A detection device and method for detecting the pulling stiffness of an immersed unit tube bundle

Abstract

The application discloses a kind of detection device and detection method of pulling rigidity of immersed unit tube bundle.It includes simulation immersed unit, to be detected tube bundle group, six-dimensional detection platform, optical damping platform and controller;Optical damping platform is set and fixedly connected with simulation immersed unit through six-dimensional detection platform;Simulation immersed unit is polygonal structure, simulation immersed unit connects to be detected tube bundle group and detects pulling rigidity by detection device;Controller is connected and controls six-dimensional detection platform, and collects the displacement data and pulling force data of to be detected tube bundle group on six degrees of freedom.The application is used for the tube bundle of connecting immersed unit in immersion lithography machine to carry out pulling rigidity detection under simulating real working condition after completing plastic shaping processing and integration, carries out process quality control to the processing and integration of tube bundle, guarantees that immersed unit and its connecting tube bundle integrated to complete machine meet the specification requirements of pulling force, so as to guarantee the pose and motion control precision of immersed unit.

Description

Technical Field

[0001] This invention relates to the field of immersion lithography technology, and in particular to a device and method for detecting the tensile stiffness of immersion unit tube bundles. Background Technology

[0002] Projection lithography is one of the core pieces of equipment in large-scale integrated circuit manufacturing. It uses a laser of a specific wavelength to illuminate a photomask, and through a projection lens, transfers the pattern from the photomask onto a photoresist layer on a silicon wafer. After exposure, the silicon wafer undergoes subsequent processes such as development, etching, deposition, ion implantation, polishing, testing, dicing, welding, and packaging to ultimately form a chip.

[0003] Immersion lithography machines fill the space between the last lens of the projection lens and the silicon wafer with a high-refractive-index immersion liquid, thereby improving lithographic resolution and achieving higher and smaller process linewidths. The immersion unit is responsible for supplying and recovering this high-refractive-index immersion liquid, forming a stable immersion flow field. Furthermore, the immersion unit requires real-time pose and motion control to ensure the stability and safety of the immersion flow field gaps. The immersion liquid, responsible for supplying and recovering, is transported through a tube bundle, which exerts a pulling force on the immersion unit. When the tube bundle's tensile stiffness is too high, the motion displacement of the immersion unit will generate excessive disturbance force, affecting the motion control accuracy of the immersion unit. To reduce the tube bundle's tensile stiffness, the tube bundle processing requires plastic shaping and other processes. Therefore, after the tube bundle is processed, its tensile stiffness is tested under simulated real-world conditions to strengthen quality control and ensure that the immersion unit and its connecting tube bundle, ultimately integrated into the entire machine, meet the tensile force specifications, thus guaranteeing the pose and motion control accuracy of the immersion unit. This is of great significance. Summary of the Invention

[0004] This invention addresses the problem of tension in the tube bundle connecting immersion units in the field of immersion lithography technology. It provides a detection device and method for the tension stiffness of the immersion unit tube bundle. After the tube bundle is processed, it is integrated into the detection device of this invention to detect its tension stiffness under simulated real working conditions. This strengthens process quality control, guides subsequent integration and debugging of immersion units, and ensures the pose and motion control accuracy of the immersion units.

[0005] The technical solution adopted in this invention is:

[0006] I. Detection device for the tensile stiffness of submerged unit tube bundles

[0007] The device for detecting the tensile stiffness of immersion unit tube bundles includes a simulated immersion unit, a group of tube bundles to be tested, a six-dimensional detection platform, an optical vibration damping platform, and a controller. The six-dimensional detection platform is mounted and fixedly connected above the optical vibration damping platform, and the simulated immersion unit is mounted and fixedly connected to the six-dimensional detection platform. The simulated immersion unit has a polygonal layered structure, and one or more groups of tube bundles to be tested are connected to the simulated immersion unit, enabling the detection device to detect the tensile stiffness of the tube bundles contained in the one or more groups of tube bundles to be tested. One end of each group of tube bundles to be tested is connected to one side of the simulated immersion unit, and the other end is connected to the outer periphery of the upper surface of the optical vibration damping platform. The controller is connected within the six-dimensional detection platform to control the six-dimensional detection platform and collect the displacement data and tensile force data of the group of tube bundles to be tested in six degrees of freedom detected by the six-dimensional detection platform.

[0008] Each group of tube bundles to be tested includes a tube bundle to be tested, a tube bundle connection assembly, and a tube bundle fixing assembly. The tube bundle to be tested has a right-angle structure. The top end of one side of the tube bundle to be tested is connected to one side of the simulated immersion unit through the tube bundle connection assembly, and the other side is in close contact with the side of the tube bundle fixing assembly and extends upward. The tube bundle fixing assembly is a strip-shaped support, which is vertically set and fixedly connected to the outer periphery of the upper surface of the optical vibration damping platform.

[0009] The six-dimensional detection platform includes multiple six-dimensional force sensors, force sensor adapters, and a six-dimensional motion platform. The lower end of the six-dimensional motion platform is fixedly connected to the optical vibration damping platform, and the upper end is fixedly connected to the bottom surface of each six-dimensional force sensor via the force sensor adapters. The upper surface of each six-dimensional force sensor is fixedly connected to the simulated immersion unit. The controller is electrically connected to both the six-dimensional motion platform and each six-dimensional force sensor, controlling the six-dimensional motion platform to move along a specified trajectory and detecting data generated by the simulated immersion unit due to the installation of the tube bundle to be detected. After filtering and conversion, the controller obtains tensile force data and displacement data. The six-dimensional force sensors are distributed circumferentially around the center of mass of the simulated immersion unit.

[0010] II. Testing Method for the Detection Device of the Tensile Stiffness of Submerged Unit Tube Bundle

[0011] The method includes the following steps:

[0012] 1) Control the movement of the six-dimensional motion platform so that the initial tension / torque at the six-dimensional force sensor detected and calculated by the controller is cleared to zero.

[0013] 2) Establish a coordinate system with the centroid of the simulated immersion unit as the origin, and set the six degrees of freedom in the X, Y, and Z directions of translation and the R direction of rotation. x Ry R z Direction, wherein X, Y, and Z are mutually orthogonal translational coordinate axes, with the Z direction being perpendicular to the simulated silicon wafer, and R... x R y R z These are the rotation coordinate axes for rotation about the X, Y, and Z axes, respectively.

[0014] A single tube bundle or an entire tube bundle to be tested is connected to the simulated immersion unit. The required testing sub-process is specified by determining the number of tube bundles to be tested installed on the testing device. The testing sub-process includes single-direction stiffness testing of a single tube bundle, multi-direction stiffness testing of a single tube bundle, single-direction stiffness testing of an entire tube bundle, and multi-direction stiffness testing of an entire tube bundle.

[0015] 3) Complete the detection sub-process specified in step 2) to obtain the tensile stiffness of a single bundle of tubes to be tested or the entire bundle of tubes to be tested.

[0016] In step 2), the method for detecting the unidirectional stiffness of a single-bundle tube bundle is as follows:

[0017] A1. The simulated immersion unit is driven by the six-dimensional motion platform in the X / Y / R coordinate system. z / Z / R x / R y Movement in any one of the six degrees of freedom causes the single bundle of tubes under test to exert a pulling force on the simulated immersion unit;

[0018] A2. The controller obtains tensile force / torque data in any direction at the measurement point through multiple six-dimensional force sensors, obtains micro-displacement data at the centroid of the simulated immersion unit through a six-dimensional motion platform, sets the center of the connection surface connecting the single bundle to be tested tube and the connecting assembly of the single bundle to be tested tube as the connection point of the single bundle to be tested tube, converts the micro-displacement data at the centroid of the simulated immersion unit into micro-displacement data in any direction at the connection point of the single bundle to be tested tube through a displacement space matrix conversion algorithm, converts the tensile force / torque data at the measurement point of each six-dimensional force sensor into tensile force / torque data in any direction at the connection point of the single bundle to be tested tube through a force space matrix conversion algorithm, and sums the tensile force / torque data at the connection point of the single bundle to be tested tube through each six-dimensional force sensor into the total tensile force / torque data in any direction at the connection point of the single bundle to be tested tube through a linear superposition algorithm;

[0019] A3. The ratio of the total tensile force / torque data in any direction at the connection of a single bundle of tubes under test to the micro-displacement data in any direction at the connection of a single bundle of tubes under test is the tensile stiffness of the single bundle in one direction.

