Polishing device

Abstract

The invention provides a polishing device which comprises a fixed mounting base, a supporting piece, a polishing piece, a rotating bearing and a motor assembly, the fixed mounting base is an annular piece and comprises an upper surface and a lower surface in the vertical direction, and an annular mounting groove is formed in the upper surface; in the vertical direction, the supporting piece is rotatably arranged above the upper surface of the fixed mounting seat; the polishing piece is arranged on the side, away from the fixed mounting base, of the supporting piece. The rotating bearing is arranged in the annular mounting groove and comprises an inner ring and an outer ring, the outer ring is fixedly connected with the fixed mounting base, and the inner ring is fixedly connected with the side, facing the fixed mounting base, of the supporting piece; the motor assembly is used for driving the supporting piece to rotate relative to the fixed mounting base and comprises a stator and a rotor, the stator is arranged on the inner side of the fixed mounting base in the radial direction and fixedly connected with the fixed mounting base, the rotor is fixedly arranged on the supporting piece, the compactness of the device is improved, and the height of the polishing device is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chemical mechanical polishing, in particular to a polishing device. BACKGROUND

[0002] In the process of semiconductor manufacturing, it is necessary to polish wafers by using a polishing device. However, the current polishing disc device integrates many components, and the structure arrangement is not compact enough, and the height is relatively high. This makes the center of the polishing device too high, which affects the stability of the operation of the polishing device, increases the risk of shaking or deviation of the polishing device during operation, and further adversely affects the polishing quality of the wafer. SUMMARY

[0003] The present application discloses a polishing device which can improve the polishing quality.

[0004] In order to achieve the above-mentioned purpose, the present application discloses a polishing device, which comprises:

[0005] A fixed mounting seat, which is an annular member, comprises an upper surface and a lower surface along the vertical direction, and a ring-shaped mounting groove is formed on the upper surface;

[0006] A support member, which is rotatably arranged above the upper surface of the fixed mounting seat along the vertical direction;

[0007] A polishing member, which is arranged on the side of the support member away from the fixed mounting seat;

[0008] A rotating bearing, which is arranged in the ring-shaped mounting groove, comprises an inner ring and an outer ring, the outer ring is fixedly connected with the fixed mounting seat, and the inner ring is fixedly connected with the side of the support member facing the fixed mounting seat;

[0009] A motor assembly for driving the support member to rotate relative to the fixed mounting seat, which comprises a stator and a rotor corresponding to each other along the radial direction of the fixed mounting seat, the stator is arranged on the inner side of the fixed mounting seat along the radial direction and is fixedly connected with the fixed mounting seat, and the rotor is fixedly arranged on the support member.

[0010] Optionally, along the vertical direction, the center line of the rotating bearing and the center line of the stator are on the same horizontal plane.

[0011] Optionally, a stator avoiding groove is formed on the side surface of the support member facing the fixed mounting seat, and the stator avoiding groove corresponds to the stator along the vertical direction.

[0012] Optionally, the polishing device further comprises a connecting piece, one end of the connecting piece is fixedly connected with the lower surface of the fixed mounting base along the radial direction of the fixed mounting base, and the other end is fixedly connected with the stator along the vertical direction.

[0013] Optionally, the lower surface of the fixed mounting base is flush with the bottom of the connecting piece along the vertical direction.

[0014] Optionally, the polishing device further comprises a sensing assembly, the sensing assembly is used for detecting the rotation angle and / or speed of the support piece, and the sensing assembly comprises:

[0015] a circular grating, the circular grating is fixedly arranged relative to the support piece;

[0016] a circular grating reader, the circular grating reader is fixedly arranged relative to the fixed mounting base, and when the support plate rotates relative to the fixed mounting base, the circular grating reader is used for detecting the rotation angle and / or speed of the support piece.

[0017] Optionally, the polishing device further comprises:

[0018] a first mounting piece, the first mounting piece is fixedly arranged on the lower surface of the fixed mounting base and extends towards the rotor along the radial direction of the fixed mounting base, and the circular grating reader is arranged on the first mounting piece;

[0019] a sensor base, one end of the rotor is fixedly connected with the side of the support piece facing the fixed mounting base along the vertical direction, and the other end is fixedly connected with the sensor base, and a circular grating reader avoiding groove is arranged on the side surface of the sensor base facing the first mounting piece, and the circular grating reader avoiding groove corresponds to the circular grating reader along the vertical direction.

[0020] Optionally, the side surface of the sensor base facing the first mounting piece is further provided with a circular grating mounting groove, and the circular grating corresponds to the circular grating reader along the radial direction of the fixed mounting base.

