Magnetic steel platform and manufacturing method thereof

Abstract

This application belongs to the technical field of magnetic steel platforms, and relates to a magnetic steel platform and its manufacturing method. The magnetic steel platform includes a first magnet, a second magnet, a third magnet, and a magnetizing coil array. The first magnet is a rectangular parallelepiped N-magnet or S-magnet, and both of its base surfaces are square. The second magnet is a trapezoidal frustum, with the small-area base surfaces of the four frustums connected to the side surfaces of the first magnet, and the trapezoidal side surfaces of adjacent frustums connected to form the first magnet array. Multiple first magnet arrays are arranged in a periodic array, and adjacent first magnet arrays are seamlessly connected by a third magnet. The polarities of the first magnets in adjacent first magnet arrays are opposite to form the second magnet array. The magnetizing coil array is disposed on one or both surfaces of the second magnet array. This application optimizes the magnetic flux path, making the magnetic field distribution more uniform, reducing local magnetic saturation or leakage, and improving the motor thrust constant and motion stability.

Description

Technical Field

[0001] This application belongs to the field of magnetic steel platform technology, and more specifically, relates to a magnetic steel platform and its manufacturing method. Background Technology

[0002] The workpiece stage is one of the core components of a lithography machine, and its motion control performance directly determines the machine's resolution, overlay accuracy, and productivity. To meet the requirements of lithography processes and production efficiency, the motion drive units, such as the drive circuitry of the workpiece stage, must possess characteristics such as multiple degrees of freedom, long stroke, high acceleration, high positioning accuracy, and high dynamic response. Currently, most workpiece stages are permanent magnet synchronous planar motors, which offer excellent overall performance in terms of structure, control accuracy, and energy loss. Among these, the magnetic levitation permanent magnet synchronous planar motor is more in line with the current development trend of lithography machines and is gradually becoming the mainstream drive motor.

[0003] Magnetic levitation planar motors typically consist of permanent magnet arrays and coil arrays. The electromagnetic force and torque generated between the mover and stator are the result of the interaction between electric and magnetic fields. In the traditional stator permanent magnet array structure, each N / S pole unit consists of two main permanent magnets and seven auxiliary permanent magnets (H poles). The main permanent magnets are usually square structures magnetized along the z-axis, while the auxiliary permanent magnets (H poles) are rectangular structures magnetized horizontally, with the magnetization direction typically from the S pole to the N pole. The permanent magnets are bonded to a stainless steel backplate, and the magnetization directions of the main permanent magnets are alternately arranged along the z-axis, forming the N and S poles. Another structural form includes multiple square N-pole magnets and square S-pole magnets, connected by cuboid-shaped magnets. However, this connection method creates square gaps at the intersections of the cuboid magnets, resulting in a lower magnetic flux density and greater magnetic leakage on the back side of the magnet array, thus affecting the motor's thrust constant and overall performance.

[0004] Traditional manufacturing processes for magnet arrays typically involve magnetizing permanent magnets piece by piece before assembling them. This method, due to the pre-magnetization of the magnets, results in the magnets being under constant magnetic tension throughout the installation process, making operation difficult and prone to accidents, including magnet collisions and personal injury to installers. Furthermore, because the magnets are pre-magnetized, the already magnetic magnets cannot be fully processed. Therefore, existing magnet platforms often use traditional cubic magnet structures, leading to problems such as inaccurate control of the surface magnetism and excessive high-order harmonics in the magnetomotive force. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of this application is to provide a magnetic steel platform and its manufacturing method, which aims to solve the problems of low magnetic flux density and easy magnetic leakage in the magnetic steel platform of the existing magnetic levitation planar motor, as well as the inability to accurately control the magnetic field configuration and the excessive high-order harmonics of the magnetomotive force.