[0020] In step 2), the method for detecting the multi-directional stiffness of a single-bundle tube bundle is specifically as follows:

[0021] B1. The simulated immersion unit is driven by the six-dimensional motion platform in the X / Y / R coordinate system. z / Z / R x / R y The movement in multiple directions with six degrees of freedom causes the single bundle of tubes under test to exert a pulling effect on the simulated immersion unit;

[0022] B2. The controller obtains tensile force / torque data in multiple directions at the measurement points through multiple six-dimensional force sensors, obtains micro-displacement data at the centroid of the simulated immersion unit through a six-dimensional motion platform, converts the micro-displacement data at the centroid of the simulated immersion unit into micro-displacement data in multiple directions at the connection of the single bundle to be tested through a displacement space matrix transformation algorithm, converts the tensile force / torque data at the measurement points of each six-dimensional force sensor into tensile force / torque data in multiple directions at the connection of the single bundle to be tested through a force space matrix transformation algorithm, and sums the tensile force / torque data at the connection of the single bundle to be tested from each six-dimensional force sensor into total tensile force / torque data in multiple directions at the connection of the single bundle to be tested through a linear superposition algorithm.

[0023] B3. By calculating the ratio of the total tension / torque data in a specified direction at the connection point of a single bundle to be tested to the micro-displacement data in the corresponding direction at the connection point of the single bundle to be tested, the tensile stiffness of the single bundle in multiple directions is obtained by comparing the total tension / torque data in a specified direction among the x / y / rz / z / rx / ry directions with the micro-displacement data in the same direction as the specified direction of the total tension / torque.

[0024] In step 2), the method for detecting the unidirectional stiffness of the overall tube bundle is as follows:

[0025] C1. The simulated immersion unit is driven in the X / Y / R coordinate system by the six-dimensional motion platform. z / Z / R x / R y Movement in any one of the six degrees of freedom causes the overall tube bundle under test to exert a pulling force on the simulated immersion unit;

[0026] C2. The controller obtains tensile force / torque data in any direction at the measurement point through multiple six-dimensional force sensors, obtains micro-displacement data at the center of mass of the simulated immersion unit through a six-dimensional motion platform, converts the tensile force / torque data at the measurement point of each six-dimensional force sensor into tensile force / torque data in any direction at the center of mass of the simulated immersion unit through a force space matrix transformation algorithm, and sums the tensile force / torque data of each six-dimensional force sensor at the center of mass of the simulated immersion unit into the total tensile force / torque data in any direction at the center of mass of the simulated immersion unit through a linear superposition algorithm.

[0027] C3. By calculating the ratio of the total tensile force / torque data in any direction at the centroid of the simulated immersion unit to the micro-displacement data in any direction at the centroid of the simulated immersion unit, the tensile stiffness of the entire tube bundle in one direction is obtained.

[0028] In step 2), the method for detecting the multi-directional stiffness of the overall tube bundle is as follows:

[0029] D1. Drive the simulated immersion unit in the coordinate system X / Y / R using the six-dimensional motion platform. z / Z / R x / R y The movement in multiple directions with six degrees of freedom causes the overall tube bundle under test to exert a pulling force on the simulated immersion unit;

[0030] D2. The controller obtains tensile force / torque data in multiple directions at the measurement point through multiple six-dimensional force sensors, obtains micro-displacement data at the center of mass of the simulated immersion unit through a six-dimensional motion platform, converts the tensile force / torque data at the measurement point of each six-dimensional force sensor into tensile force / torque data in multiple directions at the center of mass of the simulated immersion unit through a force space matrix transformation algorithm, and sums the tensile force / torque data at the center of mass of the simulated immersion unit from each six-dimensional force sensor into total tensile force / torque data in multiple directions at the center of mass of the simulated immersion unit through a linear superposition algorithm.

[0031] D3. By calculating the ratio of the total tensile force / torque data in a specified direction at the centroid of the simulated immersion unit to the micro-displacement in the corresponding direction at the centroid of the simulated immersion unit, the tensile stiffness of the overall tube bundle in multiple directions is obtained.

[0032] The displacement space matrix transformation algorithm is as follows:

[0033] ;

[0034] Where i is the number of the tube bundle to be tested, and the center of the connection surface connecting the i-th tube bundle to the connection assembly of the i-th tube bundle to be tested is set as the connection point of the i-th tube bundle to be tested, p iLet be the i-th bundle to be tested, si be the connection point between the i-th bundle to be tested and the connecting assembly of the bundle to be tested, and ΔX_cog, ΔY_cog, ΔR z _cog, ΔZ_cog, ΔR x _cog、ΔR y _cog represents the micro-displacement data in the X / Y / Rz / Z / Rx / Ry directions at the centroid of the simulated submerged element, ΔX_p i ΔY_p i ΔR z _p i ΔZ_p i ΔR x _p i ΔR y _p i Let represent the micro-displacement data of the i-th bundle to be tested in the X / Y / Rz / Z / Rx / Ry directions relative to the bundle connection point. x si 、y si and z si These are the X, Y, and Z coordinates of the connection point of the i-th bundle to be tested in a coordinate system with the centroid of the simulated immersion unit as the origin.

[0035] The force space matrix transformation algorithm described in the single-direction stiffness detection and multi-direction stiffness detection of single-bundle tubes is as follows:

[0036] ;

[0037] Where j is the six-dimensional force sensor number, n is the number of six-dimensional force sensors, and p ij This represents the data detected by the i-th tube bundle under test on the j-th six-dimensional force sensor. x -j、 y -j、 rz -j、 z -j、 rx -j and ry -j represent the corresponding X, Y, and R values ​​measured by the j-th six-dimensional force sensor, respectively. z Z, R x and R y The data above, F x j、F y -j、T rz -j、F z -j、T rx -j and Try -j These represent the corresponding X, Y, and R values ​​measured by the j-th six-dimensional force sensor, respectively. z Z, R x R y Force / torque data, F x -p ij 、F y -p ij 、T rz -p ij 、F z - p ij 、T rx -p ij and T ry -p ij These represent the values ​​measured by the j-th six-dimensional force sensor and transferred to the i-th tube bundle connection point in X, Y, and R, respectively. z Z, R x and R y Force / torque data in the direction, fj This is the connection point between the j-th six-dimensional force sensor and the simulated immersion unit. x fj 、y fj and z fj These are the X, Y, and Z coordinates of the j-th six-dimensional sensor measurement point in a coordinate system with the centroid of the simulated immersion unit as the origin.

[0038] The linear superposition algorithm described in the single-direction stiffness detection and multi-direction stiffness detection of single-bundle tubes is as follows:

[0039] ;

[0040] F x -pi、F y -pi、T rz -pi、F z -pi、T rx -pi and T ry -piThese represent the values ​​measured by all six-dimensional force sensors and converted to the i-th tube bundle connection point in X, Y, and R directions, respectively. z Z, R x and R y Total force / total torque in the direction.

[0041] The force space matrix transformation algorithm described in the single-direction stiffness detection and multi-direction stiffness detection of the overall tube bundle is as follows:

[0042] ;

[0043] in, F x j、F y -j、T rz -j、F z -j、T rx -j and T ry -j These represent the corresponding X, Y, and R values ​​measured by the j-th six-dimensional force sensor, respectively. z Z, R x R y Force / torque data, F x -cog j 、F y -cog j 、T rz -cog j 、F z -cog j 、T x -cog j and T ry -cog j The values ​​measured by the j-th six-dimensional force sensor and converted to the center of mass of the simulated immersion unit at X, Y, R are respectively. z Z, R x and R y Force / torque in direction x fj 、y fj and z fjThese are the X, Y, and Z coordinates of the j-th six-dimensional sensor measurement point in a coordinate system with the centroid of the simulated immersion unit as the origin.

[0044] The matrix linear superposition algorithm used in the single-direction stiffness detection and multi-direction stiffness detection of the entire tube bundle is as follows:

[0045] ;

[0046] in, F x -cog、F y -cog、T rz -cog、F z -cog、T x -cog and T ry -cog The values ​​measured by all six-dimensional force sensors are converted to the center of mass of the simulated immersion unit in X, Y, and R directions. z Z, R x and R y Total force / total torque in the direction.

