Optical interference microscope system

Abstract

The invention discloses an optical interference microscope system which is used for imaging a to-be-detected element. The optical interference microscopic system comprises a light source module, a light splitting element, an array type objective lens module, an array type eyepiece module, an imaging element and an array type optical channel module. The light source module provides an illumination beam. The array objective lens module comprises a plurality of objective lens groups. The array eyepiece module comprises a plurality of eyepiece groups. The array type optical channel module is connected between the array type eyepiece module and the imaging element. The array type optical channel module comprises a plurality of optical channel structures. Each optical channel structure comprises a continuous wall surface and an optical channel formed by the continuous wall surface. The central axis of each optical channel structure is coaxial with the optical axis of each eyepiece group.

Description

Technical Field

[0001] This invention relates to a microscopic device, and more particularly to an optical interference microscopy system. Background Technology

[0002] In the future market demand, with the widespread application of advanced packaged chips, high-performance components are gradually becoming the market mainstream. However, if the inspection area of ​​a single chip is large, it is impossible to use multiple devices for simultaneous inspection to accelerate the process. Therefore, providing fast and accurate 3D shape inspection is one of the main goals of development in this field.

[0003] Currently, nanometer-level precision detection can be achieved using white light interferometry, but the speed of traditional white light interferometry is limited. Multi-lens detection schemes also require multiple additional components for scanning, making them uneconomical for equipment deployment. Furthermore, multi-lens architectures must ensure consistent coplanarity of all components to meet the white light coherence length specification of less than or equal to 10 micrometers, thus enabling synchronous scanning. However, the lenses are limited by insufficient manufacturing precision of existing optical clamping mechanisms, resulting in coplanarity far exceeding 10 micrometers, thus preventing synchronous scanning and hindering array-based expansion of the field of view. In other words, current developments have encountered a bottleneck in detection speed, making online detection unsuitable. Moreover, multi-lens detection also suffers from interference between measurement lights, leading to poor detection quality. Summary of the Invention

[0004] This invention relates to an optical interference microscopy system that can prevent multiple measurement beams from interfering with each other during transmission, suppress stray light and reduce interference signal aberrations, thereby maintaining the ability to receive good optical interference signals.

[0005] This invention provides an optical interference microscopy system for imaging an element under test. The optical interference microscopy system includes a light source module, a beam splitter, an array of objective lenses, an array of eyepieces, an imaging element, and an array of optical channels. The light source module provides an illumination beam. The beam splitter is positioned in the transmission path of the illumination beam from the light source module and reflects the illumination beam while allowing a measurement beam to pass through. The array of objective lenses is positioned in the transmission path of the illumination beam from the beam splitter. The array of objective lenses allows the illumination beam to pass through to the element under test and allows the measurement beam from the element under test to pass through. The array of objective lenses includes multiple objective lens groups. The array of eyepieces is positioned in the transmission path of the measurement beam from the beam splitter and includes multiple eyepiece groups. The imaging element is positioned in the transmission path of the measurement beam and generates imaging information based on the measurement beam. The array of optical channels connects the array of eyepieces and the imaging element. The array of optical channels includes multiple optical channel structures. Each of the multiple optical channel structures includes a continuous wall and an optical channel formed by the continuous wall. The central axis structure of each optical channel is coaxial with the optical axis of each eyepiece group.

[0006] Based on the above, in the optical interference microscopy system of the present invention, the optical interference microscopy system includes a light source module, a beam splitter, an array objective lens module, an array eyepiece module, an imaging element, and an array optical channel module. The illumination beam provided by the light source module is transmitted to the device under test (DUT) through the beam splitter and the array objective lens module to form a measurement beam. The measurement beam generated by the DUT is transmitted to the imaging element for imaging through the array objective lens module, beam splitter, array eyepiece module, and array optical channel module. The array optical channel module connects the array eyepiece module and the imaging element. The array optical channel module includes multiple optical channel structures, each optical channel structure including a continuous wall and multiple optical channels formed by the continuous wall, and the central axis of each optical channel structure is coaxial with the optical axis of each eyepiece group. In this way, interference between multiple measurement beams during transmission can be avoided, stray light can be suppressed, and interference signal aberrations can be reduced, thereby ensuring that the imaging element can receive good optical interference signals.