[0006] To achieve the above objectives, in a first aspect, this application provides a magnetic steel platform, including a first magnet, a second magnet, a third magnet, and a magnetizing coil array. The first magnet is a cuboid-shaped N-magnet or S-magnet, and both of its base surfaces are square. The second magnet is a trapezoidal frustum, which includes a pair of parallel base surfaces with different areas. Four second magnets are distributed circumferentially around the first magnet, and the small-area base surfaces of the trapezoidal frustums of the four second magnets are respectively connected to the four sides of the first magnet. At the same time, the trapezoidal sides of adjacent trapezoidal frustums are connected to form a cuboid-shaped first magnet array. Multiple first magnet arrays are arranged in a periodic array, and adjacent first magnet arrays are seamlessly connected by corresponding third magnets. The contact surface area of ​​each third magnet and the corresponding first magnet array is the same. In addition, the polarities of the first magnets in adjacent first magnet arrays are opposite to form a second magnet array. The magnetizing coil array is disposed on one or a pair of surfaces of the second magnet array.

[0007] Furthermore, the orientation direction of the first magnet is the same as the height direction of the cuboid; the orientation direction of the second magnet is along the large area of ​​the base of the trapezoidal frustum toward its small area, and forms a 45° angle with the orientation direction of the first magnet; the orientation direction of the third magnet is along the N magnet toward the S magnet, and is perpendicular to the orientation direction of the first magnet.

[0008] Furthermore, the third magnet is a quadrangular prism.

[0009] Furthermore, the third magnet is a hexagonal prism, and the sides of adjacent hexagonal prisms are all connected.

[0010] Secondly, a method for manufacturing the magnetic steel platform as described above is provided, comprising: S1 Under non-magnetic conditions, the cubic magnet is processed into a trapezoidal platform as the second magnet, the cuboid magnet is used as the first magnet, and the first magnet, the second magnet and the third magnet are assembled into a second magnet array. S2 assembles the magnetizing coil array onto a single surface or a pair of surfaces of the second magnet array to obtain a first non-magnetic magnet platform; S3 charges the magnetizing coil array to magnetize the entire first non-magnetic steel platform.

[0011] Furthermore, in step S1, under non-magnetic conditions, the cubic magnet is further processed into a hexagonal prism or a quadrangular prism, and the hexagonal prism or the quadrangular prism is used as a third magnet.

[0012] Thirdly, a magnet platform is provided, comprising a first magnet, a second magnet, and a magnetizing coil array. The first magnet is an octagonal prism, and the second magnet is a cuboid. Multiple octagonal prisms are arranged in a periodic array, and a second magnet is disposed between a pair of opposite sides of adjacent octagonal prisms. The contact surfaces of the second magnet and the octagonal prisms have the same area to achieve a seamless connection to form a third magnet array. The polarities of adjacent first magnets in the third magnet array are opposite. The magnetizing coil array is disposed on one surface or a pair of surfaces of the third magnet array.

[0013] Furthermore, the orientation direction of the first magnet is the same as the height direction of the octagonal prism; the orientation direction of the second magnet is the direction in which the second magnet faces the first magnet, and forms a 45° angle with the orientation direction of the first magnet.

[0014] Furthermore, the adjacent sides of the octagonal prism have different areas, and the second magnet is connected to the side with the larger area.

[0015] Fourthly, a magnet platform is provided, comprising a first magnet, a second magnet, and a magnetizing coil array. The first magnet is a quadrangular prism, and the second magnet is a cuboid. Multiple quadrangular prisms are arranged in a periodic array, and a second magnet is disposed between a pair of opposite sides of adjacent quadrangular prisms. The second magnet has the same height as the quadrangular prisms. One end of the first magnet is a trapezoidal frustum, such that the side surface area of ​​the second magnet is larger than the area of ​​the side surface of the first magnet that is in contact with it, to form a third magnet array. The polarities of adjacent first magnets in the third magnet array are opposite. The magnetizing coil array is disposed on one surface or a pair of surfaces of the third magnet array.

[0016] Fifthly, a method for manufacturing the magnet platform as described above is provided, comprising: S1 assembles the first and second magnets into a third magnet array under non-magnetic conditions; S2 assembles the magnetized coil array onto a single surface or a pair of surfaces of the third magnet array to obtain a second non-magnetic magnet platform; S3 charges the magnetizing coil array to magnetize the entire second non-magnetic steel platform.

