Irradiation sample table

Abstract

The invention relates to the technical field of high-pressure precise physical experiments, in particular to an irradiation sample table. A to-be-tested sample is placed on the sample table, and the second gland and the first gland are detachably connected to the sample table in sequence, so that the holes in the first gland and the second gland correspond to the to-be-tested sample. The size of the hole is smaller than the diameter of the to-be-detected sample, so that the radiation area is smaller than the diameter of the to-be-detected sample; moreover, the second gland is a ceramic gland and has good insulation performance, so that the situation that plasma directly bombards a sample table to generate an edge effect during irradiation, and adverse effects on judgment and separation of real particle flow density distribution borne by the surface of the to-be-detected sample are generated can be avoided. When samples of different sizes need to be replaced, only the first gland and the second gland which are provided with the open holes matched with the samples in size need to be replaced, operation is easy and fast, cost is low, and the experiment continuity and efficiency cannot be affected.

Description

Technical Field

[0001] This invention relates to the field of high-pressure precision physics experimental technology, specifically to an irradiation sample stage. Background Technology

[0002] In the future operation of fusion reactors, divertor components need to withstand the combined effects of high-density plasma and high heat flux over long periods. The performance changes of their materials and components after plasma irradiation are a key research topic for ensuring the safe and stable operation of fusion reactors. To conduct related research intuitively and efficiently, linear plasma devices are commonly used in the industry for material irradiation experiments. The irradiation target plate, as the core component in this device that directly bears the interaction between the sample and the plasma, has its performance design directly affecting the accuracy of experimental results and the safety of equipment operation. However, existing irradiation target plates in linear plasma devices have significant shortcomings.

[0003] Chinese patent application CN111257351A discloses an irradiation water-cooled sample stage, which fixes the irradiated sample by fixing a sample placement stage on the top of the main body of the sample stage, a sample support base on the bottom of the main body of the sample stage, and a sample protective sleeve on the outside of the main body of the sample stage. However, this method has serious drawbacks. On the one hand, the sample placement stage and the main body of the sample stage are integrated. When irradiating samples of different sizes, the sample placement stage and the main body of the sample stage must be replaced with samples of different sizes. This method is not only costly to manufacture, but also involves a complex and inefficient replacement process in a vacuum chamber, which seriously affects the continuity and efficiency of the experiment. On the other hand, the irradiation area defined by the sample protective sleeve is larger than the area of ​​the sample placement stage. When collecting and measuring plasma beam density, because the actual area of ​​the irradiated sample is smaller than the irradiation area of ​​the plasma beam in the device, some plasma directly bombards the main body of the sample stage. This "edge effect" makes it difficult to accurately determine and separate the true particle flow density distribution on the sample surface using traditional methods, introducing uncertainty into the accurate evaluation of material properties. Summary of the Invention

[0004] The purpose of this application is to provide an irradiation sample stage that combines the convenience of rapid sample changing with the accuracy of real-time diagnosis.

[0005] To achieve the above objectives, this application employs an irradiation sample stage, comprising: a capping assembly, a sample stage, a base, an insulating sleeve, and a cooling assembly. The capping assembly includes: a first cap and a second cap that are detachably connected to the sample stage from top to bottom. The first cap is a molybdenum cap, and the second cap is a ceramic cap. Both the first cap and the second cap have openings of the same diameter that are coaxially arranged at their centers, and the diameter of the openings is smaller than the diameter of the sample to be tested. The inner peripheral walls of the first cap and the second cap, together with the top surface of the sample stage, define an irradiation area. The insulating sleeve is fitted onto the outer peripheral wall of the sample stage. The sample stage and the cooling assembly are respectively fixed on the upper and lower sides of the base. The sample stage has a sample placement area at its center, and the sample placement area is set in correspondence with each of the openings. The base has a first channel that penetrates its upper and lower surfaces, and the cooling assembly has a second channel that penetrates its upper and lower surfaces. The first channel and the second channel are connected.

