Linear liquid pump and liquid control method
By designing the fluid control unit and connection unit in the linear liquid pump, and using electrical signals to control the liquid flow rate, the problems of large size, low integration and low flow control accuracy of traditional piezoelectric liquid pumps are solved, thus achieving precise control of liquid flow rate and improving working efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-01-19
- Publication Date
- 2026-03-10
AI Technical Summary
Traditional piezoelectric liquid pumps suffer from problems such as large size, low integration, restricted liquid flow direction, and low flow control accuracy, which limit their working capacity.
Design a linear liquid pump that combines multiple fluid control units and connecting units, and uses different electrical signals to control the second electrode layer of each fluid control unit, thereby improving the control accuracy and working efficiency of liquid flow.
It enables precise control of liquid flow rate, improving the working efficiency and reliability of linear liquid pumps.
Smart Images
Figure CN121630692A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the technical field of microelectromechanical systems, and more particularly to a linear liquid pump and a liquid control method. Background Technology
[0002] Traditional fluid control devices, such as electromagnetic devices or those made using bulk piezoelectric ceramics, suffer from problems such as large size, low integration, and the need for manual assembly. Therefore, piezoelectric liquid pumps, which include a piezoelectric layer, have been developed to achieve liquid flow using the piezoelectric effect.
[0003] However, piezoelectric liquid pumps are currently limited by their size and the direction of liquid flow, resulting in poor liquid transfer performance and low flow control accuracy, which limits their working capacity. Summary of the Invention
[0004] This invention provides a linear liquid pump and a liquid control method, which connects multiple fluid control units through a connection unit and controls the second electrode layer in different fluid control units to receive different electrical signals, thereby improving the control accuracy of liquid flow and increasing the working efficiency of the linear liquid pump.
[0005] In a first aspect, embodiments of the present invention provide a linear liquid pump, comprising: A plurality of fluid control units, each fluid control unit including a substrate and an electrode structure located on one side of the substrate; the substrate including a channel embedded therein, the channel penetrating the substrate along a first direction; the electrode structure including a first electrode layer, a piezoelectric layer and a second electrode layer; the first electrode layer located on one side of the substrate, the first electrode layer being configured to ground potential, and along a second direction, the first electrode layer coinciding with the orthographic projection of the substrate on the substrate surface; the piezoelectric layer located on the side of the first electrode layer away from the substrate, and along the second direction, the piezoelectric layer coinciding with the orthographic projection of the substrate on the substrate surface; the second electrode layer located on the side of the piezoelectric layer away from the first electrode layer, and along the second direction, the orthographic projection area of the second electrode layer on the substrate surface being smaller than the orthographic projection area of the first electrode layer on the substrate surface, and the orthographic projection of the second electrode layer on the substrate surface at least partially overlapping the orthographic projection of the channel on the substrate surface; A connecting unit, the connecting unit including an aperture; the connecting unit including a first connecting unit, the aperture of the first connecting unit being connected to the pipes of two fluid control units arranged adjacent to each other along the first direction; The control module includes multiple signal output terminals, one of which is electrically connected to the second electrode layer of the fluid control unit. The fluid control unit includes an i-th fluid control unit and an (i+1)-th fluid control unit, and the output signal terminal includes an i-th output signal terminal and an (i+1)-th output signal terminal. The i-th output signal terminal is electrically connected to the second electrode layer in the i-th fluid control unit, and the (i+1)-th output signal terminal is electrically connected to the second electrode layer in the (i+1)-th fluid control unit. The linear liquid pump includes a liquid flow operating state, in which the i-th output signal terminal and the (i+1)-th output signal terminal are configured to provide electrical signals sequentially in time. Where i is a positive integer, the first direction is the direction from the i-th fluid control unit to the (i+1)-th fluid control unit, and the second direction is the thickness direction of the substrate.
[0006] Optionally, along the first direction, the length of the connecting unit is L1, and the length of the fluid control unit is L2, satisfying: L1≤0.5L2, and L1 and L2 are positive numbers; along the second direction, the length of the aperture is a1, and the length of the pipe is a2, satisfying a1≤a2, and a1 and a2 are positive numbers.
[0007] Optionally, the substrate includes a first substrate layer, a substrate body, and a second substrate layer; along the second direction, the first substrate layer is located on the side of the channel closer to the electrode structure, the second substrate layer is located on the side of the channel away from the electrode structure, and the substrate body is located between the first substrate layer and the second substrate layer, and surrounds the channel; the first substrate layer includes a first substrate portion and a second substrate portion, and along the second direction, the first substrate portion overlaps with the channel, and the second substrate portion overlaps with the substrate body; When the second electrode layer in the fluid control unit receives the electrical signal, the minimum distance between the first substrate portion and the second substrate layer along the second direction is less than the minimum distance between the second substrate portion and the second substrate layer.
[0008] Optionally, in the liquid flow operating state, the time interval between the nth and (n+1)th times the output signal terminal provides an electrical signal is T; along the second direction, the resonant frequency of the first substrate portion in the fluid control unit is f0; where n is a positive integer, f0 is a positive number, and T = 1 / f0 is satisfied.
[0009] Optionally, the linear liquid pump includes m of the fluid control units; In the liquid flow working state, the time interval between the i-th output signal terminal and the (i+1)-th output signal terminal providing electrical signals in sequence is Ta; Where m≥2, n is a positive integer, and Ta=T / 2m.
[0010] Optionally, the linear liquid pump includes m of the fluid control units; The fluid control unit includes a first fluid control unit and an m-th fluid control unit, and the output signal terminal includes a first output signal terminal and an m-th output signal terminal. The first output signal terminal is electrically connected to the second electrode layer in the first fluid control unit, and the m-th output signal terminal is electrically connected to the second electrode layer in the m-th fluid control unit. In the liquid flow operating state, the time interval between the cutoff time of the first output signal terminal providing an electrical signal and the start time of the m-th output signal terminal providing an electrical signal is Tb; Where m≥2, n is a positive integer, and Tb=T / 2m.
[0011] Optionally, the connecting unit further includes a second connecting unit and / or a third connecting unit; the orifice of the second connecting unit connects to the liquid inlet and the pipe of the fluid control unit in the linear liquid pump near the liquid inlet; the orifice of the third connecting unit connects to the liquid outlet and the pipe of the fluid control unit in the linear liquid pump near the liquid outlet.
[0012] Optionally, the linear liquid pump includes a first connecting line and a second connecting line; The piezoelectric layer includes a first opening that exposes the first electrode layer. The first electrode layer is electrically connected to the first connecting line through the first opening and is grounded through the first connecting line. The second connection line is located on the side of the piezoelectric layer away from the first electrode layer, and the second electrode layer is electrically connected to the signal input terminal through the second connection line.
[0013] Optionally, the fluid control unit further includes a protective layer and a buffer layer, the protective layer being located on the side of the electrode structure away from the substrate, and the buffer layer being located on the side of the electrode structure closer to the substrate.