[0017] Overall, the technical solutions conceived in this application have the following beneficial effects compared with the prior art: (1) The magnet platform of this application has a higher magnet occupancy rate and magnetic flux density. The trapezoidal frustum shape of the second magnet makes the arrangement more compact. The dead corners at the traditional square connection are eliminated by the trapezoidal side connection, further reducing the gaps in the array. The trapezoidal frustum shape of the magnet can provide a more continuous magnetic circuit, thereby increasing the magnet occupancy rate, increasing the magnetic flux density, and reducing the magnetic leakage on the back side. The inclined surface design of the trapezoidal frustum helps to optimize the magnetic flux path, make the magnetic field distribution more uniform, reduce local magnetic saturation or leakage, and can improve the motor thrust constant and motion stability.

[0018] (2) Another type of magnetic steel platform in this application uses an octagonal prism magnet as the central first magnet, which has stronger structural stability and can achieve more efficient magnetic circuit closure. Furthermore, the octagonal shape makes the magnetic field more evenly distributed in multiple directions, reducing thrust fluctuations and interference, improving motor control accuracy, and optimizing the six-degree-of-freedom motion of the magnetic levitation planar motor. In addition, the smooth edges of the octagonal prism reduce the edge effect of the magnetic field, reduce eddy current losses, and improve motor efficiency.

[0019] (3) Another type of magnetic steel platform in this application also makes the first magnetic steel in the center beveled into a trapezoidal platform and a cubic prism shape, thereby enhancing the magnetic field in the central area while reducing the magnetic field at the edge, thus achieving the effect of concentrating the magnetic field in the central area.

[0020] (4) In traditional magnetoplatforms, the permanent magnets are made of a full cubic structure. If it is necessary to control the magnetic field generated by the magnetoplatform, the traditional structure can only adjust the size of the cubic magnet, which limits the control accuracy of the magnetic field generated by the magnetoplatform. The new structure and manufacturing method proposed in this application, based on the overall magnetization technology, breaks through the limitation that the permanent magnets of the traditional magnetoplatform cannot be processed, and extends the permanent magnet structure to a non-traditional cubic structure, thereby improving the control accuracy of the magnetic field generated by the magnetoplatform.

[0021] (5) This application relies on the large-scale magnetic pole integral magnetization technology. First, the non-magnetic permanent magnet is processed, then assembled into a large magnetic pole without magnetism, and then magnetized in situ using an integral magnetization method. Alternatively, it can be assembled without magnetism, processed as a whole, and then magnetized in situ. Based on the aforementioned methods, the processing of permanent magnets can be completed under non-magnetic conditions, thereby controlling the surface magnetic field and magnetomotive force generated by the magnetic steel platform, achieving precise control of the magnetic field generated by the magnetic steel platform, thereby increasing the surface magnetic field strength or increasing the fundamental magnetomotive force and reducing the higher harmonics of the magnetomotive force. Since the traditional method uses a pre-magnetization method, the magnetization saturation degree of each magnetic steel may differ, and the saturation degree of the magnetic steel may decrease due to mechanical vibration and other factors during installation. Therefore, the integral post-magnetization method can avoid the above problems and improve the uniformity of the magnetic steel platform.

[0022] (6) This application can also regulate the magnitude of the magnetizing magnetic field generated by the magnetizing coil by adjusting the current of the magnetizing coil array, thereby precisely controlling the saturation of the corresponding magnet array (second magnet array and third magnet array) and realizing the optimization adjustment of the magnetic configuration of the magnet platform. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of a magnetic steel platform structure provided in Embodiment 1 of this application; Figure 2 These are three-view drawings and a three-dimensional schematic diagram of the second magnet array provided in Embodiment 1 of this application; Figure 3 This is a schematic diagram of the structure of the conventional magnet platform provided in Embodiment 1 of this application; Figure 4 This is a schematic diagram of the surface magnetic configuration of a magnetic steel platform structure provided in Embodiment 1 of this application; Figure 5 This is a schematic diagram of the structure of the conventional magnet platform provided in Embodiment 2 of this application; Figure 6 This is a schematic diagram of the structure of a magnetic steel platform provided in Embodiment 4 of this application; Figure 7 This is a schematic diagram of the surface magnetic field normal value of a magnetic steel platform provided in Embodiment 4 of this application; Figure 8 This is a schematic diagram of the structure of a magnetic steel platform provided in Embodiment 5 of this application; Figure 9 This is a schematic diagram of the normal component of the magnetic field on the surface of the magnet platform provided in Embodiment 5 of this application; Figure 10 This is a schematic diagram of the normal component of the magnetic field on the surface of the magnetic steel platform provided in Embodiment 6 of this application.