[0006] As a preferred technical solution, the base includes: a base component and a support, the first channel is formed on the base component, the sample stage and the cooling component are respectively fixed on the upper and lower sides of the base, the insulating sleeve extends downward along its axial direction to the outer periphery of the base component, the support is fixed on the outer periphery of the insulating sleeve, the first pressure cap and the second pressure cap are respectively screwed to the support, and both the first pressure cap and the second pressure cap are radially protruding from the outer periphery of the support.

[0007] As a preferred technical solution, the cooling assembly includes: a pipe body, an inlet pipe, and an outlet pipe. The pipe body is connected to the lower side of the foundation. A second channel is formed on the pipe body. The upper ends of the inlet pipe and the outlet pipe are respectively inserted into the second channel. The lower ends of the inlet pipe and the outlet pipe extend outward from the pipe body. The upper end of the inlet pipe is closer to the foundation than the upper end of the outlet pipe, and there is a certain distance between the upper end of the inlet pipe and the bottom surface of the foundation.

[0008] As a preferred technical solution, the irradiation sample stage further includes a lead screw, a ceramic flange is fitted on the tube body, and connection holes are correspondingly opened on the first pressure cap, the second pressure cap, the bracket, and the ceramic flange. The lead screw passes through the connection holes on the ceramic flange, the bracket, the second pressure cap, and the first pressure cap in sequence and is screwed to the first pressure cap.

[0009] As a preferred technical solution, the tube body includes: a first sleeve, a second sleeve, and a ceramic electrode. The two ends of the ceramic electrode are respectively connected to the first sleeve and the second sleeve. The first sleeve is connected to the foundation. The inner peripheral walls of the first sleeve, the second sleeve, and the ceramic electrode together define the second channel.

[0010] As a preferred technical solution, the water inlet pipe includes: a first metal section, a second metal section, and a ceramic section, with both ends of the ceramic section connected to the first metal section and the second metal section, respectively, and the first metal section being close to the foundation.

[0011] As a preferred technical solution, the opening diameters of the first pressure cap and the second pressure cap are d1, and the diameter of the sample to be tested is d2, where d1 = d2 - Δd, and Δd = 1 mm.

[0012] As a preferred technical solution, the irradiation sample stage further includes a first connector, which is fixedly disposed on the outer peripheral wall of the foundation. A third channel is provided on the first connector, and the third channel passes through the left and right sides of the first connector. A fourth channel is provided on the sample stage, and the fourth channel penetrates the upper and lower surfaces of the sample stage. A fifth channel is provided on the foundation, and the fifth channel penetrates the upper surface and the outer peripheral wall of the foundation. The third, fifth, and fourth channels are connected in sequence and together define a detection channel. The detection channel is used for inserting a thermocouple and contacting it with the sample to be tested in order to measure the temperature of the sample.

[0013] As a preferred technical solution, the irradiation sample stage further includes a second connector, which is disposed on the outer peripheral wall of the foundation and is spaced apart from the first connector along the circumferential direction of the foundation. The second connector is provided with a threaded hole for screwing with a copper wire to guide a DC bias power supply to the foundation for measuring the irradiated particle flow passing through the surface of the sample to be tested.

[0014] The irradiation sample stage of this application has the following technical advantages compared with the prior art: the sample to be tested is placed in the placement area at the center of the sample stage, and the second and first pressure caps are detachably connected to the sample stage in sequence, so that the openings on the first and second pressure caps correspond to the sample to be tested. Since the opening size is smaller than the diameter of the sample to be tested, the radiation area is smaller than the diameter of the sample to be tested; furthermore, the second pressure cap is a ceramic pressure cap, which has good insulation properties, thereby avoiding the "edge effect" caused by direct plasma bombardment on the sample stage during irradiation, which would adversely affect the judgment and separation of the true particle flux density distribution on the surface of the sample to be tested. When it is necessary to change samples of different sizes, only the first and second pressure caps with openings matching the sample size need to be replaced, without replacing the sample stage, base, or other structures. The operation is simple, quick, and inexpensive, and does not affect the continuity and efficiency of the experiment. Attached Figure Description