[0047] The beneficial effects of this invention are:

[0048] 1. After the processing of a single tube bundle or an integral tube bundle is completed, it is integrated into the detection device described in this invention. The tensile stiffness of the tube bundle is tested under simulated real working conditions to strengthen quality control and ensure that the immersion unit and its connecting tube bundles that are finally integrated into the whole machine meet the tensile force specifications, thereby ensuring the position and motion control accuracy of the immersion unit.

[0049] 2. After the overall tube bundle is integrated into the whole machine, when the pose and motion control accuracy of the immersion unit deteriorates, the tube bundle is disassembled and integrated into the detection device described in this invention, and the problem is diagnosed through detection data analysis.

[0050] 3. This invention is used to test the tensile stiffness of the tube bundle connecting the immersion unit in the immersion lithography machine under simulated real working conditions after plastic shaping and integration, so as to control the process quality of the tube bundle processing and integration. Attached Figure Description

[0051] Figure 1 This is a schematic diagram of the structure of a device for detecting the tensile stiffness of an immersion unit tube bundle according to the present invention;

[0052] Figure 2 This is a schematic diagram of the connection between the tube bundle and the immersion unit in Embodiment 1 of the present invention;

[0053] Figure 3This is a schematic diagram of the horizontal distribution of the centroid of the immersion unit, the action points of force sensors 1 / 2 / 3, and the connection points of tube bundle 1 / 2 in Embodiment 1 of the present invention.

[0054] Figure 4 This is a schematic diagram of the vertical distribution of the centroid of the immersion unit, the action points of force sensors 1 / 2 / 3, and the connection points of tube bundle 1 / 2 in Embodiment 1 of the present invention.

[0055] Figure 5 This is a schematic diagram of the connection between the tube bundle and the immersion unit in Embodiment 2 of the present invention;

[0056] Figure 6 This is a schematic diagram of the horizontal distribution of the centroid of the immersion unit, the action points of force sensors 1 / 2 / 3 / 4, and the connection points of tube bundle 1 / 2 / 3 / 4 / 5 in Embodiment 2 of the present invention.

[0057] Figure 7 This is a schematic diagram of the vertical distribution of the centroid of the immersion unit, the action points of force sensors 1 / 2 / 3 / 4, and the connection points of tube bundle 1 / 2 / 3 / 4 / 5 in Embodiment 2 of the present invention.

[0058] Figure 8 This is a flowchart illustrating a method for detecting the tensile stiffness of an immersion unit tube bundle according to the present invention.

[0059] In the diagram: 100, Simulated immersion unit; 200, Tube bundle to be tested; 201, Tube bundle connection assembly; 202, Tube bundle fixing assembly; 300, Six-dimensional force sensor; 310, Force sensor adapter; 400, Six-dimensional motion platform; 500, Optical vibration reduction platform; 600, Controller; 700, Center of mass of simulated immersion unit; 710, First traction point of the first tube bundle to be tested; 711, Second traction point of the second tube bundle to be tested; 712, Third traction point of the third tube bundle to be tested; 713, Fourth traction point of the fourth tube bundle to be tested; 714, Fifth traction point of the fifth tube bundle to be tested; 720, First connection and measurement point of the six-dimensional force sensor; 721, Second connection and measurement point of the six-dimensional force sensor; 722, Third connection and measurement point of the six-dimensional force sensor; 723, Fourth connection and measurement point of the six-dimensional force sensor; X si Let X be the X-axis coordinate of the connection point of the i-th tube bundle to be tested in the XYZ coordinate system with the centroid of the simulated immersion unit as the origin, and Y be the Y-axis coordinate. si Z represents the Y-axis coordinate of the i-th tube bundle connection point in the XYZ coordinate system with the centroid of the simulated immersion unit as the origin. si Let be the Z-axis coordinate value of the i-th tube bundle connection point under the XYZ coordinate system with the centroid of the simulated immersion unit as the origin, where the value of i ranges from 1 and 2 in Example 1, and from 1, 2, 3, 4, and 5 in Example 2. fjLet X be the X-axis coordinate of the j-th six-dimensional force sensor measurement point in the XYZ coordinate system with the center of mass of the simulated immersion unit as the origin, and Y be the Y-axis coordinate. fj Z represents the Y-axis coordinate of the j-th six-dimensional force sensor measurement point in the XYZ coordinate system with the center of mass of the simulated immersion unit as the origin. fj Let j be the Z-axis coordinate value of the j-th six-dimensional force sensor measurement point in the XYZ coordinate system with the centroid of the simulated immersion unit as the origin. The value of j is 1, 2, 3 in Example 1 and 1, 2, 3, 4 in Example 2. Detailed Implementation

[0060] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0061] like Figure 1 As shown, the device for detecting the tensile stiffness of the immersion unit tube bundle includes a simulated immersion unit 100, a tube bundle group to be tested, a six-dimensional detection platform, an optical vibration damping platform 500, and a controller 600. The optical vibration damping platform 500 is used to isolate vibration interference from the external environment. The six-dimensional detection platform is set and fixedly connected above the optical vibration damping platform 500, and the simulated immersion unit 100 is set and fixedly connected on the six-dimensional detection platform. The simulated immersion unit 100 has a polygonal layered structure. One or more groups of tube bundles to be tested are connected to the simulated immersion unit 100, enabling the detection device to detect the tensile stiffness of the tube bundles 200 contained in one or more groups of tube bundles to be tested. One end of each group of tube bundles to be tested is connected to one side of the simulated immersion unit 100, and the other end is connected to the outer periphery of the upper surface of the optical vibration damping platform 500. The controller 600 is connected inside the six-dimensional detection platform to control the six-dimensional detection platform and collect the displacement data and tensile force data of the tube bundle group to be tested in six degrees of freedom detected by the six-dimensional detection platform.

[0062] Each group of tube bundles to be tested includes a tube bundle 200 to be tested, a tube bundle connection component 201 to be tested, and a tube bundle fixing component 202 to be tested. The tube bundle to be tested consists of multiple tubes bundled together to form an integral tube bundle. The tube bundle 200 to be tested has a right-angle structure. The top end of one side of the tube bundle 200 to be tested is connected to one side of the simulated immersion unit 100 through the tube bundle connection component 201. The other side is in close contact with the side of the tube bundle fixing component 202 to make the tube bundle 200 to be tested relatively stationary and extend upward. The tube bundle fixing component 202 is a strip-shaped support. The tube bundle fixing component 202 is vertically set and fixedly connected to the outer periphery of the upper surface of the optical vibration reduction platform 500.

[0063] The connection and fixing method of a single-beam test tube bundle 200 or an overall multi-beam test tube bundle 200 on the tensile stiffness testing device is the same as or similar to its actual working condition on an immersion lithography machine.

[0064] The six-dimensional detection platform includes multiple six-dimensional force sensors 300, force sensor adapters 310, and a six-dimensional motion platform 400. The lower end of the six-dimensional motion platform 400 is fixedly connected to the optical vibration damping platform 500, and the upper end is fixedly connected to the bottom surface of each six-dimensional force sensor 300 through the force sensor adapters 310 and is powered on. Each six-dimensional force sensor 300 has a conical structure, and the tip of its upper end is fixedly connected to the simulated immersion unit 100. The controller 600 is electrically connected to each six-dimensional force sensor 300, and therefore also electrically connected to the six-dimensional motion platform 400, so that the controller 600 can simultaneously control each six-dimensional force sensor 300 and the six-dimensional motion platform and receive data. This data is used to detect the data generated by the simulated immersion unit 100 due to the installation of the tube bundle to be tested, and after filtering and conversion processing, tensile force data and displacement data are obtained.

[0065] The six-dimensional force sensor 300 is distributed circumferentially with the center of mass of the simulated immersion unit 100 as the center point. More specifically, as shown... Figure 3 and Figure 4 As shown, when there are three six-dimensional force sensors 300, the distribution points of the three six-dimensional force sensors 300 respectively form the three angles of an isosceles triangle; for example... Figure 6 As shown, when there are four six-dimensional force sensors 300, the four six-dimensional force sensors 300 respectively form the four corners of a regular quadrilateral; each six-dimensional force sensor 300 can operate in six degrees of freedom, i.e., X / Y / R. z / Z / R x / R y The force / torque exerted by the six-dimensional motion platform 400 on the simulated immersion unit 100 is measured in the direction; multiple six-dimensional force sensors 300 can measure the force / torque exerted by the six-dimensional motion platform 400 on the simulated immersion unit 100 at multiple points in space.