[0021] Optionally, the polishing device further comprises:

[0022] an end point detection assembly, the end point detection assembly is arranged in the polishing piece and is used for detecting whether the polishing is completed;

[0023] A control component is electrically connected with the end point detection component, for controlling the detection timing of the end point detection component, the control component comprising a sensing piece and a proximity switch, the sensing piece being arranged on the sensor base; the proximity switch being arranged on the first mounting piece, when the sensing piece rotates with the support piece and approaches the sensing range of the proximity switch, the proximity switch generates a control signal and transmits the control signal to the end point detection component, to control the timing of the end point detection component to start detecting whether the polishing is completed.

[0024] Optionally, the sensing piece is arranged at the bottom of the sensor base.

[0025] Optionally, the bottom of the lower surface or the connecting piece is provided with a protective plate, the protective plate being used to isolate the first mounting piece and the sensor base from the external environment along the vertical direction.

[0026] Optionally, a first rotor mounting groove is arranged on the side surface of the support piece towards the fixed mounting seat, and a second rotor mounting groove corresponding to the first rotor mounting groove is arranged on the side surface of the sensor base towards the support piece.

[0027] Optionally, the polishing device further comprises a rotary joint and a rotary connecting piece fixedly connected with the rotary joint, the rotary connecting piece being fixedly connected with the side surface of the support piece towards the fixed mounting seat, and the rotary connecting piece being internally provided with a threading hole.

[0028] Optionally, the polishing device comprises a stop piece, one end of the stop piece being connected with the non-rotating part of the polishing device and the other end being connected with the fixed part of the rotary joint.

[0029] Optionally, the polishing device further comprises a cooling structure arranged on the stator, for cooling the stator, the cooling structure comprising a liquid inlet, a cooling liquid flow channel and a liquid outlet, one end of the cooling liquid flow channel being in communication with the liquid inlet and the other end being in communication with the liquid outlet, the cooling liquid flow channel being arranged around the stator, and along the vertical direction, the liquid inlet and the liquid outlet being arranged at the end of the stator away from the support piece. Compared with the prior art, the application has the following beneficial effects:

[0030] By making the fixed mounting base a ring-shaped component, space is made more efficient, resulting in a more compact structure for the entire polishing device. The ring-shaped mounting groove provides a mounting position for the rotating bearing. The inner and outer rings of the rotating bearing are fixedly connected to the support and the fixed mounting base, respectively, ensuring the stability of the support during rotation. The stator of the motor assembly is fixedly connected to the fixed mounting base, and the rotor is fixed to the support. This fully utilizes space, further improving the compactness of the device, reducing the height of the polishing device, and minimizing the risk of wobbling or shifting during operation due to the center of the polishing device being too high, thereby improving the polishing quality. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a cross-sectional view of the polishing apparatus in the embodiments of this application;

[0033] Figure 2 yes Figure 1 Enlarged view of point A in the middle;

[0034] Figure 3 This is a schematic diagram of the polishing apparatus according to another embodiment of this application;

[0035] Figure 4 yes Figure 1 Enlarged view of point B in the middle;

[0036] Figure 5 This is a schematic diagram of the stop provided in the embodiment of this application;

[0037] Figure 6 This is a schematic diagram of the liquid inlet provided in an embodiment of this application;

[0038] Figure 7 This is a schematic diagram of the liquid outlet provided in the embodiments of this application.

[0039] Explanation of main figure symbols

[0040] 1-Polishing device;

[0041] 10-Fixed mounting base; 11-Upper surface; 12-Lower surface; 13-Annular mounting groove; 14-Connector; 15-Connector mounting groove;

[0042] 20-Support component; 21-Stator clearance groove; 22-Outer ring clearance groove; 23-First rotor mounting groove;

[0043] 30 - Polished parts;

[0044] 40 - Rotary bearing; 41 - Inner ring; 42 - Outer ring;

[0045] 50 - Motor assembly; 51 - Stator; 52 - Rotor;

[0046] 60 - Sensing component; 61 - Circular grating; 62 - Circular grating reader;

[0047] 70 - First installation component;

[0048] 80 - Sensor base; 81a - Circular grating read head clearance slot; 81b - Circular grating mounting slot; 82 - Second rotor mounting slot;

[0049] 90 - Endpoint detection component;

[0050] 100 - Control component; 101 - Sensing element; 102 - Proximity switch;

[0051] 200-Protection Board;

[0052] 300-rotary joint;

[0053] 400 - Adapter; 401 - Cable threading hole;

[0054] 500-stop component;

[0055] 600 - Cooling structure; 601 - Liquid inlet; 602 - Coolant flow channel; 603 - Liquid outlet. Detailed Implementation

[0056] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0057] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0058] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0059] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0060] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components whose specific types and structures may be the same or different, and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0061] As mentioned in the background section, current polishing pad devices integrate many components, have an insufficiently compact structure, and are relatively tall. This results in the center of the polishing device being too high, which affects the stability of the polishing device's operation and increases the risk of shaking or shifting during operation, thus adversely affecting the polishing quality of the wafer.