[0015] The present application will be further described in detail below with reference to the accompanying drawings and preferred embodiments. However, those skilled in the art will appreciate that these drawings are drawn only for the purpose of explaining the preferred embodiments and therefore should not be construed as limiting the scope of the present application. Furthermore, unless specifically indicated, the drawings are intended only to conceptually represent the composition or structure of the described objects and may contain exaggerated representations, and the drawings are not necessarily drawn to scale.

[0016] Figure 1 This is a perspective view of the irradiation sample stage of the present invention; Figure 2 This is a cross-sectional view of the irradiation sample stage of the present invention; Figure 3 For the present invention Figure 2 Enlarged view of point A in the middle; Figure 4 This is a cross-sectional view of the bracket of the present invention; Figure 5 This is a cross-sectional view of the connector of the present invention; The components include: 1. Cap assembly; 11. First cap; 12. Second cap; 13. Opening; 2. Sample stage; 21. Fourth channel; 3. Base; 31. Base component; 311. First channel; 312. Fifth channel; 32. Support; 4. Insulating sleeve; 5. Cooling assembly; 51. Tube body; 511. Second channel; 512. Ceramic flange; 513. Ceramic electrode; 514. First sleeve; 515. Second sleeve; 52. Water inlet pipe; 521. First metal segment; 522. Second metal segment; 523. Ceramic segment; 53. Water outlet pipe; 6. Lead screw; 7. Connecting hole; 8. First connector; 81. Third channel; 9. Second connector; 91. Threaded hole; 10. Third connector. Detailed Implementation

[0017] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0018] In the description of this application, it should be understood that the terms "front," "rear," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, in the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0019] Please see Figure 1-2 This application provides an irradiation sample stage 2, comprising: a cap assembly 1, a sample stage 2, a base 3, an insulating sleeve 4, and a cooling assembly 5. The cap assembly 1 includes: a first cap 11 and a second cap 12 detachably connected to the sample stage 2 from top to bottom. The first cap 11 is a molybdenum cap, and the second cap 12 is a ceramic cap. Both the first cap 11 and the second cap 12 have openings 13 at their centers. The openings 13 of the first cap 11 and the second cap 12 have the same diameter and are coaxially arranged. The diameter of each opening 13 is smaller than the diameter of the sample to be tested. The inner peripheral walls of the first cap 11 and the second cap 12, along with the top surface of the sample stage 2, together define an irradiation area. The insulating sleeve 4 is fitted onto the outer peripheral wall of the sample stage 2. The sample stage 2 and the cooling assembly 5 are respectively fixed on the upper and lower sides of the base 3. A sample placement area is provided at the center of the sample stage 2, and the sample placement area is correspondingly arranged with the opening 13. A first channel 311 is provided on the base 3, penetrating its upper and lower surfaces. A second channel 511 is provided on the cooling assembly 5, penetrating its upper and lower surfaces. The first channel 311 and the second channel 511 are connected. The first pressure cap 11 and the second pressure cap 12 are both radially protruding from the outer periphery of the insulating sleeve 4, and the first pressure cap 11, the second pressure cap 12, the sample stage 2, the insulating sleeve 4, the base 3, and the cooling assembly 5 are coaxially arranged.