[0066] The six-dimensional motion platform 400 drives the simulation immersion unit 100 in X / Y / R z / Z / R x / R y The movement in six degrees of freedom generates micro-displacements; under the working condition of the tube bundle 200 to be tested being connected, it is used to simulate the pulling effect of the tube bundle 200 to be tested on the simulated immersion unit 100 under real working conditions.

[0067] The controller 600 is used to acquire measurement data from the six-dimensional force sensor 300 and displacement data from the six-dimensional motion platform 400. The controller 600 filters the acquired raw data to eliminate measurement noise. The controller 600 converts the acquired measurement data from the six-dimensional force sensor 300 to obtain the tension force / torque of a single bundle of tubes under test on the simulated immersion unit 100 and the tension force / torque of the entire bundle of tubes under test on the simulated immersion unit 100. The controller 600 processes the tension force / torque data and micro-displacement data to obtain the tension stiffness of a single bundle of tubes under test on the simulated immersion unit 100 and the tension stiffness of the entire bundle of tubes under test on the simulated immersion unit 100.

[0068] The detection method for the submerged unit tube bundle tensile stiffness detection device includes the following steps:

[0069] 1) Control the movement of the six-dimensional motion platform 400 so that the initial tension / torque at the six-dimensional force sensor 300 detected and calculated by the controller 600 is cleared to zero;

[0070] 2) Establish a coordinate system with the center of mass of the simulated immersion unit 100 as the origin, and set the six degrees of freedom in the X, Y, and Z directions of translation and the R direction of rotation. x R y R z Direction, where X, Y, and Z are mutually orthogonal translational coordinate axes, with the Z direction being perpendicular to the simulated silicon wafer 300, and R... x R y R z These are the rotation coordinate axes around the X, Y, and Z axes, respectively. A single tube bundle or a complete tube bundle (i.e., multiple tube bundles) to be tested is connected to the simulated immersion unit 100. The required testing sub-process is specified by determining the number of tube bundles 300 installed on the testing device. The testing sub-processes include single-direction stiffness testing of a single tube bundle, multi-direction stiffness testing of a single tube bundle, single-direction stiffness testing of a complete tube bundle, and multi-direction stiffness testing of a complete tube bundle.

[0071] 3) Complete the detection sub-process specified in step 2) to obtain the tensile stiffness of a single bundle of tubes to be tested or the entire bundle of tubes to be tested.

[0072] In step 1), the six-dimensional motion platform 400 is controlled to move, and the six-dimensional force sensor 300 detects the change in the tensile force / torque value based on the center of mass of the simulated immersion unit 100, and transmits the tensile force / torque data to the controller 600 until the tensile force / torque value based on the center of mass of the simulated immersion unit 100 detected and calculated by the controller 600 is displayed as zero.

[0073] In step 2), the specific method for detecting the unidirectional stiffness of a single-bundle tube bundle is as follows:

[0074] A1. The simulated immersion unit 100 is driven by a six-dimensional motion platform 400 in the X / Y / R coordinate system. z / Z / R x / R y Movement in any one of the six degrees of freedom causes the single bundle under test to exert a pulling force on the simulated immersion unit 100 in that direction;

[0075] A2. The controller 600 obtains tensile force / torque data in any direction at the measurement point through multiple six-dimensional force sensors 300, and obtains micro-displacement data at the center of mass of the simulated immersion unit 100 through the six-dimensional motion platform 400. The center of the connection surface connecting the single bundle to be tested tube and the tube connection component 201 is set as the connection point of the single bundle to be tested tube. The micro-displacement data at the center of mass of the simulated immersion unit 100 is converted into micro-displacement data in any direction at the connection point of the single bundle to be tested tube through the displacement space matrix conversion algorithm. The tensile force / torque data at the measurement point of each six-dimensional force sensor 300 is converted into tensile force / torque data in any direction at the connection point of the single bundle to be tested tube through the force space matrix conversion algorithm. The tensile force / torque data at the connection point of the single bundle to be tested tube of each six-dimensional force sensor 300 is summed into the total tensile force / torque data in any direction at the connection point of the single bundle to be tested tube through the linear superposition algorithm.

[0076] A3. The ratio of the total tensile force / torque data in any direction at the connection of a single bundle of tubes under test to the micro-displacement data in any direction at the connection of a single bundle of tubes under test is the tensile stiffness of the single bundle in one direction.

[0077] In step 2), the method for detecting the multi-directional stiffness of a single-bundle tube bundle is as follows:

[0078] B1. The simulated immersion unit 100 is driven by a six-dimensional motion platform 400 in the X / Y / R coordinate system. z / Z / R x / R y The six degrees of freedom of movement in multiple directions allows the single bundle under test to exert a pulling effect on the simulated immersion unit 100 in multiple directions;

[0079] B2. The controller 600 obtains tensile force / torque data in multiple directions at the measurement points through multiple six-dimensional force sensors 300, obtains micro-displacement data at the center of mass of the simulated immersion unit 100 through the six-dimensional motion platform 400, converts the micro-displacement data at the center of mass of the simulated immersion unit 100 into micro-displacement data in multiple directions at the connection of the single bundle to be tested through the displacement space matrix conversion algorithm, converts the tensile force / torque data at the measurement points of each six-dimensional force sensor 300 into tensile force / torque data in multiple directions at the connection of the single bundle to be tested through the force space matrix conversion algorithm, and sums the tensile force / torque data at the connection of the single bundle to be tested through the linear superposition algorithm to obtain the total tensile force / torque data in multiple directions at the connection of the single bundle to be tested through the six-dimensional force sensors 300.

[0080] B3. By calculating the ratio of the total tensile force / torque data in a specified direction at the connection point of a single bundle under test to the micro-displacement data in the corresponding direction at the connection point of the single bundle under test, that is, the total tensile force / torque data in a specified direction among the x / y / rz / z / rx / ry directions and the micro-displacement data in the same direction as the specified direction of the total tensile force / torque, since the ratio problem of the whole bundle in multiple directions is consistent, the tensile stiffness of the single bundle in multiple directions is obtained.

[0081] In step 2), the method for detecting the unidirectional stiffness of the overall tube bundle is as follows:

[0082] C1. The simulated immersion unit 100 is driven by a six-dimensional motion platform 400 in the X / Y / R coordinate system. z / Z / R x / R y Movement in any one of the six degrees of freedom causes the overall tube bundle under test to exert a pulling force on the simulated immersion unit 100 in that direction;

[0083] C2. The controller 600 obtains tensile force / torque data in any direction at the measurement point through multiple six-dimensional force sensors 300, obtains micro-displacement data at the center of mass of the simulated immersion unit 100 through the six-dimensional motion platform 400, converts the tensile force / torque data at the measurement point of each six-dimensional force sensor 300 into tensile force / torque data in any direction at the center of mass of the simulated immersion unit 100 through the force space matrix transformation algorithm, and sums the tensile force / torque data of each six-dimensional force sensor 300 at the center of mass of the simulated immersion unit 100 into the total tensile force / torque data in any direction at the center of mass of the simulated immersion unit 100 through the linear superposition algorithm.

[0084] C3. By calculating the ratio of the total tensile force / torque data in any direction at the center of mass of the simulated immersion unit 100 to the micro-displacement data in any direction at the center of mass of the simulated immersion unit 100, the tensile stiffness of the entire tube bundle in one direction is obtained.

[0085] In step 2), the method for detecting the multi-directional stiffness of the overall tube bundle is as follows:

[0086] D1. Drive the simulated immersion unit 100 in the coordinate system via the six-dimensional motion platform 400 in the X / Y / R coordinate system. z / Z / R x / R y The six degrees of freedom of movement in multiple directions causes the overall tube bundle under test to exert tension on the simulated immersion unit 100 in multiple directions;

[0087] D2. The controller 600 obtains tensile force / torque data in multiple directions at the measurement points through multiple six-dimensional force sensors 300, obtains micro-displacement data at the center of mass of the simulated immersion unit 100 through the six-dimensional motion platform 400, converts the tensile force / torque data at the measurement points of each six-dimensional force sensor 300 into tensile force / torque data in multiple directions at the center of mass of the simulated immersion unit 100 through the force space matrix transformation algorithm, and sums the tensile force / torque data at the center of mass of the simulated immersion unit 100 from each six-dimensional force sensor 300 into total tensile force / torque data in multiple directions at the center of mass of the simulated immersion unit 100 through the matrix linear superposition algorithm.