[0007] To make the above features and advantages of the present invention more apparent and understandable, specific embodiments are described below in conjunction with the accompanying drawings. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of an optical interference microscopy system according to an embodiment of the present invention;

[0009] Figure 2 This is a schematic diagram of an optical interference microscopy system according to another embodiment of the present invention;

[0010] Figure 3This is a top view schematic diagram of an array eyepiece module according to an embodiment of the present invention;

[0011] Figure 4 This is a top view schematic diagram of an array-type objective lens module according to an embodiment of the present invention;

[0012] Figure 5 This is a top view schematic diagram of an array-type objective lens module according to another embodiment of the present invention;

[0013] Figure 6 For along Figure 5 A cross-sectional view of the array objective lens module along line A-A';

[0014] Figure 7 For part Figure 1 A cross-sectional schematic diagram of an optical interference microscopy system.

[0015] Explanation of reference numerals in the attached figures

[0016] 10: Component under test;

[0017] 100, 100A: Optical interference microscopy system;

[0018] 110: Light source module;

[0019] 112: Light-emitting element;

[0020] 114: Collimating lens group;

[0021] 120, 137: Spectroscopic elements;

[0022] 130, 130A: Array-type objective lens module;

[0023] 132: Objective lens group;

[0024] 134, 144: substrate;

[0025] 1342, 1442: Accommodating through holes;

[0026] 1344, 1444: Calibration through holes;

[0027] 136, 146: Picture frames;

[0028] 1362: Adjustment hole;

[0029] 138: Reflective element;

[0030] 1382: Light-transmitting component;

[0031] 1384: Reflected pattern;

[0032] 140: Array-type eyepiece module;

[0033] 142: Eyepiece assembly;

[0034] 150: Imaging element;

[0035] 160, 160A: Array-type optical channel modules;

[0036] 162: Optical channel structure;

[0037] 1622: Continuous wall;

[0038] 1624: Optical channel;

[0039] 164: Main body;

[0040] C: Spectroscopic surface;

[0041] E1, E2: Distance;

[0042] L1: lighting beam;

[0043] L11: First beam;

[0044] L12: Second beam;

[0045] L2: Measurement beam. Detailed Implementation

[0046] Figure 1 This is a schematic diagram of an optical interference microscopy system according to an embodiment of the present invention. Please refer to... Figure 1 This embodiment proposes an optical interference microscopy system 100 for imaging and measuring a device under test 10 (e.g., a chip package). The optical interference microscopy system 100 includes a light source module 110, a beam splitter 120, an array objective lens module 130, an array eyepiece module 140, an imaging element 150, and an array optical channel module 160. The optical interference microscopy system 100 is, for example, a white light interference microscope, a microscope that uses the principle of light interference to display the surface or internal structure of the device under test 10, and can be applied to fast and accurate 3D stereoscopic measurements.

[0047] The light source module 110 is used to provide an illumination beam L1. Specifically, in this embodiment, the light source module 110 includes a light-emitting element 112 and a collimating lens group 114. The light-emitting element 112 is a white light-emitting element used to provide a white illumination beam L1, such as an incandescent lamp, xenon lamp, high-pressure sodium lamp, fluorescent lamp, metal halide lamp, white light-emitting diode, or white organic light-emitting diode; the invention is not limited thereto. The collimating lens group 114 includes, for example, a combination of one or more optical lenses with refractive power to collimate the illumination beam L1. In other words, the light source module 110 is a collimated light source.

[0048] Beam splitter 120 is positioned along the path of the illumination beam L1 from the light source module 110, reflecting the illumination beam L1 and allowing the measurement beam L2 to pass through. Beam splitter 120 is, for example, a beam splitter. When the illumination beam L1 reaches beam splitter 120, beam splitter 120 reflects the illumination beam L1 through the array objective lens module 130 to the device under test 10, causing the device under test 10 to generate a measurement beam L2 containing structural information. Structural information refers to relevant information generated in the measurement beam L2 due to optical interference.

