Modularized multifunctional contact pressure anchoring test device and method

Abstract

The invention provides a modularized multifunctional contact pressure anchoring test device and method, and the device is characterized in that a first positioning part on a positioning registration module is matched with a first positioning hole in a non-packaging sensor, and is matched with a second positioning hole in a signal switching system module; aligning each layer structure of the non-packaged sensor and the signal switching system module up and down, and aligning a contact of the signal switching system module with a test point of the non-packaged sensor; a second positioning piece on the positioning registration module is matched with a third positioning hole in the pressurization module and is matched with a fourth positioning hole in the non-packaged sensor, so that a pressurization array of the pressurization module is aligned with a test array of the non-packaged sensor; the signal transfer system module is connected with the non-packaged sensor and is connected with the multi-channel LCR tester; and the pressurizing module is used for pressurizing a test point of the non-packaged sensor. According to the invention, an accurate, efficient and repeatable pressure-capacitance signal anchoring test is provided for a non-packaged micro flexible pressure sensor array.

Description

Technical Field

[0001] This invention relates to the field of flexible electronics and sensor testing technology, specifically to a modular multifunctional contact pressure anchoring testing device and method, and more particularly to a modular multifunctional testing device and method for contact pressure-capacitance signal anchoring of unpackaged miniature flexible pressure sensor arrays. Background Technology

[0002] Flexible capacitive pressure sensors are increasingly used in wearable devices, robotic haptics, and medical monitoring. Currently, most flexible capacitive pressure sensors use flexible materials with a certain water content as the dielectric layer, but their stability is poor, and significant performance migration occurs over time. Unencapsulated flexible capacitive pressure sensors make it possible to replace the dielectric layer periodically while maintaining performance stability. However, accurate pressure-capacitance signal anchoring calibration of unencapsulated miniature flexible pressure sensor arrays faces significant challenges.

[0003] Existing testing methods are mainly divided into two categories: 1) Conventional standard weight hard contact method: Usually, weights are placed directly on the sensor surface for multi-point synchronous pressure loading, and the pressure is calculated by proportional area. In this method, a single weight covers the entire sensor device at the same time, rather than covering the pressure monitoring point point point by point. This differs from the actual application scenario of the sensor, resulting in low accuracy and poor repeatability; 2) Precision control method: External pressure is applied and accurately measured by a computer control platform in conjunction with a force gauge. This method has high accuracy and good repeatability, but it can only achieve single-point loading, has low efficiency, and is not suitable for batch testing of array sensors.

[0004] For miniature pressure sensor arrays, the test points are small and densely distributed, making it difficult for existing methods to achieve precise multi-point parallel pressurization and signal anchoring. Furthermore, existing test fixtures lack dedicated designs for unpackaged sensors, resulting in deficiencies in ensuring alignment of sensor layers and achieving reliable electrical connections.

[0005] Therefore, there is an urgent need in the field for a testing device and method specifically designed for unpackaged micro flexible pressure sensor arrays, capable of achieving multi-point parallel and precise pressurization, ensuring precise alignment between sensor layers, providing stable electrical connections, and supporting rapid and repeated testing. Summary of the Invention

[0006] To address the shortcomings of existing technologies, the purpose of this invention is to provide a modular, multifunctional contact pressure anchoring test device and method.

[0007] A modular multifunctional contact pressure anchoring test device according to the present invention includes: a base, a positioning and registration module, a signal transfer system module, and a pressurization module; The positioning and registration module, the signal switching system module, and the pressurization module are mounted on the base; The first positioning element on the positioning and registration module mates with the first positioning hole on the unpackaged sensor and with the second positioning hole on the signal conversion system module. The second positioning hole is aligned with the first positioning hole, so that the layers of the unpackaged sensor and the layers of the signal conversion system module are aligned vertically, and the contacts of the signal conversion system module are aligned with the test points of the unpackaged sensor. The second positioning element on the positioning and registration module cooperates with the third positioning hole on the pressurizing module and with the fourth positioning hole on the unpackaged sensor. The third positioning hole and the fourth positioning hole are aligned so that the pressurizing array of the pressurizing module is aligned with the test array of the unpackaged sensor. The first connection terminal of the signal conversion system module is connected to the unpackaged sensor; the second connection terminal of the signal conversion system module is connected to the multi-channel LCR tester. The pressurization module is used to pressurize the test points of unpackaged sensors.

[0008] Preferably, the base includes: a base body, a first connector, a horizontal slider, and a vertical limiter; The first connector is disposed on the base body, and the horizontal slider and the vertical limiter are disposed on the first connector; The horizontal slider can move vertically on the first connector, and the first connector is provided with a limiting member that can limit and fix the horizontal slider. The pressurization module is connected to the first connector via the horizontal slider and the vertical limiter.

[0009] Preferably, the positioning and registration module includes: a positioning base, a first positioning element, and a second positioning element; The first positioning component is a sensor positioning pin, and the second positioning component is a pressure positioning pin; The positioning seat is disposed on the base, and the pressure positioning pin and the sensor positioning pin are disposed on the positioning seat.

[0010] Preferably, the signal switching system module includes: conductive adhesive, connector, and flexible flat cable; The flexible flat cable is mounted on the base; One end of the flexible flat cable forms the first connection terminal of the signal conversion system module, and is connected to the unencapsulated sensor through the conductive adhesive. The other end of the flexible flat cable forms the second connection terminal of the signal conversion system module, and is connected to the multi-channel LCR tester through the connector.