[0088] D3. By calculating the ratio of the total tensile force / torque data in a specified direction at the center of mass of the simulated immersion unit 100 to the micro-displacement in the corresponding direction at the center of mass of the simulated immersion unit 100, the tensile stiffness of the overall tube bundle in multiple directions is obtained.

[0089] Micro-displacement detection method for a single-beam test tube bundle:

[0090] (a) Connect the two ends of the single bundle to be tested to the bundle to be tested connection assembly 201 and the bundle to be tested fixing assembly 202 of the testing device respectively, and connect it to the simulated immersion unit 100 through the bundle to be tested connection assembly 201.

[0091] (b) Start controller 600 and drive simulation immersion unit 100 based on the center of mass in X / Y / R z / Z / R x / R y Movement in one or more directions with six degrees of freedom;

[0092] (c) Using the displacement space transformation matrix algorithm shown below, the micro-displacement at the centroid of the simulated immersion unit 100 is converted into the micro-displacement at the connection of a certain tube bundle to be detected.

[0093] The displacement space matrix transformation algorithm is as follows:

[0094] ;

[0095] Where i is the number of the tube bundle to be tested, and the center of the connection surface between the i-th tube bundle to be tested and the i-th tube bundle connection assembly 201 is set as the connection point of the i-th tube bundle to be tested. i Let si be the i-th bundle to be tested, and si be the connection point between the i-th bundle to be tested and the connection assembly 201. ΔX_cog, ΔY_cog, and ΔR z _cog, ΔZ_cog, ΔR x _cog、ΔR y _cog represents the micro-displacement data in the X / Y / Rz / Z / Rx / Ry directions at the centroid of the simulated submerged element, ΔX_p i ΔY_p i ΔR z _p i ΔZ_p i ΔR x _p i ΔR y _p i Let represent the micro-displacement data of the i-th bundle to be tested in the X / Y / Rz / Z / Rx / Ry directions relative to the bundle connection point. x si 、y si and z si These are the X, Y, and Z coordinates of the connection point of the i-th bundle to be tested in a coordinate system with the centroid of the simulated immersion unit as the origin.

[0096] Methods for detecting the tension / torque of a single-bundle tube bundle:

[0097] (a) Connect the two ends of the single bundle to be tested to the bundle to be tested connection assembly 201 and the bundle to be tested fixing assembly 202 of the testing device respectively, and connect it to the simulated immersion unit 100 through the bundle to be tested connection assembly 201.

[0098] (b) Start the controller 600, collect data from multiple six-dimensional force sensors and perform filtering processing;

[0099] (c) Using the force space matrix transformation algorithm shown below, the tensile force / torque measured by a single six-dimensional force sensor is first converted to the tensile force / torque at the centroid of the simulated immersion unit, and then converted to the tensile force / torque at the connection point of a certain tube bundle to be tested;

[0100] (d) The tensile force / torque at a certain tube bundle connection point obtained by conversion is linearly superimposed to obtain the total tensile force / torque at the connection point of the tube bundle to be tested.

[0101] The force space matrix transformation algorithm described in the single-direction stiffness detection and multi-direction stiffness detection of single-bundle tubes is as follows:

[0102] ;

[0103] Where j is the number of the six-dimensional force sensor 300, n is the number of the six-dimensional force sensors 300, and p ij The data detected by the i-th tube bundle under test on the j-th six-dimensional force sensor 300 is given. x -j、 y -j、 rz -j、 z -j、 rx -j and ry -j represent the corresponding X, Y, and R values ​​measured by the j-th six-dimensional force sensor 300, respectively. z Z, R x and R y The data above, F x j、F y -j、T rz -j、F z -j、T rx -j and T ry -j These represent the corresponding X, Y, and R values ​​measured by the j-th six-dimensional force sensor 300, respectively. z Z, R x R y Force / torque data, F x -p ij 、 F y -p ij 、T rz -p ij 、F z -p ij 、T rx -p ij and Try -p ij These represent the values ​​measured by the j-th six-dimensional force sensor 300 and converted to the i-th tube bundle connection point in X, Y, and R directions, respectively. z Z, R x and R y Force / torque data in the direction, fj For the connection point 100 between the j-th six-dimensional force sensor 300 and the simulated immersion unit, x fj 、y fj and z fj These are the X, Y, and Z axis coordinates of the j-th six-dimensional sensor 300 measurement point in a coordinate system with the centroid of the simulated immersion unit 100 as the origin; for example... Figure 3 , Figure 4 , Figure 6 and Figure 7 As shown, the detection points are the following points: the first test tube bundle 1 pull point 710, the second test tube bundle pull point 711, the third test tube bundle pull point 712, the fourth test tube bundle pull point 713, the fifth test tube bundle pull point 714, the first six-dimensional force sensor connection and measurement point 720, the second six-dimensional force sensor connection and measurement point 721, the third six-dimensional force sensor connection and measurement point 722, and the fourth six-dimensional force sensor connection and measurement point 723, all located at the centroid 700 of the simulated immersion unit.

[0104] The linear superposition algorithm described in the single-direction stiffness detection and multi-direction stiffness detection of single-bundle tubes is as follows:

[0105] ;

[0106] in, F x -pi、F y -pi、T rz -pi、F z -pi、T rx -pi and T ry -pi These represent the values ​​measured by all six-dimensional force sensors (300) and converted to the i-th tube bundle connection at X, Y, R. z Z, R x and R y Total force / total torque in the direction.

[0107] Micro-displacement detection method for integral tube bundles:

[0108] (a) Connect both ends of all tube bundles 200 to be tested to the tube bundle connection assembly 201 and the tube bundle fixing assembly 202 of the testing device respectively, and connect them to the simulated immersion unit 100 through the tube bundle connection assembly 201.

[0109] (b) Start controller 600 and drive simulation immersion unit 100 based on the center of mass in X / Y / R z / Z / R x / R y The displacement of the six-degree-of-freedom movement in one or more directions is the displacement of the entire tube bundle in the X / Y / R directions. z / Z / R x / R y Micro-displacements in a single or multiple directions with six degrees of freedom.

[0110] Method for testing the tensile force of integral tubular bundles:

[0111] (a) Connect the two ends of the single bundle to be tested to the bundle to be tested connection assembly 201 and the bundle to be tested fixing assembly 202 of the testing device respectively, and connect it to the simulated immersion unit 100 through the bundle to be tested connection assembly 201.

[0112] (b) Start the controller 600, collect data from multiple six-dimensional force sensors 300 and perform filtering processing;

[0113] (c) Using the force space matrix transformation algorithm shown below, the tension force / torque measured by a single six-dimensional force sensor is first converted to the tension force / torque at the center of mass of the simulated immersion unit 9100; (d) The tension forces / torques obtained by the conversion at the center of mass of the simulated immersion unit are linearly superimposed to obtain the total tension force / torque of the entire tube bundle at the center of mass of the simulated immersion unit.

[0114] The force transformation matrix used in the unidirectional stiffness testing and multidirectional stiffness testing of the overall tube bundle is as follows:

[0115] ;

[0116] in, F x -cog j 、F y -cog j 、T rz -cog j 、F z -cog j、T x -cog j and T ry -cog j The values ​​measured by the j-th six-dimensional force sensor and converted to the center of mass of the simulated immersion unit at X, Y, R are respectively. z Z, R x and R y Force / torque in a direction.

[0117] The matrix linear superposition algorithm used in the single-direction stiffness detection and multi-direction stiffness detection of the entire tube bundle is as follows:

[0118] ;

[0119] in, F x -cog、F y -cog、T rz -cog、F z -cog、T x -cog and T ry -cog The values ​​measured by all six-dimensional force sensors are converted to the center of mass of the simulated immersion unit in X, Y, and R directions. z Z, R x and R y Total force / total torque in the direction.