[0062] To address the aforementioned issues, this application provides a polishing apparatus. By designing the fixed mounting base as an annular component with an annular mounting groove, the annular mounting groove provides an installation position for the rotating bearing. The inner and outer rings of the rotating bearing are fixedly connected to the support component and the fixed mounting base, respectively, ensuring the stability of the support component during rotation. The stator of the motor assembly is fixedly connected to the fixed mounting base, and the rotor is fixed to the support component. This fully utilizes space, further improving the compactness of the apparatus, reducing the height of the polishing apparatus, and minimizing the risk of wobbling or shifting during operation due to the center of the polishing apparatus being too high, thereby improving the polishing quality.

[0063] The technical solution of this application will be further described below with reference to specific embodiments and accompanying drawings.

[0064] See Figure 1This embodiment provides a polishing device 1, which includes: a fixed mounting base 10, a support member 20, a polishing component 30, a rotating bearing 40, and a motor assembly 50. The fixed mounting base 10 is an annular component. In the vertical direction, the fixed mounting base 10 includes an upper surface 11 and a lower surface 12, and an annular mounting groove 13 is formed on the upper surface 11. In the vertical direction, the support member 20 is rotatably disposed above the upper surface 11 of the fixed mounting base 10. The polishing component 30 is disposed on the side of the support member 20 away from the fixed mounting base 10. The rotating bearing 40 is disposed on... In the annular mounting groove 13, the rotating bearing 40 includes an inner ring 41 and an outer ring 42. The outer ring 42 is fixedly connected to the fixed mounting base 10, and the inner ring 41 is fixedly connected to the side of the support member 20 facing the fixed mounting base 10. The motor assembly 50 is used to drive the support member 20 to rotate relative to the fixed mounting base 10. The motor assembly 50 includes a stator 51 and a rotor 52 that are radially corresponding to each other along the fixed mounting base 10. The stator 51 is disposed on the radially inner side of the fixed mounting base 10 and is fixedly connected to the fixed mounting base 10. The rotor 52 is fixedly disposed on the support member 20.

[0065] The vertical direction is the direction indicated by arrow Y. The support 20, polished part 30 and fixed mounting base 10 are arranged on the same axis. The radial direction of the fixed mounting base 10 should be understood as the radial direction of the circle formed by the fixed mounting base 10 with the above-mentioned axis as the center of symmetry.

[0066] When polishing the workpiece 30, the motor assembly 50 is started. The stator 51 remains stationary, while the rotor 52 is fixed to the support member 20. Under the action of electromagnetic force, the support member 20 rotates relative to the fixed mounting base 10. The rotation of the support member 20 also causes the polishing workpiece 30, which is located on the side away from the fixed mounting base 10, to rotate together. The outer ring 42 of the rotating bearing 40 is fixedly connected to the fixed mounting base 10, and the inner ring 41 is fixedly connected to the side of the support member 20 facing the fixed mounting base 10. During the rotation of the support member 20, the rotating bearing 40 reduces friction and provides support, making the rotation of the support member 20 smoother and more stable. In this embodiment, by making the fixed mounting base 10 a ring-shaped part, space is utilized efficiently. This design makes the entire polishing device 1 more compact. The annular mounting groove 13 provides a mounting position for the rotating bearing 40. The inner ring 41 and outer ring 42 of the rotating bearing 40 are fixedly connected to the support member 20 and the fixed mounting base 10, respectively, ensuring the stability of the support member 20 during rotation. The stator 51 of the motor assembly 50 is located on the radial inner side of the fixed mounting base and is fixedly connected to the fixed mounting base 10. The rotor 52 is fixed on the support member 20, making full use of the space and further improving the compactness of the device. This reduces the height of the polishing device 1 and minimizes the risk of the polishing device 1 shaking or shifting during operation due to its high center, thereby improving the polishing quality.

[0067] In addition, this embodiment utilizes a fixed mounting base 10 to provide support for the rotating bearing 40 and a mounting reference for the stator 51. The fixed mounting base 10 can be machined as a single piece with good precision, avoiding the cumulative errors in machining and assembly caused by disassembling it into multiple parts.

[0068] It is worth noting that the above-mentioned fixed connection can be any form of fixed connection, such as bolt connection, welding connection, adhesive connection, bayonet connection, etc. In the preferred embodiment, the above-mentioned fixed connection is a bolt connection.

[0069] In one possible embodiment, along the axial direction of the rotating bearing 40, the centerline of the rotating bearing 40 is on the same horizontal plane as the centerline of the stator 51.