[0011] Preferably, the pressurizing module includes: a pressure rod handle, a spring pressure rod, a second connecting piece, an auxiliary positioning horizontal pressure plate, a foot pressure plate, a main weight, and weight plates; The spring pressure rod is mounted on the vertical limiter of the base and can move up and down in the vertical direction on the vertical limiter; The handle of the pressure rod is connected to one end of the spring pressure rod. By raising or lowering the handle of the pressure rod, the spring pressure rod can be driven to move up and down in the vertical direction within the sleeve limiting structure. The other end of the spring rod is connected to the auxiliary positioning horizontal pressure plate via the second connecting member; the auxiliary positioning horizontal pressure plate is slidably connected to the connecting member of the base via the horizontal slider of the base; The foot pressure plate and the main weight are mounted on the auxiliary positioning horizontal pressure plate; the weight piece is mounted on the main weight; the main weight is provided with the second positioning hole; The foot pressure plate is used to press down on each foot of the unpackaged sensor; the main weight and the weight plate are used to apply pressure to the test points of the unpackaged sensor.

[0012] Preferably, the pressurization module further includes: a third connector; The vertical limiter of the base is provided with a sleeve limiting structure and a rotation limiting structure at both ends; The sleeve limiting structure is sleeved on the spring pressure rod, and the spring pressure rod can move vertically within the sleeve limiting structure; One end of the spring rod is rotatably connected to one end of the third connector, the other end of the third connector is rotatably connected to the first connection point of the rod handle, and the second connection point of the rod handle is rotatably connected to the rotation limiting structure.

[0013] Preferably, the main weight is provided with a connecting rod, and the weight piece is mounted on the connecting rod; The foot plate is provided with a fifth positioning hole corresponding to the first positioning hole, and the second positioning component of the positioning and registration module can pass through the first positioning hole and the fifth positioning hole in sequence.

[0014] Preferably, the main weight body is a stainless steel weight, and the weight sheet is an acrylic weight sheet.

[0015] Preferably, the unpackaged sensor includes: a microelectrode layer, a dielectric layer, and a microsensor array layer; The microelectrode layer, the dielectric layer, and the microsensor array layer are stacked sequentially. The first positioning hole and the third positioning hole pass through the microelectrode layer, the dielectric layer and the microsensor array layer in sequence.

[0016] This invention also provides a modular multifunctional contact pressure anchoring test method, which uses the above-mentioned modular multifunctional contact pressure anchoring test device and includes the following steps: Step S1: Place the microelectrode layer of the unencapsulated sensor on the positioning seat of the positioning and registration module, and cooperate with the first positioning component and the second positioning component on the positioning and registration module through the first positioning hole and the fourth positioning hole; Step S2: Stack a layer of conductive adhesive and a flexible flat cable of the signal conversion system module in sequence. Align the layers of the signal conversion system module by cooperating with the first positioning component through the second positioning hole. Make the first window area contact of the flexible flat cable make contact with the test point of the microelectrode layer through the conductive adhesive to establish an electrical connection. Step S3: Sequentially stack another layer of conductive adhesive of the signal conversion system module, the dielectric layer of the unencapsulated sensor, and the micro-sensor array layer of the unencapsulated sensor. The dielectric layer and the micro-sensor array layer cooperate with the first positioning member through the first positioning hole and with the second positioning member through the fourth positioning hole, so that the structure of each layer of the unencapsulated sensor is aligned, and the second window area contact of the flexible flat cable is aligned and contacted with the test point of the micro-sensor array layer through the conductive adhesive to establish an electrical connection. Step S4: According to the array specifications of the unencapsulated sensor, select the main weight of the corresponding pressure module, fit it into the second positioning member through the positioning hole, and use the hollow observation window in the middle of the pressure module to confirm whether the pressure array is aligned with the test array of the micro-sensor array layer. After alignment, put down the main weight to apply the basic pressure. Step S5: According to the test plan, a preset number of weight pieces are stacked on the connecting rod of the main weight to achieve tests of different pressure levels; Step S6: Connect the connector of the signal conversion system module to the multi-channel LCR tester, set the test parameters, and start the automatic scanning program; the multi-channel LCR tester collects the capacitance values ​​of each test point of the unpackaged sensor through a four-wire measurement method; Step S7: Repeat steps S5 and S6, adjust the number of weight pieces, obtain the capacitance response curve of the unencapsulated sensor under different pressures, and complete the pressure capacitance signal anchoring calibration.

[0017] Compared with the prior art, the present invention has the following beneficial effects: 1. This invention is specifically designed for unpackaged miniature flexible pressure sensor arrays. The positioning and registration module ensures precise alignment of each layer of the sensor structure, and the signal transfer system module is adapted to the special structure of unpackaged sensors, providing convenient testing conditions for the timed maintenance and dielectric layer replacement of unpackaged sensors.

[0018] 2. This invention can achieve multi-point parallel precise pressurization. The lower pressurization array of the customized detachable weight set realizes a one-to-one correspondence with the sensor test points. Compared with the traditional weight method, it can truly simulate the actual application scenario and significantly improve the accuracy. Compared with the precision control method, it realizes multi-point synchronous testing and improves efficiency by tens of times.

[0019] 3. This invention achieves high precision and high repeatability. The collaborative design of the positioning and registration module, signal conversion system module, and pressurization module, combined with a four-wire Kelvin interface, effectively eliminates the influence of contact resistance, ensuring the accuracy of interlayer alignment and measurement data, and providing good test repeatability. The application of conductive adhesive avoids electrical crosstalk between contacts, further improving measurement accuracy.

