Semi-automatic checking and column filling machine

Abstract

The invention relates to a semi-automatic checking and column filling machine, which comprises a visual system, a column filling system, a column filling vacuum platform and a horizontal moving mechanism, the column supplementing system comprises a dispensing head, a column supplementing head and a column removing head; the column supplementing vacuum platform adsorbs the carrier and the column supply jig through vacuum, and a first positioning structure and a second positioning structure are arranged on the upper surface and are used for positioning the carrier and the column supply jig respectively; a first column falling area is arranged on the upper surface of a column supply jig base, a plurality of vertical open holes are evenly distributed in the first column falling area, the open holes comprise first column falling holes and first vent holes from top to bottom, the depth of the first column falling holes is smaller than the height of welding columns, the diameter of the first vent holes is smaller than the outer diameter of the welding columns, and first vacuum grooves which are concave upwards and communicated with the open holes are formed in the lower surface of the base. The horizontal moving mechanism drives the column supplementing vacuum platform, so that the product is moved to the position below the visual system, the dispensing head, the column supplementing head and the column removing head, and the column supplying jig is moved to the position below the column supplementing head. Only manual feeding is needed, jig auxiliary operation is easy and convenient, checking and repairing are automatically completed by a machine, and high efficiency, stability and reliability are achieved.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor equipment technology, and in particular relates to a semi-automatic inspection and patching machine. Background Technology

[0002] With the rapid development of integrated circuits and the continuous breakthroughs in Moore's Law, increasingly higher demands are being placed on device packaging processes. BGA (Ball Grid Array) packaging is widely used in production due to its advantages such as high pin count, high integration density, good heat dissipation, and high stability. CGA (Column Grid Array), also known as cylindrical grid array packaging, is based on ball grid array packaging, replacing solder balls with solder pillars to better absorb stress caused by the mismatch in thermal expansion coefficients between the substrate and the printed circuit board. Those using ceramic substrates are also called CCGA (Ceramic Column Grid Array).

[0003] Pillared-gate packaging offers advantages such as high reliability and excellent electrical and thermal properties, making it more reliable than ball-gate packaging. It can withstand pressure, shock, and harsh operating environments. However, it is more expensive and has a more complex manufacturing process, and is often used in military, aerospace, and other fields. Currently, it is mainly used in high-end fields such as military and aerospace, as well as some research institutes, primarily for small-scale production and process verification.

[0004] Solder balls are uniform, regular spheres, and the ball-planting process only needs to ensure they fall in the center of the pad. However, solder pillars have specific orientation requirements, necessitating that their flat ends fall in the center of the pad. Therefore, arranging the solder pillars vertically is the biggest challenge in achieving automated pillar planting. The mainstream process still relies primarily on manual labor, aided by specialized tooling, microscopes, and vibratory feeders. Currently, the applicant has achieved production verification of semi-automatic equipment for pillar planting. However, the inspection and repair of the products after pillar planting (the combination of the substrate and solder pillars carried by the carrier) heavily depends on manual labor, resulting in high operational difficulty, low efficiency, and insufficient reliability and stability. Summary of the Invention

[0005] Based on this, a semi-automatic column inspection and repair machine is provided to address the aforementioned technical problems.

[0006] The technical solution adopted in this invention is as follows: A semi-automatic column inspection and repair machine, characterized in that it comprises: A vision system is used to locate a product and inspect it for defects. A column repair system, comprising an adhesive dispensing head, a column repair head, and a column removal head; A column replenishing vacuum platform for vacuum adsorption of a carrier and a column supply fixture carrying a product, wherein the upper surface of the column replenishing vacuum platform has a first positioning structure for positioning the carrier and a second positioning structure for positioning the column supply fixture, the column supply fixture includes a first base, the upper surface of the first base has a rectangular first column dropping area, the first column dropping area has a plurality of vertical first openings evenly distributed thereon, the first openings include first column dropping holes and first vent holes distributed from top to bottom, the depth of the first column dropping holes is less than the height of the column, the diameter of the first vent holes is less than the outer diameter of the column, and the lower surface of the first base forms a concave first vacuum groove that communicates with the first opening; A horizontal moving mechanism is used to horizontally move the column replenishment vacuum platform so that the product on it is moved below the vision system, the dispensing head, the column replenishment head, and the column removal head, and the column supply fixture is moved below the column replenishment head.