[0070] As a result, the rotating bearing 40 and the stator 51 are on the same horizontal plane in the axial direction, which makes the spatial layout of the entire polishing device 1 in the vertical direction more reasonable and avoids wasting space due to differences in component positions. Therefore, this layout makes full use of the limited space and makes the structure of the entire polishing device 1 more compact.

[0071] Of course, the centerline of the rotating bearing 40 and the centerline of the stator 51 are not limited to being on the same horizontal plane, but can also be approximately on the same horizontal plane, as those skilled in the art should know.

[0072] In one possible embodiment, see Figure 1 The support member 20 has a stator clearance groove 21 on the side surface facing the fixed mounting base 10, and the stator clearance groove 21 corresponds to the stator 51 in the vertical direction.

[0073] By opening a stator clearance groove 21 on the side surface of the support member 20 facing the fixed mounting base 10, a specific installation space can be provided for the stator 51. This not only avoids interference between the stator 51 and the support member 20 during rotation, but also makes the structure of the polishing device 1 more compact, making full use of the limited space and improving space utilization.

[0074] In one possible embodiment, see Figure 1 The support member 20 has an outer ring clearance groove 22 on the side surface facing the fixed mounting base 10, and the outer ring clearance groove 22 corresponds to the outer ring 42 in the vertical direction.

[0075] The outer ring clearance groove 22 provides a specific accommodating space for the outer ring 42 of the rotating bearing 40 when the support member 20 rotates, ensuring that the outer ring 42 and the support member 20 can be precisely matched, avoiding interference between the outer ring 42 and the support member 20 during rotation, ensuring the normal operation of the rotating bearing 40. Furthermore, by opening the outer ring clearance groove 22, the support member 20 and the outer ring 42 of the rotating bearing 40 can be more tightly combined in space, further improving the space utilization rate of the entire polishing device 1.

[0076] In one possible embodiment, the polishing device 1 further includes a connector 14. Along the radial direction of the fixed mounting base 10, one end of the connector 14 is fixedly connected to the lower surface 12 of the fixed mounting base 10, and the other end is fixedly connected to the stator 51. In the vertical direction, the lower surface 12 of the fixed mounting base 10 is provided with a connector mounting groove 15.

[0077] The lower surface 12 of the fixed mounting base 10 is provided with a connector mounting groove 15, which makes the installation of the connector 14 more convenient and accurate. The installer can quickly locate the position of the connector 14 through the connector mounting groove 15, thereby improving the installation efficiency. In addition, the connector mounting groove 15 is provided in the space at the bottom of the fixed mounting base 10 in the vertical direction, making full use of the limited space and making the structure of the polishing device 1 more compact.

[0078] In one possible embodiment, the lower surface 12 of the mounting base 10 is flush with the bottom of the connector 14 in the vertical direction.

[0079] The lower surface 12 is flush with the bottom of the connector 14 in the vertical direction, which makes the entire polishing device 1 more regular in appearance and makes better use of space, avoiding wasting space or causing unreasonable spatial layout due to uneven surfaces.

[0080] In one possible embodiment, see Figure 1 and Figure 2 The polishing device 1 also includes a sensing component 60, which is used to detect the rotation angle and / or speed of the support 20.

[0081] The sensing component 60 is used to detect the rotation angle and / or speed of the support member 20. It should be understood that the sensing component 60 can be used only to detect the rotation angle of the support member 20, or only to detect the rotation speed of the support member 20, or simultaneously to detect the rotation angle and speed of the support member 20.

[0082] The sensing component 60 can detect the rotation angle and speed of the support component 20 in real time, providing accurate data feedback for the polishing process. Through this data, the output of the motor component 50 can be precisely controlled to adjust the rotation speed and / or rotation angle of the support component 20 to meet different polishing requirements. Furthermore, detecting the rotation angle and / or speed of the support component 20 helps to monitor the quality of the polishing process. If there are abnormal fluctuations in the rotation angle or speed, it may mean that there is a problem in the polishing process, such as uneven polishing pad or uneven pressure between the wafer and the polishing pad. Timely detection of these problems allows for corresponding measures to be taken to avoid producing unqualified products.

[0083] In one possible embodiment, see Figure 1 and Figure 2 The sensing component 60 includes a circular grating 61 and a circular grating reading head 62. The circular grating 61 is fixedly disposed relative to the support member 20. The circular grating reading head 62 is fixedly disposed relative to the fixed mounting base 10. When the support member 20 rotates relative to the fixed mounting base 10, the circular grating reading head 62 is used to detect the rotation angle and / or speed of the support member 20.