[0020] 4. This invention enables flexible pressure adjustment. By stacking different numbers of lightweight weights, multi-level pressure value testing can be easily achieved, meeting the full-range calibration requirements of the sensor. The visual design of the weight set (hollow observation window) ensures alignment accuracy.

[0021] 5. This invention can achieve excellent signal integrity. The integrated shielded flexible cable and the structural design with low parasitic parameters ensure that the signal path from the sensor to the tester has a high signal-to-noise ratio and low distortion, which is suitable for the accurate acquisition of weak capacitance signals.

[0022] 7. This invention features modularity and versatility. The testing device connects to a universal multi-channel LCR tester via a standard interface, without relying on specific brands or models of equipment, thus exhibiting excellent versatility and scalability. Each functional module can be maintained and upgraded independently, reducing operating costs. By preparing weight sets of different specifications, it can be adapted to different sensor array spacings, expanding the application range of the testing device. Attached Figure Description

[0023] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 An isometric schematic diagram of the overall structure of the modular multifunctional contact pressure anchoring test device; Figure 2 An exploded view of the unencapsulated sensor being tested by the modular multifunctional contact pressure anchoring test device. Figure 3An isometric schematic diagram of the base of a modular multifunctional contact pressure anchoring test device; Figure 4 Isometric schematic diagram of the positioning and registration module and the signal transfer system module of the modular multifunctional contact pressure anchoring test device; Figure 5 A schematic diagram of the connection end between the flexible flat cable and the sensor in the signal transfer system module of the modular multi-functional contact pressure anchoring test device. Figure 6 An isometric schematic diagram of the pressurization module of the modular multifunctional contact pressure anchoring test device; Figure 7 A bottom view of the stainless steel main weight of the modular multifunctional contact pressure anchoring test device.

[0024] The diagram shows: Detailed Implementation

[0025] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0026] Example 1 like Figures 1 to 7 As shown, this embodiment provides a modular multifunctional contact pressure anchoring test device, including: a base 1, a positioning and registration module 2, a signal conversion system module 3, and a pressurization module 4; the positioning and registration module 2, the signal conversion system module 3, and the pressurization module 4 are disposed on the base 1; the first positioning element on the positioning and registration module 2 cooperates with the first positioning hole on the unencapsulated sensor 5, and cooperates with the second positioning hole on the signal conversion system module 3, the second positioning hole is aligned with the first positioning hole, so that the layers of the unencapsulated sensor 5 and the layers of the signal conversion system module 3 are vertically aligned, and so that... The contacts of the signal conversion system module 3 are aligned with the test points of the unpackaged sensor 5; the second positioning element on the positioning and registration module 2 cooperates with the third positioning hole on the pressure module 4 and with the fourth positioning hole on the unpackaged sensor 5, and the third positioning hole and the fourth positioning hole are aligned so that the pressure array of the pressure module 4 is aligned with the test array of the unpackaged sensor 5; the first connection end of the signal conversion system module 3 is connected to the unpackaged sensor 5; the second connection end of the signal conversion system module 3 is connected to the multi-channel LCR tester; the pressure module 4 is used to apply pressure to the test points of the unpackaged sensor 5.

[0027] The base 1 includes: a base body 1-1, a first connecting member 1-2, a horizontal slider 1-3, and a vertical limiter 1-4; the first connecting member 1-2 is disposed on the base body 1-1, and the horizontal slider 1-3 and the vertical limiter 1-4 are disposed on the first connecting member 1-2; the horizontal slider 1-3 can move vertically on the first connecting member 1-2, and the first connecting member 1-2 is provided with a limiting member that can limit and fix the horizontal slider 1-3; the pressurizing module 4 is connected to the first connecting member 1-2 through the horizontal slider 1-3 and the vertical limiter 1-4. The positioning and registration module 2 includes: a positioning seat 2-1, a first positioning member, and a second positioning member; the first positioning member is a sensor positioning pin 2-3, and the second positioning member is a pressurizing positioning pin 2-2; the positioning seat 2-1 is disposed on the base 1, and the pressurizing positioning pin 2-2 and the sensor positioning pin 2-3 are disposed on the positioning seat 2-1.

[0028] The signal conversion system module 3 includes: conductive adhesive 3-1, connector 3-2, and flexible flat cable 3-3; the flexible flat cable 3-3 is disposed on the base 1; one end of the flexible flat cable 3-3 forms the first connection end of the signal conversion system module 3, and is connected to the unencapsulated sensor 5 through the conductive adhesive 3-1; the other end of the flexible flat cable 3-3 forms the second connection end of the signal conversion system module 3, and is connected to the multi-channel LCR tester through the connector 3-2.