[0024] In all the accompanying drawings, the same reference numerals are used to denote the same elements or structures, wherein: 1-First magnet, 2-Second magnet, 3-Third magnet. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0026] In this article, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. The symbol " / " in this article indicates that the related objects are in an "or" relationship; for example, A / B means A or B.

[0027] The terms "first" and "second," etc., used in the specification and claims herein are used to distinguish different objects, not to describe a specific order of objects. For example, "first response message" and "second response message," etc., are used to distinguish different response messages, not to describe a specific order of response messages.

[0028] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0029] In the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more, for example, multiple processing units means two or more processing units, multiple elements means two or more elements, etc.

[0030] Example 1 This embodiment provides a magnetic steel platform, such as Figure 1 As shown, the array includes a first magnet 1, a second magnet 2, a third magnet 3 (i.e., an H-pole magnetic block), and a magnetizing coil array (not shown in the figure). The first magnet 1 is a cuboid-shaped N-magnet or S-magnet, and each pair of bases of the first magnet 1 is a square. The second magnet 2 is a trapezoidal frustum, which includes a pair of parallel bases with different areas. The small-area bases of the four trapezoidal frustums are connected to the side surfaces of the first magnet 1, and the trapezoidal side surfaces of adjacent trapezoidal frustums are connected to form a cuboid-shaped first magnet array. Multiple first magnet arrays are arranged in a periodic array, and adjacent first magnet arrays are seamlessly connected by corresponding third magnets 3. The contact area of ​​the third magnet 3 and the corresponding first magnet array is the same, and the polarities of the first magnets 1 in adjacent first magnet arrays are opposite to form a second magnet array. The magnetizing coil array is disposed on one or a pair of surfaces of the second magnet array.

[0031] In this embodiment, the orientation direction of the first magnet 1 is the same as the height direction of the cuboid; the orientation direction of the second magnet 2 is along the large area of ​​the bottom surface of the trapezoidal frustum toward its small area, and forms a 45° angle with the orientation direction of the first magnet 1; the orientation direction of the third magnet 3 is along the N magnet toward the S magnet, and is perpendicular to the orientation direction of the first magnet 1.

[0032] Specifically, such as Figure 2As shown in the diagram, a is a top view of the second magnet array, b is a side view, c is a cross-sectional view along direction AA in a, and d is a three-dimensional schematic diagram. c shows that the N magnet is composed of three parts: N1, N2, and N3 (i.e., N1 and N3 are the first magnet 1, and N2 is the second magnet 2), totaling five magnets. N1 is oriented from the lower left to the upper right at a 45° angle; N3 is symmetrical to N1, oriented from the lower right to the upper left at a 45° angle. Similarly, the remaining two non-cubic magnets in the N pole are oriented in the same direction as N1 and N2; the central cubic magnet (N2) is oriented vertically upwards, the same as the original N pole orientation. Likewise, the corresponding adjacent S pole magnets are completely symmetrical to the N magnets.

[0033] In this embodiment, the third magnet 3 is a quadrangular prism, specifically a cuboid shape.

[0034] like Figure 3 As shown, a traditional magnetic steel platform consists of a platform backplate, multiple N / S pole magnetic blocks, and an H pole magnetic block, where the H magnetic block is oriented from the S pole to the N pole. Compared to... Figure 3 The traditional structure shown, such as Figure 4 As shown, the surface magnetism of the magnet platform using this structure is significantly improved.