[0084] The circular grating 61 is fixedly set relative to the support member 20. This should be understood as the position of the circular grating 61 in space relative to the support member 20 remaining unchanged. The circular grating 61 can be directly connected to the support member 20 or indirectly connected to the support member 20. The circular grating reader 62 is fixedly set relative to the fixed mounting base 10. This should be understood as the position of the circular grating reader 62 in space fixed to the fixed mounting base 10 remaining unchanged. The circular grating reader 62 can be directly connected to the fixed mounting base 10 or indirectly connected to the fixed mounting base 10.

[0085] When the support member 20 rotates, the circular grating 61 rotates as well, since it is fixed relative to the support member 20. The circular grating reading head 62 remains fixed relative to the fixed mounting base 10. The circular grating reading head 62 emits light into the circular grating 61, and the light is reflected or transmitted on the circular grating 61. The circular grating 61 has specific engravings or patterns. When the light passes through these engravings or patterns, different reflection or transmission effects are produced. By detecting these changes in the light, the circular grating reading head 62 can determine the rotational position of the circular grating 61, and then calculate the rotational angle and / or speed of the support member 20. The circular grating 61 has high resolution and accuracy, and can accurately detect minute changes in the rotational angle of the support member 20. This is crucial for fields such as semiconductor manufacturing that require high-precision polishing, ensuring the polishing quality of the wafer. Furthermore, the circular grating read head 62 can quickly receive and process the light reflected or transmitted back from the circular grating 61, enabling real-time detection of the rotation angle and / or speed of the support 20. This makes the control during the polishing process more timely and accurate, and allows for rapid response to various changes.

[0086] Of course, the sensing component 60 is not limited to the above form. For example, the sensing component 60 can also be a magnetic encoder sensing component 60, including a magnetic code disk and a magnetic sensor. The magnetic code disk is fixedly set relative to the support member 20, and the magnetic sensor is fixedly set relative to the fixed mounting base 10. When the magnetic code disk rotates with the support member 20, its magnetic field changes. The magnetic sensor detects the change in the magnetic field and converts it into an electrical signal. By processing the electrical signal, the rotation angle and speed of the support member 20 can be determined, as should be known by those skilled in the art.

[0087] In one possible embodiment, see Figure 1 and Figure 2 The polishing device 1 further includes: a first mounting member 70 and a sensor base 80. In the vertical direction, the first mounting member 70 is fixedly disposed on the lower surface 12 of the fixed mounting base 10 and extends radially toward the rotor 52 along the fixed mounting base 10. The circular grating read head 62 is disposed on the first mounting member 70. In the vertical direction, one end of the rotor 52 is fixedly connected to the side of the support member 20 facing the fixed mounting base 10, and the other end is fixedly connected to the sensor base 80. A circular grating read head avoidance groove 81a is opened on the side surface of the sensor base 80 facing the first mounting member 70. The circular grating read head avoidance groove 81a corresponds to the circular grating read head 62 in the vertical direction.

[0088] The first mounting component 70 is fixedly disposed on the side of the fixed mounting base 10 away from the support component 20, providing a stable mounting position for the circular grating reader 62. This ensures that the circular grating reader 62 will not loosen or shift during the operation of the polishing device 1, thereby guaranteeing the accuracy and stability of the measurement. Furthermore, the first mounting component 70 extends radially towards the rotor 52 along the fixed mounting base 10, making reasonable use of space and making the structure of the entire polishing device 1 more compact. It also facilitates the adjustment of the relative position between the circular grating reader 62 and the circular grating 61, ensuring accurate transmission and reception of light. A circular grating reader clearance groove 81a is provided on the surface of the sensor base 80 facing the fixed mounting base 10. This clearance groove corresponds to the circular grating reader 62 in the vertical direction, which can prevent collision or interference between the sensor base 80 and the circular grating reader 62 when the sensor base 80 rotates with the rotor 52. This further optimizes the spatial layout of the device and ensures the safety and stability of each component during movement.

[0089] In one possible embodiment, see Figure 2 The sensor base 80 is also provided with a circular grating mounting groove 81b on the side surface facing the first mounting member 70. The circular grating 61 and the circular grating reading head 62 correspond to each other radially along the fixed mounting base 10.

[0090] A circular grating mounting groove 81b is provided on the side surface of the sensor base 80 facing the first mounting member 70, and the circular grating 61 and the circular grating reading head 62 are radially aligned along the fixed mounting base 10. This ensures that the relative position between the circular grating 61 and the circular grating reading head 62 is accurate, thereby improving the measurement accuracy. Furthermore, the radial alignment of the circular grating 61 and the circular grating reading head 62 along the fixed mounting base 10 reduces the space occupied by the sensing component 60 in the vertical direction, making the structure of the polishing device 1 more compact in the vertical direction.