[0029] The pressurization module 4 includes: a pressure rod handle 4-1, a spring pressure rod 4-2, a second connecting piece 4-3, an auxiliary positioning horizontal pressure plate 4-4, a foot pressure plate 4-5, a main weight 4-6, and a weight piece 4-7; the spring pressure rod 4-2 is mounted on the vertical limiter 1-4 of the base 1 and can move up and down vertically on the vertical limiter 1-4; the pressure rod handle 4-1 is connected to one end of the spring pressure rod 4-2, and by raising or lowering the pressure rod handle 4-1, the spring pressure rod 4-2 can be driven to move up and down vertically within the sleeve limiting structure 1-4-1; the spring pressure rod 4-2 The other end is connected to the auxiliary positioning horizontal pressure plate 4-4 via the second connector 4-3; the auxiliary positioning horizontal pressure plate 4-4 is slidably connected to the first connector 1-2 of the base 1 via the horizontal slider 1-3 of the base 1; the foot pressure plate 4-5 and the main weight 4-6 are set on the auxiliary positioning horizontal pressure plate 4-4; the weight piece 4-7 is set on the main weight 4-6; the main weight 4-6 is provided with a second positioning hole; the foot pressure plate 4-5 is used to press down on each foot of the unencapsulated sensor 5; the main weight 4-6 and the weight piece 4-7 are used to apply pressure to the test points of the unencapsulated sensor 5. The pressurization module 4 also includes: a third connecting member 4-8; the vertical limiter 1-4 of the base 1 is provided with a sleeve limiting structure 1-4-1 and a rotation limiting structure 1-4-2 at both ends; the sleeve limiting structure 1-4-1 is sleeved on the spring pressure rod 4-2, and the spring pressure rod 4-2 can move vertically within the sleeve limiting structure 1-4-1; one end of the spring pressure rod 4-2 is rotatably connected to one end of the third connecting member 4-8, the other end of the third connecting member 4-8 is rotatably connected to the first connection point of the pressure rod handle 4-1, and the second connection point of the pressure rod handle 4-1 is rotatably connected to the rotation limiting structure 1-4-2. The main weight 4-6 is provided with a connecting rod 4-6-1, and the weight piece 4-7 is installed on the connecting rod 4-6-1; the foot pressure plate 4-5 is provided with a fifth positioning hole corresponding to the first positioning hole, and the second positioning member of the positioning and registration module 2 can pass through the first positioning hole and the fifth positioning hole in sequence. The main weight body 4-6 is made of stainless steel, and the weight plates 4-7 are made of acrylic.

[0030] The unpackaged sensor 5 includes: a microelectrode layer 5-1, a dielectric layer 5-2, and a microsensor array layer 5-3; the microelectrode layer 5-1, the dielectric layer 5-2, and the microsensor array layer 5-3 are stacked sequentially; the first positioning hole and the third positioning hole pass through the microelectrode layer 5-1, the dielectric layer 5-2, and the microsensor array layer 5-3 sequentially.

[0031] This embodiment also provides a modular multifunctional contact pressure anchoring test method, which uses the above-mentioned modular multifunctional contact pressure anchoring test device and includes the following steps: Step S1: Place the microelectrode layer 5-1 of the unencapsulated sensor 5 on the positioning seat 2-1 of the positioning and registration module 2, and cooperate with the first positioning component and the second positioning component on the positioning and registration module 2 through the first positioning hole and the fourth positioning hole; Step S2: Stack the conductive adhesive 3-1 and the flexible flat cable 3-3 of the signal conversion system module 3 in sequence. Align the layers of the signal conversion system module 3 by cooperating with the first positioning component through the second positioning hole. Make the first window area contact of the flexible flat cable 3-3 make contact with the test point of the microelectrode layer 5-1 through the conductive adhesive to establish an electrical connection. Step S3: Sequentially stack another layer of conductive adhesive 3-1 of the signal transfer system module 3, dielectric layer 5-2 of the unencapsulated sensor 5, and micro-sensor array layer 5-3 of the unencapsulated sensor 5. The dielectric layer 5-2 and the micro-sensor array layer 5-3 cooperate with the first positioning member through the first positioning hole and with the second positioning member through the fourth positioning hole, so that the structure of each layer of the unencapsulated sensor 5 is aligned, and the second window area contact of the flexible flat cable 3-3 is aligned and contacted with the test point of the micro-sensor array layer 5-3 through the conductive adhesive 3-1 to establish an electrical connection. Step S4: According to the array specifications of the unencapsulated sensor 5, select the main weight 4-6 of the corresponding pressure module 4, insert the second positioning piece through the positioning hole, and use the hollow observation window in the middle of the pressure module 4 to confirm whether the pressure array is aligned with the test array of the micro-sensor array layer 5-3. After alignment, put down the main weight 4-6 to apply the basic pressure. Step S5: According to the test plan, a preset number of weight pieces 4-7 are stacked on the connecting rod of the main weight 4-6 to achieve tests of different pressure levels; Step S6: Connect connector 3-2 of signal conversion system module 3 to multi-channel LCR tester, set test parameters, and start automatic scanning program; multi-channel LCR tester collects capacitance values ​​of each test point of non-packaged sensor 5 through four-wire measurement method; Step S7: Repeat steps S5 and S6, adjust the number of weight pieces 4-7, obtain the capacitance response curve of the unencapsulated sensor 5 under different pressures, and complete the pressure-capacitance signal anchoring calibration.

[0032] Example 2 Those skilled in the art can understand this embodiment as a more specific description of Embodiment 1.

[0033] The purpose of this embodiment is to overcome the shortcomings of the prior art and provide a modular, multifunctional contact pressure anchoring test device and method with reasonable structure, strong applicability, and high testing accuracy. This test device is specifically designed for unpackaged miniature flexible pressure sensor arrays, aiming to achieve multi-point parallel precise pressurization, precise alignment of sensor layers, low-noise, high-fidelity electrical connections, and rapid and reliable connection to general-purpose multi-channel testers. This provides accurate, efficient, and repeatable pressure-capacitance signal anchoring tests for unpackaged miniature flexible pressure sensor arrays.

[0034] To achieve the above objectives, this embodiment provides a modular multifunctional contact pressure anchoring test device for anchoring pressure-capacitance signals of an unpackaged miniature flexible pressure sensor array, comprising: a. Positioning and Registration Module: Composed of an array of pins on the base, this module has a dual positioning function: firstly, it precisely mates with the positioning holes on the unencapsulated flexible pressure sensor array to ensure accurate vertical alignment of the sensor's structural layers (upper electrode layer, dielectric layer, and lower electrode layer); secondly, it mates with the positioning holes of the stainless steel main weight in the pressurization module to achieve precise alignment between the lower pressurization array of the main weight and the sensor's test point array. This module is a key structure for ensuring test repeatability and accuracy.