[0049] An array-type objective module 130 is positioned along the transmission path of the illumination beam L1 from the beam splitter 120, allowing the illumination beam L1 to pass through to the device under test (DUT) 10, and allowing the measurement beam L2 from the DUT 10 to pass through. In other words, the illumination beam L1 from the light source module 110 is transmitted to the beam splitter 120, reflected by the beam splitter 120, and transmitted through the array-type objective module 130 to the DUT 10, thereby generating a measurement beam L2 containing structural information. The measurement beam L2 is transmitted sequentially in the opposite direction along the transmission path of the illumination beam L1 through the array-type objective module 130 and the beam splitter 120. The array-type objective module 130 includes multiple objective lens groups 132, whose optical axes (not shown) are parallel to each other. For ease of display, Figure 1 The array objective module 130 is shown to include four objective lens groups 132, but the present invention does not limit the number or arrangement of the objective lens groups 132. A detailed description of the array objective module 130 will be provided in subsequent paragraphs.

[0050] An array eyepiece module 140 is positioned along the transmission path of the measurement beam L2 from the beam splitter 120, allowing the measurement beam L2 from the beam splitter 120 to pass through. In other words, the measurement beam L2 carrying structural information from the element under test 10 is sequentially transmitted through the array objective module 130, the beam splitter 120, and the array eyepiece module 140. The array eyepiece module 140 includes multiple eyepiece groups 142, the optical axes (not shown) of each eyepiece group 142 being parallel to each other, and the optical axis of each eyepiece group 142 being coaxial with the optical axis of each objective group 132. In this embodiment, the array objective module 130 and the array eyepiece module 140 are substantially the same, but the invention is not limited thereto.

[0051] Imaging element 150 is disposed on the transmission path of measurement beam L2 to generate imaging information based on measurement beam L2. Imaging information refers to the result of optical interference-related structural information in measurement beam L2 being presented via imaging element 150. Imaging element 150 is, for example, a photosensitive element such as a charge-coupled device (CCD) or complementary metal-oxide-semiconductor transistors (CMOS). In this embodiment, the optical interference microscopy system 100 includes only a single imaging element 150. In other words, the optical interference microscopy system 100 provided in this embodiment can utilize a single imaging element 150 to simultaneously receive measurement beams L2 from different eyepiece groups 142 in the array eyepiece module 140 to generate imaging information.

[0052] An array-type optical channel module 160 is connected between the array-type eyepiece module 140 and the imaging element 150 to transmit the measurement beam L2 from the array-type eyepiece module 140 to the imaging element 150. In this embodiment, the optically effective area of ​​the imaging element 150 is greater than or equal to the optically effective area of ​​the array-type optical channel module 160, where the optically effective area refers to the area excluding the frame or assembly structure at the edges. In other words, the overall cross-sectional area of ​​the array-type optical channel module 160 can be designed to be larger than the overall volume of the imaging element 150 as needed, and the present invention is not limited thereto. Specifically, the array-type eyepiece module 140 and the imaging element 150 are respectively directly mounted at opposite ends of the array-type optical channel module 160. In other words, the structural length of the array-type optical channel module 160 is the focal length of the array-type eyepiece module 140. Therefore, good optical performance can be achieved through simple installation.

[0053] The array-type optical channel module 160 includes multiple optical channel structures 162, each optical channel structure 162 including a continuous wall 1622 and multiple optical channels 1624 formed by the continuous wall 1622. In this embodiment, the multiple optical channel structures 162 are, for example, hollow tubular structures, and the continuous wall 1622 is, for example, an annular wall. The optical channel structures 162 are spaced apart, and their optics do not interfere with each other. The central axis (not shown) of each optical channel structure 162 is coaxial with the optical axis of each eyepiece group 142 of the array-type eyepiece module 140. In other words, the number of multiple objective groups 132 in the array-type objective module 130, the number of multiple eyepiece groups 142 in the array-type eyepiece module 140, and the number of multiple optical channel structures 162 in the array-type optical channel module 160 are all the same. In this embodiment, the continuous wall surface 1622 of each optical channel structure 162 includes a light-absorbing layer (not shown), such as a black matte material, to eliminate stray light. In a preferred embodiment, the aperture size of each optical channel 1624 of the array optical channel module 160 is smaller than or equal to the aperture size of each eyepiece group 142 of the array eyepiece module 140. Furthermore, the aperture size of the optical channel 1624 remains consistent from one end adjacent to the array eyepiece module 140 to the other end adjacent to the imaging element 150. Therefore, measurement beams L2 from different eyepiece groups 142 in the array eyepiece module 140 will be transmitted to the imaging element 150 by the corresponding optical channel structure 162. In this way, interference between multiple measurement beams L2 during transmission can be avoided, stray light can be suppressed and interference signal aberrations can be reduced, thereby ensuring that the imaging element 150 can receive good optical interference signals. It is worth mentioning that in this embodiment, the array optical channel module 160 does not have an optical transmission element, thus saving costs.