[0007] The manual operation part of this invention only requires feeding, which is assisted by a jig, making it simple to operate. Inspection and repair are performed automatically by the machine, making it more efficient, stable, and reliable. Attached Figure Description

[0008] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments: Figure 1 This is a three-dimensional structural diagram of a semi-automatic column inspection and repair machine provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the column-filling vacuum platform according to an embodiment of the present invention; Figure 3 This is an exploded view of the vehicle according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of the base of the vehicle according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the product being carried by a vehicle according to an embodiment of the present invention; Figure 6 This is a front structural diagram of the column supply fixture according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the reverse side of the column supply fixture according to an embodiment of the present invention; Figure 8 This is a schematic diagram of the first opening of the column feeding fixture according to an embodiment of the present invention; Figure 9 This is a schematic diagram of the inverted column fixture according to an embodiment of the present invention; Figure 10 This is a schematic diagram of the reverse side of the vacuum fixture according to an embodiment of the present invention; Figure 11 This is a schematic diagram illustrating the preferred method for feeding the column jig according to an embodiment of the present invention. Detailed Implementation

[0009] The embodiments of the present invention will be described below with reference to the accompanying drawings. It should be noted that the embodiments described in this specification are not exhaustive and do not represent the only embodiments of the present invention. The corresponding embodiments below are only for clearly illustrating the inventive content of this patent and are not intended to limit its implementation. For those skilled in the art, different variations and modifications can be made based on the embodiments described. Any variations or modifications that fall within the technical concept and inventive content of this invention and are obvious are also within the protection scope of this invention.

[0010] like Figure 1 , Figure 9 and Figure 10 As shown, this embodiment of the invention provides a semi-automatic column inspection and repair machine, including a column repair vacuum platform 1100, a column supply fixture 1200, a column inversion fixture 1300, a vacuum fixture 1400, a horizontal moving mechanism 1500, a vision system 1600, a column repair system 1700, and a cleaning system 1800.

[0011] The column supply vacuum platform 1100 is fixed on the horizontal moving mechanism 1500 and is used for vacuum adsorption of the product-carrying carrier 3 and the column supply fixture 1200. Its upper surface has a first positioning structure 1110 for positioning the carrier 3 and a second positioning structure 1120 for positioning the column supply fixture 120. (See attached image.) Figure 2 .

[0012] In this embodiment, the first positioning structure 1110 is an L-shaped positioning stop, and the second positioning structure 1120 is two first positioning pins distributed on the left and right.

[0013] like Figure 3 As shown, the vehicle 3 includes a base 31, a raised plate 32, a positioning plate 33, and a top cover 34. The base 31 is located at the bottom, as shown. Figure 4 and Figure 5 As shown, its upper surface has a groove 31a that is adapted to the substrate 21 of product 2. The depth of the groove 31a is equal to the thickness of the substrate 21. Multiple vacuum holes 31b are evenly distributed in the groove 31a, which can firmly adsorb the substrate 21 in the groove 31a. The shim plate 32 separates the positioning plate 33 from the surface of the substrate 21. The middle is hollowed out to avoid the area where the welding post 22 is located. The positioning plate 33 has holes that are slightly larger than the diameter of the welding post 22, which can restrict the welding post 22 to be in a vertical state. The sum of the heights of the shim plate 32 and the positioning plate 33 is equal to the height of the welding post 22 on the substrate 21. The top cover 34 presses the shim plate 32 and the positioning plate 33 onto the base 31 to prevent positional displacement, and is fixed to the pin hole on the base 31 by the positioning pin 35.