[0091] In one possible embodiment, see Figure 1 and Figure 2 The polishing device 1 also includes an endpoint detection component 90 and a control component 100. The endpoint detection component 90 is disposed within the polishing part 30 and is used to detect whether polishing is completed. The control component 100 is electrically connected to the endpoint detection component 90 and is used to control the detection timing of the endpoint detection component 90. The control component 100 includes a sensor 101 and a proximity switch 102. The sensor 101 is disposed on the sensor base 80. The proximity switch 102 is disposed on the first mounting part 70. When the sensor 101 rotates with the support part 20 and approaches the sensing range of the proximity switch 102, the proximity switch 102 generates a control signal and transmits the control signal to the endpoint detection component 90 to control the timing when the endpoint detection component 90 starts to detect whether polishing is completed.

[0092] When the polishing device 1 is running, the support member 20 drives the sensor base 80 to rotate, and the sensing element 101 mounted on the sensor base 80 also rotates accordingly. When the sensing element 101 rotates with the support member 20 and approaches the sensing range of the proximity switch 102 mounted on the first mounting member 70, the proximity switch 102 is triggered. The proximity switch 102 generates a control signal and transmits the control signal to the endpoint detection component 90. After receiving the control signal, the endpoint detection component 90 begins to detect whether polishing is complete. By mounting the sensing element 101 on the sensor base 80, the characteristic that the sensor base 80 rotates with the support member 20 is fully utilized, eliminating the need for additional space. Using other space, and placing the proximity switch 102 on the first mounting member 70, which itself is fixed to the bottom wall of the fixed mounting base 10 and extends toward the rotor 52, this layout makes reasonable use of the space around the fixed mounting base 10, making the structure of the entire polishing device 1 more compact and improving space utilization. In addition, since the sensing element 101 and the proximity switch 102 are fixed on the sensor base 80 and the first mounting member 70 respectively, these two components are relatively stable during the operation of the polishing device 1, reducing the possibility of false triggering or inaccurate detection caused by component shaking or displacement, and improving the stability and reliability of the entire system.

[0093] Of course, the control component 100 is not limited to the above form. For example, the control component 100 can also be a mechanically triggered control component 100. The switch is set on the first mounting member 70. When the support member 20 rotates and drives the trigger rod to move, so that the trigger rod contacts the micro switch, the micro switch is triggered to generate a control signal and transmits this signal to the endpoint detection component 90. Those skilled in the art should know this.

[0094] In one possible embodiment, see Figure 2 The sensing element 101 is located at the bottom of the sensor base 80.

[0095] Mounting the sensing element 101 at the bottom of the sensor base 80 allows for better coordination with other components. For example, it facilitates easier connection and cooperation with other elements on the sensor base 80, thereby optimizing the design of the entire device, making the structure more compact and reasonable. Furthermore, the sensing element 101 does not require space in other locations, thus achieving miniaturization and compactness of the polishing device 1, and facilitating the installation and maintenance of the sensing component 60 and the control component 100.

[0096] In one possible embodiment, see Figure 2 and Figure 3 A protective plate 200 is provided on the bottom of the lower surface 12 or the connector 14 in the vertical direction. The protective plate 200 is used to isolate the first mounting part 70 and the sensor base 80 from the external environment in the vertical direction.

[0097] A protective plate 200 is provided on the lower surface 12 or the bottom of the connector 14. It should be understood that the protective plate 200 can be provided on the lower surface 12 or on the bottom of the connector 14.

[0098] The protective plate 200 isolates the first mounting component 70 and the sensor base 80 from the external environment in the vertical direction, effectively preventing external dust, impurities, moisture, etc. from entering the area of ​​these critical components and avoiding interference or damage to their normal operation. For example, the protective plate 200 can reduce the impact of external interference on these components, ensuring that the sensing component 60 can accurately detect the rotation angle and speed of the support component 20 and the endpoint detection component 90 controls the working timing of the detection component, thereby improving the precision and quality of polishing.

[0099] In one possible embodiment, see Figure 1 and Figure 4 The support member 20 has a first rotor mounting groove 23 on the side surface facing the fixed mounting base 10, and the sensor base 80 has a second rotor mounting groove 82 on the side surface facing the support member 20, which corresponds to the first rotor mounting groove 23.

[0100] A first rotor mounting groove 23 and a second rotor mounting groove 82 are respectively opened on the support member 20 and the sensor base 80, providing an accurate installation position for the rotor 52. This ensures the installation accuracy of the rotor 52 between the support member 20 and the sensor base 80, enabling the rotor 52 to fit tightly with the support member 20 and the sensor base 80, achieving stable rotational transmission. Furthermore, opening the first rotor mounting groove 23 and the second rotor mounting groove 82 allows the rotor 52 to be better embedded between the support member 20 and the sensor base 80, reducing the volume occupied by the rotor 52 in space. This helps to optimize the overall spatial layout of the polishing device 1, making the device more compact, flexible, and adaptable to different installation environments.