[0035] b. Signal conversion system module: This includes a customized flexible circuit board cable. One end of the cable connects to the pins of the unpackaged sensor array, and the other end has a standard interface for connecting to a multi-channel LCR tester. Preferably, the cable integrates a shielding layer to suppress electromagnetic interference and uses a four-wire Kelvin interface to eliminate the influence of contact resistance, ensuring high-fidelity transmission of weak capacitive signals.

[0036] c. Pressurization module: Includes a customized, detachable weight set, specifically designed for miniature flexible pressure sensor arrays, featuring the following innovative structure: c1. Main Weight: The lower part has a pressure array, whose pressure points correspond one-to-one with the sensor test point array, achieving precise point-to-point pressure application and realistically simulating the pressure distribution in actual application scenarios; the middle part has a hollow observation window for visually checking the alignment of the pressure array and the sensor test array; the upper part has a connecting rod structure for stacking lightweight weight pieces. The main weight body has positioning holes that match the positioning and registration module.

[0037] c2. Weight plates: These can be stacked and installed on the main weight body connecting rod to achieve precise adjustment of multi-level pressure values, meeting different test pressure requirements. A perforated observation window is provided in the center of the weight plate for continuous observation of the alignment status during pressurization.

[0038] This pressurization module innovatively solves the challenge of multi-point parallel and precise pressurization in the testing of miniature pressure sensor arrays. Compared with the conventional weight method, it has higher accuracy and repeatability, and compared with the precision control method, it has higher efficiency. To adapt to different sensor array spacings, main weights and lightweight weight plates of different specifications can be fabricated, demonstrating good versatility and scalability.

[0039] Example 3 Those skilled in the art can understand this embodiment as a more specific description of Embodiment 1 and Embodiment 2.

[0040] like Figure 1 As shown, this embodiment provides a modular multifunctional contact pressure anchoring test device, including a base 1, a positioning and registration module 2, a signal conversion system module 3, and a pressurization module 4.

[0041] like Figure 2 As shown, the non-encapsulated sensor 5 of the modular multifunctional contact pressure anchoring test device in this embodiment includes a microelectrode layer 5-1, a dielectric layer 5-2, and a microsensor array layer 5-3.

[0042] like Figure 3 As shown, the base 1 includes a base body 1-1, a first connecting member 1-2, a horizontal slider 1-3, and a vertical limiter 1-4. The base body 1-1 is a sheet metal base.

[0043] like Figure 4 , 5 As shown, the positioning and registration module 2 consists of two sets of pin arrays mounted on the positioning base 2-1, and is made of stainless steel. The signal transfer system module 3 includes conductive adhesive 3-1, connector 3-2, and flexible flat cable 3-3. The conductive adhesive 3-1 is anisotropic conductive adhesive. The connector is a standard connector.

[0044] The pressure positioning pin 2-2 has a diameter of 2.95mm and is used for positioning the weight. Its height is determined by the thickness of the main weight, and in this embodiment, it is 8mm. Its position corresponds to the positioning holes of the two main weights. Eight pins are arranged in a double rectangle, with the spacing determined by the specific sensor size. The sensor positioning pin 2-3 has a diameter of 1.95mm and its height is determined by the total thickness of the sensor, and in this embodiment, it is 4mm. Its position corresponds to the positioning holes of the stainless steel main weight. Four pins are arranged linearly, with the spacing determined by the specific sensor size. The sensor positioning pin 2-3 has a diameter of 1.95mm and its height is determined by the total thickness of the sensor, and in this embodiment, it is 4mm. Its position corresponds to the positioning holes of the non-encapsulated sensor 5 and the conductive adhesive 3-1 of the signal conversion system module. Four pins are arranged linearly, with the spacing determined by the specific sensor size. One end of the flexible flat cable 3-3 is connected to the pins of the microelectrode layer 5-1 and the microsensor array layer 5-3 via conductive adhesive 3-1, and the other end is connected to the connector 3-2 via soldering.

[0045] The flexible flat cable 3-3 has windows on the top and bottom sides, with a downward-facing window in the middle T-section connecting to a single pin of the microelectrode layer 5-1; the left and right sides have upward-facing windows connecting to the pins of the microsensor array layer 5-3. The conductive adhesive 3-1 is made of silver-silicone rubber composite material, incorporating oriented conductive gold particles. This gives the material good conductivity in the vertical direction (Z-direction) while maintaining insulation properties in the horizontal direction (XY plane), effectively preventing electrical crosstalk between adjacent contacts.

[0046] The flexible flat cable 3-3 adopts a double-layer structure, with a polyimide insulation layer is used to isolate the signal layer and the ground shielding layer, effectively suppressing electromagnetic interference. Connector 3-2 connects to the connector slot in the base body 1-1 via a plug-in structure. It is designed with a four-wire Kelvin interface and can be directly connected to commercially available multi-channel LCR testers (such as Keysight E4980AL or similar equipment).

[0047] like Figure 6 As shown, the pressurization module includes a sensor foot pressurization end and a sensor test point pressurization end. The sensor foot pressurization end includes a pressure rod handle 4-1, a spring pressure rod 4-2, a second connecting piece 4-3, an auxiliary positioning horizontal pressure plate 4-4, and a foot pressure plate 4-5. The sensor test point pressurization end includes a main weight 4-6 and a weight plate 4-7, which are the core innovative components of this invention. The main weight 4-6 is a stainless steel main weight body, and the weight plate 4-7 is a lightweight acrylic weight plate.

