sensor 4, such as a quartz crystal film thickness controller, an optical interferometer, or a quartz crystal microbalance, which is installed above the substrate 2 in the coating chamber 1 or at a suitable position to monitor the thin film thickness distribution on the surface of the substrate 2 in real time during the coating process.

[0024] The central control system 5 is the core of the entire system. It is electrically connected to the gas flow controllers 31 and pressure sensors 32 in the multi-stage inflation system, as well as the film thickness sensor 4 in the real-time monitoring system, via signal lines or wireless means. The central control system 5 integrates a data acquisition module, a data processing module, and a control output module. It can receive real-time film thickness distribution data transmitted by the film thickness sensor 4 and pressure data fed back by each pressure sensor 32. The data processing module has a preset uniformity target value and runs a closed-loop control algorithm (such as a PID control algorithm or a fuzzy control algorithm). Based on the deviation between the real-time film thickness data and the target value, it calculates the required gas flow rate and / or pressure adjustment for each gas injection stage 3. The control output module then issues control commands to the corresponding gas flow controller 31 based on these adjustment amounts, dynamically adjusting its output.

[0025] Compared with the prior art, the present invention 1. This invention, through multiple independent gas injection segments and optimized design of their positions and angles, can achieve more precise gas distribution control for complex shapes and large-sized substrates, effectively improving the problem of film thickness gradient differences caused by traditional single or static zoned gas supply.

[0026] 2. The system integrates a real-time monitoring system with a central control system. It uses a thin film thickness sensor to provide real-time feedback on film thickness information and dynamically adjusts the gas parameters of each segment through a closed-loop control algorithm. This enables real-time perception and compensation of dynamic non-uniformity during the coating process (such as consumption of evaporation source and temperature changes), overcoming the lag of manual adjustment.

[0027] The entire adjustment process is automated, reducing reliance on human experience, improving process repeatability and stability, and thus enhancing product yield and consistency.

[0028] like Figure 2 As shown, this invention also discloses an adaptive adjustment method for coating uniformity based on multi-segment dynamic air pressure control, the steps of which are as follows: a) Mounting and Vacuuming: Place the substrate 2 (e.g., an optical lens) to be coated onto the sample stage inside the coating chamber 1, ensuring accurate positioning of the substrate 2. Close the coating chamber 1 and start the vacuum system (not shown in the figure) to evacuate the inside of the coating chamber 1 until the preset vacuum level (e.g., 1×10^-3 Pa) is reached.

[0029] b) Initial inflation: The multi-stage inflation system is activated. Based on the initial information of the substrate 2 (such as size and material) and process requirements, the central control system 5 sends initial control parameters to each gas flow controller 31, injecting process gases (such as argon, oxygen, etc.) into the coating chamber 1 through multiple independent gas injection sections 3. Each pressure sensor 32 monitors the pressure near the corresponding injection section in real time and feeds it back to the central control system 5.

[0030] c) Initiation of Coating and Real-time Monitoring: Initiate the coating process (e.g., electron beam evaporation, magnetron sputtering, etc.) and simultaneously activate the real-time monitoring system. The thin film thickness sensor 4 begins operation, acquiring thin film thickness data from different areas on the surface of the substrate 2 in real time and continuously transmitting this data to the central control system 5.

[0031] d) Dynamic Adaptive Adjustment: The central control system 5 compares the received real-time film thickness distribution data with a preset uniformity target (e.g., target thickness 500 nm, uniformity requirement ±5 nm). If monitoring reveals that the film thickness at the edge of the substrate 2 is thinner than at the center (e.g., 485 nm at the edge, 500 nm at the center), the closed-loop control algorithm (e.g., PID) of the central control system 5 immediately calculates the amount by which the gas flow rate (or pressure) of the corresponding gas injection section 3 at the edge needs to be increased. Subsequently, instructions are sent to the gas flow controllers 31 in these edge regions to increase their gas flow rate, thereby adjusting the reactive gas concentration or sputtering / evaporation conditions in that region to promote an increase in the film deposition rate. This adjustment process is continuously and dynamically performed until the film thickness distribution across the entire surface of the substrate 2, as monitored in real time, meets the preset uniformity target.