[0035] Example 2 Unlike Embodiment 1, in this embodiment, the third magnet 3 is a hexagonal prism, and the sides of adjacent hexagonal prisms are all connected. The H-pole magnetic block in the traditional magnet platform structure is optimized by transforming the traditional cubic H-pole shape into a hexagonal prism with sharp corners on both sides, such as... Figure 5 As shown. Compared to Example 1, Figure 5 The new structure shown makes fuller use of the structure around the NS magnet, increasing the utilization rate of the H magnet and thus effectively improving the surface magnetic field strength of the magnet platform.

[0036] Example 3 This embodiment provides a method for manufacturing a magnetic steel platform as described in Embodiments 1 and 2 above, including the following steps: S1 Under non-magnetic conditions, the cubic magnet is first processed into a trapezoidal platform as the second magnet 2, and then the first magnet 1, the second magnet 2, and the third magnet 3 are assembled into the second magnet array. S2 assembles the magnetizing coil array onto a single surface or a pair of surfaces of the second magnet array to obtain a first non-magnetic magnet platform; S3 charges the magnetizing coil array to magnetize the entire first non-magnetic steel platform.

[0037] In this embodiment, in step S1, under non-magnetic conditions, the cubic magnet is further processed into a hexagonal prism or a quadrangular prism, and the hexagonal prism or quadrangular prism is used as the third magnet 3.

[0038] Example 4 This embodiment provides a magnetic steel platform, such as Figure 6 As shown, the array includes a first magnet 1, a second magnet 2, and a magnetizing coil array (not shown in the figure). The first magnet 1 is an octagonal prism, i.e., a cube with its four edges chamfered. The second magnet 2 is a cuboid. Multiple octagonal prisms are arranged in a periodic array, with a second magnet 2 positioned between a pair of opposite sides of adjacent octagonal prisms. The contact surfaces of the second magnet 2 and the octagonal prisms have the same area to achieve a seamless connection, forming a third magnet array. The polarities of adjacent first magnets 1 in the third magnet array are opposite. The magnetizing coil array is positioned on one or a pair of surfaces of the third magnet array. Alternatively, epoxy resin or other adhesives can be used to bond the third magnet array to a stainless steel platform to obtain... Figure 6 The magnetic steel platform shown.

[0039] Specifically, the normal value of the surface magnetic field generated by this structure is as follows: Figure 7 As shown, the magnetic field at the edge of the NS magnet is effectively reduced, making the surface magnetic normal value generated by the magnet platform closer to a square wave, thereby reducing the higher harmonics of the magnetomotive force.

[0040] In this embodiment, the orientation direction of the first magnet 1 is the same as the height direction of the octagonal prism; the orientation direction of the second magnet 2 is the direction in which the second magnet 2 faces the first magnet 1, and forms a 45° angle with the orientation direction of the first magnet 1.

[0041] In this embodiment, the adjacent sides of the octagonal prism have different areas. The second magnet 2 is connected to the side with the smaller area, so that the enclosed area of ​​the four first magnets and the four second magnets forms an octagonal prism-shaped gap.

[0042] Example 5 The difference between this embodiment and embodiment 4 is that, Figure 8 In the diagram, a is a top view, b is a side view, c is a cross-sectional view of surface BB in a, and d is a 3D view. As can be seen from the diagrams, the first magnet 1 is a quadrangular prism, obtained by chamfering one end of a cube to create a trapezoidal frustum shape. That is, by chamfering the corner of one end face of a cube, a quadrangular prism with one end being a cube and the other a trapezoidal frustum is obtained. The second magnet 2 is still a cuboid, with the same height as the first magnet, but its lateral surface area is larger than the area of ​​the face of the first magnet 1 that it contacts. This embodiment optimizes the shape of the NS magnet by chamfering the corners, thereby controlling the magnetic field configuration and concentrating the magnetic field in the central region rather than at the edges of the magnet.

[0043] The magnetic normal component of the surface after chamfering is compared with the original structure, for example... Figure 9As shown, it can be seen that while the magnetic field in the central region is enhanced, the magnetic field at the edge is reduced, thereby achieving the effect of concentrating the magnetic field in the central region.