[0014] The column supply fixture 1200 is used to supply welding columns so that the column repair system 1700 can repair columns, such as... Figure 6 As shown, it includes a first base 1210, the upper surface of which has a rectangular first drop column area 1211. The first drop column area 1211 has a plurality of vertical first openings evenly distributed therefrom, such as... Figure 8 As shown, the first opening includes a first drop hole 1211a and a first vent hole 1211b distributed from top to bottom. The depth of the first drop hole 1211a is less than the height of the welding column. After the welding column falls into the first drop hole 1211a, it can protrude, making it easy for the column replenishment system 1700 to pick it up. The diameter of the first vent hole 1211b is smaller than the outer diameter of the welding column. The lower surface of the first base 1210 forms a first vacuum groove 1212 that is concave and communicates with the first opening. See [reference needed]. Figure 7 .

[0015] like Figure 7 As shown, the first base 1210 has two first positioning pin holes 1213 corresponding to the two first positioning pins.

[0016] like Figure 9 As shown, the inverted column fixture 1300 includes a second base 1310. The upper surface of the second base 1310 has a rectangular second column dropping area 1311. The second column dropping area 1311 has a plurality of second openings that correspond one-to-one with a plurality of first openings. The second openings include second column dropping holes and second vent holes distributed from top to bottom. The depth of the second column dropping holes is greater than or equal to the height of the welding column. The diameter of the second vent holes is smaller than the outer diameter of the welding column. The lower surface of the second base forms a second vacuum groove that is concave and communicates with the second openings. The second base 1310 also has a third positioning structure 1312 for aligning the first openings with the corresponding second openings when the column supply fixture 1200 is inverted onto it.

[0017] The third positioning structure 1312 consists of two second positioning pin holes. Correspondingly, the upper surface of the first base 1210 has two second positioning pins 1214 corresponding to the two second positioning pin holes. (See attached image) Figure 6 .

[0018] like Figure 10 As shown, the vacuum fixture 1400 includes a third base 1410 for stacking on the inverted supply fixture 1200. The lower surface of the third base 1410 forms a third vacuum groove 1411 that is concave and communicates with the first vacuum groove of the inverted supply fixture 1200 below. The side of the third base 1410 also has an air connector 1412 that communicates with the third vacuum groove 1411.

[0019] When feeding the column feeding fixture 1200, it is placed on a vibratory feeder, and the welding columns are poured in. After the feeder is full of welding columns, it is removed. However, because the welding columns tend to protrude after falling into the first drop hole 1211a of the feeding fixture 1200, this method is not conducive to the vibratory feeder filling the welding columns. Therefore, the preferred feeding method is: first, use the inverted column fixture 1300, and feed it using vibration. Since the depth of its second drop hole is greater than or equal to the height of the welding column, the welding columns will not protrude. Then, as... Figure 11 As shown, the first base 1210 is inverted onto the second base 1310, so that the multiple first openings and second openings of the two correspond one-to-one. Then, the third base 1410 is stacked on the inverted first base 1210. A vacuum is drawn through the air connector 1412, so that the welding column is sucked from the second drop hole of the second base 1310 to the first drop hole of the first base 1210. Finally, the whole thing is flipped over, the vacuum is turned off, and the second base 1310 and the third base 1410 are separated from the first base 1210.

[0020] The first drop column area 1211 and the second drop column area 1311 are respectively composed of graphite plates embedded in the upper surfaces of the first base 1210 and the second base 1310.

[0021] The horizontal moving mechanism 1500 is used to move the supplementary column vacuum platform 1100 horizontally, and it is mounted on the machine base.

[0022] In this embodiment, the horizontal moving mechanism 1500 adopts a front-back, left-right horizontal linear moving mechanism, such as... Figure 1 As shown, it consists of left and right horizontal straight line modules 1510 and front and rear horizontal straight line modules 1520. The front and rear horizontal straight line modules 1520 are set on the left and right horizontal straight line modules 1510. All of the above modules are conventional structures, so the specific structures will not be described in detail.

