Elastomer for a six-dimensional force sensor and six-dimensional force sensor

By setting a novel layout of connecting frame and sensitive beam between the fixed end and measuring end of the six-dimensional force sensor, the problems of insufficient anti-interference ability and deformation linearity of the elastomer are solved, and higher accuracy and stability are achieved.

CN121612469BActive Publication Date: 2026-07-24SINGULARITY INTELLIGENT CONTROL (SHANGHAI) TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SINGULARITY INTELLIGENT CONTROL (SHANGHAI) TECHNOLOGY CO LTD
Filing Date
2025-12-22
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing six-dimensional force sensors have poor anti-disturbance capability and deformation linearity when multi-dimensional forces are present, resulting in low accuracy.

Method used

A connecting frame is set between the fixed end and the measuring end. The four sides of the connecting frame form the first sensitive beam. The four second sensitive beams and the four third sensitive beams are arranged in a cross shape along the X and Y directions, respectively, to bear the deformation of forces in the three different directions of X, Y and Z. In particular, the first sensitive beam fully deforms in the Z direction, which improves the anti-disturbance capability.

Benefits of technology

This improved the anti-interference ability and deformation linearity of the elastomer, and enhanced the accuracy of the six-dimensional force sensor.

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Abstract

The application discloses a kind of six-dimensional force sensor elastomers and six-dimensional force sensor, six-dimensional force sensor elastomers include fixed end, measuring end;The gap formed between fixed end and measuring end is provided with connecting frame, four edges of connecting frame form a first sensitive beam respectively, adjacent first sensitive beam is connected together by connecting block;The middle part of the length direction of each first sensitive beam is connected to fixed end;Second sensitive beam is connected between adjacent connecting blocks, each second sensitive beam is connected with measuring end by a third sensitive beam;Among four second sensitive beams, two opposite sensitive beams extend along X direction to produce deformation in Y direction, and the other two opposite sensitive beams extend along Y direction to produce deformation in X direction, and four third sensitive beams are used to measure the deformation when measuring end is twisted on XY plane.The application improves the anti-interference ability of elastomer, so that the elastomer has relatively linear deformation.
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Description

Technical Field

[0001] This invention relates to the field of sensor technology, specifically to an elastic body for a six-dimensional force sensor and a six-dimensional force sensor. Background Technology

[0002] Six-dimensional force sensors are commonly used in robots. They can simultaneously measure forces in three directions (front, back, left, right, and up / down) and three rotational torques around the X, Y, and Z axes, enabling precise control of the robot. The core component of a six-dimensional force sensor includes a deformable elastic body. This elastic body typically comprises a ring-shaped fixed end and a measuring end located within the fixed end. The measuring end and the fixed end are connected by multiple sensitive beams. In existing technologies, the sensitive beams connecting the measuring end and the fixed end are arranged in a cross shape, corresponding to the four directions X+, X-, Y+, and Y-. When the measuring end is subjected to X-direction force, Y-direction force, Mz torque (rotational torque about the Z-axis), Mx (rotational torque about the X-axis), and My (rotational torque about the Y-axis), the deformation of the sensitive beams is significant, enabling the force sensor to obtain relatively clear feedback. However, due to the relatively large size of the sensitive beams in the Z-direction, the deformation of the sensitive beams is small when the measuring end is subjected to a Z-direction force. The positional change of the measuring end is similar to the positional change produced when the measuring end is subjected to a horizontal force, resulting in poor anti-interference capability of the elastic body and poor deformation linearity when multiple forces are present simultaneously. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the purpose of the present invention is to provide an elastomer for a six-dimensional force sensor and a six-dimensional force sensor, so as to solve the problems of poor anti-interference ability and deformation linearity of the elastomer in the prior art.