[0120] This invention connects and fixes the single or multiple tube bundles to be tested to an immersion unit tube bundle tensile stiffness testing device, and drives the simulated immersion unit in X / Y / R directions via a six-dimensional motion platform. z / Z / R x / R y Motion in six degrees of freedom is used to simulate the pulling force / torque of a single or multiple tube bundles on a simulated immersion unit, with X / Y / R values ​​measured by multiple six-dimensional force sensors. z / Z / R x / R y The tension / torque data in six degrees of freedom are collected, filtered, and converted by the controller to calculate the tension stiffness of a single tube bundle on the simulated immersion unit and the tension stiffness of the entire tube bundle on the simulated immersion unit. Example 1

[0121] Embodiment 1 of the present invention employs a configuration of 2 tube bundles and 3 six-dimensional force sensors.

[0122] like Figure 1 and Figure 2 As shown, the tube bundle to be tested 200 is connected to the simulated immersion unit 100 through the tube bundle to be tested connecting assembly 201 at one end, and the other end is in close contact with the tube bundle to be tested fixing assembly 202. The second tube bundle to be tested is connected to the simulated immersion unit 100 through the second tube bundle to be tested connecting assembly at one end, and the other end is fixed to the second tube bundle to be tested fixing assembly.

[0123] like Figure 1 As shown, one end of each of the multiple six-dimensional force sensors 300 is fixed to the lower surface of the simulated immersion unit 100, and the other end is fixed to the upper surface of the six-dimensional motion platform 400 via a force sensor connection assembly 310. Each six-dimensional force sensor 300 can perform X / Y / R... z / Z / R x / R y The force / torque exerted by the six-dimensional motion platform 400 on the simulated immersion unit 100 is measured in the X / Y / R directions. The six-dimensional motion platform 400 drives the simulated immersion unit 100 in the X / Y / R directions. z / Z / R x / R y Motion in six degrees of freedom produces micro-displacements.

[0124] like Figure 1 As shown, the simulated immersion unit 100, the tube bundle fixing assembly 202, multiple six-dimensional force sensors 300, the force sensor connection assembly 310, the six-dimensional motion platform 400, and the tube bundle 200 under test are all placed on the optical vibration damping platform 500. The optical vibration damping platform 500 is used to isolate vibration interference from the external environment.

[0125] like Figure 1 As shown, the controller 600 is used to collect measurement data from multiple six-dimensional force sensors 300 and displacement data from the six-dimensional motion platform 400. The controller 600 filters the collected raw data to eliminate measurement noise. The controller 600 converts the collected measurement data from the six-dimensional force sensors 300 to obtain the tension force / torque of the single-bundle tube bundle on the simulated immersion unit 100 and the tension force / torque of the entire tube bundle on the simulated immersion unit 100. The controller 600 processes the tension force / torque data and micro-displacement data to obtain the tension stiffness of the single-bundle tube bundle on the simulated immersion unit 100 and the tension stiffness of the entire tube bundle on the simulated immersion unit 100.

[0126] like Figure 8 As shown, the detection method of the pollution detection device of the present invention includes the following steps:

[0127] S1. Connecting and fixing the tube bundles to be tested. The spatial layout relationship between the first and second tube bundles to be tested and the simulated immersion unit 100 is shown in the figure below. Figure 2 As shown.

[0128] Initial tension / torque is reset to zero. After the tube bundle to be tested is connected and fixed, the controller 600 is started. Through the movement of the six-dimensional motion platform 400, the tension / torque calculated by the controller 600 based on the center of mass of the simulated immersion unit 100 is displayed as zero.

[0129] S2. Specify the required testing sub-processes. The testing sub-processes provided by this invention include: single-direction stiffness testing of a single-bundle tube bundle, multi-direction stiffness testing of a single-bundle tube bundle, single-direction stiffness testing of an entire tube bundle, and multi-direction stiffness testing of an entire tube bundle.

[0130] S3. Single-beam tube bundle unidirectional stiffness testing process. A six-dimensional motion platform 400 drives a simulated immersion unit 100 in X / Y / R... z / Z / R x / R y The specified direction is used for movement according to a set value. At this time, the single-beam tube i will generate a tensile force / torque on the simulated immersion unit 100. The controller 600 collects the X / Y / R values ​​measured by all six-dimensional force sensors 300. z / Z / R x / R y The controller 600 collects force / torque data in the specified direction and micro-displacement data at the centroid of the simulated immersion unit 100, and filters all the collected data. Using the spatial matrix transformation algorithm, the controller 600 converts the force / torque data in the specified direction measured by all six-dimensional force sensors 200 to the force / torque data in the specified direction at the connection of the second tube bundle to be detected. Using the spatial matrix transformation algorithm, the controller 600 calculates the total force / torque of the i-th tube bundle at the connection in the specified direction. Using the calculation formula shown in equation (1), the controller 600 converts the micro-displacement data in the specified direction at the centroid of the simulated immersion unit 100 to the micro-displacement data in the specified direction at the connection of tube bundle i. The X / Y / Z axis coordinates of the i-th tube bundle connection point under test in a coordinate system with the centroid of the simulated immersion unit 100 as the origin, and the X / Y / Z axis coordinates of the j-th six-dimensional sensor measurement point in a coordinate system with the centroid of the simulated immersion unit as the origin, are as follows: Figure 3 and Figure 4 As shown. The controller 600 calculates the ratio of the total force / torque of the i-th tube bundle in a specified direction at the connection point of the i-th tube bundle to the micro-displacement in the specified direction at the connection point of the i-th tube bundle, which is the tensile stiffness data of a single tube bundle in the corresponding single direction.

[0131] S4. Single-bundle tube bundle multi-directional stiffness testing process. A six-dimensional motion platform 400 drives a simulated immersion unit 100 in X / Y / R... z / Z / R x / R y The system is designed to move in multiple directions according to set values. At this time, the single-beam tube will generate tensile force / torque on the simulated immersion unit 100. The controller 600 collects the X / Y / R values ​​measured by all six-dimensional force sensors 300. z / Z / R x / R y The controller 600 collects force / torque data in various specified directions and micro-displacement data at the centroid of the simulated immersion unit 100, and filters all the collected data. Using the spatial transformation matrix algorithm, the controller 600 converts the force / torque data measured by all six-dimensional force sensors 300 to force / torque data in various specified directions at the connection point of the i-th tube bundle. Using the spatial transformation matrix algorithm, the controller 600 calculates the total force / torque of the i-th tube bundle in various specified directions at the connection point. Using the spatial transformation matrix algorithm, the controller 600 converts the micro-displacement data at the centroid of the simulated immersion unit 100 to micro-displacement data in various specified directions at the connection point of the i-th tube bundle. The controller 600 then calculates the ratio of the total force / torque of the i-th tube bundle in various directions at the connection point to the micro-displacement in various specified directions at the connection point, which is the tensile stiffness data of the single tube bundle i in various specified directions.

[0132] S5. Overall tube bundle unidirectional stiffness detection. A six-dimensional motion platform 400 drives a simulated immersion unit 100 in X / Y / R... z / Z / R x / R y The system moves in a specified direction according to a set value. At this time, the entire tube bundle will generate a tensile force / torque on the simulated immersion unit 100. The controller 600 collects the X / Y / R values ​​measured by all six-dimensional force sensors 300. z / Z / R x / R y The controller 600 collects force / torque data in a specified direction and micro-displacement data at the center of mass of the simulated immersion unit 100, and filters all the collected data. Using the force space matrix transformation algorithm, the controller 600 converts the force / torque data in the specified direction measured by all six-dimensional force sensors to the force / torque data in the specified direction at the center of mass of the simulated immersion unit 100. Using the linear superposition algorithm, the controller 600 calculates the total force / torque of the entire tube bundle in the specified direction at the center of mass of the simulated immersion unit 100. The controller 600 then calculates the ratio of the total force / torque of the entire tube bundle in the specified direction at the center of mass of the simulated immersion unit 100 to the micro-displacement in the specified direction at the center of mass of the simulated immersion unit 100, which is the tensile stiffness data of the entire tube bundle in the corresponding single direction.