[0023] The vision system 1600 is mounted on the crossbeam of the machine tool and is used to position the product and check for defects. Defects refer to products that are missing weld pillars or whose weld pillar positions are off-target (deviating from the allowable range).

[0024] In this embodiment, as Figure 1 As shown, the vision system 1600 includes a positioning camera 1610 for positioning the product, a scanning camera 1620 for checking whether the product has defects, and a manual observation camera 1630. The positioning camera 1610 and the scanning camera 1620 are sequentially arranged above the left and right horizontal linear movement paths of the horizontal movement mechanism, and can be raised and lowered by the lifting mechanism. The manual observation camera 1630 is arranged on another front-back and left-right horizontal linear movement mechanism on the machine platform, which allows the inspector to manually observe the repair process.

[0025] The column supplement system 1700 is installed on the crossbeam of the machine tool, such as... Figure 1 As shown, it includes a dispensing head 1710, a column filling head 1720, and a column removing head 1730, which are sequentially arranged above the left and right horizontal linear movement paths of the horizontal moving mechanism 1500. All three are conventional structures, and only a brief introduction is given below: The dispensing head 1710 consists of a lifting module and a dispensing needle set on the lifting module, and is used to dispense adhesive to the position on the product after the missing column or the skewed weld column has been removed. The column head 1720 consists of a lifting module and a suction nozzle set on the lifting module, used to pick up the welding column from the column supply fixture 1200 and release it onto the product; Except that the structure of the column head 1730 is the same as that of the supplementary column head 1720, it is used to extract weld columns with positional deviations from the product.

[0026] like Figure 1 As shown, the cleaning system 1800 includes a dispensing head cleaning mechanism 1810, a replenishing head cleaning mechanism 1820, and a removing head cleaning mechanism 1830, which are used to clean the dispensing needle and the two nozzles, respectively. In the semiconductor manufacturing field, these cleaning mechanisms are also conventional structures, and will not be described in detail here. Each of the three has a front-to-back linear motion module, and the three front-to-back linear motion modules are all mounted on the machine base and are located below the dispensing head 1710, the replenishing head 1720, and the removing head 1730, respectively.

[0027] The column head cleaning mechanism 1820 and the column head removal cleaning mechanism 1830 are respectively equipped with waste collection containers, which are used to put waste (welded columns stuck during column head repair and welded columns whose position is deviated during column head removal) into the column head and the column head removal mechanism respectively.

[0028] Based on the horizontal moving mechanism 1500, the product can be moved to a position below the positioning camera 1610, scanning camera 1620, dispensing head 1710, filling head 1720 and removing head 1730, and the column supply fixture 1200 can be moved to a position below the filling head 1720.

[0029] The working process of the column replenishment machine in this embodiment of the invention is as follows: 1. The carrier 3 carrying the product and the feeding column fixture 1200 after loading are manually placed on the column replenishment vacuum platform 1100 and fixed by vacuum adsorption.

[0030] 2. Move the vacuum platform 1100 to the positioning camera 1610 for product positioning.

[0031] 4. The vacuum platform 1100 is moved to the scanning camera 1620 to perform defect inspection on the located product.

[0032] 5. If no additional column is needed, manually remove the product, and the column replenishment vacuum platform 1100 returns to its initial position. If the product is missing a weld column, first move the product to below the dispensing head 1710, dispense adhesive to the area where the column needs to be replenished, then move the column supply fixture 1200 to below the column replenishment head 1720, where the column replenishment head 1720 picks up the weld column, and then move the product to below the column replenishment head 1720 to replenish the column. If there are weld columns with positional deviations on the product, first move the product to below the column removal head 1730 to remove the column, and then proceed with the column replenishment process. This will not be described in detail here.

[0033] 6. After the replacement column is added, move the product to the scanning camera 1620 for inspection. Once the replacement column is confirmed to be successful, remove the product.