[0044] Example 6 This embodiment provides a method for manufacturing a magnet platform as provided in the previous embodiment 4, including the following steps: under non-magnetic conditions, assembling a first magnet 1 and a second magnet 2 into a third magnet array, and using an adhesive such as epoxy resin to combine the magnets with a stainless steel platform; assembling a magnetizing coil array onto a single surface or a pair of surfaces of the third magnet array to obtain a second non-magnetic magnet platform; and charging the magnetizing coil array to magnetize the entire second non-magnetic magnet platform.

[0045] Specifically, the shape of the coils in the aforementioned magnetizing coil array can be a traditional solenoid or square shape to match the shape of the permanent magnet. A capacitor-type pulse power supply is used to power the magnetizing coils, and a pulse current is passed through the coils to generate a pulsed magnetic field in the permanent magnet region. If the peak value of the pulsed magnetic field is greater than the critical magnetic field value required for the permanent magnet to reach saturation, the permanent magnet can be magnetized to saturation.

[0046] The manufacturing method of the magnet platform provided in Example 5 differs from that provided in Example 4 in that one end of the cubic magnet is first beveled to form a quadrangular prism with one end being a cube and the other end being a trapezoidal frustum. Then, the assembly and magnetization steps are performed according to the aforementioned manufacturing method.

[0047] Since this application is based on a post-assembly overall magnetization method, the saturation level of each magnet in the magnet platform can be controlled by the magnitude of the magnetic field generated by the magnetization coil. By adjusting the saturation level of the magnets, i.e., controlling the remanence of the magnets, the surface magnetism of the magnet platform can be optimized, thereby reducing higher harmonics. For example, under different unsaturation levels of H-magnets, the normal component of the magnetic field on the surface of the magnet platform... Figure 10 As shown, it is evident that as the degree of unsaturation increases, the surface magnetic waveform approaches a square wave, thereby reducing the higher harmonic components of the magnetomotive force.

[0048] It should be understood that expressions such as “comprising” and “may include” used in this application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In this application, terms such as “comprising” and / or “having” are to be interpreted as indicating a particular characteristic, number, operation, constituent element, component, or combination thereof, but not to exclude the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0049] Furthermore, in this application, the expression "and / or" includes any and all combinations of the associated listed words. For example, the expression "A and / or B" may include A, may include B, or may include both A and B.

[0050] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. "Fixed connection" refers to a connection where the relative positional relationship remains unchanged after connection. "Rotary connection" refers to a connection where the components can rotate relative to each other after connection. "Sliding connection" refers to a connection where the components can slide relative to each other after connection. The directional terms mentioned in the embodiments of this application, such as "top," "bottom," "inner," "outer," "left," and "right," are only for reference to the directions in the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of this application, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0051] Furthermore, the mathematical concepts mentioned in the embodiments of this application, such as symmetry, equality, parallelism, and perpendicularity, are limitations specific to the current technological level, rather than absolute and strict mathematical definitions. Slight deviations are permissible; approximations of symmetry, equality, parallelism, and perpendicularity are all acceptable. For example, "A and B are parallel" means that A and B are parallel or approximately parallel, and the angle between A and B can be between 0 and 10 degrees. "A and B are perpendicular" means that A and B are perpendicular or approximately perpendicular, and the angle between A and B can be between 80 and 100 degrees.

[0052] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A magnetic steel platform, characterized in that, The system includes a first magnet (1), a second magnet (2), a third magnet (3), and a magnetizing coil array. The first magnet (1) is a rectangular N-magnet or S-magnet, and both of its bases are square. The second magnet (2) is a trapezoidal frustum, which includes a pair of parallel bases with different areas. Four second magnets (2) are distributed around the first magnet (1), and the small-area bases of the trapezoidal frustums of the four second magnets (2) are respectively connected to the four sides of the first magnet (1). The trapezoidal sides of adjacent trapezoidal frustums are connected to form a cuboid-shaped first magnetic steel array; multiple first magnetic steel arrays are arranged in a periodic array, and adjacent first magnetic steel arrays are seamlessly connected by corresponding third magnetic steels (3), and the contact surface of each third magnetic steel (3) and the corresponding first magnetic steel array has the same area. In addition, the polarities of the first magnetic steels (1) in adjacent first magnetic steel arrays are opposite to form a second magnetic steel array; the magnetizing coil array is disposed on one surface or a pair of surfaces of the second magnetic steel array.