[0020] In this embodiment, before the experiment begins, the sample to be tested is placed in the sample placement area at the center of the sample stage. Then, the second cover 12 and the first cover 11 are sequentially placed on the sample to be tested, ensuring that the opening 13 of the first cover 11, the opening 13 of the second cover 12, and the sample to be tested are coaxially arranged. Finally, bolts are used to fix the second cover 12, the first cover 11, and the sample stage, and the experiment can begin. In this way, the sample to be tested is located within the irradiation area defined by the inner peripheral wall of the first cover 11, the inner peripheral wall of the second cover 12, and the top surface of the sample stage 2. On the one hand, because the size of the opening 13 is slightly smaller than the sample size, the area of ​​the irradiated region is smaller than the sample surface area. This effectively prevents the plasma from directly bombarding the sample stage 2 and causing an "edge effect," which would affect the subsequent determination and separation of the true particle flow density distribution on the sample surface and thus the accurate evaluation of material properties. On the other hand, to prevent the plasma from penetrating the molybdenum cap or bombarding the sample stage 2 through edge gaps when the plasma energy is very high or when there are defects or insufficient thickness in the molybdenum cap, this application specifically sets the second cap 12 to be a ceramic cap made of aluminum nitride ceramic material. The ceramic cap has good heat resistance and insulation, which can effectively prevent the plasma from bombarding the sample stage 2. Through the above design, the accuracy of the determination and separation of the true particle flow density distribution on the sample surface can be guaranteed, further ensuring the accurate evaluation of material properties. In addition, only the cap assembly 1 with the corresponding size of the opening 13 needs to be replaced according to the sample size to perform the test. There is no need to replace the sample stage 2 and the base 3, etc., which is low-cost, convenient to replace, and conducive to the continuity of experiments.

[0021] In some embodiments, the base 3 includes a base component 31 and a support 32. The first channel 311 is formed on the base component 31. The sample stage 2 and the cooling assembly 5 are respectively fixed on the upper and lower sides of the base component 31. The insulating sleeve 4 extends axially downward to the outer periphery of the base component 31. The support 32 is fixed on the outer periphery of the insulating sleeve 4. The first pressure cap 11 and the second pressure cap 12 are respectively screwed to the support 32, and both the first pressure cap 11 and the second pressure cap 12 are radially protruding from the outer periphery of the support 32. By sequentially sleeved with the insulating sleeve 4 and the support 32 on the outer periphery of the sample stage 2, an effective connection point is provided for fixing the pressure cap assembly 1 while insulating the sample stage 2. Furthermore, the screw connection between the pressure cap assembly 1 and the support 32 makes the connection and disassembly of the pressure cap assembly 1 more convenient and ensures a good connection effect, preventing detachment from adversely affecting the experimental results.

[0022] Please see Figure 1-2During the experiment, the heat from the plasma is transferred to core components such as the reaction chamber and electrodes through radiation and conduction. If heat is not dissipated in time, the high temperature can cause the reaction chamber walls and electrodes to melt, deform, or age, directly damaging the experimental apparatus and even causing safety accidents such as short circuits and fires. Furthermore, the thermal expansion of the equipment components due to high temperatures can change key experimental parameters such as electrode spacing and reaction chamber volume, leading to unstable experimental conditions and ultimately affecting the repeatability of the irradiation effect and the accuracy of the data. Therefore, in some embodiments, the cooling assembly 5 includes: a pipe body 51, an inlet pipe 52, and an outlet pipe 53. The pipe body 51 is connected to the lower side of the base component 31. A second channel 511 is opened on the pipe body 51. The upper ends of the inlet pipe 52 and the outlet pipe 53 are respectively inserted into the second channel 511. The lower ends of the inlet pipe 52 and the outlet pipe 53 extend outward from the pipe body 51. The upper end of the inlet pipe 52 is closer to the base component 31 than the upper end of the outlet pipe 53. There is a certain distance between the upper end of the inlet pipe 52 and the bottom surface of the base component 31.

[0023] In this embodiment, the second channel 511 acts as a "heat collector," directly contacting the high-temperature component. The cooling medium inside the channel can quickly absorb the heat transferred by the component, reducing its temperature. The inlet pipe 52 and outlet pipe 53 act as "heat transport channels," forming a circulating flow. Specifically, the inlet pipe 52 delivers a low-temperature cooling medium to the second channel 511, ensuring continuous heat absorption capacity; the high-temperature medium, after absorbing heat, is discharged through the outlet pipe 53, preventing accumulation within the channel and thus reducing heat dissipation efficiency; the discharged hot water, after being cooled by an external cooling system (such as a cooling tower), can be recycled again through the inlet pipe 52, achieving energy saving and continuous heat dissipation.