[0014] In a second aspect, embodiments of the present invention provide a liquid control method employing a linear liquid pump as described in any of the first aspects. The linear liquid pump includes: a plurality of fluid control units, each fluid control unit including a substrate and an electrode structure located on one side of the substrate. The substrate includes a channel embedded within the substrate, the channel penetrating the substrate along a first direction. The electrode structure includes a first electrode layer, a piezoelectric layer, and a second electrode layer. The first electrode layer is located on one side of the substrate and is configured to a ground potential. Along a second direction, the orthographic projection of the first electrode layer onto the substrate surface coincides with the orthographic projection of the substrate. The piezoelectric layer is located on the side of the first electrode layer away from the substrate, and along the second direction, the orthographic projection of the piezoelectric layer onto the substrate surface coincides with the orthographic projection of the substrate. The second electrode layer is located on the side of the piezoelectric layer away from the first electrode layer, and along the second direction, the orthographic projection area of the second electrode layer on the substrate surface is smaller than the area of the first electrode layer on the substrate surface. The orthographic projection area of the substrate surface, wherein the orthographic projection of the second electrode layer on the substrate surface at least partially overlaps with the orthographic projection of the pipe on the substrate surface; a connection unit, the connection unit including an aperture; the connection unit including a first connection unit, the aperture of the first connection unit being connected to the pipes of two fluid control units arranged adjacent to each other along the first direction; a control module, the control module including a plurality of signal output terminals, one of the signal output terminals being electrically connected to the second electrode layer of one fluid control unit; the fluid control unit including an i-th fluid control unit and an (i+1)-th fluid control unit, the output signal terminal including an i-th output signal terminal and an (i+1)-th output signal terminal, the i-th output signal terminal being electrically connected to the second electrode layer in the i-th fluid control unit, and the (i+1)-th output signal terminal being electrically connected to the second electrode layer in the (i+1)-th fluid control unit; the control method includes: In the liquid flow operating state, the i-th output signal terminal and the (i+1)-th output signal terminal are configured to provide electrical signals sequentially in time.
[0015] This invention provides a linear liquid pump, which includes a fluid control unit, a substrate, and an electrode structure. The substrate includes a pipe, and the electrode structure includes a first electrode layer, a piezoelectric layer, and a second electrode layer. The first electrode layer is configured to be grounded. The pump also includes a connection unit, which includes a first connection unit whose aperture is connected to the pipes of two adjacent fluid control units. A control module is included, with its signal output terminal electrically connected to the second electrode layer of one fluid control unit. The i-th output signal terminal is electrically connected to the second electrode layer of the i-th fluid control unit, and the (i+1)-th output signal terminal is electrically connected to the second electrode layer of the (i+1)-th fluid control unit. During liquid flow operation, the i-th and (i+1)-th output signal terminals are configured to provide electrical signals sequentially in time, thereby improving the control accuracy of the liquid flow rate and increasing the working efficiency of the linear liquid pump. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the structure of a linear liquid pump provided in an embodiment of the present invention; Figure 2 This is an enlarged schematic diagram of a fluid control unit provided in an embodiment of the present invention; Figure 3 yes Figure 2 A schematic diagram of a cross-section along section line A-A'; Figure 4 yes Figure 1 A schematic diagram of a cross-section along section line B-B'; Figure 5 This is a schematic diagram of another linear liquid pump provided in an embodiment of the present invention; Figure 6 This is a schematic diagram of another linear liquid pump provided in an embodiment of the present invention; Figure 7 yes Figure 6 A timing diagram of the electrical signal provided at the signal output terminal of a linear liquid pump in liquid flow operation is provided. Figure 8 yes Figure 2 Another cross-sectional view along section line A-A'; Figure 9 This is a schematic diagram of another linear liquid pump provided in an embodiment of the present invention; Figure 10 yes Figure 9 A timing diagram of the electrical signal provided at the signal output terminal of a linear liquid pump in liquid flow operation is provided. Figure 11 This is a schematic flowchart of a liquid control method provided in an embodiment of the present invention. Detailed Implementation
[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be fully described below with reference to the accompanying drawings in the embodiments of this invention, through specific implementation methods. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort fall within the protection scope of this invention.
[0019] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a system, product, or device comprising a series of units is not necessarily limited to those steps or units explicitly listed, but may include other units not explicitly listed or inherent to such products or devices.
[0020] Figure 1 This is a schematic diagram of the structure of a linear liquid pump provided in an embodiment of the present invention. Figure 2 This is an enlarged schematic diagram of a fluid control unit provided in an embodiment of the present invention. Figure 3 yes Figure 2 A schematic diagram of a cross-section along section line A-A'. Figure 4 yes Figure 1 A schematic diagram of a cross-section along section line B-B'. Figure 5 This is a schematic diagram of another linear liquid pump provided in an embodiment of the present invention, for reference. Figures 1 to 5As shown, an embodiment of the present invention provides a linear liquid pump 10, which includes: a plurality of fluid control units 100, each fluid control unit 100 including a substrate 1000 and an electrode structure 2000 located on one side of the substrate 1000; the substrate 1000 includes a channel 1001 embedded inside the substrate 1000, the channel 1001 penetrating the substrate 1000 along a first direction X1; the electrode structure 2000 includes a first electrode layer 2001, a piezoelectric layer 2002, and a second electrode layer 2003; the first electrode layer 2001 is located on one side of the substrate 1000, the first electrode layer 2001 is configured to a ground potential, and along a second direction X2, the first... The orthographic projection of electrode layer 2001 onto the surface of substrate 1000 coincides with that of substrate 1000; piezoelectric layer 2002 is located on the side of first electrode layer 2001 away from substrate 1000 along the second direction X2, and the orthographic projection of piezoelectric layer 2002 onto the surface of substrate 1000 coincides with that of substrate 1000; second electrode layer 2003 is located on the side of piezoelectric layer 2002 away from first electrode layer 2001 along the second direction X2, and the orthographic projection area of second electrode layer 2003 onto the surface of substrate 1000 is smaller than the orthographic projection area of first electrode layer 2001 onto the surface of substrate 1000, and the orthographic projection area of second electrode layer 2003 onto the surface of substrate 1000 is smaller than that of first electrode layer 2001 onto the surface of substrate 1000. The orthographic projection of the conduit 1001 onto the surface of the substrate 1000 at least partially overlaps with the orthographic projection of the conduit 1001; a connection unit 200, the connection unit 200 including an aperture 201; the connection unit 200 including a first connection unit 200a, the aperture 201 of the first connection unit 200a being connected to the conduits 1001 of two fluid control units 100 adjacently arranged along the first direction X1; a control module 300, the control module 300 including a plurality of signal output terminals 301, one signal output terminal 301 being electrically connected to the second electrode layer 2003 of a fluid control unit 100; the fluid control unit 100 including an i-th fluid control unit and an (i+1)-th fluid control unit. The linear liquid pump includes an i-th output signal terminal and an i+1-th output signal terminal. The i-th output signal terminal is electrically connected to the second electrode layer in the i-th fluid control unit, and the i+1-th output signal terminal is electrically connected to the second electrode layer in the i+1-th fluid control unit. The linear liquid pump includes a liquid flow working state. In the liquid flow working state, the i-th output signal terminal and the i+1-th output signal terminal are configured to provide electrical signals sequentially in time. Here, i is a positive integer, the first direction X1 is the direction from the i-th fluid control unit 100 to the i+1-th fluid control unit 100, and the second direction X2 is the thickness direction of the substrate 1000.
[0021] Among them, reference Figure 1As shown, the linear liquid pump 10 includes a fluid control unit 100 and a connection unit 200. The connection unit 200 is used to connect two adjacent fluid control units 100 to realize the sequential transfer of liquid, achieve effective control of the liquid transfer in the linear liquid pump 10, and improve the working efficiency and working reliability of the linear liquid pump 10.