[0004] The objective of this invention is achieved through the following technical solution: The elastic body of the six-dimensional force sensor includes a fixed end and a measuring end; A fixed end surrounds the periphery of the measuring end. A connecting frame is provided in the gap formed between the inner edge of the fixed end and the outer edge of the measuring end. The four sides of the connecting frame form a first sensitive beam. Adjacent first sensitive beams are connected together by connecting blocks located at the corners of the connecting frame. The middle part of each first sensitive beam in the length direction is connected to the fixed end so that when the first sensitive beam is deformed, the two ends of the first sensitive beam can move relative to the middle part of the first sensitive beam in the Z direction. Adjacent connecting blocks are connected by a second sensitive beam, and each second sensitive beam is connected to the measuring end through a third sensitive beam; of the four second sensitive beams, two opposite second sensitive beams extend along the X direction to generate deformation in the Y direction, and the other two opposite second sensitive beams extend along the Y direction to generate deformation in the X direction. The four third sensitive beams are used to generate deformation when the measuring end is twisted in the XY plane.

[0005] According to an embodiment of the present invention, the elastic body of the six-dimensional force sensor has a connecting frame between the fixed end and the measuring end. The four sides of the connecting frame form a first sensitive beam, and four second sensitive beams and four third sensitive beams connect the measuring end to the four first sensitive beams on the connecting frame. The four second sensitive beams and four third sensitive beams are arranged in a cross shape in the X and Y directions. The elastic body has three transversely perpendicular sensitive beams in the four directions of X+, X-, Y+, and Y-. The three sensitive beams are used to bear the deformation of forces in the three different directions of X, Y, and Z. Especially in the Z direction, the first sensitive beams fully deform. In this way, when multidimensional forces are present, the anti-interference ability of the elastic body is improved, and the elastic body has a more linear deformation, thereby improving the accuracy of the six-dimensional force sensor.

[0006] In a preferred embodiment, the third sensitive beam extends from the middle of the second sensitive beam toward the center of the measuring end, such that two opposing third sensitive beams extend along the X direction and the other two third sensitive beams extend along the Y direction.

[0007] In a preferred embodiment, the fixed end is cylindrical, and its inner wall has four connecting bosses extending toward the center of the measuring end. The middle portions of the four first sensitive beams are respectively connected to the connecting bosses. The connecting bosses form a cantilever structure on the inner edge of the fixed end to connect the first sensitive beams and prevent interference between the first sensitive beams, the connecting blocks at the corners of the connecting frame, and the fixed end.

[0008] In a preferred embodiment, the measuring end is square, and four first sensitive beams are respectively arranged parallel to the four sides of the measuring end. An installation space is formed between the side of the measuring end and the first sensitive beams parallel to it. The four second sensitive beams are respectively located in the four installation spaces and are parallel to the four sides of the measuring end.

[0009] In a preferred embodiment, the four sides of the measuring end are each provided with a groove recessed towards the center of the measuring end. At least a portion of the third sensitive beam is placed within the groove, and the end of the third sensitive beam facing the center of the measuring end is connected to the inner end face of the groove. Because the grooves on the sides of the measuring end provide an inner line, at least a portion of the third sensitive beam is placed within these grooves. This ensures that the third sensitive beam has a relatively large length, allowing the sides of the measuring end to extend as far as possible towards the second sensitive beam. Consequently, the measuring end can extend a large volume in the XY plane. Thus, while ensuring a large assembly area for the measuring end, the third sensitive beam has sufficient length to meet deformation requirements.

[0010] In a preferred embodiment, the connecting boss is provided with a connecting hole that extends through the connecting boss from top to bottom.

[0011] In a preferred embodiment, the top surface of the second sensitive beam is flush with the top surface of the third sensitive beam, and the bottom surface of the second sensitive beam is flush with the bottom surface of the third sensitive beam; the first sensitive beam is located between the top and bottom surfaces of the second sensitive beam. Arranging the four first sensitive beams, four second sensitive beams, and four third sensitive beams on the same plane or almost on the same plane can minimize the processing difficulty, reduce the overall thickness of the elastomer, and thus reduce the space occupied by the elastomer inside the six-dimensional force sensor, making the overall structure of the six-dimensional force sensor more compact.