[0048] The handle 4-1 is connected to the top of the vertical limiter 1-4 via a shaft, controlling the spring pressure rod 4-2 to move vertically up and down within the vertical limiter 1-4. The auxiliary positioning horizontal pressure plate 4-4 is connected to the spring pressure rod 4-2 via the second connector 4-3 and to the base 1 via the horizontal slider 1-3, achieving double horizontal alignment. The foot pressure plate 4-5 is directly opposite the sensor positioning pin 2-3 and has a positioning hole corresponding to the sensor positioning pin 2-3. When the handle 4-1 is pressed down, it causes the spring pressure rod 4-2, the second connector 4-3, the auxiliary positioning horizontal pressure plate 4-4, and the foot pressure plate 4-5 to press down simultaneously, ultimately achieving a stable electrical connection from top to bottom: the micro-sensor array layer 5-3, the conductive adhesive 3-1, and the flexible flat cable 3-3 with an upward window area; and the flexible flat cable 3-3 with a downward window area, the conductive adhesive 3-1, and the microelectrode layer 5-1.

[0049] like Figure 7 As shown, to verify the feasibility of this invention for different sensor array spacings, two specifications of weight sets were prepared: In one embodiment: a 1×16 sensor array is adapted to a weight set.

[0050] The main weights 4-6 are made of 304 stainless steel and have a total mass of 280g. The lower pressure array consists of 1×16 cylindrical protrusions, each with a diameter of 0.5mm and a height of 2mm, precisely corresponding to the microsensor array layer 5-3 to achieve point-to-point pressure and ensure that the initial pressure at each contact point is 17.5g. The central hollow observation window is a rectangular opening with a width of 4mm, allowing the operator to visually confirm the alignment of the pressure array with the microsensor array layer 5-3. The upper connecting rod is a cylinder with a diameter of 3mm and a height of 15mm, used to fix the stacked lightweight weight pieces 4-7. The main weights 4-6 have 3mm diameter positioning holes at their four corners, which cooperate with the pins of the positioning and registration module, controlling the positioning gap to within 0.1mm.

[0051] The corresponding weight plate 4-7 is a transparent rectangular structure with a 4mm wide observation window in the center. It is 1mm thick and weighs 1.6g per piece to ensure that the pressure applied to each contact point is 0.1g each time. Multiple weight plates 4-7 can be stacked according to testing requirements to achieve precise pressure gradient adjustment.

[0052] In another embodiment 2: a 1×21 sensor array is adapted to a weight set.

[0053] The main weight 4-6 is made of 304 stainless steel and has a total mass of 367.5g. The lower pressure array consists of 1×21 cylindrical protrusions, each with a diameter of 0.5mm and a height of 2mm, precisely corresponding to the micro-sensor array layer 5-3 to achieve point-to-point pressure and ensure that the initial pressure at each contact point is 17.5g. The central hollow observation window is a rectangular opening with a width of 4mm, allowing the operator to visually confirm the alignment of the pressure array with the micro-sensor array layer 5-3. The upper connecting rod is a cylinder with a diameter of 3mm and a height of 15mm, used to fix the stacked lightweight weight pieces 4-7. The main weight body 4-6 has 3mm diameter positioning holes at its four corners, which cooperate with the pins of the positioning and registration module, controlling the positioning gap to within 0.1mm.

[0054] The corresponding weight sheet 4-7 is a transparent rectangular structure with a 4mm wide observation window in the center. It is 1mm thick and weighs 2.1g per piece to ensure that the pressure applied to each contact point is 0.1g each time. Weight sheet 4-7 is laser-cut to ensure weight consistency and stacking stability.

[0055] The two weight sets are designed with the same principle. By adjusting the total mass of the main weights 4-6 and the mass of the lightweight weight pieces 4-7, the same single-point pressure is applied to the micro-sensor array layers 5-3 with different numbers of test points, thus realizing the versatility and expandability of the test device.

[0056] In actual use, the operation procedure is as follows: 1) Place the microelectrode layer 5-1 of the unencapsulated sensor 5 on the positioning seat 2-1 of the positioning and registration module 2, and ensure accurate positioning by cooperating with the pressure positioning pin 2-2 and the sensor positioning pin 2-3 through the positioning hole.

[0057] 2) Stack conductive adhesive 3-1 and flexible flat cable 3-3 in sequence. Each layer is aligned with the sensor positioning pin 2-3 through positioning holes to ensure precise alignment of each layer. The contact point of the upward-opening window area of ​​flexible flat cable 3-3 is aligned with the test point of microelectrode layer 5-1 to establish an electrical connection.

[0058] 3) The conductive adhesive 3-1, dielectric layer 5-2, and microsensor array layer 5-3 are stacked sequentially. The conductive adhesive 3-1 engages with the sensor positioning pin 2-3 via positioning holes. Similarly, the dielectric layer 5-2 and microsensor array layer 5-3 engage with the pressure positioning pin 2-2 and sensor positioning pin 2-3 via positioning holes, ensuring precise alignment of each layer. For sensors using hydrogel as the dielectric layer, the new dielectric layer can be easily replaced.

[0059] The contact array in the downward-facing window area of ​​the flexible flat cable 3-3 is aligned and contacted with the test array in the microsensor array layer 5-3 to establish an electrical connection. The properties of the conductive adhesive ensure that the signals at each contact are independent and free from crosstalk.