[0022] For details, please refer to Figures 1 to 3 As shown, the fluid control unit 100 includes a substrate 1000 and an electrode structure 2000 located on one side of the substrate 1000. The electrode structure 2000 includes a first electrode layer 2001, a piezoelectric layer 2002, and a second electrode layer 2003 stacked sequentially. The piezoelectric layer 2002 is located between the first electrode layer 2001 and the second electrode layer 2003 along the thickness direction of the substrate 1000, and the first electrode layer 2001 is located on the side of the piezoelectric layer 2002 closer to the substrate 1000. In other words, the first electrode layer 2001, the piezoelectric layer 2002, and the second electrode layer 2003 form a "sandwich" electrode structure. When the first electrode layer 2001 and the second electrode layer 2003 receive different electrical signals, a voltage difference will occur between them, causing the piezoelectric layer 2002 to deform to varying degrees, i.e., the piezoelectric effect will occur.
[0023] refer to Figures 1 to 3 As shown, the substrate 1000 includes a channel 1001 embedded inside the substrate 1000, wherein the channel 1001 penetrates the substrate 1000 along a first direction X1. The first direction X1 can be understood as the extension direction of the channel 1001, that is, the flow direction of the liquid in the channel 1001. The channel 1001 penetrating the substrate 1000 along the first direction X1 facilitates the flow of liquid through the fluid control unit 100.
[0024] For details, please refer to Figures 1 to 3 As shown, along the second direction X2, the orthographic projection of the first electrode layer 2001 onto the surface of the substrate 1000 coincides with that of the substrate 1000. The second direction X2 can be understood as the thickness direction of the substrate 1000. That is, the first electrode layer 2001 is entirely disposed on the surface of the substrate 1000. Along the second direction X2, the orthographic projection of the piezoelectric layer 2002 onto the surface of the substrate 1000 coincides with that of the substrate 1000. That is, the piezoelectric layer 2002 is entirely disposed on the surface of the first electrode layer 2001. Along the second direction X2, the orthographic projection area of the second electrode layer 2003 onto the surface of the substrate 1000 is smaller than the orthographic projection area of the first electrode layer 2001 onto the surface of the substrate 1000. That is, the second electrode layer 2003 is not entirely disposed on one side of the piezoelectric layer 2002, but is disposed in sections on the side of the piezoelectric layer 2002 away from the first electrode layer 2001.
[0025] Further reference Figures 1 to 3 As shown, the orthographic projection of the second electrode layer 2003 on the surface of the substrate 1000 at least partially overlaps with the orthographic projection of the pipe 1001 on the surface of the substrate 1000. In other words, the second electrode layer 2003 and the pipe 1001 have overlapping projections along the thickness direction of the substrate 1000. When there is a different voltage difference between the first electrode layer 2001 and the second electrode layer 2003, the piezoelectric layer 2002 can move towards the pipe 1001, realizing a change in the volume within the pipe 1001, thereby driving the flow direction of the liquid and adjusting the flow rate of the liquid, thus realizing the transfer of liquid in the linear liquid pump 10.
[0026] For details, please refer to Figure 1 and Figure 4 As shown, the connecting unit 200 includes an orifice 201 through which liquid in the linear liquid pump 10 is transferred. Further, refer to... Figure 1 As shown, the connecting unit 200 includes a first connecting unit 200a. The aperture 201 of the first connecting unit 200a is connected to the pipes 1001 of two fluid control units 100 arranged adjacent to each other along the first direction X1, realizing the stepwise transfer of liquid in the pipes 1001 of the two fluid control units 100, and realizing the liquid transfer process in the linear liquid pump 10. It should be noted that there is no specific limitation on the number of fluid control units 100 in the linear liquid pump 10. Figure 1 The example described uses a linear liquid pump 10 comprising two fluid control units 100. Figure 1 A linear liquid pump 10 includes a first connecting unit 200a that connects the pipes 1001 in two fluid control units 100. If a linear liquid pump 10 includes p fluid control units 100, then a linear liquid pump 10 includes p-1 first connecting units 200a that connect the pipes 1001 in two adjacent fluid control units 100.
[0027] Further reference Figure 1 and Figure 5As shown, the linear liquid pump 10 also includes a control module 300. The control module 300 includes multiple signal output terminals 301, and one signal output terminal 301 is electrically connected to the second electrode layer 2003 of a fluid control unit 100. That is, the control module 300 can be understood as a signal transmitter that provides electrical signals to the second electrode layer 2003 in each fluid control unit 100. The first electrode layer 2001 is configured to ground potential. When the second electrode layer 2003 receives the electrical signal provided by the signal output terminal 301, a voltage difference will be generated between the first electrode layer 2001 and the second electrode layer 2003. Due to the piezoelectric effect, the piezoelectric layer 2002 deforms, causing a change in the volume of the pipe 1001, thereby changing the pressure in the pipe 1001, realizing the transport of liquid, and realizing the liquid transfer process of the linear liquid pump 10.
[0028] Specifically, Figure 6 This is a schematic diagram of another linear liquid pump provided in an embodiment of the present invention, for reference. Figure 6 As shown, the fluid control unit 100 includes the i-th fluid control unit ( Figure 6 (shown as 100i) and the (i+1)th fluid control unit ( Figure 6 (shown as 100i+1), output signal terminal 301 includes the i-th output signal terminal ( Figure 6 (shown as 301i in the diagram) and the (i+1)th output signal terminal ( Figure 6 (shown as 301i+1). The i-th fluid control unit ( Figure 6 The second electrode layer 2003 (shown as 100i) and the i-th output signal terminal ( Figure 6 Electrical connection (shown as 301i), i.e., the i-th output signal terminal ( Figure 6 The electrical signal output by (shown as 301i) is transmitted to the i-th fluid control unit ( Figure 6 In (shown as 100i), the (i+1)th fluid control unit ( Figure 6 The second electrode layer 2003 (shown as 100i+1) and the (i+1)th output signal terminal ( Figure 6 (shown as 301i+1) Electrical connection, that is, the (i+1)th output signal terminal ( Figure 6 The electrical signal output by (shown as 301i+1) is transmitted to the (i+1)th fluid control unit ( Figure 6 (shown as 100i in the middle).
[0029] Furthermore, Figure 7 yes Figure 6 A timing diagram of the electrical signal provided at the signal output terminal of a linear liquid pump during liquid flow operation is provided, for reference. Figure 6 and Figure 7As shown, the linear liquid pump 10 includes a liquid flow operating state. In the liquid flow operating state, the control module 300 outputs a signal at the i-th output terminal (…). Figure 7 (shown as 301i) and the (i+1)th output signal terminal ( Figure 7 (shown as 301i+1) is configured to provide electrical signals sequentially in timing. In other words, the control module 300 controls the i-th output signal terminal ( Figure 7 When the enable level (providing a valid electrical signal) is provided (as shown in 301i), the control module 300 controls the (i+1)th output signal terminal (…). Figure 7 (As shown in 301i+1) No enable level is provided (an invalid electrical signal is provided), and the two are staggered in timing. (Refer to...) Figure 6 and Figure 7 As shown, if the i-th fluid control unit is located closer to the (i+1)-th fluid control unit, the control module 300 at the i-th output signal terminal ( Figure 7 (shown as 301i) provides an electrical signal before the (i+1)th output signal terminal ( Figure 7 (As shown in 301i+1) provides electrical signals. For details, refer to... Figure 6 and Figure 7 As shown, when the control module 300 provides an electrical signal at the i-th output signal terminal, the i-th fluid control unit can compress the pipe 1001, facilitating the liquid flow to the pipe 1001 in the (i+1)-th fluid control unit; subsequently, when the control module 300 provides an electrical signal at the (i+1)-th output signal terminal, the (i+1)-th fluid control unit can again compress the pipe 1001, facilitating the liquid flow to the pipe 1001 in the next fluid control unit, thereby achieving liquid flow control. It should be noted that... Figure 7 The horizontal axis can represent time, reflecting the working sequence of the liquid flow operation, while the vertical axis can represent voltage, reflecting the voltage value of the enable level provided to the second electrode layer.