[0012] In a preferred embodiment, the top surface of the second sensitive beam is flush with the top surface of the connecting block, the bottom surface of the second sensitive beam is flush with the bottom surface of the connecting block, the distance between the upper surface of the first sensitive beam and the top surface of the connecting block is d1, and the distance between the lower surface of the first sensitive beam and the bottom surface of the connecting block is d2, where d1=d2.

[0013] In a preferred embodiment, the two ends of the second sensitive beam are respectively connected to the inner edges of two adjacent connecting blocks, and the outer edge of the first sensitive beam is flush with the outer edge of the connecting block, so as to form a clearance space between the first sensitive beam and the second sensitive beam to avoid the second sensitive beam. This clearance space is used to avoid the second sensitive beam when it deforms, and to prevent the second sensitive beam from interfering with the first sensitive beam when it deforms.

[0014] A six-dimensional force sensor, including the elastic body of the aforementioned six-dimensional force sensor.

[0015] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2for Figure 1 Top view.

[0017] In the diagram: 10. Fixed end; 11. Connecting boss; 12. Connecting hole; 21. First sensitive beam; 22. First sensitive beam; 23. First sensitive beam; 24. First sensitive beam; 31. Second sensitive beam; 32. Second sensitive beam; 33. Second sensitive beam; 34. Second sensitive beam; 41. Third sensitive beam; 42. Third sensitive beam; 43. Third sensitive beam; 44. Third sensitive beam; 50. Connecting block; 60. Measuring end; 61. Side; 62. Groove. Detailed Implementation

[0018] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments. Unless otherwise specified, the materials and equipment used in this embodiment are commercially available. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0019] In the description of this application, it should be understood that the terms "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In the description of this application, "a plurality of" means two or more, unless otherwise precisely specified.

[0020] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected," "linked," and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a connection through an intermediary, or a connection within two elements or an interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0021] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or apparatus.

[0022] Please refer to Figure 1 , 2 As shown, an elastic body for a six-dimensional force sensor according to the present invention includes a fixed end 10 and a measuring end 60. The fixed end 10 surrounds the periphery of the measuring end 60. Preferably, the geometric center of the measuring end 60 coincides with the geometric center of the fixed end 10 in the XY plane. A hollow gap is formed between the inner edge of the fixed end 10 and the outer edge of the measuring end 60. Four first sensitive beams, four second sensitive beams, and four third sensitive beams are arranged in the hollow gap. When the measuring end 60 is subjected to force in the X, Y, and Z directions and bears torques Mz, Mx, and My, the first sensitive beams, second sensitive beams, and third sensitive beams deform accordingly, causing the measuring end 60 to generate corresponding linear and angular displacements relative to the fixed end 10.

[0023] A connecting frame is provided in the gap formed between the inner edge of the fixed end 10 and the outer edge of the measuring end 60. The connecting frame is square or similar to a square. The four sides of the connecting frame form a first sensitive beam, so that the first sensitive beams 21, 22, 23 and 24 are distributed around the measuring end 60. Adjacent first sensitive beams are connected together by connecting blocks 50 located at the corners of the connecting frame. The middle part of each first sensitive beam in the length direction is connected to the corresponding position of the inner edge of the fixed end 10. The first sensitive beam has a relatively small size in the Z direction, making it a long strip plate structure placed on the XY plane. Since the middle part of the first sensitive beam is connected to the fixed end 10, the two ends of the first sensitive beam can move relative to the middle part of the first sensitive beam in the Z direction when the first sensitive beam is deformed. That is to say, the first sensitive beam can deform along the Z direction.

[0024] A second sensitive beam is provided between two adjacent connecting blocks 50. Each second sensitive beam is connected to the measuring end 60 through a third sensitive beam. Specifically, there are second sensitive beams 31, 32, 33, and 34 located inside the first sensitive beam 21, 22, 23, and 24 respectively between the connecting frame and the measuring end 60. The second sensitive beams 32 and 34 are arranged opposite to each other and both extend along the X direction. When the measuring end 60 is subjected to a Y-direction force, both of them deform along the Y direction. The second sensitive beams 31 and 33 are arranged opposite to each other and both extend along the Y direction. When the measuring end 60 is subjected to an X-direction force, both of them deform along the X direction.

