Super-resolution micro lens and preparation method thereof

By combining photoresist thermal reflow process with hybrid substrate planar lens, a super-resolution microlens was fabricated, solving the problems of high cost and fragile low refractive index in the existing technology, and achieving high-performance microlens imaging effect.

CN121596437APending Publication Date: 2026-03-03WUXI GUANGYUXI TECH CO LTD
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Patent Information

Application Number
CN202411155708.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-08-22
Publication Date
2026-03-03

AI Technical Summary

Technical Problem

Existing micron-scale plano-convex lens manufacturing processes are costly and technically complex. Self-assembled hemispherical structures are fragile, have low refractive indices, and have limited imaging performance. Current technologies make it difficult to achieve the fabrication of microlenses with high refractive indices and high precision.

Method used

A photoresist spherical microlens was fabricated using a photoresist thermal reflow process, and a hybrid substrate planar lens was placed below it. A super-resolution microlens was formed by thermal annealing, and the imaging effect was adjusted by combining substrate layers of different thicknesses.

Benefits of technology

Microlenses with high numerical aperture and magnification have been developed, improving imaging performance and enhancing the practicality and imaging effect of the lenses.

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Abstract

The invention discloses a super-resolution micro lens and a preparation method thereof. The lens comprises a photoresist spherical micro lens and a mixed substrate plane lens which are sequentially arranged from top to bottom. The specific preparation method comprises the following steps: S1, preparing a photoresist cylinder on a quartz substrate; s2, reflowing the photoresist cylinder into a micron lens by using a photoresist reflowing process; s3, preparing a mixed substrate plane lens on the surface of the to-be-detected sample; and S4, transferring the micron lens to the surface of the mixed substrate plane lens. By changing the thickness of the mixed substrate plane lens, adjustment of the amplification coefficient and the numerical aperture can be realized, and compared with a micro lens without a mixed substrate, the micro lens has higher imaging resolution. The method has a wide prospect in the technical field of optical imaging.
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