[0030] In summary, this invention provides a linear liquid pump, which includes a fluid control unit, a substrate, and an electrode structure. The substrate includes a pipe, and the electrode structure includes a first electrode layer, a piezoelectric layer, and a second electrode layer. The first electrode layer is configured to be grounded. The pump also includes a connection unit, which includes a first connection unit whose aperture is connected to the pipes of two adjacent fluid control units. Furthermore, it includes a control module, with a signal output terminal electrically connected to the second electrode layer of one fluid control unit. The i-th output signal terminal is electrically connected to the second electrode layer of the i-th fluid control unit, and the (i+1)-th output signal terminal is also electrically connected to the second electrode layer of the (i+1)-th fluid control unit. During liquid flow operation, the i-th and (i+1)-th output signal terminals are configured to provide electrical signals sequentially in time, thereby improving the control accuracy of the liquid flow rate and increasing the working efficiency of the linear liquid pump.
[0031] Continue to refer to Figure 1 , Figure 3 and Figure 4 As shown, along the first direction X1, the length of the connecting unit 200 is L1, and the length of the fluid control unit 100 is L2, satisfying: L1≤0.5L2, and L1 and L2 are positive numbers; along the second direction X2, the length of the aperture 201 is a1, and the length of the pipe 1001 is a2, satisfying a1≤a2, and a1 and a2 are positive numbers.
[0032] Among them, reference Figure 1 As shown, along the first direction X1, the length of the connecting unit 200 is L1, and the length of the fluid control unit 100 is L2, where L1 and L2 satisfy: L1≤0.5L2, meaning that the extension length of the connecting unit 200 along the first direction X1 is less than or equal to 1 / 2 the extension length of the fluid control unit 100 along the first direction X1. The connecting unit 200 can be understood as a connecting structure in the linear liquid pump 10; that is, the first connecting unit 200a can be understood as a connecting structure connecting the two fluid control units 100, without adjusting the flow rate and velocity of the liquid in the linear liquid pump 10. The fluid control unit 100 is used to adjust the flow rate and velocity of the transmitted liquid. Therefore, ensuring that the extension length of the connecting unit 200 along the first direction X1 is less than the extension length of the fluid control unit 100 along the first direction X1 can improve the effective control of the liquid flow rate and velocity, thereby improving the working efficiency and stability of the linear liquid pump 10.
[0033] Furthermore, in combination Figure 3 and Figure 4As shown, along the second direction X2, the length of the aperture 201 is a1, and the length of the pipe 1001 in the fluid control unit 100 is a2, where a1 and a2 satisfy: a1 ≤ a2, meaning that the length of the aperture 201 in the connecting unit 200 along the second direction X2 is less than the extension length of the pipe 1001 in the fluid control unit 100 along the second direction X2. Furthermore, if the cross-sectional shapes of the aperture 201 and the pipe 1001 are not specifically limited, they can be as follows: Figure 3 The cross-section of pipe 1001 shown is hexagonal, as referenced. Figure 4 As shown, the cross-section of the aperture 201 is circular. By limiting the dimensions of a1 and a2, it can be ensured that the liquid transported by the pipe 1001 in the fluid control unit 100 can be quickly transported to the connecting unit 100, and the connecting unit 100 will not obstruct the flow of liquid. This improves the overall structure's effective control over liquid flow rate and velocity, and enhances the working efficiency and stability of the linear liquid pump 10. It should be noted that... Figure 4 In order to compare the dimensions of a1 and a2, in Figure 4 The cross-sectional structure of pipe 1001 is shown by dashed lines, but... Figure 4 The actual cross-sectional view does not include the cross-sectional view of pipe 1001.
[0034] Optional, see reference Figure 4 As shown, along the second direction X2, the peripheral region of the connecting unit 200 surrounding the aperture 201 ( Figure 4 The thickness of (shown as 202 in the image) is c1, referenced. Figure 3 As shown, the overall thickness of the fluid control unit 100 along the second direction X2 is c2, where c1 and c2 can satisfy: |c1-c2| / c2≤0.2, that is, the values of c1 and c2 are the same or similar, thus reflecting the regularity of the overall structure of the linear liquid pump 10.
[0035] Figure 8 yes Figure 1 Another cross-sectional view along section line A-A', please refer to [the diagram]. Figure 3 and Figure 8As shown, the substrate 1000 includes a first substrate layer 1000a, a substrate body 1000b, and a second substrate layer 1000c; along the second direction X2, the first substrate layer 1000a is located on the side of the channel 1001 closer to the electrode structure 2000, the second substrate layer 1000c is located on the side of the channel 1001 away from the electrode structure 2000, and the substrate body 1000b is located between the first substrate layer 1000a and the second substrate layer 1000c, and surrounds the channel 1001; the first substrate layer 1000a includes Along the second direction X2, the first substrate portion 1000a1 overlaps with the pipe 1001, and the second substrate portion 1000a2 overlaps with the substrate body 1000b. When the second electrode layer 2003 in the fluid control unit 1000 receives an electrical signal, along the second direction X2, the minimum distance between the first substrate portion 1000a1 and the second substrate layer 1000c is less than the minimum distance between the second substrate portion 1000a2 and the second substrate layer 1000c.
[0036] For details, please refer to Figure 3 and Figure 8 As shown, the substrate 1000 includes a first substrate layer 1000a, a substrate body 1000b, and a second substrate layer 1000c. Along the second direction X2, the first substrate layer 1000a is located on the side of the channel 1001 closer to the electrode structure 2000, the second substrate layer 1000c is located on the side of the channel 1001 away from the electrode structure 2000, and the substrate body 1000b is located between the first substrate layer 1000a and the second substrate layer 1000c, surrounding the channel 1001. In other words, taking the direction of the substrate 1000 pointing towards the electrode structure 2000 as an example, the first substrate layer 1000a is located above the substrate body 1000b and the channel 1001, the second substrate layer 1000c is located below the substrate body 1000b and the channel 1001, and the substrate body 1000b is disposed around the channel 1001, which is equivalent to the substrate body 1000b surrounding the channel 10001. Optionally, the materials of the first substrate layer 1000a, the substrate body 1000b, and the second substrate layer 1000c may include silicon and silicon oxide. The specific materials may be adapted according to the preparation process of the substrate 1000, and the embodiments of the present invention do not impose specific limitations on this.
[0037] Further reference Figure 3 and Figure 8As shown, the first substrate layer 1000a includes a first substrate portion 1000a1 and a second substrate portion 1000a2, wherein in the second direction X2, the first substrate portion 1000a1 overlaps with the channel 1001, and the second substrate portion 1000a2 overlaps with the substrate body 1000b. Since the first substrate portion 1000a1 overlaps with the channel 1001, when the piezoelectric layer 2002 in the electrode structure 2000 deforms due to the voltage difference between the first electrode layer 2001 and the second electrode layer 2003, it can cause the first substrate portion 1000a1 to bend towards the channel 1001. (Refer to...) Figure 8 As shown. In electrode structure 200, when the piezoelectric layer 2002 returns to its original state due to the disappearance of the voltage difference between the first electrode layer 2001 and the second electrode layer 2003, it can drive the first substrate portion 1000a1 to return to its original position. (Refer to...) Figure 3 As shown. Among them, Figure 3 and Figure 8 The piezoelectric layer 2002 generates reciprocating motion due to the piezoelectric effect, thereby propelling the liquid.