[0025] The second sensitive beam 31 is connected to the measuring end 60 through the third sensitive beam 41, the second sensitive beam 32 is connected to the measuring end 60 through the third sensitive beam 42, the second sensitive beam 33 is connected to the measuring end through the third sensitive beam 43, and the second sensitive beam 34 is connected to the measuring end through the third sensitive beam 44. The four third sensitive beams are used to generate deformation of the measuring end 60 when it is torn in the XY plane.

[0026] See Figure 2 As shown, the elastomer of the present invention has three transversely perpendicular sensitive beams in the four directions of X+, X-, Y+, and Y- to detect forces in the three different directions of X, Y, and Z. The end faces of the three sensitive beams are perpendicular to each other and are used to bear the deformation of the forces in the three directions respectively.

[0027] The six-dimensional force sensor in working condition: When the measuring end 60 is subjected to a force Fx in the X direction, the second sensitive beam 31 and the second sensitive beam 33 deform, while the other sensitive beams do not deform and are in an anti-disturbance state. When the measuring end 60 is subjected to a force Fy in the Y direction, the second sensitive beam 32 and the second sensitive beam 34 deform, while the other sensitive beams do not deform and are in an anti-disturbance state. When the measuring end 60 is subjected to a force Fz in the Z direction, the first sensitive beams 21, 22, 23, and 24 deform, while the other sensitive beams do not deform and are in an anti-disturbance state. When the measuring end 60 is subjected to a torque of Mx, the first sensitive beam 22 and the first sensitive beam 24 deform, while the other sensitive beams do not deform and are in an anti-disturbance state. When the measuring end 60 is subjected to the torque My, the first sensitive beam 21 and the first sensitive beam 23 deform, while the other sensitive beams do not deform and are in an anti-disturbance state. When the measuring end 60 is subjected to a torque of Mz, the third sensitive beams 41, 42, 43, and 44 deform, while the other sensitive beams do not deform and are in an anti-disturbance state.

[0028] In this invention, a connecting frame is provided between the fixed end 10 and the measuring end 60. The four sides of the connecting frame form a first sensitive beam, and four second sensitive beams and four third sensitive beams connect the measuring end 60 to the four first sensitive beams on the connecting frame. The four second sensitive beams and four third sensitive beams are arranged in a cross shape in the X and Y directions. The elastic body has three transversely perpendicular sensitive beams in the four directions of X+, X-, Y+, and Y-. The three sensitive beams are used to bear the deformation of forces in the three different directions of X, Y, and Z. Especially in the Z direction, the first sensitive beams fully deform. In this way, when multidimensional forces exist, the anti-interference ability of the elastic body is improved, and the elastic body has a more linear deformation, thereby improving the accuracy of the six-dimensional force sensor.

[0029] In a preferred embodiment, the third sensitive beam extends from the middle of the second sensitive beam along its length toward the center of the measuring end 60. That is, the third sensitive beam is centrally located at the middle position along the length of the second sensitive beam, so that the opposite third sensitive beams 41 and 43 both extend along the X direction, and the opposite third sensitive beams 42 and 44 both extend along the Y direction.

[0030] The fixed end 10 has a cylindrical structure to accommodate the shape of a six-dimensional force sensor. Four connecting protrusions 11 extending towards the center of the measuring end 60 are provided on the inner wall of the fixed end 10. These four connecting protrusions 11 are distributed in the X+, X-, Y+, and Y- directions of the fixed end 10. The middle portions of the four first sensitive beams are respectively connected to the four connecting protrusions 11. Alternatively, it can be viewed as a sheet-like structure extending from both sides of each connecting protrusion 11, with each of the two sheet-like structures on either side of each connecting protrusion 11 forming a first sensitive beam. A cantilever structure is formed on the inner edge of the fixed end 10 by the connecting protrusions 11 to connect the first sensitive beams, preventing interference between the first sensitive beams and the connecting blocks 50 at the corners of the connecting frame and the fixed end 10.