2. The magnetic steel platform as described in claim 1, characterized in that, The orientation direction of the first magnet (1) is the same as the height direction of the cuboid; the orientation direction of the second magnet (2) is along the large area of ​​the bottom surface of the trapezoidal frustum toward its small area bottom surface, and forms a 45° angle with the orientation direction of the first magnet (1); the orientation direction of the third magnet (3) is along the N magnet toward the S magnet, and is perpendicular to the orientation direction of the first magnet (1).

3. The magnetic steel platform as described in claim 1, characterized in that, The third magnet (3) is a quadrangular prism; and / or, the third magnet (3) is a hexagonal prism, and the sides of adjacent hexagonal prisms are connected.

4. A method for manufacturing a magnetic steel platform as described in any one of claims 1-3, characterized in that, include: S1 Under non-magnetic conditions, the cubic magnet is processed into a trapezoidal frustum as the second magnet (2), the cuboid magnet is used as the first magnet (1), and the first magnet (1), the second magnet (2) and the third magnet (3) are assembled into a second magnet array. S2 assembles the magnetizing coil array onto a single surface or a pair of surfaces of the second magnet array to obtain a first non-magnetic magnet platform; S3 charges the magnetizing coil array to magnetize the entire first non-magnetic steel platform.

5. The method for manufacturing the magnet platform as described in claim 4, characterized in that, In step S1, under non-magnetic conditions, the cubic magnet is further processed into a hexagonal prism or a quadrangular prism, and the hexagonal prism or the quadrangular prism is used as the third magnet (3).

6. A magnetic steel platform, characterized in that, The system includes a first magnet (1), a second magnet (2), and a magnetizing coil array. The first magnet (1) is an octagonal prism, and the second magnet (2) is a cuboid. Multiple octagonal prisms are arranged in a periodic array, and a second magnet (2) is provided between a pair of opposite sides of adjacent octagonal prisms. The contact area between the second magnet (2) and the octagonal prism is the same to achieve a seamless connection to form a third magnet array. The polarities of adjacent first magnets (1) in the third magnet array are opposite. The magnetizing coil array is provided on one surface or a pair of surfaces of the third magnet array.

7. A magnetic steel platform as described in claim 6, characterized in that, The orientation direction of the first magnet (1) is the same as the height direction of the octagonal prism; the orientation direction of the second magnet (2) is the direction from the second magnet (2) toward the first magnet (1), and forms a 45° angle with the orientation direction of the first magnet (1).

8. A magnetic steel platform as described in claim 6, characterized in that, The adjacent sides of the octagonal prism have different areas, and the second magnet (2) is connected to the side with the larger area.

9. A magnetic steel platform, characterized in that, The system includes a first magnet (1), a second magnet (2), and a magnetizing coil array. The first magnet (1) is a quadrangular prism, and the second magnet (2) is a cuboid. Multiple quadrangular prisms are arranged in a periodic array, and a second magnet (2) is disposed between a pair of opposite sides of adjacent quadrangular prisms. The second magnet (2) has the same height as the quadrangular prism. One end of the first magnet (1) is shaped like a trapezoidal frustum, so that the side surface area of ​​the second magnet (2) is larger than the side surface area of ​​the first magnet (1) connected to it, thus forming a third magnet array. The polarities of adjacent first magnets (1) in the third magnet array are opposite. The magnetizing coil array is disposed on one surface or a pair of surfaces of the third magnet array.

10. A method of manufacturing a magnetic steel platform as claimed in any one of claims 6-9, characterized in that, include: S1 assembles the first magnet (1) and the second magnet (2) into a third magnet array under non-magnetic conditions; S2 assembles the magnetizing coil array onto a single surface or a pair of surfaces of the third magnet array to obtain a second non-magnetic magnet platform; S3 charges the magnetizing coil array to magnetize the entire second non-magnetic steel platform.

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