[0038] Specifically, in combination Figure 7 and Figure 8 As shown, when the second electrode layer 2003 in the fluid control unit 1000 receives an electrical signal, it refers to... Figure 7 When the second electrode layer 2003 receives the enable level provided by the output signal terminal 301 connected to it, the reference... Figure 8 As shown, along the second direction X2, the minimum distance between the first substrate portion 1000a1 and the second substrate layer 1000c is less than the minimum distance between the second substrate portion 1000a2 and the second substrate layer 1000c, that is, the first substrate portion 1000a1 is compressed closer to the second substrate layer 1000c. And combined Figure 3 and Figure 7 As shown, when the second electrode layer 2003 in the fluid control unit 1000 does not receive an electrical signal, i.e., reference... Figure 7 When the second electrode layer 2003 receives a non-enable level provided by the output signal terminal 301 connected to it, the reference... Figure 3 As shown, along the second direction X2, the minimum distance between the first substrate portion 1000a1 and the second substrate layer 1000c is equal to the minimum distance between the second substrate portion 1000a2 and the second substrate layer 1000c, that is, the first substrate portion 1000a1 returns to its original position flush with the second substrate layer 1000c.
[0039] Continue to refer to Figure 7As shown, in the liquid flow working state, the time interval between the nth and (n+1)th times the output signal terminal 301 provides an electrical signal is T; along the second direction X2, the resonant frequency of the first substrate portion 1000a1 in the fluid control unit 100 is f0; where n is a positive integer, f0 is a positive number, and T=1 / f0 is satisfied.
[0040] Among them, reference Figure 7 As shown, Figure 7 The diagram illustrates the process by which two signal output terminals 301 sequentially provide electrical signals during the liquid flow operation of the linear liquid pump 10. Specifically, one output signal terminal 301 (reference...) Figure 7 Taking the output signal terminal 301i as an example, the time interval between the nth and n+1th times the electrical signal is T. This can also be understood as the time interval between the two enable levels received by the second electrode layer 2003, which is electrically connected to the signal output terminal 301, or as one effective working cycle of the second electrode layer 2003 is T.
[0041] Furthermore, in combination Figure 3 , Figure 7 and Figure 8 As shown, when the second electrode layer 2003 in the fluid control unit 1000 receives an electrical signal, i.e., as a reference... Figure 7 When the second electrode layer 2003 receives an enable level from the output signal terminal 301 connected to it, the first substrate portion 1000a1 bends towards the second substrate layer 1000c. When the second electrode layer 2003 in the fluid control unit 1000 does not receive an electrical signal, i.e., when reference... Figure 7 When the second electrode layer 2003 receives a non-enable level from the output signal terminal 301 connected to it, the first substrate portion 1000a1 moves away from the second substrate layer 1000c and returns to its original position (flush with the second substrate layer 1000c). Therefore, the piezoelectric layer 2002 drives the first substrate portion 1000a1 to resonate at frequency f0, where T = 1 / f0. Specifically, because the structure of the fluid control unit 1000 has a resonant frequency f0, when the frequency of the cycle period T is the same as the resonant frequency f0 of the fluid control device, the fluid control unit 1000 operates at resonance. The piezoelectric layer 2002 can obtain the maximum displacement during operation, thereby increasing the flow rate of the liquid in the linear liquid pump 10 and improving the working efficiency of the linear liquid pump 10.
[0042] Continue to refer to Figure 6 and Figure 7 As shown, the linear liquid pump includes m fluid control units 100; in the liquid flow operating state, the i-th output signal terminal ( Figure 6 (shown as 301i) and the (i+1)th output signal terminal ( Figure 6 (shown as 301i+1) The time interval for sequentially providing electrical signals in the time sequence is Ta; where m≥2, n is a positive integer, satisfying: Ta=T / 2m.
[0043] Further reference Figure 6 As shown, the linear liquid pump includes m fluid control units 100. Figure 6 The example uses m=4; the specific value of m can be adjusted according to implementation requirements. Further details can be found in the references provided. Figure 6 and Figure 7 As shown, the i-th output signal terminal ( Figure 6 (shown as 301i) and the (i+1)th output signal terminal ( Figure 6 (shown as 301i+1 in the diagram) The time interval for sequentially providing electrical signals is Ta, which can also be understood as the time interval between the i-th output signal terminals ( Figure 6 (shown as 301i) provides the start time of the enable level and the (i+1)th output signal terminal ( Figure 6 The time interval for providing the enable level (shown as 301i+1) is Ta. Ta, T, and m satisfy: Ta = T / 2m.
[0044] Specifically, when the linear liquid pump 10 is in liquid flow operation, the liquid is sequentially transported along the first direction X1 through the fluid control unit 100 and the connecting unit 200 in the linear liquid pump 10. The second electrode layer 2003 in the fluid control unit 100 compresses the piezoelectric layer 2003 towards the pipe 1001 according to the received enable level, causing the liquid transported to the fluid control unit 100 to continue transporting along the first direction X1. The voltage / frequency of the enable level received by each fluid control unit 100 is the same, but the enable levels have a time difference Ta. When the total number of fluid control devices is m, Ta = T / 2m. This means that after the last fluid control unit 100 completes its contraction and discharges the internal fluid, the first fluid control unit 100 returns to its original position, causing the flow channel to expand and accept the fluid to be discharged in the next cycle from the fluid inlet. Simultaneously, after the last fluid control unit 100 returns to its original position, the next cycle begins again, with a cycle duration of T. The first fluid control unit 100 can be understood as the first fluid control unit 100 into which the liquid enters the linear liquid pump 10, and the last fluid control unit 100 can be understood as the liquid in the linear liquid pump 10 being directly discharged from the linear liquid pump 10 after passing through this fluid control unit 100.
[0045] Figure 9 This is a schematic diagram of another linear liquid pump provided in an embodiment of the present invention. Figure 10 yes Figure 9A timing diagram of the electrical signal provided at the signal output terminal of a linear liquid pump during liquid flow operation is provided, for reference. Figure 9 and Figure 10 As shown, the linear liquid pump includes m fluid control units 100; each fluid control unit 100 includes a first fluid control unit and an m-th fluid control unit, and an output signal terminal 301 includes a first output signal terminal and an m-th output signal terminal. The first output signal terminal is electrically connected to the second electrode layer in the first fluid control unit, and the m-th output signal terminal is electrically connected to the second electrode layer in the m-th fluid control unit. In the liquid flow working state, the time interval between the cutoff time of the electrical signal provided by the first output signal terminal and the start time of the electrical signal provided by the m-th output signal terminal is Tb; where m≥2, n is a positive integer, and satisfies: Tb=T / 2m.
[0046] For details, please refer to Figure 9 As shown, the linear liquid pump includes m fluid control units 100, and the specific value of m can be adaptively adjusted according to the implementation requirements. (Reference) Figure 9 As shown, the fluid control unit 100 includes a first fluid control unit ( Figure 9 (shown as 100-1) and the m-th fluid control unit ( Figure 9 (shown as 100-m), where the first fluid control unit can be understood as the fluid control unit 100 closest to the liquid inlet in the linear liquid pump 10, and the first fluid control unit comes into contact with the liquid to be transferred first compared to the other fluid control units in the linear liquid pump 10; where the m-th fluid control unit can be understood as the fluid control unit 100 closest to the liquid outlet in the linear liquid pump 10, and the m-th fluid control unit comes into contact with the liquid to be transferred last compared to the other fluid control units in the linear liquid pump 10.