[0032] e) Coating completion and substrate removal: When the coating process is completed (the preset time or film thickness is reached), the central control system 5 controls the shutdown of the multi-stage inflation system and the real-time monitoring system. After the air pressure in the coating chamber 1 returns to atmospheric pressure, the chamber door is opened and the substrate 2 with the coated film is taken out.

[0033] Those skilled in the art should understand that the present invention is not limited to the specific embodiments described above. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention shall still fall within the protection scope of the present invention. For example, the specific number of gas injection sections can be flexibly adjusted according to the substrate size; other advanced adaptive control strategies can also be adopted in the closed-loop control algorithm.

[0034] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

[0035] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one" does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0036] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A coating uniformity adaptive adjustment system based on multi-segment dynamic air pressure control, characterized in that, include: Coating chamber; A multi-stage inflation system, comprising multiple independent gas injection stages disposed within the coating chamber, each gas injection stage being equipped with an independent gas flow controller and an independent gas pressure sensor; A real-time monitoring system, comprising at least one thin film thickness sensor for real-time monitoring of the thin film thickness distribution on the substrate surface during the coating process; as well as The central control system is electrically connected to the gas flow controller and pressure sensor of the multi-segment inflation system, as well as the film thickness sensor of the real-time monitoring system. The central control system is configured to: receive film thickness distribution data transmitted by the real-time monitoring system; calculate the gas flow rate and / or pressure adjustment amount of each gas injection segment based on the film thickness distribution data and a preset uniformity target; and issue control commands to the corresponding gas flow controllers according to the adjustment amounts to dynamically adjust the gas injection parameters of each segment.

2. The system according to claim 1, characterized in that, The number of the multiple independent gas injection sections is 4-8, and the position and angle of each gas injection section are optimized according to the shape and size distribution of the substrate to be coated.

3. The system according to claim 1, characterized in that, The film thickness sensor is a quartz crystal film thickness controller.

4. The system according to claim 1, characterized in that, The central control system is equipped with a closed-loop control algorithm, which is used to calculate the adjustment amount based on the film thickness distribution data. The closed-loop control algorithm is either a PID control algorithm or a fuzzy control algorithm.

5. A method for adaptive adjustment of coating uniformity based on multi-segment dynamic air pressure control, characterized in that, Includes the following steps: a) Place the substrate into the coating chamber and start the vacuum system to evacuate the coating chamber to a preset vacuum level; b) Activate the multi-stage inflation system and inject gas into the coating chamber through multiple independent gas injection stages according to the initial parameters. Each gas injection stage is equipped with an independent gas flow controller and a gas pressure sensor. c) Start the coating process and simultaneously activate the real-time monitoring system. Monitor the film thickness distribution on the substrate surface in real time using a film thickness sensor and transmit the monitoring data to the central control system. d) The central control system automatically calculates the gas flow rate and / or gas pressure regulation of each gas injection section based on the received film thickness distribution data and the preset uniformity target, and dynamically adjusts the gas flow controller of each gas injection section using a closed-loop control algorithm to eliminate film thickness non-uniformity. e) After the coating is completed, turn off the multi-stage inflation system and the real-time monitoring system, and remove the substrate.

6. The method according to claim 5, characterized in that, In step b), the number of the plurality of independent gas injection sections is 4-8, and the position and angle of each gas injection section are optimized according to the shape and size distribution of the substrate to be coated.

7. The method according to claim 5, characterized in that, In step c), the film thickness sensor is a quartz crystal film thickness controller.

8. The method according to claim 5, characterized in that, In step d), the closed-loop control algorithm is a PID control algorithm or a fuzzy control algorithm.

9. The method according to claim 5, characterized in that, In step d), when the real-time monitoring system detects that the film thickness in the edge region of the substrate is too thin, the central control system increases the gas flow rate and / or gas pressure of the gas injection section corresponding to the edge region.

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