[0031] Based on the fixed end 10 being configured as a cylindrical structure, the measuring end 60 can preferably be configured as a square. Four first sensitive beams are respectively arranged parallel to the four sides 61 of the measuring end 60, forming an installation space between the sides 61 of the measuring end 60 and the first sensitive beams parallel to them. An installation space is formed around the four sides 61 of the measuring end 60, and four second sensitive beams are respectively accommodated through these four installation spaces. Taking the structure of the inner part of the first sensitive beam 21 in the figure as an example, the first sensitive beam 21 is arranged parallel to the sides 61 of the measuring end 60, forming a long strip-shaped installation space between them. The second sensitive beam 31 is located in the installation space. The two ends of the second sensitive beam 31 can be connected to the two connecting blocks 50 located at the two ends of the first sensitive beam 21, thereby connecting the second sensitive beam 31 to the connecting frame.

[0032] The four sides 61 of the measuring end 60 are respectively provided with grooves 62 recessed towards the center of the side beam end 60. At least a portion of the third sensitive beam is placed in the grooves 62. The outer end of the third sensitive beam is connected to the middle of the second sensitive beam along its length, and the inner end faces the center of the measuring end 60 and is connected to the inner end face of the grooves 62. Because the grooves 62 with inner lines are provided on the sides 61 of the measuring end 60, at least a portion of the third sensitive beam is placed in the grooves 62. Under the premise of ensuring that the third sensitive beam has a large length, the sides 61 of the measuring end 60 can extend as far as possible towards the second sensitive beam, thereby allowing the measuring end 60 to extend a large volume in the XY plane. Thus, under the premise of ensuring that the measuring end 60 has a large assembly area, the third sensitive beam has sufficient length to meet the deformation requirements.

[0033] To facilitate the assembly of the elastomer into the six-dimensional force sensor, the aforementioned connecting boss 11 is provided with a connecting hole 12 that extends through the upper and lower connecting boss 11.

[0034] In this invention, the second and third sensitive beams are configured to have relatively large Z-axis dimensions, thereby forming a vertically arranged sheet-like structure. This facilitates deformation under horizontal forces while ensuring sufficient rigidity under Z+ or Z-axis forces, thus meeting the disturbance rejection requirements. The top and bottom surfaces of the second and third sensitive beams are flush. The first sensitive beam is positioned between the top and bottom surfaces of the second and third sensitive beams. By arranging all four first, second, and third sensitive beams on the same or nearly on the same plane, the manufacturing difficulty is minimized, the overall thickness of the elastomer is reduced, and the space occupied by the elastomer within the six-dimensional force sensor is reduced, resulting in a more compact overall structure.

[0035] The top surface of the second sensitive beam is flush with the top surface of the connecting block 50, and the mantle of the second sensitive beam is flush with the bottom surface of the connecting block 50. The distance between the upper surface of the first sensitive beam and the top surface of the connecting block 50 is d1, and the distance between the lower surface of the first sensitive beam and the bottom surface of the connecting block 50 is d2, where d1=d2. That is, at the connection between the first sensitive beam and the connecting block 50, the first sensitive beam is centrally positioned at the middle of the height direction of the connecting block 50, so that the first sensitive beam, the second sensitive beam, and the third sensitive beam are arranged on the same plane. In order to save radial space as much as possible and make the elastic body have the smallest possible external dimensions, the two ends of the second sensitive beam are respectively connected to the inner edges of two adjacent connecting blocks 50, and the outer edge of the first sensitive beam is flush with the outer edge of the connecting block 50. A clearance space is formed between the first sensitive beam and the second sensitive beam. This clearance space is used to avoid the second sensitive beam when it deforms, preventing interference between the second sensitive beam and the first sensitive beam when it deforms.

[0036] The six-dimensional force sensor of the present invention includes the elastic body of the six-dimensional force sensor described above. Other structures of the six-dimensional force sensor are the same as those in the prior art and will not be described in detail here.