[0047] Furthermore, Figure 10 The voltage provided by the output signal terminals electrically connected to different fluid control units 100 is represented in the following: output signal terminal 301-1 can be understood as the signal terminal electrically connected to the second electrode layer 2002 in the first fluid control unit; output signal terminal 301-2 can be understood as the signal terminal electrically connected to the second electrode layer 2002 in the second fluid control unit; output signal terminal 301-3 can be understood as the signal terminal electrically connected to the second electrode layer 2002 in the third fluid control unit; and output signal terminal 301-m can be understood as the signal terminal electrically connected to the second electrode layer 2002 in the m-th fluid control unit.
[0048] Further reference Figure 9 and Figure 10As shown, in the liquid flow operation state, the time interval between the cutoff time of the first output signal terminal providing the electrical signal and the start time of the m-th output signal terminal providing the electrical signal is Tb, and Tb, T, and m satisfy Tb=T / 2m. This means that after the m-th fluid control unit 100 completes its contraction and discharges the internal fluid, the first fluid control unit 100 returns to its original position, causing the flow channel to expand and receive the fluid to be discharged in the next cycle from the fluid inlet again. At the same time, after the last fluid control unit 100 returns to its original position, the next cycle starts again, and the cycle duration is T. This ensures the reliability and accuracy of the linear liquid pump 10.
[0049] Continue to refer to Figure 9 As shown, the connection unit 200 further includes a second connection unit 200b and / or a third connection unit 200c; the orifice 201 of the second connection unit 200b connects the liquid inlet 20 and the pipe 1001 of the fluid control unit 100 near the liquid inlet 20 in the linear liquid pump 10; the orifice 201 of the third connection unit 200c connects the liquid outlet 30 and the pipe 1001 of the fluid control unit 100 near the liquid outlet 30 in the linear liquid pump 10.
[0050] For details, please refer to Figure 9 As shown, the connecting unit 200 further includes a second connecting unit 200b. The orifice 201 of the second connecting unit 200b connects the liquid inlet 20 to the pipe 1001 of the fluid control unit 100 near the liquid inlet 20 in the linear liquid pump 10. The liquid inlet 20 can be understood as the inlet of the linear liquid pump 10. In other words, the connecting unit 200 includes the second connecting unit 200b, which is located near the liquid inlet 20, ensuring the reliability and stability of liquid transmission to the linear liquid pump 10.
[0051] Further reference Figure 9 As shown, the connecting unit 200 may further include a third connecting unit 200c. The orifice 201 of the third connecting unit 200c connects the liquid outlet 30 to the pipe 1001 of the fluid control unit 100 near the liquid outlet 30 in the linear liquid pump 10. The liquid outlet 30 can be understood as the outlet of the linear liquid pump 10. In other words, the connecting unit 200 includes the third connecting unit 200c, which is located near the liquid outlet 30, ensuring the reliability and stability of liquid transmission through the linear liquid pump 10.
[0052] Further reference Figure 9 As shown, the connection unit 200 may also include a second connection unit 200b and a third connection unit 200c.
[0053] Optionally, the Young's modulus of the material of the connecting unit 200 is b, where b can satisfy: 0.0001 GPa ≤ b ≤ 0.5 GPa, meaning the connecting unit 200 is a material with a low Young's modulus, such as a rubber tube or PVC hose, which has high flexibility and facilitates the assembly of the linear liquid pump 10. Alternatively, b can satisfy 1 GPa ≤ b, meaning the connecting unit 200 is a material with a high Young's modulus, such as a steel pipe or hard plastic pipe, which has high hardness and helps improve the structural stability of the linear liquid pump 10.
[0054] Continue to refer to Figure 2 As shown, the linear liquid pump 10 includes a first connecting line 410 and a second connecting line 420; the piezoelectric layer 2002 includes a first opening 2002a, which exposes a first electrode layer 2001. The first electrode layer 2001 is electrically connected to the first connecting line 410 through the first opening 2002a, and the first electrode layer 2001 is grounded through the first connecting line 410; the second connecting line 420 is located on the side of the piezoelectric layer 2002 away from the first electrode layer 2001, and the second electrode layer 2003 is electrically connected to the signal input terminal through the second connecting line 420.
[0055] For details, please refer to Figure 2 As shown, the linear liquid pump 10 includes a first connecting line 410 and a second connecting line 420. The first connecting line 410 is electrically connected to the first electrode layer 2001, and the second connecting line 420 is electrically connected to the second electrode layer 2003. Different electrical signals are transmitted through the first connecting line 410 and the second connecting line 420 to realize a voltage difference between the first electrode layer 2001 and the second electrode layer 2003. The piezoelectric layer 2002 deforms according to the piezoelectric effect.
[0056] For details, please refer to Figure 2 As shown, the piezoelectric layer 2002 includes a first opening 2002a, which exposes at least a portion of the first electrode layer 2001. The first electrode layer 2001 is electrically connected to the first connecting line 410 through the first opening 2002a. One end of the first connecting line 410 is electrically connected to the first electrode layer 2001, and the other end is grounded, thereby grounding the first electrode layer 2001. The second connecting line 420 is located on the side of the piezoelectric layer 2002 away from the first electrode layer 2001. The second electrode layer 2003 is electrically connected to the signal input terminal in the control module through the second connecting line 420. Therefore, the second electrode layer 2003 can receive the enable level provided by the control module through the second connecting line 420.
[0057] Continue to refer to Figure 3As shown, the fluid control unit 100 also includes a protective layer 3000 and a buffer layer 4000. The protective layer 3000 is located on the side of the electrode structure 2000 away from the substrate 1000, and the buffer layer 4000 is located on the side of the electrode structure 2000 close to the substrate 1000.
[0058] Further reference Figure 3 As shown, the fluid control unit 100 also includes a protective layer 3000 and a buffer layer 4000, wherein the protective layer 3000 and the buffer layer 4000 are located on both sides of the electrode structure 2000 along the thickness direction of the substrate 1000, protecting the electrode structure 2000. Specifically, the protective layer 3000 is located on the side of the electrode structure 2000 away from the substrate 1000, and the buffer layer 4000 is located on the side of the electrode structure 2000 closer to the substrate 1000. By providing the protective layer 3000 and the buffer layer 4000, the structural stability of the fluid control unit 100 can be improved, thereby improving the overall structural stability of the linear liquid pump 10.
[0059] Figure 11 This is a schematic flowchart of a liquid control method provided in an embodiment of the present invention. (Refer to...) Figure 11 As shown, the liquid control method includes: S110. In the liquid flow working state, the control of the i-th output signal terminal and the control of the (i+1)-th output signal terminal are configured to provide electrical signals sequentially in time sequence.
[0060] Specifically, among them, reference Figure 1 As shown, the linear liquid pump 10 includes a fluid control unit 100 and a connection unit 200. The connection unit 200 is used to connect two adjacent fluid control units 100 to realize the sequential transfer of liquid, achieve effective control of the liquid transfer in the linear liquid pump 10, and improve the working efficiency and working reliability of the linear liquid pump 10.
[0061] For details, please refer to Figures 1 to 3As shown, the fluid control unit 100 includes a substrate 1000 and an electrode structure 2000 located on one side of the substrate 1000. The electrode structure 2000 includes a first electrode layer 2001, a piezoelectric layer 2002, and a second electrode layer 2003 stacked sequentially. The piezoelectric layer 2002 is located between the first electrode layer 2001 and the second electrode layer 2003 along the thickness direction of the substrate 1000, and the first electrode layer 2001 is located on the side of the piezoelectric layer 2002 closer to the substrate 1000. In other words, the first electrode layer 2001, the piezoelectric layer 2002, and the second electrode layer 2003 form a "sandwich" electrode structure. When the first electrode layer 2001 and the second electrode layer 2003 receive different electrical signals, a voltage difference will occur between them, causing the piezoelectric layer 2002 to deform to varying degrees, i.e., the piezoelectric effect will occur.