[0133] S6. Multi-directional stiffness detection of the overall tube bundle. A six-dimensional motion platform 400 drives a simulated immersion unit 100 in X / Y / R directions. z / Z / R x / R y The system is designed to move in multiple directions according to set values. At this time, the entire tube bundle will generate tensile force / torque on the simulated immersion unit 100. The controller 600 collects the X / Y / R values ​​measured by all six-dimensional force sensors 300. z / Z / R x / R y The controller 600 collects force / torque data in various specified directions from all six-dimensional force sensors, as well as micro-displacement data in various specified directions at the center of mass of the simulated immersion unit 100, and filters all the collected data. Using the force space matrix transformation algorithm, the controller 600 converts the force / torque data in various specified directions from all six-dimensional force sensors to force / torque data in various specified directions at the center of mass of the simulated immersion unit 100. Using a matrix linear superposition algorithm, the controller 600 calculates the total force / torque of the entire tube bundle in various specified directions at the center of mass of the simulated immersion unit 100. Finally, the controller 600 calculates the ratio of the total force / torque of the entire tube bundle in various specified directions at the center of mass of the simulated immersion unit 100 to the micro-displacement in various specified directions at the center of mass of the simulated immersion unit 100; this ratio represents the tensile stiffness data of the entire tube bundle in various specified directions. Example 2

[0134] Embodiment 2 of the present invention employs a configuration of 5 tube bundles and 4 six-dimensional force sensors.

[0135] In this configuration, the spatial arrangement of the first, second, third, fourth, and fifth tube bundles to be tested and the simulated immersion unit 100 is shown in the diagram below. Figure 5 As shown. The X / Y / Z axis coordinates of the i-th tube bundle connection point under test in a coordinate system with the centroid of the simulated immersion unit 100 as the origin, and the X / Y / Z axis coordinates of the j-th six-dimensional sensor measurement point in a coordinate system with the centroid of the simulated immersion unit as the origin, are shown below. Figure 6 and Figure 7 As shown. Other detection devices and methods are the same as in Example 1. Wherein, X si Let X be the X-axis coordinate of the connection point of the i-th tube bundle to be tested in the XYZ coordinate system with the centroid of the simulated immersion unit as the origin, and Y be the Y-axis coordinate. si Z represents the Y-axis coordinate of the i-th tube bundle connection point in the XYZ coordinate system with the centroid of the simulated immersion unit as the origin. siLet be the Z-axis coordinate value of the i-th tube bundle connection point under the XYZ coordinate system with the centroid of the simulated immersion unit as the origin, where the value of i ranges from 1 and 2 in Example 1, and from 1, 2, 3, 4, and 5 in Example 2. fj Let X be the X-axis coordinate of the j-th six-dimensional force sensor measurement point in the XYZ coordinate system with the center of mass of the simulated immersion unit as the origin, and Y be the Y-axis coordinate. fj Z represents the Y-axis coordinate of the j-th six-dimensional force sensor measurement point in the XYZ coordinate system with the center of mass of the simulated immersion unit as the origin. fj Let be the Z-axis coordinate value of the j-th six-dimensional force sensor measurement point in the XYZ coordinate system with the center of mass of the simulated immersion unit as the origin.

[0136] Those skilled in the art can readily make various changes and modifications based on the provided textual description, drawings, and claims, without departing from the spirit and scope of the invention as defined by the claims. Any modifications or equivalent variations made to the above embodiments based on the technical concept and essence of the invention fall within the protection scope defined by the claims of this invention.

Claims

1. A device for detecting the tensile stiffness of an immersed unit tube bundle, characterized in that: The device includes a simulated immersion unit (100), a tube bundle group to be tested, a six-dimensional detection platform, an optical vibration damping platform (500), and a controller (600). The six-dimensional detection platform is set and fixedly connected above the optical vibration damping platform (500), and the simulated immersion unit (100) is set and fixedly connected to the six-dimensional detection platform. The simulated immersion unit (100) is a polygonal layered structure. One or more groups of tube bundles to be tested are connected to the simulated immersion unit (100), so that the detection device can detect the tensile stiffness of the tube bundles (200) to be tested contained in one or more groups of tube bundles to be tested. One end of each group of tube bundles to be tested is connected to one side of the simulated immersion unit (100), and the other end is connected to the outer periphery of the upper surface of the optical vibration damping platform (500). The controller (600) is connected in the six-dimensional detection platform to control the six-dimensional detection platform and collect the displacement data and tensile force data of the tube bundle group to be tested in six degrees of freedom detected by the six-dimensional detection platform. Each group of tube bundles to be tested includes a tube bundle to be tested (200), a tube bundle connection component (201), and a tube bundle fixing component (202). The tube bundle to be tested (200) has a right-angle structure. The top end of one side of the tube bundle to be tested (200) is connected to one side of the simulated immersion unit (100) through the tube bundle connection component (201), and the other side is in close contact with the side of the tube bundle fixing component (202) and extends upward. The tube bundle fixing component (202) is a strip-shaped support. The tube bundle fixing component (202) is vertically set and fixedly connected to the outer periphery of the upper surface of the optical vibration damping platform (500). The six-dimensional detection platform includes multiple six-dimensional force sensors (300), force sensor adapters (310), and a six-dimensional motion platform (400). The lower end of the six-dimensional motion platform (400) is fixedly connected to the optical vibration damping platform (500), and the upper end is fixedly connected to the bottom surface of each six-dimensional force sensor (300) through the force sensor adapters (310). The upper surface of each six-dimensional force sensor (300) is fixedly connected to the simulated immersion unit (100). The controller (600) is electrically connected to the six-dimensional motion platform (400) and each six-dimensional force sensor (300) respectively, and is used to control the six-dimensional motion platform (400) to move along a specified trajectory, and to detect the tensile force data and displacement data generated by the simulated immersion unit (100) due to the installation of the tube bundle to be tested.

2. The device for detecting the tensile stiffness of an immersion unit tube bundle according to claim 1, characterized in that: The six-dimensional force sensor (300) is distributed circumferentially with the center of mass of the simulated immersion unit (100) as the point.

3. A detection method for the device used to detect the tensile stiffness of an immersion unit tube bundle as described in any one of claims 1-2, characterized in that: The method includes the following steps: 1) Control the movement of the six-dimensional motion platform (400) so that the initial tension / torque at the six-dimensional force sensor (300) detected and calculated by the controller (600) is cleared to zero; 2) Connect a single tube bundle to be tested or an entire tube bundle to be tested to the simulated immersion unit (100). By determining the number of tube bundles (300) to be tested installed on the testing device, specify the required testing sub-process. The testing sub-process includes single-direction stiffness testing of a single tube bundle, multi-direction stiffness testing of a single tube bundle, single-direction stiffness testing of an entire tube bundle, and multi-direction stiffness testing of an entire tube bundle. 3) Complete the detection sub-process specified in step 2) to obtain the tensile stiffness of a single bundle of tubes to be tested or the entire bundle of tubes to be tested.

4. The detection method of the immersion unit tube bundle tension stiffness detection device according to claim 3, characterized in that: In step 2), the method for detecting the unidirectional stiffness of a single-bundle tube bundle is as follows: A1. The simulated immersion unit (100) is driven by the six-dimensional motion platform (400) in the X / Y / R coordinate system. z / Z / R x / R y Movement in any one of the six degrees of freedom causes the single bundle of tubes under test to exert a pulling force on the simulated immersion unit (100); A2. The controller (600) obtains the tensile force / torque data in any direction at the measurement point through multiple six-dimensional force sensors (300), obtains the micro-displacement data at the center of mass of the simulated immersion unit (100) through the six-dimensional motion platform (400), sets the center of the connection surface connecting the single bundle to be tested tube bundle and the tube bundle connection component (201) to be the connection point of the single bundle to be tested tube bundle, converts the micro-displacement data at the center of mass of the simulated immersion unit (100) into micro-displacement data in any direction at the connection point of the single bundle to be tested tube bundle through the displacement space matrix conversion algorithm, converts the tensile force / torque data at the measurement point of each six-dimensional force sensor (300) into tensile force / torque data in any direction at the connection point of the single bundle to be tested tube bundle through the force space matrix conversion algorithm, and sums the tensile force / torque data at the connection point of the single bundle to be tested tube bundle of each six-dimensional force sensor (300) into the total tensile force / torque data in any direction at the connection point of the single bundle to be tested tube bundle through the linear superposition algorithm. A3. The ratio of the total tensile force / torque data in any direction at the connection of a single bundle of tubes under test to the micro-displacement data in any direction at the connection of a single bundle of tubes under test is the tensile stiffness of the single bundle in one direction.