[0024] Please see Figure 4 In some embodiments, the irradiation sample stage 2 further includes a lead screw 6, and a ceramic flange 512 is fitted onto the tube body 51. The first pressure cap 11, the second pressure cap 12, the bracket 32, and the ceramic flange 512 each have corresponding connecting holes 7. The lead screw 6 passes sequentially through the connecting holes 7 on the ceramic flange 512, the bracket 32, the second pressure cap 12, and the first pressure cap 11, and is screwed to the first pressure cap 11. This embodiment achieves overall device installation reliability by providing a ceramic flange 512 on the tube body 51 and corresponding connecting holes 7 on the pressure cap assembly 1, the bracket 32, and the ceramic flange 512, allowing the lead screw 6 to sequentially pass through these connecting holes 7 to connect the pressure cap assembly 1, the bracket 32, and the ceramic flange 512. Furthermore, this embodiment uses a ceramic flange 512 with insulating properties, which effectively prevents plasma from penetrating the molybdenum pressure cap and bombarding the tube body 51, thus avoiding damage to the tube body 51.

[0025] Please see Figure 2 Plasma discharge requires a high voltage to be applied between the electrodes. To ensure stable discharge, avoid electrode interference, and extend equipment life, in some embodiments, the tube 51 includes a first sleeve 514, a second sleeve 515, and a ceramic electrode 513. The two ends of the ceramic electrode 513 are connected to the first sleeve 514 and the second sleeve 515, respectively. The first sleeve 514 is connected to the base component 31. The inner peripheral walls of the first sleeve 514, the second sleeve 515, and the ceramic electrode 513 together define the second channel 511. This embodiment preferably uses a ceramic electrode 513, which, while meeting the requirements for plasma generation and confinement, avoids interference or damage to the experiment caused by the electrode itself. On one hand, the ceramic electrode 513 can isolate the electrode from other metal components such as the reaction chamber, preventing short circuits in the entire experimental system due to plasma conductivity, thus protecting the power supply and equipment safety. Simultaneously, it ensures that the high voltage or high-frequency electrical energy applied to the electrode is concentrated for ionizing gas to generate plasma, rather than leaking to other components, improving energy utilization efficiency. On the one hand, ceramics possess excellent high-temperature resistance, preventing violent reactions with active particles in the plasma at high temperatures and reducing electrode material wear. On the other hand, ceramic materials themselves do not readily release impurity atoms or molecules, thus avoiding plasma contamination and ensuring plasma composition stability. Furthermore, they prevent chemical reactions between the electrode material and the sample, preventing the formation of irrelevant products and ensuring the accuracy of post-irradiation sample analysis results.

[0026] Please see Figure 2 Although the inlet pipe 52 transports low-temperature cooling water, its upper end is close to the high-temperature area of ​​the plasma experiment, which can easily lead to a sudden increase in local temperature. Therefore, in some embodiments, the inlet pipe 52 includes a first metal section 521, a second metal section 522, and a ceramic section 523. The two ends of the ceramic section 523 are connected to the first metal section 521 and the second metal section 522, respectively, and the first metal section 521 is located close to the base component 31. Ceramic materials have extremely strong chemical inertness. Compared with metal pipes, ceramic pipes can effectively prevent corrosive media from eroding the inlet pipe 52, avoiding water leakage due to corrosion and extending the service life of the cooling system. Furthermore, ceramic materials have excellent high-temperature resistance, with a melting point much higher than that of metals, and can withstand short-term high-temperature impacts without melting or deforming. This prevents the inlet pipe 52 from softening or being damaged due to local high temperatures, and prevents equipment failure or safety risks caused by cooling water leakage.