[0060] 4) According to the specifications of the non-encapsulated sensor array 5 (1×16 or 1×21), select the corresponding main weight 4-6, insert the pressure positioning pin 2-2 through the positioning hole, and use the central hollow observation window to confirm that the pressure array and the test array of the sensor micro-sensor array layer 5-3 are precisely aligned. Then gently put down the main weight 4-6 to apply the basic pressure (17.5g pressure at each contact).

[0061] 5) According to the test plan, a corresponding number of lightweight weight pieces 4-7 are stacked on the main weight 4-6 connecting rod to achieve different pressure levels. For example, for a 1×16 array, stacking 10 weight pieces 4-7 (1.6g each) increases the pressure at each contact point by 1g; for a 1×21 array, stacking 10 weight pieces 4-7 (2.1g each) also increases the pressure at each contact point by 1g. The alignment status can be continuously confirmed through the perforated observation window on the weight piece 4-7.

[0062] 6) Connect connector 3-2 of the signal conversion system module to the multi-channel LCR tester, set the test parameters (e.g., frequency 1kHz, test voltage 1V), and start the automatic scanning program. The tester uses a four-wire measurement method to quickly acquire the capacitance values ​​of each test point in the sensor array 5, completing a single full array measurement in approximately 30 seconds.

[0063] 7) Repeat steps 5-6, change the number of weights 4-7, obtain the capacitance response curve of sensor 5 under different pressures, and complete the pressure-capacitance signal anchoring calibration.

[0064] 8) After the test, remove the weight pieces 4-7, the main weight 4-6, and the sensor 5 in sequence. The testing device can then be quickly prepared for the next test.

[0065] Experimental results show that, compared with the traditional weight method, testing the unencapsulated miniature flexible pressure sensor array 5 using the testing device of this invention improves the testing accuracy by approximately 40% and reduces the repeatability error to within 3%; compared with the precision control single-point method, the testing efficiency is improved by approximately 15 times. Through the application of conductive adhesive 3-1, the crosstalk between contacts is less than 1%, and the signal independence is good. This testing device provides powerful tool support for the research, calibration, and performance evaluation of the unencapsulated miniature flexible pressure sensor 5.

[0066] This invention provides accurate, efficient, and repeatable pressure-capacitance signal anchoring tests for unpackaged miniature flexible pressure sensor arrays.

[0067] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0068] Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A modular multi-functional contact pressure anchorage testing device, characterized by, The base (1), the positioning registration module (2), the signal switching system module (3) and the pressurization module (4) are arranged on the base (1). The first positioning member on the positioning registration module (2) is matched with the first positioning hole on the non-encapsulated sensor (5) and the second positioning hole on the signal switching system module (3), the second positioning hole is aligned with the first positioning hole, so that the layers of the non-encapsulated sensor (5) and the layers of the signal switching system module (3) are aligned, and the contact of the signal switching system module (3) is aligned with the test point of the non-encapsulated sensor (5). The second positioning member on the positioning registration module (2) is matched with the third positioning hole on the pressurization module (4) and the fourth positioning hole on the non-encapsulated sensor (5), the third positioning hole is aligned with the fourth positioning hole, so that the pressurization array of the pressurization module (4) is aligned with the test array of the non-encapsulated sensor (5). The first connecting end of the signal switching system module (3) is connected with the non-encapsulated sensor (5), and the second connecting end of the signal switching system module (3) is connected with the multi-channel LCR tester. The pressurization module (4) is used for pressurizing the test point of the non-encapsulated sensor (5). The base (1) comprises a base body (1-1), a first connecting member (1-2), a horizontal sliding block (1-3) and a vertical stopper (1-4). The first connecting member (1-2) is arranged on the base body (1-1), and the horizontal sliding block (1-3) and the vertical stopper (1-4) are arranged on the first connecting member (1-2).

2. The modular, multi-functional contact pressure anchoring test device of claim 1, wherein, The horizontal sliding block (1-3) can move on the first connecting member (1-2) in the vertical direction, and the first connecting member (1-2) is provided with a limiting member capable of limiting and fixing the horizontal sliding block (1-3). The pressurization module (4) is connected with the first connecting member (1-2) through the horizontal sliding block (1-3) and the vertical stopper (1-4). The positioning registration module (2) comprises a positioning seat (2-1), a first positioning member and a second positioning member. The first positioning member is a sensor positioning pin (2-3), and the second positioning member is a pressurization positioning pin (2-2).

3. The modular, multi-functional contact pressure anchoring test device of claim 1, wherein, The positioning seat (2-1) is arranged on the base (1), and the pressurization positioning pin (2-2) and the sensor positioning pin (2-3) are arranged on the positioning seat (2-1). The signal switching system module (3) comprises conductive glue (3-1), a connector (3-2) and a flexible flat cable (3-3). The flexible flat cable (3-3) is arranged on the base (1).

4. The modular, multi-functional contact pressure anchoring test device of claim 1, wherein, One end of the flexible flat cable (3-3) forms the first connecting end of the signal switching system module (3), and is connected with the non-encapsulated sensor (5) through the conductive glue (3-1). ​ ​ The other end of the flexible flat cable (3-3) forms a second connecting end of the signal switching system module (3), and is connected with the multi-channel LCR tester through the connector (3-2).