[0037] Although only certain components and embodiments of this application have been illustrated and described, many modifications and alterations will be apparent to those skilled in the art without actually departing from the scope and spirit of the claims, such as variations in the size, dimensions, structure, shape and proportion of the various elements, installation arrangement, material use, color, orientation, etc.

[0038] The above embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of protection of the present invention. Any non-substantial changes and substitutions made by those skilled in the art based on the embodiments of the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. An elastic body for a six-dimensional force sensor, characterized in that, Includes fixed end and measuring end; A fixed end surrounds the periphery of the measuring end. A connecting frame is provided in the gap formed between the inner edge of the fixed end and the outer edge of the measuring end. The four sides of the connecting frame form a first sensitive beam. Adjacent first sensitive beams are connected together by connecting blocks located at the corners of the connecting frame. The middle part of each first sensitive beam in the length direction is connected to the fixed end so that when the first sensitive beam is deformed, the two ends of the first sensitive beam can move relative to the middle part of the first sensitive beam in the Z direction. Adjacent connecting blocks are connected by a second sensitive beam, and each second sensitive beam is connected to the measuring end through a third sensitive beam; of the four second sensitive beams, two opposite second sensitive beams extend along the X direction to generate deformation in the Y direction, and the other two opposite second sensitive beams extend along the Y direction to generate deformation in the X direction. The four third sensitive beams are used to generate deformation when the measuring end is twisted in the XY plane.

2. The elastic body of the six-dimensional force sensor as described in claim 1, characterized in that, The third sensitive beam extends from the middle of the second sensitive beam toward the center of the measuring end, such that two of the opposing third sensitive beams extend along the X direction and the other two extend along the Y direction.

3. The elastic body of the six-dimensional force sensor as described in claim 2, characterized in that, The fixed end is cylindrical, and the inner wall of the fixed end is provided with four connecting bosses extending toward the center of the measuring end. The middle parts of the four first sensitive beams are respectively connected to the connecting bosses.

4. The elastic body of the six-dimensional force sensor as described in claim 3, characterized in that, The measuring end is square, and four first sensitive beams are set parallel to the four sides of the measuring end. An installation space is formed between the side of the measuring end and the first sensitive beams parallel to it. The four second sensitive beams are located in the four installation spaces and are parallel to the four sides of the measuring end.

5. The elastic body of the six-dimensional force sensor as described in claim 4, characterized in that, The four sides of the measuring end are respectively provided with grooves that are recessed towards the center of the measuring end. At least a portion of the third sensitive beam is placed in the grooves, and the end of the third sensitive beam facing the center of the measuring end is connected to the inner end face of the groove.

6. The elastic body of the six-dimensional force sensor as described in claim 3, characterized in that, The connecting boss is provided with connecting holes that run through the upper and lower connecting bosses.

7. The elastic body of the six-dimensional force sensor as described in claim 1, characterized in that, The top surface of the second sensitive beam is flush with the top surface of the third sensitive beam, and the bottom surface of the second sensitive beam is flush with the bottom surface of the third sensitive beam; the first sensitive beam is located between the top and bottom surfaces of the second sensitive beam.

8. The elastic body of the six-dimensional force sensor as described in claim 7, characterized in that, The top surface of the second sensitive beam is flush with the top surface of the connecting block, and the bottom surface of the second sensitive beam is flush with the bottom surface of the connecting block. The distance between the upper surface of the first sensitive beam and the top surface of the connecting block is d1, and the distance between the lower surface of the first sensitive beam and the bottom surface of the connecting block is d2, where d1 = d2.

9. The elastic body of the six-dimensional force sensor as described in claim 8, characterized in that, The two ends of the second sensitive beam are respectively connected to the inner edges of two adjacent connecting blocks, and the outer edge of the first sensitive beam is flush with the outer edge of the connecting block, so as to form a clearance space between the first sensitive beam and the second sensitive beam for avoiding the second sensitive beam.

10. A six-dimensional force sensor, characterized in that, The elastic body includes the six-dimensional force sensor as described in any one of claims 1-9.