5. The detection method of the immersion unit tube bundle tensile stiffness detection device according to claim 3, characterized in that: In step 2), the method for detecting the multi-directional stiffness of a single-bundle tube bundle is specifically as follows: B1. The simulated immersion unit (100) is driven by the six-dimensional motion platform (400) in the X / Y / R coordinate system. z / Z / R x / R y The movement in multiple directions with six degrees of freedom causes the single bundle under test to exert a pulling effect on the simulated immersion unit (100); B2. The controller (600) obtains tensile force / torque data in multiple directions at the measurement point through multiple six-dimensional force sensors (300), obtains micro-displacement data at the center of mass of the simulated immersion unit (100) through the six-dimensional motion platform (400), converts the micro-displacement data at the center of mass of the simulated immersion unit (100) into micro-displacement data in multiple directions at the connection of the single bundle to be tested through the displacement space matrix conversion algorithm, converts the tensile force / torque data at the measurement point of each six-dimensional force sensor (300) into tensile force / torque data in multiple directions at the connection of the single bundle to be tested through the force space matrix conversion algorithm, and sums the tensile force / torque data at the connection of the single bundle to be tested by each six-dimensional force sensor (300) into the total tensile force / torque data in multiple directions at the connection of the single bundle to be tested through the linear superposition algorithm. B3. By calculating the ratio of the total tension / torque data in a specified direction at the connection point of a single bundle to be tested to the micro-displacement data in the corresponding direction at the connection point of the single bundle to be tested, the multi-directional tension stiffness of the single bundle is obtained.

6. The detection method of the immersion unit tube bundle tension stiffness detection device according to claim 3, characterized in that: In step 2), the method for detecting the unidirectional stiffness of the overall tube bundle is as follows: C1. The simulated immersion unit (100) is driven by the six-dimensional motion platform (400) in the X / Y / R coordinate system. z / Z / R x / R y Movement in any one of the six degrees of freedom causes the overall tube bundle under test to exert a pulling force on the simulated immersion unit (100); C2. The controller (600) obtains the tensile force / torque data in any direction at the measurement point through multiple six-dimensional force sensors (300), obtains the micro-displacement data at the center of mass of the simulated immersion unit (100) through the six-dimensional motion platform (400), converts the tensile force / torque data at the measurement point of each six-dimensional force sensor (300) into tensile force / torque data in any direction at the center of mass of the simulated immersion unit (100) through the force space matrix conversion algorithm, and sums the tensile force / torque data of each six-dimensional force sensor (300) at the center of mass of the simulated immersion unit (100) into the total tensile force / torque data in any direction at the center of mass of the simulated immersion unit (100) through the linear superposition algorithm. C3. The tensile stiffness of the entire tube bundle in one direction is obtained by calculating the ratio of the total tensile force / torque data in any direction at the centroid of the simulated immersion unit (100) to the micro-displacement data in any direction at the centroid of the simulated immersion unit (100).

7. The detection method of the immersion unit tube bundle tension stiffness detection device according to claim 3, characterized in that: In step 2), the method for detecting the multi-directional stiffness of the overall tube bundle is as follows: D1. Drive the simulated immersion unit (100) in the coordinate system X / Y / R by the six-dimensional motion platform (400). z / Z / R x / R y The movement in multiple directions with six degrees of freedom causes the overall tube bundle under test to exert a pull on the simulated immersion unit (100); D2. The controller (600) obtains tensile force / torque data in multiple directions at the measurement point through multiple six-dimensional force sensors (300), obtains micro-displacement data at the center of mass of the simulated immersion unit (100) through a six-dimensional motion platform (400), converts the tensile force / torque data at the measurement point of each six-dimensional force sensor (300) into tensile force / torque data in multiple directions at the center of mass of the simulated immersion unit (100) through a force space matrix conversion algorithm, and sums the tensile force / torque data at the center of mass of the simulated immersion unit (100) of each six-dimensional force sensor (300) into total tensile force / torque data in multiple directions at the center of mass of the simulated immersion unit (100) through a linear superposition algorithm. D3. By calculating the ratio of the total tensile force / torque data in a specified direction at the centroid of the simulated immersion unit (100) to the micro-displacement in the corresponding direction at the centroid of the simulated immersion unit (100), the tensile stiffness of the overall tube bundle in multiple directions is obtained.

8. The detection method of the immersion unit tube bundle tension stiffness detection device according to any one of claims 4-7, characterized in that: The displacement space matrix transformation algorithm is as follows: ； Where i is the number of the tube bundle to be tested, and the center of the connection surface between the i-th tube bundle to be tested and the i-th tube bundle connection assembly (201) is set as the connection point of the i-th tube bundle to be tested, p i Let si be the i-th bundle to be tested, and si be the connection point between the i-th bundle to be tested and the connection assembly (201) of the bundle to be tested. ΔX_cog, ΔY_cog, ΔR z _cog, ΔZ_cog, ΔR x _cog、ΔR y _cog represents the micro-displacement data in the X / Y / Rz / Z / Rx / Ry directions at the centroid of the simulated submerged element, ΔX_p i ΔY_p i ΔR z _p i ΔZ_p i ΔR x _p i ΔR y _p i Let represent the micro-displacement data of the i-th bundle to be tested in the X / Y / Rz / Z / Rx / Ry directions relative to the bundle connection point. x si 、y si and z si These are the X, Y, and Z coordinates of the connection point of the i-th bundle to be tested in a coordinate system with the centroid of the simulated immersion unit as the origin; The force space matrix transformation algorithm described in the single-direction stiffness detection and multi-direction stiffness detection of single-bundle tubes is as follows: ； Where j is the number of the six-dimensional force sensor (300), n is the number of the six-dimensional force sensors (300), and p ij The data detected by the i-th tube bundle under test on the j-th six-dimensional force sensor (300) is as follows: x -j、 y -j、 rz -j、 z -j、 rx -j and ry -j represent the corresponding X, Y, and R values ​​measured by the j-th six-dimensional force sensor (300). z Z, R x and R y The data above, F x j、F y -j、T rz -j、F z -j、 T rx -j and T ry -j These represent the corresponding X, Y, and R values ​​measured by the j-th six-dimensional force sensor (300), respectively. z Z, R x R y Force / torque data, F x -p ij 、F y -p ij 、T rz -p ij 、F z -p ij 、T rx -p ij and T ry -p ij These represent the values ​​measured by the j-th six-dimensional force sensor (300) and converted to the i-th tube bundle connection at X, Y, and R, respectively. z Z, R x and R y Force / torque data in the direction, fj Let j be the connection point (100) between the j-th six-dimensional force sensor (300) and the simulated immersion unit. x fj 、y fj and z fj These are the X, Y, and Z axis coordinates of the j-th six-dimensional sensor (300) measurement point in a coordinate system with the centroid of the simulated immersion unit (100) as the origin; The linear superposition algorithm described in the single-direction stiffness detection and multi-direction stiffness detection of single-bundle tubes is as follows: ； in, F x -pi、F y -pi、T rz -pi、F z -pi、T rx -pi and T ry -pi These represent the values ​​measured by all six-dimensional force sensors (300) and converted to the i-th tube bundle connection at X, Y, R. z Z, R x and R y Total force / total torque in the direction; The force space matrix transformation algorithm described in the single-direction stiffness detection and multi-direction stiffness detection of the overall tube bundle is as follows: ； in, F x j、F y -j、T rz -j、F z -j、T rx -j and T ry -j These represent the corresponding X, Y, and R values ​​measured by the j-th six-dimensional force sensor (300), respectively. z Z, R x R y Force / torque data, F x -cog j 、F y -cog j 、T rz -cog j 、F z -cog j 、T x -cog j and T ry -cog j The values ​​measured by the j-th six-dimensional force sensor (300) and converted to the center of mass of the simulated immersion unit at X, Y, R are respectively. z Z, R x and R y Force / torque in direction x fj 、y fj and z fj These are the X, Y, and Z axis coordinates of the j-th six-dimensional sensor (300) measurement point in a coordinate system with the centroid of the simulated immersion unit (100) as the origin; The linear superposition algorithm described in the single-direction stiffness detection and multi-direction stiffness detection of the entire tube bundle is as follows: ； in, F x -cog、F y -cog、T rz -cog、F z -cog、T x -cog and T ry -cog The values ​​measured by all six-dimensional force sensors are converted to the center of mass of the simulated immersion unit at X, Y, and R. z Z, R x and R y Total force / total torque in the direction.

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