[0062] refer to Figures 1 to 3 As shown, the substrate 1000 includes a channel 1001 embedded inside the substrate 1000, wherein the channel 1001 penetrates the substrate 1000 along a first direction X1. The first direction X1 can be understood as the extension direction of the channel 1001, that is, the flow direction of the liquid in the channel 1001. The channel 1001 penetrating the substrate 1000 along the first direction X1 facilitates the flow of liquid through the fluid control unit 100.
[0063] For details, please refer to Figures 1 to 3 As shown, along the second direction X2, the orthographic projection of the first electrode layer 2001 onto the surface of the substrate 1000 coincides with that of the substrate 1000. The second direction X2 can be understood as the thickness direction of the substrate 1000. That is, the first electrode layer 2001 is entirely disposed on the surface of the substrate 1000. Along the second direction X2, the orthographic projection of the piezoelectric layer 2002 onto the surface of the substrate 1000 coincides with that of the substrate 1000. That is, the piezoelectric layer 2002 is entirely disposed on the surface of the first electrode layer 2001. Along the second direction X2, the orthographic projection area of the second electrode layer 2003 onto the surface of the substrate 1000 is smaller than the orthographic projection area of the first electrode layer 2001 onto the surface of the substrate 1000. That is, the second electrode layer 2003 is not entirely disposed on one side of the piezoelectric layer 2002, but is disposed in sections on the side of the piezoelectric layer 2002 away from the first electrode layer 2001.
[0064] Further reference Figures 1 to 3As shown, the orthographic projection of the second electrode layer 2003 on the surface of the substrate 1000 at least partially overlaps with the orthographic projection of the pipe 1001 on the surface of the substrate 1000. In other words, the second electrode layer 2003 and the pipe 1001 have overlapping projections along the thickness direction of the substrate 1000. When there is a different voltage difference between the first electrode layer 2001 and the second electrode layer 2003, the piezoelectric layer 2002 can move towards the pipe 1001, realizing a change in the volume within the pipe 1001, thereby driving the flow direction of the liquid and adjusting the flow rate of the liquid, thus realizing the transfer of liquid in the linear liquid pump 10.
[0065] For details, please refer to Figure 1 and Figure 4 As shown, the connecting unit 200 includes an orifice 201 through which liquid in the linear liquid pump 10 is transferred. Further, refer to... Figure 1 As shown, the connecting unit 200 includes a first connecting unit 200a. The aperture 201 of the first connecting unit 200a is connected to the pipes 1001 of two fluid control units 100 arranged adjacent to each other along the first direction X1, realizing the stepwise transfer of liquid in the pipes 1001 of the two fluid control units 100, and realizing the liquid transfer process in the linear liquid pump 10. It should be noted that there is no specific limitation on the number of fluid control units 100 in the linear liquid pump 10. Figure 1 The example described uses a linear liquid pump 10 comprising two fluid control units 100. Figure 1 A linear liquid pump 10 includes a first connecting unit 200a that connects the pipes 1001 in two fluid control units 100. If a linear liquid pump 10 includes p fluid control units 100, then a linear liquid pump 10 includes p-1 first connecting units 200a that connect the pipes 1001 in two adjacent fluid control units 100.
[0066] Further reference Figure 1 and Figure 5As shown, the linear liquid pump 10 also includes a control module 300. The control module 300 includes multiple signal output terminals 301, and one signal output terminal 301 is electrically connected to the second electrode layer 2003 of a fluid control unit 100. That is, the control module 300 can be understood as a signal transmitter that provides electrical signals to the second electrode layer 2003 in each fluid control unit 100. The first electrode layer 2001 is configured to ground potential. When the second electrode layer 2003 receives the electrical signal provided by the signal output terminal 301, a voltage difference will be generated between the first electrode layer 2001 and the second electrode layer 2003. Due to the piezoelectric effect, the piezoelectric layer 2002 deforms, causing a change in the volume of the pipe 1001, thereby changing the pressure in the pipe 1001, realizing the transport of liquid, and realizing the liquid transfer process of the linear liquid pump 10.
[0067] Specifically, Figure 6 This is a schematic diagram of another linear liquid pump provided in an embodiment of the present invention, for reference. Figure 6 As shown, the fluid control unit 100 includes the i-th fluid control unit ( Figure 6 (shown as 100i) and the (i+1)th fluid control unit ( Figure 6 (shown as 100i+1), output signal terminal 301 includes the i-th output signal terminal ( Figure 6 (shown as 301i in the diagram) and the (i+1)th output signal terminal ( Figure 6 (shown as 301i+1). The i-th fluid control unit ( Figure 6 The second electrode layer 2003 (shown as 100i) and the i-th output signal terminal ( Figure 6 Electrical connection (shown as 301i), i.e., the i-th output signal terminal ( Figure 6 The electrical signal output by (shown as 301i) is transmitted to the i-th fluid control unit ( Figure 6 In (shown as 100i), the (i+1)th fluid control unit ( Figure 6 The second electrode layer 2003 (shown as 100i+1) and the (i+1)th output signal terminal ( Figure 6 (shown as 301i+1) Electrical connection, that is, the (i+1)th output signal terminal ( Figure 6 The electrical signal output by (shown as 301i+1) is transmitted to the (i+1)th fluid control unit ( Figure 6 (shown as 100i in the middle).
[0068] Furthermore, Figure 7 yes Figure 6 A timing diagram of the electrical signal provided at the signal output terminal of a linear liquid pump during liquid flow operation is provided, for reference. Figure 6 and Figure 7As shown, the linear liquid pump 10 includes a liquid flow operating state. In the liquid flow operating state, the control module 300 outputs a signal at the i-th output terminal (…). Figure 7 (shown as 301i) and the (i+1)th output signal terminal ( Figure 7 (shown as 301i+1) is configured to provide electrical signals sequentially in timing. In other words, the control module 300 controls the i-th output signal terminal ( Figure 7 When the enable level (providing a valid electrical signal) is provided (as shown in 301i), the control module 300 controls the (i+1)th output signal terminal (…). Figure 7 (As shown in 301i+1) No enable level is provided (an invalid electrical signal is provided), and the two are staggered in timing. (Refer to...) Figure 6 and Figure 7 As shown, if the i-th fluid control unit is located closer to the (i+1)-th fluid control unit, the control module 300 at the i-th output signal terminal ( Figure 7 (shown as 301i) provides an electrical signal before the (i+1)th output signal terminal ( Figure 7 (As shown in 301i+1) provides electrical signals. For details, refer to... Figure 6 and Figure 7 As shown, when the control module 300 provides an electrical signal at the i-th output signal terminal, the i-th fluid control unit can compress the pipe 1001 to facilitate the liquid flow to the pipe 1001 in the (i+1)-th fluid control unit; then, when the control module 300 provides an electrical signal at the (i+1)-th output signal terminal, the (i+1)-th fluid control unit can compress the pipe 1001 again to facilitate the liquid flow to the pipe 1001 in the next fluid control unit, thereby realizing the flow control of the liquid.