[0054] Figure 2 This is a schematic diagram of an optical interference microscopy system according to another embodiment of the present invention. Please refer to... Figure 2 The optical interference microscope system 100A shown in this embodiment is similar to... Figure 1 The optical interference microscope system 100 shown is different from the previous one. In this embodiment, the array-type optical channel module 160A also includes a main body 164, and multiple optical channel structures 162 are disposed within the main body 164. Specifically, in this embodiment, the multiple optical channel structures 162 are multiple cavity structures of the main body 164; in other words, multiple optical channels 1624 of the multiple optical channel structures 162 penetrate the main body 164. Similar to... Figure 1In this embodiment, the continuous wall surface 1622 of each optical channel structure 162 includes a light-absorbing layer (not shown), such as a black matte material, to eliminate stray light. In a preferred embodiment, the aperture size of each optical channel 1624 of the array optical channel module 160A is smaller than or equal to the aperture size of each eyepiece group 142 of the array eyepiece module 140. Furthermore, the aperture size of the optical channel 1624 remains consistent from one end adjacent to the array eyepiece module 140 to the other end adjacent to the imaging element 150. Therefore, measurement beams L2 from different eyepiece groups 142 in the array eyepiece module 140 will be transmitted to the imaging element 150 by the corresponding optical channel structure 162. In this way, interference between multiple measurement beams L2 during transmission can be avoided, stray light can be suppressed and interference signal aberrations can be reduced, thereby ensuring that the imaging element 150 can receive good optical interference signals. It is worth mentioning that in this embodiment, the array optical channel module 160A does not have an optical transmission element, thus saving costs.

[0055] Figure 3 This is a top view schematic diagram of an array eyepiece module according to an embodiment of the present invention. Please refer to... Figure 3 The array eyepiece module 140 shown in this embodiment can be applied to at least... Figure 1 Optical interference microscopy system 100 or Figure 2 The present invention is not limited to the optical interference microscopy system 100A. In this embodiment, the array eyepiece module 140 further includes a substrate 144 and a plurality of lens frames 146. The plurality of lens frames 146 are respectively disposed in a plurality of accommodating through holes 1442 of the substrate 144, and the plurality of eyepiece groups 142 are respectively disposed within the plurality of lens frames 146. In this embodiment, the substrate 144 of the array eyepiece module 140 further includes a calibration through hole 1444 located at the center of symmetry of the plurality of accommodating through holes 1442, for allowing a calibration beam to pass through. The calibration beam, such as a laser beam, is transmitted from the imaging element 150 toward the array eyepiece module 140 and can be focused by reflection imaging of the reflective elements in the array objective lens module 130.

[0056] Figure 4 This is a top view schematic diagram of an array-type objective lens module according to an embodiment of the present invention. The array-type objective lens module 130 shown in this embodiment can be applied to at least... Figure 1 Optical interference microscopy system 100 or Figure 2In the optical interference microscopy system 100A, the present invention is not limited thereto. In this embodiment, the array eyepiece module 130 further includes a substrate 134 and a plurality of lens frames 136. The plurality of lens frames 136 are respectively disposed in a plurality of accommodating through holes 1342 of the substrate 134, and a plurality of objective lens groups 132 are respectively disposed within the plurality of lens frames 136. The structure of the array objective module 130 in this embodiment is substantially the same as that of the array eyepiece module 140, but the present invention is not limited thereto. In this embodiment, the substrate 134 of the array eyepiece module 130 further includes a calibration through hole 1344, located at the center of symmetry of the plurality of accommodating through holes 1342, for allowing a calibration beam to pass through. The calibration beam, such as a laser beam, is transmitted from the imaging element 150 toward the array objective module 130, and focus calibration is performed by reflection imaging of the reflective elements in the array objective module 130.