[0034] As can be seen from the above, the semi-automatic inspection and repair machine provided by the embodiments of the present invention only requires feeding for the manual operation part, which is assisted by the fixture. The operation is simple, and the inspection and repair are automatically performed by the machine, which is more efficient, stable and reliable.

[0035] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A semi-automatic post filling inspection machine, characterized in that, The application comprises: a visual system for positioning a product and checking whether the product has defects; a post filling system, which comprises a dispensing head, a post filling head and a post removing head; a post filling vacuum platform for vacuum adsorbing a carrier with a product and a post providing jig, an upper surface of the post filling vacuum platform has a first positioning structure for positioning the carrier and a second positioning structure for positioning the post providing jig, the post providing jig comprises a first base, an upper surface of the first base has a rectangular first post falling area, the first post falling area is uniformly provided with a plurality of vertical first openings, the first openings comprise first post falling holes and first air holes distributed from top to bottom, the depth of the first post falling holes is less than the height of the soldering post, the diameter of the first air holes is less than the outer diameter of the soldering post, a lower surface of the first base forms a first vacuum groove which is concave upward and communicates with the first openings; a horizontal moving mechanism for horizontally moving the post filling vacuum platform so that the product thereon moves below the visual system, the dispensing head, the post filling head and the post removing head, and the post providing jig moves below the post filling head.

2. A semi-automatic post filling inspection machine according to claim 1, characterized in that, The first positioning structure is a positioning flange.

3. The semi-automatic post filling inspection machine of claim 1, wherein, The second positioning structure is a plurality of first positioning pins, the first base has a plurality of first positioning pin holes corresponding to the plurality of first positioning pins.

4. The semi-automatic post filling inspection machine of claim 1, wherein, The application further comprises a post removing jig and a vacuum jig, the post removing jig comprises a second base, an upper surface of the second base has a rectangular second post falling area, the second post falling area has a plurality of second openings corresponding to the plurality of first openings one by one from top to bottom, the second openings comprise second post falling holes and second air holes distributed from top to bottom, the depth of the second post falling holes is greater than or equal to the height of the soldering post, the diameter of the second air holes is less than the outer diameter of the soldering post, a lower surface of the second base forms a second vacuum groove which is concave upward and communicates with the second openings, the second base further has a third positioning structure for aligning the first openings with the corresponding second openings from top to bottom when the post providing jig is inverted and buckled thereon, the vacuum jig comprises a third base for stacking on the inverted post providing jig, a lower surface of the third base forms a third vacuum groove which is concave upward and communicates with the first vacuum groove of the underlying post providing jig, the third base further has an air connector communicating with the third vacuum groove.

5. A semi-automatic post filling inspection machine according to claim 4, characterized in that, The third positioning structure is a plurality of second positioning pin holes, an upper surface of the first base has a plurality of second positioning pins corresponding to the plurality of second positioning pin holes.

6. A semi-automatic post filling inspection machine according to claim 4, characterized in that, The first post falling area and the second post falling area are respectively composed of graphite plates embedded in the upper surfaces of the first base and the second base.

7. The semi-automatic post filling inspection machine of claim 1, wherein, The horizontal moving mechanism adopts front-back and left-right horizontal linear moving mechanisms.

8. A semi-automatic post filling inspection machine according to claim 7, characterized in that The visual system comprises a positioning camera for positioning a product and a scanning camera for checking whether the product has defects, the positioning camera and the scanning camera are sequentially arranged above the left-right horizontal linear moving paths of the horizontal moving mechanism.

9. A semi-automatic post filling inspection machine according to claim 8, characterized in that, The dispensing head, the post filling head and the post removing head are sequentially arranged above the left-right horizontal linear moving paths of the horizontal moving mechanism.

10. The semi-automatic post filling inspection machine of claim 1, wherein, The cleaning system comprises a dispensing head cleaning mechanism, a replenishing column head cleaning mechanism and a removing column head cleaning mechanism, which are respectively arranged below the dispensing head, the replenishing column head and the removing column head.

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