[0101] In one possible embodiment, see Figure 1 The polishing device 1 also includes a rotary joint 300 and an adapter 400 fixedly connected to the rotary joint 300. The adapter 400 is fixedly connected to the side surface of the support 20 facing the fixed mounting base 10. The adapter 400 has a wire hole 401 inside.

[0102] The combination of the rotary joint 300 and the adapter 400 allows the connection to the outside to be maintained even when the support 20 rotates. For example, wires, signal lines, coolant channels, etc. can be connected through the wire hole 401 inside the adapter 400.

[0103] In one possible embodiment, see Figure 3 and Figure 5 The polishing device 1 includes a stop 500, one end of which is connected to the non-rotating part of the polishing device 1 and the other end is connected to the fixed part of the rotary joint 300.

[0104] The non-rotating part of the polishing device 1 mentioned above should be understood as the part of the polishing device 1 that does not rotate during the polishing process, such as the fixed mounting base 10, the connector 14, the protective plate 200, etc.

[0105] Therefore, during the polishing process, it can be ensured that the components (wires, signal lines) located on the fixed part do not rotate with the rotation of the support, thereby avoiding the wires and signal lines from getting tangled and causing circuit damage.

[0106] In one possible embodiment, one end of the stop 500 is connected to the protective plate 200, and the other end is connected to the fixed part of the rotary joint 300.

[0107] In one possible embodiment, see Figure 1 The polishing device 1 also includes a cooling structure 600, which is disposed on the stator 51 and is used to cool the stator 51.

[0108] During the operation of the polishing device 1, the stator 51 generates heat due to the current flowing through it. If it is not cooled in time, the excessively high temperature of the stator 51 may lead to a decrease in motor performance, a shortened lifespan, or even a malfunction. The cooling structure 600 can effectively reduce the temperature of the stator 51, prevent overheating, and keep the temperature of the stator 51 within a reasonable range. This ensures that the motor's output power, speed, and other performance parameters remain stable, thereby improving the working stability and reliability of the polishing device 1.

[0109] In one possible embodiment, see Figure 1 , Figure 6 as well as Figure 7 The cooling structure 600 includes an inlet 601, a coolant flow channel 602, and an outlet 603. One end of the coolant flow channel 602 is connected to the inlet 601, and the other end is connected to the outlet 603. The coolant flow channel 602 is arranged around the stator 51 in the vertical direction. Both the inlet 601 and the outlet 603 are located at the end of the stator 51 away from the support member 20.

[0110] In the vertical direction, both the inlet 601 and the outlet 603 are located at the end of the stator 51 away from the support member 20, thereby avoiding the influence of the rotation of the support member 20 on the coolant during the inflow and outflow process, ensuring the stability of the coolant flow. This layout also facilitates connection with the external cooling system, making it convenient for the supply and discharge of coolant. In addition, the coolant adopts a bottom-in, top-out form, which allows the coolant to fill the coolant channel 602 under the action of gravity, preventing the generation of air bubbles in the coolant channel 602, and ensuring that the stator 51 is fully cooled.

[0111] In one possible embodiment, see Figure 1 Both the support component 20 and the polishing component 30 are disc-shaped structures, and the support component 20 and the polishing component 30 are stacked along the rotation axis of the support component 20.

[0112] Both the support component 20 and the polishing component 30 are disc-shaped structures. The disc-shaped structure has good stability when rotating, can evenly bear centrifugal force, reduce vibration and shaking, and can make better use of space, enabling the polishing device 1 to achieve efficient polishing operation in a limited space.

[0113] In addition, the coaxial arrangement of the support member 20, the polishing member 30, and the fixed mounting base 10 ensures that the rotation center of the entire polishing device 1 is consistent, making the polishing process more stable and precise. The coaxial arrangement can reduce the eccentricity caused by different axes, reduce the unbalanced force during rotation, and improve the stability and reliability of the device. Moreover, the stacked structural design makes the connection between the support member 20 and the polishing member 30 tighter, which can better transmit rotational force and improve polishing efficiency.