[0057] Figure 5 This is a top view schematic diagram of an array-type objective lens module according to another embodiment of the present invention. Figure 6 For along Figure 5 A cross-sectional view of the array objective module along line A-A'. Please refer to the diagram. Figure 5 and Figure 6 The array objective module 130A shown in this embodiment can be applied to at least... Figure 1 Optical interference microscopy system 100 or Figure 2 The present invention is not limited to the optical interference microscopy system 100A shown herein. The array objective module 130A shown in this embodiment is similar to... Figure 4 The array objective module 130 is shown. The difference lies in that, in this embodiment, the plurality of objective lens groups 132 of the array objective module 130A are also movable relative to the substrate 134 in the extending direction of the optical axis of each objective lens group 132 via a plurality of lens frames 136. Specifically, in this embodiment, each receiving through hole 1342 includes an internal thread structure B1, and each lens frame 136 includes an external thread structure B2, with the external thread structure B2 adapted to the internal thread structure B1. In other words, each lens frame 136 is adapted to move its position in the extending direction of the optical axis of each objective lens group 132 via the threaded structure. In a preferred embodiment, each lens frame 136 includes at least one adjustment hole 1362, located around the plurality of objective lens groups 132, for adjusting the relative position of the plurality of lens frames 136 on the substrate 134. In this way, the array objective module 130A of this embodiment can adjust the position of each lens frame 136 on the substrate 134 by adjusting the rotation angle of the lens frame 136, thereby adjusting the focal plane position of multiple objective lens groups 132 and effectively improving the coplanarity of multiple objective lens groups 132.

[0058] Figure 7 For part Figure 1 A cross-sectional schematic diagram of an optical interference microscopy system. Please refer to... Figure 7 In detail, in this embodiment, the array objective module 130 further includes a beam splitter 137 and a reflector 138. The beam splitter 137 is disposed on the transmission path of the illumination beam L1 from the plurality of objective lens groups 132. The illumination beam L1 includes a first beam L11 and a second beam L12. The beam splitter 137 is used to reflect the first beam L11 and allow the second beam L12 to pass through to the device under test 10. The reflector 138 is disposed between the beam splitter 137 and the substrate 134 to reflect the first beam L11 from the beam splitter 137 back to the beam splitter 137, and a portion of the first beam L11 and a portion of the second beam L2 will form a measurement beam L2. In detail, in this embodiment, the reflector 138 includes a light-transmitting element 1382 and a plurality of reflective patterns 1384 formed on the light-transmitting element 1382, the positions of which correspond to the positions of the plurality of objective lens groups 132. Specifically, multiple reflective patterns 1384 are located on the optical axes of multiple objective lens groups 132. For example, the multiple reflective patterns 1384 can be made of reflective material and formed at specific locations on the light-transmitting element 1382 using photolithography. Therefore, compared to conventional non-array lens modules, this embodiment does not require additional reflectors.

[0059] On the other hand, the beam-splitting element 137 includes a beam-splitting surface C, and the distance E1 from the beam-splitting surface C to the reflecting element 138 is equal to the distance E2 from the beam-splitting surface C to the element under test 10. This beam-splitting surface C can be formed by coating. In other words, the illumination beam L1 is split by the beam-splitting effect of the beam-splitting element 137 to form a first beam L11 and a second beam L12. The first beam L11 is reflected by the beam-splitting surface C of the beam-splitting element 137 and reaches the reflection pattern 1384 of the reflecting element 138, where it is reflected again to the beam-splitting surface C of the beam-splitting element 137. At this time, a portion of the first beam L11 will be reflected by the beam-splitting surface C. The second beam L12 travels through the same optical path length and is reflected back to the beam-splitting surface C of the beam-splitting element 137 by the element under test 10. The second beam L12 is then partially transmitted, and it interferes with the portion of the first beam L11 reflected by the beam-splitting surface C to generate the measurement beam L2.

[0060] In summary, the optical interference microscopy system of the present invention includes a light source module, a beam splitter, an array objective lens module, an array eyepiece module, an imaging element, and an array optical channel module. The illumination beam provided by the light source module is transmitted to the device under test (DUT) via the beam splitter and the array objective lens module to form a measurement beam. The measurement beam generated by the DUT is transmitted to the imaging element for imaging via the array objective lens module, beam splitter, array eyepiece module, and array optical channel module. The array optical channel module connects the array eyepiece module and the imaging element. The array optical channel module includes multiple optical channel structures, and the central axis of each optical channel structure is coaxial with the optical axis of each eyepiece group. Furthermore, each optical channel structure includes multiple optical channels formed by continuous wall surfaces, and there is a spacing between the optical channel structures. This avoids interference between multiple measurement beams during transmission, suppresses stray light, reduces interference signal aberrations, and thus ensures that the imaging element can receive good optical interference signals.