[0027] In some embodiments, the diameters of the openings 13 of the first pressure cap 11 and the second pressure cap 12 are d1, and the diameter of the sample to be tested is d2, where d1 = d2 - Δd, and Δd = 1 mm. Setting the openings 13 of the first pressure cap 11 and the second pressure cap 12 to be slightly smaller than the size of the sample to be tested is to firmly press the sample onto the sample stage 2, preventing the sample from moving during the experiment and affecting the experimental results. The 1 mm diameter difference is the optimal size confirmed by the inventors after multiple experimental verifications, ensuring accurate fixation of the sample without affecting the irradiation results.

[0028] Please see Figure 3 To directly and accurately obtain the true temperature of the sample itself, avoid temperature measurement deviations caused by environmental interference, and ensure the reliability of experimental data, in some embodiments, the irradiation sample stage 2 further includes a first connecting member 8, which is fixedly disposed on the outer peripheral wall of the base member 31. The first connecting member 8 has a third channel 81 that penetrates the left and right sides of the first connecting member 8. The sample stage 2 has a fourth channel 21 that penetrates the upper and lower surfaces of the sample stage 2. The base member 31 has a fifth channel 312 that penetrates the upper surface and the outer peripheral wall of the base member 31. The third channel 81, the fifth channel 312, and the fourth channel 21 are sequentially connected and together define a detection channel. The detection channel is used for inserting a thermocouple and contacting the sample to be tested for temperature measurement. When measuring temperature, simply insert the thermocouple into the detection channel and make its end directly contact the sample to be tested, so that the measuring end (hot end) of the thermocouple and the sample to be tested reach thermal equilibrium. The temperature measured at this time is the temperature of the sample itself, ensuring the authenticity of the data.

[0029] Please see Figure 5 To achieve accurate measurement of the irradiated particle stream, in some embodiments, the irradiated sample stage 2 further includes a second connector 9. The second connector 9 is disposed on the outer peripheral wall of the base 31, and is spaced apart from the first connector 8 along the circumference of the base 31. The second connector 9 has a threaded hole 91 for screwing a copper wire to guide a DC bias power supply to the base 31 to measure the irradiated particle stream flowing over the surface of the sample. During measurement, a copper wire connected to the DC bias power supply is inserted into the threaded hole 91 and fixed in place with bolts. Then, the DC bias power supply applies a stable voltage to the base 31 to establish an electric field to control or collect the irradiated particles. It is worth noting that this application also includes a third connector 10 as a spare for the second connector 9.

[0030] In summary, the irradiation sample stage 2 provided in this embodiment allows for easy replacement of the pressure cap assembly 1 with a similar opening size 13 according to the sample size, enabling continuous testing of samples of different sizes, ensuring experimental continuity, and improving experimental efficiency. Furthermore, by setting a first pressure cap 11 and a second pressure cap 12 with dimensions larger than the sample stage 2 and base 3, and by making the second pressure cap 12 a ceramic pressure cap, the "edge effect" caused by direct plasma bombardment of the sample stage 2 and other components is effectively prevented, thus avoiding adverse effects on subsequent experimental results.

[0031] This specification discloses the present application with reference to the accompanying drawings and also enables those skilled in the art to implement the application, including making and using any device or system, employing suitable materials, and using any combination of methods. The scope of this application is defined by the claimed technical solution and includes other instances that would occur to those skilled in the art. Such other instances shall be considered to fall within the scope of protection defined by the claimed technical solution, provided that they include structural elements that are not different from the literal language of the claimed technical solution, or contain equivalent structural elements that are not substantially different from the literal language of the claimed technical solution.