[0114] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the polishing apparatus of this application, and are not intended to limit it. Although the polishing apparatus of this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A polishing apparatus characterized by comprising: The polishing device comprises: A fixed mounting base, which is an annular member, comprises an upper surface and a lower surface in the vertical direction, and the upper surface is provided with an annular mounting groove; A support member, which is rotatably arranged above the upper surface of the fixed mounting base in the vertical direction; A polishing member, which is arranged on the side of the support member away from the fixed mounting base; A rotating bearing, which is arranged in the annular mounting groove, comprises an inner ring and an outer ring, the outer ring is fixedly connected with the fixed mounting base, and the inner ring is fixedly connected with the side of the support member facing the fixed mounting base; A motor assembly, which is used to drive the support member to rotate relative to the fixed mounting base, and comprises a stator and a rotor corresponding to each other in the radial direction of the fixed mounting base, the stator is arranged on the radially inner side of the fixed mounting base and is fixedly connected with the fixed mounting base, and the rotor is fixedly arranged on the support member.

2. The polishing apparatus according to claim 1, wherein In the vertical direction, the center line of the rotating bearing and the center line of the stator are on the same horizontal plane.

3. The polishing apparatus according to claim 1, wherein The side of the support member facing the fixed mounting base is provided with a stator avoiding groove corresponding to the stator in the vertical direction.

4. The polishing device according to claim 1, wherein The polishing device further comprises a connecting member, one end of which is fixedly connected with the lower surface of the fixed mounting base in the radial direction of the fixed mounting base, and the other end is fixedly connected with the stator, the lower surface of the fixed mounting base is provided with a connecting member mounting groove in the vertical direction, and the lower surface of the fixed mounting base is flush with the bottom of the connecting member in the vertical direction.

5. The polishing apparatus according to claim 4, wherein The polishing device further comprises a sensing assembly, which is used to detect the rotation angle and / or speed of the support member, and comprises: A circular grating, which is fixedly arranged relative to the support member; A circular grating reader, which is fixedly arranged relative to the fixed mounting base, and is used to detect the rotation angle and / or speed of the support member when the support member rotates relative to the fixed mounting base.

6. The polishing apparatus according to claim 5, wherein The polishing device further comprises: A first mounting member, which is fixedly arranged on the lower surface of the fixed mounting base and extends toward the rotor in the radial direction of the fixed mounting base, and the circular grating reader is arranged on the first mounting member; A sensor base, one end of which is fixedly connected with the side of the support member facing the fixed mounting base, and the other end is fixedly connected with the sensor base in the vertical direction, and the side of the sensor base facing the first mounting member is provided with a circular grating reader avoiding groove corresponding to the circular grating reader in the vertical direction.

7. The polishing apparatus according to claim 6, wherein The side of the sensor base facing the first mounting member is further provided with a circular grating mounting groove, and the circular grating corresponds to the circular grating reader in the radial direction of the fixed mounting base.

8. The polishing apparatus according to claim 7, wherein The polishing device further comprises: An end point detection assembly, which is arranged in the polishing member and is used to detect whether the polishing is completed. A control assembly is electrically connected with the end point detection assembly, and is used for controlling the detection timing of the end point detection assembly. The control assembly comprises a sensing piece and a proximity switch. The sensing piece is arranged on the sensor base. The proximity switch is arranged on the first mounting piece. When the sensing piece rotates with the support and approaches the sensing range of the proximity switch, the proximity switch generates a control signal and transmits the control signal to the end point detection assembly, so as to control the timing of starting the detection of the end point detection assembly to detect whether the polishing is completed.

9. The polishing apparatus according to claim 8, wherein The sensing piece is arranged on the bottom of the sensor base.

10. The polishing apparatus according to claim 6, wherein The bottom of the lower surface or the connecting piece is provided with a protection plate, which is used for isolating the first mounting piece and the sensor base from the external environment along the vertical direction.

11. The polishing apparatus according to claim 6, wherein A first rotor mounting groove is arranged on the side surface of the support facing the fixed mounting seat. A second rotor mounting groove corresponding to the first rotor mounting groove is arranged on the side surface of the sensor base facing the support.

12. The polishing apparatus of claim 1, wherein The polishing device further comprises a rotary joint and a rotating piece fixedly connected with the rotary joint. The rotating piece is fixedly connected with the side surface of the support facing the fixed mounting seat. The rotating piece is internally provided with a threading hole.

13. The polishing apparatus according to claim 12, wherein The polishing device further comprises a stop piece. One end of the stop piece is connected with the non-rotating part of the polishing device, and the other end of the stop piece is connected with the fixed part of the rotary joint.

14. The polishing apparatus of claim 1, wherein The polishing device further comprises a cooling structure arranged on the stator and used for cooling the stator. The cooling structure comprises an inlet, a cooling liquid flow channel and an outlet. One end of the cooling liquid flow channel is in communication with the inlet, and the other end of the cooling liquid flow channel is in communication with the outlet. The cooling liquid flow channel is arranged around the stator. Along the vertical direction, the inlet and the outlet are arranged at the end of the stator away from the support.

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