5. The modular, multi-functional contact pressure anchoring test device of claim 1, wherein, The pressing module (4) comprises a pressing lever handle (4-1), a spring pressing rod (4-2), a second connecting piece (4-3), an auxiliary positioning horizontal pressing plate (4-4), a foot position pressing plate (4-5), a main weight (4-6) and a weight sheet (4-7). The spring pressing rod (4-2) is arranged on the vertical position limiter (1-4) of the base (1) and can be lifted and lowered in the vertical direction on the vertical position limiter (1-4). The pressing lever handle (4-1) is connected with one end of the spring pressing rod (4-2), and the spring pressing rod (4-2) can be lifted and lowered in the vertical direction in the sleeve limiting structure (1-4-1) by lifting or lowering the pressing lever handle (4-1). The other end of the spring pressing rod (4-2) is connected with the auxiliary positioning horizontal pressing plate (4-4) through the second connecting piece (4-3), and the auxiliary positioning horizontal pressing plate (4-4) is slidingly connected with the connecting piece (1-2) of the base (1) through the horizontal sliding block (1-3) of the base (1). The foot position pressing plate (4-5) and the main weight (4-6) are arranged on the auxiliary positioning horizontal pressing plate (4-4), the weight sheet (4-7) is arranged on the main weight (4-6), and the main weight (4-6) is provided with the second positioning hole. The foot position pressing plate (4-5) is used for pressing each foot position of the non-encapsulated sensor (5), and the main weight (4-6) and the weight sheet (4-7) are used for applying pressure to the test point of the non-encapsulated sensor (5).

6. The modular, multi-functional contact pressure anchoring test device of claim 5, wherein, The pressing module (4) further comprises a third connecting piece (4-8). Both ends of the vertical position limiter (1-4) of the base (1) are respectively provided with a sleeve limiting structure (1-4-1) and a rotating limiting structure (1-4-2). The sleeve limiting structure (1-4-1) is sleeved on the spring pressing rod (4-2), and the spring pressing rod (4-2) can move in the vertical direction in the sleeve limiting structure (1-4-1). One end of the spring pressing rod (4-2) is rotatably connected with one end of the third connecting piece (4-8), the other end of the third connecting piece (4-8) is rotatably connected with a first connecting point of the pressing lever handle (4-1), and a second connecting point of the pressing lever handle (4-1) is rotatably connected with the rotating limiting structure (1-4-2).

7. The modular, multi-functional contact pressure anchoring test device of claim 5, wherein, The main weight (4-6) is provided with a connecting rod (4-6-1), and the weight sheet (4-7) is installed on the connecting rod (4-6-1). The foot position pressing plate (4-5) is provided with a fifth positioning hole corresponding to the first positioning hole, and the second positioning piece of the positioning and registering module (2) can pass through the first positioning hole and the fifth positioning hole in sequence.

8. The modular, multi-functional contact pressure anchoring test device of claim 5, wherein, The main weight body (4-6) is a stainless steel weight, and the weight sheet (4-7) is an acrylic weight sheet.

9. The modular, multi-functional contact pressure anchoring test device of claim 1, wherein, The non-encapsulated sensor (5) comprises a micro-electrode layer (5-1), a dielectric layer (5-2), and a micro-sensor array layer (5-3); The micro-electrode layer (5-1), the dielectric layer (5-2), and the micro-sensor array layer (5-3) are sequentially stacked; The first positioning hole and the third positioning hole sequentially penetrate the micro-electrode layer (5-1), the dielectric layer (5-2), and the micro-sensor array layer (5-3).

10. A modular multi-functional contact pressure anchoring test method, characterized by, The modular multifunctional contact pressure anchoring test device according to any one of claims 1 to 9 comprises the following steps: Step S1: Place the micro-electrode layer (5-1) of the non-encapsulated sensor (5) on the positioning seat (2-1) of the positioning and registration module (2), and cooperate with the first positioning member and the second positioning member on the positioning and registration module (2) through the first positioning hole and the fourth positioning hole; Step S2: Stack a layer of conductive adhesive (3-1) and a flexible flat cable (3-3) of the signal conversion system module (3) in sequence, cooperate with the first positioning member through the second positioning hole, align the layers of the signal conversion system module (3), and make the first windowed area contact of the flexible flat cable (3-3) contact the test points of the micro-electrode layer (5-1) through the conductive adhesive (3-1) to establish electrical connection; Step S3: Stack another layer of conductive adhesive (3-1) of the signal conversion system module (3), the dielectric layer (5-2) of the non-encapsulated sensor (5), and the micro-sensor array layer (5-3) of the non-encapsulated sensor (5) in sequence, cooperate with the first positioning member through the first positioning hole, cooperate with the second positioning member through the fourth positioning hole, align the layers of the non-encapsulated sensor (5), and make the second windowed area contact of the flexible flat cable (3-3) contact the test points of the micro-sensor array layer (5-3) through the conductive adhesive (3-1) to establish electrical connection; Step S4: According to the array specification of the non-encapsulated sensor (5), select the corresponding main weight (4-6) of the pressure module (4), insert it into the second positioning member through the positioning hole, use the hollow observation window in the middle of the pressure module (4) to confirm whether the pressure array is aligned with the test array of the micro-sensor array layer (5-3), and then place the main weight (4-6) to apply the basic pressure; Step S5: According to the test scheme, stack a predetermined number of weight pieces (4-7) on the connecting rod of the main weight (4-6) to realize testing of different pressure levels; Step S6: Connect the connector (3-2) of the signal conversion system module (3) to a multi-channel LCR tester, set the test parameters, and start the automatic scanning program; the multi-channel LCR tester collects the capacitance values of each test point of the non-encapsulated sensor (5) through four-wire measurement. Step S7: repeat step S5 and step S6, adjust the number of the weight pieces (4-7), obtain the capacitance response curve of the non-encapsulated sensor (5) under different pressures, complete the pressure-capacitance signal anchor calibration.

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