Claims

1. An irradiation sample stage, characterized in that, include: Capping assembly, sample stage, base, insulating sleeve, and cooling assembly. The capping assembly includes: a first cap and a second cap that are detachably connected to the sample stage from top to bottom. The first cap is a molybdenum cap, and the second cap is a ceramic cap. Both the first cap and the second cap have openings of the same diameter that are coaxially arranged at their centers, and the diameter of the openings is smaller than the diameter of the sample to be tested. The inner peripheral walls of the first cap and the second cap, together with the top surface of the sample stage, define an irradiation area. The insulating sleeve is fitted onto the outer peripheral wall of the sample stage. The sample stage and the cooling assembly are respectively fixed on the upper and lower sides of the base. The sample stage has a sample placement area at its center, and the sample placement area is set in correspondence with each of the openings. The base has a first channel that penetrates its upper and lower surfaces, and the cooling assembly has a second channel that penetrates its upper and lower surfaces. The first channel and the second channel are connected.

2. The irradiation sample stage as described in claim 1, characterized in that, The base includes a base component and a support. The first channel is formed on the base component. The sample stage and the cooling assembly are respectively fixed on the upper and lower sides of the base. The insulating sleeve extends downward along its axial direction to the outer periphery of the base component. The support is fixed on the outer periphery of the insulating sleeve. The first pressure cap and the second pressure cap are respectively screwed to the support, and both the first pressure cap and the second pressure cap protrude radially from the outer periphery of the support.

3. The irradiation sample stage as described in claim 2, characterized in that, The cooling assembly includes a pipe body, an inlet pipe, and an outlet pipe. The pipe body is connected to the lower side of the foundation. A second channel is formed on the pipe body. The upper ends of the inlet pipe and the outlet pipe are respectively inserted into the second channel. The lower ends of the inlet pipe and the outlet pipe extend outward from the pipe body. The upper end of the inlet pipe is closer to the foundation than the upper end of the outlet pipe. There is a certain distance between the upper end of the inlet pipe and the bottom surface of the foundation.

4. The irradiation sample stage as described in claim 3, characterized in that, It also includes a lead screw, and a ceramic flange is fitted on the tube body. The first pressure cap, the second pressure cap, the bracket, and the ceramic flange are each provided with a corresponding connection hole. The lead screw passes through the connection hole on the ceramic flange, the bracket, the second pressure cap, and the first pressure cap in sequence and is screwed to the first pressure cap.

5. The irradiation sample stage as described in claim 3, characterized in that, The tube body includes a first sleeve, a second sleeve, and a ceramic electrode. The two ends of the ceramic electrode are connected to the first sleeve and the second sleeve, respectively. The first sleeve is connected to the foundation. The inner peripheral walls of the first sleeve, the second sleeve, and the ceramic electrode together define the second channel.

6. The irradiation sample stage as described in claim 3, characterized in that, The water inlet pipe includes a first metal section, a second metal section, and a ceramic section. The two ends of the ceramic section are connected to the first metal section and the second metal section, respectively, and the first metal section is close to the foundation.

7. The irradiation sample stage as described in claim 1, characterized in that, The opening diameters of the first and second pressure caps are d1, and the diameter of the sample to be tested is d2, where d1 = d2 - Δd, and Δd = 1 mm.

8. The irradiation sample stage as described in claim 2, characterized in that, It also includes a first connector, which is fixedly disposed on the outer peripheral wall of the foundation. The first connector has a third channel, which extends through the left and right sides of the first connector. A fourth channel is provided on the sample stage, and the fourth channel penetrates the upper and lower surfaces of the sample stage. A fifth channel is provided on the foundation, and the fifth channel penetrates the upper surface and the outer peripheral wall of the foundation. The third, fifth, and fourth channels are connected in sequence and together define a detection channel. The detection channel is used for inserting a thermocouple and contacting it with the sample to be tested in order to measure the temperature of the sample.

9. The irradiation sample stage as described in claim 8, characterized in that, It also includes a second connector, which is disposed on the outer peripheral wall of the foundation and is spaced apart from the first connector along the circumference of the foundation. The second connector is provided with a threaded hole for screwing with a copper wire to guide a DC bias power supply to the foundation for measuring the irradiated particle flow flowing through the surface of the sample to be tested.

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