[0069] In summary, this invention provides a liquid control method using a linear liquid pump. During liquid flow operation, the control of the i-th output signal terminal and the control of the (i+1)-th output signal terminal are configured to sequentially provide electrical signals. This improves the control accuracy of the liquid flow rate and enhances the operating efficiency of the linear liquid pump.
[0070] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.
Claims
1. A linear liquid pump characterized by, The application relates to a linear liquid pump. The linear liquid pump comprises a plurality of fluid control units, a connecting unit and a control module. The fluid control unit comprises a substrate and an electrode structure on one side of the substrate. The substrate comprises a pipe embedded in the substrate, and the pipe penetrates the substrate along a first direction. The electrode structure comprises a first electrode layer, a piezoelectric layer and a second electrode layer. The first electrode layer is on one side of the substrate and is configured as a ground potential. The first electrode layer coincides with the orthographic projection of the substrate on the substrate surface along a second direction.
2. The linear liquid pump of claim 1, wherein, The piezoelectric layer is on the side of the first electrode layer away from the substrate and coincides with the orthographic projection of the substrate on the substrate surface along the second direction. The second electrode layer is on the side of the piezoelectric layer away from the first electrode layer. The second electrode layer has a smaller orthographic projection area on the substrate surface than the first electrode layer. The orthographic projection of the second electrode layer on the substrate surface at least partially overlaps the orthographic projection of the pipe on the substrate surface. The connecting unit comprises a plurality of apertures. The connecting unit comprises a first connecting unit, and the aperture of the first connecting unit is connected with the pipes of two fluid control units arranged adjacently along the first direction. The control module comprises a plurality of signal output ends. One signal output end is electrically connected with the second electrode layer of one fluid control unit. The fluid control unit comprises an i-th fluid control unit and an (i+1)-th fluid control unit. The output signal end comprises an i-th output signal end and an (i+1)-th output signal end. The i-th output signal end is electrically connected with the second electrode layer of the i-th fluid control unit. The (i+1)-th output signal end is electrically connected with the second electrode layer of the (i+1)-th fluid control unit. The linear liquid pump comprises a liquid flow passing working state. In the liquid flow passing working state, the i-th output signal end and the (i+1)-th output signal end are configured to sequentially provide electrical signals in time sequence. Wherein, i is a positive integer. The first direction is the direction of the i-th fluid control unit pointing to the (i+1)-th fluid control unit. The second direction is the thickness direction of the substrate. Along the first direction, the length of the connecting unit is L1, and the length of the fluid control unit is L2. It is satisfied that L1<=0.5L2, and L1 and L2 are positive numbers. Along the second direction, the length of the aperture is a1, and the length of the pipe is a2. It is satisfied that a1<=a2, and a1 and a2 are positive numbers.
3. The linear liquid pump of claim 1, wherein, The substrate comprises a first substrate layer, a substrate body and a second substrate layer; along the second direction, the first substrate layer is located on one side of the pipe close to the electrode structure, the second substrate layer is located on one side of the pipe away from the electrode structure, and the substrate body is located between the first substrate layer and the second substrate layer and surrounds the pipe; the first substrate layer comprises a first substrate part and a second substrate part, and along the second direction, the first substrate part overlaps the pipe, and the second substrate part overlaps the substrate body. When the second electrode layer in the fluid control unit receives the electrical signal, the minimum distance between the first substrate part and the second substrate layer along the second direction is less than the minimum distance between the second substrate part and the second substrate layer.
4. The linear liquid pump of claim 3, wherein, In the liquid flow working state, the time interval between the nth time of providing the electrical signal and the n+1 time of providing the electrical signal by the output signal end is T; along the second direction, the resonant frequency of the first substrate part in the fluid control unit is f0; wherein n is a positive integer, f0 is a positive number, and T=1 / f0 is satisfied.
5. The linear liquid pump of claim 1, wherein, The linear liquid pump comprises m fluid control units. In the liquid flow working state, the time interval between the i th output signal end and the i+1 th output signal end in time sequence for sequentially providing the electrical signal is Ta. Wherein, m≥2, n is a positive integer, and Ta=T / 2m is satisfied.
6. The linear liquid pump of claim 1, wherein, The linear liquid pump comprises m fluid control units. The fluid control unit comprises the first fluid control unit and the m th fluid control unit, and the output signal end comprises the first output signal end and the m th output signal end; the first output signal end is electrically connected with the second electrode layer in the first fluid control unit, and the m th output signal end is electrically connected with the second electrode layer in the m th fluid control unit. In the liquid flow working state, the time interval between the cutoff time of the first output signal end for providing the electrical signal and the starting time of the m th output signal end for providing the electrical signal is Tb. Wherein, m≥2, n is a positive integer, and Tb=T / 2m is satisfied.
7. The linear liquid pump of claim 1, wherein The connecting unit further comprises a second connecting unit and / or a third connecting unit; the pore diameter of the second connecting unit connects the liquid inlet and the pipe of the fluid control unit close to the liquid inlet in the linear liquid pump; the pore diameter of the third connecting unit connects the liquid outlet and the pipe of the fluid control unit close to the liquid outlet in the linear liquid pump.
8. The linear liquid pump of claim 1, wherein, The linear liquid pump comprises a first connecting line and a second connecting line; The piezoelectric layer comprises a first opening, and the first opening exposes the first electrode layer; the first electrode layer is electrically connected with the first connecting line through the first opening, and the first electrode layer is grounded through the first connecting line; The second connecting line is located on one side of the piezoelectric layer away from the first electrode layer, and the second electrode layer is electrically connected with the signal input end through the second connecting line.
9. The linear liquid pump of claim 1, wherein, The fluid control unit further comprises a protective layer and a buffer layer, the protective layer is located on the side of the electrode structure away from the substrate, and the buffer layer is located on the side of the electrode structure close to the substrate.
10. A method of liquid control using the linear liquid pump of any one of claims 1-9, the linear liquid pump comprising: A plurality of fluid control units, the fluid control unit comprises a substrate and an electrode structure located on one side of the substrate; The substrate comprises a pipe embedded in the interior of the substrate, the pipe penetrates the substrate along a first direction; the electrode structure comprises a first electrode layer, a piezoelectric layer and a second electrode layer; the first electrode layer is located on one side of the substrate, and the first electrode layer is configured to be at ground potential; along a second direction, the first electrode layer coincides with the orthographic projection of the substrate on the substrate surface; the piezoelectric layer is located on the side of the first electrode layer away from the substrate, and along the second direction, the piezoelectric layer coincides with the orthographic projection of the substrate on the substrate surface; the second electrode layer is located on the side of the piezoelectric layer away from the first electrode layer, and along the second direction, the second electrode layer has a smaller orthographic projection area on the substrate surface than the first electrode layer, and the orthographic projection of the second electrode layer on the substrate surface at least partially overlaps with the orthographic projection of the pipe on the substrate surface; The connection unit comprises an aperture; the connection unit comprises a first connection unit, the aperture of the first connection unit is connected with the pipes of two fluid control units arranged adjacent along the first direction; the control module comprises a plurality of signal output terminals, one signal output terminal is electrically connected with the second electrode layer of one fluid control unit; the fluid control unit comprises an i-th fluid control unit and an i+1-th fluid control unit, the output signal terminal comprises an i-th output signal terminal and an i+1-th output signal terminal, the i-th output signal terminal is electrically connected with the second electrode layer in the i-th fluid control unit, and the i+1-th output signal terminal is electrically connected with the second electrode layer in the i+1-th fluid control unit; the control method comprises: In the liquid flow communication working state, the i-th output signal terminal and the i+1-th output signal terminal are controlled to provide electrical signals in time sequence.