[0061] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An optical interferometric microscopy system for imaging an element under test, characterized in that, The optical interference microscopy system includes: The light source module is used to provide the illumination beam; A beam splitter is positioned in the transmission path of the illumination beam from the light source module and is used to reflect the illumination beam and allow the measurement beam to pass through. An array-type objective module is configured on the transmission path of the illumination beam from the beam splitter. The array-type objective module allows the illumination beam to pass through to the device under test and allows the measurement beam from the device under test to pass through. The array-type objective module includes multiple objective lens groups. An array-type eyepiece module is configured on the transmission path of the measurement beam from the beam splitter and includes multiple eyepiece groups; An imaging element, disposed on the transmission path of the measurement beam, is used to generate imaging information based on the measurement beam; and An array-type optical channel module is connected between the array-type eyepiece module and the imaging element. The array-type optical channel module includes multiple optical channel structures. Each of the multiple optical channel structures includes a continuous wall and an optical channel formed by the continuous wall. The central axis of each of the multiple optical channel structures is coaxial with the optical axis of each of the multiple eyepiece groups.

2. The optical interference microscopy system according to claim 1, characterized in that, The length of the array eyepiece module is equal to the focal length of the array eyepiece module.

3. The optical interference microscopy system according to claim 1, characterized in that, The aperture size of each of the plurality of optical channels is less than or equal to the aperture size of each of the plurality of eyepiece groups.

4. The optical interference microscopy system according to claim 1, characterized in that, The aperture size of the multiple optical channels remains consistent from the array eyepiece module to the imaging element.

5. The optical interference microscopy system according to claim 1, characterized in that, The continuous wall surface of each of the plurality of optical channel structures includes a light-absorbing layer.

6. The optical interference microscopy system according to claim 1, characterized in that, The array-type optical channel module also includes a main body, within which the plurality of optical channel structures are configured.

7. The optical interference microscopy system according to claim 6, characterized in that, The multiple optical channel structures are multiple cavity structures that penetrate the main body.

8. The optical interference microscopy system according to claim 1, characterized in that, The optical interference microscopy system comprises only a single imaging element.

9. The optical interference microscopy system according to claim 1, characterized in that, The effective optical region of the imaging element is greater than or equal to the effective optical region of the array-type optical channel module.

10. The optical interference microscopy system according to claim 1, characterized in that, The number of the plurality of objective lens groups, the number of the plurality of eyepiece lens groups, and the number of the plurality of optical channel structures are all the same.

11. The optical interference microscopy system according to claim 1, characterized in that, The array-type objective module is essentially the same as the array-type eyepiece module.

12. The optical interference microscopy system according to claim 1, wherein the optical axes of each of the plurality of objective lens groups are parallel to each other.

13. The optical interference microscopy system according to claim 12, wherein the optical axis of each of the plurality of eyepiece groups is coaxial with the optical axis of each of the plurality of objective lens groups.

14. The optical interference microscopy system according to claim 1, characterized in that, The array-type objective lens module further includes a substrate and multiple lens frames, which are respectively disposed in multiple accommodating through holes in the substrate. Multiple objective lens groups are respectively disposed in the multiple lens frames, and the multiple objective lens groups are used to move relative to the substrate through the multiple lens frames in the extension direction of the optical axis of each of the multiple objective lens groups.

15. The optical interference microscopy system according to claim 14, characterized in that, The array objective lens module has multiple accommodating through holes on its substrate, each of the multiple lens frames of the array objective lens module having an external thread structure. The external thread structure is adapted to the internal thread structure, and the relative position of each of the multiple lens frames to the substrate changes according to the relative rotation angle between the corresponding external thread structure and the internal thread structure.

16. The optical interference microscopy system according to claim 15, characterized in that, Each of the plurality of lens frames in the array objective lens module further includes at least one adjustment hole for adjusting the relative position of the plurality of lens frames of the array objective lens module with respect to the substrate.

17. The optical interference microscopy system according to claim 15, characterized in that, The substrate of the array objective module further includes a calibration via, which is located at the symmetry center of the plurality of accommodating vias and is used to allow a calibration beam to pass through.

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